WO2013118358A1 - 半導体発光素子 - Google Patents
半導体発光素子 Download PDFInfo
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- WO2013118358A1 WO2013118358A1 PCT/JP2012/078869 JP2012078869W WO2013118358A1 WO 2013118358 A1 WO2013118358 A1 WO 2013118358A1 JP 2012078869 W JP2012078869 W JP 2012078869W WO 2013118358 A1 WO2013118358 A1 WO 2013118358A1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/11—Comprising a photonic bandgap structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/10—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector
- H01L33/105—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector with a resonant cavity structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/185—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0083—Periodic patterns for optical field-shaping in or on the semiconductor body or semiconductor body package, e.g. photonic bandgap structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/02—ASE (amplified spontaneous emission), noise; Reduction thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/17—Semiconductor lasers comprising special layers
- H01S2301/176—Specific passivation layers on surfaces other than the emission facet
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04252—Electrodes, e.g. characterised by the structure characterised by the material
- H01S5/04253—Electrodes, e.g. characterised by the structure characterised by the material having specific optical properties, e.g. transparent electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
Definitions
- the present invention relates to a semiconductor light emitting device.
- Patent Document 1 discloses a surface emitting laser light source having a two-dimensional photonic crystal structure.
- the surface-emitting laser light source of Patent Document 1 includes a window-like electrode in which an opening not including an electrode material is formed, an active layer, and a rectangular back electrode having a smaller area than the opening of the window-like electrode.
- the window-like electrode is provided on the light emitting side of the element substrate.
- the back electrode is provided on the mounting surface on the opposite side of the window electrode. Current is supplied to the active layer from the window electrode and the back electrode.
- the distance between the back electrode and the active layer is smaller than the distance between the element substrate and the active layer, and the current injection range into the active layer corresponds to the size of the back electrode.
- the inventor has found that a very weak noise pattern exists in the peripheral portion of the beam light emitted in the direction perpendicular to the plane (non-patent). Reference 1).
- This noise pattern is generated when light in the oscillation state is subjected to inelastic scattering due to disturbance of the photonic crystal and is diffracted by the photonic crystal.
- the inventor leaks light corresponding to the noise pattern (hereinafter referred to as noise light) outside the current injection region, that is, in a region where no light emission occurs. I found that.
- This noise light is a problem because, for example, when the optical interconnection is composed of multiple channels, it can cause crosstalk to adjacent channels. Further, it is presumed that the light generated around the back electrode is noise light. However, if the area of the opening is made larger than the area of the back electrode as in Patent Document 1, the emitted noise light increases. On the other hand, if the area of the back electrode is made larger than the area of the opening, there is a problem that sufficient light output cannot be obtained.
- An object of the present invention has been made in view of the above problems, and for example, to provide a semiconductor light emitting device capable of obtaining a sufficient light output and suppressing emission of noise light by a photonic crystal.
- a semiconductor light-emitting device includes a first electrode, a group III-V compound semiconductor semiconductor portion, and a second electrode, and the semiconductor portion includes the first electrode and the second electrode.
- the semiconductor unit includes an active layer and a photonic crystal layer, and the photonic crystal layer is provided between the active layer and the first electrode, and the active layer. Between the active layer and the first electrode, and between the active layer and the second electrode are mutually conductive. The types are different, the first electrode has an opening, and the first electrode, the active layer, the photonic crystal layer, and the second electrode are stacked along a reference axis.
- the reference axis passes through a central portion of the opening as viewed from the axial direction of the reference axis, and the second electrode And a first end located in a first direction as viewed from the axial direction of the reference axis, and a second end located in a second direction opposite to the first direction.
- the opening has a third end located in the first direction when viewed from the axial direction of the reference axis, and a fourth end located in the second direction.
- the first end of the second electrode and the third end of the opening substantially coincide with each other when viewed from the axial direction of the reference axis.
- the end of the second electrode and the end of the opening are substantially coincident when viewed from the axial direction of the reference axis. For this reason, only the noise light located in the vicinity of the outer periphery of the opening is blocked by the first electrode. Therefore, sufficient light output can be obtained and emission of noise light from the photonic crystal can be suppressed.
- a semiconductor light emitting device includes a first electrode, a group III-V compound semiconductor semiconductor portion, and a second electrode, and the semiconductor portion includes the first electrode.
