TW201026402A - Method and apparatus for applying droplet - Google Patents

Method and apparatus for applying droplet Download PDF

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Publication number
TW201026402A
TW201026402A TW98134910A TW98134910A TW201026402A TW 201026402 A TW201026402 A TW 201026402A TW 98134910 A TW98134910 A TW 98134910A TW 98134910 A TW98134910 A TW 98134910A TW 201026402 A TW201026402 A TW 201026402A
Authority
TW
Taiwan
Prior art keywords
coating
droplets
substrate
droplet
inspection
Prior art date
Application number
TW98134910A
Other languages
Chinese (zh)
Other versions
TWI442979B (en
Inventor
Azusa Hirano
Yasutsugu Tsuruoka
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Publication of TW201026402A publication Critical patent/TW201026402A/en
Application granted granted Critical
Publication of TWI442979B publication Critical patent/TWI442979B/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0451—Control methods or devices therefor, e.g. driver circuits, control circuits for detecting failure, e.g. clogging, malfunctioning actuator
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04558—Control methods or devices therefor, e.g. driver circuits, control circuits detecting presence or properties of a dot on paper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0456—Control methods or devices therefor, e.g. driver circuits, control circuits detecting drop size, volume or weight
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04581—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/09—Ink jet technology used for manufacturing optical filters

Landscapes

  • Physics & Mathematics (AREA)
  • Coating Apparatus (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

The total application area of a plurality of droplets applied onto a substrate within a predetermined application range from a nozzle of an application head is detected with high accuracy, and the quantity of droplets jetted from the nozzle is adjusted with high accuracy. In the droplet applying method, at the time of jetting a plurality of droplets (E1-E5) within a predetermined application range (A) on a substrate (KA) from a nozzle (11) of an application head (5), a plurality of droplets (E1-E5) jetted from the nozzle (11) are dropped on the same positions within the predetermined application range (A) on the substrate (KA).

