201100309 六、發明說明： 【發明所屬之技術領域】 本發明，是有關於將例如半導體裝置製造用的各種基 板等收容的FOUP (前開口式通用容器、Front 〇pening Unified Pod)等的容器也就是被搬運物，朝製造裝置和貯 藏庫等的平台搬運的搬運台車的技術領域。 【先前技術】 這種的搬運台車所搬運的被搬運物，已揭示可收容複 數枚例如口徑爲3 00mm也就是半導體晶圓FOUP (例如專 利文獻1參照）。對於被收容在如此的F Ο U P的半導體晶 圓，有需要減少半導體裝置的製造成本，近年來，要求可 達成大口徑化，例如口徑可至4 5 0mm。對應如此的半導體 晶圓的大口徑化，FOUP必然地大型化及大重量化的話， 例如口徑爲3〇〇mm的情況時是1 Okg FOUP的重量，但是 口徑爲45 0mm的情況時預測會成爲20kg以上。如此的話 ，作業員一個人，欲在複數平台中的複數入出庫用通口等 的入出庫部之間，將2〇kg以上的FOUP直接手提搬運在 客觀上是困難的。 可取代作業員搬運如此被大型化及大重量化的FOUP 的這種搬運台車，藉由作業員的手動操作被控制的PGV( 人員搬運車、Personal Guided Vehicle)已正式地被使用 (例如專利文獻2參照）。具體而言，對應作業員的手動 操作，將收容有FOUP的PGV行走直到製造裝置和貯藏庫 201100309 中的入出庫用通口爲止’透過 間移載FOUP。即進行FOUP & [先行技術文獻] [專利文獻] [專利文獻1]日本特廣 [專利文獻2]日本專手 0 【發明內容】 (本發明所欲解決的課題） 在此，對於半導體製造用 設費用和運轉費用高，所以典 多數的平台。因此，在2個平 部之間的通路寬度是比較狹窄 PGV存在於其通路的情況時 PGV的通行。即具有：移載中 Q 的障礙物，導致各種作業的效 本發明，是鑑於例如上述 種搬運台車，即使在比較狹窄 作業和通行的妨害，可容易進 (用以解決課題的手段） 爲了解決上述課題，本發 物搬運，並且從平台突出的方 前述平台入庫或是出庫的入出 該入出庫通口在與貯藏庫之 [入庫或是出庫。 丨2007- 1 23 673號公報 丨第4092783號公報 的清淨室等的施設，因爲建 型是在施設內儘可能地設置 台中，相面對的2個入出庫 的90cm以下的話，當一台 ，就會妨害作業員和其他的 的搬運台車，會成爲通路中 率下降的技術問題點。 的問題點，其課題爲提供一 的通路或是空間也不會成爲 行移載作業。 明的搬運台車，是將被搬運 式設置並將前述被搬運物朝 庫部移載前述被搬運物，或 -5- 201100309 是從前述入出庫部移載前述被搬運物，其特徵爲，具備： 本體部’具有將前述被搬運物積載的空間也就是積載部和 將位於前述積載部的下方位置並使前述入出庫部從一側方 及下方至少部分地包圍的方式收容的空間也就是收容部， 除了前述一側方以外朝向另一側方，至少前述入出庫部及 對應被移載至前述入出庫部的前述被搬運物的部分被開口 ;及行走手段，設在前述本體部中的前述收容部的下方， 並可配置於前述入出庫部的下方；及移載手段，設在前述 本體部中的前述積載部的上方，且在使前述行走手段被配 置於前述入出庫部的下方並且使前述入出庫部透過前述另 一側方被收容在前述收容部狀態下，將被積載在前述積載 部的應入庫的前述被搬運物移載至前述入出庫部，或是將 從前述入出庫部被出庫的前述被搬運物移載至前述積載部 〇 依據本發明的搬運台車，對於例如作業員是由手動進 行操作’將半導體晶圓等自動地搬運的搬運系統中的平台 ’使被搬運物被搬運並被入庫。或是使從平台被出庫被搬 運物被移載至搬運台車’朝其他的平台被搬運。且，在此 的「平台」’只是指只有保管被搬運物的保管場所也可以 ，或是指：可實行對於被搬運物的各種作業的作業平台、 製造裝置或是處理裝置，甚至合倂具有將入庫處及出庫處 不同的被搬運物只有搬運或是移送一些距離的功能裝置和 機構也可以。如此的平台’具備將被搬運物朝內外出入用 的通口等的入出庫部。入出庫部，典型是使其上面位於從 -6- 201100309 地面約900mm的高度的方式被設置。 中，設有將被移載的被搬運物定位用的 定位手段，是例如20mm的高度的凸部 置在入出庫部時，構成可與被設在被搬 也就是被定位手段嵌合。因此，被搬運 運台車被移載時，爲了將入出庫部側的 的凹部的嵌合狀態消解，而需將被搬運 0 高度距離。 在具有平台的搬運系統中，藉由行 頂棚軌道等的軌道上的車輛、OHT ( 1 Overhead Hoist Transport)等的搬運車 搬運物被搬運。搬運車，是在沿著軌道 間將被搬運物搬運。但是搬運車，當因 等使系統的動作停止時，被搬運物就無 於未舖設軌道的場所，被搬運物無法被ί Q 另一方面，被搬運的被搬運物，是 晶圓等的大口徑化而大型化及大重量化 直徑45 0mm的半導體晶圓搬運用的 500mmx橫550mmx高度400mm，重量是 因此，由作業員1個人自力將FOUP抱 的。因此，如上述，系統中的搬運車無 的情況時，有可能發生各式各樣的問題 然而本發明的搬運台車，可以無關 搬運物搬運。即使搬運系統停止時，作 在入出庫部的上面 銷等的定位手段。 ，當被搬運物被載 運物的底面的凹部 物從入出庫部朝搬 凸部及被搬運物側 物上昇至少凸部的 走在例如被舖設在 I掛式搬運系統、 ，使F0UP等的被 設置的複數平台之 爲例如故障和維修 法被搬運。且，對 股運。 隨著搬運的半導體 。具體而言，例如 F0UP，是成爲縱 成爲20kg以上。 持搬運是非常困難 法將被搬運物搬運 〇 於系統的動作將被 業員也可容易地將 201100309 搬運物搬運。且’搬運起點或是搬運終點即使是軌道未被 舖設的場所，仍可將被搬運物搬運。 本發明的搬運台車，特別是具備本體部，該本體部具 有：將被搬運物積載的空間也就是積載部、及位於積載部 的下方位置將入出庫部從一側方及下方至少部分地包圍的 方式收容的空間也就是收容部，且除了一側方以外朝向另 一側方被開口。且’在此的「側方」，是包含對於搬運台 車的前後左右的各方向（即沿著水平的各方向）的槪念， 廣義上除了中上下方向以外包含各式各樣的方向。此情況 ’例如「一側方」，是指對於與入出庫部相面對的搬運台 車的後方向（即從入出庫部所見最遠位置的側方）也可以 。對於此’ 「另一側方」，是指對於與入出庫部相面對的 搬運台車的前左右的三方向（即從入出庫部位於所見最接 近的側方以及左及右的側方）也可以。「下方」，是指對 於搬運台車的下方向。實用上，本體部，是供將應積載的 被搬運物積載在積載部、及供將入出庫部收容在收容部用 ’且具有開口 ’在本體部內（即積載部及收容部）及本體 部外將被搬運物及入出庫部相通。即本體部，是對於上述 的前左右的三方向，在對應至少入出庫部及該入出庫部上 的被搬運物的部分，具有開口即可。如此的開口，可讓應 積載的被搬運物及入出庫部通過，並分別被積載或收容於 積載部及收容部。本體部，典型是被作成3字型，在其內 部形成具有積載部及收容部的比較寬空間的。本體部，是 例如由配管狀的骨架組合而成也可以，由板狀者組合而成 -8- 201100309 也可以。 在本體部中的收容部的下方設有行走手段’例如具備 :車輪、及可旋轉地安裝該車輪的安裝部等’作業員是藉 由進行推或是拉引等的操作，可走行於搬運通路上並且可 配置於入出庫部的下方。即從行走手段的搬運通路地面的 高度，是例如1 〇〇mm以下，成爲比入出庫部的底面及搬 運通路地面之間的空間的高度更低。在此的「收容部的下 0 方」，是包含收容部的正下或是該正下的周邊的槪念，廣 義上包含被收容於收容部的入出庫部的下方。且，藉由具 備馬達等的電動行走也可以。被搬運物是在被積載在本體 部中的積載部狀態下，藉由使搬運台車行走，而使被搬運 物被搬運。 在本體部中的積載部的上方設有移載手段，將被積載 在積載部的應入庫的被搬運物移載至入出庫部時，使行走 手段被配置於入出庫部的下方，且在使入出庫部從本體部 〇 中的另—側方（即開口）被收容在收容部的狀態下進行移 載動作。且，將從入出庫部被出庫的被搬運物移載至搬運 台車的積載部時，也同樣地使行走手段被配置於入出庫部 的下方’且在使入出庫部是透過本體部中的另一側方被收 容在收容部的狀態下進行移載動作。入出庫部的收容時， 是從本體部的開口，將入出庫部朝本體部的內部收納。且 ’在此的「收容」’不限定於入出庫部整體被本體部覆蓋 的狀態’也包含使入出庫部部分地被本體部包圍的狀態。 本發明的搬運台車，特別是藉由朝向本體部中的另一側方 -9- 201100309 被開口 （即本體部中的三方向的側面開口），保持上述的 收容狀態，且例如，沿著橫寬度較寬的一入出庫部，或是 將無切縫的複數入出庫部之間由水平一方向可往復移動。 藉由在本體部中的收容部收容入出庫部，搬運台車成 爲靠近平台側。即收容部收容入庫部的部分，可以減小搬 運台車在搬運通路等的佔位面積。因此，移載被搬運物時 ，可有效地防止搬運台車妨害作業員和其他的搬運台車的 通行。 在本發明中進一步在移載時藉由使搬運台車靠近平台 側，而可實現搬運物的最佳的移載。例如假設無法將入出 庫部收容在收容部的狀態下進行移載的情況的話，在移載 手段中，爲了移載被搬運物而會要求昇降動作及朝水平方 向的動作。然而本發明的搬運台車，因爲是在將入出庫部 收容在收容部的狀態下可進行移載，所以可只由昇降動作 進行移載。即藉由縮短搬運台車及被搬運物彼此的距離， 就可更容易移載被搬運物。 如以上說明，依據本發明的搬運台車，本體部因爲具 有將入出庫部收容的收容部，所以在比較狹窄的通路或是 空間也不會成爲作業和通行的妨害，可容易進行移載作業 。且’被搬運物的移載時，被搬運物因爲是時常存在於本 體部內，所以移載可穩定地進行。因此，與移載時被搬運 物存在於本體部外的情況相比較，也可以將搬運台車本體 輕量地構成。 ，所以 進一步，本體部因爲具有朝向另一側方的開口 -10- 201100309 在相鄰接的2個入出庫部之間移載被搬運 於2個入出庫部朝垂直方向進行拉引或是 也可以由與2個入出庫部並列的一方向平 往復移動，也可以由短時間有效率地進行 間的移載。 在本發明的搬運台車的一態樣中，前 :將前述被搬運物把持的把持手段、及將 0 降的昇降手段。 依據此態樣，在移載手段中設有把持 是藉由將被搬運物把持或是將把持的被搬 移載。且在移載手段中，除了把持手段以 段，當被搬運物的移載進行時，藉由昇降 昇降（即上下移動）。由此，把持手段的 被搬運物可調整至適切的高度。因此，可 搬運物。 Q 在本發明的搬運台車的其他的態樣中 下防止手段，其是設在前述本體部中的前 ，藉由將被積載在前述積載部的前述被搬 撐，防止前述被搬運物從前述積載部落下 依據此態樣，在本體部具備落下防止 在積載部被搬運物的落下被防止。具體而 段是設在積載部的下方，藉由將被積載在 物從下方側支撐，防止被搬運物從積載部 的「支撐」，是除了將被積載的被搬運物 物時，不需要對 推等的操作。即 行的水平一方向 2個入出庫部之 述移載手段具有 前述把持手段昇 手段，把持手段 運物放開來進行 外也設有昇降手 手段使把持手段 高度，爲了移載 以確實地移載被 ，進一步具備落 述積載部的下方 運物從下方側支 〇 手段，使被積載 言，落下防止手 積載部的被搬運 落下。且，在此 時常支撐的意思 -11 - 201100309 的以外’也包含當快要落下時才支撐的狀態。即落下防止 手段’是時常接觸被積載在積載部的被搬運物也可以，將 從積載部快要落下的被搬運物由下方側擋住也可以。 因爲藉由具備落下防止手段，可以防止搬運中的被搬 運物落下，所以可以最佳將被搬運物搬運。特別是，搬運 如半導體晶圓的衝擊較弱的精密的構件或是裝置時，上述 的效果可顯著地被發揮。 在進一步具備上述的落下防止手段的態樣中，前述落 下防止手段，是設在前述收容部，且其被容納的位置，是 當將前述入出庫部收容在前述收容部時，不會妨害前述入 出庫部的收容也可以。 如此構成的話，落下防止手段，因爲是設在位於積載 部的下方的收容部，所以藉由將在搬運中可能落下的被搬 運物從下方支撐，就可防止確實地落下。且在本態樣中， 特別是落下防止手段，是在將入出庫部收容在收容部時， 被容納於不會妨害收容入出庫部的位置。落下防止手段， 是被作成對應例如操作桿和操作桿等的操作可動，藉由作 業員操作搬運台車，成爲被容納的狀態。且，藉由檢出收 容有收容部，自動地被容納也可以。 藉由使落下防止手段在收容時被容納，就可以回避因 爲落下防止手段的存在而妨害入出庫部的收容。因此，可 最佳地進行搬運及移載。 在本發明的搬運台車的其他的態樣中，前述移載手段 ，是對於前述本體部，在沿著水平的方向可旋轉。 -12 - 201100309 依據此態樣，藉由將移載手段對於本體部在沿著水平 白勺方向旋轉，就可適宜地變更移載中的被搬運物的方向。 即不需旋轉搬運台車中的本體部，就可以變更被搬運物的 方向。 在上述的構成中，例如從入出庫部移載被搬運物時的 言舌’在入出庫部移載被搬運物時即使搬運台車的方向相異 ’被搬運物的方向也不會改變可以完成移載。且，將被搬 0 運物從入出庫部移載時，移載手段及被搬運物的方向未對 齊的話無法確實地移載的情況時，可微調整移載手段的方 向。即可最佳地進行移載動作。 本發明的作用及其他的增益可從接著說明的實施發明 用的最佳的形態明白。 【實施方式】 以下，對於本發明的實施例一邊參照圖一邊說明。 〇 <搬運系統> 首先，對於包含藉由本實施例的搬運台車被搬運的 FOUP的移載終點或是移載起點也就是平台的構成的搬運 系統的構成’參照第1圖及第2圖說明。在此第1圖，是 將搬運系統的整體構成槪略地顯示的俯視圖，第2圖，是 顯示平台的具體的構成的立體圖。 在第1圖中，搬運系統，具備：軌道100、及複數車 輛200、及複數平台300'及搬運通路400。 -13- 201100309 軌道1 00，是例如被舖設在頂棚，由鋁和不銹鋼等的 金屬所構成。且，在此爲了方便說明，軌道100的構成只 圖示比較簡單的構成，但是實際的軌道1 00，是具有例如 更多的分岐處及合流處的複雜的構成也可以。 車輛200，是藉由分別沿著軌道1 00行走，將收容有 半導體晶圓等的FOUP搬運。即FOUP，是本發明的「被 搬運物」的一例，由：具有將半導體晶圓等朝內外出入用 的蓋部的本體部、及後述的搬運台車5 00中的把持部可把 持的凸緣部所構成。車輛200，是被安裝成從軌道1 〇〇吊 下的形態，以例如線性馬達作爲動力在軌道1 00上行走。 各車輛200，是分別藉由無圖示的控制器等使行走及搬運 等的動作被控制。且，在此爲了方便說明，在軌道100上 只圖示2台車輛200a及車輛20 0b，但典型是具備更多（ 例如數十台或是數百台）的車輛200。 平台3 00，是沿著軌道1〇〇被複數設置。第！圖中的 平台300是透過後述的入庫部310及對應出庫部320的2 個出入口，可將FOUP出入。且，平台300，主要是對於 被收容在FOUP的半導體晶圓等的構件施加各種處理的製 造裝置和檢查裝置，即是將FOUP收容或保管的貯藏庫。 在第2圖中’平台3〇〇，具備：以突出的方式設置的 入庫部310及出庫部320。入庫部310，是具有例如皮帶 輸送機等’將從搬運台車被移載的FOUP朝平台300入庫 。此時’例如FOUP的蓋部是抵接在平台3 00中的出入口 。如此的話’藉由在平台3 0 0內部被驅動的移載用機械手 -14- 201100309 臂’使FOUP的蓋部被開放，使F〇UP內部的半導體晶圓 被引入平台3 0 0內部。如此的話，對於半導體晶圓，平台 300中的預定的處理被施加。出庫部320，是與入庫部310 同樣地具有皮帶輸送機等，藉由例如平台300內部的移載 用機械手臂使預定的處理完成的半導體晶圓被收容並將蓋 部已關閉的FOUP出庫。此時，將該FOUP朝搬運台車可 移載的位置移動。且，對於平台300，不是只有半導體晶 U 圓被出入，而是連同收容有半導體晶圓的FOUP —起被出 入也無妨。入庫部3 1 0及出庫部3 20，是如第2圖所示非 各別設置也可以。即入庫部3 1 0是兼具出庫部3 2 0的功能 也可以。且’入庫部310及出庫部320，是對於1個平台 300，分別設置2個以上也可以。且，入庫部310及出庫 部3 2 0是與地面之間隔有預定的空間地被設置，使後述的 搬運台車5〇0中的滾子可分別進入該定的空間。 且在此雖省略圖示，但是在平台300中，在上述的入 Q 庫部31〇及出庫部320以外，也具備對於車輛200進行 FOUP的入庫及出庫用的入庫部及出庫部。 返回至第1圖，搬運通路400，是搬運台車行走用的 通路，被挾持地設在複數平台3 00之間。搬運台車，當例 如系統停止且車輛200無法行走的情況等，藉由行走在此 搬運通路400，進行FOUP的搬運。且搬運通路400，除 了上述的搬運以外，也作爲進行搬運系統的維修作業等的 作業員的通路等功能。 -15- 201100309 <搬運台車> 以下，對於本實施例的搬運台車參照第3圖〜第18 圖說明。 <第1實施例> 首先，對於第1實施例的搬運台車的構成，參照第3 圖及第4圖說明。在此第3圖，是顯示第1實施例的未積 載時的搬運台車的構成的立體圖，第4圖，是顯示第1實 施例的積載時的搬運台車的構成的立體圖。 在第3圖中，第1實施例的搬運台車500，具備：本 體部510、及滾子520、及昇降部530、及把持部540。 本體部5 1 0，是由例如鋁和鐵等的金屬構成的框架， 藉由被作成從一方向視呈〕字型的形狀，使在其內部具有 比較大的空間。在本體部的內部的空間中，包含：將被搬 運物也就是FOUP積載用的空間也就是積載部、以及將平 台300中的入庫部310及出庫部320收容用的空間也就是 收容部。本體部510，當將與入庫部310或是出庫部3 20 相面對的側爲前側方的情況時，是朝向前後左右的四側方 之中的前左右的三側方被開口。 滾子520’是由被安裝於本體部510的下部底面的4 個滾子部所構成’與安裝有該4個滾子部的本體部5 1 0的 下部一起構成本發明的「行走手段」的一例。滾子520， 是藉由在搬運通路4〇〇a上旋轉而可以使搬運台車5 00走 行。且，在此的滾子520，雖是藉由作業員將搬運台車 -16- 201100309 500進行推或是拉引的動作而旋轉的方式構成，但是 例如電動馬達等被旋轉的方式構成也可以。 昇降部5 3 0，是本發明的「昇降手段」的一例， 成可將後述的把持部540對於本體部5 1 0昇降。藉著 降部5 3 0所産生的昇降動作，使把持部5 3 0被調整成 FOUP把持的適切的高度。對於昇降部530的具體的 是如後詳述。 0 把持部540，是本發明的「把持手段」的一例， 成可將FOUP把持。藉由把持部540使FOUP被把 FOUP就會成爲被積載在搬運台車500的狀態。對於 部540的具體的構成是如後詳述。 在第4圖中，被積載在搬運台車500的FOUP6 00 如圖所示，在被把持在把持部540的狀態下，被收容 體部5 1 0的內部的空間。即圖中的F ◦ U P 6 0 0被收容 間，是本體部510中的積載部’位於FOUP600的下 Q 空間是收容部。對於朝收容部的入庫部3 1 〇及出庫部 的收容，是在說明移載動作時詳述。 接著，對於上述的昇降部53〇的具體的構成’參 5圖〜第7圖說明。在此第5圖〜第7圖是分別顯示 台車中的昇降部的具體的構成的側面圖。 在第5圖中，昇降部530，是例如具備：昇降操 531a、及昇降小齒輪531b、及昇降齒條531c。昇降 是藉由作業員操作昇降操作桿5 3 1 a ’使昇降小齒輪 旋轉，使昇降齒條531c上下移動。藉此，使被安裝 藉由 被作 由昇 可將 構成 被作 持， 把持 ，是 在本 的空 方的 320 照第 搬運 作桿 時， 53 1b 於昇 -17- 201100309 降齒條5 3 1 c的把持部5 4 0昇降。 在第6圖中，昇降部530，是具備：昇降操作桿532a 、及皮帶捲取部532b、及昇降皮帶532c的構成也可以。 