- the second electrode, and the semiconductor part has an active layer and a photonic crystal layer, and the photonic crystal layer is between the active layer and the first electrode, and Provided between the active layer and the second electrode, between the active layer and the first electrode, and between the active layer and the second electrode.
- the first electrode has an opening, and the minimum value of the intensity of light output from the active layer and the photonic crystal layer and reaching the opening is: The maximum value of the intensity of light output from the active layer and the photonic crystal layer and reaching the opening. Not less than% of (satisfy 10 ⁇ A ⁇ 30).
- the light transmission intensity of the first electrode decreases as the distance from the outer periphery of the opening portion increases. Therefore, since it is possible to reduce the transmission intensity of noise light at the outer edge portion of the opening, emission of noise light by the photonic crystal can be suppressed. In addition, it is possible to suppress the occurrence of side lobes that occur due to abrupt changes in light intensity.
- the semiconductor light emitting device includes a DBR layer, the DBR layer is provided on the reference axis, and the DBR layer includes the first electrode and the photonic crystal. It is provided at any position between the layer and between the second electrode and the photonic crystal layer.
- the DBR layer it is possible to make a difference in the intensity of light emitted in the reference axis direction and the other directions. While the original light output is output along the reference axis direction, the noise light is mainly output in a direction away from the reference axis, so that noise light emitted in directions other than the reference axis direction is emitted. Can be suppressed.
- the semiconductor light-emitting device includes a first DBR layer and a second DBR layer, and the first DBR layer includes the first electrode and the photonic crystal. And the second DBR layer is provided between the second electrode and the photonic crystal layer. Therefore, by providing the DBR layer, it is possible to make a difference in the intensity of light emitted in the reference axis direction and other directions. While the original light output is output along the reference axis direction, the noise light is mainly output in a direction away from the reference axis, so that noise light emitted in directions other than the reference axis direction is emitted. Can be suppressed.
- the semiconductor light emitting device for example, sufficient light output can be obtained and emission of noise light from the photonic crystal can be suppressed.
- the semiconductor light emitting device 10 of the first embodiment is a so-called edge-emitting photonic crystal laser device.
- the laser light emission surface is positioned parallel to the YZ plane.
- This X axis corresponds to the reference axis.
- Laser light LA is emitted from the semiconductor light emitting element 10 along the X-axis direction.
- the semiconductor light emitting device 10 includes an N clad layer 2, an active layer 3, a photonic crystal layer 4, a P clad layer 5, a contact layer 6 and an electrode 9 along the X axis from the semiconductor substrate 1. It is prepared sequentially. In the following, it is assumed that the origin of the XYZ orthogonal coordinate system is set inside the semiconductor substrate 1, the direction in which the N clad layer 2 is provided with respect to the semiconductor substrate 1 is the X-axis positive direction, and the right direction in FIG. The description will be made assuming that the Y-axis positive direction and the depth direction in FIG. 1 are the Z-axis positive direction.
- An antireflection film 7 and an electrode 8 are provided on the X-axis negative direction side of the semiconductor substrate 1.
- the conductivity type between the active layer 3 and the electrode 8 is N-type, and the conductivity type between the active layer 3 and the electrode 9 is P-type.
- the semiconductor substrate 1, the N clad layer 2, the active layer 3, the photonic crystal layer 4, the P clad layer 5, the contact layer 6 and the electrode 9 are arranged on the X axis.
- the semiconductor substrate 1, the N clad layer 2, the active layer 3, the photonic crystal layer 4, the P clad layer 5, and the contact layer 6 are III-V group compound semiconductor semiconductor portions. This semiconductor portion is provided between the electrode 8 and the electrode 9.
- the electrode 8, the active layer 3, the photonic crystal layer 4 and the electrode 9 are stacked along the X axis which is a reference axis.
- the semiconductor substrate 1 has a rectangular parallelepiped shape.
- the material of the semiconductor substrate 1 is, for example, GaAs.
- the thickness of the semiconductor substrate 1 is, for example, not less than 80 ⁇ m and not more than 350 ⁇ m.
- the N clad layer 2 is formed on the X axis positive direction side of the semiconductor substrate 1.
- the material of the N clad layer 2 is, for example, AlGaAs.
- the thickness of the N clad layer 2 is, for example, not less than 1.0 ⁇ m and not more than 3.0 ⁇ m.
