WO2011136282A1 - マグネトロン用エンドハットおよびその製造方法並びにマグネトロン - Google Patents
マグネトロン用エンドハットおよびその製造方法並びにマグネトロン Download PDFInfo
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- WO2011136282A1 WO2011136282A1 PCT/JP2011/060289 JP2011060289W WO2011136282A1 WO 2011136282 A1 WO2011136282 A1 WO 2011136282A1 JP 2011060289 W JP2011060289 W JP 2011060289W WO 2011136282 A1 WO2011136282 A1 WO 2011136282A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J23/00—Details of transit-time tubes of the types covered by group H01J25/00
- H01J23/02—Electrodes; Magnetic control means; Screens
- H01J23/04—Cathodes
- H01J23/05—Cathodes having a cylindrical emissive surface, e.g. cathodes for magnetrons
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
- H01J25/50—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field
- H01J25/52—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field with an electron space having a shape that does not prevent any electron from moving completely around the cathode or guide electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J25/00—Transit-time tubes, e.g. klystrons, travelling-wave tubes, magnetrons
- H01J25/50—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field
- H01J25/52—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field with an electron space having a shape that does not prevent any electron from moving completely around the cathode or guide electrode
- H01J25/58—Magnetrons, i.e. tubes with a magnet system producing an H-field crossing the E-field with an electron space having a shape that does not prevent any electron from moving completely around the cathode or guide electrode having a number of resonators; having a composite resonator, e.g. a helix
- H01J25/587—Multi-cavity magnetrons
Definitions
- the present invention relates to an end hat for a magnetron, a method for manufacturing the same, and a magnetron using the same, and more particularly, a magnetron having high reliability in joining between an end hat and a brazing material, and high manufacturing yield and manufacturing efficiency.
- the present invention relates to an end hat for use, a manufacturing method thereof, and a magnetron using the same.
- the cathode part of a magnetron used in a microwave oven or the like includes a coiled filament 1 that emits thermoelectrons, and Mo-Ru brazing material 2 at the upper and lower ends of the coiled filament 1, respectively.
- the upper end hat 3 and the lower end hat 4 made of Mo joined together, the center lead 5 connected and fixed to the upper end hat 3, and the side leads 6 connected to the lower end hat 4 were mainly configured. Things are known.
- each component In order for the magnetron to function properly, each component must be properly joined. For that purpose, it is necessary that the end hat, the filament, and the lead are firmly brazed via the brazing material. In particular, since the joining of the end hat of the magnetron cathode portion and the brazing material is the first joining step in the manufacturing process, this joining needs to be sufficiently strong.
- Patent Document 1 a temporary sintered body or sintered body of a Mo—Ru brazing material is placed on an end hat made of a Mo sintered body, and the end hat and the brazing material are bonded by compression. A method of joining without a gap is disclosed.
- Patent Document 2 discloses that a sintered body of a Mo—Ru brazing material is laser-welded to a Mo end hat. In this case, since no compressive force is applied to the end hat, the problem of chipping is solved. However, in order to use laser welding, of course, a laser welding apparatus is necessary, which causes a problem in terms of cost increase. Further, since it is necessary to irradiate the end hats one by one, the production efficiency of the magnetron is not necessarily good. Further, since only the portion irradiated with the laser is bonded, there is room for improvement in terms of the reliability of the entire bonding.
- the conventional method for manufacturing a magnetron end hat does not always satisfy the yield and the manufacturing efficiency, and a manufacturing method that can increase the manufacturing yield and has a high manufacturing efficiency has been demanded.
- the present invention has been made in view of such a technical problem.
- An end hat, a manufacturing method thereof, and a magnetron which have high reliability in joining of an end hat and a brazing material and have a high production yield and manufacturing efficiency of a magnetron. Is to provide.
- An end hat for a magnetron is a magnetron end hat in which an end hat made of a Mo sintered body and a Mo-Ru brazing material are integrally joined, and the joining interface between the end hat and the brazing material. Is characterized in that it has a diffusion region in which Ru in the brazing material is diffused by 5 ⁇ m or more in an end hat made of a Mo sintered body.
- the diffusion region in which the Ru diffuses is in a range of 10 to 200 ⁇ m from the bonding interface. Furthermore, it is preferable that the region in which the Ru is diffused exists in the bottom surface portion and the side surface portion of the Mo—Ru brazing material.
- an end hat made of a Mo sintered body having a density of 9.6 to 10.0 g / cm 3 .
