WO2012167715A1 - 一种深沟槽超级pn结的形成方法 - Google Patents
一种深沟槽超级pn结的形成方法 Download PDFInfo
- Publication number
- WO2012167715A1 WO2012167715A1 PCT/CN2012/076353 CN2012076353W WO2012167715A1 WO 2012167715 A1 WO2012167715 A1 WO 2012167715A1 CN 2012076353 W CN2012076353 W CN 2012076353W WO 2012167715 A1 WO2012167715 A1 WO 2012167715A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- forming
- medium
- deep trench
- dielectric layer
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 57
- 239000000463 material Substances 0.000 claims abstract description 42
- 238000005530 etching Methods 0.000 claims abstract description 20
- 238000000151 deposition Methods 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 239000012530 fluid Substances 0.000 claims abstract description 6
- 230000008021 deposition Effects 0.000 claims abstract description 4
- 239000000546 pharmaceutical excipient Substances 0.000 claims description 6
- 238000001020 plasma etching Methods 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 abstract description 8
- 239000010703 silicon Substances 0.000 abstract description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 7
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 57
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66083—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by variation of the electric current supplied or the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched, e.g. two-terminal devices
- H01L29/6609—Diodes
- H01L29/66136—PN junction diodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
Definitions
- the present invention relates to semiconductor fabrication techniques, and more particularly to a fabrication technique for a deep trench super PN junction. Background technique
- the manufacturing process of the conventional super PN junction is mainly realized by deep trench etching, epitaxial filling, and silicon CMP planarization.
- the method for forming a super PN junction in the conventional technology includes the following steps: Step 1: depositing a single thick epitaxial layer (N type) on the N+ substrate silicon wafer;
- Step 2 forming a deep trench in the epitaxial layer, specifically, a long thermal oxide layer, then depositing a silicon nitride layer, depositing a plasma enhanced oxide layer, etching the above three layers up to the silicon substrate, and then going Glue, and etching the deep trench with the three films as a hard mask, and then wet removing the remaining plasma enhanced oxide layer on the surface of the silicon nitride;
- Step 4 Grinding to the silicon surface by CMP to achieve planarization.
- the present invention has been made in view of the above problems, and aims to provide a super PN junction forming method which is compatible with a conventional process and which is simple in process and high in efficiency.
- the method for forming a deep trench super PN junction of the present invention comprising: a deposition step of depositing an epitaxial layer on a substrate;
- a third medium with a second filling step comprising forming the surface layer of the second dielectric layer and the epitaxial material to form a surface filling layer of a prescribed height
- the first dielectric layer, the second barrier layer, and the surface fill layer are removed to achieve a planarized removal step of the epitaxial material.
- a plasma etching method may be employed in the etching step.
- the third medium is filled with an excipient device, the third medium being a fluid medium.
- the filling fluid medium material and the plasma etch back are used, so that the process complicated by the CMP flattening, the control difficulty, and the high cost can be effectively solved. technical problem.
- the plasma etching method may be performed by adjusting a selection ratio of etching so that an etching rate to the epitaxial material and the third medium is 1:1.
- the surface-filled layer has a height at least higher than a highest point of the epitaxial material.
- the third medium of fluidity is filled with the entire surface of the second dielectric layer and the epitaxial material by rotation, coating using the excipient device.
- each layer is removed by a wet method.
- the lowest point of the epitaxial material exceeds an interface between the first dielectric shield and the epitaxial material.
- the first medium is an oxide
- the second medium is a nitride
- the epitaxial material is Si
- the third medium is SOG.
- the thickness of the first medium is formed to be greater than 50 ⁇ ⁇ , and the thickness of the second medium is formed to be greater than 300 ⁇ .
- DRAWINGS Figure i is an overall flow chart showing the formation process of a super PN junction in a real mode of the present invention.
- 2 is an exploded perspective view showing a super PN junction forming process according to an embodiment of the present invention.
- 3 is an exploded perspective view showing a super PN junction forming process according to an embodiment of the present invention.
- 4 is an exploded perspective view showing a super PN junction forming process according to an embodiment of the present invention.
- Fig. 5 is an exploded perspective view showing a super PN junction forming process according to an embodiment of the present invention.
