WO2015052998A1 - Stocker and method for inserting and removing pull-out shelf unit from stocker - Google Patents

Stocker and method for inserting and removing pull-out shelf unit from stocker Download PDF

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Publication number
WO2015052998A1
WO2015052998A1 PCT/JP2014/072030 JP2014072030W WO2015052998A1 WO 2015052998 A1 WO2015052998 A1 WO 2015052998A1 JP 2014072030 W JP2014072030 W JP 2014072030W WO 2015052998 A1 WO2015052998 A1 WO 2015052998A1
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WIPO (PCT)
Prior art keywords
stocker
shelf unit
shelf
drawer
drawer shelf
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PCT/JP2014/072030
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French (fr)
Japanese (ja)
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玄己 小合
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村田機械株式会社
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Priority to JP2015541470A priority Critical patent/JP6136082B2/en
Publication of WO2015052998A1 publication Critical patent/WO2015052998A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0407—Storage devices mechanical using stacker cranes

Definitions

  • This invention relates to a stocker and a method for taking out and taking out a drawer shelf unit from the stocker, and more particularly to making it possible to stably put in and out a drawer shelf unit on which a heavy object is placed.
  • Patent Document 1 JP39009273 proposes that a part of the shelf of the stocker is rotated to be a door that can be opened and closed. .
  • the door can be opened by providing a shelf on the door to store articles and rotating the door around the hinge.
  • Such doors are not suitable for storing heavy items.
  • An object of the present invention is to provide a stocker that can easily open an entrance / exit without deteriorating storage efficiency even when storing a heavy object, and a method for taking in and out a drawer shelf unit from the stocker. is there.
  • the present invention is a stocker provided with shelves each capable of storing a plurality of articles along the longitudinal direction and the vertical direction, A transport space which is arranged in parallel with the longitudinal direction of the shelf, and the transport device is movable; A drawer shelf unit that can be pulled out from the stocker in a direction perpendicular to the longitudinal direction and in the horizontal plane and returned to the stocker, and can be stored as a part of the shelf when stored in the stocker.
  • a positioning member for positioning the drawer shelf unit in the shelf, and The transport space and the shelf are enclosed from the outside in a casing shape to constitute a stocker body,
  • the drawer shelf unit is configured so that articles can be stored and a path to the stocker can be obtained by pulling out the drawer shelf unit from the stocker.
  • the present invention also provides A shelf capable of storing a plurality of articles along the longitudinal direction and the vertical direction, A transport space which is arranged in parallel with the longitudinal direction of the shelf and the transport device is movable; A drawer shelf unit that can be pulled out from the stocker and returned into the stocker in a direction perpendicular to the longitudinal direction and the horizontal plane, and becomes a part of the shelf when returned into the stocker, and can store articles.
  • a positioning member for positioning the drawer shelf unit in the shelf, And the conveyance space and the shelf are enclosed from the outside in the shape of a casing to constitute the stocker body.
  • the drawer shelf unit is taken in and out at right angles to the longitudinal direction which is the conveyance direction of the conveyance device, and the drawer shelf unit is positioned in the stocker. For this reason, since the drawer shelf unit can store heavy articles and is positioned with respect to the stocker, the articles can be transferred to and from the conveying device.
  • the description relating to the stocker also applies to the method of taking in and out the drawer shelf unit as it is.
  • the drawer shelf unit is self-supporting with wheels, in particular caster wheels.
  • wheels in particular caster wheels.
  • the drawer shelf unit can be easily moved, and the weight of the drawer shelf unit can be supported by the wheels in the stocker.
  • an engaging member for engaging the drawer shelf unit pulled out from the stocker with the stocker body. If it does in this way, the drawer shelf unit pulled out will not move carelessly.
  • the engaging member is a hinge.
  • the hinge is detachably inserted through the first hinge element provided on the stocker body side, the second hinge element provided on the drawer shelf unit side, and the first hinge element and the second hinge element.
  • the pin is inserted into the first hinge element and the second hinge element so that the drawer shelf unit can be rotated around the hinge and the movable range of the drawer shelf unit is limited. It is configured.
  • the drawer shelf unit can be rotated around the hinge to open a passage into the stocker, and by engaging the drawer shelf unit with the hinge, it is possible to limit the unintentional movement of the drawer shelf unit.
  • one of the shelf and the drawer shelf unit is provided with a guide roller, and the other is provided with a guide.
  • the guide roller and the guide come into contact with each other to position the drawer shelf unit along the longitudinal direction.
  • one of the shelf and the drawer shelf unit includes a fitting member, and the other includes a positioning pin. Then, when the drawer shelf unit is returned to the stocker, the positioning pin is fitted to the fitting member, and the drawer shelf unit is positioned along a direction perpendicular to the longitudinal direction in the horizontal plane. .
  • the conveying device in the stocker can accurately transfer articles to and from the drawer shelf unit.
  • the principal part top view of the stocker of an Example shows the state which pulled out the drawer shelf unit and was fixed to the stocker main body.
  • Side view of the hinge and its surroundings in the modified example The principal part top view which shows the state which connected the slide unit to the stocker to the stocker of 2nd Example.
  • the stocker 2 includes a drawer shelf unit 4, a conveyance space 6, and shelves 8 and 10, and the drawer shelf unit 4 can be pulled out from the stocker 2 and returned to the stocker 2.
  • the drawer shelf unit 4 is a part of the shelf 10 in the stocker 2, and the shelf 8 faces the shelf 10 with the conveyance space 6 interposed therebetween.
  • the shelf 8 may not be provided.
  • the conveyance space 6 is a space in which a conveyance device 50 described later travels and transfers and conveys articles between the shelves 8 and 10.
  • a fan filter unit 12 forms a down flow of clean air in the stocker 2. Further, the portion of the stocker 2 excluding the drawer shelf unit 4 is called a stocker body.
  • the configuration of the drawer shelf unit 4 will be described.
  • the shelves 8 and 10 and the drawer shelf unit 4 are each provided with a plurality of shelf supports 14 on which articles are placed.
  • the space for each shelf receiver 14 is called a frontage.
  • a handle 16 and, for example, a lockable caster wheel 18 are attached to the drawer shelf unit 4 and are movable on the floor 3 of the clean room.
  • four guide rollers 20 are provided below the lowermost shelf receiver 14, and the guide rollers 20 are guided by guides 22 provided on the shelf 10 side. Guide to a predetermined position.
  • a hinge element 24 is provided in the drawer shelf unit 4 and a hinge element 26 is provided on the stocker 2 side, and a pin 62 in FIG.