- the Mo sintered body has a Mo content of 99.9% by mass or more, an Al content as an impurity element of 0.005% by mass or less, a Ca content of 0.003% by mass or less, Cr Content is 0.005 mass% or less, Cu content is 0.002 mass% or less, Fe content is 0.03 mass% or less, Mg content is 0.002 mass% or less, and Mn content is 0.002. Mass% or less, Ni content is 0.008 mass% or less, Pb content is 0.002 mass% or less, Si content is 0.005 mass% or less, Sn content is 0.002 mass% or less, carbon content The amount is preferably 0.01% by mass or less.
- the Ru content of the Mo—Ru brazing material is preferably 35 to 50% by mass.
- the Mo—Ru brazing material preferably contains 0.05% by mass or less of carbon, 0.009% by mass or less of Fe, and 0.007% by mass or less of Ni as impurity elements.
- the magnetron according to the present invention is formed using the magnetron end hat configured as described above.
- the method for producing an end hat for a magnetron according to the present invention includes a press molding step of press-molding an end hat-shaped Mo molded body using Mo powder having a purity of 99.9% by mass or more, and the Mo molded body is hydrogenated.
- a second firing step in which one fired body is fired in a hydrogen-containing atmosphere to obtain a second fired body.
- the hydrogen gas flow rate is 0.2 m 3 / hour or more
- the maximum temperature is 1000 to 1200 ° C.
- the holding time at the maximum temperature is 1 It is preferable to set it to 4 hours.
- the temperature is raised from a temperature of 600 ° C. to the maximum temperature in 3 to 7 hours in the first firing step.
- the second firing step includes a hydrogen gas flow rate of 0.2 m 3 / hour or more, a maximum temperature of 1600 to 1900 ° C., and a holding time at the maximum temperature of 30 mm.
- the time is from 5 minutes to 5 hours.
- a barrel polished body by subjecting the second fired body to barrel polishing. Further, it is preferable to press (sizing) the barrel polishing body. Furthermore, it is preferable to include a step of degreasing the pressed barrel polished body. Moreover, it is preferable to implement the 3rd baking process which heat-processes the degreased barrel polishing body.
- a magnetron end hat with high reliability in joining the Mo end hat and the brazing material and excellent in production yield and production efficiency, and a method for producing the same. Also, a magnetron with high bonding reliability can be provided.
- An end hat for a magnetron is an end hat for a magnetron in which an end hat made of a Mo sintered body and a Mo-Ru brazing material are integrally joined, and the joining interface between the end hat and the brazing material.
- a diffusion region in which Ru in the brazing material is diffused in an end hat made of a Mo sintered body is diffused in a range of 5 ⁇ m or more.
- FIG. 2 shows an example of a magnetron end hat according to this embodiment.
- 2 is a brazing material
- 3 is an upper end hat
- 7 is a center lead mounting hole
- 8 is a joining bottom surface portion between the end hat and the brazing material
- 9 is a joining side surface portion between the end hat and the brazing material.
- the upper end hat 3 was illustrated in FIG. 2, the basic structure is the same also in a lower end hat.
- the main body of the end hat is made of a Mo sintered body.
- the Mo sintered body is a sintered body after forming Mo powder. A preferred production method will be described later.
- the density of the Mo sintered body is preferably 9.6 g / cm 3 or more. More preferably, it is in the range of 9.6 to 10.0 g / cm 3 . If the density is less than 9.6 g / cm 3 , the strength of the end hat may be insufficient. On the other hand, the theoretical density of Mo is 10.22 g / cm 3 (see Physics and Chemistry Dictionary). When the density is close to the theoretical density, the strength of the sintered body is improved. However, if the density is too high, Ru in the brazing material becomes difficult to diffuse.
- the density of the Mo sintered body is preferably 9.6 g / cm 3 or more, more preferably in the range of 9.6 to 10.0 g / cm 3 , more preferably in the range of 9.6 to 9.8 g / cm 3 . is there.
- the density of the Mo sintered body is measured by the Archimedes method.
- the Mo (molybdenum) ratio in the Mo sintered body is preferably 99.9% by mass or more. That is, the content of the impurity element is less than 0.1% by mass. More preferably, the Al content as the impurity element is 0.005 mass% or less, the Ca content is 0.003 mass% or less, the Cr content is 0.005 mass% or less, and the Cu content is 0.002 mass%.