此情況，藉由作業員操作昇降操作桿53 2a，使皮帶捲取部 532b旋轉，使昇降皮帶532c捲入或是捲出皮帶捲取部 532b。藉此，使被安裝於昇降皮帶53 2c的把持部540昇 降。 在第7圖中，昇降部530，是具備：昇降操作桿533a '及昇降驅動部53 3b、及昇降皮帶5 3 3 c、及昇降支撐部 5 3 3 d、及線性導引53 3 e的構成也可以。此情況，藉由作 業員操作昇降操作桿53 3 a，使昇降驅動部5 3 3 b被驅動。 藉由昇降驅動部533b被驅動，使昇降支撐部53 3d沿著線 性導引533e上下移動。藉此，透過昇降皮帶532c使被安 裝於昇降支撐部5 3 3 d的把持部5 4 0昇降。 且在此所舉例的昇降部5 3 0的構成只是一例，使用具 有不同構成的昇降部5 3 0的情況，仍可實現上述的本實施 例的搬運台車500。 接著，對於藉由上述的昇降部530被驅動的把持部 540的具體的構成’參照第8圖〜第1〇圖說明。在此第8 圖〜第10圖是分別顯示搬運台車中的把持部的具體的構 成的部分擴大圖。 在第8圖中，把持部54〇，是例如具備：旋轉驅動部 541、及2個連接板542a及542c、及2個握部部543a及 5 4 3 b。將F 0 U P 6 0 0把持時，藉由作業員操作被安裝於旋 -18- 201100309 轉驅動部541的旋鈕（無圖示）等，使連接板542a及 542c被驅動，隨其使握部部543 a及543b進行開閉動作。 在第8圖所示的構成中，藉由將旋轉驅動部5 4 1朝右旋轉 使握部部543a及543b打開，藉由將旋轉驅動部541朝左 旋轉使握部部543 a及543b關閉。 在第9圖中，把持部540，具備：具有2個導引溝 544a及54 4b的旋轉驅動部541、及具有連接部545a的握 0 部部543 a及具有連接部545b的握部部543b也可以。此 情況，被安裝於旋轉驅動部5 4 1的旋鈕等是藉由被操作， 使連接部545a及545b沿著導引溝544a及544b移動，使 握部部543a及543b進行開閉動作。在第9圖所示的構成 中’藉由將旋轉驅動部5 4 1朝右旋轉使握部部5 4 3 a及 543b關閉，藉由將旋轉驅動部541朝左旋轉使握部部 543 a及543b打開。 在第1 0圖中，把持部540，具備：彼此嚙合的4個把 Q 持小齒輪546a、546b、546c、546d、及2個握部部547a 及547b也可以。此情況，被安裝於把持小齒輪546a的旋 鈕等是藉由被操作，使其他的把持小齒輪546b、546c及 546d旋轉’使握部部547a及547b進行開閉動作。且，第 10圖中的握部部547a及547b，是與第8圖及第9圖中的 握部部543a及543b相異，因爲是藉由旋轉運動開閉，所 以成爲形狀相異者。在第1 0圖所示的構成中，藉由將把 持小齒輪546a朝右旋轉使部部547a及547b打開，藉由 將把持小齒輪546a朝左旋轉使握部部547a及547b關閉 -19 - 201100309 且在此所舉例的把持部54〇的構成只是一例，使用具 有不同構成的把持部54〇的情況’仍可實現上述的本實施 例的搬運台車5〇〇。 接著’對於第1實施例的搬運台車500的移載 FOUP600時的動作，參照第11圖〜第14圖說明。在此第 1 1圖’是顯示將FOUP入庫時的對於搬運台車及平台的位 置關係的立體圖，第12圖，是顯示第1實施例的搬運台 車的FOUP移載時的動作的側面圖。且第13圖，是顯示 比較例的搬運台車的FOUP移載時的動作的側面圖，第} 4 圖，是顯示將FOUP出庫時的對於搬運台車及平台的位置 關係的立體圖。且，在第11圖〜第14圖中，爲了方便說 明，將如第3圖及第4圖等所示的搬運台車的詳細的構件 適宜省略圖示，對於之後的圖也同樣。 在第11圖及第12圖中，在第1實施例的搬運台車 500中的FOUP600的入庫時，滾子520及本體部510下部 會進入入庫部310下方的空間，並且在搬運台車500的收 容部’成爲入庫部3 1 0被收容狀態。即搬運台車5 0 0的本 體部5 1 0，是成爲從入庫部3 1 0 一側方（即第1 1圖中的本 體部510的前部）及下方（即第11圖中的本體部510的 下部）包圍的狀態。將被積載的F0UP600移載至入庫部 3 1 〇時，是如第1 2圖所示’藉由使昇降部5 3 〇被驅動使把 持部540下降，使F〇UP 600被放置在入庫部310上。且 ，進行移載時，是滾子520是藉由停止器等而不會旋轉的 -20- 201100309 方式被固定。 在第13圖中，假設由無法收容入庫部310的搬運台 車5 00a進行FOUP 6 00移載的情況的話，無法收容入庫部 3 10的部分，搬運台車500a會大大地佔位到搬運通路400 中的空間。此結果，操作搬運通路400中的搬運台車500a 的作業員的空間、和因其他的作業欲通行搬運通路4 0 0的 作業員的空間會極端地被限制。因此，如上述的情況時， & 可能會有作業效率的下降等的實行上的各式各樣的問題產 生。 對於此本實施例的搬運台車500，是如第11圖及第 12圖所示，因爲在搬運台車500的本體部510收容有入庫 部3 1 0，所以可以將搬運通路400的空間充分地保持。因 此，在比較狹窄的空間也可進行最佳的移載動作。 且在第1 3圖所示的情況，在搬運台車500a中的把持 部54〇中，除了由昇降部53 0所産生的昇降動作以外，也 Q 要求由臂550所産生的朝水平方向的動作。對於此，本實 施例的搬運台車5〇〇，因爲是在將入庫部3 1 0收容的狀態 下可移載FOUP600，所以只要可進行昇降部530的昇降動 作的話，不進行由臂55〇所産生的朝水平方向的動作也可 以。因此，可以由比較簡易的構成穩定實現FOUP600的 移載。且’由臂55〇所産生的朝水平方向的動作被省略的 部分，也可短縮FOUP 600的移載所需要時間。 在第14圖中’在第1實施例的搬運台車500中的 FOUP600的出庫時，滾子520及本體部510下部是進入入 201100309 庫部3 20下方的空間’並且成爲出庫部3 20被收容在搬運 台車500的收容部的狀態。即搬運台車500的本體部510 ，是成爲將出庫部3 2 0從一側方（即第1 4圖中的本體部 510的前部）及下方（即第14圖中的本體部510的下部） 包圍的狀態。因此’與第1 1圖及第1 2圖所示的入庫時同 樣地，成爲可最佳地移載FOUP600。 如以上說明’依據第1實施例的搬運台車5 00，因爲 本體部5 1 0具有將入庫部3 1 0及出庫部3 2 0收容的收容部 ，所以即使在比較狹窄的通路或是空間也不會妨害作業和 通行，可容易進行移載作業。且，FOUP的移載時，因爲 FOUP是時常存在於本體部510內，所以可穩定地進行移 載。因此，與移載時FOUP存在於本體部5 1 0外的情況相 比較，也可以將搬運台車5〇〇本體輕量地構成。 <第2實施例> 接著，對於第2實施例的搬運台車，參照第15圖及 第16圖說明。在此第15圖，是顯示第2實施例的搬運台 車中的把持部的構成的立體圖，第1 6圖，是顯示第2實 施例的搬運台車的構成的立體圖。且，第2實施例，與上 述的第1實施例相比的話，把持部的構成相異，對於其他 的構成等是大致同樣。因此在第2實施例中，只對於與第 1實施例不同的部分詳細說明，對於其他的重複的部分是 適宜並省略說明。且，在第15圖及第16圖中，與如第3 圖及第4圖等所示的第1實施例的構成要素同樣的構成要 -22- 201100309 素是附加同一的參照符號。 在第1 5圖中，第2實施例的搬運台車5 00，其把持部 540是形成如圖所示的形狀，如第1實施例的把持部540 (第8圖〜第10圖參照），在把持部540本身未設有驅 動處。由這種把持部540將FOUP600把持時，是藉由將 把持部540朝水平方向（即圖中的箭頭的方向）滑動，使 把持部540的一部分嵌入FOUP600中的把手部分及本體 0 部分及的間隙。 在第16圖中，第2實施例的搬運台車500，因爲是如 上述，不在把持部540本身設置驅動處也可以，所以可由 比較簡單的構成實現。即設有使把持部540可昇降的昇降 部53 0的話，就可確實地移載FOUP600。 將FOUP6〇0積載時，搬運台車5 00是藉由滾子520 被移動，把持部5 4 0是將F Ο U P 6 0 0把持的狀態。更具體 而言，首先藉由昇降部530，使FOUP600及把持部540彼 Q 此的高度被調整之後，藉由滾子520使搬運台車500朝 FOUP600側行走，將FOUP600把持。且，藉由昇降部530 使把持部上昇，FOUP600成爲被積載在搬運台車500的狀 態。且，將積載的FOUP600入庫時，藉由進行與上述的 動作相反的動作，就可確實地將FOUP 600移載至平台300 〇 如以上說明，依據第2實施例的搬運台車500，搬運 台車的構成可以更簡單。 -23- 201100309 <第3實施例> 接著，對於第3實施例的搬運台車，參照第17圖及 第18圖說明。在此第17圖’是顯示第3實施例的搬運台 車的構成的側面圖’第18圖，是顯示第3實施例的搬運 台車的FOUP移載時的動作的側面圖。且，第3實施例， 與上述的第1及第2實施例相比的話，具備落下防止部的 點相異，對於其他的構成等是大致同樣。因此在第3實施 例中’只對於與第1及第2實施例不同的部分詳細說明， 對於其他的重複的部分是適宜並省略說明。且，在第17 圖及第18圖中，對於與如第11圖等所示的第1實施例的 構成要素同樣的構成要素是附加同一的參照符號。 在第17圖中，第3實施例的搬運台車5 00,是除了上 述的第1及第2實施例的構成以外，具備防止被積載的 FOUP600落下用的落下防止部5 60。 落下防止部5 6 0，是本發明的「落下防止手段」的一 例，設在本體部5 1 0中的積載部的下方。落下防止部560 ，是形成例如板狀的構件，藉由將被積載FOUP600從下 方側支撐使防止落下。 在第18圖中，落下防止部5 60，是將入庫部310或是 出庫部3 2 0收容在收容部時，被容納於不會妨害收容的位 置。具體而言，落下防止手部5 40，是對應例如操作桿和 操作桿等的操作可動，且移載 FOUP600時，如圖所示成 爲被容納於不會與入庫部3 1 0接觸的位置的狀態。 落下防止部560收容時藉由被容納，就可以回避因落 -24- 201100309 下防止部560的存在而妨害入庫部3 10或是出庫部320的 收容。因此，成爲可最佳地進行搬運及移載。 如以上說明，依據第3實施例的搬運台車5 00，藉由 具備落下防止部5 60，就可以防止搬運中的F〇UP 6 00落下 。特別是，在搬運如半導體晶圓的衝擊較弱的精密的構件 或是裝置時，上述的效果可顯著地被發揮。 & <第4實施例> 〇 接著，對於第4實施例的搬運台車，參照第1 9圖說 明。在此第1 9圖中，是顯示第4實施例的搬運台車的構 成的立體圖。且，第4實施例，是與上述的各實施例相比 的話，移載的FOUP可旋轉的點相異，對於其他的構成等 是大致同樣。因此在第4實施例中，只對於與第1至第3 實施例不同的部分詳細說明，對於其他的重複的部分是適 宜並省略說明。且，在第19圖中，與如第1圖及第4圖 0 等所示的第1實施例的構成要素同樣的構成要素是附加同 一的參照符號。 在第19圖中，第4實施例的搬運台車500，具備可將 昇降部530及把持部540旋轉用的旋轉台570。旋轉台 5 70，是被作成沿著水平方向可旋轉，可變更昇降部530 及把持部540的方向（即被把持在把持部540的FOUP的 方向）。 如以上說明，依據第4實施例的搬運台車500，藉由 具備旋轉台570，就可最佳地進行FOUP400的移載動作。 -25- 201100309 且上述的第1至第4實施例的搬運台車500，是適應 具備入庫部310及出庫部320的平台300之間的FOUP的 移載（換言之入庫及出庫），但是平台的形態不限於此。 第20圖，是顯示與第2圖的平台不同的平台的一例 的立體圖。在第20圖中，平台1 300，具備可分別將4個 FOUP獨立入庫或是出庫，且無切縫的4個入出庫部 1310a〜1310d。對於如此的平台1300，將被搬運至搬運台 車5 00的FOUP入庫時，是與上述的各實施例同樣地，首 先將滾子5 20及本體部510下部進入第1入出庫部1310a 下方的空間，並且使第1入出庫部1 3 1 0a成爲被收容在搬 運台車5 0 0的收容部的狀態。此後，將平台1 3 0 0中的第2 入出庫部l3l〇b上的FOUP出庫時，本體部510是朝與4 個入出庫部1310a〜1310d並列的一方向平行的水平—方 向（即第20圖中的左右方向）移動，使滾子520及本體 部510下部是進入第2入出庫部1310b下方的空間，並且 使第2入出庫部1310b成爲被收容在搬運台車500的收容 部的狀態。如此搬運台車5 0 0的朝水平一方向的移動，是 藉由使相面對於入出庫部1310的本體部510朝向前左右 的三側方開口而被實現。即不需進行將搬運台車5 0 0朝對 於入出庫部1310垂直方向拉引或是推等的操作，就可在 相鄰接的複數入出庫部1 3 1 0 a〜1 3 1 0 d之間朝水平一方向 往復移動。 如以上說明’對於本體部5 1 0，前左右的三側方因爲 被開放’所以在相鄰接的複數入出庫部之間移載FOUP時 -26- 201100309 ，可在與相鄰接的複數入出庫部並列的一方向平行的水平 一方向往復移動，在與相鄰接的複數入出庫部之間進行的 FOUP的移載可在短時間有效率地進行。 本發明，是並非限定於上述的第1至第4實施例，在 不違反可從申請專利範圍及說明書整體讀取的發明的實質 或是思想的範圍內可適宜地變更，如此變更的搬運台車也 包含於本發明的技術的範圍。 〇 【圖式簡單說明】 [第1圖]將搬運系統的整體構成槪略地顯示的俯視圖 〇 [第2圖]顯示平台的具體的構成的立體圖。 [第3圖]顯示第1實施例的未積載時的搬運台車的構 成的立體圖。 [第4圖]顯示第1實施例的積載時的搬運台車的構成 Q 的立體圖。 [第5圖]顯示搬運台車中的昇降部的具體的構成的側 面圖（其1 )。 [第6圖]顯示搬運台車中的昇降部的具體的構成的側 面圖（其2 )。 [第7圖]顯示搬運台車中的昇降部的具體的構成的側 面圖（其3 )。 [第8圖]顯示搬運台車中的把持部的具體的構成的部 分擴大圖（其1 )。 -27- 201100309 [第9圖]顯示搬運台車中的把持部的具體的構成的部 分擴大圖（其2 )。 [第10圖]顯示搬運台車中的把持部的具體的構成的部 分擴大圖（其3)。 [第1 1圖]顯示將FOUP入庫時的對於搬運台車及平台 的位置關係的立體圖。 [第12圖]顯示第1實施例的搬運台車的FOUP移載時 的動作的側面圖。 [第1 3圖]顯示比較例的搬運台車的FOUP移載時的動 作的側面圖。 [第14圖]顯示將FOUP出庫時的對於搬運台車及平台 的位置關係的立體圖。 [第15圖]顯示第2實施例的搬運台車中的把持部的構 成的立體圖。 [第1 6圖]顯示第2實施例的搬運台車的構成的立體圖 〇 [第17圖]顯示第3實施例的搬運台車的構成的側面圖 〇 [第18圖]顯示第3實施例的搬運台車的FOUP移載時 的動作的側面圖。 [第19圖]顯示第4實施例的搬運台車的構成的立體圖 〇 [第20圖]顯不與第2圖的平台不同的平台的一例的立 體圖。 -28- 201100309 【主要元件符號說明】 100 ： 1軌道 200 ： 車輛 200a :車輛 200b ：車輛 3 00 ： 平台 3 10： 入庫部 3 20 ： 出庫部 400 ： 搬運通路 400a :搬運通路 5 00 ： 搬運台車 500a :搬運台車 5 10： 本體部 5 20 ： 滾子 5 3 0 ： 昇降部 〇 531a :昇降操作桿 5 3 1b •昇降小齒輪 53 1c :昇降齒條 5 3 2a :昇降操作桿 5 3 2b :皮帶捲取部 5 3 2c :昇降皮帶 5 3 3 a :昇降操作桿 53 3 b :昇降驅動部 5 3 3 c ： :昇降皮帶 201100309 5 3 3 d :昇降支 5 3 3 e :線性導 540 :把持部 5 4 1 :旋轉驅震 542a :連接板 5 4 3 a :握部部 543b :握部部 544a ， 544b ： 545 a :連接部 545b :連接部 546a ， 546b ， 5 4 7 a :握部部 5 5 0 ：臂 5 6 0 :落下防ij 5 7 〇 :旋轉台 600 ： FOUP 1300：平台 1 3 1 0 :入出庫 1310a 〜1310d 撐部 引 力部 導引溝 546c :把持小齒輪 二部 部 :入出庫部 -30-[Technical Field] The present invention relates to a container such as a FOUP (Front 通用 Pening Unified Pod) in which various substrates and the like for manufacturing a semiconductor device are housed, that is, The technical field of the transporting trolley that is transported to a platform such as a manufacturing facility or a storage facility. [Prior Art] It has been disclosed that the object to be transported by such a transporting trolley can accommodate a plurality of, for example, a semiconductor wafer FOUP (for example, Patent Document 1). For semiconductor wafers accommodated in such F Ο U P, there is a need to reduce the manufacturing cost of a semiconductor device. In recent years, it has been required to achieve a large diameter, for example, a diameter of 450 mm. When the diameter of the semiconductor wafer is increased to a large size and the weight is increased, for example, when the diameter is 3 〇〇mm, the weight is 1 Okg FOUP, but when the diameter is 45 0 mm, it is predicted to become 20kg or more. In this case, it is difficult for the operator to carry the direct transfer of the FOUP of 2 〇kg or more directly between the entry and exit sections of the plurality of platforms in the plurality of platforms. A PGV (Personal Guided Vehicle) that is controlled by the operator's manual operation has been formally used (for example, the patent document), in which the handling of the large-sized and heavy-duty FOUP is carried out by the operator. 