Description

201026402 六、發明說明： 【發明所屬之技術領域】 技術領域 本發明係有關於一種液滴塗佈方法及裝置。 C先前技術】 背景技術 迄今，採用喷墨塗佈方法而製作濾色片用基板之技 術，如專利文獻1所揭露，已有一種將塗佈頭之噴嘴所吐 出之複數液滴（墨水）塗佈於基板表面上已劃設之凹部者。已 塗佈於凹部之液滴則將乾燥而於凹部内形成著色層。 先前技術文獻 【專利文獻1】日本專利特開平第9-230129號公報 【發明内容3 發明概要 發明欲解決之課題 • 為確保以專利文獻1所揭露之技術製作之濾色片用基 板之品質，必須朝基板之各凹部正確滴下所需量之液滴， 而需要可以南精度調整塗佈頭之各噴嘴所吐出之液滴量之 技術。 習知技術則如第6 A圖所示，係先求出由塗佈頭之各喷 嘴1按一定之滴下時間（滴下時間間隔)依序吐出而滴至檢查 用基板KA之預定塗佈範圍A(相當於產品用基板κ之凹部之 範圍）之複數液滴E(諸如E1〜E5之5滴）之塗佈面積（投影面 積）’再依據該塗佈面積而求取前述液滴E1~E5之塗佈量而 201026402 加以檢查。 然而’習知技術係、在由塗佈頭之喷嘴1朝檢查用基板 KA之疋之塗佈範圍A吐出複數液滴Ei〜B時，使檢查用 基板KA相對喷嘴1而按—定之移動速度v進行相對移動。 因此，依序朝檢查用基板KA上滴下之各液滴m〜E5將 朝檢查用基板KA之移動方向漸次略微移位而堆積（第6B 圖），該等液滴E1〜E5整體將形成蛋形之影像（第6C圖）。 此時相鄰之液滴£1七之塗佈間隔p即便在前述滴下 時間P-疋時’亦將受檢查用基板KA之移動速度之偏差、 液滴之黏度、濃度等所導致液滴朝檢查用基板ka之移動方 向之引曳之影響而產生偏差。 因此，堆積於檢查用基板ΚΑ上之液滴£1〜Ε5之蛋形影 像將因檢查用基板ΚΑ之移動速度之偏差、液滴之黏度、濃 度等所導致液滴朝檢查用基板ΚΑ之移動方向之引曳而改 變長度，並損及液滴El〜Ε5整體之塗佈面積，甚至塗佈量之 檢查精度。 又，塗佈頭之噴嘴1所吐出之液滴Ε(諸如Ε5)之吐出狀 態則如第7圖所示，前述液滴Ε 5之吐出方向對垂直線成傾斜 狀態之傾斜吐出之異常狀態時，液滴E1〜E5g體之蛋形影像 之長度與正常吐出狀態下之正常蛋形影像相比，將較為擴 大。然而，前述正常時與異常時之影像差異係蛋形影像長 度之單純之擴大程度上之差別，而難以加以明確判別，故 進行吐出狀態之正常與異常之判別甚為困難。 本發明之課題即在以高精度檢出由塗佈頭之噴嘴朝基 201026402 =疋、佈範31塗佈之複數液滴之整體之塗佈面積，並 以高精度調整來自噴嘴之液滴之吐出量。 用以欲解決課題之手段 為解決上述課題，本發明可提供一種液滴塗佈方法， 係於基板上之預定塗佈範圍塗佈液滴者，包含以下步驟： 拍攝步驟概括拍攝來自設於塗佈頭上之喷嘴所吐出而塗 佈^前述塗佈範圍内之複數液滴；求取步驟，依據已拍攝 # 之刚述複數液滴之影像，而求取該等液滴整體的塗佈積面 積，及調整步驟，依據已求出之塗佈面積而調整來自前述 f嘴之液相吐出4 ;由前述塗佈頭之喷嘴朝基板上之預 f塗佈範圍吐出前述複數液滴時，係使前述喷嘴所吐出之 刚述複數液滴於前述預定塗佈範圍内之同—位置滴下。 又，本發明並可提供一種液滴塗佈裝置，係於基板上 2預定塗佈範圍塗佈液滴者，包含有：移動機構，可使包 含噴嘴之塗佈頭與基板在沿前述基板表面之方向上相對移 ❹ 冑#攝。卩’概括拍攝由前述噴嘴所吐出而塗佈於基板上 之預疋塗佈範圍的複數液滴；檢查部，可依據拍攝部所拍 攝之則述複數液滴之影像，而求取該等液滴整體的塗佈面 積’及控制部，可控制前述塗佈頭、移動機構、拍攝部及 檢查。卩，别述控制部將在由塗佈頭之喷嘴朝前述預定塗佈 圍吐出複數液滴時，控制前述塗佈頭與前述移動機構之 驅動以使由前述噴嘴所吐出之上述複數液滴於前述預定 塗佈範圍内之同一位置滴下。 發明效果 5 201026402 依據本發明，即可以高精度檢測出由塗佈頭之喷嘴朝 基板之預定塗佈塗佈之複數液滴整體之附著面積，並 以高精度調整來自噴嘴之液滴之吐出量，甚至亦可提昇塗 佈精度。 圖式簡單說明 第1圖係顯示液滴塗佈裝置之模式圖。 第2圖係顯示基板之模式圖。 第3圖係顯示檢查部之檢查狀態之模式圖。 第4A圖係顯示由塗佈頭之喷嘴朝同—位置吐出之液滴 之滴下狀態之模式圖。 ' 第4B圖係已朝基板上依序滴下之複數液滴已堆積於檢 查用基板上之狀態之模式圖。 第4C圖係顯示複數液滴所構成之影像之模式圖。 第5圖係顯示已傾斜吐出之液滴之滴下狀態之模式圖。 第6A圖係顯示習知之塗佈頭之喷嘴所吐出之液滴之滴 下狀態之模式圖。 第6B圖係已朝基板上依序滴下之複數液滴已朝檢查用 基板之移動方向漸次略微移位而堆積後之狀態之模式圖。 第6C圖係顯示已朝移動方向漸次略微移位之複數液滴 所構成之影像之模式圖。 第7圖係顯示習知之已傾斜吐出之液滴之滴下狀態之 模式圖。 【實施方式】 用以實施發明之形態 201026402 第1圖係顯示液滴塗佈裝置之模式圖，第2圖係顯示基 板之模式圖，第3圖係顯示檢查部之檢查狀態之模式圖第 4A〜4C圖係顯示塗佈頭之喷嘴所吐出之液滴之滴下狀態之 模式圖，第5圖係顯示已先吐出之液滴之滴下狀態之模式 圖。 [實施例] 液滴塗佈裝置1 一如第1圖所示，包含可在水平狀態（第 • 1圖中，基板κ之表面沿行X軸方向及與其垂直之γ軸方向之 狀Μ下載置塗佈對象物之產品用基板κ之移動台2、可保持 忒移動台2而朝γ軸方向加以移動之γ軸移動機構3、可經該 Υ軸移動機構3而使移動台2朝X軸方向移動之X轴移動機構 4、可朝移動台2上之基板Κ吐出墨水等塗佈液之液滴Ε之複 數塗佈頭5、可拍攝基板κ上之液滴£之拍攝部6、可進行基 於該拍攝部6所拍攝之液滴Ε之影像之檢查之檢查部7、可顯 不拍攝部6所拍攝之液滴Ε之影像之顯示部8、可控制前述γ 镰 轴移動機構3、Χ軸移動機構4、各塗佈頭5、拍攝部6及檢查 部7等之控制部9。 移動台2係積層於γ軸移動機構3上而設成可朝γ軸方 向移動者。该移動台2係藉Υ軸移動機構3而可朝Υ轴方向移 動。另，移動台2可藉基板κ之自 重而加以載置，但不限於 此*舉例δ之’為保持該基板Κ，亦可設置靜電夾頭或吸著 &頭等機構。前述移動台2之端部設有可使各塗佈頭5之吐 出安定之吐出安定部2a。前述吐出安定部2a包含各塗佈頭5 之_擬吐出用之托盤及可刮淨各塗佈頭5之吐出面之刮刀 201026402 等。 轴移動機構3係可朝γ軸方向導引移動么 動之機構。該Υ轴移動機構3與控制部9電性連:，复驅動^ 控制部9㈣㈣。另’㈣移滅構3可採料如以線性馬 之 達為驅動動力之祕馬祕滅構或以‘«為驅動動力 輸送螺桿移動機構等。 X軸移動機構4係可朝χ轴方向導引γ軸移動機構3而使 其移動之機構。該X軸移動機構4與控制部9電性連接，其驅 動由控制部9加以控制。另，χ軸移動機構何採用諸如以= 性馬達為_動力之線性馬達移關構或以馬達為駆動動 力之輸送螺桿移動機構等。 塗佈頭5係可由複數之噴嘴丨丨分別吐出收納墨水等塗 佈液之液體槽（未圖示）所供給之塗佈液之液_之喷墨 頭。前述塗佈頭5於内部設有分別對應可吐出液滴ε之複數 喷嘴11之複數之壓電元件（未圖示）。 各噴嘴11按預定間距（間隔)排成直線一列狀而形成於 吐出面上。舉财之’喷嘴11之數量可為數十個至數百個 左右，喷嘴11之直徑則為數㈣至數十㈣左右，進而，噴 嘴u之間距則為數十至數百左右。 前述塗佈頭5與控制部9電性連接，其驅動由控制部9加 以控制。塗佈頭5可對應驅動電㈣各壓電元件之施加而在 液滴（墨水滴）E之吐出量已受控制之狀態下由各喷嘴^加 以吐出。在此，塗佈液具有揮發性。前述塗佈液係由作為 殘留物而可殘留於基板K上之溶質、可使前述溶質溶解（分 201026402 散)之溶媒所構成。舉例言之，作為塗佈液之墨水係由顏 料、溶劑（墨水溶劑）、分散劑及添加劑等各種成分所構成。 在此，本實施例之液滴塗佈裝置1係以液晶顯示面板之 渡色片用基板κ作為塗佈對象。作為實際產A之產品用基板 K一如第2圖所示，於基板κ表面上設有構成作為黑矩陣BM 之格子狀之圖形之凸部κι。其次，將液滴塗佈裝置丨之塗佈 頭5之噴嘴U所吐出之液滴狀之著色用之墨水(r:紅色、 • 綠色、B :藍色之任一種墨水），依預定量塗佈於已藉凸部 K1而劃設並構成塗佈範圍a之凹部K2。 已塗佈於前述凹部K2之液滴將乾燥而於凹部&2内形 成著色層。第2圖之基板κ之格子狀圖形之凸部尺丨設有橫向 b列、縱向6行之凹部Κ2，但實際之基板Κ之格子ΒΜ設有 羊灵向1000列以上、縱向1000行以上之凹部Κ2。 液滴塗佈裝置1將對基板Κ之凹部Κ2—如下述般塗佈 液滴。 • 即’液滴塗佈裝置1所包含之3個塗佈頭5中，—係紅色 墨水吐出用之塗佈頭5，另一係綠色墨水吐出用之塗佈頭 5，再一則係藍色墨水吐出用之塗佈頭5，紅色墨水吐出用 之塗佈頭5之噴嘴11之間距與應著色紅色r之凹部Κ2之配 置間隔一致，藍色墨水吐出用之塗佈頭5之間距則與應著色 藍色Β之凹部Κ2之配置間隔一致，綠色墨水吐出用之塗佈 頭5之間距則與應著色綠色G之凹部Κ2之配置間隔—致。 對於上述之塗佈頭5，由控制部9控制Υ軸移動機構3、 Χ轴移動機構4,即可使移動台2上之基板Κ朝X軸方向進行 201026402 主掃瞄移動，並朝γ軸方向進行副掃瞄移動。 其次，主掃8¾移動中，將配合應為前述喷嘴11所著色 之凹部K2通過各塗佈頭5之各喷嘴11之下方之時間，而由前 述喷嘴吐出墨水之複數液滴。此時，舉例言之，係按已預 設之液滴時間t (滴下時間間隔）吐出E1〜E 5之5滴液滴。 藉此，即可對凹部K2内按預定量塗佈應著色之顏色之 墨水。重複上述動作，即可對應基板K上之全部凹部反2而 塗佈有色墨水。 然而，液滴塗佈裝置1為使用拍攝部6 '檢查部7及檢查 用基板KA(第3圖）檢查由塗佈頭5之噴嘴u朝產品用基板κ 之凹部Κ2塗佈之複數液滴Ε之塗佈量，而包含以下構造。 另，拍攝部6—如第3圖所示，係可概括拍攝喷嘴 吐出而附著於設定在檢查用基板KA上之塗佈範圍A並已一 體化之複數液滴E之拍攝相機，並作為可檢出各液滴E之檢 出部而作用。該拍攝部6與檢查部7及控制部9電性連接，其 驅動由控制部9加以控制，所拍攝之各液滴E之影像則將發 送至檢查部7。另，拍攝部6可採用諸如CCD(Charge c〇upled Device)相機等。 檢查部7可依據由拍攝部6送至之複數液滴£之影像(檢 出L果）’而求得已塗佈於基板κ上並已一體化之複數液滴E 整體之塗佈面積(投影面積）。進而，檢查部7可依據已求得 之複數液滴£整體之塗佈面積而求出各液滴Ε對前述塗佈範 圍Α之塗佈量。在此’前述塗佈量係由液滴Ε之塗佈面積與 塗佈量（滴下量）之關係式而算出者。舉例言之，液滴E與塗 201026402 佈面積與塗佈量成比例關係。前述關係 所包含之記憶部中 、轉於檢查部7 另，檢查部7可採用諸如 另，複數液滴E整體之塗佈面積可 ^專 技術而求得，舉例_ a知之影像處理 所對應之像素數= 可爾影像中液滴E之影像 面積之方法，或財 而求㈣值作為塗佈201026402 VI. Description of the Invention: TECHNICAL FIELD The present invention relates to a droplet coating method and apparatus. C. Prior Art Conventionally, a technique for producing a substrate for a color filter by an inkjet coating method has been disclosed. As disclosed in Patent Document 1, there has been a method of coating a plurality of droplets (ink) discharged from a nozzle of a coating head. A recess that has been laid on the surface of the substrate. The droplets that have been applied to the recesses are dried to form a colored layer in the recess. CITATION LIST OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION In order to secure the quality of the substrate for a color filter produced by the technique disclosed in Patent Document 1, It is necessary to properly drop the required amount of droplets toward the respective recesses of the substrate, and it is necessary to adjust the amount of droplets discharged from the respective nozzles of the coating head with a high degree of precision. As shown in Fig. 6A, the conventional technique is to first determine the predetermined coating range A of the inspection substrate KA by sequentially ejecting each of the nozzles 1 of the coating head at a predetermined dropping time (dropping time interval). The coating area (projected area) of a plurality of droplets E (such as 5 drops of E1 to E5) corresponding to the range of the concave portion of the substrate κ of the product is determined by the above-mentioned droplets E1 to E5. The amount of coating is checked by 201026402. However, in the conventional technique, when the plurality of droplets Ei to B are ejected from the coating range A of the coating head nozzle 1 toward the inspection substrate KA, the inspection substrate KA is moved at a predetermined speed with respect to the nozzle 1. v Relative movement. Therefore, each of the droplets m to E5 which are dropped onto the inspection substrate KA in this order gradually shifts slightly toward the moving direction of the inspection substrate KA (Fig. 6B), and the droplets E1 to E5 form an egg as a whole. Image of shape (Fig. 6C). At this time, the coating interval p of the adjacent droplets of the first and second times, even at the time of the dropping time P-疋, is caused by the deviation of the moving speed of the substrate KA to be inspected, the viscosity of the droplet, the concentration, and the like. The influence of the influence of the direction of the movement of the substrate ka is checked to cause a deviation. Therefore, the egg-shaped image of the droplets £1 to