- the active layer 3 supplies light to the photonic crystal layer 4.
- the active layer 3 is located between the N clad layer 2 and the photonic crystal layer 4.
- the active layer 3 is made of, for example, a quantum well layer.
- the active layer 3 has a laminated structure of AlGaAs and InGaAs.
- the thickness of the active layer 3 is, for example, 10 nm or more and 100 nm or less.
- the photonic crystal layer 4 is provided to obtain stable oscillation.
- the photonic crystal layer 4 generates laser light by light resonance.
- the photonic crystal layer 4 determines the wavelength of the resonating laser beam.
- the photonic crystal layer 4 is located between the active layer 3 and the P clad layer 5.
- the material of the photonic crystal layer 4 is, for example, GaAs and AlGaAs.
- the thickness of the photonic crystal layer 4 is not less than 100 nm and not more than 400 nm, for example.
- the photonic crystal layer 4 is generated, for example, by periodically forming a plurality of holes in a basic layer 4a made of GaAs and growing a buried layer 4b made of AlGaAs in the holes.
- the crystal pattern of the photonic crystal layer 4 can be embedded with the same material as that of the P clad layer 5, for example, or a structure in which air is held inside can be used.
- the P clad layer 5 is provided on the X-axis positive direction side of the photonic crystal layer 4.
- the material of the P clad layer 5 is, for example, P-type AlGaAs.
- the thickness of the P clad layer 5 is not less than 1.0 ⁇ m and not more than 3.0 ⁇ m, for example.
- the contact layer 6 is provided on the X-axis positive direction side of the P clad layer 5.
- the material of the contact layer 6 is, for example, GaAs.
- the contact layer 6 has a thickness of, for example, 50 nm or more and 500 nm or less.
- An insulating layer F such as SiO 2 or SiNx is provided on the contact layer 6 as necessary.
- the antireflection film 7 is provided on the X-axis negative direction side of the semiconductor substrate 1.
- the material of the antireflection film 7 is, for example, SiN.
- the electrode 8 is provided on the X-axis negative direction side of the semiconductor substrate 1.
- the electrode 8 is provided in a portion where the antireflection film 7 does not exist.
- the shape of the electrode 8 is, for example, a substantially rectangular parallelepiped shape.
- the surface shape of the electrode 8 is, for example, a square as shown in FIG.
- the distance from the electrode 8 to the active layer 3 is, for example, 100 ⁇ m.
- a material of the electrode 8 for example, a metal such as Au, Ge, Ni, or an alloy thereof can be used.
- the electrode 8 has an opening 8a.
- the opening 8a is disposed on the X axis.
- the shape of the opening 8a is a square.
- the length of one side of the opening 8a is L2.
- the distance between the end of the semiconductor light emitting element 10 on the Z axis positive direction side and the end of the opening 8a on the Z axis positive direction side is ZF3
- the end of the semiconductor light emitting element 10 on the Z axis negative direction side ZB3 is the distance between the end of the opening 8a and the end of the opening 8a on the negative side of the Z axis
- the distance between the end of the semiconductor light emitting element 10 on the negative side of the Y axis and the end of the opening 8a on the negative side of the Y axis is the distance between the end of the semiconductor light emitting element 10 on the negative side of the Y axis and the end of the opening 8a on the negative side of the Y axis.
- the opening 8a has an end 8e1 (third end) located in the negative Y-axis direction (first direction) as viewed from the X-axis and a positive Y-axis direction (second direction) that is the opposite direction. And an end portion 8e2 (fourth end portion) located at the end.
- the shape of the surface of the electrode 8 and the opening part 8a is not square but can be another shape such as a rectangle, a circle, or a hexagon.
- the electrode 8 has a central portion 8a2. The distance from the central portion 8a2 to each side of the electrode 8 is almost the same.
- the electrode 9 is provided on the X axis positive direction side of the contact layer 6.
- the shape of the electrode 9 is, for example, a substantially rectangular parallelepiped shape.
- the electrode 9 is provided in an opening formed in the insulating layer F.
- a metal such as Au, Cr, Ti or the like can be used like the electrode 8.