2 reference). Specifically, in response to the manual operation of the operator, the PGV in which the FOUP is housed is traveled until the opening and exit ports in the manufacturing facility and the storage facility 201100309. That is, FOUP & [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent [Patent Document 2] Japanese Experts 0 [Disclosure] (Problems to be Solved by the Invention) Here, for semiconductor manufacturing The cost of the installation and the high operating costs, so the majority of the platform. Therefore, the width of the path between the two flat portions is the passage of the PGV when the narrow PGV exists in its path. In other words, it is possible to carry out the obstacles of Q during the transfer, and the present invention is effective in various types of work, and it is easy to advance (for the purpose of solving the problem) in order to solve the problem, for example, in the case of the above-described transportation trolley. In the above-mentioned problem, the present invention is transported, and the platform that protrudes from the platform is placed in or out of the library, and the inbound and outbound port is in/out of the storage. In the case of the installation of the clean room or the like of the Japanese Patent Publication No. 4092783, the construction is performed as much as possible in the installation, and if it is 90 cm or less of the two entrances and exits facing each other, one is This will hinder the operator and other handling trolleys, which will become a technical problem in the decline of the passage rate. The problem is that the path or space that provides one will not be a transfer operation. In the transporting trolley of the present invention, the transported object is transported, and the object to be transported is transferred to the storage unit, or -5-201100309, and the object to be transported is transferred from the loading and unloading unit, and is characterized in that The main body portion has a space in which the object to be transported is stored, that is, a stowage portion and a space to be placed at a position below the stowage portion, and the inlet and outlet portions are at least partially surrounded from one side and the lower side, that is, the space is accommodated. a portion that is open to the other side except for the one side, at least the inlet and outlet portion and a portion corresponding to the object to be transported that is transferred to the depositing and dispensing portion are opened; and a traveling means is provided in the main body portion a lower portion of the accommodating portion may be disposed below the inlet and outlet portion; and a transfer means may be disposed above the stacking portion of the main body portion, and the traveling means may be disposed below the inlet and outlet portion And the storage unit is placed in the storage unit state through the other side, and the conveyed object to be stored in the storage unit is moved. The loading/unloading unit that has been discharged from the loading/unloading unit to the loading and unloading unit is transported to the loading unit according to the present invention. For example, the operator manually operates the semiconductor wafer or the like. The platform in the transport system that is automatically transported 'transports the object to be transported and is stored in the warehouse. Or, the transported objects that have been removed from the platform are transported to the transport trolleys and transported to other platforms. In addition, the "platform" as used herein may mean only a storage place where the object to be transported is stored, or a work platform, a manufacturing device, or a processing device that can perform various operations on the object to be transported, and even have a combination It is also possible to transport or transfer different distances of the objects to be transported at the storage and delivery points. Such a platform is provided with an entrance/exit portion for opening and closing the object to be transported inside and outside. The entrance and exit department is typically set such that it is located at a height of about 900 mm from the ground of -6-201100309. In this case, a positioning means for positioning the object to be transported is provided. For example, when a convex portion having a height of 20 mm is placed in the storage unit, the configuration can be fitted to the object to be moved, that is, the positioning means. Therefore, when the transported transport vehicle is being transported, it is necessary to transport the 0 height distance in order to eliminate the fitting state of the recessed portion on the side of the storage unit. In a transport system having a platform, a vehicle on a rail such as a ceiling rail or the like, and a transport vehicle such as OHT (1 Overhead Hoist Transport) are transported. The truck transports the objects to be transported along the track. However, when the operation of the system is stopped, the object to be transported is not in a place where the rail is not laid, and the object to be transported cannot be transported. On the other hand, the object to be transported is a large wafer or the like. The 500mm x 550mm x 400mm height for semiconductor wafer handling with a large diameter and a large weight of 45 mm is used. Therefore, the weight of the semiconductor wafer is held by the operator. Therefore, as described above, when the transport vehicle in the system is absent, various problems may occur. However, the transport carriage of the present invention can be transported regardless of the transported object. When the transport system is stopped, it is used as a positioning means for loading and unloading the upper part of the storage unit. When the object to be transported by the object to be transported is lifted from the entrance and exit of the storage unit to the side of the conveyance and the object to be conveyed, at least the convex portion is placed, for example, in the I-mounted transport system, and the F0UP is The set of multiple platforms is carried, for example, for faults and maintenance methods. And, for the stock market. With the handling of semiconductors. Specifically, for example, F0UP is set to be 20 kg or more. It is very difficult to carry the handling. The handling of the conveyed objects is carried out. 动作 The operation of the system allows the operator to easily transport the 201100309. Moreover, even if the conveyance starting point or the conveyance end point is a place where the rail is not laid, the conveyed object can be conveyed. In particular, the transporting trolley of the present invention includes a main body portion that has a space in which the object to be transported is stored, that is, a stowage portion, and a position below the stowage portion that at least partially surrounds the loading and unloading portion from one side and below. The space accommodated in the manner is the accommodating portion, and is opened to the other side except for one side. The "side" here is a commemoration of the front, rear, left and right directions (i.e., in the horizontal direction) of the transporting carriage, and includes various directions in a broad sense except for the vertical direction. In this case, for example, "one side" means that the rear side of the transport carriage facing the entrance/exit portion (i.e., the side farthest from the entrance/exit portion) may be used. The term "the other side" refers to the three directions of the front left and the right of the transport trolley facing the entrance and exit section (that is, the side closest to the side of the entrance and exit and the left and right sides). Also. "Bottom" refers to the downward direction of the handling trolley. Practically, the main body portion is configured to store the to-be-loaded object to be carried in the stowage portion, and to accommodate the in-and-out-out portion in the housing portion and to have an opening in the main body portion (that is, the stowage portion and the housing portion) and the main body portion. It will be connected to the goods and the storage department. In other words, the main body portion may have an opening in a portion corresponding to at least the inlet and outlet