WO2011029427A1 - Procédé et dispositif de classement et/ou d'entreposage de plaques de verre à revêtement dans des salles blanches - Google Patents

Procédé et dispositif de classement et/ou d'entreposage de plaques de verre à revêtement dans des salles blanches Download PDF

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Publication number
WO2011029427A1
WO2011029427A1 PCT/DE2010/001053 DE2010001053W WO2011029427A1 WO 2011029427 A1 WO2011029427 A1 WO 2011029427A1 DE 2010001053 W DE2010001053 W DE 2010001053W WO 2011029427 A1 WO2011029427 A1 WO 2011029427A1
Authority
WO
WIPO (PCT)
Prior art keywords
box
glass panes
container
conveyor
glass
Prior art date
Application number
PCT/DE2010/001053
Other languages
German (de)
English (en)
Inventor
Wolfgang Niewiera
Original Assignee
Grenzebach Maschinenbau Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Grenzebach Maschinenbau Gmbh filed Critical Grenzebach Maschinenbau Gmbh
Publication of WO2011029427A1 publication Critical patent/WO2011029427A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
    • B65D85/48—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for glass sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/062—Easels, stands or shelves, e.g. castor-shelves, supporting means on vehicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Definitions

  • the invention relates to a method and a device for archiving and / or intermediate storage of coated glass plates in clean rooms.
  • coated glass plates photovoltaic elements, TFT screens or other glass plates can be used to cover a coating
  • Clean room conditions or clean room conditions need to be considered.
  • shock-sensitive glass plates in clean rooms known.
  • the method or the corresponding device based on the object to ensure in the alignment and positioning of large thin glass plates under clean room conditions a manufacturing process or a supply to a specific manufacturing process, controlled without the access of people, but of people outside of production and monitors, takes place.
  • the corresponding device must be reliable in operation and inexpensive to manufacture. The movements of the glass plates must exclude unwanted vibrations.
  • a roller conveyor with rollers (2) and a drive (3) b) an alignment unit with a lifting frame (8) and a lying on this alignment frame (5), wherein the alignment frame (5) with this pivotally articulated cross braces (4) having support elements which penetrate the free space between the rollers (2), project beyond the support level of the rollers (2) and carry the glass plate (9), c) two sliding elements, each of which is individually controllable
  • Actuators (6) are actuated and in each turn in swivel joints (7)
  • DE 102007052182B4 describes an apparatus and a method for converting impact-sensitive glass plates in clean rooms. This device, or this method is based on the object, in the implementation of large thin glass plates under clean room conditions an extreme
  • This object is achieved by means of a device, or a method for the contamination-free transfer of thin, impact-sensitive plates,
  • Fastening element (2) are connected to a fastening plate (1),
  • the inventive device, or the method of the invention is therefore the object of coated glass plates below
  • FIG. 4 shows a spatial representation of the portal of a loading station
  • FIG. 5 shows a spatial representation of a comb conveyor
  • coated glass panes used for the present device are predominantly photovoltaic glass panes, correspondingly coated glass panes for TFT screens or for other purposes in clean rooms, or at higher levels
  • a clean room, or a clean dream is a space in which the concentration
  • airborne particles is regulated. It is constructed and used in such a way that the number of people brought into the room resp deposited particles is as small as possible and other parameters such as temperature, humidity or air pressure are controlled as needed.
  • coated glass panes not only on the size of the glass or the type of glass
  • Coating can be sorted, but that they are arranged according to quality classes and can be recalled specifically. Because many
  • Production-controlling computer is exactly informed, at which point is a specific disc.
  • Transfer roller conveyor with a combined cross conveyor can be used for the distribution of glass panes in storage areas for appropriate quality classes. They consist of individually controllable rollers or belts which have a corresponding
  • Lifting mechanism can be raised above the level of the longitudinal conveyor.
  • Behind the right loading station of the left group of loading stations is a portal box converter with its diagonal running track. Behind this lane another row with four container shelves is shown.
  • FIG. 2 shows the overall device described in FIG. 1 in plan view. Here you can see the two four - part container shelves 1 again in the upper part of the picture. Before that, the roadway 7 runs transversely for a portal-box converter 3. Furthermore, those described in the description of the figures of FIG. 1
  • a transverse conveyor 12 here consists of several, individually driven transverse rollers. On the two roller conveyors 6 each pair of glass panes 4 are shown. This can be for example
  • devices 32 for aligning these glass panes 4 are provided in this region of the roller conveyor 6. These serve to ensure that the glass sheets 4 are conveyed exactly in alignment with the longitudinal axis of a container box 10 of the roller conveyor 6.
  • the longitudinal axis of the respective container box 10 serves as the reference line, the position of the longitudinal sides of the glass panes 4 being determined via edge detectors 21, as also shown in FIG. 4 on the container box 10.
  • the correction of the position of a glass sheet 4 is then computer controlled via appropriate pulses for the selective drive of longitudinal rollers and / or transverse rollers.
  • Loading station 2 mounted safety devices 8 are formed in the manner of a curtain of laser beams and ensure that no glass in the lane 7 protrudes.
  • FIG. 3 shows a cross-section of the overall device at the location of the portal-box converter 3 in FIG.