Ε5 deposited on the inspection substrate 将 moves the droplets toward the inspection substrate due to variations in the moving speed of the inspection substrate 、, viscosity of the droplets, concentration, and the like. The direction is changed to change the length, and the coating area of the entire droplets El to Ε5 is damaged, and the inspection accuracy of the coating amount is even. Further, as shown in Fig. 7, the discharge state of the droplet Ε (e.g., Ε5) discharged from the nozzle 1 of the coating head is as shown in Fig. 7, and the discharge direction of the droplet Ε 5 is obliquely inclined to the vertical line. The length of the egg-shaped image of the droplets E1 to E5g is larger than that of the normal egg-shaped image in the normal discharge state. However, the difference in image between the normal time and the abnormal time is the difference in the degree of expansion of the egg-shaped image length, and it is difficult to discriminate clearly. Therefore, it is difficult to judge the normality and abnormality of the discharge state. The object of the present invention is to accurately detect the coating area of the entire plurality of droplets coated by the nozzle of the coating head toward the base 201026402 = 疋, and the pattern 31, and adjust the discharge of the droplets from the nozzle with high precision. the amount. Means for Solving the Problems In order to solve the above problems, the present invention can provide a droplet coating method for coating a droplet on a predetermined coating range on a substrate, comprising the following steps: The nozzle on the cloth head is spouted and coated with a plurality of droplets in the coating range; the obtaining step is based on the image of the plurality of droplets of the photographed #, and the coated area of the droplets is determined. And an adjustment step of adjusting the liquid phase discharge 4 from the f-mouth according to the obtained coating area; and when the nozzle of the coating head discharges the plurality of droplets toward the pre-f coating range on the substrate, The plurality of droplets discharged from the nozzle are dropped at the same position within the predetermined coating range. Moreover, the present invention can also provide a droplet coating device for coating a droplet on a predetermined coating range on a substrate, comprising: a moving mechanism for allowing a coating head including the nozzle and the substrate to be along the surface of the substrate In the direction of relative movement ❹# photo.卩 'Generally photographing a plurality of droplets of a pre-coating range applied to the substrate by the nozzle; the inspection unit can determine the liquid according to the image of the plurality of droplets captured by the imaging unit The coating area, the control unit, and the control unit can control the coating head, the moving mechanism, the imaging unit, and the inspection. In other words, when the plurality of liquid droplets are discharged from the nozzle of the coating head toward the predetermined coating circumference, the control unit controls the driving of the coating head and the moving mechanism to cause the plurality of droplets discharged from the nozzle to The same position within the predetermined coating range is dropped. According to the present invention, it is possible to accurately detect the adhesion area of the entire plurality of droplets which are applied by the nozzle of the coating head toward the substrate, and adjust the discharge amount of the droplets from the nozzle with high precision. It can even improve the coating accuracy. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a droplet applying device. Fig. 2 is a schematic view showing a substrate. Fig. 3 is a schematic view showing the inspection state of the inspection unit. Fig. 4A is a schematic view showing a state in which droplets ejected from the nozzle of the coating head toward the same position are dropped. Fig. 4B is a schematic view showing a state in which a plurality of droplets which have been successively dropped onto the substrate have been deposited on the substrate for inspection. Figure 4C is a schematic diagram showing an image of a plurality of droplets. Fig. 5 is a schematic view showing the dropping state of the liquid droplet which has been obliquely discharged. Fig. 6A is a schematic view showing the dropping state of the liquid droplets discharged from the nozzle of the conventional coating head. Fig. 6B is a schematic view showing a state in which a plurality of droplets which have been successively dropped onto the substrate are gradually displaced slightly toward the moving direction of the inspection substrate. Fig. 6C is a schematic view showing an image composed of a plurality of droplets which have been slightly shifted in the moving direction. Fig. 7 is a pattern diagram showing the dropping state of a conventionally ejected liquid droplet. [Embodiment] Forms for carrying out the invention 201026402 Fig. 1 is a schematic view showing a droplet application device, Fig. 2 is a schematic view showing a substrate, and Fig. 3 is a pattern diagram showing an inspection state of an inspection unit. The ~4C drawing shows a pattern of the dropping state of the liquid discharged from the nozzle of the coating head, and FIG. 5 is a schematic view showing the dropping state of the liquid which has been ejected first. [Embodiment] As shown in Fig. 1, the droplet applying device 1 includes a state in which the surface of the substrate κ is in the horizontal direction (in the γ-axis direction of the row X direction and perpendicular thereto) in the horizontal state. The moving table 2 of the product substrate κ on which the object to be coated is placed, the γ-axis moving mechanism 3 capable of moving the 忒 moving table 2 in the γ-axis direction, and the moving table 2 facing the X via the y-axis moving mechanism 3 The X-axis moving mechanism 4 that moves in the axial direction, the plurality of coating heads 5 that can eject a droplet of a coating liquid such as ink onto the substrate on the moving table 2, and the imaging unit 6 that can capture the droplets on the substrate κ The inspection unit 7 that can perform the inspection based on the image of the droplet 拍摄 captured by the imaging unit 6 , the display unit 8 that can display the image of the droplet 拍摄 captured by the imaging unit 6 , and the γ-axis movement mechanism 3 can be controlled. The control unit 9 such as the x-axis moving mechanism 4, each of the coating heads 5, the imaging unit 6, and the inspection unit 7. The mobile station 2 is laminated on the γ-axis moving mechanism 3 and is movable in the γ-axis direction. The mobile station 2 is movable in the x-axis direction by the spindle movement mechanism 3. Alternatively, the mobile station 2 can be loaded by the weight of the substrate κ. However, it is not limited to this. For example, in order to maintain the substrate, an electrostatic chuck or a suction & head mechanism may be provided. The end portion of the moving table 2 is provided to allow the discharge of each coating head 5 to be stabilized. The discharge holding portion 2a includes a tray for discharging