WO2010044429A1 - 液滴塗布方法及び装置 - Google Patents

液滴塗布方法及び装置 Download PDF

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Publication number
WO2010044429A1
WO2010044429A1 PCT/JP2009/067801 JP2009067801W WO2010044429A1 WO 2010044429 A1 WO2010044429 A1 WO 2010044429A1 JP 2009067801 W JP2009067801 W JP 2009067801W WO 2010044429 A1 WO2010044429 A1 WO 2010044429A1
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WO
WIPO (PCT)
Prior art keywords
droplets
substrate
coating
nozzle
droplet
Prior art date
Application number
PCT/JP2009/067801
Other languages
English (en)
French (fr)
Japanese (ja)
Inventor
梓 平野
保次 鶴岡
Original Assignee
芝浦メカトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 芝浦メカトロニクス株式会社 filed Critical 芝浦メカトロニクス株式会社
Priority to JP2010533916A priority Critical patent/JP5497654B2/ja
Priority to CN200980140127.0A priority patent/CN102176980B/zh
Publication of WO2010044429A1 publication Critical patent/WO2010044429A1/ja

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0451—Control methods or devices therefor, e.g. driver circuits, control circuits for detecting failure, e.g. clogging, malfunctioning actuator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04558—Control methods or devices therefor, e.g. driver circuits, control circuits detecting presence or properties of a dot on paper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0456—Control methods or devices therefor, e.g. driver circuits, control circuits detecting drop size, volume or weight
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04581—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on piezoelectric elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/09—Ink jet technology used for manufacturing optical filters

Definitions

  • the present invention relates to a droplet coating method and apparatus.
  • Patent Document 1 As a technique for manufacturing a color filter substrate using an inkjet coating method, as described in Patent Document 1, a plurality of liquid droplets (inks) ejected from nozzles of a coating head are partitioned on the surface of the substrate. Some are applied to the recesses. The droplets applied to the recesses are dried to form a colored layer in the recesses.
  • inks liquid droplets
  • the liquid is sequentially ejected from each nozzle 1 of the coating head at a predetermined dropping timing (dropping time interval), and is applied to a predetermined coating range A of the inspection substrate KA (into the concave portion of the product substrate K).
  • the application area (projected area) of a plurality of droplets E (for example, 5 droplets E1 to E5) dropped on the corresponding range) is obtained, and the application amount of these droplets E1 to E5 is obtained based on this application area and inspected.
  • the droplets E1 to E5 dropped in sequence on the inspection substrate KA are deposited with a slight displacement in the moving direction of the inspection substrate KA (FIG. 6B), and the entire droplets E1 to E5 are accumulated. Thus, an egg-shaped image is formed (FIG. 6C).
  • the coating pitch p of the adjacent droplets E1 to E5 is caused by variations in the moving speed of the inspection substrate KA, the viscosity, concentration, etc. of the droplets even if the above-described dropping timing p is constant. It varies according to the drag of the droplet in the moving direction of the inspection substrate KA.
  • the oval images of the droplets E1 to E5 deposited on the inspection substrate KA are the moving directions of the inspection substrate KA due to variations in the movement speed of the inspection substrate KA, the viscosity, concentration, etc. of the droplets.
  • the length of the liquid droplets is changed by dragging the liquid droplets on the liquid crystal, and the entire coating area of the liquid droplets E1 to E5, and thus the inspection accuracy of the coating amount is impaired.
  • the discharge state of the droplet E (for example, E5) discharged from the nozzle 1 of the coating head is an oblique discharge abnormal state in which the discharge direction of the droplet E5 is oblique with respect to the vertical line.
  • the entire oval image length of the droplets E1 to E5 is enlarged as compared with the normal oval image in the normal ejection state.
  • the difference between the normal image and the abnormal image is simply a difference in the degree of enlargement of the length of the oval image, and it is difficult to distinguish clearly. There are difficulties.