portion and the object to be transported in the three directions of the front left and right. Such an opening allows the stowed objects to be carried and the containers to be taken in and out, and is respectively stowed or housed in the stowage portion and the accommodating portion. The main body portion is typically formed in a zigzag shape, and a relatively wide space having a stowage portion and a accommodating portion is formed in the inner portion. The main body portion may be, for example, a combination of a tubular skeleton or a plate-shaped member. -8- 201100309 may be used. A traveling means is provided below the accommodating portion in the main body portion, for example, a wheel and a mounting portion that rotatably mounts the wheel. The worker can perform the operation by pushing or pulling, etc. The path is also configurable below the entry and exit section. In other words, the height of the floor of the conveyance path from the traveling means is, for example, 1 〇〇mm or less, and is lower than the height of the space between the bottom surface of the storage unit and the floor of the transportation path. Here, the "lower side of the accommodating portion" is a commemoration including the right side of the accommodating portion or the periphery of the accommodating portion, and includes the accommodating portion of the accommodating portion. Further, electric walking by a motor or the like is also possible. In the state in which the object to be transported is carried in the stowage portion of the main body, the transported object is transported by the transport carriage. A transfer means is provided above the stowage portion of the main body portion, and when the object to be transported to be stored in the stowage portion is transferred to the entrance and exit portion, the traveling means is disposed below the entrance and exit portion, and The transfer operation is performed in a state where the other side (i.e., the opening) of the main body portion is housed in the accommodating portion. In the same manner, when the object to be transported from the deposit/withdrawal unit is transferred to the stowage unit of the transporting vehicle, the traveling means is disposed in the lower part of the loading and unloading unit, and the loading and unloading unit is transmitted through the main body. The other side is stored in the accommodating part and the transfer operation is performed. At the time of accommodation in the storage unit, the opening and exiting portion is stored in the main body portion from the opening of the main body portion. In addition, the "accommodation" is not limited to the state in which the entire storage unit is covered by the main body portion. The state in which the storage unit is partially surrounded by the main body portion is also included. The transporting carriage of the present invention maintains the above-described accommodation state, in particular, by the opening toward the other side of the main body portion -9-201100309 (that is, the side opening in three directions in the main body portion), and for example, along the horizontal A wide width of the inlet and outlet sections, or a plurality of slitless multiples can be reciprocated in a horizontal direction between the inlet and outlet sections. The storage trolley is placed close to the platform side by being housed in the storage unit in the housing portion of the main body portion. In other words, the portion in which the accommodating portion accommodates the accommodating portion can reduce the occupied area of the transporting trolley in the transport path or the like. Therefore, when the object to be transported is transferred, it is possible to effectively prevent the transporting trolley from impeding the passage of the operator and other transporting trolleys. In the present invention, it is further possible to achieve optimal transfer of the transported object by bringing the transport carriage closer to the platform side during the transfer. For example, in the case where the loading/unloading unit cannot be transported in the state of being stored in the accommodating portion, the transfer device requires the lifting operation and the horizontal movement in order to transfer the object to be transported. However, since the transporting carriage of the present invention can be transported while the loading/unloading unit is housed in the accommodating portion, it can be transferred only by the lifting operation. In other words, by shortening the distance between the transporting trolley and the object to be transported, it is possible to more easily transfer the object to be transported. As described above, according to the transporting carriage of the present invention, since the main body portion has the accommodating portion for accommodating the storage unit, the relatively small passage or space does not hinder the work and the traffic, and the transfer operation can be easily performed. Further, when the object to be transported is transferred, since the object to be transported is always present in the body, the transfer can be stably performed. Therefore, the conveyance bogie body can be made lightweight as compared with the case where the conveyed object exists outside the main body portion at the time of transfer. Therefore, the main body portion has an opening toward the other side -10- 201100309. It is transferred between the two adjacent storage and delivery units and is transported to the two inlet and outlet units in the vertical direction. It is possible to reciprocate in a direction parallel to the two inbound and outbound sections, or to transfer efficiently between them in a short time. In one aspect of the transporting trolley of the present invention, the gripping means for holding the object to be conveyed and the lifting means for lowering the weight are provided. According to this aspect, the transfer means is provided with the gripping by the gripping object or the gripping. Further, in the transfer means, in addition to the holding means, when the transfer of the object to be carried is carried out, it is lifted up and down (i.e., moved up and down). Thereby, the object to be conveyed by the holding means can be adjusted to an appropriate height. Therefore, it is possible to carry things. In another aspect of the conveyance trolley of the present invention, the vehicle is placed in the front portion, and the carried object is prevented from being transported from the aforementioned According to this aspect, the stowage tribe is provided with a drop in the main body portion to prevent the falling of the object to be transported in the stowage portion. Specifically, the segment is provided below the stowage portion, and the supported object is supported from the lower side to prevent the "support" of the object to be transported from the stowage portion. Push the operation. In the horizontal direction, the two loading and unloading means are provided by the above-mentioned holding means, and the holding means is carried out to carry out the lifting means, and the lifting means is provided to raise the height of the holding means, and the transfer is carried out for the purpose of transfer. In addition, the lower side of the stowage part is provided with a support means from the lower side, and the load is placed, and the falling hand is prevented from being transported and dropped. Moreover, the meaning of support -11 - 201100309 at this time also includes the state that is supported when it is about to fall. In other words, the falling prevention means may be such that the object to be transported on the stowage portion is always in contact with the object to be transported, and the object to be transported from the stowage portion may be blocked from the lower side. Since the falling object can be prevented from falling by the falling prevention means, the object to be transported can be optimally conveyed. In particular, when a precise member or device having a weak impact such as a semiconductor wafer is carried, the above effects can be remarkably exerted. In the aspect of the above-described fall prevention means, the fall prevention means is provided in the accommodating portion, and is accommodated at a position where the deposit/receer portion is housed in the accommodating portion, and does not hinder the aforementioned