WO2010044429A1

WO2010044429A1 - Method and apparatus for applying droplet

Info

Publication number: WO2010044429A1
Application number: PCT/JP2009/067801
Authority: WO
Inventors: 梓平野; 保次鶴岡
Original assignee: 芝浦メカトロニクス株式会社
Priority date: 2008-10-15
Filing date: 2009-10-14
Publication date: 2010-04-22
Also published as: KR101639459B1; JPWO2010044429A1; CN102176980B; CN102176980A; TWI442979B; TW201026402A; KR20110069864A; JP5497654B2

Abstract

The total application area of a plurality of droplets applied onto a substrate within a predetermined application range from a nozzle of an application head is detected with high accuracy, and the quantity of droplets jetted from the nozzle is adjusted with high accuracy. In the droplet applying method, at the time of jetting a plurality of droplets (E1-E5) within a predetermined application range (A) on a substrate (KA) from a nozzle (11) of an application head (5), a plurality of droplets (E1-E5) jetted from the nozzle (11) are dropped on the same positions within the predetermined application range (A) on the substrate (KA).

Description

Droplet application method and apparatus

The present invention relates to a droplet coating method and apparatus.

Conventionally, as a technique for manufacturing a color filter substrate using an inkjet coating method, as described in Patent Document 1, a plurality of liquid droplets (inks) ejected from nozzles of a coating head are partitioned on the surface of the substrate. Some are applied to the recesses. The droplets applied to the recesses are dried to form a colored layer in the recesses.

Japanese Patent Laid-Open No. 9-230129

In order to ensure the quality of the color filter substrate manufactured by the technique described in Patent Document 1, it is necessary to accurately drop a necessary amount of droplets into each recess of the substrate, and the droplets are discharged from each nozzle of the coating head. There is a demand for a technique for accurately adjusting the amount of droplets to be produced.

In the prior art, as shown in FIG. 6A, the liquid is sequentially ejected from each nozzle 1 of the coating head at a predetermined dropping timing (dropping time interval), and is applied to a predetermined coating range A of the inspection substrate KA (into the concave portion of the product substrate K). The application area (projected area) of a plurality of droplets E (for example, 5 droplets E1 to E5) dropped on the corresponding range) is obtained, and the application amount of these droplets E1 to E5 is obtained based on this application area and inspected. To do.

However, in the prior art, when the plurality of droplets E1 to E5 are ejected from the nozzle 1 of the coating head to the constant coating range A of the inspection substrate KA, the inspection substrate KA is moved relative to the nozzle 1 at a constant movement speed v. Relative movement.

For this reason, the droplets E1 to E5 dropped in sequence on the inspection substrate KA are deposited with a slight displacement in the moving direction of the inspection substrate KA (FIG. 6B), and the entire droplets E1 to E5 are accumulated. Thus, an egg-shaped image is formed (FIG. 6C).

At this time, the coating pitch p of the adjacent droplets E1 to E5 is caused by variations in the moving speed of the inspection substrate KA, the viscosity, concentration, etc. of the droplets even if the above-described dropping timing p is constant. It varies according to the drag of the droplet in the moving direction of the inspection substrate KA.

Therefore, the oval images of the droplets E1 to E5 deposited on the inspection substrate KA are the moving directions of the inspection substrate KA due to variations in the movement speed of the inspection substrate KA, the viscosity, concentration, etc. of the droplets. The length of the liquid droplets is changed by dragging the liquid droplets on the liquid crystal, and the entire coating area of the liquid droplets E1 to E5, and thus the inspection accuracy of the coating amount is impaired.

Further, as shown in FIG. 7, the discharge state of the droplet E (for example, E5) discharged from the nozzle 1 of the coating head is an oblique discharge abnormal state in which the discharge direction of the droplet E5 is oblique with respect to the vertical line. In this case, the entire oval image length of the droplets E1 to E5 is enlarged as compared with the normal oval image in the normal ejection state. However, the difference between the normal image and the abnormal image is simply a difference in the degree of enlargement of the length of the oval image, and it is difficult to distinguish clearly. There are difficulties.

An object of the present invention is to detect the entire application area of a plurality of droplets applied from a nozzle of an application head to a predetermined application range of a substrate with high accuracy and accurately adjust the discharge amount of the droplets from the nozzle. There is.