  • the drawer shelf unit 4 is rotatable about the hinge 36 of FIG.
  • the article is heavy, and if the drawer shelf unit 4 falls down during movement, it is difficult to support it manually. Therefore, the ceiling of the clean room and the drawer shelf unit 4 are connected by a flexible fall prevention member 28 such as a wire, a belt, or a rope to prevent the drawer shelf unit 4 from falling.
  • FIG. 2 shows a state in which the drawer shelf unit 4 is pulled out from the stocker 2, 40 is a column of the stocker 2, 42 is a column of the drawer shelf unit 4, with a small space between the columns 40, 40. It arrange
  • 2 is the left-right direction of the stocker 2
  • the vertical direction of FIG. 2 is the depth direction of the stocker 2
  • the pair of left and right guide rollers 20, 20 are guided by the guides 22, 22, and the drawer shelf in the shelf 10 is The position of the unit 4 in the left-right direction is restricted.
  • a pair of fitting members 30 and 30 are similarly fitted to a pair of positioning pins 32 and 32, and the position of the drawer shelf unit 4 in the depth direction is positioned.
  • the guide roller 20 and the fitting member 30 may be provided on the shelf 10 side, and the guide 22 and the positioning pin 32 may be provided on the drawer shelf unit 4 side. Assignment of these members to the shelf 10 and the drawer shelf unit 4 is arbitrary. It is. These members are arranged in a space below the lowermost shelf holder in the drawer shelf unit 4, for example.
  • the transport space 6 is a travel space of the transport device 50.
  • the transport device 50 includes a carriage 52 and travels by wheels 54.
  • An arm 58 moves up and down along a mast 56, and a transfer device 60 such as a SCARA arm is installed at the tip.
  • a transport device that does not include the mast 56 may be used, the transport space 6 may be divided into a plurality of levels along the height direction, and the transport device may be moved for each level.
  • Reference numeral 44 denotes an outer plate of the stocker 2
  • 46 denotes an outer plate of the drawer shelf unit 4. When the drawer shelf unit 4 is returned into the shelf 10, the outer plates 44 and 46 are combined with no gap.
  • FIG. 3 shows the hinge 36.
  • the hinge element 24 is attached to the support post 42, and the hinge element 26 is attached to the support post 40.
  • the hinge 36 is obtained.
  • a pair of upper and lower hinges 36 are provided.
  • the pin 62 is provided with a head 63 at the upper portion, and a protrusion 64 that can be protruded and urged in the lower portion and is urged in the protruding direction is provided to prevent the pin 62 from falling off the hinge 36.
  • the stocker 2 has the following actions.
  • the drawer shelf unit 4 includes a shelf holder 14 and can store articles as a part of the shelf 10.
  • the drawer shelf unit 4 can be pulled out using the caster wheels 18 and returned to the shelf 10.
  • the drawer shelf unit 4 can be rotated 90 ° as indicated by the white arrow in FIG.
  • the movable range of the drawer shelf unit 4 can be limited by the hinge 36.
  • the guide roller 20 and the guide 22 regulate the horizontal position of the drawer shelf unit 4, and the positioning pin 32 and the fitting member 30 set the depth direction position. Can be positioned. Thereby, the conveying device 50 can transfer the article to the drawer shelf unit 4.
  • the fall prevention member 28 it can prevent that the drawer shelf unit 4 falls while moving. If a member that locks the fitting between the positioning pin 32 and the fitting member 30 or a member that fixes the drawer shelf unit 4 to the shelf 10 is added, the drawer shelf unit 4 along the depth direction is added. The position can be fixed more reliably.
  • a hinge piece 65 is attached to the column 40 of the stocker 2, and a hinge piece 68 is attached to the column 42 of the drawer shelf unit 4.
  • the hinge piece 65 is provided with a fitting hole 66
  • the hinge piece 68 is provided with a hinge shaft 69
  • the hinge shaft 69 is fitted to the tip (most flange) of the fitting hole 66.
  • the fitting hole 66 is U-shaped, changes its direction at the tip, and includes guides 66a and 66b at the inlet.
  • a new drawer shelf unit 72 is provided with a plurality of shelf supports 14 along the height direction and the left-right direction, and 74 is a frame. As shown in FIG. 7, the drawer shelf unit 72 includes, for example, four jacks 78 using bolts and two positioning pins 92, for example, at a position below the lowest shelf holder. Then, the positioning pin 92 is fitted to the fitting member 93 provided on the shelf 10 side to perform positioning.
  • the positioning pin 92 may be provided on the shelf 10 side, and the fitting member 93 may be provided on the drawer shelf unit 72 side.
  • the member that can position the drawer shelf unit 72 is not limited to the fitting of the pins, and the drawer shelf unit 72 and the shelf 10 may be positioned. And should be provided.
  • four nut plates 76 are provided on the frame 74 or the like by changing the position in the left-right direction and the position in the height direction.
  • Numeral 80 is a slide carriage, which has a frame 82 and can be moved in a clean room by means of lockable caster wheels 90.
  • a pair of guides 84 in the depth direction of the stocker 70 are provided on the frame 82, and guide the pipe 88 of the slide unit 86 to slide the slide unit 86 in the depth direction of the stocker 70.
  • the drawer shelf unit 72 When pulling out the drawer shelf unit 72 from the stocker 70, the drawer shelf unit 72 is raised by the jack 78, the positioning pin 92 is removed from the fitting member 93, and the bolt is fastened to the nut plate 76 from the slide unit 86 side. It fixes to 86.
  • the pipe 88 is slid along the guide 84 from here in the state of the solid line in FIG. 6, the chain line state in FIG. 6 is reached, and the heavy drawer drawer unit 72 is positioned at the longitudinal center of the slide carriage 80.
  • the slide carriage 80 is stabilized.
  • a counterweight may be provided at the right end of the slide carriage 80 at the position shown in FIG. Then, when the slide carriage 80 is moved from the position shown in FIG.
  • a passage to the conveyance space 6 can be opened, and for example, articles can be taken out from the shelves 8 and 10. Further, even if the article cannot be taken out, an operator can freely enter and leave the transport space 6 to operate the jack 78, or a window that can be opened and closed is provided in a part of the outer plate 46 so that the jack 78 can be operated. .
  • the jack 78 may be provided not on the drawer shelf unit 72 but on the slide carriage 80 to raise and lower the frame 82.
  • the slide unit 86 is shifted to the left side of FIG. 6, the jack 78 is operated to lower the drawer shelf unit 72, and positioning.