It is also acceptable to enter the storage department. According to this configuration, the fall prevention means is provided in the accommodating portion located below the stowage portion, so that the object to be transported during transportation can be supported from below, thereby preventing the fall. In this aspect, in particular, the drop prevention means is accommodated in a position where the storage unit is accommodated in the storage unit without being hindered from being accommodated in the storage unit. The fall prevention means is operated in response to, for example, an operation lever, an operation lever, and the like, and is operated by the operator to transport the trolley. Further, it is also possible to automatically accommodate the accommodating portion by detecting the accommodating portion. By accommodating the fall prevention means at the time of accommodation, it is possible to avoid the occlusion of the entrance/exit portion due to the presence of the fall prevention means. Therefore, it is possible to carry out and transfer optimally. In another aspect of the transport trolley of the present invention, the transfer means is rotatable in a horizontal direction with respect to the main body portion. -12 - 201100309 According to this aspect, by moving the transfer means to the main body portion in the horizontal direction, the direction of the object to be transported during transfer can be appropriately changed. That is, the direction of the object to be transported can be changed without rotating the body portion of the transport trolley. In the configuration described above, for example, when the object to be transported is transferred from the storage unit, the direction of the conveyed object does not change when the object to be transported is transferred to and from the storage unit. Transfer. In addition, when the moving object is transferred from the loading/unloading unit, if the direction of the transfer means and the object to be transported is not aligned, the direction of the transfer means can be finely adjusted. The transfer operation can be optimally performed. The effects of the present invention and other gains will be apparent from the best mode of the invention as described hereinafter. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. 〇 <Transportation System> First, the configuration of the transport system including the transfer end point or the transfer start point of the FOUP transported by the transport carriage of the present embodiment, which is the configuration of the platform, will be described with reference to Figs. 1 and 2 . Here, Fig. 1 is a plan view schematically showing the overall configuration of the transport system, and Fig. 2 is a perspective view showing a specific configuration of the display platform. In Fig. 1, the transport system includes a rail 100, a plurality of vehicles 200, and a plurality of platforms 300' and a transport path 400. -13- 201100309 Track 100 is, for example, laid on a ceiling and made of metal such as aluminum or stainless steel. Further, for convenience of explanation, the configuration of the track 100 is only a relatively simple configuration, but the actual track 100 may have a complicated configuration having, for example, more branching and joining. The vehicle 200 travels along the track 100 to transport the FOUP in which the semiconductor wafer or the like is accommodated. In other words, the FOUP is an example of the "object to be transported" of the present invention, and includes a main body portion having a lid portion for feeding in and out of a semiconductor wafer or the like, and a flange that can be gripped by a grip portion of a transport carriage 500 to be described later. The composition of the ministry. The vehicle 200 is mounted in a form suspended from the rail 1 and travels on the rail 100 with a linear motor as a power. Each of the vehicles 200 is controlled by an operation such as walking or transportation by a controller or the like (not shown). Here, for convenience of explanation, only two vehicles 200a and 20w are shown on the rail 100, but typically there are more (for example, dozens or hundreds) of vehicles 200. Platform 3 00 is set along the track 1〇〇. The first! The platform 300 in the figure is a two-port entrance and exit through the storage unit 310 and the corresponding delivery unit 320 which will be described later, and the FOUP can be taken in and out. Further, the stage 300 is mainly a manufacturing apparatus and an inspection apparatus that apply various processes to members such as semiconductor wafers housed in the FOUP, that is, a storage in which the FOUP is stored or stored. In Fig. 2, the platform 3 includes a storage unit 310 and a delivery unit 320 which are provided in a protruding manner. The warehousing unit 310 has, for example, a belt conveyor or the like, and stores the FOUP transferred from the transport vehicle toward the platform 300. At this time, for example, the cover portion of the FOUP is an entrance and exit that abuts on the platform 300. In this case, the cover portion of the FOUP is opened by the transfer robot -14-201100309 arm driven inside the platform 300, and the semiconductor wafer inside the F〇UP is introduced into the inside of the platform 300. As such, for semiconductor wafers, predetermined processing in the platform 300 is applied. In the same manner as the storage unit 310, the delivery unit 320 has a belt conveyor or the like, and the semiconductor wafer in which the predetermined processing is completed is housed by, for example, the transfer robot inside the platform 300, and the FOUP whose lid is closed is taken out. At this time, the FOUP is moved to a position where the transport trolley can be transferred. Further, with respect to the stage 300, it is not the case that only the semiconductor crystal U circle is taken in and out, and it is also possible to enter and exit together with the FOUP in which the semiconductor wafer is housed. The storage unit 3 1 0 and the delivery unit 3 20 may be provided separately as shown in Fig. 2 . That is, the storage unit 301 is a function that also has the function of the delivery unit 306. Further, the storage unit 310 and the delivery unit 320 may be provided for two or more platforms 300, respectively. Further, the storage unit 310 and the delivery unit 306 are provided with a predetermined space from the ground, and the rollers in the transport vehicle 5〇0, which will be described later, can enter the predetermined space. Although not shown in the drawings, the platform 300 includes a storage unit and a storage unit for performing the FOUP storage and delivery of the vehicle 200 in addition to the above-described input and storage unit 31 and the storage unit 320. Returning to Fig. 1, the conveyance path 400 is a passage for transporting the trolley, and is held between the plurality of platforms 300. In the transporting carriage, for example, when the system is stopped and the vehicle 200 cannot travel, the FOUP is transported by walking on the transport path 400. In addition to the above-described transportation, the transport path 400 functions as a path for a worker who performs maintenance work of the transport system. -15- 201100309 <Transportation Pallet> Hereinafter, the conveyance trolley of the present embodiment will be described with reference to Figs. 3 to 18 . <First Embodiment> First, the configuration of the transport trolley of the first embodiment will be described with reference to Figs. 3 and 4 . In the third embodiment, a perspective view of the configuration of the transporting carriage when the unloading of the first embodiment is shown is shown. Fig. 4 is a perspective view showing the configuration of the transporting trolley during the stowage of the first embodiment. In the third embodiment, the transporting carriage 500 of the first embodiment includes a body portion 510, a roller 520, a lifting portion 530, and a grip portion 540. The main body portion 510 is a frame made of a metal such as aluminum or iron, and has a shape which is formed in a zigzag shape from one direction, and has a relatively large space inside. The space inside the main body portion includes a space for storing the object to be transported, that is, the FOUP, that is, the stowage portion, and a space for accommodating the storage unit 310 