- the distance between the end of the semiconductor light emitting element 10 on the negative side of the Z axis and the end of the electrode 9 on the negative side of the Z axis is ZF1
- the positive direction of the semiconductor light emitting element 10 in the Z axis ZB1 the distance between the end on the Z axis positive direction side of the electrode 9 and the end on the Y axis positive direction side of the semiconductor light emitting element 10 and the end on the Y axis positive direction side of the electrode 9 Is YR1
- the distance between the end of the semiconductor light emitting element 10 on the Y-axis negative direction side and the end of the electrode 9 on the Y-axis negative direction side is YL1,
- the electrode 9 has a contact surface 9a on the X axis negative direction side.
- the contact surface 9 a is a surface for contacting the contact layer 6.
- the shape of the contact surface 9a is a square.
- the length of one side of the contact surface 9a is L1. Further, for example, the distance between the end of the semiconductor light emitting element 10 on the negative side of the Z axis and the end of the contact surface 9a on the negative side of the Z axis is ZF2, and the end of the semiconductor light emitting element 10 is in contact with the end of the positive side of the Z axis.
- the distance between the end of the surface 9a on the Z-axis positive direction side is ZB2
- the distance between the end of the semiconductor light emitting element 10 on the Y-axis positive direction side and the end of the contact surface 9a on the Y-axis positive direction side is YR2
- the semiconductor Assuming that the distance between the end of the light emitting element 10 on the Y axis negative direction side and the end of the contact surface 9a on the Y axis negative direction side is YL2,
- the electrode 9 has an end 9e1 (first end) located in the negative Y-axis direction when viewed from the X-axis axial direction and an end 9e2 (second end) located in the positive Y-axis direction. Have.
- the electrode 9 has a central portion 9a2. The distances from the central portion 9a2 to each side of the electrode 9 are all substantially the same.
- the distance from the electrode 9 to the active layer 3 is very small compared to the distance from the electrode 8 to the active layer 3, for example, several ⁇ m.
- the injection range of the power source to the active layer 3 corresponds to the contact surface 9a.
- the shape of the contact surface 9a may not be a square, and can be any shape as long as it is the same as the opening 8a.
- the X axis passes through the central portion 8a2 (see FIG. 2) of the opening 8a in the YZ plane orthogonal to the direction in which the electrode 8, the active layer 3, the photonic crystal layer 4 and the electrode 9 are stacked. .
- the operation of the semiconductor light emitting device 10 configured as described above will be briefly described.
- a driving voltage is applied between the electrode 8 and the electrode 9 and a current is passed, carriers are concentrated in the active layer 3.
- light is emitted by recombination of electrons and holes.
- This light emission is resonated by the photonic crystal layer 4 in the core layer from the N clad layer 2 to the P clad layer 5 to generate laser light LA.
- the laser beam LA is emitted to the outside of the semiconductor light emitting element 10 from the opening 8a.
- Non-Patent Document 1 a very weak noise pattern exists in the peripheral portion of the laser light emitted in the X-axis direction (for example, Non-Patent Document 1). reference).
- This noise pattern is generated when light in the oscillation state is subjected to inelastic scattering due to disturbance of the photonic crystal and is diffracted by the photonic crystal.
- the semiconductor light emitting device in which this noise pattern occurs it has been discovered that noise light corresponding to this noise pattern leaks outside the current injection region, that is, in a region where no light emission occurs. This noise light is a problem because, for example, when the optical interconnection is composed of multiple channels, it can cause crosstalk to adjacent channels.
- the outer periphery 8a1 of the opening 8a of the electrode 8 and the outer periphery 9a1 of the contact surface 9a of the electrode 9 are substantially coincident with each other in the YZ plane orthogonal to the X axis.
- L2 L1 ⁇ ⁇ L.
- the value of ⁇ L can be an absolute value such as several ⁇ m, or can be a relative value such as 1% of the length L2 of one side of the opening 8a. Further, for example, as shown in the graph of FIG. 4, the intensity distribution of the light reaching the opening 8a becomes smaller as the central portion 8a2 of the opening 8a in the YZ plane is at most away from the central portion 8a2 and goes toward the outer periphery 8a1. In this case, a portion where the light intensity is equal to or less than a reference value (for example, 20% of the maximum value) can be set as ⁇ L. Thus, the value of ⁇ L is set so that noise light does not exit from the opening 8a.