- the super PN junction forming method of the present invention mainly comprises: Step 1: a deposition step of depositing an epitaxial layer on a substrate;
- Step 2 forming a dielectric formation step of the first dielectric layer and the second dielectric layer on the epitaxial layer;
- Step 3 forming a deep trench formation step in the epitaxial layer
- Step 4 filling the deep trench with an epitaxial material to fill the entire deep trench and exceeding a first filling step of the second dielectric layer;
- Step 5 filling a third medium with a second filling step comprising forming the second interlayer layer and the entire surface of the epitaxial material to form a surface filling layer of a prescribed height;
- Step 6 etching the surface-filled layer to an etching step at an interface between the first dielectric layer and the epitaxial material
- Step 7 removing the first dielectric layer, the second dielectric layer, and the surface filling layer to achieve a planarization removal step of the epitaxial material.
- FIGS. 2 to 5 are exploded perspective views showing a super PN junction forming process according to an embodiment of the present invention.
- a method for forming a deep trench super PN junction Mainly have the following steps:
- Step 1 depositing an epitaxial layer 100 on the substrate
- Step 2 forming a first dielectric layer 200 and a second dielectric layer 300 sequentially on the epitaxial layer 100;
- Step 3 forming a deep trench 400 in the epitaxial layer
- Step 4 As shown in FIG. 2, the deep trench 400 is filled with an epitaxial material 500 to fill the entire deep trench 400 and exceed the second dielectric layer 200.
- Step 5 As shown in FIG. 3, the third medium 600 is covered and filled with the entire surface including the second dielectric layer 200 and the epitaxial material 500 to form a surface filling layer of a predetermined height.
- Step 6 as shown in FIG. 4, the surface-filled layer is etched back to the first dielectric layer
- Step 7 removing the surface dielectric layer, that is, the first dielectric layer 100, the second dielectric layer 200, and the surface filling layer, to achieve planarization of the epitaxial material.
- the method of filling the third dielectric material and etching back can effectively solve the technical problem of complicated process, difficult control, and high cost caused by planarization by CMP.
- a fluid material is preferably used.
- SOG can usually be used.
- the flowing third medium 600 such as SOG is filled with the entire surface including the second dielectric layer 200 and the epitaxial material 500 in Fig. 2 to form a surface filling layer of a prescribed height.
- the excipient device fills the entire surface by flowing the third medium 600 by spinning and coating.
- the so-called “prescribed height” herein means at least higher than the highest point of the epitaxial material 500.
- the etching selectivity ratio may be adjusted, for example, by engraving the epitaxial material 500 and the third medium 600.
- the etch selectivity ratio is 1:1, whereby the epitaxial material 500 and the third dielectric 600 can be etched at the same rate, and both can be etched flat to planarize the epitaxial material.
- the epitaxial material 500 Si is commonly used.
- a wet method may be employed as a method of removing the first dielectric layer 100, the second dielectric layer 200, and the surface-filled layer.
- the first dielectric layer 100 may preferably be an oxide
- the second dielectric layer 200 is preferably a nitride.
- the thickness of the first medium is formed to be greater than 500 A
- the thickness of the second medium is formed to be greater than 300 ⁇ .
- the epitaxial material (Si) is planarized by using a method compatible with the existing process, the process is simple, high in efficiency, and no special equipment (ie, CMP equipment) is required, thereby greatly reducing The process cost and the problem of unstable Si device parameters caused by CMP can be effectively avoided.
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Manufacturing & Machinery (AREA)
- Formation Of Insulating Films (AREA)
- Element Separation (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/878,453 US8927386B2 (en) | 2011-06-08 | 2012-05-31 | Method for manufacturing deep-trench super PN junctions |