  • the drawer shelf unit 72 is positioned by the pin 92 and the fitting member 93.

Abstract

Provided is a stocker that can be provided with an access port to the stocker and that can store heavy articles, without reducing storage efficiency. A stocker comprises: a shelf that capable of storing a plurality of articles in each of the longitudinal direction and the vertical direction; a transport space that is disposed parallel to the longitudinal direction of the shelf and in which a transport device can move; a pull-out shelf unit that can be pulled out from the stocker in a direction perpendicular to the longitudinal direction in the horizontal face and be returned into the stocker and that is a shelf, capable of storing articles, when returned into the stocker; and a positioning member for positioning the pull-out shelf unit on the shelf. The transport space and the shelf are enclosed externally in a box shape and constitute a stocker body, and a passage into the stocker is provided by way of the pull-out shelf unit being capable of storing articles and the pull-out shelf unit being pulled out from the stocker.

Description

ストッカとストッカからの引出棚ユニットの出し入れ方法Loading and unloading the stocker and the drawer shelf unit from the stocker
　この発明はストッカとストッカからの引出棚ユニットの出し入れ方法とに関し、特に重量物を載置した引出棚ユニットを、安定して出し入れできるようにすることに関する。 This invention relates to a stocker and a method for taking out and taking out a drawer shelf unit from the stocker, and more particularly to making it possible to stably put in and out a drawer shelf unit on which a heavy object is placed.
　クリーンルーム内等で用いられるストッカは、半導体ウェハーの容器等を保管し、ストッカ内の搬送装置を備えている。ストッカの保管効率を低下させずに、ストッカ内への出入口を設けるため、特許文献１（JP3900923）は、ストッカの棚の一部を、回転して開閉自在な扉とすることを提案している。そしてこの扉に棚を設けて物品を保管し、また扉をヒンジを中心に回転させると、扉を開くことができる。しかしながらこのような扉は重量の大きな物品を保管するには不適である。　 Stockers used in clean rooms, etc. store containers for semiconductor wafers and are equipped with a transfer device in the stocker. In order to provide an entrance to the stocker without reducing the storage efficiency of the stocker, Patent Document 1 (JP3900923) proposes that a part of the shelf of the stocker is rotated to be a door that can be opened and closed. . The door can be opened by providing a shelf on the door to store articles and rotating the door around the hinge. However, such doors are not suitable for storing heavy items. *
JP3900923JP3900923
　この発明の課題は、重量物を保管する場合にも、保管効率を低下させずに、容易に出入口を開けることができるストッカと、ストッカからの引出棚ユニットの出し入れ方法、とを提供することにある。 An object of the present invention is to provide a stocker that can easily open an entrance / exit without deteriorating storage efficiency even when storing a heavy object, and a method for taking in and out a drawer shelf unit from the stocker. is there.
　この発明は、長手方向と上下方向とに沿ってそれぞれ複数の物品を保管自在な棚を備える、ストッカであって、
　前記棚の長手方向と平行に配置され、 かつ搬送装置が移動自在な搬送スペースと、
　前記長手方向と水平面内で直角な方向に、ストッカから引き出すことと、ストッカ内に戻すこととが自在で、かつストッカ内に戻すと前記棚の一部となり物品を保管できる引出棚ユニットと、
　前記引出棚ユニットを棚内に位置決めする位置決め部材、とを備え、
　前記搬送スペースと前記棚とは、筐体状に外部から囲われて、ストッカ本体を構成し、
　前記引出棚ユニットは物品を保管自在で、かつ引出棚ユニットをストッカから引き出すことにより、ストッカ内への通路が得られるように構成されていることを特徴とする。 The present invention is a stocker provided with shelves each capable of storing a plurality of articles along the longitudinal direction and the vertical direction,
A transport space which is arranged in parallel with the longitudinal direction of the shelf, and the transport device is movable;
A drawer shelf unit that can be pulled out from the stocker in a direction perpendicular to the longitudinal direction and in the horizontal plane and returned to the stocker, and can be stored as a part of the shelf when stored in the stocker.
A positioning member for positioning the drawer shelf unit in the shelf, and
The transport space and the shelf are enclosed from the outside in a casing shape to constitute a stocker body,
The drawer shelf unit is configured so that articles can be stored and a path to the stocker can be obtained by pulling out the drawer shelf unit from the stocker.
　またこの発明は、
　長手方向と上下方向とに沿ってそれぞれ複数の物品を保管自在な棚と、
　棚の長手方向と平行に配置され、 かつ搬送装置が移動自在な搬送スペースと、
　前記長手方向と水平面内で直角な方向に、ストッカから引き出すことと、ストッカ内に戻すこととが自在で、ストッカ内に戻すと前記棚の一部となり、物品を保管自在な引出棚ユニットと、
　引出棚ユニットを棚内に位置決めする位置決め部材、とを備え、
　かつ、搬送スペースと棚とが、筐体状に外部から囲われてストッカ本体を構成する、
ストッカからの引出棚ユニットの出し入れ方法であって、
　引出棚ユニットをストッカから引き出すことにより、ストッカ内への通路を形成するステップと、
　引出棚ユニットをストッカ内に戻して位置決め部材により位置決めすることにより、搬送装置と引出棚ユニットとの間で物品を移載自在にするステップ、とを実行することを特徴とする。 The present invention also provides
A shelf capable of storing a plurality of articles along the longitudinal direction and the vertical direction,
A transport space which is arranged in parallel with the longitudinal direction of the shelf and the transport device is movable;
A drawer shelf unit that can be pulled out from the stocker and returned into the stocker in a direction perpendicular to the longitudinal direction and the horizontal plane, and becomes a part of the shelf when returned into the stocker, and can store articles.
A positioning member for positioning the drawer shelf unit in the shelf,
And the conveyance space and the shelf are enclosed from the outside in the shape of a casing to constitute the stocker body.
A method for putting in and out a drawer shelf unit from a stocker,
Forming a path into the stocker by withdrawing the drawer shelf unit from the stocker;
The step of allowing the article to be transferred between the conveying device and the drawer shelf unit by returning the drawer shelf unit into the stocker and positioning it by the positioning member is performed.