In order to solve the above problems, the present invention is a droplet coating method for applying droplets to a predetermined coating range on a substrate,
A step of collectively imaging a plurality of liquid droplets ejected from a nozzle provided in an application head and applied to the application range;
Based on the captured images of the plurality of droplets, obtaining a total coating area of the droplets;
Having a step of adjusting the discharge amount of droplets from the nozzle based on the determined application area;
When discharging the plurality of droplets from a nozzle of the coating head to a predetermined coating range on the substrate, dropping the plurality of droplets discharged from the nozzle at the same position within the predetermined coating range. An object is to provide a droplet application method.

The present invention also provides a droplet applying apparatus for applying droplets to a predetermined application range on a substrate,
Moving means for relatively moving the coating head provided with the nozzle and the substrate in a direction along the surface of the substrate;
An imaging unit that collectively images a plurality of droplets ejected from the nozzle and applied to a predetermined application range on the substrate;
Based on the images of the plurality of droplets imaged by the imaging unit, an inspection unit for obtaining the entire application area of the droplets;
A control unit that controls the coating head, the moving unit, the imaging unit, and the inspection unit;
When the control unit discharges a plurality of droplets from the nozzle of the coating head to the predetermined coating range, the control unit drops the plurality of droplets discharged from the nozzle at the same position in the predetermined coating range. The present invention also provides a droplet coating apparatus that controls driving of the coating head and the moving means.

According to the present invention, the total landing area of a plurality of droplets applied from a nozzle of the coating head to a predetermined coating range of the substrate is detected with high accuracy, and the ejection amount of the droplets from the nozzle is adjusted with high accuracy. As a result, the coating accuracy can be improved.

FIG. 1 is a schematic view showing a droplet applying apparatus. FIG. 2 is a schematic view showing a substrate. FIG. 3 is a schematic diagram showing an inspection state by the inspection unit. FIG. 4A is a schematic diagram illustrating a dropping state of droplets discharged from the nozzles of the coating head to the same position. FIG. 4B is a schematic view showing a state in which a plurality of droplets dropped sequentially on the substrate are deposited on the inspection substrate. FIG. 4C is a schematic diagram showing an image formed by a plurality of droplets. FIG. 5 is a schematic diagram showing the dropping state of the obliquely discharged droplets. FIG. 6A is a schematic diagram showing a dropping state of droplets discharged from a nozzle of a conventional coating head. FIG. 6B is a schematic view of a state in which a plurality of droplets dropped in sequence on the substrate are accumulated while being slightly displaced in the moving direction of the inspection substrate. FIG. 6C is a schematic diagram illustrating an image formed by a plurality of liquid droplets that are slightly displaced in the movement direction. FIG. 7 is a schematic diagram showing a conventional drop state of obliquely discharged droplets.

1 is a schematic diagram showing a droplet coating apparatus, FIG. 2 is a schematic diagram showing a substrate, FIG. 3 is a schematic diagram showing an inspection state by an inspection unit, and FIGS. 4A to 4C are droplets ejected from nozzles of a coating head. FIG. 5 is a schematic diagram showing a dropping state of previously ejected droplets.

[Example]
As shown in FIG. 1, in the droplet applying apparatus 1, the product substrate K that is the object to be applied is in a horizontal state (in FIG. 1, the surface of the substrate K is along the X-axis direction and the Y-axis direction orthogonal thereto). The moving table 2 to be placed, the Y-axis moving mechanism 3 that holds the moving table 2 and moves it in the Y-axis direction, and the X that moves the moving table 2 in the X-axis direction via the Y-axis moving mechanism 3 An axis moving mechanism 4, a plurality of coating heads 5 that eject coating liquid such as ink as droplets E toward the substrate K on the moving table 2, an imaging unit 6 that images the droplets E on the substrate K, An inspection unit 7 that performs an inspection based on the image of the droplet E imaged by the imaging unit 6, a display unit 8 that displays an image of the droplet E imaged by the imaging unit 6, and their Y-axis moving mechanism 3 , X axis moving mechanism 4, each coating head 5, imaging unit 6, inspection unit 7 and the like are controlled. It has a part 9.

The moving table 2 is stacked on the Y-axis moving mechanism 3 and is provided so as to be movable in the Y-axis direction. The moving table 2 is moved in the Y-axis direction by the Y-axis moving mechanism 3. Although the substrate K is placed on the movable table 2 by its own weight, the present invention is not limited to this. For example, a mechanism such as an electrostatic chuck or an adsorption chuck is provided to hold the substrate K. Also good. At the end of the moving table 2, a discharge stabilizing portion 2 a for stabilizing the discharge of each coating head 5 is provided. The discharge stabilizing portion 2a includes a dummy discharge tray for each coating head 5, a wipe blade for wiping the discharge surface of each coating head 5, and the like.

