WO2013151403A1 - 게이트 밸브 - Google Patents
게이트 밸브 Download PDFInfo
- Publication number
- WO2013151403A1 WO2013151403A1 PCT/KR2013/002915 KR2013002915W WO2013151403A1 WO 2013151403 A1 WO2013151403 A1 WO 2013151403A1 KR 2013002915 W KR2013002915 W KR 2013002915W WO 2013151403 A1 WO2013151403 A1 WO 2013151403A1
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- WO
- WIPO (PCT)
- Prior art keywords
- block
- valve
- driving
- motion block
- drive
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/0281—Guillotine or blade-type valves, e.g. no passage through the valve member
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
- F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/316—Guiding of the slide
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K41/00—Spindle sealings
- F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
Definitions
- the present invention is a valve blade 120 that can be in close contact with the valve seat (Valve-seat) 111 formed around the opening 112 in the valve housing 110 to close the opening 112 from the inside; and A valve rod (130) connected to the valve blade (120) and protruding while maintaining airtightness through the bellows (131) from the inside of the valve housing (110) to vertical movement and horizontal movement; and, Open and close drive section grooves connected to the outside of the valve housing 110, and formed in a horizontal direction continuously in the vertical direction toward the closing direction (c) in the upper and lower drive section groove 143 and the upper and lower drive section groove 143 formed up and down El motion block guide groove 142 is composed of a guide housing 140 formed on both inner surfaces; and the valve rod 130 is connected to, the el motion block guide groove 142 on both sides Guide roll inserted and driven L-Motion Block (150) is installed 151 151, and connected to the L-Motion Block (150) through one or more links 155 on the upper and lower sides, respectively
- the present invention opens or closes a transfer path for transferring a workpiece such as, for example, an integrated circuit (IC) or a component thereof from one vacuum processing chamber to another vacuum processing chamber, or a fluid flow path such as compressed fluid or gas, or an exhaust flow path. It relates to a gate valve for opening and closing.
- IC integrated circuit
- the semiconductor wafer or liquid crystal substrate is inserted and withdrawn from the various processing chambers through communication passageways.
- a gate valve for opening and closing the valve is installed.
- the gate valve of the said patent document 1 is a position which contact
- the valve rod between the roller and the inclined elongated hole for guiding the roller, or the end portion between the valve rod and the inclined link pivotally freely pivoted.
- the vacuum valve of the patent document 2 includes a wall having a valve opening surrounded by a valve seat, at least one valve plate disposed in a vacuum region of the vacuum valve (the valve plate being in an intermediate position in the longitudinal direction from the open position, and Can be moved from the intermediate position to the closed position in the transverse direction perpendicular to the longitudinal direction), at least one valve rod having a valve plate (the valve rod is guided out of the vacuum region of the vacuum valve, and on the wall With respect to the longitudinal direction (the longitudinal direction lies parallel to the longitudinal axis of the valve rod), and also transversely), and a longitudinal-drive device and a transverse-drive disposed outside the vacuum region of the vacuum valve.
- Device the valve rod allows the valve rod to move longitudinally, And it is characterized in that it comprises a can be moved in the lateral direction).
- the vacuum valve of Patent Document 2 has a problem that its operation path is very efficient, but requires a vertical drive device and a horizontal drive device for such operation, so that its configuration is very complicated and expensive to manufacture.
- the vertical-drive device and the horizontal-drive device are required to be operated in conjunction with each other at an accurate timing in order of operation for accurate opening / closing operation, there is a problem that complicated components for such interlocking operation are required. .
- the present invention solves the problems of the existing inventions described above, even in a simple and reliable structure using only one drive means, the valve plate is moved from the open position to the intermediate position in the longitudinal direction and then from the intermediate position to the longitudinal position. Closing operation to move to the closed position in the transverse direction perpendicular to the direction, or opening operation in the reverse order is possible, causing interference with various components installed inside the gate valve or caused by mechanical wear, etc. It is an object of the present invention to provide a valve capable of efficient operation that can prevent the possibility of impurities being mixed in the process chamber.
- the gate valve of the present invention is in close contact with the valve seat (Valve-seat) 111 formed around the opening 112 in the valve housing 110 to close the opening 112 from the inside.