the respective coating heads 5, a blade 201026402 capable of scraping the discharge surface of each coating head 5, and the like. The shaft moving mechanism 3 is capable of facing the γ axis. The direction guiding guide moves the mechanism. The cymbal moving mechanism 3 is electrically connected to the control unit 9 : a complex drive control unit 9 (4) (4). The other '(4) detachment structure 3 can be driven by a linear horse. The secret mechanism of the horse is destroyed or the power transmission screw moving mechanism is driven by '«. The X-axis moving mechanism 4 is a mechanism that can guide the γ-axis moving mechanism 3 to move in the x-axis direction. The X-axis moving mechanism 4 It is electrically connected to the control unit 9, and its driving is controlled by the control unit 9. In addition, the cymbal moving mechanism adopts a conveying screw moving mechanism such as a linear motor that is driven by a motor or a motor that is a pulsating power. Etc. The coating head 5 can be spit out from a plurality of nozzles. An ink jet head for a liquid of a coating liquid supplied from a liquid tank (not shown) such as ink, wherein the coating head 5 is provided therein with a plurality of nozzles 11 corresponding to the plurality of nozzles 11 capable of discharging the droplets ε. Piezoelectric element (not shown) Each nozzle 11 is formed in a line in a line at a predetermined pitch (interval) and formed on the discharge surface. The number of nozzles 11 can be tens to hundreds of nozzles. The diameter of 11 is from several (four) to several tens (four), and further, the distance between the nozzles u is from several tens to several hundreds. The coating head 5 is electrically connected to the control portion 9, and the driving thereof is controlled by the control portion 9. The cloth head 5 can be ejected by the respective nozzles in a state where the discharge amount of the liquid droplets (ink droplets) E is controlled in response to the application of the piezoelectric elements (4). Here, the coating liquid has a volatility. The coating liquid is composed of a solute which can remain on the substrate K as a residue, and a solvent which can dissolve the solute (divided into 201026402). For example, the ink as the coating liquid is composed of various components such as a pigment, a solvent (ink solvent), a dispersant, and an additive. Here, the droplet applying apparatus 1 of the present embodiment is a coating target for the coloring sheet substrate κ of the liquid crystal display panel. As the product substrate K of the actual product A, as shown in Fig. 2, a convex portion κ1 constituting a lattice-like pattern of the black matrix BM is provided on the surface of the substrate κ. Next, the ink for droplet formation (r: red, green, B: blue) which is discharged by the nozzle U of the coating head 5 of the droplet application device is coated by a predetermined amount. The cloth is laid out by the convex portion K1 and constitutes a concave portion K2 of the coating range a. The droplets which have been applied to the aforementioned recess K2 are dried to form a colored layer in the recesses & The convex portion of the lattice pattern of the substrate κ in Fig. 2 is provided with a concave portion Κ2 in the horizontal b-row and the vertical 6-row. However, the actual substrate Κ is provided with a sheep stalk of 1000 columns or more and a vertical direction of 1000 rows or more. Concave Κ2. The droplet applying device 1 applies a droplet to the concave portion 2 of the substrate 如 as follows. • In the three coating heads 5 included in the droplet coating device 1, the coating head 5 for red ink discharge, the other coating head 5 for green ink discharge, and the other blue. The coating head 5 for ink ejection, the distance between the nozzles 11 of the coating head 5 for discharging the red ink is the same as the arrangement interval of the concave portion 应2 to be colored red r, and the distance between the coating heads 5 for discharging the blue ink is The arrangement of the concave portions 应2 of the colored blue enamels is uniform, and the distance between the coating heads 5 for green ink ejection is set to be different from the arrangement of the concave portions Κ2 for the green color G to be colored. In the above-described coating head 5, the control unit 9 controls the spindle movement mechanism 3 and the spindle movement mechanism 4, so that the substrate 上 on the moving table 2 can be moved to the X-axis direction by the 201026402 main scanning movement toward the γ-axis. The direction is subscanned. Next, during the main sweep 83⁄4 movement, a plurality of droplets of ink are ejected from the nozzles by the time when the concave portion K2 colored by the nozzle 11 passes below the nozzles 11 of the respective coating heads 5. At this time, for example, 5 drops of E1 to E5 are discharged at a predetermined droplet time t (dropping time interval). Thereby, the ink to be colored in a predetermined amount can be applied to the concave portion K2. By repeating the above operation, the colored ink can be applied corresponding to all the concave portions on the substrate K. However, the droplet applying apparatus 1 inspects the plurality of droplets applied from the nozzle u of the coating head 5 toward the concave portion Κ2 of the product substrate κ by using the imaging unit 6' inspection unit 7 and the inspection substrate KA (Fig. 3). The coating amount of the crucible includes the following structure. In addition, as shown in FIG. 3, the imaging unit 6 can generally capture a photographing camera in which the nozzles are ejected and adhered to the coating range A set on the inspection substrate KA and integrated with the plurality of droplets E, and The detection portion of each droplet E is detected and functions. The imaging unit 6 is electrically connected to the inspection unit 7 and the control unit 9, and the driving is controlled by the control unit 9, and the image of each of the captured droplets E is sent to the inspection unit 7. Further, the photographing section 6 can employ, for example, a CCD (Charge C〇upled Device) camera or the like. The inspection unit 7 can determine the coating area of the entire plurality of droplets E that have been applied to the substrate κ based on the image of the plurality of droplets (detected L fruit) sent from the imaging unit 6 ( shadow area). Further, the inspection unit 7 can determine the coating amount of each droplet Ε to the coating range 依据 based on the total coated area of the plurality of droplets thus obtained. Here, the coating amount is calculated from the relationship between the coating area of the droplets and the coating amount (drop amount). For example, droplet E and coating 201026402 are proportional to the coating area. In the memory unit included in the above relationship, the inspection unit 7 can be used, for example, the coating area of the plurality of droplets E can be determined by a specific technique, for example, the image processing corresponding to the image processing The number of pixels = the image area of the droplet E in the image, or the value of the (four) value as the coating

