WO2013084672A1 - 高純度カルシウムの製造方法 - Google Patents
高純度カルシウムの製造方法 Download PDFInfo
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- WO2013084672A1 WO2013084672A1 PCT/JP2012/079320 JP2012079320W WO2013084672A1 WO 2013084672 A1 WO2013084672 A1 WO 2013084672A1 JP 2012079320 W JP2012079320 W JP 2012079320W WO 2013084672 A1 WO2013084672 A1 WO 2013084672A1
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B26/00—Obtaining alkali, alkaline earth metals or magnesium
- C22B26/20—Obtaining alkaline earth metals or magnesium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/04—Making metallic powder or suspensions thereof using physical processes starting from solid material, e.g. by crushing, grinding or milling
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
- C22B9/02—Refining by liquating, filtering, centrifuging, distilling, or supersonic wave action including acoustic waves
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
- C22B9/04—Refining by applying a vacuum
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
- C22B9/14—Refining in the solid state
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C24/00—Alloys based on an alkali or an alkaline earth metal
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/20—Recycling
Definitions
- the present invention relates to a method for producing high purity calcium (Ca) by sublimation purification.
- Calcium (Ca) is one of alkaline earth metals and has an atomic number of 20 and an atomic weight of 40.08. It is widely distributed as silicate, carbonate, sulfate, fluoride and phosphate. The purity can be increased to 94 to 98% by molten salt electrolysis containing calcium chloride as a main component, and further purified to 99.9% by vacuum distillation. Refined calcium is a silver-white soft metal having a cubic close-packed structure at room temperature, a hexagonal close-packed structure at 250 ° C or higher, and a body-centered cubic structure at 450 ° C or higher.
- lanthanum is a metal that has been attracting attention as a result of research and development as an electronic material such as a metal gate material and a high dielectric constant material (High-k). Research and development have also been conducted on rare earths other than lanthanum from the same viewpoint. In the following description, a problem in the case of using lanthanum will be described, but it can be said that other rare earth elements have the same tendency. Since lanthanum metal has a problem that it is easily oxidized during refining, it is a material that is difficult to achieve high purity, and no high-purity product exists.
- HfO 2 , ZrO 2 , Al 2 O 3 , La 2 O 3 having a high dielectric constant, high thermal stability, and a high energy barrier against holes and electrons in silicon are proposed.
- La 2 O 3 is highly evaluated, electrical characteristics have been investigated, and research reports as a gate insulating film in next-generation MOSFETs have been made (see Non-Patent Document 1).
- the subject of research is the La 2 O 3 film, and the characteristics and behavior of the La element are not particularly mentioned.
- rare earth elements such as lanthanum are attracting attention as high-value materials, but on the other hand, they are difficult to purify. However, it is preferable to reduce impurities such as carbon (graphite), Al, Fe, and Cu in order to make use of characteristics of rare earth elements such as lanthanum. Further, since alkali metals and alkaline earth metals, transition metal elements, refractory metal elements, and radioactive elements also affect the characteristics of semiconductors, reduction is desired.
- a raw material of lanthanum fluoride having a purity of 4N or more excluding gas components is reduced with high-purity calcium to produce lanthanum having a purity of 4N or more.
- high-purity calcium By removing volatile substances by melting with an electron beam, it is possible to produce high-purity lanthanum having a purity of 4N5 or more, excluding gas components.
- the same process is adopted when purifying rare earth elements other than lanthanum.
- Patent Document 2 after pre-distilling at 630 to 700 ° C. (3 to 16 hours) to lower Mg, main distillation at 900 to 920 ° C. (12 hours) is performed, and Mg: Technology of 60ppm (0.006%), Al: 10ppm (0.001%), Mn: 80ppm (0.008%), Fe: 10ppm (0.001%), Zn ⁇ 10ppm (0.001%) Is disclosed.
- this level of calcium purity is not sufficient.
- the use of water-cooled Cu is indispensable for the handling of calcium in the liquid state, so there is a high possibility that a large amount of Cu impurities are contained.
- Patent Document 3 listed below is a method of charging a mixture of calcium oxide and aluminum into a retort and producing calcium metal by distillation under reduced pressure, and a packed bed of calcium oxide particles between the mixture and a condenser of calcium vapor.
- this is a specialized technique that reduces only aluminum in calcium as a reducing agent (Ca) for producing samarium, which is a smelting agent for special steel.