- a valve blade 120 capable of being connected to the valve blade 120 and protruding while maintaining airtight through the bellows 131 from the inside of the valve housing 110 to the vertical movement and the horizontal movement.
- a valve rod 130 capable of being connected to the outside of the valve housing 110 and closing the upper and lower driving section grooves 143 and the upper and lower driving section grooves 143 formed upward and downward.
- El motion block guide groove 142 composed of the opening and closing drive section groove 144 continuously formed in the horizontal direction toward the guide housing 140 is formed on both inner surfaces; and is connected to the valve rod 130, El motion bladder on both sides L-Motion Block (150) to which the guide roller (151) inserted and driven in the guide groove (142) is installed; and the upper and lower sides of the L-Motion Block (150).
- a drive block 160 connected to each other through at least one link 155 to the at least one tension elastic means installed between the L-Motion Block 150 and the drive block 160; 170; and up and down driving means 180 for driving the driving block 160 up and down; Characterized in that comprises a.
- the tensile elastic means 170, the first spring pins are respectively provided in the spring pin through-hole 153 respectively formed in two or more of the upper side and the lower side of the L-Motion Block (150). (154); and a second spring pin (164) respectively provided in each of the spring pin coupling holes (163) formed at two or more positions of the upper side and the lower side of the drive block (160); and the first spring pin Springs 171 are respectively provided at both ends of the 154 and both ends of the second spring pin 164, characterized in that it further comprises, the up and down drive section groove 143 and the opening and closing drive
- the outer periphery of the section connecting the section groove 144 is characterized in that the curved portion having a curvature is further formed.
- the vertical drive means 180, the piston 182 is installed in the cylinder 181 is driven up and down by pneumatic, the drive rod 183 is connected to the drive block 160 is installed on the upper side It is characterized in that it further comprises a).
- the valve plate is moved from the open position to the intermediate position in the longitudinal direction and then perpendicular to the longitudinal direction from the intermediate position.
- the closing operation to move to the closed position in the horizontal direction or the opening operation in the reverse order is possible, so that impurities generated by interference with various components installed inside the gate valve or caused by mechanical wear are introduced into the processing chamber.
- the advantage is that efficient operation is possible to avoid the risk of mixing.
- Figure 2 is a side projection showing the appearance and the interior of the gate valve according to an embodiment of the present invention.
- FIG 3 is a front projection view showing the appearance and the interior of the gate valve according to an embodiment of the present invention.
- FIG. 4 is a side cross-sectional view showing a side cross-section of each part of a gate valve according to an embodiment of the present invention.
- FIG. 5 is an exploded perspective view showing the coupling relationship of the major components of the gate valve according to an embodiment of the present invention.
- Figure 6 is an operation process showing the operation of the gate valve according to an embodiment of the present invention.
- FIG. 7 is a perspective view showing an operation process and a closed state of a driving block and an El motion block of a gate valve according to an embodiment of the present invention.
- the gate valve of the present invention is largely as shown in Figs. 2 and 5, the valve blade 120, valve rod 130, guide housing 140, L-Motion Block (150), drive It comprises a block 160, a tension elastic means 170 and the vertical drive means 180.
- valve blade 120 will be described. As shown in FIG. 5, the valve blade may be in close contact with a valve seat 111 formed around the opening 112 in the valve housing 110 to close the opening 112 from the inside. Has the function. By opening or closing the opening 112 by the valve blade 120, opening and closing operations of the gate valve 100 of the present invention are implemented.
- valve rod 130 is connected to the valve blade 120 as shown in FIG. 5, and the bellows 131 is moved from the inside of the valve housing 110 to the outside as shown in FIGS. 2 and 4. It is installed to keep the airtight through the protrusion and to move vertically and horizontally.
- the guide housing 140 is connected to the outside of the valve housing 110, as shown in Figures 2 and 4, the L-Motion Block (150) and the drive block 160, etc. It has the function of protecting and embedding the main means of operation.
- the upper and lower driving section grooves 143 and the upper and lower driving section grooves 143 which are vertically horizontally disposed on both inner surfaces of the guide housing 140 toward the closing direction c.