　この発明では、搬送装置の搬送方向である長手方向と直角に、引出棚ユニットを出し入れし、かつ引出棚ユニットをストッカ内で位置決めする。このため引出棚ユニットは重量物品を保管することができ、かつストッカに対して位置決めするので、搬送装置との間で物品を移載できる。なおこの明細書において、ストッカに関する記載はそのまま引出棚ユニットの出し入れ方法にも当てはまる。 In the present invention, the drawer shelf unit is taken in and out at right angles to the longitudinal direction which is the conveyance direction of the conveyance device, and the drawer shelf unit is positioned in the stocker. For this reason, since the drawer shelf unit can store heavy articles and is positioned with respect to the stocker, the articles can be transferred to and from the conveying device. In this specification, the description relating to the stocker also applies to the method of taking in and out the drawer shelf unit as it is.
　好ましくは、引出棚ユニットは車輪、特にキャスター車輪を備えて、自立している。このようにすると、引出棚ユニットを容易に移動させることができると共に、ストッカ内で引出棚ユニットの重量を車輪で支持することができる。 Preferably, the drawer shelf unit is self-supporting with wheels, in particular caster wheels. In this way, the drawer shelf unit can be easily moved, and the weight of the drawer shelf unit can be supported by the wheels in the stocker.
　好ましくは、ストッカから引き出した引出棚ユニットを、ストッカ本体に係合する係合部材がさらに設けられている。このようにすると、引き出した引出棚ユニットが不用意に移動することがない。 Preferably, there is further provided an engaging member for engaging the drawer shelf unit pulled out from the stocker with the stocker body. If it does in this way, the drawer shelf unit pulled out will not move carelessly.
　特に好ましくは、係合部材はヒンジである。好ましくは、ヒンジは、ストッカ本体側に設けられている第１ヒンジ要素と、引出棚ユニット側に設けられている第２ヒンジ要素と、第１ヒンジ要素及び第２ヒンジ要素に挿通される着脱自在なピン、とから成り、第１ヒンジ要素及び第２ヒンジ要素にピンが挿通されることより、引き出し棚ユニットをヒンジを中心に回動自在にすると共に、引出棚ユニットの可動範囲を制限するように構成されている。ヒンジを中心に引出棚ユニットを回転させて、ストッカ内への通路を開けることができ、またヒンジにより引出棚ユニットを係合することにより、引出棚ユニットが不用意に移動することを制限できる。 Particularly preferably, the engaging member is a hinge. Preferably, the hinge is detachably inserted through the first hinge element provided on the stocker body side, the second hinge element provided on the drawer shelf unit side, and the first hinge element and the second hinge element. And the pin is inserted into the first hinge element and the second hinge element so that the drawer shelf unit can be rotated around the hinge and the movable range of the drawer shelf unit is limited. It is configured. The drawer shelf unit can be rotated around the hinge to open a passage into the stocker, and by engaging the drawer shelf unit with the hinge, it is possible to limit the unintentional movement of the drawer shelf unit.
　好ましくは、位置決め部材として、棚と引出棚ユニットの一方がガイドローラを、他方がガイドを備えている。そして引出棚ユニットがストッカ内に戻されている際に、前記ガイドローラと前記ガイドとが接触して、前記長手方向に沿って引出棚ユニットを位置決めする。 Preferably, as a positioning member, one of the shelf and the drawer shelf unit is provided with a guide roller, and the other is provided with a guide. When the drawer shelf unit is returned to the stocker, the guide roller and the guide come into contact with each other to position the drawer shelf unit along the longitudinal direction.
　好ましくは、位置決め部材として、棚と引出棚ユニットの一方が嵌合部材を、他方が位置決めピンを備えている。そして引出棚ユニットがストッカ内に戻されている際に、前記嵌合部材に前記位置決めピンが嵌合して、前記長手方向とは水平面内で直角な方向に沿って、引出棚ユニットを位置決めする。引出棚ユニットを位置決めすることにより、ストッカ内の搬送装置は引出棚ユニットとの間で物品を正確に移載することができる。 Preferably, as a positioning member, one of the shelf and the drawer shelf unit includes a fitting member, and the other includes a positioning pin. Then, when the drawer shelf unit is returned to the stocker, the positioning pin is fitted to the fitting member, and the drawer shelf unit is positioned along a direction perpendicular to the longitudinal direction in the horizontal plane. . By positioning the drawer shelf unit, the conveying device in the stocker can accurately transfer articles to and from the drawer shelf unit.
実施例のストッカの正面図で、引出棚ユニットをストッカから引き出した状態を鎖線で示す。In the front view of the stocker of an Example, the state which pulled out the drawer shelf unit from the stocker is shown with a chain line. 実施例のストッカの要部平面図で、引出棚ユニットを引き出し、ストッカ本体に固定した状態を示す。The principal part top view of the stocker of an Example shows the state which pulled out the drawer shelf unit and was fixed to the stocker main body. 実施例でのヒンジとその周囲とを示す図The figure which shows the hinge in the Example, and its circumference | surroundings 変形例でのヒンジとその周囲の平面図Top view of the hinge and its surroundings in the modified example 変形例でのヒンジとその周囲の側面図Side view of the hinge and its surroundings in the modified example 第２の実施例のストッカに、ストッカにスライドユニットを接続した状態を示す要部平面図The principal part top view which shows the state which connected the slide unit to the stocker to the stocker of 2nd Example. 第２の実施例のストッカでの、引出棚ユニットの位置決め機構と昇降機構とを示す要部拡大平面図The principal part enlarged plan view which shows the positioning mechanism and raising / lowering mechanism of a drawer shelf unit in the stocker of 2nd Example. 第２の実施例のストッカの要部側面図Side view of main part of stocker of second embodiment
　以下に本発明を実施するための最適実施例を示す。この発明の範囲は、特許請求の範囲の記載に基づき、明細書の記載とこの分野での周知技術とを参酌し、当業者の理解に従って定められるべきである。 The following is an optimum embodiment for carrying out the present invention. The scope of the present invention should be determined according to the understanding of those skilled in the art based on the description of the scope of the claims, taking into account the description of the specification and well-known techniques in this field.