- Fe content is 0.03% by mass or less
- Mg content is 0.002% by mass or less
- Mn content is 0.002% by mass or less
- Ni content is 0.008% by mass or less
- Pb content is It is preferable that 0.002 mass% or less
- Si content is 0.005 mass% or less
- Sn content is 0.002 mass% or less
- carbon content is 0.01 mass% or less.
- the end hat preferably has a diameter L of 10 mm or less and a thickness T of 4 mm or less.
- the Ru content of the Mo—Ru brazing material is preferably in the range of 35 to 50% by mass. If the Ru content is too small, less than 35% by mass, the diffusion of Ru is insufficient and it is difficult to form a sufficient diffusion region. On the other hand, when the content of Ru is excessive so as to exceed 50% by mass, the melting point of the brazing material becomes high. Since Mo and Ru form a eutectic, Ru 40-45% by mass, which is near the composition of Ru 42.9% by mass—residual Mo having the lowest melting point of 1960 ° C., and the remaining Mo is a more preferable range.
- the Mo—Ru brazing material As a method of lowering the melting point of the brazing material, there is a method of adding Ni or the like at 40 mass% or less.
- addition of the third component other than Mo and Ru is not excluded, but it is preferable not to add the third component because addition of the third component may suppress the diffusion of Ru.
- the Mo—Ru brazing material preferably has a carbon content of 0.05% by mass or less, an Fe content of 0.009% by mass or less, and a Ni content of 0.007% by mass or less as impurity elements. .
- the presence of the third component other than Mo and Ru has the effect of lowering the melting point of the Mo—Ru brazing filler metal.
- the Mo—Ru brazing filler metal is removed from the Mo—Ru brazing filler metal. There is a high risk of inhibiting the diffusion of Ru into the combined end hat.
- the Mo sintered end hat and the Mo-Ru brazing material are integrally joined.
- a diffusion region in which Ru in the brazing material is diffused by 5 ⁇ m or more in the end hat direction made of a Mo sintered body is provided at the joining interface between the end hat and the brazing material.
- the Ru diffuses from the Mo—Ru brazing material to the Mo sintered body (end hat) by 5 ⁇ m or more the bonding between the brazing material and the end hat becomes strong.
- the joining of the brazing material and the end hat is strengthened, the handleability of the end hat is improved, and the attaching process of the coiled filament, the center lead and the like can be performed smoothly.
- the end hat uses the upper end hat 3 and the lower end hat 4 to constitute the cathode portion of the magnetron.
- Either the upper end hat 3 or the lower end hat 4 must face the brazing material attachment portion downward.
- the brazing material is removed. If the brazing material is removed, the production yield of the magnetron is greatly reduced because it becomes defective. Therefore, it is important to make the joint between the end hat and the brazing material strong.
- the diffusion region 11 where Ru is diffused is in the range of 10 to 200 ⁇ m (thickness: H) from the bonding interface 10. More preferably, it is 80 to 180 ⁇ m. If the Ru diffusion is less than 10 ⁇ m, there is a fear that the effect of improving the bonding strength is small because the Ru diffusion is small. On the other hand, if the diffusion exceeds 200 ⁇ m, the bonding strength is improved. However, if Ru is excessively diffused, the amount of Ru in the brazing material is reduced, so that the melting point of the Mo—Ru brazing material may be changed. If the Ru content in the brazing material is excessively reduced, the melting point of the brazing material becomes high, which causes brazing defects when brazing a coiled filament or the like in a subsequent process.
- a joining interface is the surface of Mo sintered compact (end hat) with which a brazing material contacts.
- the joining bottom surface portion 8 between the end hat and the brazing material is first mentioned. If Ru in the brazing material is diffused to the end hat side at the joining bottom surface portion 8 between the end hat and the brazing material, the joining strength of the brazing material is improved.
- the joint side surface portion 9 between the end hat and the brazing material if the diffusion of Ru in the brazing material is similarly performed, the joining strength of the brazing material can be further improved.
- the cathode part of the magnetron can be manufactured with a high manufacturing yield.
- the manufacturing method of the magnetron end hat of the present invention is not particularly limited, the following method can be mentioned as a method of efficiently obtaining a high yield.
- the method for producing an end hat for a magnetron according to the present invention includes a press molding step of press molding an end hat-shaped Mo molded body using Mo powder having a purity of 99.9% by mass or more, and the Mo molded body in a hydrogen-containing atmosphere.
- Mo powder having a purity of 99.9% by mass or more is prepared.
- the Mo powder preferably has an average particle size of 1 to 8 ⁇ m.