- a reference value for example, 20% of the maximum value
- the end 9e1 of the electrode 9 and the end 8e1 of the opening 8a substantially coincide with each other when viewed from the axial direction of the X axis. Therefore, the noise light existing on the outer periphery 9 a 1 of the electrode 9 is blocked at the portion located outside the opening 8 a of the electrode 8. Therefore, the noise light is not emitted from the opening 8a, so that the above problem is solved.
- the minimum value of the intensity of the light that is output from the active layer 3 and the photonic crystal layer 4 and reaches the opening 8a is the light intensity that is output from the active layer 3 and the photonic crystal layer 4 and reaches the opening 8a. It does not fall below A% of the maximum value of the strength (10 ⁇ A ⁇ 30 is satisfied). If the intensity of light reaching the opening 8a has a distribution as shown in the graph of FIG. 4, for example, the intensity of light reaching the outer periphery 8a1 does not fall below 20% of the intensity of light reaching the center 8a2. It is like that.
- the minimum value of the light intensity reaching the opening 8a to 20% or more, for example, weak noise light existing on the outer periphery 8a1 of the opening 8a does not pass through the opening 8a. Therefore, emission of noise light to the outside of the semiconductor light emitting element 10 can be suppressed.
- the light transmission intensity of the electrode 8 decreases as the distance from the outer periphery of the opening 8a increases.
- the light transmission intensity of the electrode 8 is continuously reduced by, for example, an absorption ND filter.
- the transmittance is decreased as the distance from the outer periphery 8a1 of the opening 8a is changed by continuously changing the concentration of the thin film of the ND filter, for example, at the outer periphery 8a1 of the opening 8a. ing.
- emission of noise light at the outer periphery 8a1 of the opening 8a can be suppressed.
- the transmittance can be changed stepwise instead of continuously.
- a reflection type ND filter may be used instead of the absorption type ND filter.
- the reflective ND filter for example, a metal thin film such as chromium deposited by vapor deposition so that the concentration changes can be used, and the opening of the electrode 9 can be vapor deposited so that the concentration changes. What is formed can also be used.
- an example of a method for manufacturing the semiconductor light emitting device 10 according to the first embodiment configured as described above will be described with reference to FIGS.
- a semiconductor substrate 1 made of GaAs using an MOCVD (metal organic chemical vapor deposition) method or the like, an N clad layer 2 made of AlGaAs, an active layer 3 made of a laminated structure of AlGaAs and InGaAs, and a basic layer 4a made of GaAs are sequentially epitaxially grown (part (a) of FIG. 5).
- MOCVD metal organic chemical vapor deposition
- a mask layer FL1 made of SiN is formed on the basic layer 4a by plasma CVD, and a resist RG1 is applied on the mask layer FL1 (part (b) of FIG. 5).
- a two-dimensional fine pattern (corresponding to the position of the embedded layer 4b) is formed on the resist RG1 by drawing and developing a two-dimensional fine pattern with an electron beam drawing apparatus ((c in FIG. 5). ) Part).
- a plurality of holes H1 having a fine pattern are formed in the resist RG1. Each hole H1 reaches the surface of the mask layer FL1.
- the mask layer FL1 is etched using the resist RG1 as a mask, and the fine pattern of the resist is transferred to the mask layer FL1 (part (d) in FIG. 5).
- RIE reactive ion etching
- SiN etching gas a fluorine-based gas (CF4, CHF3, C2F6) can be used.
- the resist RG1 is immersed in a stripping solution, and the resist RG1 is further ashed to remove the resist RG1 (part (e) in FIG. 5).
- ashing photoexcitation ashing or plasma ashing can be used.
- only the mask layer FL1 having a plurality of holes H3 remains on the basic layer 4a.
- the basic layer 4a is etched, and the fine pattern of the mask layer FL1 is transferred to the basic layer 4a (portion (f) in FIG. 5).
- dry etching is used.
- a chlorine-based or fluorine-based gas can be used as an etching gas.
- Cl2, SiCl4, SF6 or the like can be used as a main etching gas, and Ar gas or the like mixed therein can be used.
- the depth of the hole H4 formed in the basic layer 4a is, for example, about 100 nm, and the depth of the hole H4 is smaller than the thickness of the basic layer 4a. Note that the hole H4 can reach the surface of the semiconductor layer serving as the base of the basic layer 4a.
- RIE reactive ion etching
- the SiN etching gas a fluorine-based gas (CF4, CHF3, C2F6) can be employed as described above.