　図１～図３に最初の実施例を示す。半導体ウェハー、レチクル、ディスプレイの基板、等をFOUP等の容器に収容し、ストッカ２で保管する。以下、これらの容器を物品と呼ぶ。ストッカ２は引出棚ユニット４と、搬送スペース６と、棚８，１０とを備え、引出棚ユニット４はストッカ２から引き出し、またストッカ２内に戻すことができる。引出棚ユニット４はストッカ２内では棚１０の一部であり、棚８は搬送スペース６を挟んで、棚１０と対向している。なお棚８は設けなくても良い。また搬送スペース６は、後述の搬送装置５０が走行し、棚８，１０との間で物品を移載し搬送するスペースである。さらに搬送スペース６に面して作業者の出入口を設け、搬送スペース６へ作業者が出入りできるようにしても良い。１２はファンフィルタユニットで、ストッカ２内にクリーンエアのダウンフローを形成する。またストッカ２の内で、引出棚ユニット４を除く部分をストッカ本体と呼ぶ。 1 to 3 show the first embodiment. A semiconductor wafer, a reticle, a display substrate, etc. are stored in a container such as FOUP and stored in the stocker 2. Hereinafter, these containers are called articles. The stocker 2 includes a drawer shelf unit 4, a conveyance space 6, and shelves 8 and 10, and the drawer shelf unit 4 can be pulled out from the stocker 2 and returned to the stocker 2. The drawer shelf unit 4 is a part of the shelf 10 in the stocker 2, and the shelf 8 faces the shelf 10 with the conveyance space 6 interposed therebetween. The shelf 8 may not be provided. The conveyance space 6 is a space in which a conveyance device 50 described later travels and transfers and conveys articles between the shelves 8 and 10. Further, an entrance / exit of an operator may be provided facing the transfer space 6 so that the operator can enter and leave the transfer space 6. A fan filter unit 12 forms a down flow of clean air in the stocker 2. Further, the portion of the stocker 2 excluding the drawer shelf unit 4 is called a stocker body.
　引出棚ユニット４の構成を説明する。棚８，１０と引出棚ユニット４とには、それぞれ棚受１４が複数個設けられ物品を載置する。なお棚受１４毎のスペースを間口という。引出棚ユニット４には、取手１６と例えばロック自在なキャスター車輪１８とが取り付けられ、クリーンルームの床面３上を移動自在である。また引出棚ユニット４での、例えば最下部の棚受１４よりも下方に、例えば４個のガイドローラ２０が設けられ、棚１０側に設けたガイド２２でガイドローラ２０をガイドし、棚１０内の所定位置へガイドする。さらに引出棚ユニット４にヒンジ要素２４を、ストッカ２側にヒンジ要素２６を設け、これらに図３のピン６２を組み合わせてヒンジ３６とする。これにより、引出棚ユニット４は図２のヒンジ３６を中心に回動自在となる。物品は重量物で、引出棚ユニット４が移動中に倒れると、人手で支えることは難しい。そこでワイヤ、ベルト、ロープ等の、可撓性がある転倒防止部材２８により、クリーンルームの天井と引出棚ユニット４とを接続し、引出棚ユニット４の転倒を防止する。 The configuration of the drawer shelf unit 4 will be described. The shelves 8 and 10 and the drawer shelf unit 4 are each provided with a plurality of shelf supports 14 on which articles are placed. The space for each shelf receiver 14 is called a frontage. A handle 16 and, for example, a lockable caster wheel 18 are attached to the drawer shelf unit 4 and are movable on the floor 3 of the clean room. In the drawer shelf unit 4, for example, four guide rollers 20 are provided below the lowermost shelf receiver 14, and the guide rollers 20 are guided by guides 22 provided on the shelf 10 side. Guide to a predetermined position. Further, a hinge element 24 is provided in the drawer shelf unit 4 and a hinge element 26 is provided on the stocker 2 side, and a pin 62 in FIG. Thereby, the drawer shelf unit 4 is rotatable about the hinge 36 of FIG. The article is heavy, and if the drawer shelf unit 4 falls down during movement, it is difficult to support it manually. Therefore, the ceiling of the clean room and the drawer shelf unit 4 are connected by a flexible fall prevention member 28 such as a wire, a belt, or a rope to prevent the drawer shelf unit 4 from falling.
　図２に、引出棚ユニット４をストッカ２から引き出した状態を示し、４０はストッカ２の支柱、４２は引出棚ユニット４の支柱で、支柱４０，４０の間に、狭いスペースをおいて、支柱４２，４２が挟まれるように配置されている。図２の左右方向をストッカ２の左右方向、図２の上下方向をストッカ２の奥行き方向とすると、左右一対のガイドローラ２０，２０をガイド２２，２２によりガイドし、棚１０内での引出棚ユニット４の左右方向位置を規制する。さらに例えば一対の位置決めピン３２，３２に、同様に例えば一対の嵌合部材３０，３０を嵌合させて、引出棚ユニット４の奥行き方向位置を位置決めする。なおガイドローラ２０と嵌合部材３０を棚１０側に、ガイド２２と位置決めピン３２とを引出棚ユニット４側に設けても良く、これらの部材の棚１０と引出棚ユニット４への割り当ては任意である。またこれらの部材は、例えば引出棚ユニット４での最下部の棚受よりも、下方のスペースに配置する。 FIG. 2 shows a state in which the drawer shelf unit 4 is pulled out from the stocker 2, 40 is a column of the stocker 2, 42 is a column of the drawer shelf unit 4, with a small space between the columns 40, 40. It arrange | positions so that 42 and 42 may be pinched | interposed. 2 is the left-right direction of the stocker 2, and the vertical direction of FIG. 2 is the depth direction of the stocker 2, the pair of left and right guide rollers 20, 20 are guided by the guides 22, 22, and the drawer shelf in the shelf 10 is The position of the unit 4 in the left-right direction is restricted. Furthermore, for example, a pair of fitting members 30 and 30 are similarly fitted to a pair of positioning pins 32 and 32, and the position of the drawer shelf unit 4 in the depth direction is positioned. The guide roller 20 and the fitting member 30 may be provided on the shelf 10 side, and the guide 22 and the positioning pin 32 may be provided on the drawer shelf unit 4 side. Assignment of these members to the shelf 10 and the drawer shelf unit 4 is arbitrary. It is. These members are arranged in a space below the lowermost shelf holder in the drawer shelf unit 4, for example.
　搬送スペース６は搬送装置５０の走行スペースである。搬送装置５０は台車５２を備えて車輪５４により走行し、マスト５６に沿って、アーム５８が昇降し、その先端にスカラアーム等の移載装置６０が設置されている。マスト５６を備えない搬送装置を用い、搬送スペース６を高さ方向に沿って複数レベルに区切り、各レベル毎に搬送装置を移動させても良い。なお４４はストッカ２の外板、４６は引出棚ユニット４の外板で、引出棚ユニット４を棚１０内に戻すと、外板４４，４６が隙間なく組み合わされるようにされている。 The transport space 6 is a travel space of the transport device 50. The transport device 50 includes a carriage 52 and travels by wheels 54. An arm 58 moves up and down along a mast 56, and a transfer device 60 such as a SCARA arm is installed at the tip. A transport device that does not include the mast 56 may be used, the transport space 6 may be divided into a plurality of levels along the height direction, and the transport device may be moved for each level. Reference numeral 44 denotes an outer plate of the stocker 2, and 46 denotes an outer plate of the drawer shelf unit 4. When the drawer shelf unit 4 is returned into the shelf 10, the outer plates 44 and 46 are combined with no gap.