The Y-axis moving mechanism 3 is a mechanism that guides and moves the moving table 2 in the Y-axis direction. The Y-axis moving mechanism 3 is electrically connected to the control unit 9 and its driving is controlled by the control unit 9. As the Y-axis moving mechanism 3, for example, a linear motor moving mechanism using a linear motor as a driving source, a feed screw moving mechanism using a motor as a driving source, or the like is used.

The X-axis moving mechanism 4 is a mechanism that guides and moves the Y-axis moving mechanism 3 in the X-axis direction. The X-axis moving mechanism 4 is electrically connected to the control unit 9 and its driving is controlled by the control unit 9. As the X-axis moving mechanism 4, for example, a linear motor moving mechanism using a linear motor as a driving source, a feed screw moving mechanism using a motor as a driving source, or the like is used.

The coating head 5 is an inkjet head that discharges coating liquid supplied from a liquid tank (not shown) containing coating liquid such as ink as droplets E from a plurality of nozzles 11. The coating head 5 includes a plurality of piezoelectric elements (not shown) corresponding to the plurality of nozzles 11 that discharge the droplets E, respectively.

The nozzles 11 are formed on the discharge surface in a straight line at a predetermined pitch (interval). For example, the number of nozzles 11 is about several tens to several hundreds, the diameter of the nozzles 11 is about several μm to several tens of μm, and the pitch of the nozzles 11 is about several tens μm to several hundreds of μm. .

The coating head 5 is electrically connected to the control unit 9, and its driving is controlled by the control unit 9. The coating head 5 ejects droplets (ink droplets) E from each nozzle 11 with the ejection amount controlled in accordance with the application of a driving voltage to each piezoelectric element. Here, the coating liquid has volatility. This coating solution is composed of a solute that remains as a residue on the substrate K and a solvent that dissolves (disperses) the solute. For example, the ink that is the coating liquid is composed of various components such as a pigment, a solvent (ink solvent), a dispersant, and an additive.

Here, the droplet applying apparatus 1 of the present embodiment targets a color filter substrate K of a liquid crystal display panel as an application target. As shown in FIG. 2, the product substrate K that is an actual product is provided with convex portions K <b> 1 that form a lattice pattern as a black matrix BM on the surface of the substrate K. Then, coloring ink (any of R: red, G: green, and B: blue) ejected as droplets from the nozzles 11 of the coating head 5 of the droplet coating apparatus 1 is partitioned by the convex portion K1. Then, a predetermined amount is applied to the concave portion K2 constituting the application range A.

The droplets applied to the concave portion K2 are dried to form a colored layer in the concave portion K2. The convex portion K1 of the lattice pattern of the substrate K in FIG. 2 is provided with concave portions K2 of 15 columns horizontally and 6 rows vertically, but the lattice BM of the actual substrate K is 1000 columns horizontally or more and 1000 rows vertically. The above-described recess K2 is provided.

The droplet applying apparatus 1 applies droplets to the concave portion K2 of the substrate K as follows.

That is, of the three coating heads 5 provided in the droplet coating apparatus 1, one is a coating head 5 for discharging a red ink, the other is a coating head 5 for discharging a green ink, and the other is a blue ink. The pitch of the nozzles 11 of the coating head 5 for ejecting red ink coincides with the arrangement interval of the concave portions K2 to be colored red R, and the pitch of the coating head 5 for ejecting blue ink is The pitch of the coating head 5 for discharging the green ink coincides with the arrangement interval of the recesses K2 to be colored green G.

By controlling the Y-axis moving mechanism 3 and the X-axis moving mechanism 4 by the controller 9 with respect to such a coating head 5, the substrate K on the moving table 2 is moved in the main scanning direction in the X-axis direction, and the Y-axis Sub-scanning movement in the direction.

Then, during the main scanning movement, the ink is ejected from the nozzles as a plurality of droplets in accordance with the timing at which the concave portions K2 to be colored by the nozzles 11 pass below the nozzles 11 of the coating heads 5. At this time, for example, five droplets E1 to E5 are ejected at a preset droplet timing t (dropping time interval).

Thereby, a predetermined amount of color ink to be colored is applied in the recess K2. By repeating such an operation, the color ink corresponding to all the concave portions K2 on the substrate K is applied.