適之圓形圖形V面=之影像配適圓形圖形，並_ 方法。 積作為液滴E之塗佈面積而加以求出之 刚之由像素數求出塗佈面積之方法，由於配合 :拍攝影像之形狀而算出塗佈面積，故算出之塗佈面積不 攝影像之形狀之影響，而可提昇塗佈面積之 汁算精度，故較為適用。 顯:部8係可顯示已拍攝之複數液滴E之影像等各種影 像之顯不裝置。該顯示部8與檢查部7電性連接。另，顯示 可採用諸如液晶顯示H或CRT顯示器等。 另，該顯示部8亦可顯示檢查部7之檢查結果，諸如已 朝基板K上滴下並一體化之複數液滴E之投影面積、由前述 投影面積算出之塗佈量或已算出之塗佈量之優劣資訊（與 已預設之塗佈量之差）等。 控制部9包含可集中控制各部之微電腦，以及可記憶與 塗佈相關之塗佈資訊及各種程式等之記憶部（均未圖示）。塗 佈資訊包含點矩陣圖型等預定塗佈圖形、塗佈頭5之傾斜角 度、塗佈頭5之吐出頻率及基板κ之移動速度之相關資訊 等。前述塗佈資訊則於記憶部中儲存有製造塗佈用之塗佈 201026402 資訊及檢查塗佈用之塗佈資訊（包含檢查用之圖形及溶媒 環境形成用之圖形）。 液滴塗佈裝置1之控制部9為以高精度檢查由塗佈頭5 之喷嘴11朝產品用基板K之凹部K2塗佈之複數液滴£之塗 佈量’甚至調整來自各噴嘴11之液滴E之吐出量，以使塗佈 頭5之各噴嘴11朝產品用基板κ之凹部K2吐出之複數液滴E 之塗佈量彼此一致，而動作如下。Appropriate circular graphics V-face = the image is fitted with a circular graphic, and _ method. The method of obtaining the coating area from the number of pixels as the coating area of the droplet E is obtained, and the coating area is calculated by matching the shape of the image, so that the calculated coating area is not imaged. The influence of the shape can improve the accuracy of the coating area, so it is more suitable. The display unit 8 displays a display device for various images such as the image of the plurality of droplets E that have been captured. The display unit 8 is electrically connected to the inspection unit 7. Alternatively, the display may employ, for example, a liquid crystal display H or a CRT display. Further, the display unit 8 may display the inspection result of the inspection unit 7, such as the projected area of the plurality of droplets E that have been dropped onto the substrate K and integrated, the coating amount calculated from the projected area, or the calculated coating. The pros and cons of the quantity (the difference from the preset coating amount). The control unit 9 includes a microcomputer that can centrally control each unit, and a memory unit (none of which is shown) that can memorize coating information and various programs related to coating. The coating information includes a predetermined coating pattern such as a dot matrix pattern, a tilt angle of the coating head 5, a discharge frequency of the coating head 5, and information on the moving speed of the substrate κ. In the coating information, the coating information for manufacturing coating 201026402 and the coating information for coating (including the pattern for inspection and the pattern for forming the solvent environment) are stored in the memory unit. The control unit 9 of the droplet applying device 1 inspects the coating amount of the plurality of droplets applied by the nozzle 11 of the coating head 5 toward the concave portion K2 of the product substrate K with high precision, and even adjusts the respective nozzles 11 The amount of discharge of the droplets E is such that the coating amounts of the plurality of droplets E discharged from the respective nozzles 11 of the coating head 5 toward the concave portion K2 of the product substrate κ coincide with each other, and the operation is as follows.