EP12796409.6A EP2709142B1 (en) | 2011-06-08 | 2012-05-31 | Method for forming a PN superjunction |
JP2014513043A JP5755803B2 (ja) | 2011-06-08 | 2012-05-31 | 深溝を有する新型pn接合の形成方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201110151784.4 | 2011-06-08 | ||
CN201110151784.4A CN102820227B (zh) | 2011-06-08 | 2011-06-08 | 一种深沟槽超级pn结的形成方法 |
Publications (1)
Publication Number | Publication Date |
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WO2012167715A1 true WO2012167715A1 (zh) | 2012-12-13 |
Family
ID=47295478
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CN2012/076353 WO2012167715A1 (zh) | 2011-06-08 | 2012-05-31 | 一种深沟槽超级pn结的形成方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8927386B2 (zh) |
EP (1) | EP2709142B1 (zh) |
JP (1) | JP5755803B2 (zh) |
CN (1) | CN102820227B (zh) |
WO (1) | WO2012167715A1 (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10461152B2 (en) | 2017-07-10 | 2019-10-29 | Globalfoundries Inc. | Radio frequency switches with air gap structures |
US10833153B2 (en) | 2017-09-13 | 2020-11-10 | Globalfoundries Inc. | Switch with local silicon on insulator (SOI) and deep trench isolation |
US10446643B2 (en) | 2018-01-22 | 2019-10-15 | Globalfoundries Inc. | Sealed cavity structures with a planar surface |
US10393960B1 (en) | 2018-02-26 | 2019-08-27 | Globalfoundries Inc. | Waveguides with multiple-level airgaps |
US10156676B1 (en) | 2018-02-26 | 2018-12-18 | Globalfoundries Inc. | Waveguides with multiple airgaps arranged in and over a silicon-on-insulator substrate |
US11410872B2 (en) | 2018-11-30 | 2022-08-09 | Globalfoundries U.S. Inc. | Oxidized cavity structures within and under semiconductor devices |
US10923577B2 (en) | 2019-01-07 | 2021-02-16 | Globalfoundries U.S. Inc. | Cavity structures under shallow trench isolation regions |
US11127816B2 (en) | 2020-02-14 | 2021-09-21 | Globalfoundries U.S. Inc. | Heterojunction bipolar transistors with one or more sealed airgap |
Citations (3)
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US6399506B2 (en) * | 1999-04-07 | 2002-06-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for planarizing an oxide layer |
CN101752252A (zh) * | 2008-12-16 | 2010-06-23 | 上海华虹Nec电子有限公司 | CoolMOS结构中纵向P型区的形成方法 |
CN101872724A (zh) * | 2009-04-24 | 2010-10-27 | 上海华虹Nec电子有限公司 | 超级结mosfet的制作方法 |
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JPS61283141A (ja) * | 1985-06-10 | 1986-12-13 | Nec Corp | 半導体装置の製造方法 |
JPH01108746A (ja) * | 1987-10-21 | 1989-04-26 | Toshiba Corp | 半導体装置の製造方法 |
JPH0513566A (ja) * | 1991-07-01 | 1993-01-22 | Toshiba Corp | 半導体装置の製造方法 |
JP2001244328A (ja) * | 2000-02-29 | 2001-09-07 | Denso Corp | 半導体装置の製造方法 |
CN100565801C (zh) * | 2004-03-31 | 2009-12-02 | 株式会社电装 | 半导体器件的制造方法 |
US7811907B2 (en) * | 2005-09-29 | 2010-10-12 | Denso Corporation | Method for manufacturing semiconductor device and epitaxial growth equipment |
CN101510557B (zh) * | 2008-01-11 | 2013-08-14 | 艾斯莫斯技术有限公司 | 具有电介质终止的超结半导体器件及制造该器件的方法 |
JP5572924B2 (ja) * | 2008-06-23 | 2014-08-20 | 富士電機株式会社 | 半導体装置の製造方法 |
JP2010028018A (ja) * | 2008-07-24 | 2010-02-04 | Fuji Electric Device Technology Co Ltd | 半導体ウエハおよび半導体装置と半導体装置の製造方法 |
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2011
- 2011-06-08 CN CN201110151784.4A patent/CN102820227B/zh active Active
-
2012
- 2012-05-31 WO PCT/CN2012/076353 patent/WO2012167715A1/zh active Application Filing
- 2012-05-31 EP EP12796409.6A patent/EP2709142B1/en active Active
- 2012-05-31 JP JP2014513043A patent/JP5755803B2/ja active Active
- 2012-05-31 US US13/878,453 patent/US8927386B2/en active Active
Patent Citations (3)
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US6399506B2 (en) * | 1999-04-07 | 2002-06-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for planarizing an oxide layer |
CN101752252A (zh) * | 2008-12-16 | 2010-06-23 | 上海华虹Nec电子有限公司 | CoolMOS结构中纵向P型区的形成方法 |
CN101872724A (zh) * | 2009-04-24 | 2010-10-27 | 上海华虹Nec电子有限公司 | 超级结mosfet的制作方法 |
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Also Published As
Publication number | Publication date |
---|---|
EP2709142A4 (en) | 2015-01-07 |
JP5755803B2 (ja) | 2015-07-29 |
EP2709142A1 (en) | 2014-03-19 |
US20130196489A1 (en) | 2013-08-01 |
CN102820227A (zh) | 2012-12-12 |
CN102820227B (zh) | 2015-08-19 |
JP2014522568A (ja) | 2014-09-04 |
EP2709142B1 (en) | 2016-03-23 |
US8927386B2 (en) | 2015-01-06 |
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