- the impurity element of the Mo powder is 0.1% by mass or less. More preferably, the Al content as the impurity element is 0.005 mass% or less, the Ca content is 0.003 mass% or less, the Cr content is 0.005 mass% or less, and the Cu content is 0.002 mass%.
- Fe content is 0.03% by mass or less
- Mg content is 0.002% by mass or less
- Mn content is 0.002% by mass or less
- Ni content is 0.008% by mass or less
- Pb content is 0.002 mass% or less
- Si content is 0.005 mass% or less
- Sn content is 0.002 mass% or less
- carbon content is 0.01 mass% or less. It is preferable to use such Mo powder with less impurity elements.
- the press process of obtaining the end-hat-shaped Mo molded object is performed by packing the obtained Mo granulated powder in a metal mold and press-molding.
- the pressing pressure is preferably 3 to 13 ton / cm 2 (294 to 1274 MPa). If the pressing pressure is less than 3 ton / cm 2 , the strength of the molded body is insufficient, and if it exceeds 13 ton / cm 2 , the density of the molded body becomes too high and Ru diffusion hardly occurs.
- a preferred pressing pressure is in the range of 4 to 10 ton / cm 2 .
- a first firing step is performed in which the obtained Mo molded body is fired in a hydrogen-containing atmosphere to obtain a first fired body.
- the maximum reached temperature is 1000 to 1200 ° C. and the holding time of the molded body at the maximum reached temperature is 1 to 4 hours.
- the first firing step is positioned as pre-sintering (or intermediate sintering before the main sintering) when the second firing step described later is the main sintering.
- the first firing step is not intended to densify the Mo sintered body (end hat) as the final product, but prevents the loss of mold in the subsequent steps such as the step of placing the Mo-Ru brazing material described later. This is a process aimed at improving the handleability and obtaining a sintered body in which Ru is easily diffused.
- the first firing step it is preferable to raise the temperature from 600 ° C. to the maximum temperature over 3 to 7 hours.
- the rate of temperature rise is excessively large, non-uniform portions are generated in the disappearance and densification of the binder in the molded body, and there is a possibility that the whole density becomes a non-uniform sintered body.
- the temperature is raised over 7 hours or more, the above non-uniformity is eliminated, but it takes too much time and the production efficiency is lowered.
- the hydrogen gas flow rate may be 0.2 m 3 / H (hours) or more, and further 0.2 to 17 m 3 / H (hours). preferable. It is preferable to supply hydrogen gas as an air flow so that fresh hydrogen gas is supplied to the Mo molded body.
- the hydrogen gas flow rate is adjusted so as to be 2 m 3 / H or more.
- FIG. 3 shows an example in which the compacts for firing a plurality of Mo compacts in one batch are arranged in a firing furnace.
- 20 is a Mo molded body
- 21 is a firing container
- 22 is a firing boat
- 23 is a separator that prevents contact of each molded body.
- a plurality of Mo molded bodies 20 are placed on the firing boat 12. At this time, in order to make it easy for hydrogen gas to pass through the gaps between the molded bodies 10, it is preferable that the gaps between the molded bodies 20 be 1 mm or more.
- a plurality of firing boats 12 on which a plurality of molded bodies 20 are placed are stacked via separators 23. This is disposed in the firing container 21. By placing the firing container 21 in a firing furnace, 200 or more, further 400 or more, and 2000 or more molded bodies can be fired at one time in one batch.
- the firing boat, separator, and firing container are preferably made of Mo. Moreover, you may use the baking boat to which the coating of the oxide ceramics is given as needed.
- a brazing material placement process is performed in which the ring-shaped Mo—Ru brazing material is placed on the first fired body.
- the arranging step include a method of applying a Mo-Ru brazing material at a predetermined position, a method of placing a pre-formed ring shape, or a method of arranging a heat-treated ring-shaped material. It is done.
- the diameter size of the ring-shaped brazing material is adjusted to the brazing material mounting portion of the end hat (corresponding to the joint surface 8 with the brazing material), and the thickness is preferably 0.3 to 2.5 mm.
- a second firing step is performed in which the first fired body on which the brazing material is disposed is fired in a hydrogen-containing atmosphere to obtain a second fired body.
- This second firing step is a step corresponding to a so-called main sintering step.
