WO2015008952A1 - 무전해 니켈 도금액, 이를 이용한 무전해 니켈 도금 방법, 및 이를 이용하여 제조된 연성 니켈 도금층 - Google Patents
무전해 니켈 도금액, 이를 이용한 무전해 니켈 도금 방법, 및 이를 이용하여 제조된 연성 니켈 도금층 Download PDFInfo
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- WO2015008952A1 WO2015008952A1 PCT/KR2014/005847 KR2014005847W WO2015008952A1 WO 2015008952 A1 WO2015008952 A1 WO 2015008952A1 KR 2014005847 W KR2014005847 W KR 2014005847W WO 2015008952 A1 WO2015008952 A1 WO 2015008952A1
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- nickel plating
- electroless nickel
- plating solution
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
- C23C18/168—Control of temperature, e.g. temperature of bath, substrate
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/32—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron
- C23C18/34—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents
- C23C18/36—Coating with nickel, cobalt or mixtures thereof with phosphorus or boron using reducing agents using hypophosphites
Definitions
- the technical idea of the present invention relates to an electroless plating, and more particularly, to an electroless nickel plating solution, an electroless nickel plating method using the same, and a flexible nickel plating layer prepared using the same.
- Electroless plating is a method in which a metal plating layer is formed on a plating object by a redox reaction of a metal.
- the plating can be performed regardless of the shape of a product, and after a specific pretreatment process, plating can be performed on an insulating object. It is used in the field.
- the plating film formed by the electroless nickel plating method can control the amount of deposition of phosphorus formed by the vacancy reaction, it is possible to form a plating layer having an amorphous alloy and have a plating layer having a uniform surface.
- the plating layer excellent in corrosion resistance, abrasion resistance, etc. can be formed.
- the electroless nickel plating method has been widely applied as a plating technique for final surface treatment of automobiles, precision mechanical components, electronic components such as semiconductors and printed circuit boards (PCBs).
- PCBs printed circuit boards
- the field of application has become widespread, for example, for use in poor soldering of printed wiring boards or in primary treatment of compact disks (CDs) or hard disk drives (HDDs).
- flexible printed circuit boards using an insulating film are thin and flexible, unlike rigid boards having a hard material, and thus the amount of use of flexible printed circuit boards is increased due to the miniaturization and light weight of electronic products.
- complex electronic circuits can be implemented on a flexible insulating film, thereby providing a useful solution for improving the quality of electronic products, reducing the thickness and thickness, and narrowing the wiring width.
- the usage range and usage of telephones, digital cameras, notebook PCs, smartphones and tablet PCs are increasing.
- the general electroless nickel plating layer has high hardness, excellent corrosion resistance and abrasion resistance, it is difficult to be applied to a flexible printed circuit board because breakage occurs easily due to poor elongation.
- the commercially available high-ductility electroless nickel plating solution has a short lifetime because the plating solution lacks stability and the characteristics of the plating layer change depending on the number of times of use.
- the technical problem of the present invention is to provide an electroless nickel plating solution that provides high ductility to the plated layer and has improved stability.
- the technical problem to be achieved by the technical idea of the present invention is to provide an electroless nickel plating method using an electroless nickel plating solution that provides high ductility and improved stability to the plating layer.
- the technical problem to be achieved by the technical idea of the present invention is to provide a flexible nickel plating layer formed using the electroless nickel plating solution.
- the electroless nickel plating solution according to the technical idea of the present invention for achieving the above technical problem is an electroless nickel plating solution for forming a flexible nickel plating layer using an electroless nickel plating method
- the electroless nickel plating solution is a nickel plating Nickel metal salts which provide ions and comprise nickel sulfamate; A reducing agent for reducing the nickel ions for plating; Complexing agents to form complexes with the nickel ions for plating; And a cyanide stabilizer that provides stability of the electroless nickel plating solution and prevents pit generation in the flexible nickel plating layer.
- the nickel metal salt may be included in the range of 4g to 7g per 1 liter of the electroless nickel plating solution.
- the reducing agent may include at least one of sodium hypophosphite, potassium hypophosphite, and ammonium hypophosphite, and the reducing agent is 20 g to 50 g with respect to 1 liter of the electroless nickel plating solution. It can be included as a range.
- the complexing agent may include at least one of carboxylic acid, alpha hydroxyl acid, and amino acid.
- the complexing agent may be included in the range of 40 g to 80 g per 1 liter of the electroless nickel plating solution.
- the complexing agent may include a carboxylic acid or a derivative thereof in the range of 5 g to 20 g, and an alpha hydroxyl acid or a derivative thereof in an amount of 5 g to 20 g per 1 liter of the electroless nickel plating solution. It may be included in the range of 20g, and may include amino acids or derivatives thereof in the range of 5g to 100g.
- the complexing agent may include adipic acid and tartaric acid in the range of 5 g to 20 g per 1 liter of the electroless nickel plating solution, and also include lactic acid in the range of 5 g to 20 g, Glycine may range from 5 g to 100 g.
- the complexing agent may include tartaric acid in a range of 5 g to 20 g per 1 liter of the electroless nickel plating solution, and may also include lactic acid and citric acid in a range of 5 g to 20 g. And glycine in the range of 5 g to 100 g.
- the cyanide stabilizer may include at least one of sodium thiocyanate (NaSCN), potassium thiocyanate (KSCN), sodium cyanide (NaCN), and potassium cyanide (KCN).