　図３にヒンジ３６を示し、例えば支柱４２にヒンジ要素２４が、支柱４０にヒンジ要素２６が取り付けられ、これらを上下に重ねて、孔６１にピン６２を挿通すると、ヒンジ３６となる。ヒンジ３６は、図１に示すように、例えば上下一対設ける。ピン６２は上部にヘッド６３を備え、下部に出没自在で出方向に付勢されている突起６４が設けられ、ピン６２がヒンジ３６から脱落することを防止する。 3 shows the hinge 36. For example, the hinge element 24 is attached to the support post 42, and the hinge element 26 is attached to the support post 40. When the pins 62 are inserted into the holes 61 with these being stacked vertically, the hinge 36 is obtained. As shown in FIG. 1, for example, a pair of upper and lower hinges 36 are provided. The pin 62 is provided with a head 63 at the upper portion, and a protrusion 64 that can be protruded and urged in the lower portion and is urged in the protruding direction is provided to prevent the pin 62 from falling off the hinge 36.
　ストッカ２は以下の作用を有する。
・　引出棚ユニット４は棚受１４を備え、棚１０の一部として物品を保管できる。
・　引出棚ユニット４をキャスター車輪１８を用いて引き出し、また棚１０内に戻すことができる。
・　引き出した引出棚ユニット４を、ヒンジ３６により棚１０の支柱４０に連結すると、図２の白抜き矢印のように９０°回転させて、搬送スペース６への通路を造ることができる。またヒンジ３６により、引出棚ユニット４の可動範囲を制限できる。
・　引出棚ユニット４を棚１０内へ戻す際には、ガイドローラ２０とガイド２２とにより、引出棚ユニット４の左右方向位置を規制し、位置決めピン３２と嵌合部材３０とにより奥行き方向位置を位置決めできる。これによって、引出棚ユニット４に対し、搬送装置５０が物品を移載自在となる。
・　転倒防止部材２８により、引出棚ユニット４が移動中に転倒することを防止できる。
　なお位置決めピン３２と嵌合部材３０との嵌合が外れないようにロックする部材、あるいは引出棚ユニット４を棚１０に固定する部材等を追加すると、奥行き方向に沿っての引出棚ユニット４の位置を、より確実に固定できる。 The stocker 2 has the following actions.
The drawer shelf unit 4 includes a shelf holder 14 and can store articles as a part of the shelf 10.
The drawer shelf unit 4 can be pulled out using the caster wheels 18 and returned to the shelf 10.
When the pulled out drawer shelf unit 4 is connected to the column 40 of the shelf 10 by the hinge 36, the drawer shelf unit 4 can be rotated 90 ° as indicated by the white arrow in FIG. Further, the movable range of the drawer shelf unit 4 can be limited by the hinge 36.
When the drawer shelf unit 4 is returned into the shelf 10, the guide roller 20 and the guide 22 regulate the horizontal position of the drawer shelf unit 4, and the positioning pin 32 and the fitting member 30 set the depth direction position. Can be positioned. Thereby, the conveying device 50 can transfer the article to the drawer shelf unit 4.
-By the fall prevention member 28, it can prevent that the drawer shelf unit 4 falls while moving.
If a member that locks the fitting between the positioning pin 32 and the fitting member 30 or a member that fixes the drawer shelf unit 4 to the shelf 10 is added, the drawer shelf unit 4 along the depth direction is added. The position can be fixed more reliably.
　図４，図５にヒンジの変形例を示し、特に指摘する点以外は、図１～図３の実施例と同様である。ストッカ２の支柱４０にヒンジ片６５が、引出棚ユニット４の支柱４２にヒンジ片６８が取り付けられている。ヒンジ片６５は嵌合孔６６を備え、ヒンジ片６８はヒンジ軸６９を備え、嵌合孔６６の先端（最も奧の部分）にヒンジ軸６９が嵌合する。嵌合孔６６はＵ字状で先端で向きが変わり、入口にガイド６６ａ，６６ｂを備えている。ヒンジ軸６９を嵌合孔６６の先端まで押し込むと、ヒンジ軸６９を中心に引出棚ユニット４を回転させることができる。 4 and 5 show a modification of the hinge, which is the same as the embodiment of FIGS. A hinge piece 65 is attached to the column 40 of the stocker 2, and a hinge piece 68 is attached to the column 42 of the drawer shelf unit 4. The hinge piece 65 is provided with a fitting hole 66, the hinge piece 68 is provided with a hinge shaft 69, and the hinge shaft 69 is fitted to the tip (most flange) of the fitting hole 66. The fitting hole 66 is U-shaped, changes its direction at the tip, and includes guides 66a and 66b at the inlet. When the hinge shaft 69 is pushed to the tip of the fitting hole 66, the drawer shelf unit 4 can be rotated around the hinge shaft 69.
　図６～図８に第２の実施例のストッカ７０を示し、図１～図３の実施例と同じ符号は同じものを表し、特に指摘する点以外は同様で、奥行き方向、左右方向等の意味は同じである。７２は新たな引出棚ユニットで、高さ方向と左右方向とに沿って、それぞれ複数の棚受１４が設けられ、７４はフレームである。また図７に示すように、引出棚ユニット７２は、例えば最下段の棚受よりも下方の位置に、ボルトを用いたジャッキ７８を例えば４個と、位置決めピン９２を例えば２個備えている。そして棚１０側に設けた嵌合部材９３に位置決めピン９２を嵌合させて、位置決めする。なお棚１０側に位置決めピン９２を、引出棚ユニット７２側に嵌合部材９３を設けても良く、ピンの嵌合に限らず、引出棚ユニット７２を位置決めできる部材を引出棚ユニット７２と棚１０とに設ければよい。フレーム７４等に、左右方向の位置と高さ方向の位置を変えて、ナットプレート７６を例えば４個設ける。 6 to 8 show a stocker 70 of the second embodiment. The same reference numerals as those of the embodiment of FIGS. 1 to 3 denote the same parts, and are the same except for the points to be pointed out. The meaning is the same. A new drawer shelf unit 72 is provided with a plurality of shelf supports 14 along the height direction and the left-right direction, and 74 is a frame. As shown in FIG. 7, the drawer shelf unit 72 includes, for example, four jacks 78 using bolts and two positioning pins 92, for example, at a position below the lowest shelf holder. Then, the positioning pin 92 is fitted to the fitting member 93 provided on the shelf 10 side to perform positioning. The positioning pin 92 may be provided on the shelf 10 side, and the fitting member 93 may be provided on the drawer shelf unit 72 side. The member that can position the drawer shelf unit 72 is not limited to the fitting of the pins, and the drawer shelf unit 72 and the shelf 10 may be positioned. And should be provided. For example, four nut plates 76 are provided on the frame 74 or the like by changing the position in the left-right direction and the position in the height direction.