- the maximum reached temperature is 1600 to 1900 ° C. and the holding time at the maximum reached temperature is 30 minutes to 5 hours. If the maximum temperature reached is less than 1600 ° C., densification does not proceed sufficiently, and the density of the sintered body tends to be less than 9.6 g / cm 3 . On the other hand, when the maximum temperature exceeds 1900 ° C., since the melting point of the brazing material is close to 1960-2050 ° C., the brazing material may melt more than necessary. If the brazing filler metal melts more than necessary, there will be a problem in joining the filament and leads when forming the cathode portion.
- the maximum attained temperature is more preferably in the range of 1650 to 1800 ° C.
- the holding time at the maximum temperature is less than 30 minutes, the Mo sintered body is not sufficiently densified, but if it exceeds 5 hours, Ru from the brazing material may be excessively diffused.
- the second firing step needs to be performed in a hydrogen-containing atmosphere in order to prevent oxidation of the Mo sintered body and the brazing material, as in the first firing step. For this reason, a method of supplying hydrogen gas after replacing the inside of the firing furnace with nitrogen gas is preferable. Moreover, since it is preferable to supply fresh hydrogen gas, it is preferable to adjust a hydrogen gas stream on the same conditions as a 1st baking process. Particularly, in order to obtain a large number of uniform sintered bodies of 200 or more per batch, or more than 400, it is necessary to adjust the hydrogen gas flow rate.
- the magnetron end hat is manufactured by the above process. A process that can further improve the production yield of the end hat will be described below.
- Mo protrusions may be partially formed.
- the barrel polishing conditions are arbitrary, the following method is given as an example. For example, when using a centrifugal barrel machine, when the pot capacity is 10 to 15 liters, a batch of 4000 to 15000 Mo sintered bodies, an abrasive and water are filled in the pot, and the pot is rotated at a rotational speed of 60 to 130 rpm. While rotating, burrs and the like are removed by performing barrel polishing for about 3 to 10 minutes. After the barrel polishing process, a drying process is performed.
- the brazing filler metal surface has a wavy shape
- the brazing filler metal surface can be made flat by performing press working.
- the barrel polishing described above is effective for removing burrs formed on the outer peripheral surface of the Mo sintered body (end hat), but it is effective enough for removing burrs on the inner surface where the brazing material has burrs on the surface. Cannot be obtained. Further, if the abrasive is small, burrs may be generated in the brazing material by the barrel polishing process.
- the burrs of the brazing material are removed, it is predicted that the absolute amount of the brazing material will be insufficient, and there is a risk that the brazing performance of filaments and the like will be adversely affected in a subsequent process. Therefore, there is an effect of adjusting the shape of the brazing material by pressing the barrel polishing body. It is also possible to remove burrs that could not be removed by barrel polishing. Arranging such a shape (deburring) is called sizing.
- the pressing pressure is arbitrary, but a pressing pressure of 6 ton / cm 2 or less (588 MPa or less) is preferable.
- press oil lubricating oil
- press oil it is preferable to perform a step of degreasing the pressed product. In the degreasing step, heating is performed at a temperature at which the press oil volatilizes.
- a third baking step of heat treating the degreased one If the barrel polishing, sizing, or degreasing of press oil is performed, the end hat may be oxidized. Therefore, it is preferable to perform a step of removing surface oxide by heat treatment in a hydrogen atmosphere.
- the heat treatment conditions it is preferable to carry out the heat treatment in a hydrogen gas stream at a maximum temperature of 600 to 900 ° C. When the temperature is lower than 600 ° C., it takes time to obtain a sufficient oxide removing effect. On the other hand, even if heating is performed so that the temperature exceeds 900 ° C., no further effect is obtained, which causes an increase in manufacturing cost. .
- the magnetron end hat can be efficiently manufactured with a high yield. Further, for example, it is also easy to sinter 200 or more Mo compacts per batch by stacking firing boats in multiple stages as shown in FIG.
- the manufacturing yield can be increased to 80% or more even if 200 or more treatments are performed per batch. Further, the production yield can be further increased to 98% or more by performing barrel polishing, pressing (sizing), degreasing, and the third firing step.
- Example 5 A high-purity Mo powder having an average particle diameter of 3 ⁇ m and a purity of 99.92% or more was prepared.
- the impurity element content of this high-purity Mo powder was investigated, the non-volatile component content as the impurity element was 0.08% by mass or less, and each component had an Al content of 0.005% by mass or less, and the Ca content. Is 0.003 mass% or less, Cr content is 0.005 mass% or less, Cu content is 0.002 mass% or less, Fe content is 0.03 mass% or less, and Mg content is 0.002 mass%.