- the cyan-based stabilizer may be included in the range of 0.1 ppm to 5 ppm with respect to 1 liter of the electroless nickel plating solution.
- it may further include a metal stabilizer to provide stability of the electroless nickel plating solution, inhibit the reduction reaction of the plating nickel ions, and includes a metal element.
- the metal stabilizer may be included in the range of 0.1 ppm to 20 ppm with respect to 1 liter of the electroless nickel plating solution.
- the metal stabilizer tin (Sn), zinc (Zn), magnesium (Mg), lead (Pb), cadmium (Cd), thorium (Th), thallium (Tl), It may include at least one of selenium (Se), telenium (Te), molybdenum (Mo), arsenic (As), and bismuth (Bi).
- the pH of the electroless nickel plating solution may further include a pH adjuster to adjust the range of 3.5 to 5.5.
- the pH adjusting agent may include at least one of sulfuric acid, hydrochloric acid, nitric acid, ammonia water, sodium hydroxide, potassium hydroxide, and the like.
- the forming of the flexible nickel plating layer may be performed at a pH in the range of 3.5 to 5.5.
- the forming of the flexible nickel plating layer may be performed at a temperature in the range of 70 ° C. to 95 ° C.
- the forming of the flexible nickel plating layer may have a plating layer formation rate of at least 15 ⁇ m / hr.
- the flexible nickel plating layer according to the spirit of the present invention for achieving the above technical problem is formed by plating on the surface of the plating object by the electroless nickel plating method using the electroless nickel plating solution described above.
- the flexible nickel plated layer may have a complex structure in which at least two of an amorphous phase, columnar crystal phase, granular crystal phase, and bulk crystal phase are mixed.
- the flexible nickel plating layer may have a hardness of at least 500 Hv.
- the flexible nickel plated layer may have at least 500 bending times.
- the electroless nickel plating solution according to the present invention includes nickel sulfamate as a nickel metal salt, a reducing agent such as sodium hypophosphite, and a complexing agent such as adipic acid, citric acid, tartaric acid, lactic acid, and glycine.
- the flexible nickel plating layer may be formed to include a system stabilizer and to secure the desired level of hardness and ductility of the plating layer while ensuring stability of the plating solution.
- the flexible nickel plated layer formed according to the technical spirit of the present invention has excellent ductility such as the number of bends before breaking more than 500 times, thereby preventing cracking or destruction due to bending or stress, and thus applying to a flexible printed circuit board. It is possible to provide uniform plating thickness of the edge portion, which is poor in coverage and coating property with respect to copper wiring.
- FIG. 1 is a schematic diagram showing a plating apparatus using an electroless nickel plating solution according to an embodiment of the present invention.
- FIG. 2 is a flowchart illustrating an electroless nickel plating method using an electroless nickel plating solution according to an embodiment of the present invention.
- FIG. 3 is a scanning electron micrograph showing cross sections of a flexible nickel plating layer formed using an electroless nickel plating solution according to an embodiment of the present invention and a nickel plating layer formed using an electroless nickel plating solution of Comparative Examples.
- FIG. 5 is a scanning electron micrograph showing an upper surface of a flexible nickel plated layer formed using an electroless nickel plating solution according to an embodiment of the present invention.
- FIG. 6 is a graph showing the plating layer formation rate obtained in the process of plating the plating object using the electroless nickel plating solution according to the number of plating (MTO).
- FIG. 1 is a schematic diagram showing a plating apparatus using an electroless nickel plating solution according to an embodiment of the present invention.
- the plating apparatus 10 accommodates the electroless nickel plating solution 30 in the plating bath 20, and immerses the plating object 40 in the electroless nickel plating solution 30 to form a plating object (
- the flexible nickel plating layer 50 is formed on the 40.
- the technical idea of the present invention also includes a case where a plating solution containing a metal other than the electroless nickel plating solution 30 is used.
- the electroless nickel plating solution 30 includes a solvent and a nickel metal salt dissolved in the solvent, a reducing agent, a complexing agent, and a cyanide stabilizer.
- the electroless nickel plating solution 30 may further include a metal stabilizer.
- the electroless nickel plating solution 30 may further include a pH adjuster.
- the electroless nickel plating solution 30 may further include an auxiliary additive composed of an organic compound or an inorganic compound in order to control plating speed and improve glossiness.
- the electroless nickel plating solution 30 may further include a surfactant for improving interfacial properties between the matrix layer and the flexible nickel plating layer 50 and preventing pit formation.
- the plating object 40 may include a metal or a polymer material.
- the plating object 40 may include, for example, copper or iron.
- the plating object 40 may refer to a metal wire formed on the flexible circuit board, and the metal wire may include, for example, copper.
- the electroless nickel plating solution 30 may have a pH in the range of about 3.5 to about 5.5, and the forming of the nickel plating layer may be performed at a temperature in the range of about 70 ° C to about 95 ° C.
- the pH range and the temperature range are set to minimize chemical influences such as deformation or corrosion that may occur on the plating object 40, and the flexible nickel plating layer 50 is more easily formed on the surface of the plating object 40. .
- the solvent may constitute most of the electroless nickel plating solution 30 in which the plating object 40 is immersed.
- the solvent may include a material for dissolving the nickel metal salt, the reducing agent, the complexing agent, and the metal stabilizer, the pH adjuster, and the cyanide stabilizer.
- the solvent may be water, for example. However, this is exemplary and the technical spirit of the present invention is not limited thereto.
- the nickel metal salt may be dissolved in the solvent.