(A) 檢查用基板KA 使用在產品用基板K以外另行準備之檢查用基板。 © 檢查用基板KA已設有與產品用基板κ之1凹部艮2相同形狀 且相同大小之塗佈範圍A。應朝該塗佈範圍A滴下之液滴數 設為對產品用基板K之1凹部K2塗佈之液滴數（諸如5滴）。 另，檢查用基板KA表面宜為撥水性者。另，塗佈範圍a可 為物理上設在檢查用基板KA上者，亦可為虛設者。 (B) 檢查調整順序 (1)吐出步驟 於移動台2上載置檢查用基板KA，並控制γ軸移動機構 ® 3、X軸移動機構4而使檢查用基板ΚΑ相對塗佈頭5而在沿行 其表面之方向（χγ方向）上相對進行移動，並於塗佈頭5下方 依序定位檢查用基板ΚΑ之各塗佈範圍Α，塗佈頭5之各噴嘴 11則對檢查用基板ΚΑ之各塗佈範圍Α滴下複數液滴Ε(諸如 Ε1 〜Ε5)。 此時，則如第4A、4Β圖所示，不使塗佈頭5與檢查用 基板KA互為相對移動，而朝檢查用基板KA之塗佈範圍A内 12 201026402 之同一位置滴下喷嘴n所吐出之複數液滴E1〜E5。各液滴 E1〜E5則如第4C圖所示，堆積於檢查用基板ka之同一位置 上而整體構成平面觀察下之圓形。 另，複數液滴Ε1-Ε5之滴下時間t則設成與對產品用基 板K之複數之液滴E1-E5之滴下時間t相同之時間。 另，第4A、4B圖中，複數之液滴E1〜E5雖為方便起見 而看似依序積層，但實際上複數之液滴£1〜£5每回朝檢查用 φ 基板KA滴下均混合而一體化。 (2) 拍攝步驟 於拍攝部6下方依序定位檢查用基板KA之各塗佈範圍 A，並就各塗佈範圍A拍攝噴嘴丨丨所吐出而朝各塗佈範圍a 滴下並已一體化之複數液滴El〜E5。 (3) 檢查步驟 藉檢查部7而依據拍攝部6所拍攝之複數液滴E1〜E5已 一體化後之影像，判別前述影像是否圓形。 • 另，在此，所謂圓形，非僅指完全之正圓，而包含已 預s又之谷§午範圍内所包括之圓形。其次’已一體化之複數 液滴Ε1〜Ε5之影像是否圓形之判定，諸如進行如下。 即，以已一體化之複數液滴Ε1-Ε5之影像之重心為中 心，而分別求出其之與按等角度間隔、諸如45。間隔延伸成 放射狀之直線(8條直線)與液滴Ei〜Ε5之影像外緣交錯之位 置之距離’若求出之8值之最大值與最小值之差在容許範圍 内’則為圓形。容許範圍雖可任意設定，但可大致為8值之 平均值之10%以内。 13 201026402 右景/像為圓形’則求出前述已-體化之液滴E1〜E5整體 之塗佈面積(投影面積），進而依據該塗佈面積而求出 前述液 滴E1〜E5之塗佈量。 另檢查。P7在拍攝部6所拍攝之複數液滴£1〜£5之影像 非圓升/日夺貝|J如第5圖所示，判定塗佈頭5之喷嘴u所吐出 之液滴E1〜E5中’包含吐出方向對垂直線成傾斜狀態而吐出 之液滴jt匕時’即便已一體化之液滴ε^ε5之量與按圓形滴 下時相同’由其拍攝影像求出之投影面積亦可能與圓形者 不同，故將不基於該影像而算出塗佈量，而將對其它塗佈 範圍Α再度塗佈液滴Ε1〜Ε5，而重新進行拍攝步驟及檢查步 驟。 (4)調整步驟 藉控制部9調整來自各噴嘴丨丨之液滴£之吐出量，以使 各喷嘴11所吐出之複數液滴Ε1〜Ε5之塗佈量彼此一致。 舉例言之，喷嘴11為5個時，構成塗佈頭5之一列之各 喷嘴11中，以來自中央之喷嘴U(諸如Ν3)之液滴Ε1〜Ε5之塗 佈量為基準值，為使來自其它噴嘴(諸如Nl、Ν2、Ν4、Ν5) 之液滴Ε1〜Ε5之塗佈量與上述之基準值一致，而調整該等其 它喷嘴Nl、Ν2、Ν4、Ν5個別所對應之電源單元之施加電 壓’並調整來自該等其它噴嘴N1、Ν2、Ν4、Ν5之液滴Ε之 吐出量。 依據本實施例，可獲致以下之作用效果。 (a)由塗佈頭5之喷嘴11朝檢查用基板ΚΑ之塗佈範圍a 吐出複數液滴，諸如液滴E1〜E5時，不使塗佈頭5與基板互 201026402 為相對移動，而朝檢查用基板KA之塗佈範圍A内之同一位 置滴下噴嘴11所吐出之複數液滴E1〜E5。 因此，朝檢查用基板KA上依序滴下之各液滴El〜E5將 堆積於塗佈範圍A内之同一位置上。該等液滴El~E5附著於 檢查用基板KA上時，將不受檢查用基板KA之移動速度之 偏差之影響，亦不受液滴之黏度、濃度等所導致液滴朝檢 查用基板KA之移動方向之引曳之影響。 φ 故而，該等液滴E1〜E5—體化而成之液滴係已抑制移動 速度之偏差及前述引曳所導致塗佈面積之偏差者，故液滴 E1〜E5整體之塗佈面積甚至塗佈量之檢查精度可獲提昇。因 此，可提昇對產品用基板K之液滴E之塗佈精度。 又，由複數之液滴E1〜E5 —體化後整體之影像之塗佈面 積求出塗佈量，故與由1液滴之塗佈面積求出時相比，除可 擴大塗佈面積，液滴之吐出量之誤差亦僅有液滴數程度累 計於塗佈量而呈現，故可輕易進行塗佈量之算出，並可以 φ 高精度進行塗佈量之檢查。 另，由塗佈頭5之喷嘴11朝檢查用基板KA吐出之複數 之液滴E1〜E5之滴下時間t(滴下時間間隔）設成與對前述檢 查用基板KA所對應之產品用基板K之複數之液滴E1-E5之 滴下時間t相同之時間，即可使塗佈量之檢查條件與實際之 塗佈條件接近，而更為提昇其檢查精度。 又，使檢查用基板KA表面具撥水性，則不拘液滴之黏 度、濃度等，均可使基板KA表面所附著之液滴為球狀而不 易擴散，並抑制液滴之擴散情形之偏差所導致塗佈面積之 15 201026402 偏差之影響，故可更為提昇液滴El〜E5整體之塗佈面積甚至 塗佈量之檢查精度。 (b) 朝檢查用基板KA之塗佈範圍A滴下之液滴數設成 對產品用基板K之1凹部塗佈之液滴數(諸如E1〜E5之5滴）， 可使液滴E1〜E5整體之塗佈面積甚至塗佈量之檢查條件與 實際之塗佈條件接近，以進而提昇其檢查精度。(A) Inspection substrate KA The inspection substrate prepared separately from the product substrate K is used. © The inspection substrate KA is provided with the same size and coating range A as the recess 艮2 of the product substrate κ. The number of droplets to be dropped in the coating range A is set to the number of droplets (such as 5 drops) applied to the concave portion K2 of the substrate K for the product. Further, the surface of the inspection substrate KA is preferably a water repellency. Further, the coating range a may be physically provided on the inspection substrate KA or may be a dummy. (B) Inspection adjustment procedure (1) Discharge step The inspection substrate KA is placed on the mobile station 2, and the γ-axis movement mechanism 3 and the X-axis movement mechanism 4 are controlled to cause the inspection substrate ΚΑ to be applied to the coating head 5 The direction of the surface (χγ direction) is relatively moved, and the respective application ranges of the inspection substrate ΚΑ are sequentially positioned below the coating head 5, and the nozzles 11 of the coating head 5 are placed on the inspection substrate. A plurality of droplets (such as Ε1 to Ε5) are dropped from each coating range. At this time, as shown in FIGS. 4A and 4B, the coating head 5 and the inspection substrate KA are not moved relative to each other, and the nozzle n is dropped to the same position in the coating range A of the inspection substrate KA at 12 201026402. The plurality of droplets E1 to E5 are discharged. As shown in Fig. 4C, each of the droplets E1 to E5 is deposited on the same position of the inspection substrate ka, and the entire shape is circular in plan view. Further, the dropping time t of the plurality of droplets Ε1 - Ε5 is set to be the same time as the dropping time t of the plurality of droplets E1 - E5 of the product substrate K. In addition, in the 4A and 4B drawings, the plurality of droplets E1 to E5 seem to be sequentially stacked for convenience, but in practice, the plurality of droplets of £1 to £5 are dropped every time toward the inspection φ substrate KA. Mixed and integrated. (2) In the imaging step, the respective application ranges A of the inspection substrate KA are sequentially positioned below the imaging unit 6, and the ejection nozzles are ejected in the respective application ranges A, and are dropped toward the respective application ranges a and integrated. The plurality of droplets El to E5. (3) Inspection procedure The inspection unit 7 determines whether or not the image is circular in accordance with the integrated image of the plurality of droplets E1 to E5 captured by the imaging unit 6. • In addition, here, the so-called circle, not only refers to the complete perfect circle, but contains the circle included in the range of the s. Next, the determination of whether or not the image of the integrated droplets Ε1 to Ε5 is circular is performed as follows. That is, the center of gravity of the image of the integrated plurality of droplets Ε1-Ε5 is taken as the center, and the distance between them is equal to the equiangular interval, such as 45. The distance between the straight line extending from the radial direction (eight straight lines) and the position where the outer edges of the droplets Ei to Ε5 are interlaced is 'rounded if the difference between the maximum value and the minimum value of the eight values is within the allowable range' shape. Although the allowable range can be arbitrarily set, it can be approximately within 10% of the average value of the eight values. 13 201026402 The right scene/image is a circle', and the coating area (projected area) of the entire body-formed droplets E1 to E5 is obtained, and the droplets E1 to E5 are obtained based on the coating area. The amount of coating. Also check. The image of the plurality of droplets of the P7 photographed by the imaging unit 6 of £1 to £5 is not rounded up/received. As shown in Fig. 5, the droplets E1 to E5 discharged from the nozzle u of the coating head 5 are determined. In the case of the liquid droplet jt匕 in which the discharge direction is inclined to the vertical line, even if the integrated droplet ε^ε5 is the same as when the circle is dropped, the projected area obtained from the image is also It may be different from the round one, so the coating amount will not be calculated based on the image, and the droplets Ε1 to Ε5 will be applied again to the other coating ranges, and the imaging step and the inspection step will be repeated. (4) Adjustment step The control unit 9 adjusts the discharge amount of the droplets from each nozzle £ so that the coating amounts of the plurality of droplets Ε1 to Ε5 discharged from the respective nozzles 11 coincide with each other. For example, when there are five nozzles 11, in each of the nozzles 11 constituting one of the coating heads 5, the coating amount of the droplets Ε1 to Ε5 from the central nozzle U (such as Ν3) is used as a reference value. The coating amount of the droplets Ε1 to Ε5 from other nozzles (such as N1, Ν2, Ν4, Ν5) is the same as the above-mentioned reference value, and the power supply units corresponding to the other nozzles N1, Ν2, Ν4, Ν5 are adjusted. The voltage ' is applied and the amount of discharge from the droplets of the other nozzles N1, Ν2, Ν4, Ν5 is adjusted. According to this embodiment, the following effects can be obtained. (a) When a plurality of droplets, such as droplets E1 to E5, are ejected from the nozzle 11 of the coating head 5 toward the coating range a of the inspection substrate, the coating head 5 and the substrate mutual 201026402 are not moved relative to each other. The plurality of droplets E1 to E5 discharged from the nozzle 11 are dropped at the same position in the coating range A of the inspection substrate KA. Therefore, each of the droplets E1 to E5 which are sequentially dropped onto the inspection substrate KA is deposited at the same position in the coating range A. When the droplets El to E5 are attached to the inspection substrate KA, the droplets are not affected by the variation in the moving speed of the inspection substrate KA, and the droplets are not affected by the viscosity or concentration of the droplets, and the droplets are directed toward the inspection substrate KA. The influence of the direction of movement. φ Therefore, the droplets formed by the droplets E1 to E5 have suppressed the deviation of the moving speed and the deviation of the coating area caused by the above-mentioned drawing, so that the entire coating area of the droplets E1 to E5 is even The inspection accuracy of the coating amount can be improved. Therefore, the coating accuracy of the droplet E of the substrate K for the product can be improved. Further, since the coating amount is obtained from the coating area of the entire image after the plurality of droplets E1 to E5 are formed, the coating area can be enlarged as compared with the case where the coating area of one droplet is obtained. The error in the discharge amount of the liquid droplets is also present only when the number of liquid droplets is accumulated in the coating amount, so that the calculation of the coating amount can be easily performed, and the coating amount can be inspected with high precision. In addition, the dropping time t (dropping time interval) of the plurality of droplets E1 to E5 discharged from the nozzle 11 of the coating head 5 toward the inspection substrate KA is set to be the substrate K for the product corresponding to the inspection substrate KA. When the dropping time E1-E5 is the same as the dropping time t, the inspection condition of the coating amount can be made close to the actual coating condition, and the inspection accuracy is further improved. In addition, when the surface of the test substrate KA is water-repellent, the droplets adhering to the surface of the substrate KA can be made spherical without being easily dispersed, and the dispersion of the droplets can be suppressed. As a result of the deviation of the coating area of 15 201026402, the inspection accuracy of the coating area or even the coating amount of the entire droplets El to E5 can be further improved. (b) The number of droplets dropped in the coating range A of the inspection substrate KA is set to the number of droplets applied to the concave portion of the product substrate K (such as 5 drops of E1 to E5), so that the droplet E1 can be made. The inspection conditions of the coating area and even the coating amount of the entire E5 are close to the actual coating conditions, thereby further improving the inspection accuracy.

