JP2015149403A - 半導体レーザモジュール - Google Patents
半導体レーザモジュール Download PDFInfo
- Publication number
- JP2015149403A JP2015149403A JP2014021447A JP2014021447A JP2015149403A JP 2015149403 A JP2015149403 A JP 2015149403A JP 2014021447 A JP2014021447 A JP 2014021447A JP 2014021447 A JP2014021447 A JP 2014021447A JP 2015149403 A JP2015149403 A JP 2015149403A
- Authority
- JP
- Japan
- Prior art keywords
- emitting laser
- surface emitting
- layer
- laser element
- light intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/11—Comprising a photonic bandgap structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/185—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL]
- H01S5/187—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only horizontal cavities, e.g. horizontal cavity surface-emitting lasers [HCSEL] using Bragg reflection
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
【解決手段】主ビームL1と副ビームL2とを出射できる面発光レーザ素子1と、副ビームL2の光強度を検出できるモニタ用光検出素子101dとを備え、面発光レーザ素子1はPCSELであり、主ビームL1と副ビームL2とは、面発光レーザ素子1の上方に出射され、予め定められた角度だけ互いに傾いており、面発光レーザ素子の駆動電流の値に対する主ビームL1のピーク光強度及び副ビームL2のピーク光強度のそれぞれの変動が互いに相関している。よって、副ビームL2のピーク光強度を示すモニタ用光検出素子101dの出力を用いれば、主ビームL1のピーク光強度を推定できる。
【選択図】図1
Description
Claims (5)
- 面発光レーザ素子と、
モニタ用光検出素子と、
格納容器と、
を備え、
前記格納容器は、上壁と底壁とを備え、
前記格納容器は、前記面発光レーザ素子と前記モニタ用光検出素子とを格納し、
前記上壁は、開口を備え、前記底壁と対向し、
前記面発光レーザ素子は、主面と光出射領域と二次元フォトニック結晶層とを備え、前記底壁に設けられ、主ビームと副ビームとを前記光出射領域から出射し、前記主ビームが前記開口を通るように配置され、
前記光出射領域は、前記主面に設けられ、
前記主ビームの第1光軸は、前記主面の垂直方向に沿って延び、
前記副ビームの第2光軸は、前記垂直方向との間で予め定められた角度αを成し、
前記二次元フォトニック結晶層は、複数の孔部を備え、前記主面に沿って延び、
前記複数の孔部は、同一の形状を備え、前記主面に並行に複数の配列方向に沿って格子状に配列され、回折格子を構成し、
前記モニタ用光検出素子は、前記上壁に設けられ、前記第2光軸と前記上壁とが交わる箇所に配置され、
前記モニタ用光検出素子は、光入射面を備え、
前記光入射面は、前記第2光軸と交差し、
前記第1光軸と前記第2光軸とは、基準方向と同一の面にあり、
前記基準方向は、前記複数の配列方向のうち、隣接の格子間隔が最も短い配列方向であり、
前記面発光レーザ素子の駆動電流の増加に伴って、前記主ビームのピーク光強度と前記副ビームのピーク光強度とは共に単調増加し、前記主ビームのピーク光強度と前記副ビームのピーク光強度のうち、一方の値を決めると他方の値を一意的に決めることができる、
半導体レーザモジュール。 - 駆動装置と表示装置とを更に備え、
前記駆動装置は、前記面発光レーザ素子に接続され、前記駆動電流を前記面発光レーザ素子に出力し、
前記表示装置は、前記モニタ用光検出素子に接続され、前記モニタ用光検出素子から出力される光強度信号の内容を表示する、
請求項1に記載の半導体レーザモジュール。 - 駆動装置と制御装置とを更に備え、
前記駆動装置は、前記面発光レーザ素子に接続され、前記駆動電流を前記面発光レーザ素子に出力し、
前記制御装置は、前記モニタ用光検出素子と前記駆動装置とに接続され、前記モニタ用光検出素子から出力される光強度信号に基づいて前記駆動装置の制御信号を前記駆動装置に出力する、
請求項1に記載の半導体レーザモジュール。 - 前記回折格子が正方格子の場合、前記回折格子の格子間隔は、前記面発光レーザ素子の発振波長と略一致しており、前記面発光レーザ素子は、正方格子に由来する四つの光バンドのうち長波長側から2番目の光バンドで発振する、請求項1〜請求項3の何れか一項に記載の半導体レーザモジュール。
- 前記面発光レーザ素子は、活性層を備え、
前記孔部の底面の形状は、直角三角形であり、
前記孔部は、前記回折格子の母材の屈折率とは異なった屈折率を備え、
前記活性層の発光によって前記回折格子に生じる光の定在波の電磁界の節は、前記孔部の直角三角形の重心と、略同じ位置にあり、
前記電磁界における磁界の強度の極値は、前記孔部の周囲に存在する、
請求項1〜請求項4の何れか一項に記載の半導体レーザモジュール。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014021447A JP6202572B2 (ja) | 2014-02-06 | 2014-02-06 | 半導体レーザモジュール |
CN201480074880.5A CN105960744B (zh) | 2014-02-06 | 2014-11-10 | 半导体激光模块 |
PCT/JP2014/079716 WO2015118741A1 (ja) | 2014-02-06 | 2014-11-10 | 半導体レーザモジュール |
US15/115,713 US9722396B2 (en) | 2014-02-06 | 2014-11-10 | Semiconductor laser module |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014021447A JP6202572B2 (ja) | 2014-02-06 | 2014-02-06 | 半導体レーザモジュール |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015149403A true JP2015149403A (ja) | 2015-08-20 |
JP6202572B2 JP6202572B2 (ja) | 2017-09-27 |
Family
ID=53777560
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014021447A Active JP6202572B2 (ja) | 2014-02-06 | 2014-02-06 | 半導体レーザモジュール |
Country Status (4)
Country | Link |
---|---|
US (1) | US9722396B2 (ja) |
JP (1) | JP6202572B2 (ja) |
CN (1) | CN105960744B (ja) |
WO (1) | WO2015118741A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018043763A1 (en) * | 2016-09-02 | 2018-03-08 | Kyushu University, National University Corporation | Continuous-wave organic thin-film distributed feedback laser and electrically driven organic semiconductor laser diode |