- the nickel metal salt may provide plating nickel ions to the plating object 40, and the plating nickel ions may form the flexible nickel plating layer 50 on the plating object 40.
- the nickel metal salt may include a metal, for example, may include nickel (Ni). Accordingly, the plating nickel ions may include nickel (Ni) ions, and the nickel ions may be, for example, divalent ions.
- the nickel metal salt may include nickel chloride, for example.
- the nickel metal salt may include nickel sulfamate.
- the case where the nickel metal salt includes at least any one of nickel sulfate, nickel chloride, nickel nitrate, nickel oxide and nickel carbonate is included in the technical idea of the present invention.
- the nickel metal salt may be included in the range of 4 g to 7 g per 1 liter of the electroless nickel plating solution 30.
- the nickel metal salt is nickel sulfamate
- the concentration of the nickel sulfamate is less than 4 g / liter
- the plating layer formation rate may be lowered.
- the concentration of the nickel sulfamate is more than 7 g / liter
- the stability of the electroless nickel plating solution 30 may be reduced, and spontaneous decomposition of the electroless nickel plating solution 30 may occur.
- the reducing agent may be dissolved in the solvent.
- the reducing agent may reduce the nickel ions for plating.
- the reducing agent may reduce the nickel ions, for example.
- the reducing agent may include at least one of hypophosphite, boron hydride, dimethylamine borane, and hydrazine.
- the reducing agent may include at least one of sodium hypophosphite, potassium hypophosphite, and ammonium hypophosphite as the hypophosphite.
- the electroless nickel plating solution 30 may contain about 7% to about 9% phosphorus (P).
- the reducing agent may be included in the range of 20g to 50g per 1 liter of the electroless nickel plating solution 30.
- the reducing agent is sodium hypophosphite
- the concentration of sodium hypophosphite is less than 20 g / liter
- the plating layer formation rate may decrease.
- the concentration of sodium hypophosphite is greater than 50 g / liter
- the stability of the electroless nickel plating solution 30 may be lowered, thereby causing spontaneous decomposition of the electroless nickel plating solution 30.
- the complexing agent may be dissolved in the solvent.
- the complexing agent may form a complex with the nickel ion for plating.
- the complexing agent may chemically bond with the nickel ions to form a nickel complex. Since the stability characteristics of the electroless nickel plating solution 30 and the characteristics of the flexible nickel plated layer 50 are greatly changed depending on the type and amount of the complexing agent, the type and amount of the complexing agent are highly selected according to the purpose and purpose of use. It is important.
- the complexing agent may control the plating layer formation rate, prevent the electroless nickel plating solution 30 from spontaneously decomposing, and control the plating reaction so that a reduction reaction of nickel occurs smoothly on the surface of the plating object 40. .
- the complexing agent can control the total amount of nickel ions participating in the reduction reaction as organic acids or salts thereof, and prevents the nickel ions from being precipitated as nickel phosphate in combination with phosphorus, thereby plating the electroless nickel plating solution 30. It can function to maintain stability while working. In addition, the complexing agent may reduce the rapid generation of hydrogen ions due to the reduction reaction, so that the pH of the electroless nickel plating solution 30 may not be changed rapidly.
- the complexing agent may include at least one of carboxylic acids, alpha hydroxyl acids (AHAs), and amino acids.
- the complexing agent may include, for example, at least one of a carboxylic acid having a carboxyl group (COOH) and a derivative thereof.
- the complexing agent may include at least one of alpha hydroxyl acids (AHAs) in which a part of a carboxyl group (COOH) is substituted with a hydroxyl group (OH) and derivatives thereof.
- the complexing agent may include at least one of an amino acid having a carboxyl group (COOH) and an amino group (NH 2 ) and derivatives thereof.
- the carboxylic acid may stabilize the electroless nickel plating solution 30 and at the same time improve the plating layer formation rate.
- the alpha hydroxyl acid is mixed with the electroless nickel plating solution 30 as a single component, the alpha hydroxyl acid does not significantly affect the stability of the plating solution or the plating layer formation rate, while the electroless nickel plating solution 30 with two or more kinds of complexing agents is used. ), The electroless nickel plating solution 30 is stabilized and serves to increase the plating layer formation rate.
- the complexing agent is a carboxylic acid and its derivatives, for example acetic acid, adipic acid, formic acid, propionic acid, butyric acid, valeric acid (valeric) acid, caproic acid, enanthic acid, caprylic acid, pelagonic acid, capric acid, undecylic acid, lauric acid (lauric acid), tridecylic acid, myristic acid, pentadecanoic acid, palmitic acid, margaric acid, stearic acid ), Arachidic acid, oxalic acid, malonic acid, tartaric acid, succinic acid, glutaric acid, pimelic acid, Suberic acid, azelaic acid, sebacic acid, ortho-phthalic acid, isophthalic acid , At least one of terephthalic acid, maleic acid, taleic acid, fumaric acid, glutaconic acid, glutaconic acid, traumatic acid, and muconic acid. can do.
- the complexing agent may be, for example, at least one of glycolic acid, lactic acid, citric acid, and mandelic acid as alpha hydroxyl acid and derivatives thereof. It may include.
- the complexing agent is an amino acid and its derivatives, for example, glycine, alanine, phenylalanine, serine, tyrosine, valine, aspartic acid , Glutamic acid, threonine, methionine, arginine, arginie, leucine, isoleucine, lysine, proline, tryptophan, histidine ), Cystine, aspartate, and slutamate.