  • An object of the present invention is to detect the entire application area of a plurality of droplets applied from a nozzle of an application head to a predetermined application range of a substrate with high accuracy and accurately adjust the discharge amount of the droplets from the nozzle. There is.
  • the present invention is a droplet coating method for applying droplets to a predetermined coating range on a substrate, A step of collectively imaging a plurality of liquid droplets ejected from a nozzle provided in an application head and applied to the application range; Based on the captured images of the plurality of droplets, obtaining a total coating area of the droplets; Having a step of adjusting the discharge amount of droplets from the nozzle based on the determined application area; When discharging the plurality of droplets from a nozzle of the coating head to a predetermined coating range on the substrate, dropping the plurality of droplets discharged from the nozzle at the same position within the predetermined coating range.
  • An object is to provide a droplet application method.
  • the present invention also provides a droplet applying apparatus for applying droplets to a predetermined application range on a substrate, Moving means for relatively moving the coating head provided with the nozzle and the substrate in a direction along the surface of the substrate; An imaging unit that collectively images a plurality of droplets ejected from the nozzle and applied to a predetermined application range on the substrate; Based on the images of the plurality of droplets imaged by the imaging unit, an inspection unit for obtaining the entire application area of the droplets; A control unit that controls the coating head, the moving unit, the imaging unit, and the inspection unit; When the control unit discharges a plurality of droplets from the nozzle of the coating head to the predetermined coating range, the control unit drops the plurality of droplets discharged from the nozzle at the same position in the predetermined coating range.
  • the present invention also provides a droplet coating apparatus that controls driving of the coating head and the moving means.
  • the total landing area of a plurality of droplets applied from a nozzle of the coating head to a predetermined coating range of the substrate is detected with high accuracy, and the ejection amount of the droplets from the nozzle is adjusted with high accuracy.
  • the coating accuracy can be improved.
  • FIG. 1 is a schematic view showing a droplet applying apparatus.
  • FIG. 2 is a schematic view showing a substrate.
  • FIG. 3 is a schematic diagram showing an inspection state by the inspection unit.
  • FIG. 4A is a schematic diagram illustrating a dropping state of droplets discharged from the nozzles of the coating head to the same position.
  • FIG. 4B is a schematic view showing a state in which a plurality of droplets dropped sequentially on the substrate are deposited on the inspection substrate.
  • FIG. 4C is a schematic diagram showing an image formed by a plurality of droplets.
  • FIG. 5 is a schematic diagram showing the dropping state of the obliquely discharged droplets.
  • FIG. 6A is a schematic diagram showing a dropping state of droplets discharged from a nozzle of a conventional coating head.
  • FIG. 6B is a schematic view of a state in which a plurality of droplets dropped in sequence on the substrate are accumulated while being slightly displaced in the moving direction of the inspection substrate.
  • FIG. 6C is a schematic diagram illustrating an image formed by a plurality of liquid droplets that are slightly displaced in the movement direction.
  • FIG. 7 is a schematic diagram showing a conventional drop state of obliquely discharged droplets.
  • FIG. 1 is a schematic diagram showing a droplet coating apparatus
  • FIG. 2 is a schematic diagram showing a substrate
  • FIG. 3 is a schematic diagram showing an inspection state by an inspection unit
  • FIGS. 4A to 4C are droplets ejected from nozzles of a coating head.
  • FIG. 5 is a schematic diagram showing a dropping state of previously ejected droplets.
  • the product substrate K that is the object to be applied is in a horizontal state (in FIG. 1, the surface of the substrate K is along the X-axis direction and the Y-axis direction orthogonal thereto).
  • An axis moving mechanism 4 a plurality of coating heads 5 that eject coating liquid such as ink as droplets E toward the substrate K on the moving table 2, an imaging unit 6 that images the droplets E on the substrate K,
  • An inspection unit 7 that performs an inspection based on the image of the droplet E imaged by the imaging unit 6, a display unit 8 that displays an image of the droplet E imaged by the imaging unit 6, and their Y-axis moving mechanism 3 , X axis moving mechanism 4, each coating head 5, imaging unit 6, inspection unit 7 and the like are controlled. It has a part 9.