- surface treatment such as surface cleaning including thermal cleaning of the basic layer 4a is performed.
- the buried layer 4b is formed (regrown) in the hole H5 by MOCVD (part (h) in FIG. 5).
- MOCVD part (h) in FIG. 5
- AlGaAs is supplied to the surface of the basic layer 4a.
- the supplied AlGaAs has a higher Al composition ratio than the basic layer 4a.
- AlGaAs fills the hole H5 and becomes the buried layer 4b.
- AlGaAs supplied thereafter is laminated on the basic layer 4a as a buffer layer.
- a P clad layer 5 made of AlGaAs and a contact layer 6 made of GaAs are successively grown on the photonic crystal layer 4 by MOCVD (part (i) in FIG. 5).
- the crystal growth described above is all epitaxial growth, and the crystal axes of the respective semiconductor layers are coincident.
- a resist RG2 is applied on the contact layer 6 (part (j) in FIG. 6). Thereafter, an opening pattern for disposing the electrode 9 is formed in the resist RG2 (portion (k) in FIG. 6). Then, electrode material 9b is deposited on the exposed surface of resist RG2 and contact layer 6 using resist RG2 having this opening pattern as a mask (portion (l) in FIG. 6). For example, a vapor deposition method or a sputtering method can be used to form the electrode material 9b. Thereafter, the resist RG2 is removed by lift-off, and the square electrode material 9b is left on the contact layer 6 to form the electrode 9.
- an antireflection film 7 made of SiN or the like is formed on the surface of the semiconductor substrate 1 on the negative side in the X-axis direction by, for example, mirror polishing and using a PCVD method or the like. Then, for example, the antireflection film 7 is removed only from the shape portion of the electrode 8 using a photolithography method, and the electrode 8 is formed using a photolithography method and a vacuum deposition method (portion (m) in FIG. 6). As described above, the electrodes 8 and 9 are formed to complete the semiconductor light emitting device 10. When the electrodes 8 and 9 are formed, the dimensions of the contact surface 9a of the electrode 9 and the dimensions of the opening 8a of the electrode 8 are made to coincide.
- the semiconductor light emitting device 20 of the second embodiment is different from the semiconductor light emitting device 10 of the first embodiment in that a P-type DBR layer is interposed between the photonic crystal layer 4 and the P clad layer 5 as shown in FIG. 25 (DBR: Distributed Bragg Reflector).
- DBR Distributed Bragg Reflector
- the DBR layer 25 is provided on the X axis.
- the surface 25 a on the X-axis positive direction side of the DBR layer 25 is in contact with the P-cladding layer 5, and the surface 25 b on the X-axis negative direction side of the DBR layer 25 is in contact with the photonic crystal layer 4.
- the DBR layer 25 reflects the laser light LB generated by the photonic crystal layer 4 and causes the photonic crystal layer 4 to emit reflected light LC.
- the DBR layer 25 is also referred to as a mirror layer.
- the DBR layer 25 has a semiconductor multilayer structure in which, for example, AlGaAs layers having different Al composition ratios are alternately stacked.
- the DBR layer 25 converts the intensity of the reflected light according to the incident angle of the incident light. Specifically, for example, as shown in part (e) of FIG. 9, when there is incident light LD incident in the X-axis direction and incident light LE incident light LF incident obliquely with respect to the X-axis, the DBR layer 25 has a function of making the intensity of the reflected light LH of the incident light LE and the intensity of the reflected light LI of the incident light LF weaker than the intensity of the reflected light LG of the incident light LD. For example, when there are reflection characteristics of the reflected lights LG, LH, and LI as shown in FIGS. 9A to 9C, the DBR layer 25 causes the intensity of the reflected light LG to be higher than that of the reflected lights LH and LI. Then, the wavelength ⁇ 1 is determined so as to be higher (part (d) of FIG. 9).
- the step of growing the P clad layer 5 and the contact layer 6 on the photonic crystal layer 4 is the same as that of the first embodiment. This is different from the method for manufacturing the semiconductor light emitting device 10. Specifically, the DBR layer 25, the P clad layer 5 and the contact layer 6 are sequentially grown on the photonic crystal layer 4. Subsequent steps (steps after the portion (j) in FIG. 6) are the same as those in the method for manufacturing the semiconductor light emitting device 10 of the first embodiment.