US11183815B2 (en) | 2017-02-07 | 2021-11-23 | Koala Tech Inc. | Current-injection organic semiconductor laser diode, meihod for producing same and program |
EP4283804A1 (en) | 2022-05-25 | 2023-11-29 | Kyoto University | Method of manufacturing a photonic crystal surface-emitting laser element |
US12015248B2 (en) | 2016-09-02 | 2024-06-18 | Kyushu University, National University Corporation | Continuous-wave organic thin-film distributed feedback laser and electrically driven organic semiconductor laser diode |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9986217B2 (en) * | 2016-03-15 | 2018-05-29 | Sutherland Cook Ellwood, JR. | Magneto photonic encoder |
US10412183B2 (en) * | 2017-02-24 | 2019-09-10 | Spotify Ab | Methods and systems for personalizing content in accordance with divergences in a user's listening history |
US11283243B2 (en) * | 2017-02-27 | 2022-03-22 | Kyoto University | Surface-emitting laser and method for manufacturing surface-emitting laser |
US11646546B2 (en) | 2017-03-27 | 2023-05-09 | Hamamatsu Photonics K.K. | Semiconductor light emitting array with phase modulation regions for generating beam projection patterns |
US11637409B2 (en) | 2017-03-27 | 2023-04-25 | Hamamatsu Photonics K.K. | Semiconductor light-emitting module and control method therefor |
JP6959042B2 (ja) | 2017-06-15 | 2021-11-02 | 浜松ホトニクス株式会社 | 発光装置 |
WO2019111787A1 (ja) | 2017-12-08 | 2019-06-13 | 浜松ホトニクス株式会社 | 発光装置およびその製造方法 |
JP7125327B2 (ja) * | 2018-10-25 | 2022-08-24 | 浜松ホトニクス株式会社 | 発光素子及び発光装置 |
TWM588387U (zh) * | 2019-07-02 | 2019-12-21 | 智林企業股份有限公司 | 具有檢光結構之電激發光子晶體面射型雷射元件 |
CN113991424B (zh) * | 2021-10-22 | 2024-01-02 | 清华大学 | 一种基于倾斜表面光栅的大功率单侧出光半导体激光器 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012134259A (ja) * | 2010-12-20 | 2012-07-12 | Canon Inc | 2次元フォトニック結晶面発光レーザ |
WO2013118358A1 (ja) * | 2012-02-06 | 2013-08-15 | 国立大学法人京都大学 | 半導体発光素子 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW500268U (en) * | 2001-06-29 | 2002-08-21 | Hon Hai Prec Ind Co Ltd | Package for light source |
JP3561244B2 (ja) * | 2001-07-05 | 2004-09-02 | 独立行政法人 科学技術振興機構 | 二次元フォトニック結晶面発光レーザ |
US7085301B2 (en) * | 2002-07-12 | 2006-08-01 | The Board Of Trustees Of The University Of Illinois | Photonic crystal single transverse mode defect structure for vertical cavity surface emitting laser |
JP4484134B2 (ja) | 2003-03-25 | 2010-06-16 | 独立行政法人科学技術振興機構 | 2次元フォトニック結晶面発光レーザ |
JP2005157336A (ja) * | 2003-11-07 | 2005-06-16 | Canon Inc | 光素子の作製方法、3次元積層構造を有する光素子 |
JP5335818B2 (ja) * | 2010-09-14 | 2013-11-06 | キヤノン株式会社 | フォトニック結晶面発光レーザ、該レーザを用いたレーザアレイ、該レーザアレイを用いた画像形成装置 |
JP5794687B2 (ja) * | 2011-08-12 | 2015-10-14 | 国立大学法人京都大学 | フォトニック結晶面発光レーザ |
US8902946B2 (en) * | 2012-06-18 | 2014-12-02 | Massachusetts Institute Of Technology | Photonic crystal surface-emitting lasers enabled by an accidental Dirac point |
-
2014
- 2014-02-06 JP JP2014021447A patent/JP6202572B2/ja active Active
- 2014-11-10 WO PCT/JP2014/079716 patent/WO2015118741A1/ja active Application Filing
- 2014-11-10 CN CN201480074880.5A patent/CN105960744B/zh active Active
- 2014-11-10 US US15/115,713 patent/US9722396B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012134259A (ja) * | 2010-12-20 | 2012-07-12 | Canon Inc | 2次元フォトニック結晶面発光レーザ |
WO2013118358A1 (ja) * | 2012-02-06 | 2013-08-15 | 国立大学法人京都大学 | 半導体発光素子 |
Non-Patent Citations (1)
Title |
---|
YOSHITAKA KUROSAKA ET AL.: "Effects of non-lasing band in two-dimensional photonic-crystal lasers clarified using omnidirectiona", OPTICS EXPRESS, vol. Vol. 20, Issue 19, JPN6014054424, 7 September 2012 (2012-09-07), US, pages 21773 - 21783, ISSN: 0003619914 * |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018043763A1 (en) * | 2016-09-02 | 2018-03-08 | Kyushu University, National University Corporation | Continuous-wave organic thin-film distributed feedback laser and electrically driven organic semiconductor laser diode |