and the storage unit 320 in the platform 300, that is, the accommodating portion. When the side facing the storage unit 310 or the delivery unit 3 20 is the front side, the main body portion 510 is opened to the front left and right sides of the four sides of the front, rear, left, and right sides. The roller 520' is constituted by four roller portions attached to the lower bottom surface of the main body portion 510, and constitutes a "walking means" of the present invention together with a lower portion of the main body portion 510 to which the four roller portions are attached. An example. The roller 520 can move the transport carriage 500 by rotating on the transport path 4a. In addition, the roller 520 is configured to be rotated by an operation of pushing or pulling the conveyance trolley -16 - 201100309 500. However, the electric motor or the like may be configured to be rotated. The lifting portion 530 is an example of the "elevating means" of the present invention, and the holding portion 540, which will be described later, can be raised and lowered with respect to the main body portion 510. The grip portion 530 is adjusted to a suitable height for the FOUP grip by the lifting operation generated by the lower portion 530. The details of the lifting portion 530 are as described in detail later. The grip unit 540 is an example of the "holding means" of the present invention, and the FOUP can be held. By the grip unit 540, the FOUP is placed in the state in which the FOUP is stowed on the transport vehicle 500. The specific configuration of the portion 540 is as described in detail later. In the fourth embodiment, the FOUP 6 00 which is carried on the transport carriage 500 is housed in the space inside the body portion 50 10 while being held by the grip portion 540 as shown in the figure. That is, the F ◦ U P 60 0 in the figure is accommodated, and the stump portion in the main body portion 510 is located in the lower Q space of the FOUP 600 as the accommodating portion. The storage of the storage unit 3 1 〇 and the delivery unit toward the storage unit is described in detail when explaining the transfer operation. Next, the specific configuration of the above-described lifting portion 53A will be described with reference to Figs. Here, Fig. 5 to Fig. 7 are side views each showing a specific configuration of the elevating portion in the bogie. In Fig. 5, the lifting portion 530 includes, for example, a lifting operation 531a, a lifting pinion 531b, and a lifting rack 531c. The lifting is performed by the operator operating the lifting lever 5 3 1 a ' to rotate the lifting pinion to move the lifting rack 531c up and down. In this way, when it is installed, it can be held by the lifter, and it is held in the empty space of the 320. When the handle is taken, the lift is -17-201100309 and the rack is lowered 5 3 1 The grip portion of c is raised and lowered. In the sixth embodiment, the lifting portion 530 may include a lifting operation lever 532a, a belt winding portion 532b, and a lifting belt 532c. In this case, the operator operates the elevation operating lever 53 2a to rotate the belt winding portion 532b, and the lifting belt 532c is wound up or unwound from the belt winding portion 532b. Thereby, the grip portion 540 attached to the lift belt 53 2c is raised and lowered. In Fig. 7, the lifting portion 530 includes an elevation operating lever 533a', a lifting drive portion 53 3b, a lifting belt 5 3 3 c, a lifting support portion 53 3 d, and a linear guide 53 3 e. The composition is also ok. In this case, the elevator operating portion 53 3 a is operated by the operator operating the elevation operating lever 53 3 a. When the elevation drive unit 533b is driven, the elevation support portion 53 3d is moved up and down along the linear guide 533e. Thereby, the grip portion 504 that is mounted on the elevating support portion 5 3 3 d is lifted and lowered by the elevating belt 532c. Further, the configuration of the elevating portion 530 as exemplified herein is only an example, and the above-described transporting carriage 500 of the present embodiment can be realized even when the elevating portion 530 having a different configuration is used. Next, the specific configuration of the grip unit 540 driven by the above-described elevating unit 530 will be described with reference to Figs. 8 to 1 . Here, Fig. 8 to Fig. 10 are partially enlarged views showing a specific configuration of the grip portion in the transporting trolley, respectively. In Fig. 8, the grip portion 54 is provided with, for example, a rotary drive unit 541, two connection plates 542a and 542c, and two grip portions 543a and 543b. When the F 0 UP 605 is gripped, the operator operates the knob (not shown) or the like attached to the rotary -18-201100309 rotary drive unit 541, and the connecting plates 542a and 542c are driven to follow the grip portion. Parts 543 a and 543 b open and close. In the configuration shown in Fig. 8, the grip portions 543a and 543b are opened by rotating the rotation driving portion 541 to the right, and the grip portions 543a and 543b are closed by rotating the rotation driving portion 541 to the left. . In Fig. 9, the grip portion 540 includes a rotation driving portion 541 having two guiding grooves 544a and 544b, a grip portion 543a having a connecting portion 545a, and a grip portion 543b having a connecting portion 545b. Also. In this case, the knob or the like attached to the rotary drive unit 514 is operated to move the connection portions 545a and 545b along the guide grooves 544a and 544b, and the grip portions 543a and 543b are opened and closed. In the configuration shown in Fig. 9, the grip portions 5 4 3 a and 543b are closed by rotating the rotation driving portion 541 to the right, and the grip portion 543 a is rotated by rotating the rotation driving portion 541 to the left. And 543b opens. In the tenth diagram, the grip portion 540 may include four pin-holding pinions 546a, 546b, 546c, and 546d that are engaged with each other, and two grip portions 547a and 547b. In this case, the knob or the like attached to the pinion gear 546a is operated to rotate the other pinion gears 546b, 546c, and 546d to open and close the grip portions 547a and 547b. Further, the grip portions 547a and 547b in Fig. 10 are different from the grip portions 543a and 543b in Figs. 8 and 9 because they are opened and closed by a rotational motion, and thus have a shape difference. In the configuration shown in Fig. 10, the grip portions 547a and 547b are opened by rotating the grip pinion 546a to the right, and the grip portions 547a and 547b are closed by rotating the grip pinion 546a to the left. 201100309 The configuration of the grip portion 54A exemplified herein is only an example, and the transporting carriage 5 of the above-described embodiment can be realized even when the grip portion 54A having a different configuration is used. Next, the operation at the time of transferring the FOUP 600 of the transporting carriage 500 of the first embodiment will be described with reference to Figs. 11 to 14 . Here, Fig. 1 is a perspective view showing the positional relationship between the transporting carriage and the platform when the FOUP is put into storage, and Fig. 12 is a side view showing the operation at the time of FOUP transfer of the transporting carriage of the first embodiment. Fig. 13 is a side view showing the operation of the transporting carriage of the comparative example when the FOUP is transferred, and Fig. 4 is a perspective view showing the positional relationship between the transporting carriage and the platform when the FOUP is taken out of the warehouse. In the drawings, the detailed members of the transporting trolley shown in Fig. 3 and Fig. 4 and the like are omitted as appropriate, and the same applies to the subsequent drawings. In the 11th and 12th drawings, when the FOUP 600 in the transport carriage 500 of the first embodiment is stored, the roller 520 and the lower portion of the main body portion 510 enter the space below the storage unit 310, and the storage of the transport vehicle 500 is performed. The department 'is in the storage state of the storage unit 3 1 0. That is, the main body portion 510 of the transporting vehicle 500 is located from the side of the storage unit 3 1 0 (that is, the front portion of the main body