- Ca reducing agent
- Patent Document 4 discloses a technique of collecting Mg by adding a temperature distribution in the retort by Al reduction of CaO to highly purify Ca.
- the retort structure is characterized in that calcium having a purity of 99.9% or more can be obtained by one reduction, and the analytical value is only Mg. It is not a comprehensive purification technology. As described above, it can be said that the prior art does not disclose an effective technique for producing calcium capable of achieving comprehensive high purity.
- the present invention not only can be used for the production of high-purity lanthanum, but also stabilizes highly purified calcium for use as a reducing agent for other rare earths, metal desulfurization or deoxidation agents, getters for high vacuum pumps, etc. It is an object to provide a technology that can be provided.
- a calcium raw material having a purity of 4N or less excluding gas components is charged into a crucible of a sublimation container and heated to 750 ° C. to 800 ° C. to be sublimated, and this is sublimated.
- the calcium sublimated and purified in the first time was recovered, and then this calcium was charged again into the crucible of the sublimation container, and 750 ° Production of high-purity calcium, characterized in that the second sublimation purification is carried out by heating to C to 800 ° C, and the calcium of purity 4N5 or more is recovered by adhering (vapor deposition) to the side wall in the sublimation vessel.
- the present invention provides 2) the 1 sublimation rate of calcium, characterized in that the 0.25g / cm 2 /h ⁇ 0.75g/cm 2 / h ) process for producing high purity calcium description,
- the degree of vacuum in the sublimation container during the sublimation purification is a high vacuum of 1 ⁇ 10 ⁇ 4 Pa or more.
- the present invention also provides 5) the method for producing high-purity calcium according to any one of 1) to 4) above, wherein each transition metal element contained in the recovered high-purity calcium is less than 5 ppm. 6) The method for producing high-purity calcium according to any one of 1) to 4) above, wherein the content of each transition metal element contained in the recovered high-purity calcium is less than 1 ppm. provide.
- the present invention also relates to 7) high-purity calcium characterized in that the purity of calcium is 4N5 or higher, 8) the above-mentioned 7) characterized in that each transition metal element contained in high-purity calcium is less than 5 ppm.
- High-purity calcium more than cocoon is a novel substance, and the present invention includes this.
- Such high-purity calcium can be effectively used when a rare earth element such as high-purity lanthanum metal is purified by calcium reduction.
- a rare earth element reducing agent, metal desulfurizing agent or deoxidizing agent, and a getter for a high vacuum pump can be used as a rare earth element reducing agent, metal desulfurizing agent or deoxidizing agent, and a getter for a high vacuum pump.
- the present invention recovers calcium having a purity of 4N5 or more by two sublimation purifications, and has an excellent effect of being able to stably provide highly purified calcium.
- a calcium raw material having a purity of 4N or less excluding gas components is charged into a crucible of a sublimation container as shown in FIG.
- this raw material is heated to 750 ° C. to 800 ° C. for sublimation, and the sublimated calcium is deposited (deposited) on the side wall in the sublimation container to perform the first sublimation purification.
- the calcium purified by sublimation in the first time is cooled and recovered.
- the recovered calcium is charged again into the crucible of the sublimation container.
- the sublimation container may be prepared separately, or the same sublimation container can be used.
- the second sublimation purification is performed by heating again to 750 ° C. to 800 ° C., and the same is attached (deposited) on the side wall in the sublimation vessel. Thereby, calcium having a purity of 4N5 or more can be recovered.
- the sublimation temperature of 750 ° C. to 800 ° C. is slightly lower than the melting point of 839 ° C., and the temperature is set by adjusting the sublimation rate of calcium. If the temperature is lower than 750 ° C., the efficiency of sublimation purification deteriorates, and if the temperature exceeds 800 ° C., impurities are mixed in, so the temperature is adjusted to the above range. As a result, it is possible to the sublimation rate of the calcium and 0.25g / cm 2 /h ⁇ 0.75g/cm 2 / h . This is a reasonable rate for the sublimation purification of calcium.
- the sublimation container usually uses heat-resistant stainless steel. Then, the sublimated and purified calcium is deposited (deposited) on the sublimation container and collected.
- the degree of vacuum in the sublimation container at the time of sublimation purification is set to a high vacuum of 1 ⁇ 10 ⁇ 4 Pa or more to promote sublimation and remove impurities in calcium that are easily vaporized.