However, the droplet applying apparatus 1 determines the application amount of the plurality of droplets E applied from the nozzle 11 of the application head 5 to the concave portion K2 of the product substrate K, as well as the imaging unit 6, the inspection unit 7, and the inspection substrate KA (FIG. In order to perform inspection using 3), the following configuration is provided.

As shown in FIG. 3, the imaging unit 6 captures a plurality of droplets E that are ejected from the nozzle 11 and landed and integrated on the coating range A defined on the inspection substrate KA. It is a camera and functions as a detection unit that detects each droplet E. The imaging unit 6 is electrically connected to the inspection unit 7 and the control unit 9, and the driving thereof is controlled by the control unit 9, and the captured image of each droplet E is transmitted to the inspection unit 7. For example, a CCD (Charge-Coupled Device) camera or the like is used as the imaging unit 6.

Based on the images (detection results) of the plurality of droplets E transmitted from the imaging unit 6, the inspection unit 7 applies the entire application area (projected area) of the plurality of droplets E applied and integrated on the substrate K. ) Further, the inspection unit 7 obtains the application amount of each droplet E to the application range A based on the obtained entire application area of the plurality of droplets E. Here, the coating amount is calculated from the relational expression between the coating area of the droplet E and the coating amount (dropping amount). For example, the application area of the droplet E and the application amount are in a proportional relationship. The relational expression is stored in a storage unit provided in the inspection unit 7. For example, a computer or the like is used as the inspection unit 7.

Note that the application area of the entire plurality of droplets E can be obtained using a known image processing technique. For example, the unit area of the pixel is equal to the number of pixels corresponding to the image of the droplet E in the captured image. There are a method of obtaining a value obtained by multiplying as a coating area, and a method of fitting a circular pattern to the image of the droplet E and obtaining the area of the most fitted circular pattern as the coating area of the droplet E.

In the case of the former method of obtaining the application area from the number of pixels, the application area is calculated in accordance with the shape of the captured image of the droplet E. Therefore, the calculated application area is hardly affected by the shape of the captured image of the droplet E. This is preferable because the calculation accuracy of the non-coating area is improved.

The display unit 8 is a display device that displays various images such as captured images of a plurality of droplets E. The display unit 8 is electrically connected to the inspection unit 7. For example, a liquid crystal display or a CRT display is used as the display unit 8.

Note that the inspection result of the inspection unit 7 on the display unit 8, for example, the projected area of a plurality of droplets E dropped onto the substrate K and integrated, the coating amount calculated from the projected area, or the calculated coating amount The quality information (difference from a preset application amount) or the like may be displayed.

The control unit 9 includes a microcomputer that intensively controls each unit, and a storage unit that stores application information related to application, various programs, and the like (none of which are shown). The application information includes a predetermined application pattern such as a dot pattern, an inclination angle of the application head 5, information regarding the ejection frequency of the application head 5, and the moving speed of the substrate K. As the application information, application information for manufacturing application and application information for inspection application (including a pattern for inspection and a pattern for forming a solvent atmosphere) are stored in the storage unit.

The control unit 9 of the droplet applying apparatus 1 inspects the application amount of the plurality of droplets E applied from the nozzle 11 of the application head 5 to the concave portion K2 of the product substrate K with high accuracy. In order to adjust the discharge amount of the droplet E from each nozzle 11 so that the application amounts of the plurality of droplets discharged from the nozzle 11 to the concave portion K2 of the product substrate K are the same, the following operation is performed. .

(A) Inspection board KA
An inspection substrate KA prepared separately from the product substrate K is used. The inspection substrate KA has the same shape as the one concave portion K2 of the product substrate K and an application range A having the same size. The number of droplets to be dropped in the application range A is defined as the number of droplets (for example, five droplets) applied to one concave portion K2 of the product substrate K. Note that the surface of the inspection substrate KA is preferably water-repellent. The application range A may be physically provided on the inspection substrate KA or may be provided virtually.

(B) Inspection Adjustment Procedure (1) Discharging Step The inspection substrate KA is placed on the moving table 2 and the Y-axis moving mechanism 3 and the X-axis moving mechanism 4 are controlled to apply the inspection substrate KA to the coating head 5. By moving relatively in the direction along the surface (XY direction), each application range A of the inspection substrate KA is positioned immediately below the coating head 5, and each application of the inspection substrate KA from each nozzle 11 of the coating head 5. A plurality of droplets E (for example, E1 to E5) are dropped on the range A.