- the DBR layer 25 changes the reflection intensity of light in the X-axis direction and other directions, and reflects the reflected light emitted in directions other than the X-axis direction. It becomes possible to weaken the reflected light emitted in the direction. Therefore, noise light emitted in directions other than the X-axis direction can be suppressed.
- a single-layer metal reflective film such as AL, Au, Ag, etc. can be applied as a mirror layer.
- the semiconductor light emitting device 30 according to the third embodiment is different from the semiconductor light emitting device 10 of the first embodiment in that a DBR layer 35 is provided between the N clad layer 2 and the active layer 3 as shown in FIG. It is a point.
- the DBR layer 35 is provided on the X axis. A surface 35a on the X-axis positive direction side of the DBR layer 35 is in contact with the active layer 3, and a surface 35b on the X-axis negative direction side of the DBR layer 35 is in contact with the N cladding layer 2.
- the DBR layer 35 has a function of transmitting the laser light generated by the photonic crystal layer 4. Similar to the DBR layer 25, the DBR layer 35 has a semiconductor multilayer structure in which, for example, AlGaAs layers having different AL composition ratios are alternately stacked.
- the DBR layer 35 converts the intensity of the transmitted light according to the incident angle of the incident light. Specifically, for example, as shown in FIG.
- the DBR layer 35 when there is incident light LJ incident in the X-axis direction, incident light LK and incident light LL inclined with respect to the X-axis, the DBR layer 35 is incident It has a function of making the intensity of the transmitted light LN of the light LK and the intensity of the transmitted light LO of the incident light LL weaker than the intensity of the transmitted light LM of the incident light A.
- the DBR layer 35 when there is a transmission characteristic of transmitted light LM, LN, and LO as shown in FIGS. 11A to 11C, the DBR layer 35 causes the intensity of the transmitted light LM to be higher than that of the transmitted light LN and LO. Then, the wavelength ⁇ 2 is determined so as to be higher (part (d) of FIG. 11).
- the step of growing the N clad layer 2, the active layer 3, and the basic layer 4 a on the semiconductor substrate 1 is the first.
- the N clad layer 2, the DBR layer 35, the active layer 3, and the basic layer 4 a are sequentially epitaxially grown on the semiconductor substrate 1 using MOCVD (metal organic chemical vapor deposition) method or the like.
- MOCVD metal organic chemical vapor deposition
- the DBR layer 35 changes the light transmission intensity in the X-axis direction and other directions, and transmits transmitted light emitted in directions other than the X-axis direction. It becomes possible to weaken the transmitted light emitted in the direction. Therefore, like the semiconductor light emitting device 20 of the second embodiment, noise light emitted in directions other than the X-axis direction can be suppressed.
- the second embodiment and the third embodiment have either the DBR layer 25 or the DBR layer 35, it is possible to change the intensity of light emitted in the X-axis direction and other directions. It becomes. Therefore, noise light emitted in directions other than the reference axis direction can be suppressed.
- the DBR layer can be configured to be provided at any position between the electrode 8 and the photonic crystal layer 4 and between the electrode 9 and the photonic crystal layer 4. Further, the DBR layer may be provided both between the electrode 8 and the photonic crystal layer 4 and between the electrode 9 and the photonic crystal layer 4.
- the photonic crystal layer 4 can be configured to be provided at any position between the active layer 3 and the electrode 8 and between the active layer 3 and the electrode 9.
- the structure includes the active layer 3, the photonic crystal layer 4, the electrode 8, and the electrode 9, the material system, film thickness, and layer structure can be changed as appropriate.
- the semiconductor light emitting devices 10, 20, and 30 sufficient light output can be obtained, and emission of noise light by the photonic crystal can be suppressed.
- SYMBOLS 1 Semiconductor substrate, 2 ... N clad layer, 3 ... Active layer, 4 ... Photonic crystal layer, 5 ... P clad layer, 6 ... Contact layer, 7 ... Antireflection film, 8 ... Electrode (1st electrode), 8a ... opening, 8a1 ... outer periphery, 8a2 ... center (center of opening), 8e1 ... end (third end), 8e2 ... end (fourth end), 9 ... electrode (first) 2 electrode), 9a ... contact portion, 9a1 ... outer periphery, 9a2 ... center portion, 9e1 ... end portion (first end portion), 9e2 ... end portion (second end portion), 10, 20, 30 ... semiconductor Light emitting element, 25, 35 ... DBR layer, F ... insulating layer.