  • the moving table 2 is stacked on the Y-axis moving mechanism 3 and is provided so as to be movable in the Y-axis direction.
  • the moving table 2 is moved in the Y-axis direction by the Y-axis moving mechanism 3.
  • a mechanism such as an electrostatic chuck or an adsorption chuck is provided to hold the substrate K. Also good.
  • a discharge stabilizing portion 2 a for stabilizing the discharge of each coating head 5 is provided at the end of the moving table 2.
  • the discharge stabilizing portion 2a includes a dummy discharge tray for each coating head 5, a wipe blade for wiping the discharge surface of each coating head 5, and the like.
  • the Y-axis moving mechanism 3 is a mechanism that guides and moves the moving table 2 in the Y-axis direction.
  • the Y-axis moving mechanism 3 is electrically connected to the control unit 9 and its driving is controlled by the control unit 9.
  • a linear motor moving mechanism using a linear motor as a driving source for example, a linear motor moving mechanism using a linear motor as a driving source, a feed screw moving mechanism using a motor as a driving source, or the like is used.
  • the X-axis moving mechanism 4 is a mechanism that guides and moves the Y-axis moving mechanism 3 in the X-axis direction.
  • the X-axis moving mechanism 4 is electrically connected to the control unit 9 and its driving is controlled by the control unit 9.
  • a linear motor moving mechanism using a linear motor as a driving source for example, a linear motor moving mechanism using a linear motor as a driving source, a feed screw moving mechanism using a motor as a driving source, or the like is used.
  • the coating head 5 is an inkjet head that discharges coating liquid supplied from a liquid tank (not shown) containing coating liquid such as ink as droplets E from a plurality of nozzles 11.
  • the coating head 5 includes a plurality of piezoelectric elements (not shown) corresponding to the plurality of nozzles 11 that discharge the droplets E, respectively.
  • the nozzles 11 are formed on the discharge surface in a straight line at a predetermined pitch (interval).
  • the number of nozzles 11 is about several tens to several hundreds
  • the diameter of the nozzles 11 is about several ⁇ m to several tens of ⁇ m
  • the pitch of the nozzles 11 is about several tens ⁇ m to several hundreds of ⁇ m. .
  • the coating head 5 is electrically connected to the control unit 9, and its driving is controlled by the control unit 9.
  • the coating head 5 ejects droplets (ink droplets) E from each nozzle 11 with the ejection amount controlled in accordance with the application of a driving voltage to each piezoelectric element.
  • the coating liquid has volatility.
  • This coating solution is composed of a solute that remains as a residue on the substrate K and a solvent that dissolves (disperses) the solute.
  • the ink that is the coating liquid is composed of various components such as a pigment, a solvent (ink solvent), a dispersant, and an additive.
  • the droplet applying apparatus 1 of the present embodiment targets a color filter substrate K of a liquid crystal display panel as an application target.
  • the product substrate K that is an actual product is provided with convex portions K ⁇ b> 1 that form a lattice pattern as a black matrix BM on the surface of the substrate K.
  • coloring ink any of R: red, G: green, and B: blue
  • a predetermined amount is applied to the concave portion K2 constituting the application range A.
  • the droplets applied to the concave portion K2 are dried to form a colored layer in the concave portion K2.
  • the convex portion K1 of the lattice pattern of the substrate K in FIG. 2 is provided with concave portions K2 of 15 columns horizontally and 6 rows vertically, but the lattice BM of the actual substrate K is 1000 columns horizontally or more and 1000 rows vertically.
  • the above-described recess K2 is provided.
  • the droplet applying apparatus 1 applies droplets to the concave portion K2 of the substrate K as follows.