(c) 塗佈於檢查用基板KA之塗佈範圍A之複數液滴之影 像並非圓形時，則判定塗佈頭5之噴嘴11所吐出之複數液滴 E1〜E5中’包含液滴之吐出方向對垂直線成傾斜狀態而吐出 之液滴。(c) When the image of the plurality of droplets applied to the coating range A of the inspection substrate KA is not circular, it is determined that the plurality of droplets E1 to E5 discharged from the nozzle 11 of the coating head 5 contain 'droplets A droplet that is ejected in a direction in which the vertical line is inclined.

即’塗佈頭5之喷嘴11所吐出之液滴E(諸如E5)之吐出 狀態為該液滴E5之吐出方向對垂直線成傾斜狀態之傾斜吐 出之異常狀態（第5圖）時，液滴E5將相對液滴E1〜E4而移 位，而使液滴E1〜E5整體之影像形成圓形之範圍外之楕圓， 或呈現液滴E1〜E4與液滴E5分離之形態。因此，上述異常 時之液滴E1〜E5整體之影像與正常時之正圓之影像相比，將 明顯不同，而可輕易判別吐出狀態之正常與異常。 &上述之異常時之液滴m~E5整體之影像之塗佈面積(投 影面積)將切正常時之®形之影像’故無法iL確調整液^ E之吐出量。 七如上所述，包含傾斜吐出狀態之液滴時，由拍攝 求出之塗佈量之計算精度將降低，但藉上述之判別，則可 中止基於判別為異常之液滴E之影像計算塗佈量 液滴E之吐出量之調整不當。 故可預防 16 2〇1〇264〇2 (d)藉前逑(a)〜(c) ’而可就各喷嘴U以高精度檢查由該 等嘴嘴Π朝檢查用基板KA之塗佈範圍A吐出之複數液滴之 塗佈量’結果則可正確調整來自各喷嘴η之液滴之吐出 里以使由各噴嘴11朝基板之各塗佈範圍Α吐出而塗佈之複 數液滴之塗佈量彼此一致。 產業之可利用性In other words, when the discharge state of the liquid droplet E (such as E5) discharged from the nozzle 11 of the coating head 5 is an abnormal state (Fig. 5) in which the discharge direction of the liquid droplet E5 is inclined to the vertical line (Fig. 5), the liquid The drop E5 is displaced relative to the droplets E1 to E4, and the entire image of the droplets E1 to E5 is formed into a circle outside the circular range, or a form in which the droplets E1 to E4 are separated from the droplet E5. Therefore, the image of the entire droplets E1 to E5 at the time of the abnormality is significantly different from the image of the perfect circle at the normal time, and the normality and abnormality of the discharge state can be easily discriminated. & In the case of the above-mentioned abnormality, the coated area (projection area) of the entire image of the droplets m to E5 will be cut as the image of the normal shape at the time of the abnormality, so that the discharge amount of the adjustment liquid ^E cannot be confirmed. As described above, when the liquid droplets in the oblique discharge state are included, the calculation accuracy of the coating amount obtained by the imaging is lowered. However, by the above-described discrimination, the image calculation based on the droplets E determined to be abnormal can be suspended. The amount of discharge of the droplet E is not properly adjusted. Therefore, it is possible to prevent 16 2〇1〇264〇2 (d) by using the front (a) to (c) ', and it is possible to check the coating range of the test substrate KA from the nozzles with high precision for each nozzle U. As a result, the amount of application of the plurality of droplets discharged by A can accurately adjust the discharge of the droplets from the respective nozzles η so that the droplets coated by the nozzles 11 are applied to the respective coating ranges of the substrate to be coated. The amount of cloth is consistent with each other. Industry availability

以上，雖已參照圖式而詳細說明本發明之實施例，但 本發明之㈣構造並不受限於上述之實_，凡未逸脫本 發明要旨之範_之設計變更等，㈣本發明所包含。舉 例言之，由塗佈頭之噴嘴朝基板之—定之塗絲圍塗佈之 複數液滴之塗佈面積甚至塗佈量之檢查，亦可不使用檢查 用基板，而對產品用基板進行之。 L圖式簡單說明】 第1圖係顯示液滴塗佈裝置之模式圖。 第2圖係顯示基板之模式圖。 第3圖係顯示檢查部之檢查狀態之模式日Hereinabove, the embodiment of the present invention has been described in detail with reference to the drawings, but the structure of the present invention is not limited to the above-described embodiments, and the design changes and the like that do not fall away from the gist of the present invention, (4) the present invention Included. For example, the coating area or even the coating amount of the plurality of droplets coated by the nozzle of the coating head toward the substrate may be carried out on the substrate for the product without using the substrate for inspection. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a droplet applying device. Fig. 2 is a schematic view showing a substrate. Figure 3 shows the mode day of the inspection status of the inspection department.

第4 A圖係顯不由塗佈頭之喷嘴者B 角明同一位置吐出之液滴 之滴下狀態之模式圖。 第4B圖係已朝基板上依序滴下+ 卜之複數液滴已堆積於檢 查用基板上之狀態之模式圖。 第扣圖係顯示複數液滴所構成之影像之模式圖。 第5圖係顯示已傾斜吐出之该 滴之滴下狀態之模式 圖。 第6A圖係顯示習知之塗佈頭之嘴嘴所吐出之液滴之滴 17 201026402 下狀態之模式圖。 第6B圖係已朝基板上依序滴下之複數液滴已朝檢查用 基板之移動方向漸次略微移位而堆積後之狀態之模式圖。 第6C圖係顯示已朝移動方向漸次略微移位之複數液滴 所構成之影像之模式圖。 第7圖係顯示習知之已傾斜吐出之液滴之滴下狀態之 模式圖。 【主要元件符號說明 卜·液滴塗佈裝置 1…喷嘴 2…移動台 2a···吐出安定部 3"‘Y軸移動機構 轴移動機構 5…塗佈頭 6“·拍攝部 7…檢查部 8…顯示部 9…控制部 11···嗔嘴 Α…塗佈範圍 B…藍色 BM…黑矩陣、格子 丑、£145...液滴 G…綠色 K···產品用基板 KA···檢查用基板 K1···凸部 K2···凹部 M，2、N3、N4、N5...噴嘴 P···塗佈間隔 R···紅色 1…液滴時間、滴下時間 v…移動速度Fig. 4A is a schematic view showing the state in which the droplets ejected from the same position are not dropped by the nozzle B of the coating head. Fig. 4B is a schematic view showing a state in which a plurality of droplets of + Bu have been deposited on the substrate for inspection on the substrate. The first button shows a pattern diagram of the image formed by the plurality of droplets. Fig. 5 is a schematic view showing the state of the drop of the drop which has been obliquely discharged. Fig. 6A is a schematic view showing the state of the droplets discharged from the mouth of a conventional coating head. Fig. 6B is a schematic view showing a state in which a plurality of droplets which have been successively dropped onto the substrate are gradually displaced slightly toward the moving direction of the inspection substrate. Fig. 6C is a schematic view showing an image composed of a plurality of droplets which have been slightly shifted in the moving direction. Fig. 7 is a pattern diagram showing the dropping state of a conventionally ejected liquid droplet. [Main component code description, liquid droplet application device 1, nozzle 2, mobile station 2a, ... discharge and stabilization unit 3 " 'Y-axis movement mechanism shaft movement mechanism 5... coating head 6" · imaging unit 7 ... inspection unit 8...display unit 9...control unit 11···嗔嗔Α...application range B...blue BM...black matrix, lattice ugly, £145...drop G...green K···product substrate KA· - Inspection substrate K1 · · convex portion K2 · · concave portion M, 2, N3, N4, N5... nozzle P··· coating interval R··· red 1... droplet time, dripping time v …Moving speed