- the L motion block guide groove 142 formed of the opening / closing driving section groove 144 formed in the direction is formed.
- the L motion block guide groove 142 as a whole has a shape similar to the inverted top and bottom of the "L" shape, that is, a shape similar to " ⁇ ".
- the curved portion r having a curvature is further formed to enable smooth operation.
- the embodiment constituting the guide housing 140 can be carried out through various embodiments, such as integral molding, in general, as shown in Figure 5 side guide plate 141, the housing upper plate 146 And housing lower plate 147 may be manufactured to be bonded to each other.
- the L motion block guide groove 142 is preferably formed on the inner surface of each of the side guide plate 141.
- the L motion block 150 is connected to the valve rod 130 and inserted into the L motion block guide groove 142 on both sides thereof.
- the guide roller 151 which is driven is provided.
- the driving block 160 is connected to the L-Motion Block 150 through one or more links 155 on the upper side and the lower side, respectively.
- the L-Motion Block 150 and the driving block 160 are parallel to each other by being connected to the upper side and the lower side through the link 155, respectively. And relatively close or spaced operation can be performed as shown in FIG. 7.
- the link 155 is installed between the link pins 156 of the 160.
- the lower side of the drive block 160 as shown in Figures 4 and 5 is a lower protrusion 161 for contact support for the lower surface of the L-Motion Block (150) in the closed state is further It is preferable that the L-Motion Block 150 be reliably supported in the closed state so that the closed state can be stably maintained.
- a strong tensile force may be generated between the L-Motion Block 150 and the drive block 160 by the link 155 during the opening operation.
- the drive block 160 may be generated. ) May move in the direction of the L-Motion Block 150, resulting in malfunction.
- the drive block 160 is coupled to the drive block guide rail 165 installed inside the guide housing 140.
- the drive block guide 166 is installed to allow the drive block 160 to be driven only up and down, so that the drive block 160 is prevented from the possibility of malfunction caused by moving to the side. desirable.
- one or more tensile elastic means 170 is installed between the L-Motion Block 150 and the driving block 160 to provide the L-Motion Block ( L-Motion Block 150 and the driving block 160 provides a tension force.
- this tension elastic means 170 By this tension elastic means 170, the L-Motion Block 150 in the direction of the drive block 160 by the lowering operation of the drive block 160 at the beginning of the opening operation. The horizontal moving operation is made more smoothly.
- the tensile elastic means 170 As an embodiment of implementing the tensile elastic means 170, a wide variety of embodiments are possible. As one embodiment of implementing the tensile elastic means 170, as shown in Figs. 6 and 7, respectively, at two or more places of the upper and lower sides of the L-Motion Block 150, respectively. Respectively provided in the first spring pin 154 respectively installed in the spring pin through-hole 153 to be formed, and the spring pin coupling holes 163 respectively formed in two or more positions of the upper side and the lower side of the driving block 160. It is preferable to further include a second spring pin 164, and springs 171 which are respectively provided at both ends of the first spring pin 154 and both ends of the second spring pin 164. .
- the vertical driving means 180 has a function of driving the driving block 160 up and down.
- the vertical driving means 180 As an embodiment of implementing the vertical driving means 180, a wide variety of embodiments are possible.
- the cylinder 181 is generally coupled to the housing lower plate 147 to be installed, so that the gate valve 100 of the present invention is easily disassembled / combined for maintenance / repair while being integrally manufactured. desirable.
- the closing process begins, and FIG.
- the up and down driving means 180 is raised to raise the driving block 160.
- the L motion block (L-Motion Block) is the guide roller 151 is located in the vertical drive section groove 143 of the L motion block guide groove 142, so that the link 155 The driving force of the driving block 160 is received and is operated to ascend upward.
- the L motion block (L-Motion Block) is raised to the maximum rising position (intermediate position) so that the guide roller 151 moves the L motion block guide groove 142.
- the drive block 160 is still in the upward operation.
- the L-Motion Block 150 is formed by the guide roller 151 of the L-Motion Block.
- Figure 6 In the closing direction ("c") is a closing action to move horizontally.
- the L-Motion Block 150 has the same shape as the inverted top and bottom of the “L” shape as shown in (b) of FIG.