  • the other is a coating head 5 for discharging a green ink
  • the other is a blue ink.
  • the pitch of the nozzles 11 of the coating head 5 for ejecting red ink coincides with the arrangement interval of the concave portions K2 to be colored red R
  • the pitch of the coating head 5 for ejecting blue ink is
  • the pitch of the coating head 5 for discharging the green ink coincides with the arrangement interval of the recesses K2 to be colored green G.
  • the substrate K on the moving table 2 is moved in the main scanning direction in the X-axis direction, and the Y-axis Sub-scanning movement in the direction.
  • the ink is ejected from the nozzles as a plurality of droplets in accordance with the timing at which the concave portions K2 to be colored by the nozzles 11 pass below the nozzles 11 of the coating heads 5.
  • the ink is ejected from the nozzles as a plurality of droplets in accordance with the timing at which the concave portions K2 to be colored by the nozzles 11 pass below the nozzles 11 of the coating heads 5.
  • five droplets E1 to E5 are ejected at a preset droplet timing t (dropping time interval).
  • the droplet applying apparatus 1 determines the application amount of the plurality of droplets E applied from the nozzle 11 of the application head 5 to the concave portion K2 of the product substrate K, as well as the imaging unit 6, the inspection unit 7, and the inspection substrate KA (FIG. In order to perform inspection using 3), the following configuration is provided.
  • the imaging unit 6 captures a plurality of droplets E that are ejected from the nozzle 11 and landed and integrated on the coating range A defined on the inspection substrate KA. It is a camera and functions as a detection unit that detects each droplet E.
  • the imaging unit 6 is electrically connected to the inspection unit 7 and the control unit 9, and the driving thereof is controlled by the control unit 9, and the captured image of each droplet E is transmitted to the inspection unit 7.
  • a CCD (Charge-Coupled Device) camera or the like is used as the imaging unit 6.
  • the inspection unit 7 Based on the images (detection results) of the plurality of droplets E transmitted from the imaging unit 6, the inspection unit 7 applies the entire application area (projected area) of the plurality of droplets E applied and integrated on the substrate K. ) Further, the inspection unit 7 obtains the application amount of each droplet E to the application range A based on the obtained entire application area of the plurality of droplets E.
  • the coating amount is calculated from the relational expression between the coating area of the droplet E and the coating amount (dropping amount). For example, the application area of the droplet E and the application amount are in a proportional relationship.
  • the relational expression is stored in a storage unit provided in the inspection unit 7. For example, a computer or the like is used as the inspection unit 7.
  • the application area of the entire plurality of droplets E can be obtained using a known image processing technique.
  • the unit area of the pixel is equal to the number of pixels corresponding to the image of the droplet E in the captured image.
  • the application area is calculated in accordance with the shape of the captured image of the droplet E. Therefore, the calculated application area is hardly affected by the shape of the captured image of the droplet E. This is preferable because the calculation accuracy of the non-coating area is improved.
  • the display unit 8 is a display device that displays various images such as captured images of a plurality of droplets E.
  • the display unit 8 is electrically connected to the inspection unit 7.
  • a liquid crystal display or a CRT display is used as the display unit 8.
  • the inspection result of the inspection unit 7 on the display unit 8 for example, the projected area of a plurality of droplets E dropped onto the substrate K and integrated, the coating amount calculated from the projected area, or the calculated coating amount
  • the quality information (difference from a preset application amount) or the like may be displayed.
  • the control unit 9 includes a microcomputer that intensively controls each unit, and a storage unit that stores application information related to application, various programs, and the like (none of which are shown).
  • the application information includes a predetermined application pattern such as a dot pattern, an inclination angle of the application head 5, information regarding the ejection frequency of the application head 5, and the moving speed of the substrate K.
  • application information for manufacturing application and application information for inspection application are stored in the storage unit.