　８０はスライド台車で、フレーム８２を備え、ロック自在なキャスター車輪９０によりクリーンルーム内を移動自在である。フレーム８２に、ストッカ７０の奥行き方向のガイド８４が一対設けられ、スライドユニット８６のパイプ８８をガイドして、スライドユニット８６をストッカ７０の奥行き方向にスライドさせる。 Numeral 80 is a slide carriage, which has a frame 82 and can be moved in a clean room by means of lockable caster wheels 90. A pair of guides 84 in the depth direction of the stocker 70 are provided on the frame 82, and guide the pipe 88 of the slide unit 86 to slide the slide unit 86 in the depth direction of the stocker 70.
　引出棚ユニット７２をストッカ７０から引き出す場合、ジャッキ７８により引出棚ユニット７２を上昇させて、位置決めピン９２を嵌合部材９３から外し、ナットプレート７６にスライドユニット８６側からボルトを締結し、スライドユニット８６に固定する。この状態が図６の実線の状態で、ここからパイプ８８をガイド８４に沿ってスライドさせると、図６の鎖線の状態となり、重量物の引出棚ユニット７２がスライド台車８０の長手方向中心に位置して、スライド台車８０が安定する。なおスライド台車８０をさらに安定にするには、例えば図６の位置で、スライド台車８０の右端にカウンターウェイトを設けると良い。そして図６の位置からスライド台車８０を移動させると、搬送スペース６への通路を開けて、例えば物品を棚８，１０から持ち出すことができる。また物品を持ち出せないまでも、搬送スペース６に作業者が出入り自在にして、ジャッキ７８を操作できる、あるいは外板４６の一部に開閉自在な窓を設けて、ジャッキ７８を操作できるようにする。なおジャッキ７８を、引出棚ユニット７２ではなく、スライド台車８０に設けて、フレーム８２を昇降させても良い。 When pulling out the drawer shelf unit 72 from the stocker 70, the drawer shelf unit 72 is raised by the jack 78, the positioning pin 92 is removed from the fitting member 93, and the bolt is fastened to the nut plate 76 from the slide unit 86 side. It fixes to 86. When the pipe 88 is slid along the guide 84 from here in the state of the solid line in FIG. 6, the chain line state in FIG. 6 is reached, and the heavy drawer drawer unit 72 is positioned at the longitudinal center of the slide carriage 80. Thus, the slide carriage 80 is stabilized. In order to further stabilize the slide carriage 80, for example, a counterweight may be provided at the right end of the slide carriage 80 at the position shown in FIG. Then, when the slide carriage 80 is moved from the position shown in FIG. 6, a passage to the conveyance space 6 can be opened, and for example, articles can be taken out from the shelves 8 and 10. Further, even if the article cannot be taken out, an operator can freely enter and leave the transport space 6 to operate the jack 78, or a window that can be opened and closed is provided in a part of the outer plate 46 so that the jack 78 can be operated. . Note that the jack 78 may be provided not on the drawer shelf unit 72 but on the slide carriage 80 to raise and lower the frame 82.
　引出棚ユニット７２を棚１０内に戻す場合、上記の逆の手順を実行し、スライドユニット８６を図６の左側へシフトさせ、ジャッキ７８を操作して、引出棚ユニット７２を下降させると共に、位置決めピン９２と嵌合部材９３とで引出棚ユニット７２を位置決めする。 When returning the drawer shelf unit 72 into the shelf 10, the reverse procedure described above is executed, the slide unit 86 is shifted to the left side of FIG. 6, the jack 78 is operated to lower the drawer shelf unit 72, and positioning. The drawer shelf unit 72 is positioned by the pin 92 and the fitting member 93.
２　ストッカ　　３　床面　　４　引出棚ユニット　　６　搬送スペース
８，１０　棚　　１２　ファンフィルタユニット　　１４　棚受
１６　取手　　１８　キャスター車輪　　２０　ガイドローラ　　
２２　ガイド　　２４，２６　ヒンジ要素　　２８　転倒防止部材
３０　嵌合部材　　３２　位置決めピン　　３６　ヒンジ
４０，４２　支柱　　４４，４６　外板　　５０　搬送装置
５２　台車　　５４　車輪　　５６　マスト　　５８　アーム
６０　移載装置　　６１　孔　　６２　ピン　　６３　ヘッド
６４　突起　　６５，６８　ヒンジ片　　６６　嵌合孔
６９　ヒンジ軸　　７０　ストッカ　　７２　引出棚ユニット
７４　フレーム　　７６　ナットプレート　　７８　ジャッキ
８０　スライド台車　　８２　フレーム　　８４　ガイド
８６　スライドユニット　　８８　パイプ　　９０　キャスター車輪
９２　位置決めピン　　９３　嵌合部材　 2 Stocker 3 Floor 4 Drawer shelf unit 6 Transport space 8 and 10 Shelf 12 Fan filter unit 14 Shelf receiver 16 Handle 18 Caster wheel 20 Guide roller
22 Guide 24, 26 Hinge element 28 Fall prevention member 30 Fitting member 32 Positioning pin 36 Hinge 40, 42 Post 44, 46 Outer plate 50 Conveying device 52 Car 54 Wheel 56 Mast 58 Arm 60 Transfer device 61 Hole 62 Pin 63 Head 64 Projection 65, 68 Hinge piece 66 Fitting hole 69 Hinge shaft 70 Stocker 72 Drawer shelf unit 74 Frame 76 Nut plate 78 Jack 80 Slide carriage 82 Frame 84 Guide 86 Slide unit 88 Pipe 90 Caster wheel 92 Positioning pin 93 Fitting member

Claims (8)

  1. 　長手方向と上下方向とに沿ってそれぞれ複数の物品を保管自在な棚を備える、ストッカであって、
    　前記棚の長手方向と平行に配置され、 かつ搬送装置が移動自在な搬送スペースと、
    　前記長手方向と水平面内で直角な方向に、ストッカから引き出すことと、ストッカ内に戻すこととが自在で、かつストッカ内に戻すと前記棚の一部となり物品を保管できる引出棚ユニットと、
    　前記引出棚ユニットを棚内に位置決めする位置決め部材、とを備え、
    　前記搬送スペースと前記棚とは、筐体状に外部から囲われて、ストッカ本体を構成し、
    　前記引出棚ユニットは物品を保管自在で、かつ引出棚ユニットをストッカから引き出すことにより、ストッカ内への通路が得られるように構成されていることを特徴とする、ストッカ。     A stocker comprising shelves capable of storing a plurality of articles along the longitudinal direction and the vertical direction,
    A transport space which is arranged in parallel with the longitudinal direction of the shelf, and the transport device is movable;
    A drawer shelf unit that can be pulled out from the stocker in a direction perpendicular to the longitudinal direction and in the horizontal plane and returned to the stocker, and can be stored as a part of the shelf when stored in the stocker.