- the valve blade 120 connected to the L-Motion Block 150 through the valve rod 130 is also operated in FIG. 1 (b).
- the L-shape is operated by a path having a shape similar to the inverted top and bottom, that is, a shape similar to “ ⁇ ”, so that interference with various components installed inside the gate valve may occur or Efficient operation that can prevent the impurities generated by mechanical wear or the like from entering the processing chamber is enabled.
- the opening process of the gate valve 100 proceeds in the reverse order to the closing process of the gate valve 100 described above.
- the L-Motion Block 150 is driven by the tension elastic means 170 by the lowering operation of the driving block 160 at the start of the opening operation. The horizontal movement in the direction will proceed more smoothly.
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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Abstract
Description
Claims (5)
- 밸브 하우징(110)에서 개구부(112) 주위에 형성된 밸브 시트(Valve-seat)(111)에 밀착되어 내측으로부터 상기 개구부(112)를 폐쇄할 수 있는 밸브 블레이드(120);상기 밸브 블레이드(120)에 연결되며, 상기 밸브 하우징(110)의 내부로부터 외부로 벨로우즈(131)를 통하여 기밀을 유지하며 돌출되어 상하 운동 및 수평 운동을 할 수 있는 밸브 로드(130);상기 밸브 하우징(110)의 외측에 연결되며, 상하로 형성된 상하 구동구간 홈(143) 및 상기 상하 구동구간 홈(143)의 상측에 폐쇄 방향(c)을 향하여 연속적으로 수평 방향으로 형성된 개폐 구동 구간 홈(144)으로 구성되는 엘 모션 블록 가이드 홈(142)이 양측 내면에 형성되어 있는 가이드 하우징(140);상기 밸브 로드(130)에 연결되며, 양 측면에 상기 엘 모션 블록 가이드 홈(142)에 삽입되어 구동되는 가이드 롤러(151)가 설치되는 엘 모션 블록(L-Motion Block)(150);상기 엘 모션 블록(L-Motion Block)(150)에 상측과 하측에 각각 하나 이상의 링크(155)를 통하여 연결되는 구동 블록(160);상기 엘 모션 블록(L-Motion Block)(150)과 상기 구동 블록(160) 사이에 하나 이상 설치되는 인장 탄성 수단(170);상기 구동 블록(160)을 상하로 구동하는 상하구동 수단(180); 을 포함하여 구성되는 것을 특징으로 하는 게이트 밸브(100).
- 청구항 제 1항에 있어서,상기 구동 블록(160)의 하측에 더 형성되며, 폐쇄상태에서 상기 엘 모션 블록(L-Motion Block)(150)의 하면을 접촉 지지하는 하측 돌출부(161);상기 구동 블록(160)에 더 설치되며, 상기 가이드 하우징(140)의 내측에 설치된 구동 블록 가이드 레일(165)에 결합하여 상기 구동 블록(160)이 상하로만 구동되도록 하는 구동 블록 가이드(166); 를 더 포함하여 구성되는 것을 특징으로 하는 게이트 밸브(100).
- 청구항 제 1항에 있어서,상기 인장 탄성 수단(170)은,상기 엘 모션 블록(L-Motion Block)(150)의 상측 및 하측의 2 개소 이상에 각각 형성되는 스프링 핀 통공(153)에 각각 설치되는 제 1 스프링 핀(154);상기 구동 블록(160)의 상측 및 하측의 2 개소 이상에 각각 형성되는 스프링핀 결합공(163)에 각각 설치되는 제 2 스프링 핀(164);상기 제 1 스프링 핀(154)의 양 말단과 상기 제 2 스프링 핀(164)의 양 말단에 각각 설치되는 스프링(171);을 더 포함하여 구성되는 것을 특징으로 하며,상기 상하 구동구간 홈(143)과 상기 개폐 구동 구간 홈(144)을 연결하는 구간의 외주연으로는 곡률을 지니는 만곡부가 더 형성되어 있는 것을 특징으로 하는 게이트 밸브(100).
- 청구항 제 1항에 있어서,상기 상하구동 수단(180)은,실린더(181) 내부에 설치되어 공압에 의하여 상하로 구동되며, 상측에 상기 구동 블록(160)에 연결되는 구동 로드(183)가 설치되어 있는 피스톤(182)을 더 포함하여 구성되는 것을 특징으로 하는 게이트 밸브(100).