portion 510 in FIG. 1) and below (that is, the main body portion in FIG. 11). The state of the lower part of 510). When the loaded F0UP 600 is transferred to the storage unit 3 1 〇, as shown in Fig. 2, the lift unit 540 is driven to lower the grip unit 540, so that the F〇UP 600 is placed in the storage unit. 310. Further, when the transfer is performed, the roller 520 is not rotated by a stopper or the like, and the -20-201100309 mode is fixed. In the case of FIG. 13, it is assumed that the transfer of the FOUP 6 00 by the transport carriage 5 00a that cannot be stored in the storage unit 310 does not allow the storage unit 3 10 to be accommodated, and the transport carriage 500a largely occupies the transport path 400. Space. As a result, the space of the worker who transports the transport vehicle 500a in the transport path 400 and the space of the worker who wants to pass the transport path 400 by other work are extremely limited. Therefore, in the case of the above, various problems such as a decrease in work efficiency may occur. In the transporting carriage 500 of the present embodiment, as shown in FIGS. 11 and 12, since the storage unit 310 is accommodated in the main body portion 510 of the transporting carriage 500, the space of the transport path 400 can be sufficiently maintained. . Therefore, the optimal transfer operation can be performed in a relatively narrow space. Further, in the case shown in Fig. 3, in the grip portion 54 of the transporting carriage 500a, in addition to the lifting operation by the lifting portion 53 0, Q is required to be moved in the horizontal direction by the arm 550. . In this case, the transporting carriage 5 of the present embodiment can transfer the FOUP 600 in a state in which the storage unit 310 is accommodated. Therefore, if the lifting and lowering operation of the lifting unit 530 is possible, the arm 55 is not used. The resulting horizontal movement is also possible. Therefore, the transfer of the FOUP 600 can be stably realized by a relatively simple configuration. Further, the portion of the movement caused by the arm 55 朝 in the horizontal direction can be shortened, and the time required for the transfer of the FOUP 600 can be shortened. In Fig. 14, when the FOUP 600 in the transporting carriage 500 of the first embodiment is taken out, the lower portion of the roller 520 and the main body portion 510 enters the space below the stock portion 3 20 of the 201100309 and becomes the storage unit 3 20. The state of the accommodating part of the conveyance trolley 500. In other words, the main body portion 510 of the transporting carriage 500 is such that the lower portion of the main body portion 510 in the first portion (i.e., the front portion of the main body portion 510 in Fig. 4) and the lower portion (i.e., the lower portion of the main body portion 510 in Fig. 14) ) The state of enclosing. Therefore, in the same manner as in the case of the storage shown in Figs. 1 and 2, the FOUP 600 can be optimally transferred. As described above, the transport unit 5 00 according to the first embodiment has the accommodating portion for accommodating the storage unit 301 and the storage unit 312. Therefore, even in a relatively narrow passage or space. It does not hinder the operation and passage, and it is easy to carry out the transfer operation. Further, at the time of transfer of the FOUP, since the FOUP is constantly present in the main body portion 510, the transfer can be performed stably. Therefore, the transporting carriage 5A can be made light in weight as compared with the case where the FOUP is present outside the main body portion 510 at the time of transfer. <Second Embodiment> Next, the transport carriage of the second embodiment will be described with reference to Figs. 15 and 16 . Fig. 15 is a perspective view showing a configuration of a grip portion in the transport carriage of the second embodiment, and Fig. 6 is a perspective view showing a configuration of the transport carriage of the second embodiment. Further, in the second embodiment, the configuration of the grip portion is different from that of the first embodiment described above, and is substantially the same as the other configurations. Therefore, in the second embodiment, only the portions different from the first embodiment will be described in detail, and the other overlapping portions are suitable and the description will be omitted. In addition, in the 15th and 16th drawings, the same components as those of the first embodiment shown in the third embodiment and the fourth embodiment are denoted by the same reference numerals. In the fifth embodiment, in the transport carriage 500 of the second embodiment, the grip portion 540 is formed into a shape as shown in the drawing, and the grip portion 540 of the first embodiment is referred to (refer to Figs. 8 to 10). There is no drive at the grip portion 540 itself. When the FOUP 600 is gripped by the grip portion 540, the grip portion 540 is slid in the horizontal direction (ie, the direction of the arrow in the drawing), and a part of the grip portion 540 is fitted into the handle portion and the body portion 0 of the FOUP 600. gap. In the sixteenth embodiment, the transporting carriage 500 of the second embodiment is not provided with the driving portion of the gripping portion 540 itself as described above, and therefore can be realized by a relatively simple configuration. In other words, if the lifting portion 53 0 for raising and lowering the grip portion 540 is provided, the FOUP 600 can be reliably transferred. When the FOUP 6 〇 0 is stowed, the transport carriage 500 is moved by the roller 520, and the grip portion 504 is in a state of being held by F Ο U P 60 0. More specifically, first, the height of the FOUP 600 and the grip portion 540 is adjusted by the lifting portion 530, and then the transporting carriage 500 is moved toward the FOUP 600 side by the roller 520 to hold the FOUP 600. Further, the lift portion 530 raises the grip portion, and the FOUP 600 is stowed on the transport carriage 500. Further, when the stowed FOUP 600 is put into storage, the FOUP 600 can be surely transferred to the platform 300 by performing an operation opposite to the above-described operation. As described above, the transport trolley 500 according to the second embodiment transports the trolley. The composition can be simpler. -23- 201100309 <Third Embodiment> Next, the transport carriage of the third embodiment will be described with reference to Figs. 17 and 18 . Fig. 17 is a side view showing the configuration of the transport carriage of the third embodiment. Fig. 18 is a side view showing the operation of the transport carriage of the third embodiment when the FOUP is transferred. Further, in the third embodiment, the points having the drop preventing portion are different from those of the first and second embodiments described above, and are substantially the same as the other configurations. Therefore, in the third embodiment, only the portions different from the first and second embodiments will be described in detail, and the other overlapping portions are suitable and the description will be omitted. In the seventeenth and eighteenth aspects, the same components as those of the first embodiment shown in Fig. 11 and the like are denoted by the same reference numerals. In addition to the above-described configurations of the first and second embodiments, the transporting carriage 500 of the third embodiment includes a fall prevention portion 560 for preventing the FOUP 600 from being stowed. The fall prevention unit 506 is an example of the "drop prevention means" of the present invention, and is provided below the stowage portion of the main body portion 510. The drop preventing portion 560 is formed of, for example, a plate-like member, and is supported by the stowed FOUP 600 from the lower side to prevent falling. In Fig. 18, the drop preventing portion 5 60 is accommodated in a position where the storage unit 310 or the stocking unit 310 is accommodated in the accommodating portion. Specifically, the fall prevention hand 5 40 is movable corresponding to, for example, an operation lever and an operation lever, and when the FOUP 600 is transferred, it is accommodated at a position that does not come into contact with the storage unit 3 1 0 as shown in the drawing. status. When the fall