- a yield of 80% or more from the calcium raw material can be achieved.
- each transition metal element contained in the recovered high-purity calcium can be made less than 5 ppm, and further less than 1 ppm.
- High purity calcium having a calcium purity of 4N5 or more can be obtained by the above process. Moreover, each transition metal element contained in this high purity calcium can be less than 5 ppm, and also less than 1 ppm.
- Example 1 3.5 kg of a 99.9% (3N) purity calcium raw material containing the impurities shown in Table 1 was charged into the crucible at the bottom of the vertical sublimation container shown in FIG. Table 1 also shows the variation of raw materials.
- the degree of vacuum in the sublimation container was set to 1 ⁇ 10 ⁇ 4 Pa level. In this vacuum treatment, roughing with a rotary pump and main drawing with a cryopump were performed. The heating of the crucible was adjusted within the following range.
- the heating temperature was 770 ° C. in a constant state, and was normally controlled at 750 ° C. to 800 ° C. Furthermore, the sublimation rate is in constant state 0.64g / cm 2 / h, controlled by the normal 0.25g / cm 2 /h ⁇ 0.75g/cm 2 / h . Below this, the variation in sublimation speed is large and the efficiency is poor, and when this is exceeded, the purity tends to deteriorate.
- the calcium raw material was 3.5 kg, but 3.0 kg of adhered (deposited) material was obtained on the side wall in the sublimation container by the first sublimation.
- the analysis values are also shown in Table 1.
- the first sublimation residue was 0.25 kg, and the loss was 0.25 kg.
- the analysis value of the first sublimation residue is also shown in Table 1. According to this, Mg ⁇ 0.05 wtppm, Fe: 64 wtppm, Cu 380 wtppm, and a large amount of copper residue was present.
- the first sublimation has a tendency that the raw material shape is not stable and the sublimation speed is not stable.
- Example 2 The same calcium raw material as in Example 1 was used, and the deposited material was deposited on the side wall in the sublimation container by one sublimation at a first heating temperature of 850 ° C. and a sublimation rate (evaporation rate) of 4.0 g / cm 2 / h. Obtained. Other conditions are the same as those in the first embodiment. As a result, as shown in the analysis result on the left side of Table 3, as a whole, the amount of impurities is larger than that of the above example, and particularly, the amounts of impurities of Si, Ti, Mn, Fe, Cu, As, Sr, and Ba are large. Therefore, the object of the present invention could not be achieved.
- Example 3 Using the same calcium raw material as in Example 1, the first heating temperature was 850 ° C., the sublimation rate (evaporation rate) was 4.0 g / cm 2 / h, the second heating temperature was 850 ° C., the sublimation rate ( Evaporation rate) A deposit was obtained on the side wall in the sublimation vessel by sublimation twice at 3.7 g / cm 2 / h. Other conditions are the same as those in the first embodiment. As a result, as shown in the analysis results on the right side of Table 3, as a whole, the amount of impurities is larger than that of the above-described example, and in particular, the amounts of impurities of Mg, Al, Si, Fe, Cu, and Pb are large. The purpose of could not be achieved.
- the present invention recovers calcium having a purity of 4N5 or more by two sublimation purifications, and has an excellent effect of being able to stably provide highly purified calcium. As a result, it can be used not only for the production of high-purity lanthanum by calcium reduction, but can also be effectively used as a reducing agent for other rare earths, a metal desulfurizing or deoxidizing agent, and a getter for a high vacuum pump.