- amino acid and its derivatives for example, glycine, alanine, phenylalanine, serine, tyrosine, valine, aspartic acid , Glutamic acid, threonine, methionine, arginine, arginie, leucine, isoleucine, lysine, proline, tryptophan, histidine ), Cystine, aspartate, and slutamate.
- the complexing agent may be included in the range of 15 g to 140 g per 1 liter of the electroless nickel plating solution 30.
- the complexing agent may be included in the range of 40 g to 80 g per 1 liter of the electroless nickel plating solution 30.
- the concentration of the complexing agent is less than 40 g / liter, the stability of the electroless nickel plating solution 30 may be lowered, thereby causing spontaneous decomposition of the electroless nickel plating solution 30.
- the concentration of the complexing agent is greater than 80 g / liter, the stability of the electroless nickel plating solution 30 may be increased, but the plating layer formation rate may be decreased.
- the complexing agent decomposed with the electrolytic nickel plating solution 30 is present as a floating material in the electroless nickel plating solution 30. 30) can reduce the service life.
- the complexing agent may be composed of a mixture of various kinds of materials according to the purpose of use and the characteristics of the plating object, for example, two to five kinds of materials may be mixed.
- the complexing agent may include the carboxylic acid or derivative thereof in the range of 5 g to 20 g and the alpha hydroxyl acid or derivative thereof in the range of 5 g to 20 g per 1 liter of the electroless nickel plating solution 30.
- the amino acid or derivatives thereof may be included in the range of 5g to 100g.
- the complexing agent may include the amino acid or derivative thereof in the range of 20 g to 50 g per 1 liter of the electroless nickel plating solution 30.
- the complexing agent may include 5 g to 20 g of adipic acid and tartaric acid, which are derivatives of the carboxylic acid, per 1 liter of the electroless nickel plating solution 30, and 5 g to 20 g of the lactic acid, which is the alpha hydroxyl acid. It may include in the range, and the amino acid glycine in the range of 5g to 100g.
- the complexing agent may include 5 g to 20 g of tartaric acid, which is a derivative of the carboxylic acid, per 1 liter of the electroless nickel plating solution 30, and 5 g of lactic acid and citric acid, which are the alpha hydroxyl acids, in total.
- the amino acid glycine may be included in the range of 5 g to 100 g.
- the complexing agent may include about 5 g of citric acid, about 5 g of tartaric acid, about 10 g of lactic acid, and about 40 g of glycine per 1 liter of the electroless nickel plating solution 30.
- the complexing agent may include about 5 g of tartaric acid, about 5 g of citric acid, about 10 g of lactic acid, and about 40 g of glycine per 1 liter of the electroless nickel plating solution 30.
- the cyanide stabilizer provides stability of the electroless nickel plating solution 30, prevents pit generation in the flexible nickel plating layer 50, controls roughness and provides glossiness to the flexible nickel plating layer 50, thereby providing flexible nickel.
- the function of improving the properties of the plating layer 50 may be performed.
- the cyan-based stabilizer may include, for example, a cyan-based compound.
- the cyanide stabilizer may include, for example, at least one of sodium thiocyanate (NaSCN), potassium thiocyanate (KSCN), sodium cyanide (NaCN), and potassium cyanide (KCN).
- the cyan-based stabilizer may be included in the range of 0.1 ppm to 5 ppm with respect to 1 liter of the electroless nickel plating solution 30. That is, the cyanide stabilizer may be included in the range of 0.1 mg to 5 mg per 1 liter of the electroless nickel plating solution 30.
- the cyanide stabilizer is less than 0.1 ppm, there may be no effect of increasing the glossiness or the plating layer formation rate.
- the cyan-based stabilizer exceeds 5.0 ppm, the plating layer formation rate may decrease.
- the metal stabilizer contained in the electroless nickel plating solution 30 provides stability of the electroless nickel plating solution 30, controls the roughness and gives glossiness to the flexible nickel plating layer 50, and in particular, suppresses the reduction reaction of nickel ions, thereby characterizing the flexible nickel plating layer 50. To improve the performance.
- the reduction reaction of the plating nickel ions for example nickel
- the precipitation rate can be predicted and controlled so that the reaction occurs only on the surface of the plating object.
- a stabilizer that suppresses the reduction reaction may be added to the electroless nickel plating solution 30.
- Nickel plating solutions that do not contain such stabilizers are themselves unstable and may cause nickel to precipitate itself in the nickel plating solution or on the walls of the plating bath, and thus the nickel plating solution may lose its original function.
- the decomposition of the nickel plating liquid may be triggered by colloidal particles or suspended particles present in the nickel plating liquid, and the particles may be formed when impurities are introduced into the impurities from the outside or when the concentration of the reducing agent exceeds the solubility limit.
- the particles have a very large specific surface area, which acts as a catalyst for the reduction reaction, causing a chain reaction to precipitate nickel, and at the same time, a large amount of hydrogen gas is released by the reduction reaction to form fine black precipitates. Can be reduced.
- a metal stabilizer containing a metal element In order to suppress the reduction reaction other than the surface of the plating object, a metal stabilizer containing a metal element is used, and lead (Pb) compounds, cadmium (Cd) compounds, and the like are used.
- the metal stabilizer included in the nickel plating solution when lead (Pb) or cadmium (Cd) is added, the glossiness of the plating layer formed on the plating object is high and the stability of the nickel plating solution is improved, and thus it has been widely used.
- the metal stabilizer may be dissolved in the solvent.