- the Mn content is 0.002 mass% or less
- the Ni content is 0.008 mass% or less
- the Pb content is 0.002 mass% or less
- the Si content is 0.005 mass% or less
- the Sn content is The carbon content was 0.002% by mass or less and the carbon content was 0.01% by mass or less.
- the Mo powder was mixed with a binder and granulated, and the obtained granulated powder was put into a mold and press-molded to prepare a compact for each example.
- the press pressure was set as shown in Table 1.
- the size of the molded body is such that the diameter L of the end hat 3 is 7.5 mm, the thickness T is 2.5 mm, the inner diameter D1 is 3.3 mm, and the inner diameter of the place where the brazing material is placed.
- D2 was set to 3.9 mm.
- Process B 1st baking process
- a plurality of Mo boats 22 each having a length of 320 mm, a width of 220 mm, and a thickness of 15 mm were prepared as firing boats, and 500 Mo molded bodies were placed on each Mo boat (the gap between the molded bodies was 1 mm or more).
- 10 stages of firing boats 22 were stacked in the firing container 21 through the separator 23 (5000 per batch). This was put into a push-type firing furnace and fired under the firing conditions shown in Table 2 to prepare a first fired body. Prior to charging, the inside of the furnace was replaced with nitrogen gas in advance, and then hydrogen gas was supplied.
- Example 1 A1->B3->C1-> D3
- Example 2 A2->B1->C2-> D1
- Example 3 A3 ⁇ B1 ⁇ C1 ⁇ D2
- Example 4 A2->B2->C2-> D2
- Example 5 A2 ⁇ B4 ⁇ C1 ⁇ D4
- the end hat prepared by combining the following process as the comparative example 1 was prepared.
- Comparative Example 1 A1 ⁇ B1 ⁇ D3 ⁇ C2 Thereafter, in the end hat according to Comparative Example 1, the ring-shaped brazing material was further pressed and fixed with a pressing force of 1 ton / cm 2 .
- the density was measured by the Archimedes method.
- the diffusion region thickness H of Ru is the largest value measured by EPMA (electron beam microanalysis) to determine how much Ru diffuses in the depth direction from the joint surface of the end hat and the brazing material in an arbitrary cross section. was measured.
- the production yield of the end hats is as shown in FIG. 1 by using 5000 end hats of one batch of each example and comparative example 1, and attaching the center lead 5, the side lead 6 and the coiled filament 1.
- a magnetron end hat was prepared, a product having an electrical resistance value exceeding a predetermined value from the center lead 5 through the coiled filament 1 to the side lead 6 was defined as a defective product.
- the brazing filler metal part has insufficient bonding strength, the brazing strength between the end hat and the filament is insufficient, the end hat has burrs, the brazing material has lost its shape, etc.
- the ratio of non-defective products excluding defective products that were defective in shape was measured. The measurement results are shown in Table 5 below.
- the density is 9.6 g / cm 3 or more, and the Ru diffusion region thickness H is 5 to 190 ⁇ m. It was confirmed that the bonding strength of the material was increased. The production yield was also a high value of 77 to 84%.
- the Ru diffusion region 11 was confirmed not only in the joint bottom surface portion 8 of the end hat 3 and the brazing material 2 but also in the joint side surface portion 9. .
- the hydrogen gas flow rate in the second baking step is preferably 3 m 3 / H or more.
- Examples 6 to 10 The end barrels prepared in Example 2 and Example 3 were subjected to the following barrel polishing step.
- Example 2 For the end hats prepared in Example 2 and Example 3, the following barrel polishing process E, sizing process F, degreasing process G, and third firing process H are sequentially performed, whereby magnetrons according to Examples 6 to 10 are used. Each end hat was prepared.
- Example 6 Example 2 ⁇ Step E1 ⁇ Step F1 ⁇ Step G ⁇ Step H3
- Example 7 Example 2 ⁇ Step E2 ⁇ Step F1 ⁇ Step G ⁇ Step H1
- Example 8 Example 2 ⁇ Step E3 ⁇ Step F2 ⁇ Step G ⁇ Step H2
- Example 9 Example 3 ⁇ Step E2 ⁇ Step F1 ⁇ Step G ⁇ Step H1
- Example 10 Example 3 ⁇ Step E3 ⁇ Step F2 ⁇ Step G ⁇ Step H2 Next, the production yield of the magnetron end hats according to Examples 6 to 10 prepared as described above was confirmed in the same manner as in Examples 1 to 5. The results are shown in Table 9 below.