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Abstract
Description
塩化カルシウムを主成分とする溶融塩電解で純度94~98%まで上げ、さらに真空蒸留により、純度99.9%まで精製することができる。
精製したカルシウムは、銀白色の柔らかい金属で、常温で立方最密構造、250°C以上で六方最密構造、450°C以上で体心立方構造をとる。融点839°C、沸点1480°C、密度1.55g/cm3(20°C)であり、常温で酸素、ハロゲンと直接結合し、高温では水素、炭素、窒素とも反応する。用途としては、還元剤、金属の脱酸剤、高真空用ゲッターとして使用される(理化学辞典参照)。
ランタン金属は精製時に酸化し易いという問題があるため、高純度化が難しい材料であり、高純度製品は存在していなかった。また、ランタン金属を空気中に放置した場合には短時間で酸化し黒色に変色するので、取り扱いが容易でないという問題がある。
最近、次世代のMOSFETにおけるゲート絶縁膜として薄膜化が要求されているが、これまでゲート絶縁膜として使用されてきたSiO2では、トンネル効果によるリーク電流が増加し、正常動作が難しくなってきた。
しかし、この場合に、還元工程で使用するカルシウムを高純度化して、製造工程中の不純物を低減する必要がある。カルシウム中に不純物が多いと、結果として、希土類元素中の不純物が増加するという問題を生ずるからである。
しかし、この程度のカルシウム純度では、充分とは言えない。また、Cuの不純物量の規定(記載)がないが、液体状態のカルシウムの取り扱いには水冷Cuの使用は欠かせないので、Cuの不純物が多量に含まれている可能性が大きい。
上記の通り、従来技術では、総合的な高純度化を達成できるカルシウムを製造するための有効な技術の開示がないと言える。
昇華精製する際の昇華容器内の真空度は、1×10-4Pa以上の高真空とし、昇華を促進させ、かつ気化し易いカルシウム内の不純物を除去する。
本発明の工程により、カルシウム原料からの収率80%以上を達成することができる。また、回収した高純度カルシウムに含有する各遷移金属元素を5ppm未満とすること、さらには、1ppm未満とすることができる。
表1に示す不純物を含有する純度99.9%(3N)のカルシウム原料3.5kgを、図1に示す縦型の昇華容器の底部のルツボに装入した。なお、表1には、原料のばらつきも示す。昇華容器内の真空度は1×10-4Pa台とした。この真空処理はロータリーポンプによる粗引き及びクライオポンプによる本引きを行った。ルツボの加熱は下記の範囲で調節した。
第1回目の昇華残渣は0.25kgであり、ロスは0.25kgであった。第1回目の昇華残渣の分析値も、表1に示す。これによれば、Mg<0.05wtppm、Fe:64wtppm、Cu380wtppmであり、銅の残渣が多量にあった。なお、第1回目の昇華は、原料形状が安定せず、昇華速度も安定しないという傾向があった。
第2回目のカルシウムの不純物量を、同様に表1に示す。この表1に示す不純物量から明らかなように、高純度カルシウムを得ることができた。
表1に示すように、原料でのカルシウム中に存在するCu量のばらつきが大きいので、2回の昇華精製が必要であることが分かる。なお、カルシウムの分析値で、SrとBaは、比較的高い値になっているが、これらはカルシウムと性質が似ているために、カルシウム還元剤等として使用する場合には、特に問題となるものではない。
なお、第1回目と第2回目の昇華条件は同じとした。
実施例1と同一のカルシウム原料を用い、温度750°C、昇華速度0.50g/cm2/hで、1回のみの昇華によって昇華容器内の側壁に蒸着物を得た。他の条件は、実施例1と同一である。この結果、表2の分析結果に示すように、全体的に、前記実施例に比べて不純物量は多く、特にFe、Cuの不純物量が多く、本願発明の目的を達成することができなかった。
実施例1と同一のカルシウム原料を用い、第1回目の加熱温度850°C、昇華速度(蒸発速度)4.0g/cm2/hの1回の昇華によって昇華容器内の側壁に蒸着物を得た。他の条件は、実施例1と同一である。この結果、表3の左側の分析結果に示すように、全体的に、前記実施例に比べて不純物量は多く、特にSi、Ti、Mn、Fe、Cu、As、Sr、Baの不純物量が多くなり、本願発明の目的を達成することができなかった。
実施例1と同一のカルシウム原料を用い、第1回目の加熱温度850°C、昇華速度(蒸発速度)4.0g/cm2/hで、第2回目の加熱温度850°C、昇華速度(蒸発速度)3.7g/cm2/hで2回の昇華によって昇華容器内の側壁に蒸着物を得た。他の条件は、実施例1と同一である。この結果、表3の右側の分析結果に示すように、全体的に、前記実施例に比べて不純物量は多く、特にMg、Al、Si、Fe、Cu、Pbの不純物量が多く、本願発明の目的を達成することができなかった。
Claims (9)
- ガス成分を除く純度が4N以下であるカルシウムの原料を、昇華容器のルツボに装入し、これを750°C~800°Cに加熱して昇華させ、これを昇華容器内の側壁に付着(蒸着)させて第1回目の昇華精製を行い、次にこの第1回目で昇華精製したカルシウムを回収した後、このカルシウムを再度昇華容器のルツボに装入し、750°C~800°Cに加熱して第2回目の昇華精製を行い、同様に昇華容器内の側壁に付着(蒸着)させて純度4N5以上のカルシウムを回収することを特徴とする高純度カルシウムの製造方法。
- カルシウムの昇華速度を0.25g/cm2/h~0.75g/cm2/hとすることを特徴とする請求項1記載の高純度カルシウムの製造方法。
- 昇華精製する際の昇華容器内の真空度を1×10-4Pa以上の高真空とすることを特徴とする請求項1~2のいずれか一項に記載の高純度カルシウムの製造方法。
- カルシウム原料からの収率を80%以上とすることを特徴とする請求項1~3のいずれか一項に記載の高純度カルシウムの製造方法。