  • the control unit 9 of the droplet applying apparatus 1 inspects the application amount of the plurality of droplets E applied from the nozzle 11 of the application head 5 to the concave portion K2 of the product substrate K with high accuracy. In order to adjust the discharge amount of the droplet E from each nozzle 11 so that the application amounts of the plurality of droplets discharged from the nozzle 11 to the concave portion K2 of the product substrate K are the same, the following operation is performed. .
  • Inspection board KA An inspection substrate KA prepared separately from the product substrate K is used.
  • the inspection substrate KA has the same shape as the one concave portion K2 of the product substrate K and an application range A having the same size.
  • the number of droplets to be dropped in the application range A is defined as the number of droplets (for example, five droplets) applied to one concave portion K2 of the product substrate K.
  • the surface of the inspection substrate KA is preferably water-repellent.
  • the application range A may be physically provided on the inspection substrate KA or may be provided virtually.
  • each of the droplets E1 to E5 is deposited on the same position of the inspection substrate KA and forms a circular shape in plan view as a whole.
  • the dropping timing t of the plurality of droplets E1 to E5 is set to the same timing as the dropping timing t of the plurality of droplets E1 to E5 on the product substrate K.
  • the plurality of droplets E1 to E5 are shown as if they are stacked in order for convenience, but actually the plurality of droplets E1 to E5 are dropped onto the substrate KA. Every time they are mixed and integrated.
  • Each application range A of the inspection substrate KA is positioned immediately below the imaging unit 6, and a plurality of droplets E1 to E5 that are ejected from the nozzle 11 and dropped into the application range A are integrated. An image is taken for each range A.
  • the inspection unit 7 determines whether or not the image is circular based on an image obtained by integrating the plurality of droplets E1 to E5 captured by the imaging unit 6.
  • a circle does not indicate only a perfect perfect circle, but includes a circle included in a predetermined allowable range. Whether or not the images of the integrated droplets E1 to E5 are circular is determined as follows, for example.
  • straight lines (eight straight lines) radially extending at equal angular intervals, for example, 45 ° intervals, with the center of gravity of the images of the integrated droplets E1 to E5 as the center are the outer edges of the images of the droplets E1 to E5.
  • the distances to the intersecting positions are obtained, respectively, and if the difference between the maximum value and the minimum value of the obtained eight values is within the allowable range, the distance is assumed to be circular.
  • the allowable range is arbitrary, but is preferably within 10% of the average value of the eight values.
  • the total application area (projected area) of the integrated droplets E1 to E5 is obtained, and the application amount of the droplets E1 to E5 is obtained based on this application area.
  • the inspection unit 7 includes the droplets E1 to E5 discharged from the nozzle 11 of the coating head 5 as shown in FIG. Then, it is determined that the discharge direction includes droplets discharged obliquely with respect to the vertical line. In this case, even if the amount of the integrated droplets E1 to E5 is the same as when the droplets are dropped in a circle, the projected area obtained from the captured image may be different from that of the circle. Without calculating the application amount based on the image, the droplets E1 to E5 are applied again to the other application range A, and the imaging process and the inspection process are performed again.
  • the controller 9 adjusts the discharge amount of the droplet E from each nozzle 11 so that the application amounts of the plurality of droplets E1 to E5 discharged from each nozzle 11 are the same.
  • the coating amount of droplets E1 to E5 from the central nozzle 11 (for example, N3) is used as a reference value, and other nozzles ( For example, application of piezoelectric elements corresponding to each of the other nozzles N1, N2, N4, and N5 so that the coating amount of the droplets E1 to E5 from N1, N2, N4, and N5) matches the above-described reference value.
  • the voltage is adjusted, and the discharge amount of the droplet E from these other nozzles N1, N2, N4, N5 is adjusted.
  • each of the droplets E1 to E5 dropped in sequence on the inspection substrate KA is deposited on the same position in the coating range A.