- the metal stabilizer can suppress the reduction reaction of the nickel ion for plating.
- the metal stabilizer may perform a function of stabilizing the electroless nickel plating solution 30 by suppressing a reduction reaction in a region other than a region in which the flexible nickel plating layer 50 of the plating object 40 is desired to be formed.
- the metal stabilizer may include at least one of a metal element that is the metal itself, a metal salt including the metal element, a metal oxide including the metal element, and a metal sulfide including the metal element.
- the metal stabilizer is, for example, tin (Sn), zinc (Zn), magnesium (Mg), lead (Pb), cadmium (Cd), thorium (Th), thallium (Tl), selenium (Se), telenium (Te), molybdenum (Mo), arsenic (As), and bismuth (Bi) may include at least one.
- the metal stabilizer In order to prevent the metal stabilizer from being released in the electroless nickel plating solution 30 and acting as an impurity, the metal stabilizer is previously dissolved in a strong acid solution such as hydrochloric acid or nitric acid or a strong alkali solution such as caustic soda solution to prevent electroless nickel. It can be added to the plating liquid 30.
- the metal stabilizer may be added to the electroless nickel plating solution 30, for example, by dissolving in advance in an alkyl sulfonate solution.
- the stabilizer may, for example, be dissolved in advance in the methanesulfonic acid solution in the alkylsulfonic acid solution. In this case, improvement of the properties of the plating layer, such as glossiness, may be indicated.
- the metal stabilizer may be included in the range of 0.1 ppm to 20 ppm per 1 liter of the electroless nickel plating solution 30. That is, the metal stabilizer may be included in the range of 0.1 mg to 20 mg per 1 liter of the electroless nickel plating solution 30.
- concentration of the metal stabilizer is less than 0.1 ppm, the stability of the electroless nickel plating solution 30 may be lowered and the glossiness of the plating layer may be lowered.
- the concentration of the metal stabilizer is higher than 20 ppm, the plating layer formation rate may be very high. Deterioration or the properties of the flexible nickel plating layer 50 may be degraded.
- the pH adjusting agent may be dissolved in the solvent. Since the flexible nickel plating layer 50 formed on the plating object 40 is affected by the plating layer formation rate and the thickness of the plating layer by the pH of the electroless nickel plating solution 30, the pH of the electroless nickel plating solution 30 is constant. It is desirable to add materials that can be maintained and controlled. Therefore, the pH adjusting agent may be added to the electroless nickel plating solution 30 as a material for performing this function.
- the pH adjusting agent may adjust the pH of the electroless nickel plating solution 30.
- the pH adjusting agent may include an acidic substance such as sulfuric acid, hydrochloric acid, nitric acid, or the like, or may include a basic substance such as ammonia water, sodium hydroxide or potassium hydroxide.
- the pH adjuster may be adjusted in the amount added to the nickel plating solution to maintain the pH of the electroless nickel plating solution 30 in the range of about 3.5 to about 5.5.
- the pH range of the electroless nickel plating solution 30 is 3.5 to 5.5, the electroless nickel plating solution 30 can be more stably maintained, and at the same time a high plating layer formation rate is obtained, a high quality flexible nickel plating layer 50 can be obtained. Can be.
- FIG. 2 is a flowchart showing an electroless nickel plating method S1 using an electroless nickel plating solution according to an embodiment of the present invention.
- the electroless nickel plating method S1 may include preparing an electroless nickel plating solution as described above (S10) and immersing a plating object in the electroless nickel plating solution, using electroless nickel plating. Forming a flexible nickel plating layer on the plating object (S20).
- Forming the flexible nickel plating layer (S20) may be performed at a pH in the range of 3.5 to 5.5. Forming the flexible nickel plating layer (S20) may be performed at a temperature in the range of 70 °C to 95 °C.
- a flexible nickel plating layer was formed using electroless nickel plating.
- the electroless nickel plating solution water was used as a solvent, about 5 g of nickel sulfamate was added to 1 liter of the electroless nickel plating solution as a nickel metal salt, and sodium hypophosphite was used as a reducing agent. About 25 g per liter was added.
- the complexing agent added to the solvent was configured to contain about 40 g glycine, about 10 g lactic acid, about 5 g tartaric acid, and about 5 g adipic acid per 1 liter of the electroless nickel plating solution. The same amount of citric acid may be added in place of the adipic acid.
- thallium Tl
- NaSCN sodium thiocyanate
- the electroless nickel plating solution may be easily decomposed.
- sodium hypophosphite is first mixed with the complexing agent to prepare a solution, and then the nickel sulfamate is added. To form an electroless nickel plating solution.
- the pH of the electroless nickel plating solution was kept constant at about 4.5 using ammonia water, and nickel salt concentration analysis in the nickel plating solution was performed every 30 minutes to supplement the nickel plating solution.
- the electroless nickel plating solution used as the comparative example is a commercially available general electroless nickel plating solution (hereinafter referred to as Comparative Example 1) and two commercially available high ductility electroless nickel plating solution (hereinafter referred to as Comparative Example 2 and Referred to as Comparative Example 3).
- Comparative Example 1 a commercially available general electroless nickel plating solution
- Comparative Example 2 two commercially available high ductility electroless nickel plating solution
- Comparative Example 3 two commercially available high ductility electroless nickel plating solution
- the plating object to be plated in the electroless nickel plating solution according to the spirit of the present invention and the electroless nickel plating solutions of the comparative example was prepared through the following process.