- 청구항 제 1항에 있어서,상기 구동 블록(160)의 하측에 더 형성되며, 폐쇄상태에서 상기 엘 모션 블록(L-Motion Block)(150)의 하면을 접촉 지지하는 하측 돌출부(161);상기 구동 블록(160)에 더 설치되며, 상기 가이드 하우징(140)의 내측에 설치된 구동 블록 가이드 레일(165)에 결합하여 상기 구동 블록(160)이 상하로만 구동되도록 하는 구동 블록 가이드(166); 를 더 포함하여 구성되는 것을 특징으로 하고,상기 인장 탄성 수단(170)은,상기 엘 모션 블록(L-Motion Block)(150)의 상측 및 하측의 2 개소 이상에 각각 형성되는 스프링 핀 통공(153)에 각각 설치되는 제 1 스프링 핀(154);상기 구동 블록(160)의 상측 및 하측의 2 개소 이상에 각각 형성되는 스프링핀 결합공(163)에 각각 설치되는 제 2 스프링 핀(164);상기 제 1 스프링 핀(154)의 양 말단과 상기 제 2 스프링 핀(164)의 양 말단에 각각 설치되는 스프링(171);을 더 포함하여 구성되는 것을 특징으로 하며,상기 상하 구동구간 홈(143)과 상기 개폐 구동 구간 홈(144)을 연결하는 구간의 외주연으로는 곡률을 지니는 만곡부가 더 형성되어 있으며,상기 상하구동 수단(180)은,실린더(181) 내부에 설치되어 공압에 의하여 상하로 구동되며, 상측에 상기 구동 블록(160)에 연결되는 구동 로드(183)가 설치되어 있는 피스톤(182)을 더 포함하여 구성되는 것을 특징으로 하는 게이트 밸브(100).
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Cited By (2)
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US20170089472A1 (en) * | 2015-09-25 | 2017-03-30 | Presys.Co.,Ltd | Two-way gate valve |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4721282A (en) * | 1986-12-16 | 1988-01-26 | Lam Research Corporation | Vacuum chamber gate valve |
JPH0587258A (ja) * | 1991-09-30 | 1993-04-06 | Tokyo Electron Yamanashi Kk | ゲートバルブ |
JPH05196150A (ja) * | 1991-09-30 | 1993-08-06 | Tokyo Electron Yamanashi Kk | ゲートバルブ |
US7766305B2 (en) * | 2007-03-29 | 2010-08-03 | Presys Co., Ltd. | Rectangular gate valve |
KR101071955B1 (ko) * | 2009-05-06 | 2011-10-11 | 주식회사 에스알티 | 게이트 밸브 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH420758A (de) * | 1963-04-02 | 1966-09-15 | Schertler Siegfried | Absperrschieber |
JPS62104074U (ko) * | 1985-12-20 | 1987-07-02 | ||
JPH0353678U (ko) * | 1989-09-30 | 1991-05-23 | ||
JP2613171B2 (ja) * | 1993-07-22 | 1997-05-21 | 株式会社岸川特殊バルブ | ゲートバルブ |
KR960002534A (ko) * | 1994-06-07 | 1996-01-26 | 이노우에 아키라 | 감압·상압 처리장치 |
JP2766190B2 (ja) * | 1994-07-28 | 1998-06-18 | 入江工研株式会社 | 無しゅう動真空ゲートバルブ |
JP2657778B2 (ja) * | 1994-10-31 | 1997-09-24 | 株式会社岸川特殊バルブ | ゲートバルブ |
JP2958267B2 (ja) * | 1996-05-07 | 1999-10-06 | 入江工研株式会社 | 無摺動真空ゲートバルブ |
US5755255A (en) * | 1996-10-29 | 1998-05-26 | Benkan Corporation | Gate valve for regulating gas flow in semiconductor manufacturing |
US5934646A (en) * | 1997-04-04 | 1999-08-10 | Nok Corporation | Gate valve and cylinder apparatus |
US6056267A (en) * | 1998-05-19 | 2000-05-02 | Applied Materials, Inc. | Isolation valve with extended seal life |
JP2000074258A (ja) * | 1998-06-19 | 2000-03-14 | Shin Meiwa Ind Co Ltd | 真空ゲ―ト弁 |
DE60030559T2 (de) * | 1999-06-02 | 2007-08-30 | Tokyo Electron Ltd. | Schieberventil für halbleiterbehandlungsvorrichtung |
EP1061301B1 (en) * | 1999-06-14 | 2004-07-28 | SMC Kabushiki Kaisha | Gate valve |