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Abstract
Description
(実施例1~5)
平均粒径3μmであり、純度が99.92%以上である高純度Mo粉末を用意した。この高純度Mo粉末の不純物元素含有量を調査したところ、不純物元素としての不揮発成分含有量が0.08質量%以下であり、各成分はそれぞれAl含有量が0.005質量%以下、Ca量が0.003質量%以下、Cr含有量が0.005質量%以下、Cu含有量が0.002質量%以下、Fe含有量が0.03質量%以下、Mg含有量が0.002質量%以下、Mn含有量が0.002質量%以下、Ni含有量が0.008質量%以下、Pb含有量が0.002質量%以下、Si含有量が0.005質量%以下、Sn含有量が0.002質量%以下、炭素含有量が0.01質量%以下であった。
次に、上記Mo粉末をバインダーと混合して造粒して、得られた造粒粉を成形型に入れてプレス成形し、各実施例用の成形体を調製した。プレス圧力は、表1に示す通りに設定した。なお、成形体のサイズは、図2に示す態様において、エンドハット3の直径Lを7.5mm、厚さTを2.5mm、内径D1を3.3mm、ろう材を載置する箇所の内径D2を3.9mmとした。
焼成ボートとして、縦320mm×横220mm×厚さ15mmのMoボート22を複数枚用意し、各MoボートにMo成形体を500個載置した(成形体同士の隙間は1mm以上あけた)。次に、図3に示すように、セパレータ23を介し、焼成ボート22を10段重ねて焼成用容器21内に配置した(1バッチ当り5000個)。これをプッシュ式の焼成炉に投入し、表2の焼成条件にて焼成し第1の焼成体を調製した。投入前に予め炉内を窒素ガスで置換した後、水素ガスを供給した。
Ruを43質量%、残部Moから成るMo-Ru系ろう材を用意した。ろう材の仕様は表3に示す通りとした。なお、Mo-Ru系ろう材は不純物元素として炭素含有量が0.05質量%以下、Fe含有量が0.009質量%以下、Ni含有量が0.007質量%以下のものとした。また、リング形状は外径3.83mm×内径3.3mm×厚さ1.5mmとした。この形状はエンドハットのろう材を載置する箇所のサイズに合わせたものである。また、焼成炉から取り出したとき、焼成ボート上に配置した状態のリング状ろう材を直接載置箇所に配置した。
上記リング状Mo-Ru系ろう材を載置した第1の焼成体を表4に示す焼成条件により、第2焼成工程を実施した。なお、第2焼成工程は第1焼成工程と同様に、複数の第1の焼成体を載置した複数の焼成ボートを多段に積層して焼成用容器に配置して実施した。次に、この焼成用容器ごとプッシュ式の第2の焼成炉に投入した。また、焼成にあたっては、予め焼成炉内を窒素ガスで置換した後に、表4に示す水素ガス流量に調整した。
実施例2:A2→B1→C2→D1
実施例3:A3→B1→C1→D2
実施例4:A2→B2→C2→D2
実施例5:A2→B4→C1→D4
また、比較例1として次の工程を組み合わせて調製したエンドハットを用意した。
その後、比較例1に係るエンドハットにおいては、さらにプレス圧力1ton/cm2の押圧力でリング状ろう材を押圧して固定した。
実施例2および実施例3において調製したエンドハットについて、次のバレル研磨工程を実施した。
バレル研磨工程は、実施例2または実施例3の工程を経て調製されたマグネトロン用エンドハットの所定数量(1バッチ量)を研磨材と水と共にバレル内に投入し、バレルの回転数を調整した後に所定時間混合して、表6に示す条件で実施した。
上記バレル研摩工程Eを実施して調製されたマグネトロン用エンドハットに対して、表7に示すプレス圧力を掛けてろう材の型崩れを修正するサイジング工程を実施した。プレス圧力を掛けるに際して、金型には潤滑油を塗布した。
上記サイジング工程Fを実施して調製されたマグネトロン用エンドハットを脱脂して潤滑油を除去した。
上記脱脂工程Gを実施したマグネトロン用エンドハットを表8の条件で焼成し第3焼成工程を実施した。
実施例7 :実施例2→工程E2→工程F1→工程G→工程H1
実施例8 :実施例2→工程E3→工程F2→工程G→工程H2
実施例9 :実施例3→工程E2→工程F1→工程G→工程H1
実施例10:実施例3→工程E3→工程F2→工程G→工程H2
次に上記のように調製した実施例6~10に係るマグネトロン用エンドハットについて、その製造歩留りを、実施例1~5と同様にして確認した。その結果を下記表9に示す。