- the printed circuit board on which the copper layer was formed was deposited for 1 minute using about 10% sulfuric acid.
- the copper oxide film was removed from the copper layer by the deposition process.
- the printed circuit board was washed with distilled water (non-phosphorus water).
- soft etching and water washing were performed for about 2 minutes at a temperature range of about 20 ° C. to about 30 ° C.
- the lead activation treatment for forming a nickel plating layer for about 1 minute was washed with water to prepare a plating object.
- the plating object was immersed and plated in the electroless nickel plating solution described above to form a nickel plating layer.
- the temperature of the electroless nickel plating solution during plating was kept constant at about 85 ° C. using a hot bath method, and the pH of the electroless nickel plating solution was kept constant at about 4.5 using ammonia water.
- Nickel salt analysis of the electroless nickel plating solution was performed every 30 minutes to supplement the electroless nickel plating solution.
- Electroless nickel plating solution replenishment was performed by replenishing nickel metal salts, reducing agents, and complexing agents.
- a nickel plating layer was formed to a thickness of about 5 ⁇ m using a nickel plating solution on the bending test coupon. The bending test was carried out at a load of 500 g, an angle of 135 degrees, and a bending speed of 175.
- the nickel plated layer was formed to a thickness of about 25 ⁇ m. In order to observe the cross-sectional shape of the nickel plating layer, the nickel plating layer was formed on copper and then brittle fractured.
- Table 1 is a table showing the characteristics of the flexible nickel plating layer formed using the electroless nickel plating solution according to the embodiment of the present invention and the nickel plating layer formed using the electroless nickel plating solution of Comparative Examples.
- Comparative Example 1 is a case using a commercially available general electroless nickel plating solution
- Comparative Example 2 and Comparative Example 2 are cases using a commercially available high-ductility nickel plating solution.
- the embodiment of the present invention shows a plating layer formation rate of 15 ⁇ m / hour to 20 ⁇ m / hour, the faster the plating layer formation rate compared to Comparative Example 2 and Comparative Example 3 that is the case of a highly flexible nickel plating solution It shows the plating layer formation speed which is almost similar to or faster than the comparative example 1 which is the case of a normal nickel plating solution. That is, the embodiment of the present invention can implement a faster plating layer formation rate than the comparative examples.
- the precipitation amount of phosphorus was found to be in the range of 7 wt% to 10 wt% in all four cases, and formed a nickel plated layer of the intermediate type.
- the density was in the range of 7.5 g / cm 3 to 8 g / cm 3 , and the embodiment of the present invention was slightly lower as 7.6 g / cm 3 .
- the surface roughness of the Example was 0.57 ⁇ m, which was higher than that of Comparative Example 1 of 0.3 ⁇ m in the case of general nickel plating solution, but compared to 0.72 ⁇ m of Comparative Example 2 and 0.65 ⁇ m of Comparative Example 3 in the case of highly flexible nickel plating solution. Appeared low. Therefore, the embodiment of the present invention showed excellent surface roughness in the high ductility nickel plating solution.
- the hardness of the present invention was 566 Hv, which was higher than that of Comparative Examples showing hardness of less than 500 Hv, such as Comparative Example 1 of 491 Hv, Comparative Example 2 of 445 Hv, and Comparative Example 3 of 495 Hv.
- Comparative Example 2 and Comparative Example 3 which is the case of the high ductility nickel plating solution, the examples of the present invention showed a hardness increase rate of 27% and 14%, respectively.
- the elongation was 0.69% in the Examples of the present invention, which was higher than the Comparative Examples showing the elongation of less than 0.6%, such as Comparative Example 1 of 0.14%, Comparative Example 2 of 0.58%, and Comparative Example 3 of 0.39%.
- Comparative Example 2 and Comparative Example 3 which is the case of a high ductile nickel plating solution, the examples of the present invention showed an increase in elongation of 19% and 77%, respectively.
- the number of times to break was 550 times in the embodiment of the present invention, which was higher than that of 19 Comparative Examples 1, 386 Comparative Examples 2 and 406 Comparative Examples 3.
- Comparative Example 2 and Comparative Example 3 which is the case of the high ductility nickel plating solution, the examples of the present invention showed an increase in the number of times of bending of 43% and 35%, respectively.
- FIG. 3 is a scanning electron micrograph showing cross sections of a flexible nickel plating layer formed using an electroless nickel plating solution according to an embodiment of the present invention and a nickel plating layer formed using an electroless nickel plating solution of Comparative Examples.
- Figure 3 (a) is a photograph showing an embodiment of the present invention
- Figure 3 (b) is a photograph showing a comparative example 1
- Figure 3 (c) is a photograph showing a comparative example 2
- 3D is a photograph showing Comparative Example 3.
- Comparative Example 1 in the case of a general nickel plating solution showed a nickel plating layer formed in an amorphous phase (or an equiaxed crystal phase) without showing a constant growth direction.
- Comparative Example 2 and Comparative Example 3 in the case of a high ductility nickel plating solution showed a nickel plating layer formed of columnar crystal phases.
- the embodiment of the present invention has a columnar crystal phase similar to that of Comparative Example 2 and Comparative Example 3 in which the initial growth is a high ductile nickel plating solution, and the amorphous phase (or similar to Comparative Example 1 in which the later growth is a general nickel plating solution)
- the flexible nickel plating layer of the composite structure which has equiaxed crystal phase) is shown.