prevention portion 560 is accommodated, it can be avoided by the presence of the prevention portion 560 under the fall-24-201100309, thereby accommodating the storage unit 3 10 or the storage unit 320. Therefore, it is possible to carry out and transfer optimally. As described above, according to the transport carriage 5 of the third embodiment, by providing the fall prevention unit 560, it is possible to prevent the F〇UP 6 00 during transport from falling. In particular, when the precision member or device having a weak impact such as a semiconductor wafer is transported, the above effects can be remarkably exerted. &<FourthEmbodiment> Next, the transport carriage of the fourth embodiment will be described with reference to Fig. 19. In the nineteenth aspect, the configuration of the transport carriage of the fourth embodiment is shown. Further, in the fourth embodiment, the points at which the transferred FOUPs can be rotated differ from each other in the above-described respective embodiments, and are substantially the same as the other configurations. Therefore, in the fourth embodiment, only the portions different from the first to third embodiments will be described in detail, and the other overlapping portions are suitable and the description will be omitted. In Fig. 19, the same components as those of the first embodiment shown in Fig. 1 and Fig. 4 and the like are denoted by the same reference numerals. In Fig. 19, the transport carriage 500 of the fourth embodiment includes a rotary table 570 for rotating the lift unit 530 and the grip unit 540. The turntable 5 70 is made rotatable in the horizontal direction, and the direction of the lift portion 530 and the grip portion 540 (i.e., the direction in which the FOUP of the grip portion 540 is held) can be changed. As described above, according to the transport carriage 500 of the fourth embodiment, by providing the rotary table 570, the transfer operation of the FOUP 400 can be optimally performed. -25-201100309 The transporting carriage 500 of the first to fourth embodiments described above is adapted to the transfer of the FOUP between the platform 300 including the storage unit 310 and the delivery unit 320 (in other words, storage and delivery), but the form of the platform Not limited to this. Fig. 20 is a perspective view showing an example of a platform different from the platform of Fig. 2. In Fig. 20, the platform 1 300 is provided with four inlet and outlet sections 1310a to 1310d which can independently store or unload four FOUPs and have no slits. In the case where the platform 1300 is transported to the FOUP of the transport trolley 500, the roller 520 and the lower portion of the main body 510 are first placed in the space below the first inlet/outlet portion 1310a, as in the above-described respective embodiments. In addition, the first inlet/outlet storage unit 1 3 1 0a is in a state of being housed in the storage unit of the transport trolley 500. Thereafter, when the FOUP on the second entry/exit portion l3l〇b of the platform 1300 is out of the library, the main body portion 510 is horizontally oriented in a direction parallel to the four inlet and outlet units 1310a to 1310d (ie, In the left-right direction of FIG. 20, the roller 520 and the lower portion of the main body portion 510 are in a space below the second inlet/outlet portion 1310b, and the second inlet/outlet portion 1310b is housed in the accommodating portion of the conveyance cart 500. . The movement in the horizontal direction of the transporting carriage 500 in this manner is achieved by causing the opposing faces to face the front left and right sides of the main body portion 510 of the loading and unloading portion 1310. In other words, it is not necessary to perform the operation of pulling or pushing the transport carriage 500 in the vertical direction of the loading/unloading unit 1310, and the adjacent plurality of storage units 1 3 1 0 a~1 3 1 0 d Reciprocating in a horizontal direction. As described above, "For the main body portion 5 10 0, the front left and right sides are opened", so when the FOUP is transferred between the adjacent multiple input and exit banks, -26-201100309, the plural number can be adjacent to The horizontal direction of the parallel direction in which one of the inlet and outlet sections is parallel is reciprocated, and the transfer of the FOUP between the adjacent plurality of inlet and outlet sections can be efficiently performed in a short time. The present invention is not limited to the above-described first to fourth embodiments, and can be appropriately changed without departing from the scope of the invention or the scope of the invention, which can be read from the scope of the patent application and the entire specification. It is also included in the scope of the technology of the present invention. 〇 [Simplified description of the drawings] [Fig. 1] A plan view schematically showing the overall configuration of the transport system 〇 [Fig. 2] A perspective view showing a specific configuration of the platform. [Fig. 3] A perspective view showing the configuration of the transport carriage at the time of unstacking in the first embodiment. [Fig. 4] A perspective view showing a configuration Q of the transport carriage at the time of stowage in the first embodiment. [Fig. 5] A side view (1) showing a specific configuration of a lifting portion in a transporting trolley. [Fig. 6] A side view (2) showing a specific configuration of a lifting portion in the transporting trolley. [Fig. 7] A side view (3) showing a specific configuration of a lifting portion in a transporting trolley. [Fig. 8] A partially enlarged view (1) showing a specific configuration of the grip portion in the transporting carriage. -27- 201100309 [Fig. 9] A partial enlarged view (2) showing the specific configuration of the grip portion in the transporting carriage. [Fig. 10] A partially enlarged view (3) showing a specific configuration of the grip portion in the transporting carriage. [Fig. 1 1] is a perspective view showing the positional relationship between the transport carriage and the platform when the FOUP is put into storage. [Fig. 12] Fig. 12 is a side view showing the operation at the time of FOUP transfer of the transport carriage of the first embodiment. [Fig. 1 3] A side view showing an operation at the time of FOUP transfer of the transport trolley of the comparative example. [Fig. 14] A perspective view showing the positional relationship between the transport carriage and the platform when the FOUP is taken out of the warehouse. [Fig. 15] A perspective view showing a configuration of a grip portion in the transport trolley of the second embodiment. [Fig. 16] Fig. 16 is a perspective view showing the configuration of the transporting carriage of the second embodiment. Fig. 17 is a side view showing the configuration of the transporting carriage of the third embodiment. Fig. 18 is a view showing the transport of the third embodiment. Side view of the action when the FOUP of the trolley is transferred. [Fig. 19] Fig. 19 is a perspective view showing a configuration of a transport carriage according to a fourth embodiment. Fig. 20 is a perspective view showing an example of a platform different from the platform of Fig. 2. -28- 201100309 [Description of main component symbols] 100 : 1 rail 200 : Vehicle 200a : Vehicle 200b : Vehicle 3 00 : Platform 3 10 : Storage unit 3 20 : Storage unit 400 : Transportation path 400 a : Transportation path 5 00 : Transportation trolley 500a: transporting carriage 5 10: main body part 5 20 : roller 5 3 0 : lifting part 〇 531a : lifting operation lever 5 3 1b • lifting pinion 53 1c : lifting rack 5 3 2a : lifting lever 5 3 2b : Belt winding part 5 3 2c : lifting belt 5 3 3 a : lifting operation lever 53 3 b : lifting drive part 5 3 3 c : : lifting belt 201100309 5 3 3 d : lifting branch 5 3 3 e : linear guide 540 : Grip portion 5 4 1 : Rotational shock 542a: connecting plate 5 4 3 a : grip portion 543b : grip portion 544a , 544b : 545 a : connecting portion 545b : connecting portion 546a , 546b , 5 4 7 a : grip portion Part 5 5 0 : Arm 5 6 0 : Falling prevention ij 5 7 〇: Rotating table 600 : FOUP 1300 : Platform 1 3 1 0 : Accessing the library 1310a to 1310d Supporting part guiding groove 546c : Holding the pinion two parts :In and out of the library department-30-