  • the corresponding container - shelf 1 can be seen, which is the portal - box converter 3 in the form of the portal frame 18 on its lane 7 upstream.
  • the lifting drive 20 of the portal box converter 3 can be seen here.
  • a telescopic fork 19 of the box converter 3 is shown in this view.
  • These telescopic forks 19 can be arranged next to one another (see FIG. 6, box foot 29), extended and / or retracted on both sides of a portal box converter 3 and pushed under a container box 10.
  • Telescopic fork 19 is constructed according to the known type of pull-out drawer, wherein the telescopic pushing can be done to both sides.
  • the two telescopic forks 19 in this case support the respective container box 10 in the middle between the two box feet 29 (see FIG. That is, in the case of Fig. 6, that the left telescopic fork 19 on the right side of the left
  • Interfaces between the respective telescopic fork 19 and the respective box foot 29 installed a remotely releasable mechanical connection, which automatically engages when advancing the telescopic forks. For reasons of a clear presentation, this was not drawn out.
  • Container boxes 10 can be transported without danger at high speed from a gantry box 3.
  • the safety device 8 is shown, which is the respective loading station 2 in the form of the portal frame 1 1 opposite. At the top of the portal frame 11 are in this side view of the drive 9 for the
  • the portal frame 11 itself is a container box 10 can be seen in cross section. The, this one
  • Containerbox 10 associated, comb conveyor 17 can also be seen here.
  • the comb conveyor 17 will be described later in more detail.
  • the portal frame 11 is preceded, according to the plan view of Figure 2, a roller conveyor 6, which is combined with a transverse conveyor 12 to see in cross section. Subsequently, two devices 32 for aligning glass sheets 4 are shown.
  • Below the cross conveyor 12 is a drive 14, representative of the Einzelalantriebe shown.
  • Such a cross conveyor 12 has a plurality of individually driven rollers on which can be raised and lowered in the interstices of the associated normal roller conveyor 6 and thus can convey the corresponding glass 4 transversely to the normal direction of movement. The corresponding mechanism for raising and lowering is not shown for reasons of clarity.
  • These roller conveyors 5 with integrated cross conveyor 12 serve mainly the purpose of incoming glass sheets 4 according to their quality class on the
  • FIG. 4 shows a spatial representation of the portal of a loading station
  • the portal frame of the loading station 2 is designated.
  • the drive 9 for the lifting device of the container box 10 shown with two parallel mounted, in the zoom in, glass panes 4 watch.
  • the front part of a comb conveyor 17 which is of course only indistinct to make out in Figure 3, with its foremost conveyor roller 22 and the drive 23 front right to recognize.
  • two roller supports 24 for fastening the rollers 22 to the base frame of the comb conveyor 17 in the foreground are also shown on the left and the right side.
  • the overall structure of a comb conveyor 17 can be seen from FIG. He has his name because several pairs of roller supports 24 with their respective roles 22 in a row like the teeth of a comb on one
  • Base frames are arranged, wherein the rollers 22 are driven together by the drive 23.
  • the glass sheets 4 are transported by the respective roller conveyor 5, in the corresponding container box 10.
  • the container box 10 which has the basic shape of a cuboid, a plurality of layers of horizontally mounted rods are mounted on the two side walls on which the respective glass sheets 4 can be stored.
  • Containerbox 10 filled with glass panes 4 in this way can be seen in FIG.
  • the container box 10 is raised via left and right mounted lifting gripper 16.
  • the next, to be moved into the container box 10 glass sheets 4 are thus stored in the space under the already in the container box 10
  • a comb conveyor 17 has a comb-like structure of the drive 23 of its rollers 22 to which it allows him to load the necessary
  • a detection device 25 for checking the quality of the pane in question can be for example a reading device for a bar code mounted on the glass pane 4.
  • left and right edge detectors 21 are provided to ensure a collision-free loading of the container box 10.
  • FIG. 5 shows a three-dimensional view of a comb conveyor 17.
  • the opposing roller supports 24 can be seen on the left and on the right, which are connected via stabilizers 26 to a base frame.
  • all rollers are driven together by a drive 23, this being done via an endless belt which, in addition to the actual drive rollers of the respective rollers 22, runs over pulleys arranged in the base frame.
  • FIG. 5 shows a special form of a detection device 25 for the
  • optical sensors for detecting cracks in the glass panes 4 can also be arranged in addition. Such cracking is due to the presence of
  • Unrecognizable scattered light to detect a reference light source Unrecognizable scattered light to detect a reference light source.
  • Conveyor rollers 22 are not shared by a drive 23 with the same
  • each glass 4 can be spent with optimal speed and high clock frequency in a container box 10.
  • FIG. 6 shows a three-dimensional view of a container box 10.
  • the container frame 27 in this case has the structural design shown. However, this can, for the skilled person, in each case according to special constructive
  • This container box is here loaded with a total of 70 glass panes 4 which rest on in each case on three carrier elements 30. At the front left and right, with appropriate supplement at the back of each case a foot 29 can be seen in the middle between the two respective layers of glass panes 4, an additional, the exact position fixing, fixing member 28 is attached
  • FIG. 7 shows a detailed drawing of the comb conveyor.
  • a glass pane 4 is additionally mounted on the front and the rear side as a positional fuse 31 in a recess which prevents an unintentional impact sliding out of a glass sheet from a container box.
  • Left and right one roller support 24 of a comb conveyor 17 are shown here.
  • In the middle of a rod-shaped support member 30 is outlined.