- the flexible nickel plating layer according to the embodiment of the present invention may have a composite structure in which at least two of an amorphous phase, columnar crystal phase, granular crystal phase, and bulk crystal phase are mixed.
- a complex structure can control the ratio of a crystalline phase such as a columnar crystal phase and an amorphous phase (or equiaxed crystal phase) according to the type and mixing ratio of the complexing agent included in the electroless nickel plating solution.
- the nickel plated layer of such a composite structure is analyzed to affect the increase in hardness, the increase in elongation, and the increase in the number of bends. For example, ductility can be increased by the crystal phase, and hardness and soldering properties can be increased by the amorphous phase (or equiaxed phase).
- FIG. 4 are scanning electron micrographs showing cross sections of a flexible nickel plating layer formed using an electroless nickel plating solution according to an embodiment of the present invention and a nickel plating layer formed using an electroless nickel plating solution of Comparative Examples.
- Figure 4 (a) is a photograph showing an embodiment of the present invention
- Figure 4 (b) is a photograph showing a comparative example 1
- Figure 4 (c) is a photograph showing a comparative example 2
- 4D is a photograph showing Comparative Example 3.
- the nickel plating layers of FIG. 4 are cases formed by plating on copper wires of a printed circuit board.
- Comparative Example 1 which is a case of a general nickel plating solution
- a relatively thin nickel plating layer was formed at an edge of a copper wiring.
- a uniform nickel plated layer was formed.
- the thickness at the top and side surfaces of the copper interconnection and the thickness at the edge of the copper interconnection appeared almost uniform, and showed the best coverage.
- FIG. 5 is a scanning electron micrograph showing an upper surface of a flexible nickel plated layer formed using an electroless nickel plating solution according to an embodiment of the present invention.
- Figure 5 (b) is an enlarged photograph of the dotted line portion in Figure 5 (a) which is a photograph showing an embodiment of the present invention.
- the flexible nickel plating layer according to the embodiment of the present invention is selectively formed with respect to the copper wiring. Moreover, it turns out that the coverage which covers a copper wiring is excellent.
- the number of plating is defined as referring to the number of repetitions using the electroless nickel plating solution.
- the electroless nickel plating solution according to the embodiment of the present invention may provide up to four plating times, and may provide a plating layer formation rate of 16 ⁇ m / hr at the first plating frequency, and 11 ⁇ m even at four plating times. Since it is possible to provide a plated layer formation rate of / hour, economical efficiency can be secured and thus commercially available. For reference, commercially available high ductility electroless nickel plating solutions are known to provide three or four plating times.
- Table 2 is a table showing the number of bending of the flexible nickel plated layer formed while increasing the number of plating using the electroless nickel plating solution according to an embodiment of the present invention.
- the electroless nickel plating solution according to the embodiment of the present invention may form a flexible nickel plating layer having an excellent bending number dimension at at least four plating times.
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Abstract
Description
실시예 | 비교예1 | 비교예2 | 비교예3 | |
도금층 형성 속도 [㎛/시] | 15~20 | 13~17 | 8~12 | 8~10 |
인의 석출량 [wt%] | 7.3 | 9.43 | 10.2 | 8.3 |
밀도 [g/cm3] | 7.91 | 7.88 | 7.9 | 7.6 |
표면거칠기 [㎛] | 0.57 | 0.3 | 0.72 | 0.65 |
경도 [100g/f] | 566 | 491 | 445 | 495 |
연신율 [%] | 0.69 | 0.14 | 0.58 | 0.39 |
굴곡횟수 [회] | 550 | 19 | 386 | 406 |
도금횟수 | 1 | 2 | 3 | 4 |
굴곡횟수 [회] | 550 | 680 | 520 | 640 |
Claims (20)
- 무전해 니켈 도금 방법을 이용하여 연성 니켈 도금층을 형성하는 무전해 니켈 도금액으로서,상기 무전해 니켈 도금액은,도금용 니켈 이온을 제공하고, 설파민산니켈을 포함하는 니켈 금속염;상기 도금용 니켈 이온을 환원시키는 환원제;상기 도금용 니켈 이온과 착화물을 형성하는 착화제; 및상기 무전해 니켈 도금액의 안정성을 제공하고, 상기 연성 니켈 도금층에서의 피트 발생을 방지하는 시안계 안정제;를 포함하는, 무전해 니켈 도금액.
- 제 1 항에 있어서, 상기 니켈 금속염은 상기 무전해 니켈 도금액 1 리터에 대하여 4g 내지 7g 범위로 포함되는, 무전해 니켈 도금액.
- 제 1 항에 있어서, 상기 환원제는 차아인산나트륨, 차아인산칼륨, 및 차아인산암모늄 중 적어도 어느 하나를 포함하고,상기 환원제는 상기 무전해 니켈 도금액 1 리터에 대하여 20g 내지 50g 범위로 포함되는, 무전해 니켈 도금액.
- 제 1 항에 있어서, 상기 착화제는 카르복실산, 알파하이드록실산, 및 아미노산 중 적어도 어느 하나를 포함하고,상기 착화제는 상기 무전해 니켈 도금액 1 리터에 대하여 40g 내지 80g 범위로 포함되는, 무전해 니켈 도금액.
- 제 1 항에 있어서, 상기 착화제는 상기 무전해 니켈 도금액 1 리터에 대하여 카르복실산 또는 그 유도체를 5g 내지 20g 범위로 포함하고, 알파하이드록실산 또는 그 유도체를 5g 내지 20g 범위로 포함하고, 아미노산 또는 그 유도체를 5g 내지 100g 범위로 포함하는, 무전해 니켈 도금액.