At this time, as shown in FIGS. 4A and 4B, the coating head 5 and the inspection substrate KA are not moved relative to each other, and a plurality of droplets E1 to E5 discharged from the nozzle 11 are applied to the inspection substrate KA. Drip at the same position in A. As shown in FIG. 4C, each of the droplets E1 to E5 is deposited on the same position of the inspection substrate KA and forms a circular shape in plan view as a whole.

The dropping timing t of the plurality of droplets E1 to E5 is set to the same timing as the dropping timing t of the plurality of droplets E1 to E5 on the product substrate K.

4A and 4B, the plurality of droplets E1 to E5 are shown as if they are stacked in order for convenience, but actually the plurality of droplets E1 to E5 are dropped onto the substrate KA. Every time they are mixed and integrated.

(2) Imaging Step Each application range A of the inspection substrate KA is positioned immediately below the imaging unit 6, and a plurality of droplets E1 to E5 that are ejected from the nozzle 11 and dropped into the application range A are integrated. An image is taken for each range A.

(3) Inspection process The inspection unit 7 determines whether or not the image is circular based on an image obtained by integrating the plurality of droplets E1 to E5 captured by the imaging unit 6.

In addition, here, a circle does not indicate only a perfect perfect circle, but includes a circle included in a predetermined allowable range. Whether or not the images of the integrated droplets E1 to E5 are circular is determined as follows, for example.

That is, straight lines (eight straight lines) radially extending at equal angular intervals, for example, 45 ° intervals, with the center of gravity of the images of the integrated droplets E1 to E5 as the center are the outer edges of the images of the droplets E1 to E5. The distances to the intersecting positions are obtained, respectively, and if the difference between the maximum value and the minimum value of the obtained eight values is within the allowable range, the distance is assumed to be circular. The allowable range is arbitrary, but is preferably within 10% of the average value of the eight values.

When the image is circular, the total application area (projected area) of the integrated droplets E1 to E5 is obtained, and the application amount of the droplets E1 to E5 is obtained based on this application area.

In addition, when the images of the plurality of droplets E1 to E5 picked up by the image pickup unit 6 are not circular, the inspection unit 7 includes the droplets E1 to E5 discharged from the nozzle 11 of the coating head 5 as shown in FIG. Then, it is determined that the discharge direction includes droplets discharged obliquely with respect to the vertical line. In this case, even if the amount of the integrated droplets E1 to E5 is the same as when the droplets are dropped in a circle, the projected area obtained from the captured image may be different from that of the circle. Without calculating the application amount based on the image, the droplets E1 to E5 are applied again to the other application range A, and the imaging process and the inspection process are performed again.

(4) Adjustment Step The controller 9 adjusts the discharge amount of the droplet E from each nozzle 11 so that the application amounts of the plurality of droplets E1 to E5 discharged from each nozzle 11 are the same.

For example, when the number of nozzles 11 is five, among the nozzles 11 forming one row of the coating head 5, the coating amount of droplets E1 to E5 from the central nozzle 11 (for example, N3) is used as a reference value, and other nozzles ( For example, application of piezoelectric elements corresponding to each of the other nozzles N1, N2, N4, and N5 so that the coating amount of the droplets E1 to E5 from N1, N2, N4, and N5) matches the above-described reference value. The voltage is adjusted, and the discharge amount of the droplet E from these other nozzles N1, N2, N4, N5 is adjusted.

According to this embodiment, the following operational effects can be obtained.

(A) When a plurality of droplets, for example, E1 to E5, are ejected from the nozzle 11 of the coating head 5 to the coating range A of the inspection substrate KA, the coating head 5 and the substrate are ejected from the nozzle 11 without moving relative to each other. The plurality of droplets E1 to E5 are dropped at the same position within the coating range A of the inspection substrate KA.

For this reason, each of the droplets E1 to E5 dropped in sequence on the inspection substrate KA is deposited on the same position in the coating range A. When the droplets E1 to E5 land on the inspection substrate KA, the droplets E1 to E5 do not include the influence of variations in the moving speed of the inspection substrate KA, and the inspection substrate KA is caused by the viscosity, concentration, etc. of the droplets. Does not include the effect of droplet dragging in the direction of movement.

Therefore, the droplets in which these droplets E1 to E5 are integrated have reduced movement speed variations and variations in the coating area caused by the dragging, so that the entire coating area of the droplets E1 to E5 is reduced. As a result, the inspection accuracy of the coating amount is improved. Therefore, the coating accuracy of the droplet E on the product substrate K can be improved.