JP2000356271A (ja) * | 1999-06-14 | 2000-12-26 | Smc Corp | ゲートバルブ |
US6390448B1 (en) * | 2000-03-30 | 2002-05-21 | Lam Research Corporation | Single shaft dual cradle vacuum slot valve |
JP4304365B2 (ja) * | 2002-12-16 | 2009-07-29 | Smc株式会社 | ゲートバルブ |
US7100892B2 (en) * | 2003-08-26 | 2006-09-05 | Kitz Sct Corporation | Non-rubbing gate valve for semiconductor fabrication apparatus |
JP3912604B2 (ja) * | 2003-11-04 | 2007-05-09 | 入江工研株式会社 | ゲート弁 |
US7198251B2 (en) * | 2004-12-21 | 2007-04-03 | Tokyo Electron Limited | Opening/closing mechanism for vacuum processing apparatus and vacuum processing apparatus using the same |
US7441747B2 (en) * | 2005-07-18 | 2008-10-28 | G-Light Display Corp. | Vacuum gate |
DE102008027944B3 (de) * | 2008-06-12 | 2009-07-30 | Vat Holding Ag | Schieberventil |
DE102008049353A1 (de) * | 2008-09-29 | 2010-04-08 | Vat Holding Ag | Vakuumventil |
KR101376045B1 (ko) * | 2012-04-06 | 2014-03-18 | 프리시스 주식회사 | 게이트 밸브 |
-
2012
- 2012-04-06 KR KR1020120035931A patent/KR101375280B1/ko active IP Right Grant
-
2013
- 2013-04-08 CN CN201380018556.7A patent/CN104204635A/zh active Pending
- 2013-04-08 JP JP2015504509A patent/JP6115628B2/ja active Active
- 2013-04-08 WO PCT/KR2013/002915 patent/WO2013151403A1/ko active Application Filing
- 2013-04-08 US US14/390,554 patent/US9429239B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4721282A (en) * | 1986-12-16 | 1988-01-26 | Lam Research Corporation | Vacuum chamber gate valve |
JPH0587258A (ja) * | 1991-09-30 | 1993-04-06 | Tokyo Electron Yamanashi Kk | ゲートバルブ |
JPH05196150A (ja) * | 1991-09-30 | 1993-08-06 | Tokyo Electron Yamanashi Kk | ゲートバルブ |
US7766305B2 (en) * | 2007-03-29 | 2010-08-03 | Presys Co., Ltd. | Rectangular gate valve |
KR101071955B1 (ko) * | 2009-05-06 | 2011-10-11 | 주식회사 에스알티 | 게이트 밸브 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107002890A (zh) * | 2014-11-25 | 2017-08-01 | 普利西斯株式会社 | 真空阀 |
US20170268680A1 (en) * | 2014-11-25 | 2017-09-21 | Presys Co., Ltd. | Vacuum valve |
US10132414B2 (en) * | 2014-11-25 | 2018-11-20 | Presys Co., Ltd. | Vacuum valve |
US20170089472A1 (en) * | 2015-09-25 | 2017-03-30 | Presys.Co.,Ltd | Two-way gate valve |
US9995402B2 (en) * | 2015-09-25 | 2018-06-12 | Presys.Co.,Ltd | Two-way gate valve |
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Publication number | Publication date |
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KR20130113625A (ko) | 2013-10-16 |
CN104204635A (zh) | 2014-12-10 |
JP6115628B2 (ja) | 2017-04-19 |
US9429239B2 (en) | 2016-08-30 |
KR101375280B1 (ko) | 2014-03-17 |
JP2015515592A (ja) | 2015-05-28 |
US20150069282A1 (en) | 2015-03-12 |
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