- 回収した高純度カルシウムに含有する各遷移金属元素を5ppm未満とすることを特徴とする請求項1~4のいずれか一項に記載の高純度カルシウムの製造方法。
- 回収した高純度カルシウムに含有する各遷移金属元素の含有量を1ppm未満とすることを特徴とする請求項1~4のいずれか一項に記載の高純度カルシウムの製造方法。
- カルシウムの純度が4N5以上であることを特徴とする高純度カルシウム。
- 高純度カルシウムに含有する各遷移金属元素が5ppm未満であることを特徴とする請求項7記載の高純度カルシウムの製造方法。
- 高純度カルシウムに含有する各遷移金属元素の含有量が1ppm未満であることを特徴とする請求項7記載の高純度カルシウムの製造方法。
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CN201280051921.XA CN103958706A (zh) | 2011-12-07 | 2012-11-13 | 高纯度钙的制造方法 |
EP12855635.4A EP2740810B1 (en) | 2011-12-07 | 2012-11-13 | Method for producing calcium of high purity |
AU2012346941A AU2012346941B2 (en) | 2011-12-07 | 2012-11-13 | Method for producing calcium of high purity |
KR1020147004576A KR101512949B1 (ko) | 2011-12-07 | 2012-11-13 | 고순도 칼슘 및 이의 제조 방법 |
US14/353,780 US9499877B2 (en) | 2011-12-07 | 2012-11-13 | Method for producing high-purity calcium |
US15/293,381 US10138533B2 (en) | 2011-12-07 | 2016-10-14 | Method for producing high-purity calcium |
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JP2011267536A JP5290387B2 (ja) | 2011-12-07 | 2011-12-07 | 高純度カルシウムの製造方法 |
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US14/353,780 A-371-Of-International US9499877B2 (en) | 2011-12-07 | 2012-11-13 | Method for producing high-purity calcium |
US15/293,381 Division US10138533B2 (en) | 2011-12-07 | 2016-10-14 | Method for producing high-purity calcium |
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KR101516099B1 (ko) | 2010-11-19 | 2015-05-04 | 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 | 고순도 란탄의 제조 방법, 고순도 란탄, 고순도 란탄으로 이루어지는 스퍼터링 타깃 및 고순도 란탄을 주성분으로 하는 메탈 게이트막 |
RU2587008C2 (ru) * | 2014-10-02 | 2016-06-10 | Открытое акционерное общество "Ведущий научно-исследовательский институт химической технологии" | Способ получения кальция высокой чистоты по газовым примесям |
JP6806517B2 (ja) * | 2016-10-07 | 2021-01-06 | 太平洋セメント株式会社 | アルカリ土類金属の製造装置及び製造方法 |
CN109030542B (zh) * | 2017-06-09 | 2021-04-09 | 湖北尚赛光电材料有限公司 | 一种有机材料热稳定性测试设备 |
CN110538478A (zh) * | 2018-10-29 | 2019-12-06 | 天津包钢稀土研究院有限责任公司 | 一种高品质无水稀土卤化物提纯装置 |
KR102652842B1 (ko) * | 2023-10-18 | 2024-03-29 | (주)엠케이 솔라 | 폐 산화 이터븀의 재생방법 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58141349A (ja) | 1982-02-15 | 1983-08-22 | Showa Denko Kk | 高純度カルシウムの製造方法 |
JPS6311628A (ja) | 1986-06-30 | 1988-01-19 | Mitsubishi Chem Ind Ltd | 希土類金属の製造法 |
JPS6347780A (ja) | 1986-08-18 | 1988-02-29 | Konica Corp | 画像形成方法 |
JPH0776739A (ja) | 1993-09-07 | 1995-03-20 | Kawatetsu Mining Co Ltd | 金属カルシウムの製造方法 |
JPH09256083A (ja) * | 1996-03-15 | 1997-09-30 | Dowa Mining Co Ltd | 高純度銀の製造方法及び製造装置 |