1818

Claims (1)

201026402 七、申請專利範圍： 1. 一種液滴塗佈方法，係於基板上之預定塗佈範圍塗佈液 滴者，其特徵在於，包含以下步驟： 拍攝步驟，概括拍攝來自設於塗佈頭上之喷嘴所吐 出而塗佈於前述塗佈範圍内之複數液滴； 求取步驟，依據已拍攝之前述複數液滴之影像，而 求取該等液滴整體的塗佈積面積；及 • 調整步驟，依據已求出之塗佈面積而調整來自前述 喷嘴之液滴的吐出量； 由前述塗佈頭之喷嘴朝基板上之預定塗佈範圍吐 出前述複數液滴時，係使前述喷嘴所吐出之前述複數液 滴於前述預定塗佈範圍内之同一位置滴下。 2.如申請專利範圍第1項之液滴塗佈方法，其中前述基板 係用以檢查液滴之塗佈狀態的檢查用基板， 於該檢查用基板檢查液滴之塗佈狀態後，則依據該 φ 檢查而於將塗佈溶液之產品用基板上設置用以塗佈由 塗佈頭之喷嘴所吐出的複數液滴而劃設之凹部， 於前述檢查用基板之預定塗佈範圍滴下的液滴數 係於產品用基板之1凹部塗佈之液滴數。 3.如申請專利範圍第1或2項之液滴塗佈方法，其中塗佈於 前述基板之預定塗佈範圍的複數液滴之影像不為圓形 時，則判定前述複數液滴中，由塗佈頭之噴嘴所吐出之 液滴包含吐出方向對垂直線成傾斜狀態而吐出之液滴。 4.如申請專利範圍第3項之液滴塗佈方法，其中前述塗佈 19 201026402 頭包含複數喷嘴，於前述調整步驟中，調整來自各喷嘴 之液滴的吐出量，以使由各喷嘴所吐出之複數液滴的塗 佈量彼此一致。 5. —種液滴塗佈裝置，係於基板上之預定塗佈範圍塗佈液 滴者，其特徵在於，包含有： 移動機構，可使包含噴嘴之塗佈頭與基板在沿前述 基板表面之方向上相對移動； 拍攝部，概括拍攝由前述噴嘴所吐出而塗佈於基板 上之預定塗佈範圍的複數液滴； 檢查部，可依據拍攝部所拍攝之前述複數液滴之影 像，而求取該等液滴整體的塗佈面積；及 控制部，可控制前述塗佈頭、移動機構、拍攝部及 檢查部； 前述控制部將在由塗佈頭之喷嘴朝前述預定塗佈 範圍吐出複數液滴時，控制前述塗佈頭與前述移動機構 之驅動，以使由前述喷嘴所吐出之上述複數液滴於前述 預定塗佈範圍内之同一位置滴下。 6. 如申請專利範圍第5項之液滴塗佈裝置，其中前述基板 係檢查用基板， 與該檢查用基板不同之產品用基板則包含用以塗 佈由塗佈頭之喷嘴所吐出的複數液滴而劃設之凹部， 於檢查用基板之預定塗佈範圍滴下的液滴數係於 產品用基板之1凹部塗佈之液滴數。 7. 如申請專利範圍第5或6項之液滴塗佈裝置，其中前述控 201026402 制部將在前述拍攝部所拍攝之前述複數液滴之影像不 為圓形時，判定前述複數液滴中，包含吐出方向對垂直 線成傾斜狀態而吐出之液滴。 8. 如申請專利範圍第5項之液滴塗佈裝置，其中前述控制 部可依據前述檢查部所求得之塗佈面積而調整來自前 述喷嘴之液滴的吐出量。 9. 如申請專利範圍第8項之液滴塗佈裝置，其中前述塗佈 頭包含複數喷嘴，前述控制部則可調整來自各喷嘴之液 滴的吐出量，以使由各喷嘴所吐出之複數液滴的塗佈量 彼此一致。 21201026402 VII. Patent application scope: 1. A droplet coating method for coating a droplet on a predetermined coating range on a substrate, characterized in that it comprises the following steps: a photographing step, which is generally taken from a coating head. a plurality of droplets that are ejected by the nozzle and coated in the coating range; and a step of obtaining a coating area of the entire droplet according to the image of the plurality of droplets that have been taken; and a step of adjusting a discharge amount of the liquid droplets from the nozzle according to the obtained coating area; and discharging the nozzle when the plurality of liquid droplets are discharged from the nozzle of the coating head toward a predetermined coating range on the substrate The plurality of droplets are dropped at the same position within the predetermined coating range. 2. The droplet coating method according to claim 1, wherein the substrate is a substrate for inspection for inspecting a coating state of a droplet, and after the inspection substrate is inspected for a coating state of the droplet, This φ inspection is provided with a concave portion which is formed by applying a plurality of liquid droplets discharged from the nozzle of the coating head to the product substrate for the coating solution, and a liquid which is dropped on the predetermined coating range of the inspection substrate. The number of drops is the number of droplets applied to the concave portion of the product substrate. 3. The droplet coating method according to claim 1 or 2, wherein, in the case where the image of the plurality of droplets applied to the predetermined coating range of the substrate is not circular, it is determined that the plurality of droplets are The droplets ejected from the nozzle of the coating head include droplets which are ejected in a direction in which the discharge direction is inclined to the vertical line. 4. The droplet coating method according to claim 3, wherein the coating 19 201026402 includes a plurality of nozzles, and in the adjusting step, adjusting the discharge amount of the droplets from the respective nozzles so that the nozzles are The coating amount of the plurality of discharged liquid droplets coincides with each other. 5. A droplet coating apparatus for coating a droplet on a predetermined coating range on a substrate, comprising: a moving mechanism for causing a coating head including the nozzle and the substrate to be along the surface of the substrate a relatively moving in the direction; the imaging unit generally captures a plurality of droplets of a predetermined coating range applied by the nozzle and applied to the substrate; and the inspection unit may be based on the image of the plurality of droplets captured by the imaging unit The coating area of the entire droplet is obtained; and the control unit controls the coating head, the moving mechanism, the imaging unit, and the inspection unit; and the control unit discharges the nozzle from the coating head toward the predetermined coating range In the case of a plurality of droplets, the driving of the coating head and the moving mechanism is controlled such that the plurality of droplets discharged from the nozzles are dropped at the same position within the predetermined coating range. 6. The liquid droplet coating apparatus according to claim 5, wherein the substrate-based inspection substrate, the product substrate different from the inspection substrate, includes a plurality of substrates for coating the nozzles of the coating head. The number of droplets dropped by the droplets and the number of droplets dropped on the predetermined coating range of the inspection substrate is the number of droplets applied to the concave portion of the product substrate. 7. The droplet applicator according to claim 5, wherein the control unit 201026402 determines that the plurality of droplets are not in a circular shape when the image of the plurality of droplets captured by the photographing unit is not circular. Contains droplets that are ejected in a direction in which the discharge direction is inclined to the vertical line. 8. The droplet applicator according to claim 5, wherein the control unit adjusts the discharge amount of the liquid droplets from the nozzle according to the coating area obtained by the inspection unit. 9. The droplet applicator according to claim 8, wherein the coating head comprises a plurality of nozzles, and the control unit adjusts a discharge amount of the droplets from the nozzles so that the plurality of nozzles discharge the plurality of nozzles. The coating amounts of the droplets coincide with each other. twenty one
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