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

La présente invention concerne un dispositif permettant de classer et/ou d'entreposer des plaques de verre à revêtement dans des salles blanches à une cadence plus rapide. L'invention est caractérisée par a) une pluralité de transporteurs à rouleaux conçus pour transporter les plaques de verre, b) une pluralité de transporteurs à rouleaux qui sont respectivement reliés à un transporteur transversal, c) un certain nombre de dispositifs conçus pour aligner les plaques de verre, d) une pluralité de boîtes conteneurs conçues pour l'empilement horizontal des plaques de verre, e) un certain nombre de stations de chargement comportant un portique équipé d'un système de levage pour les boîtes conteneurs, f) un certain nombre d'éléments de transfert portique-boîte mobiles équipés d'un système de levage et de fourches télescopiques pour transférer des boîtes conteneurs et g) un certain nombre de rayonnages à conteneurs.
PCT/DE2010/001053 2009-09-08 2010-09-07 Procédé et dispositif de classement et/ou d'entreposage de plaques de verre à revêtement dans des salles blanches WO2011029427A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102009040555A DE102009040555B4 (de) 2009-09-08 2009-09-08 Verfahren und Vorrichtung zum Archivieren und /oder Zwischenlagern von Glasscheiben in Reinräumen
DE102009040555.0 2009-09-08

Publications (1)

Publication Number Publication Date
WO2011029427A1 true WO2011029427A1 (fr) 2011-03-17

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PCT/DE2010/001053 WO2011029427A1 (fr) 2009-09-08 2010-09-07 Procédé et dispositif de classement et/ou d'entreposage de plaques de verre à revêtement dans des salles blanches

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WO (1) WO2011029427A1 (fr)

Cited By (2)

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Publication number Priority date Publication date Assignee Title
CN105632987A (zh) * 2016-01-05 2016-06-01 新奥光伏能源有限公司 一种周转设备、周转方法以及太阳能电池生产线
CN108861274A (zh) * 2018-07-17 2018-11-23 苏州富纳艾尔科技有限公司 智能制造柔性生产线的仓储式上料机构

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CN111977298B (zh) * 2019-05-22 2022-04-15 鸿富锦精密电子（成都）有限公司 产品运输缓存系统及产品运输缓存方法
DE102021207738A1 (de) * 2021-07-20 2023-01-26 KyooBe Tech GmbH Produktionsanlage und Verfahren zur Herstellung eines Produkts
DE102021207746A1 (de) * 2021-07-20 2023-01-26 KyooBe Tech GmbH Produktionsanlage und Verfahren zur Herstellung eines Produkts

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US5603777A (en) * 1994-06-27 1997-02-18 Dainippon Screen Mfg. Co., Ltd. Substrate surface treating apparatus and substrate surface treating method
US20020119036A1 (en) * 1999-05-07 2002-08-29 Ronald Huber Installation for fabricating semiconductor products
DE10155596A1 (de) * 2001-11-13 2003-07-17 Grenzebach Maschb Gmbh Einrichtung zum Stapeln von längs eines Plattenförderers herangeführten Platten
US20080009229A1 (en) * 2006-06-27 2008-01-10 Paolo Sandri Bilateral machine for processing glass panes shaped like a parallelogram with non-right angles
US20080067107A1 (en) * 2006-09-13 2008-03-20 Daifuku Co., Ltd. Container for storing substrate
DE202008011687U1 (de) * 2008-09-02 2008-10-30 Grenzebach Maschinenbau Gmbh Vorrichtung zum Zwischenlagern von Glasplatten für photovoltaische Module
DE102007052027B3 (de) 2007-10-31 2009-04-16 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung zur kontaminationsfreien Behandlung stoßempfindlicher Glasplatten in Reinsträumen
DE102007052182B4 (de) 2007-10-31 2009-07-02 Grenzebach Maschinenbau Gmbh Vorrichtung und Verfahren zum Umsetzen stoßempfindlicher Glasplatten in Reinsträumen
WO2009090743A1 (fr) * 2008-01-17 2009-07-23 Hirata Corporation Dispositif de transport de substrat

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WO2007029401A1 (fr) * 2005-09-02 2007-03-15 Hirata Corporation Systeme de chargement/dechargement de piece de fabrication et dispositif de transport
DE102007052183A1 (de) * 2007-10-31 2009-06-25 Grenzebach Maschinenbau Gmbh Vorrichtung und Verfahren zum Ausrichten stoßempfindlicher Glasplatten in Reinsträumen
JP2009176854A (ja) * 2008-01-23 2009-08-06 Seiko Epson Corp 基板収納カセット
JP2009188276A (ja) * 2008-02-07 2009-08-20 Sharp Corp 基板搬送装置
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Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5603777A (en) * 1994-06-27 1997-02-18 Dainippon Screen Mfg. Co., Ltd. Substrate surface treating apparatus and substrate surface treating method
US20020119036A1 (en) * 1999-05-07 2002-08-29 Ronald Huber Installation for fabricating semiconductor products
DE10155596A1 (de) * 2001-11-13 2003-07-17 Grenzebach Maschb Gmbh Einrichtung zum Stapeln von längs eines Plattenförderers herangeführten Platten
US20080009229A1 (en) * 2006-06-27 2008-01-10 Paolo Sandri Bilateral machine for processing glass panes shaped like a parallelogram with non-right angles
US20080067107A1 (en) * 2006-09-13 2008-03-20 Daifuku Co., Ltd. Container for storing substrate
DE102007052027B3 (de) 2007-10-31 2009-04-16 Grenzebach Maschinenbau Gmbh Verfahren und Vorrichtung zur kontaminationsfreien Behandlung stoßempfindlicher Glasplatten in Reinsträumen
DE102007052182B4 (de) 2007-10-31 2009-07-02 Grenzebach Maschinenbau Gmbh Vorrichtung und Verfahren zum Umsetzen stoßempfindlicher Glasplatten in Reinsträumen
WO2009090743A1 (fr) * 2008-01-17 2009-07-23 Hirata Corporation Dispositif de transport de substrat
DE202008011687U1 (de) * 2008-09-02 2008-10-30 Grenzebach Maschinenbau Gmbh Vorrichtung zum Zwischenlagern von Glasplatten für photovoltaische Module

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105632987A (zh) * 2016-01-05 2016-06-01 新奥光伏能源有限公司 一种周转设备、周转方法以及太阳能电池生产线
CN108861274A (zh) * 2018-07-17 2018-11-23 苏州富纳艾尔科技有限公司 智能制造柔性生产线的仓储式上料机构

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DE102009040555B4 (de) 2013-11-21
DE102009040555A1 (de) 2011-03-10

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