2…ろう材
3…上部エンドハット
4…下部エンドハット
5…センターリード
6…サイドリード
7…センターリード取付穴部
8…エンドハットとろう材との接合底面部
9…エンドハットとろう材との接合側面部
10…接合界面
11…拡散領域
20…Mo成形体
21…焼成用容器
22…焼成ボート
23…セパレータ
Claims (16)
- Mo焼結体から成るエンドハットとMo-Ru系ろう材とを一体に接合したマグネトロン用エンドハットにおいて、上記エンドハットとろう材との接合界面にはろう材中のRuがMo焼結体から成るエンドハットに5μm以上拡散している拡散領域を具備していることを特徴とするマグネトロン用エンドハット。
- 前記Ruが拡散している拡散領域が接合界面から10~200μmの範囲であることを特徴とする請求項1記載のマグネトロン用エンドハット。
- 前記Ruが拡散している領域が、Mo-Ru系ろう材の底面部と側面部とに存在することを特徴とする請求項1または請求項2のいずれか1項に記載のマグネトロン用エンドハット。
- 密度が9.6~10.0g/cm3であるMo焼結体から成るエンドハットを具備することを特徴とする請求項1ないし請求項3のいずれか1項に記載のマグネトロン用エンドハット。
- 前記Mo焼結体は、Mo含有量が99.9質量%以上であり、かつ不純物元素としてのAl含有量が0.005質量%以下、Ca含有量が0.003質量%以下、Cr含有量が0.005質量%以下、Cu含有量が0.002質量%以下、Fe含有量が0.03質量%以下、Mg含有量が0.002質量%以下、Mn含有量が0.002質量%以下、Ni含有量が0.008質量%以下、Pb含有量が0.002質量%以下、Si含有量が0.005質量%以下、Sn含有量が0.002質量%以下、炭素含有量が0.01質量%以下であることを特徴とする請求項4記載のマグネトロン用エンドハット。
- 前記Mo-Ru系ろう材のRu含有量が35~50質量%であることを特徴とする請求項1ないし請求項5のいずれか1項に記載のマグネトロン用エンドハット。
- 前記Mo-Ru系ろう材は、不純物元素として炭素を0.05質量%以下、Feを0.009質量%以下、Niを0.007質量%以下含有することを特徴とする請求項6記載のマグネトロン用エンドハット。
- 請求項1ないし請求項7のいずれか1項に記載のマグネトロン用エンドハットを用いたことを特徴とするマグネトロン。
- 純度99.9質量%以上のMo粉を用いてエンドハット形状のMo成形体をプレス成形するプレス成形工程と、上記Mo成形体を水素含有雰囲気中で焼成して第1の焼成体を得る第1焼成工程と、上記第一の焼成体にリング状Mo-Ru系ろう材を載せるろう材配置工程と、上記ろう材を配置した第1の焼成体を水素含有雰囲気中で焼成して第2の焼成体を得る第2焼成工程とを具備することを特徴とするマグネトロン用エンドハットの製造方法。
- 前記第1焼成工程は、水素ガス流量を0.2m3/時間以上、最高到達温度を1000~1200℃とし、上記最高到達温度での保持時間を1~4時間とすることを特徴とする請求項9記載のマグネトロン用エンドハットの製造方法。
- 前記第1焼成工程において、温度600℃から前記最高到達温度まで3~7時間かけて昇温することを特徴とする請求項9または請求項10のいずれか1項に記載のマグネトロン用エンドハットの製造方法。
- 前記第2焼成工程は、水素ガス流量を0.2m3/時間以上、最高到達温度を1600~1900℃とし、上記最高到達温度での保持時間を30分~5時間とすることを特徴とする請求項9ないし請求項11のいずれか1項に記載のマグネトロン用エンドハットの製造方法。
- 前記第2の焼成体にバレル研磨加工を施すことによりバレル研磨体を得ることを特徴とする請求項9ないし請求項12のいずれか1項に記載のマグネトロン用エンドハットの製造方法。
- 前記バレル研磨体をサイジング加工することを特徴とする請求項13記載のマグネトロン用エンドハットの製造方法。
- 前記サイジング加工されたバレル研磨体を脱脂する工程を具備することを特徴とする請求項14記載のマグネトロン用エンドハットの製造方法。
- 脱脂されたバレル研磨体を熱処理する第3焼成工程を実施することを特徴とする請求項15記載のマグネトロン用エンドハットの製造方法。
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