- 제 1 항에 있어서, 상기 착화제는 상기 무전해 니켈 도금액 1 리터에 대하여 아디핀산과 타르타르산을 합쳐서 5g 내지 20g 범위로 포함하고, 또한 락트산을 5g 내지 20g 범위로 포함하고, 글리신을 5g 내지 100g 범위로 포함하는, 무전해 니켈 도금액.
- 제 1 항에 있어서, 상기 착화제는 상기 무전해 니켈 도금액 1 리터에 대하여 타르타르산을 5g 내지 20g 범위로 포함하고, 또한 락트산과 시트릭산을 합쳐서 5g 내지 20g 범위로 포함하고, 글리신을 5g 내지 100g 범위로 포함하는, 무전해 니켈 도금액.
- 제 1 항에 있어서, 상기 시안계 안정제는 NaSCN(sodium thiocyanate), KSCN(potassium thiocyanate), NaCN(sodium cyanide), 및 KCN(potassium cyanide) 중 적어도 어느 하나를 포함하고,상기 시안계 안정제는 상기 무전해 니켈 도금액 1 리터에 대하여 0.1 ppm 내지 5 ppm 범위로 포함되는, 무전해 니켈 도금액.
- 제 1 항에 있어서, 상기 무전해 니켈 도금액의 안정성을 제공하고, 상기 도금용 니켈 이온의 환원 반응을 억제하고, 금속 원소를 포함하는 금속 안정제;를 더 포함하고,상기 금속 안정제는 상기 무전해 니켈 도금액 1 리터에 대하여 0.1 ppm 내지 20 ppm 범위로 포함되는, 무전해 니켈 도금액.
- 제 9 항에 있어서, 상기 금속 안정제는, 주석(Sn), 아연(Zn), 마그네슘(Mg), 납(Pb), 카드뮴(Cd), 토륨(Th), 탈륨(Tl), 셀레늄(Se), 텔레늄(Te), 몰리브덴(Mo), 비소(As), 및 비스무트(Bi) 중 적어도 어느 하나를 포함하는, 무전해 니켈 도금액.
- 제 1 항에 있어서, 상기 무전해 니켈 도금액의 pH를 3.5 내지 5.5 범위로 조절하는 pH 조절제를 더 포함하는, 무전해 니켈 도금액.
- 제 11 항에 있어서, 상기 pH 조절제는, 황산, 염산, 질산, 암모니아수, 수산화나트륨, 수산화칼륨, 중 적어도 어느 하나를 포함하는, 무전해 니켈 도금액.
- 제 1 항 내지 제 12 항 중의 어느 한 항에 따른 무전해 니켈 도금액을 준비하는 단계; 및상기 무전해 니켈 도금액 내에 도금 대상체를 침지하여, 상기 도금 대상체 상에 연성 니켈 도금층을 형성하는 단계;를 포함하는 무전해 니켈 도금액을 이용한 무전해 니켈 도금 방법.
- 제 13 항에 있어서, 상기 연성 니켈 도금층을 형성하는 단계는, 3.5 내지 5.5 범위의 pH 에서 수행되는 무전해 니켈 도금 방법.
- 제 13 항에 있어서, 상기 연성 니켈 도금층을 형성하는 단계는, 70℃ 내지 95℃ 범위의 온도에서 수행되는 무전해 니켈 도금 방법.
- 제 13 항에 있어서, 상기 연성 니켈 도금층을 형성하는 단계는, 최소 15 ㎛/시의 도금층 형성 속도를 가지는, 무전해 니켈 도금 방법.
- 제 1 항 내지 제 12 항 중의 어느 한 항에 따른 무전해 니켈 도금액을 이용하여 무전해 니켈 도금 방법에 의하여 도금 대상체의 표면에 도금되어 형성된, 연성 니켈 도금층.
- 제 17 항에 있어서, 상기 연성 니켈 도금층은 비정질상, 주상정 결정상, 입상정 결정상, 및 괴상정 결정상 중 적어도 어느 두 개가 혼합된 복합 조직을 가지는, 연성 니켈 도금층.
- 제 17 항에 있어서, 상기 연성 니켈 도금층은 최소 500 Hv의 경도를 가지는, 연성 니켈 도금층.
- 제 17 항에 있어서, 상기 연성 니켈 도금층은 최소 500 회의 굴곡 횟수를 가지는, 연성 니켈 도금층.
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US14/905,376 US10358724B2 (en) | 2013-07-16 | 2014-07-01 | Electroless nickel plating solution, electroless nickel plating method using same, and flexible nickel plated layer formed by using same |
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KR20130083856A KR101487890B1 (ko) | 2013-07-16 | 2013-07-16 | 무전해 니켈 도금액, 이를 이용한 무전해 니켈 도금 방법, 및 이를 이용하여 제조된 연성 니켈 도금층 |
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US10006126B2 (en) * | 2014-10-27 | 2018-06-26 | Surface Technology, Inc. | Plating bath solutions |
US10731258B2 (en) * | 2014-10-27 | 2020-08-04 | Surface Technology, Inc. | Plating bath solutions |
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CN105408518A (zh) | 2016-03-16 |
KR101487890B1 (ko) | 2015-02-03 |
KR20150009401A (ko) | 2015-01-26 |
US20160168718A1 (en) | 2016-06-16 |
US10358724B2 (en) | 2019-07-23 |
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