US20080257109A1 (en) * | 2005-09-28 | 2008-10-23 | Xiaolong Du | High Vacuum In-Situ Refining Method for High-Purity Materials and an Apparatus Thereof |
JP2009287045A (ja) * | 2008-05-27 | 2009-12-10 | Toho Titanium Co Ltd | 金属カルシウムの製造方法および製造装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5757849A (en) | 1980-09-19 | 1982-04-07 | Showa Denko Kk | Manufacture of metallic calcium |
JPH0794886B2 (ja) * | 1988-06-10 | 1995-10-11 | 松下電器産業株式会社 | 液体搬送装置 |
US5582630A (en) | 1995-02-21 | 1996-12-10 | Sony Corporation | Ultra high purity magnesium vacuum distillation purification method |
CN1061694C (zh) | 1998-05-12 | 2001-02-07 | 周广文 | 高纯金属镁的提纯工艺方法 |
RU2205241C1 (ru) | 2002-03-15 | 2003-05-27 | Московский государственный институт стали и сплавов (технологический университет) | Способ получения кальция и устройство для его осуществления (варианты) |
CN1317405C (zh) * | 2005-09-28 | 2007-05-23 | 中国科学院物理研究所 | 一种高纯材料的高真空原位两步精炼方法 |
CN101225477A (zh) | 2007-01-16 | 2008-07-23 | 维恩克材料技术(北京)有限公司 | 一种制备高纯镁的方法及装置 |
WO2009008121A1 (ja) * | 2007-07-12 | 2009-01-15 | Toho Titanium Co., Ltd. | 高純度金属カルシウムの製造方法、同高純度金属カルシウムを用いた金属チタンの製造方法および同高純度金属カルシウムの製造装置 |
CN101386919B (zh) * | 2008-10-24 | 2011-12-28 | 贵阳铝镁设计研究院有限公司 | 一种高纯镁的制备方法及装置 |
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58141349A (ja) | 1982-02-15 | 1983-08-22 | Showa Denko Kk | 高純度カルシウムの製造方法 |
JPS6311628A (ja) | 1986-06-30 | 1988-01-19 | Mitsubishi Chem Ind Ltd | 希土類金属の製造法 |
JPS6347780A (ja) | 1986-08-18 | 1988-02-29 | Konica Corp | 画像形成方法 |
JPH0776739A (ja) | 1993-09-07 | 1995-03-20 | Kawatetsu Mining Co Ltd | 金属カルシウムの製造方法 |
JPH09256083A (ja) * | 1996-03-15 | 1997-09-30 | Dowa Mining Co Ltd | 高純度銀の製造方法及び製造装置 |
US20080257109A1 (en) * | 2005-09-28 | 2008-10-23 | Xiaolong Du | High Vacuum In-Situ Refining Method for High-Purity Materials and an Apparatus Thereof |
JP2009287045A (ja) * | 2008-05-27 | 2009-12-10 | Toho Titanium Co Ltd | 金属カルシウムの製造方法および製造装置 |
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TW201323620A (zh) | 2013-06-16 |
AU2012346941A1 (en) | 2014-03-13 |
US10138533B2 (en) | 2018-11-27 |
KR20140037277A (ko) | 2014-03-26 |
JP5290387B2 (ja) | 2013-09-18 |
US20170029921A1 (en) | 2017-02-02 |
TWI542705B (zh) | 2016-07-21 |
US20140301890A1 (en) | 2014-10-09 |
US9499877B2 (en) | 2016-11-22 |
CN103958706A (zh) | 2014-07-30 |
AU2012346941B2 (en) | 2015-07-16 |
EP2740810A1 (en) | 2014-06-11 |
EP2740810B1 (en) | 2018-10-10 |
KR101512949B1 (ko) | 2015-04-16 |
EP2740810A4 (en) | 2015-06-17 |
JP2013119646A (ja) | 2013-06-17 |
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