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Abstract
Description
第1実施形態の半導体発光素子10は、いわゆる端面発光型フォトニック結晶レーザ素子である。XYZ直交座標系を設定し、X軸を素子厚み方向、Y軸及びZ軸をX軸に直交する方向とした場合、YZ平面に平行にレーザ光出射面が位置する。このX軸が基準軸に相当する。半導体発光素子10からはレーザ光LAがX軸方向に沿って出射される。
以下では、第2実施形態に係る半導体発光素子20について、図7~図9を参照しながら説明する。第2実施形態の半導体発光素子20が第1実施形態の半導体発光素子10と異なる点は、図7に示すように、フォトニック結晶層4とPクラッド層5との間にP型のDBR層25(DBR:Distributed Bragg Reflector)が設けられた点である。
以下では、第3実施形態に係る半導体発光素子30について図10及び図11を参照しながら説明する。第3実施形態に係る半導体発光素子30が第1実施形態の半導体発光素子10と異なる点は、図10に示すように、Nクラッド層2と活性層3との間にDBR層35が設けられた点である。
Claims (5)
- 第1の電極と、III-V族化合物半導体の半導体部と、第2の電極とを備え、
前記半導体部は、第1の電極と第2の電極との間に設けられ、
前記半導体部は、活性層とフォトニック結晶層とを有し、
前記フォトニック結晶層は、前記活性層と前記第1の電極との間、及び、前記活性層と前記第2の電極との間、の何れかの位置に設けられ、
前記活性層と前記第1の電極との間、及び、前記活性層と前記第2の電極との間、は互いに導電型が異なっており、
前記第1の電極は、開口部を有し、
前記第1の電極と前記活性層と前記フォトニック結晶層と前記第2の電極とは、基準軸に沿って積層されており、
前記基準軸は、当該基準軸の軸線方向から見た前記開口部の中央部を通り、
前記第2の電極は、前記基準軸の軸線方向から見て第1の方向に位置する第1の端部と、前記第1の方向の反対方向である第2の方向に位置する第2の端部とを有し、
前記開口部は、前記基準軸の軸線方向から見て前記第1の方向に位置する第3の端部と、前記第2の方向に位置する第4の端部とを有し、
前記第2の電極の前記第1の端部と、前記開口部の前記第3の端部とは、前記基準軸の軸線方向から見て略一致する半導体発光素子。 - 第1の電極と、III-V族化合物半導体の半導体部と、第2の電極とを備え、
前記半導体部は、第1の電極と第2の電極との間に設けられ、
前記半導体部は、活性層とフォトニック結晶層とを有し、
前記フォトニック結晶層は、前記活性層と前記第1の電極との間、及び、前記活性層と前記第2の電極との間、の何れかの位置に設けられ、
前記活性層と前記第1の電極との間、及び、前記活性層と前記第2の電極との間、は互いに導電型が異なっており、
前記第1の電極は、開口部を有し、
前記活性層と前記フォトニック結晶層とから出力され前記開口部に到達する光の強度の最小値は、前記活性層と前記フォトニック結晶層とから出力され前記開口部に到達する光の強度の最大値のA%(10≦A≦30を満たす)を下回らない半導体発光素子。 - 前記第1の電極が有する光の透過強度は、前記開口部の外周から離れるにつれて減少する請求項1又は2に記載の半導体発光素子。
- DBR層を有し、
前記DBR層は、前記第1の電極と前記フォトニック結晶層との間、及び、前記第2の電極と前記フォトニック結晶層との間、の何れかの位置に設けられる請求項1~3の何れか一項に記載の半導体発光素子。 - 第1のDBR層と第2のDBR層とを有し、
前記第1のDBR層は、前記第1の電極と前記フォトニック結晶層との間に設けられ、
前記第2のDBR層は、前記第2の電極と前記フォトニック結晶層との間に設けられる請求項1~3の何れか一項に記載の半導体発光素子。
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CN104106184B (zh) | 2017-07-14 |
DE112012005828T5 (de) | 2014-12-04 |
JP2013161965A (ja) | 2013-08-19 |
CN104106184A (zh) | 2014-10-15 |
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