    A positioning member for positioning the drawer shelf unit in the shelf, and
    The transport space and the shelf are enclosed from the outside in a casing shape to constitute a stocker body,
    The stocker unit is configured so that articles can be stored freely, and a path to the stocker can be obtained by pulling out the stocker unit from the stocker.
  2. 　引出棚ユニットは車輪を備えて自立していることを特徴とする、請求項１のストッカ。 The stocker according to claim 1, wherein the drawer shelf unit is self-supporting with wheels.
  3. 　ストッカから引き出した引出棚ユニットを、ストッカ本体に係合する係合部材がさらに設けられていることを特徴とする、請求項１または２のストッカ。 3. The stocker according to claim 1, further comprising an engaging member for engaging the drawer shelf unit pulled out from the stocker with the stocker body.
  4. 　前記係合部材はヒンジで有ることを特徴とする、請求項３のストッカ。 The stocker according to claim 3, wherein the engaging member is a hinge.
  5. 　前記ヒンジは、ストッカ本体側に設けられている第１ヒンジ要素と、引出棚ユニット側に設けられている第２ヒンジ要素と、第１ヒンジ要素及び第２ヒンジ要素に挿通される着脱自在なピン、とから成り、
    　第１ヒンジ要素及び第２ヒンジ要素にピンが挿通されることより、引き出し棚ユニットをヒンジを中心に回動自在にすると共に、引出棚ユニットの可動範囲を制限するように構成されていることを特徴とする、請求項４のストッカ。     The hinge includes a first hinge element provided on the stocker body side, a second hinge element provided on the drawer shelf unit side, and a detachable pin inserted through the first hinge element and the second hinge element. , And
    The pin is inserted into the first hinge element and the second hinge element, so that the drawer shelf unit can be rotated around the hinge and the movable range of the drawer shelf unit is limited. The stocker according to claim 4, characterized in that
  6. 　前記位置決め部材として、棚と引出棚ユニットの一方がガイドローラを、他方がガイドを備え、引出棚ユニットがストッカ内に戻されている際に、前記ガイドローラと前記ガイドとが接触して、前記長手方向に沿って引出棚ユニットを位置決めする、ように構成されていることを特徴とする、請求項１～５のいずれかのストッカ。 As the positioning member, one of the shelf and the drawer shelf unit is provided with a guide roller, the other is provided with a guide, and when the drawer shelf unit is returned into the stocker, the guide roller and the guide come into contact with each other, and The stocker according to any one of claims 1 to 5, characterized in that the drawer shelf unit is positioned along the longitudinal direction.
  7. 　前記位置決め部材として、棚と引出棚ユニットの一方が嵌合部材を、他方が位置決めピンを備え、引出棚ユニットがストッカ内に戻されている際に、前記嵌合部材に前記位置決めピンが嵌合して、前記長手方向とは水平面内で直角な方向に沿って、引出棚ユニットを位置決めする、ように構成されていることを特徴とする、請求項１～６のいずれかのストッカ。 As the positioning member, one of the shelf and the drawer shelf unit has a fitting member, the other has a positioning pin, and the positioning pin is fitted to the fitting member when the drawer shelf unit is returned to the stocker. The stocker according to any one of claims 1 to 6, wherein the drawer shelf unit is positioned along a direction perpendicular to the longitudinal direction in a horizontal plane.
  8. 　長手方向と上下方向とに沿ってそれぞれ複数の物品を保管自在な棚と、
    　棚の長手方向と平行に配置され、 かつ搬送装置が移動自在な搬送スペースと、
    　前記長手方向と水平面内で直角な方向に、ストッカから引き出すことと、ストッカ内に戻すこととが自在で、ストッカ内に戻すと前記棚の一部となり、物品を保管自在な引出棚ユニットと、
    　引出棚ユニットを棚内に位置決めする位置決め部材、とを備え、
    　かつ、搬送スペースと棚とが、筐体状に外部から囲われてストッカ本体を構成する、
    ストッカからの引出棚ユニットの出し入れ方法であって、
    　引出棚ユニットをストッカから引き出すことにより、ストッカ内への通路を形成するステップと、
    　引出棚ユニットをストッカ内に戻して位置決め部材により位置決めすることにより、搬送装置と引出棚ユニットとの間で物品を移載自在にするステップ、とを実行することを特徴とする、ストッカからの引出棚ユニットの出し入れ方法。     A shelf capable of storing a plurality of articles along the longitudinal direction and the vertical direction,
    A transport space which is arranged in parallel with the longitudinal direction of the shelf and the transport device is movable;
    A drawer shelf unit that can be pulled out from the stocker in a direction perpendicular to the longitudinal direction and in the horizontal plane, and returned into the stocker, becomes a part of the shelf when returned into the stocker, and can store articles.
    A positioning member for positioning the drawer shelf unit in the shelf,
    And the conveyance space and the shelf are enclosed from the outside in the shape of a casing to constitute the stocker body.
    A method for putting in and out a drawer shelf unit from a stocker,
    Forming a path into the stocker by withdrawing the drawer shelf unit from the stocker;
    The drawer shelf unit is returned to the stocker and positioned by the positioning member, whereby the article can be transferred between the transport device and the drawer shelf unit. How to put in and out the shelf unit.
PCT/JP2014/072030 2013-10-07 2014-08-22 Stocker and method for inserting and removing pull-out shelf unit from stocker WO2015052998A1 (en)

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CN113124616B (en) * 2019-12-30 2023-08-08 青岛海高设计制造有限公司 Freezing and refrigerating equipment and storage equipment

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