  • the droplets E1 to E5 land on the inspection substrate KA, the droplets E1 to E5 do not include the influence of variations in the moving speed of the inspection substrate KA, and the inspection substrate KA is caused by the viscosity, concentration, etc. of the droplets. Does not include the effect of droplet dragging in the direction of movement.
  • the droplets in which these droplets E1 to E5 are integrated have reduced movement speed variations and variations in the coating area caused by the dragging, so that the entire coating area of the droplets E1 to E5 is reduced.
  • the inspection accuracy of the coating amount is improved. Therefore, the coating accuracy of the droplet E on the product substrate K can be improved.
  • the coating amount is obtained from the coating area of the entire image in which the plurality of droplets E1 to E5 are integrated, the coating area is expanded and the liquid volume is increased as compared with the case where the coating area is one droplet. Since the error of the droplet discharge amount is integrated into the application amount by the number of droplets, the application amount can be easily calculated and the inspection of the application amount can be performed with high accuracy.
  • the dropping timing t (dropping time interval) of the plurality of droplets E1 to E5 discharged from the nozzle 11 of the coating head 5 to the inspection substrate KA is set to a plurality of product substrates K corresponding to the inspection substrate KA.
  • the droplets that have landed on the surface of the substrate KA are made spherical and difficult to spread regardless of the viscosity, concentration, etc.
  • By suppressing the influence of the variation in the coating area caused by the variation in the number of droplets it is possible to further improve the inspection accuracy of the entire coating area of the droplets E1 to E5 and thus the coating amount.
  • the number of droplets dropped on the application range A of the inspection substrate KA is the number of droplets applied to one recess of the product substrate K (for example, five droplets E1 to E5).
  • the inspection conditions for the entire coating area of the droplets E1 to E5, and thus the coating amount, can be brought close to the actual application conditions, and the inspection accuracy can be further improved.
  • the discharge state of the droplet E (for example, E5) discharged from the nozzle 11 of the coating head 5 is an abnormal discharge oblique state (FIG. 5) in which the discharge direction of the droplet E5 is oblique to the vertical line.
  • the droplet E5 is displaced from the droplets E1 to E4, and the entire image of the droplets E1 to E5 becomes an ellipse outside the circular range, or the droplets E1 to E4 and the droplet E5 are separated from each other.
  • the entire image of the droplets E1 to E5 at the time of abnormality is clearly different from the image of the perfect circle at normal time, and it is possible to easily determine whether the ejection state is normal or abnormal.
  • Such an entire image of the droplets E1 to E5 at the time of abnormality has a larger application area (projected area) than a circular image at the time of normality, so that the ejection amount of the droplet E can be accurately determined. It cannot be adjusted.
  • the calculation accuracy of the application amount obtained from the captured image is lowered, but the application amount is calculated based on the image of the droplet E determined to be abnormal by the above-described determination. Therefore, it is possible to prevent a poor adjustment of the discharge amount of the droplet E.
  • the embodiment of the present invention has been described in detail with reference to the drawings.
  • the specific configuration of the present invention is not limited to this embodiment, and even if there is a design change or the like without departing from the gist of the present invention. It is included in the present invention.
  • the inspection of the application area of a plurality of droplets applied to a predetermined application range of the substrate from the nozzle of the application head, and thus the application amount may be performed on the product substrate without using the inspection substrate.

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  • Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
PCT/JP2009/067801 2008-10-15 2009-10-14 液滴塗布方法及び装置 WO2010044429A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010533916A JP5497654B2 (ja) 2008-10-15 2009-10-14 液滴塗布方法及び装置
CN200980140127.0A CN102176980B (zh) 2008-10-15 2009-10-14 液滴涂敷方法及装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008265837 2008-10-15
JP2008-265837 2008-10-15

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WO2010044429A1 true WO2010044429A1 (ja) 2010-04-22

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KR102686388B1 (ko) * 2017-02-01 2024-07-18 세메스 주식회사 액적 토출량 조절 방법, 액적 토출량 조절 장치 및 이를 포함하는 액적 토출 장치
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