JP2019526937A (ja) * | 2016-09-02 | 2019-09-19 | 国立大学法人九州大学 | 連続波有機薄膜分布帰還型レーザ及び電気駆動有機半導体レーザダイオード |
US11539190B2 (en) | 2016-09-02 | 2022-12-27 | Kyushu University, National University Corporation | Continuous-wave organic thin-film distributed feedback laser and electrically driven organic semiconductor laser diode |
US11909177B2 (en) | 2016-09-02 | 2024-02-20 | Kyushu University, National University Corporation | Continuous-wave organic thin-film distributed feedback laser and electrically driven organic semiconductor laser diode |
US12015248B2 (en) | 2016-09-02 | 2024-06-18 | Kyushu University, National University Corporation | Continuous-wave organic thin-film distributed feedback laser and electrically driven organic semiconductor laser diode |
US11183815B2 (en) | 2017-02-07 | 2021-11-23 | Koala Tech Inc. | Current-injection organic semiconductor laser diode, meihod for producing same and program |
US11626710B2 (en) | 2017-02-07 | 2023-04-11 | Kyushu University, National University Corporation | Current-injection organic semiconductor laser diode, method for producing same and program |
US11955776B2 (en) | 2017-02-07 | 2024-04-09 | Kyushu University, National University Corporation | Current-injection organic semiconductor laser diode, method for producing same and program |
EP4283804A1 (en) | 2022-05-25 | 2023-11-29 | Kyoto University | Method of manufacturing a photonic crystal surface-emitting laser element |
Also Published As
Publication number | Publication date |
---|---|
JP6202572B2 (ja) | 2017-09-27 |
US9722396B2 (en) | 2017-08-01 |
CN105960744B (zh) | 2018-11-23 |
US20170012407A1 (en) | 2017-01-12 |
WO2015118741A1 (ja) | 2015-08-13 |
CN105960744A (zh) | 2016-09-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6202572B2 (ja) | 半導体レーザモジュール | |
US9583914B2 (en) | Semiconductor laser element | |
US9748737B2 (en) | Laser element and laser device | |
US8419956B2 (en) | Surface emitting photonic device | |
US10734786B2 (en) | Semiconductor light emitting element and light emitting device including same | |
US11626709B2 (en) | Light-emitting device and production method for same | |
JP6276750B2 (ja) | レーザ装置 | |
EP2789060B1 (en) | Edge-emitting etched-facet lasers | |
JPWO2016148075A1 (ja) | 半導体発光素子 | |
US11923655B2 (en) | Light emission device | |
JP2018041832A (ja) | 半導体発光素子及び発光装置 | |
CN112467516A (zh) | 一种面发射oam光束的分布反馈激光器及其调制方法 | |
JP5904571B2 (ja) | 端面発光型半導体レーザ素子 | |
WO2019239960A1 (ja) | 発光装置 | |
JP7109179B2 (ja) | 発光装置 | |
US11309687B2 (en) | Light-emitting device and production method for same | |
Itoh et al. | High-power with single-lobe beam of 1.3-μm InP-based double-lattice photonic-crystal surface-emitting lasers | |
US20230369825A1 (en) | Semiconductor laser element | |
Aoki et al. | High-power, stable single-mode CW operation of 1550 nm wavelength InP-based photonic-crystal surface-emitting lasers | |
Shterengas et al. | CW room temperature operation of the GaSb-based photonic crystal surface emitting diode lasers | |
JP2023028125A (ja) | 位相変調層の設計方法、及び、発光素子の製造方法 | |
CN117178447A (zh) | 面发光激光元件 | |
JP2019106396A (ja) | 位相変調層設計方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20161017 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20161017 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20161216 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170815 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170823 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6202572 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |