WO2010047119A1 - Appareil et procédé de nettoyage d’un substrat pour support d’enregistrement magnétique - Google Patents

Appareil et procédé de nettoyage d’un substrat pour support d’enregistrement magnétique Download PDF

Info

Publication number
WO2010047119A1
WO2010047119A1 PCT/JP2009/005556 JP2009005556W WO2010047119A1 WO 2010047119 A1 WO2010047119 A1 WO 2010047119A1 JP 2009005556 W JP2009005556 W JP 2009005556W WO 2010047119 A1 WO2010047119 A1 WO 2010047119A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic recording
recording medium
cleaning
medium substrate
cleaning liquid
Prior art date
Application number
PCT/JP2009/005556
Other languages
English (en)
Japanese (ja)
Inventor
坂口竜二
上田学
北沢裕治
Original Assignee
昭和電工株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 昭和電工株式会社 filed Critical 昭和電工株式会社
Publication of WO2010047119A1 publication Critical patent/WO2010047119A1/fr

Links

Images

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays

Definitions

  • the present invention relates to a magnetic recording medium substrate cleaning apparatus and a magnetic recording medium substrate cleaning method, and more particularly, to a magnetic recording medium substrate cleaning apparatus and magnetic recording medium from which a magnetic recording medium substrate having high cleanliness can be obtained.
  • the present invention relates to a method for cleaning an industrial substrate.
  • an aluminum substrate or a glass substrate is used as a substrate for a magnetic recording medium used in a hard disk drive or the like.
  • the recording density of magnetic recording media has been increasing, and high flatness is required for the surface of the magnetic recording medium substrate so as to cope with the low flying height of the head on the magnetic recording surface. High cleanliness is required. For this reason, there is a demand for an advanced cleaning technique for removing dust and the like adhering to the surface of the magnetic recording medium substrate.
  • Patent Document 1 As a method for cleaning a magnetic recording medium substrate, for example, in Patent Document 1, a surface treatment such as polishing is performed on the surface of a workpiece such as a magnetic disk substrate, and then foreign matter adhering to the surface of the workpiece is removed.
  • the workpiece In order to remove the workpiece, the workpiece is washed with a liquid while being conveyed by a conveyor in the washing tank, and then the workpiece washed with the liquid is taken out from the washing tank one by one, and the workpiece is removed by a rotating brush of a scrubbing machine.
  • a method of scrub cleaning one by one is disclosed. Examples of the scrub cleaner used here include those having a cup-type or roll-type rotating brush that contacts the surface of a workpiece.
  • Patent Document 2 describes that the polishing surface to be washed away by scrub cleaning, loose abrasive grains of polish, etc. are sucked into the pad made of sponge-like resin and stayed in the pad to prevent the substrate surface from being scratched.
  • a technique has been disclosed in which a gap portion communicating with each other is provided in the internal structure of the sponge pad, and cleaning water is supplied from the bottom surface of the pad to the surface.
  • the present invention has been made in view of the above problems, and provides a magnetic recording medium substrate having a high cleanliness that can prevent the cleaning liquid from scattering to the surroundings and can cope with a low flying height of the magnetic head on the magnetic recording surface.
  • An object of the present invention is to provide a cleaning device for a magnetic recording medium substrate. Also provided are a method for cleaning a substrate for a magnetic recording medium in which the cleaning liquid is less likely to scatter around and a high cleaning finish is obtained, and a method for manufacturing a magnetic recording medium that can cope with a low flying height of the head on the magnetic recording surface. With the goal.
  • the inventors of the present invention made extensive efforts to solve the above problems.
  • the cleaning tool is made of a porous material, and at least one of the cleaning liquids is used. The part is sucked and discharged through the cleaning tool, so that the cleaning liquid is not easily scattered around, and dust such as dust released from the magnetic recording medium substrate and the cleaning tool by the cleaning is placed on the magnetic recording medium substrate. It was found that adhesion could be prevented and a high cleaning finish was obtained, and the present invention was completed. That is, the present invention relates to the following.
  • a cleaning liquid nozzle for supplying a cleaning liquid onto the magnetic recording medium substrate, a cleaning tool made of a porous material, sliding means for sliding the cleaning tool on the magnetic recording medium substrate, and the magnetic recording A cleaning apparatus for a magnetic recording medium substrate, comprising: a cleaning liquid discharger that sucks and discharges the cleaning liquid from the medium substrate through the cleaning tool.
  • the cleaning tool is cylindrical and is rotated about a direction parallel to the surface with a side surface facing the surface of the magnetic recording medium substrate.
  • a discharge passage for discharging the cleaning liquid sucked from the side surface is formed along a central axis, and the cleaning liquid discharge means is a cleaning liquid discharge pipe attached to an end of the discharge passage, and the cleaning liquid.
  • the cleaning tool is cylindrical and is rotated with an end surface facing the surface of the magnetic recording medium substrate and a direction orthogonal to the surface as an axis.
  • the substrate for a magnetic recording medium according to (1) comprising: a cleaning liquid discharge pipe attached to the other end surface of the cylindrical shape of the cleaning tool; and a pressure reducing means for reducing the pressure in the cleaning liquid discharge pipe.
  • the cleaning liquid nozzle, the cleaning tool, the sliding means, and the cleaning liquid discharge means are each provided in two, and are arranged symmetrically with respect to the magnetic recording medium substrate ( The apparatus for cleaning a substrate for a magnetic recording medium according to 2) or (3).
  • two cleaning tools arranged so as to sandwich the magnetic recording medium substrate are slid on both surfaces of the magnetic recording medium substrate, respectively. Cleaning method for a magnetic recording medium substrate.
  • a method of manufacturing a magnetic recording medium comprising the step of cleaning the magnetic recording medium substrate using the magnetic recording medium substrate cleaning device according to any one of (1) to (4). .
  • the apparatus for cleaning a magnetic recording medium substrate of the present invention includes cleaning liquid discharge means for sucking and discharging the cleaning liquid from the magnetic recording medium substrate through a cleaning tool.
  • cleaning liquid discharge means for sucking and discharging the cleaning liquid from the magnetic recording medium substrate through a cleaning tool.
  • dust such as dust discharged from the magnetic recording medium substrate by cleaning is discharged from the magnetic recording medium substrate. After that, it can be quickly sucked together with the cleaning liquid and captured by the cleaning tool. Therefore, when cleaning is performed using the magnetic recording medium substrate cleaning apparatus of the present invention, the dust released from the magnetic recording medium substrate by cleaning does not come into contact with the magnetic recording medium substrate again, and the magnetic recording is performed by cleaning. The dust released from the recording medium substrate can be quickly removed from the magnetic recording medium substrate.
  • the magnetic recording medium substrate cleaning apparatus of the present invention includes cleaning liquid discharge means for sucking and discharging the cleaning liquid from the magnetic recording medium substrate through the cleaning tool. The dust released from the magnetic recording medium substrate captured by the cleaning tool is not released again.
  • the cleaning step in the cleaning step, at least a part of the cleaning liquid is sucked and discharged from the magnetic recording medium substrate through the cleaning tool. Therefore, it is possible to prevent dust released from the magnetic recording medium substrate by cleaning and dust released from the cleaning tool from adhering to the magnetic recording medium substrate, and a high cleaning finish can be obtained. Further, according to the method for manufacturing a magnetic recording medium of the present invention, a surface with high cleanliness can be obtained in the step of cleaning the magnetic recording medium substrate using the magnetic recording medium substrate cleaning apparatus of the present invention. A magnetic recording medium that can cope with a low flying height of the head on the surface can be obtained.
  • FIG. 1 is a diagram showing an example of a magnetic recording medium substrate cleaning apparatus according to the present invention.
  • FIG. 2 is a plan view of another example of the magnetic recording medium substrate cleaning apparatus of the present invention as viewed from above the magnetic recording medium substrate.
  • a magnetic recording medium substrate cleaning apparatus, a magnetic recording medium substrate cleaning method, and a magnetic recording medium manufacturing method according to the present invention will be described below with reference to the drawings.
  • “First Embodiment” in this embodiment, as an example of a magnetic recording medium substrate cleaning apparatus and a magnetic recording medium substrate cleaning method, a case of performing a magnetic recording medium substrate cleaning step included in a magnetic recording medium manufacturing process will be described.
  • the cleaning process of the magnetic recording medium substrate may be a cleaning process performed at any stage in the manufacturing process of the magnetic recording medium. For example, so as to obtain a predetermined surface average roughness Ra, It can be a scrub cleaning step after mechanical texture processing is performed on the surface of the magnetic recording medium substrate.
  • FIG. 1A is a plan view of an example of a magnetic recording medium substrate cleaning apparatus according to the present invention as viewed from above the magnetic recording medium substrate.
  • 1B is a cross-sectional view taken along the line AA ′ of the cleaning apparatus shown in FIG. 1A
  • FIG. 1C is a cross-sectional view taken along the line BB ′ of the cleaning apparatus shown in FIG. FIG.
  • FIG.1 (d) is the expansion perspective view which expanded and showed the brush with which the washing
  • the cleaning apparatus shown in FIGS. 1 (a) to 1 (d) uses a cleaning liquid nozzle 4 for supplying a cleaning liquid onto a magnetic recording medium substrate 1 to be cleaned, a brush (cleaning tool) 3, and a brush 3 for magnetic recording.
  • a sliding means for sliding on the medium substrate 1 and a cleaning liquid discharging means 7 for sucking and discharging the cleaning liquid from the magnetic recording medium substrate 1 through the brush 3 are provided.
  • two each of the cleaning liquid nozzle 4, the brush 3, the sliding means and the cleaning liquid discharge means 7 are provided and are arranged symmetrically with respect to the magnetic recording medium substrate 1.
  • 1 may be arranged so that the magnetic recording medium substrate 1 is horizontal, or may be arranged so that the magnetic recording medium substrate 1 is vertical, The magnetic recording medium substrate 1 may be disposed so as to be inclined.
  • the magnetic recording medium substrate 1 is an object to be cleaned before performing a cleaning process included in the manufacturing process of the magnetic recording medium.
  • Examples of the magnetic recording medium substrate 1 include a general disk-shaped substrate having a diameter of about 3.5 inches or less and having an opening at the center.
  • the material of the magnetic recording medium substrate 1 is not particularly limited, but an Al alloy substrate, a glass substrate, a ceramic substrate, a flexible resin substrate, and a NiP film on which a NiP plating film is formed are deposited by sputtering. Examples include substrates.
  • the cleaning liquid nozzle 4 supplies a cleaning liquid such as water and a surfactant to the magnetic recording medium substrate 1 in a predetermined supply amount.
  • the brush 3 is made of a porous material such as a sponge-like resin having a large number of voids, and a PVA (polyvinyl alcohol) sponge or the like is used.
  • the PVA sponge is made of PVA, which is a hydrophilic polymer, has high water absorption and water retention, and has characteristics suitable for cleaning applications.
  • the brush 3 taken out from the storage liquid is preferably used after washing out the storage liquid contained in the brush 3 by a method of washing in pure water.
  • each brush 3 is formed with the discharge channel
  • the discharge passage 3 b is for discharging the cleaning liquid sucked from the side surface 3 a of the brush 3.
  • the sliding means slides the brush 3 on the magnetic recording medium substrate 1.
  • the chuck roller 2 that holds and rotates the magnetic recording medium substrate 1 and the rotating means that rotates the brush 3 ( (Not shown).
  • the chuck roller 2 is used in common for the sliding means used for cleaning one surface side of the magnetic recording medium substrate 1 and the sliding means used for cleaning the other surface side. .
  • four chuck rollers 2 are arranged at regular intervals in contact with the outer periphery of the magnetic recording medium substrate 1. Then, by rotating the four chuck rollers 2 in the same direction at a predetermined number of rotations, the magnetic recording medium substrate 1 is held by the chuck rollers 2 and orthogonal to the surface of the magnetic recording medium substrate 1.
  • the axis is rotated at a predetermined speed with the direction to be used as an axis.
  • the two brushes 3 are respectively in a state where the side surfaces 3a face the surface of the magnetic recording medium substrate 1, respectively.
  • the rotating means (not shown) is rotated at a predetermined rotational speed in opposite directions with the direction parallel to the surface of the magnetic recording medium substrate 1 as an axis.
  • the cleaning liquid discharge means 7 includes a cleaning liquid discharge pipe 7a attached to the end of the discharge passage 3b provided in the brush 3, and a pressure reducing means such as a pump for reducing the pressure in the cleaning liquid discharge pipe 7a. (Not shown). Therefore, in this embodiment, the pressure in the cleaning liquid discharge pipe 7a is reduced by the pressure reducing means so that at least a part of the cleaning liquid on the magnetic recording medium substrate 1 is formed on the side surface 3a of the brush 3 made of a porous material. It is sucked from a certain sliding surface, passes through a gap in the brush 3, and is discharged to the outside through the discharge passage 3b and the cleaning liquid discharge pipe 7a in order.
  • the pressure in the cleaning liquid discharge pipe 7a is about the vicinity of the brush 3 when the pressure in the cleaning liquid discharge pipe 7a is sucked with a vacuum pump (decompression means) having an ultimate pressure of about 0.01 Pa and the atmospheric pressure is set to 101325 Pa. It is preferable to adjust so that the cleaning liquid is appropriately sucked when the pressure in the cleaning liquid discharge pipe 7a is 100000 Pa or less.
  • the magnetic recording medium substrate 1 to be cleaned is held by the chuck roller 2 and magnetic recording is performed.
  • Two brushes 3 are arranged so as to sandwich the medium substrate 1 from both sides.
  • the cleaning liquid is supplied onto the magnetic recording medium substrate 1 by the cleaning liquid nozzle 4, and the chuck roller 2 is rotated in the direction of the arrow shown in FIG.
  • the brush 3 is rotated in the direction of the arrow shown in FIGS. 1B and 1C by rotating in the direction of the arrow shown in FIG.
  • the brush 3 is slid to clean both surfaces of the magnetic recording medium substrate 1 simultaneously (cleaning process).
  • the pressure in the cleaning liquid discharge pipe 7a is reduced by the pressure reducing means, and at least a part of the cleaning liquid is sucked from the magnetic recording medium substrate 1 through the brush 3 to the discharge passage 3b. And discharged to the outside through the cleaning liquid discharge pipe 7a.
  • the entire amount of the cleaning liquid used in the cleaning process is discharged to the outside through the brush 3, but if at least a part of the cleaning liquid is sucked and discharged through the brush 3.
  • the effect of the present invention can be obtained without discharging the entire amount of the cleaning liquid to the outside.
  • the cleaning device for the magnetic recording medium substrate 1 includes the cleaning liquid discharging means 7 that sucks and discharges the cleaning liquid from the magnetic recording medium substrate 1 through the brush 3.
  • the cleaning liquid discharging means 7 that sucks and discharges the cleaning liquid from the magnetic recording medium substrate 1 through the brush 3.
  • dust such as dust discharged from the magnetic recording medium substrate 1 by cleaning is quickly sucked together with the cleaning liquid after being discharged from the magnetic recording medium substrate 1 and is captured by the brush 3. be able to. Therefore, in the cleaning method of this embodiment, the dust released from the magnetic recording medium substrate 1 by the cleaning does not come into contact with the magnetic recording medium substrate 1 again, and is quickly removed from the magnetic recording medium substrate 1. Is done.
  • the cleaning liquid is sucked and discharged from the magnetic recording medium substrate 1 through the brush 3, even if dust such as dust adheres to the brush 3, the brush 3 Dust is not released into the cleaning liquid, and dust released from the magnetic recording medium substrate 1 captured by the brush 3 is not released again.
  • a clean cleaning liquid is always supplied to a portion to which the cleaning liquid is supplied.
  • the cleaning liquid containing dust such as dust discharged from the magnetic recording medium substrate or the cleaning tool by the cleaning may come into contact with the object to be cleaned, and the dust may adhere to the object to be cleaned.
  • dust released from the magnetic recording medium substrate 1 by cleaning does not come into contact with the magnetic recording medium substrate 1 again, and dust such as dust is collected from the brush 3 into the cleaning liquid. Since it is not released, a high cleaning finish is obtained. Therefore, according to the present embodiment, it is possible to obtain the magnetic recording medium substrate 1 having a high cleanliness that can cope with the low flying height of the magnetic head on the magnetic recording surface.
  • the cleaning liquid is sucked and discharged from the magnetic recording medium substrate 1 through the brush 3. It becomes difficult for the cleaning liquid supplied to.
  • the brush 3 is cylindrical and rotates with the side surface 3a facing the surface of the magnetic recording medium substrate 1 and a direction parallel to the surface as an axis.
  • a discharge passage 3b for discharging the cleaning liquid sucked from the side surface 3a is formed along the cylindrical central axis of the brush 3, and the cleaning liquid discharge means 7 is connected to the end of the discharge passage 3b.
  • the pressure in the cleaning liquid discharge pipe 7a is reduced by the pressure reducing means in the cleaning step.
  • At least a part of the cleaning liquid on the magnetic recording medium substrate 1 is sucked from the sliding surface which is the side surface 3a of the brush 3 made of a porous material and passes through the gap in the brush 3, and the discharge passage 3b and the cleaning liquid discharge pipe The fuel to be discharged to the outside through the a sequentially.
  • the cleaning device of the present embodiment dust such as dust is removed from the magnetic recording medium substrate 1 by rubbing the sliding surface, which is the side surface 3a of the brush 3, and the magnetic recording medium substrate 1 in the presence of the cleaning liquid.
  • the dust immediately after being released from the magnetic recording medium substrate 1 can be captured by the brush 3 together with the cleaning liquid from the sliding surface which is the side surface 3 a of the brush 3.
  • the discharge passage 3b for discharging the cleaning liquid sucked from the side surface 3a is formed along the cylindrical central axis of the brush 3. The unevenness of the suction force of the cleaning liquid is reduced, the dust discharged from the magnetic recording medium substrate 1 can be efficiently removed, and the cleaning liquid is efficiently discharged to the outside through the discharge passage 3b and the cleaning liquid discharge pipe 7a. It becomes.
  • two cleaning liquid nozzles 4, brushes 3, sliding means and cleaning liquid discharge means 7 are provided, two each, with respect to the magnetic recording medium substrate 1. Since the two brushes 3 are slid on both surfaces of the magnetic recording medium substrate 1 in the cleaning process, the entire surfaces of both surfaces of the magnetic recording medium substrate 1 can be simultaneously cleaned. A cleaning process can be performed efficiently.
  • the cleaning apparatus for the magnetic recording medium substrate 1 of the present embodiment when a PVA sponge stored in a storage solution containing hydrogen peroxide is used as the brush 3, the mold on the PVA sponge being stored is moldy. It is possible to sufficiently prevent inconvenience caused by the occurrence of. Therefore, when the magnetic recording medium substrate 1 is washed using the brush 3 stored in a storage solution containing hydrogen peroxide, mold does not adhere to the surface of the magnetic recording medium substrate 1, and during storage. Even if the hydrogen peroxide used is contained in the brush 3, it is discharged to the outside through the discharge passage 3b and the cleaning liquid discharge pipe 7a together with the cleaning liquid at the time of cleaning, so that the surface of the cleaned magnetic recording medium substrate 1 is removed. Hydrogen peroxide does not remain.
  • the conventional antifungal agent is used for the magnetic recording medium substrate 1 after cleaning. It does not remain on the surface. Therefore, a higher cleaning finish can be obtained.
  • the chuck roller 2 is rotated to rotate the magnetic recording medium substrate 1, and the brush 3 is rotated by rotating means.
  • the method is not limited to the method in which both the magnetic recording medium substrate 1 and the brush 3 are simultaneously rotated, and only one of them may be rotated.
  • the discharge passage 3b for discharging the cleaning liquid sucked from the side surface 3a is formed along the cylindrical central axis of the brush 3
  • the shape of the discharge passage 3b is not limited to the shape of the present embodiment.
  • branch passages extending radially from the discharge passage toward the side surface 3a may be connected to the discharge passage extending along the central axis of the cylinder so that the cleaning liquid can be discharged efficiently and uniformly. And it is good also as what was provided in the spiral form so that the cylindrical central axis might be enclosed.
  • FIG. 2 is a plan view of another example of the magnetic recording medium substrate cleaning apparatus of the present invention as viewed from above the magnetic recording medium substrate.
  • the cleaning apparatus shown in FIG. 2 magnetically operates a cleaning liquid nozzle 4 for supplying a cleaning liquid onto the magnetic recording medium substrate 1 to be cleaned, a brush (cleaning tool) 5 and the brush 5 in the same manner as the cleaning apparatus shown in FIG.
  • a sliding means for sliding on the recording medium substrate 1 and a cleaning liquid discharging means 71 for sucking and discharging the cleaning liquid from the magnetic recording medium substrate 1 through the brush 5 are provided.
  • the cleaning liquid nozzle 4, the brush 5, the sliding means, and the cleaning liquid discharge means 71 are provided two by two and are arranged symmetrically with respect to the magnetic recording medium substrate 1.
  • the magnetic recording medium substrate 1 may be arranged so as to be horizontal, or the magnetic recording medium substrate 1 may be arranged so as to be vertical.
  • the magnetic recording medium substrate 1 may be disposed so as to be inclined.
  • two brushes 5 are provided, and the two brushes 5 are arranged so as to sandwich the magnetic recording medium substrate 1.
  • the brush 5 is made of a porous material such as sponge-like resin having a large number of voids, and PVA sponge or the like is used. Furthermore, it is preferable to use a PVA sponge stored in a storage solution containing hydrogen peroxide as the brush 5.
  • the brush 5 taken out from the storage liquid is preferably used after washing out the storage liquid contained in the brush 5 by a method of washing in pure water.
  • the brush 5 is cylindrical (cup type), and is arranged with one end face facing the surface of the magnetic recording medium substrate 1. As shown in FIG. 2, an arm 6 for holding the brush 5 is attached to the other end surface 5 a of the brush 5.
  • the sliding means slides the brush 5 on the magnetic recording medium substrate 1 and holds four chucks similar to the cleaning apparatus shown in FIG. 1 that holds and rotates the magnetic recording medium substrate 1. It comprises a roller 2 and a rotating means (not shown) for moving and rotating the brush 5 to a predetermined position via the arm 6.
  • the magnetic recording medium substrate 1 is rotated by a rotating means (not shown) with each brush 5 facing one end face of the surface of the magnetic recording medium substrate 1.
  • the direction perpendicular to the surface of the magnetic recording medium is rotated at a predetermined rotational speed in the same direction, and the relative position with respect to the magnetic recording medium substrate 1 is moved.
  • the cleaning liquid discharge means 7 is attached to the other end surface 5a of the brush 5, and the cleaning liquid discharge pipe 71a partially embedded in the arm 6 and the pressure in the cleaning liquid discharge pipe 71a are reduced.
  • Pressure reducing means such as a pump. Therefore, in this embodiment, the pressure in the cleaning liquid discharge pipe 71a is reduced by the pressure reducing means so that at least a part of the cleaning liquid on the magnetic recording medium substrate 1 is at one end surface of the brush 5 made of a porous material. It is sucked from a certain sliding surface, passes through the gap in the brush 5, and is discharged to the outside through the cleaning liquid discharge pipe 71a.
  • the magnetic recording medium substrate 1 to be cleaned is held by the chuck roller 2, and the magnetic recording medium substrate 1 is sandwiched from both sides.
  • Two brushes 5 are disposed on the surface.
  • the cleaning liquid is supplied onto the magnetic recording medium substrate 1 by the cleaning liquid nozzle 4, the chuck roller 2 is rotated to rotate the magnetic recording medium substrate 1 in the direction of arrow B shown in FIG. 2 is rotated in the direction of arrow A shown in FIG. 2, and the brushes 5 are slid on both surfaces of the magnetic recording medium substrate 1 to clean both surfaces of the magnetic recording medium substrate 1 simultaneously (cleaning step).
  • the pressure in the cleaning liquid discharge pipe 71a is reduced by the pressure reducing means, and at least a part of the cleaning liquid is sucked from the magnetic recording medium substrate 1 through the brush 5 to be the cleaning liquid discharge pipe. It discharges outside through 71a.
  • the cleaning apparatus for the magnetic recording medium substrate 1 includes the cleaning liquid discharge means 71 that sucks and discharges the cleaning liquid from the magnetic recording medium substrate 1 via the brush 5, so that the first embodiment is described.
  • the cleaning liquid is less likely to be scattered around, and the dust released from the magnetic recording medium substrate 1 by the cleaning does not come into contact with the magnetic recording medium substrate 1 again. Since no dust is discharged, a high cleaning finish is obtained, and the magnetic recording medium substrate 1 having a high cleanliness that can cope with a low flying height of the magnetic head on the magnetic recording surface is obtained.
  • the brush 5 is cylindrical and rotates with the one end surface facing the surface of the magnetic recording medium substrate 1 and the direction orthogonal to the surface as an axis.
  • the cleaning liquid discharge means 71 includes the cleaning liquid discharge pipe 71a attached to the cylindrical other end face 5a of the brush 5, and the pressure reducing means for reducing the pressure in the cleaning liquid discharge pipe 71a.
  • the pressure in the cleaning liquid discharge pipe 71a is reduced by the pressure reducing means, whereby at least a part of the cleaning liquid on the magnetic recording medium substrate 1 is a sliding surface that is one end face of the brush 5 made of a porous material. Is sucked from the air, passes through the gap in the brush 5, and is discharged to the outside through the cleaning liquid discharge pipe 71a.
  • the cleaning apparatus of this embodiment dust such as dust is removed from the magnetic recording medium substrate 1 by rubbing the sliding surface which is one end surface of the brush 5 and the magnetic recording medium substrate 1 in the presence of the cleaning liquid.
  • the cleaning liquid discharge means 71 includes the cleaning liquid discharge pipe 71a attached to the cylindrical other end face 5a of the brush 5, and therefore, at one end face of the brush 5 which is a sliding surface. The unevenness of the suction force of the cleaning liquid is small, dust discharged from the magnetic recording medium substrate 1 can be efficiently removed, and the cleaning liquid is efficiently discharged to the outside through the cleaning liquid discharge pipe 71a.
  • two cleaning liquid nozzles 4, brushes 5, sliding means and two cleaning liquid discharge means 71 are provided, respectively, with respect to the magnetic recording medium substrate 1. Since the two brushes 5 are respectively slid on both surfaces of the magnetic recording medium substrate 1 in the cleaning process, the entire surfaces of both surfaces of the magnetic recording medium substrate 1 can be simultaneously cleaned. The cleaning process can be performed efficiently.
  • a method for manufacturing a magnetic recording medium including the step of cleaning the magnetic recording medium substrate using the magnetic recording medium substrate cleaning apparatus of the first embodiment or the second embodiment will be described.
  • a magnetic recording medium substrate 1 made of a predetermined material is prepared, and the surface of the magnetic recording medium substrate 1 is polished so that the surface of the magnetic recording medium substrate 1 has a predetermined average surface roughness Ra.
  • the magnetic recording medium substrate 1 is immersed and washed in a cleaning tank containing a detergent.
  • the magnetic recording medium substrate 1 is scrubbed by the above-described cleaning method using the magnetic recording medium substrate cleaning apparatus of the first embodiment or the second embodiment.
  • a base film made of a nonmagnetic alloy such as a CrW alloy and a magnetic recording layer film made of a magnetic alloy such as a CoCrPtTaCu alloy are formed on the cleaned surface of the magnetic recording medium substrate 1, using a sputtering method, for example, a base film made of a nonmagnetic alloy such as a CrW alloy and a magnetic recording layer film made of a magnetic alloy such as a CoCrPtTaCu alloy are formed.
  • a protective film made of a hard carbon film is formed on the magnetic recording layer film by using, for example, a plasma CVD method, and a PFPE lubricant is formed on the surface of the magnetic recording medium substrate 1 on which the protective film is formed by a dipping method. Is applied to form a magnetic recording medium.
  • the cleanliness level is obtained by performing the step of cleaning the magnetic recording medium substrate using the magnetic recording medium substrate cleaning apparatus of the first embodiment or the second embodiment. Therefore, a magnetic recording medium that can cope with a low flying height of the head on the magnetic recording surface can be obtained.
  • Example As a magnetic recording medium substrate, a disk-shaped aluminum alloy substrate having a diameter of 3.5 inches and a thickness of 0.8 mm, on which a NiP plating film having a thickness of 10 ⁇ m was formed, was prepared. The surface of the magnetic recording medium substrate was subjected to mechanical texture processing so that the surface average roughness Ra was 1 nm. Subsequently, the magnetic recording medium substrate was immersed and washed in a cleaning tank containing an alkaline detergent (trade name: RBS225, manufactured by Chemical Product Co., Ltd.) having a concentration of 5%.
  • an alkaline detergent trade name: RBS225, manufactured by Chemical Product Co., Ltd.
  • the both surfaces of the magnetic recording medium substrate were simultaneously scrubbed three times using the cleaning apparatus shown in FIG.
  • the brush 5 was stored in a storage solution composed of 5% by mass of hydrogen peroxide solution at 30 ° C. for 7 days, and the storage solution was washed away from the brush by a method of washing in pure water with a diameter of 8.5 cm.
  • a 2 cm thick cup-type PVA sponge (manufactured by Eagle Chemical Co., Ltd.) was used.
  • the scrub cleaning conditions are as follows: the rotation speed of the brush 5 is 500 rpm, the rotation speed of the magnetic recording medium substrate 1 is 120 rpm, the scrub cleaning time per one is 8 seconds, and the supply amount of pure water is 1 as the cleaning liquid from the cleaning liquid nozzle 4 Feeded at liters / minute.
  • the pressure in the cleaning liquid discharge pipe 71a is reduced to 90000 Pa, and the cleaning liquid used for cleaning is sucked from the magnetic recording medium substrate 1 through the brush 5 and discharged to the outside through the cleaning liquid discharge pipe 71a.
  • almost no cleaning liquid was discharged from other than the cleaning liquid discharge pipe 71a, and there was almost no cleaning liquid scattered around.
  • a base film made of a CrW alloy having a thickness of 8 nm (25 mass% Cr-75 mass% W) and a CoCrPtTaCu Cu having a thickness of 30 nm are formed by sputtering.
  • a magnetic recording layer film made of an alloy (18 mass% Cr-8 mass% Pt-3 mass% Ta-1 mass% Cu-balance Co) was formed.
  • a protective film made of a carbon film having a thickness of 7 nm is formed on the magnetic recording layer film using a plasma CVD method, and a PFPE lubricant is applied to the surface of the magnetic recording medium substrate on which the protective film is formed by a dipping method.
  • a magnetic recording medium was manufactured by a coating method.
  • a cleaning device similar to the cleaning device shown in FIG. 2 is used except that no cleaning liquid discharging means is provided, and the cleaning liquid is not sucked and discharged through a brush during cleaning, as in the embodiment.
  • a magnetic recording medium was manufactured.
  • the surface shape of the magnetic recording medium was inspected for 100 sheets of the magnetic recording media of the examples and comparative examples thus obtained using a glide tester in which a head with piezoelectric elements was used.
  • the head glide height (distance between the head and the magnetic recording medium) was 0.25 ⁇ inch.
  • no defective portion was found on 100 magnetic recording media.
  • two defects were found in the comparative example.
  • the two defective magnetic recording media of the comparative examples were presumed to be caused by substances remaining on the surface of the magnetic recording medium substrate during scrub cleaning.
  • the magnetic recording media of Examples and Comparative Examples were observed with a differential interference optical microscope (600 times).
  • a differential interference optical microscope 600 times.
  • blistering due to poor scrub cleaning of the magnetic recording medium substrate occurred in the vicinity of the center of the laminated film composed of the magnetic recording layer film or the like.
  • a good magnetic recording layer film was formed.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

L'invention concerne un appareil et un procédé de nettoyage d’un substrat pour support d’enregistrement magnétique, où une solution de nettoyage ne se disperse pas facilement vers des zones environnantes et où l’on obtient un substrat destiné à un support d’enregistrement magnétique et applicable au flottement rasant d’une tête magnétique au-dessus d’une surface d’enregistrement magnétique et caractérisé par une grande propreté. L’appareil (1) de nettoyage de substrat pour support d’enregistrement magnétique est muni de : une buse (4) pour solution nettoyante qui amène la solution nettoyante jusque sur le substrat (1) ; un outil (3) de nettoyage composé d’un matériau poreux ; un moyen de glissement qui fait glisser l’outil (3) de nettoyage sur le substrat (1) ; et un moyen (7) d’évacuation de solution nettoyante qui aspire et évacue la solution nettoyante du dessus du substrat (1) à travers l’outil (3) de nettoyage.
PCT/JP2009/005556 2008-10-23 2009-10-22 Appareil et procédé de nettoyage d’un substrat pour support d’enregistrement magnétique WO2010047119A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008-273098 2008-10-23
JP2008273098A JP2010102772A (ja) 2008-10-23 2008-10-23 磁気記録媒体用基板の洗浄装置及び磁気記録媒体用基板の洗浄方法

Publications (1)

Publication Number Publication Date
WO2010047119A1 true WO2010047119A1 (fr) 2010-04-29

Family

ID=42119172

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2009/005556 WO2010047119A1 (fr) 2008-10-23 2009-10-22 Appareil et procédé de nettoyage d’un substrat pour support d’enregistrement magnétique

Country Status (2)

Country Link
JP (1) JP2010102772A (fr)
WO (1) WO2010047119A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103769376A (zh) * 2012-10-25 2014-05-07 株式会社荏原制作所 衬底清洗装置及衬底清洗方法
CN105710062A (zh) * 2016-04-17 2016-06-29 长葛市汇达感光材料有限公司 胶印版材包装机

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6311053B1 (ja) * 2017-06-23 2018-04-11 肇 与儀 レコード盤の洗浄方法

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102771A (ja) * 1988-10-07 1990-04-16 Sharp Corp 平面基板用の液切り装置
JPH03206615A (ja) * 1990-01-09 1991-09-10 Hitachi Ltd 洗浄装置
JPH0471232A (ja) * 1990-07-11 1992-03-05 Nec Kyushu Ltd 洗浄装置
JPH04111387A (ja) * 1990-08-30 1992-04-13 Fujitsu Ltd プリント基板の乾燥装置
JPH09260322A (ja) * 1996-03-26 1997-10-03 Nippon Steel Corp 洗浄装置
JPH10189511A (ja) * 1996-12-20 1998-07-21 Sony Corp ウェーハ洗浄装置
JPH10335282A (ja) * 1997-05-29 1998-12-18 Fujitsu Ltd ブラシスクラバ
JP2000199682A (ja) * 1998-12-28 2000-07-18 Matsushita Electric Works Ltd 液切り装置
JP2001096245A (ja) * 1999-09-29 2001-04-10 Systemseiko Co Ltd 洗浄方法および洗浄装置
JP2003017454A (ja) * 2001-06-29 2003-01-17 Shibaura Mechatronics Corp 基板の洗浄ツール、基板の処理装置及び処理方法
JP2006278713A (ja) * 2005-03-29 2006-10-12 Dainippon Screen Mfg Co Ltd 基板洗浄装置
JP2008176860A (ja) * 2007-01-18 2008-07-31 Showa Denko Kk ブラシの保管方法、及び磁気記録媒体用基板の洗浄方法、磁気記録媒体の製造方法
JP2009032846A (ja) * 2007-07-26 2009-02-12 Dainippon Screen Mfg Co Ltd 基板処理装置

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02102771A (ja) * 1988-10-07 1990-04-16 Sharp Corp 平面基板用の液切り装置
JPH03206615A (ja) * 1990-01-09 1991-09-10 Hitachi Ltd 洗浄装置
JPH0471232A (ja) * 1990-07-11 1992-03-05 Nec Kyushu Ltd 洗浄装置
JPH04111387A (ja) * 1990-08-30 1992-04-13 Fujitsu Ltd プリント基板の乾燥装置
JPH09260322A (ja) * 1996-03-26 1997-10-03 Nippon Steel Corp 洗浄装置
JPH10189511A (ja) * 1996-12-20 1998-07-21 Sony Corp ウェーハ洗浄装置
JPH10335282A (ja) * 1997-05-29 1998-12-18 Fujitsu Ltd ブラシスクラバ
JP2000199682A (ja) * 1998-12-28 2000-07-18 Matsushita Electric Works Ltd 液切り装置
JP2001096245A (ja) * 1999-09-29 2001-04-10 Systemseiko Co Ltd 洗浄方法および洗浄装置
JP2003017454A (ja) * 2001-06-29 2003-01-17 Shibaura Mechatronics Corp 基板の洗浄ツール、基板の処理装置及び処理方法
JP2006278713A (ja) * 2005-03-29 2006-10-12 Dainippon Screen Mfg Co Ltd 基板洗浄装置
JP2008176860A (ja) * 2007-01-18 2008-07-31 Showa Denko Kk ブラシの保管方法、及び磁気記録媒体用基板の洗浄方法、磁気記録媒体の製造方法
JP2009032846A (ja) * 2007-07-26 2009-02-12 Dainippon Screen Mfg Co Ltd 基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103769376A (zh) * 2012-10-25 2014-05-07 株式会社荏原制作所 衬底清洗装置及衬底清洗方法
CN105710062A (zh) * 2016-04-17 2016-06-29 长葛市汇达感光材料有限公司 胶印版材包装机

Also Published As

Publication number Publication date
JP2010102772A (ja) 2010-05-06

Similar Documents

Publication Publication Date Title
US9808903B2 (en) Method of polishing back surface of substrate and substrate processing apparatus
JP5123329B2 (ja) 半導体基板の平坦化加工装置および平坦化加工方法
JP2002208572A (ja) 研磨装置
JP5294944B2 (ja) 基板の洗浄方法
JP2017080735A (ja) 洗浄装置、球体の洗浄システムおよび球体の洗浄方法
JP4660494B2 (ja) 研磨カートリッジ
KR20180096462A (ko) 스크럽 세정 방법 및 스크럽 세정 장치
WO2010047119A1 (fr) Appareil et procédé de nettoyage d’un substrat pour support d’enregistrement magnétique
US20120111361A1 (en) Method for substrate surface cleaning
JP2009193608A (ja) 情報記録媒体用ガラス基板の製造方法、情報記録媒体用ガラス基板及び磁気記録媒体
JP4623210B2 (ja) 情報記録媒体用ガラス基板の製造方法
US20080276394A1 (en) Scrubbing device and roll sponge assembly used therein
JP2007098485A (ja) 磁気記録媒体用のガラス基板および磁気ディスクの製造方法
JP2000185927A (ja) 研磨方法及び研磨装置並びに磁気記録媒体用ガラス基板及び磁気記録媒体
JP2007022866A (ja) 円盤状ガラス基板の洗浄方法および磁気ディスク
JP4963411B2 (ja) 半導体装置または半導体ウェハの製造方法
US8162724B2 (en) Surface treating method and apparatus
JP2002074653A (ja) 情報記録媒体用ガラス基板の製造方法及び情報記録媒体用ガラス基板並びに情報記録媒体の製造方法及び情報記録媒体
JP2008176860A (ja) ブラシの保管方法、及び磁気記録媒体用基板の洗浄方法、磁気記録媒体の製造方法
JP2017147334A (ja) 基板の裏面を洗浄する装置および方法
JP2015069662A (ja) Ｈｄｄ用ガラス基板の製造方法
JP7426898B2 (ja) 洗浄体、洗浄装置および洗浄方法
JP6034580B2 (ja) Ｈｄｄ用ガラス基板の製造方法
JP2009187630A (ja) 情報記録媒体用ガラス基板の梱包方法、情報記録媒体用ガラス基板梱包体、情報記録媒体用ガラス基板の製造方法及び磁気記録媒体の製造方法
JP5346541B2 (ja) ワイピングテープおよびワイピング方法

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09821819

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 09821819

Country of ref document: EP

Kind code of ref document: A1