In addition, since the coating amount is obtained from the coating area of the entire image in which the plurality of droplets E1 to E5 are integrated, the coating area is expanded and the liquid volume is increased as compared with the case where the coating area is one droplet. Since the error of the droplet discharge amount is integrated into the application amount by the number of droplets, the application amount can be easily calculated and the inspection of the application amount can be performed with high accuracy.

The dropping timing t (dropping time interval) of the plurality of droplets E1 to E5 discharged from the nozzle 11 of the coating head 5 to the inspection substrate KA is set to a plurality of product substrates K corresponding to the inspection substrate KA. By setting the same timing as the dropping timing t of the droplets E1 to E5, the inspection condition of the coating amount can be brought close to the actual coating condition, and the inspection accuracy can be further improved.

In addition, by making the surface of the inspection substrate KA water-repellent, the droplets that have landed on the surface of the substrate KA are made spherical and difficult to spread regardless of the viscosity, concentration, etc. By suppressing the influence of the variation in the coating area caused by the variation in the number of droplets, it is possible to further improve the inspection accuracy of the entire coating area of the droplets E1 to E5 and thus the coating amount.

(B) By assuming that the number of droplets dropped on the application range A of the inspection substrate KA is the number of droplets applied to one recess of the product substrate K (for example, five droplets E1 to E5). The inspection conditions for the entire coating area of the droplets E1 to E5, and thus the coating amount, can be brought close to the actual application conditions, and the inspection accuracy can be further improved.

(C) When the images of the plurality of droplets applied to the application range A of the inspection substrate KA are not circular, droplets of the plurality of droplets E1 to E5 discharged from the nozzle 11 of the application head 5 It is determined that the discharge direction includes droplets discharged obliquely with respect to the vertical line.

That is, the discharge state of the droplet E (for example, E5) discharged from the nozzle 11 of the coating head 5 is an abnormal discharge oblique state (FIG. 5) in which the discharge direction of the droplet E5 is oblique to the vertical line. Sometimes, the droplet E5 is displaced from the droplets E1 to E4, and the entire image of the droplets E1 to E5 becomes an ellipse outside the circular range, or the droplets E1 to E4 and the droplet E5 are separated from each other. Present. Accordingly, the entire image of the droplets E1 to E5 at the time of abnormality is clearly different from the image of the perfect circle at normal time, and it is possible to easily determine whether the ejection state is normal or abnormal.

Such an entire image of the droplets E1 to E5 at the time of abnormality has a larger application area (projected area) than a circular image at the time of normality, so that the ejection amount of the droplet E can be accurately determined. It cannot be adjusted.

As described above, when the liquid droplets in the oblique discharge state are included, the calculation accuracy of the application amount obtained from the captured image is lowered, but the application amount is calculated based on the image of the droplet E determined to be abnormal by the above-described determination. Therefore, it is possible to prevent a poor adjustment of the discharge amount of the droplet E.

(D) As a result of the above-described (a) to (c), the application amount of a plurality of droplets discharged from each nozzle 11 to the application range A of the inspection substrate KA can be inspected with high accuracy. The amount of droplets discharged from each nozzle 11 can be adjusted correctly so that the amount of the plurality of droplets applied by being discharged from the nozzle 11 to each coating area A of the substrate is the same.

The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration of the present invention is not limited to this embodiment, and even if there is a design change or the like without departing from the gist of the present invention. It is included in the present invention. For example, the inspection of the application area of a plurality of droplets applied to a predetermined application range of the substrate from the nozzle of the application head, and thus the application amount, may be performed on the product substrate without using the inspection substrate.

DESCRIPTION OF SYMBOLS 1 ... Droplet application apparatus, 5 ... Application | coating head, 6 ... Imaging part, 7 ... Inspection part, 9 ... Control part, 11 ... Nozzle.

Claims

A droplet application method for applying droplets to a predetermined application range on a substrate,
A step of collectively imaging a plurality of liquid droplets ejected from a nozzle provided in an application head and applied to the application range;
Based on the captured images of the plurality of droplets, obtaining a total coating area of the droplets;
Having a step of adjusting the discharge amount of droplets from the nozzle based on the determined application area;
When discharging the plurality of droplets from a nozzle of the coating head to a predetermined coating range on the substrate, dropping the plurality of droplets discharged from the nozzle at the same position within the predetermined coating range. A method for applying a droplet.
The substrate is an inspection substrate for inspecting the application state of droplets,
After inspecting the application state of the liquid droplets with this inspection substrate, the product substrate to which the solution is applied based on the inspection was partitioned to apply a plurality of liquid droplets discharged from the nozzles of the application head. A recess is provided,
The droplet coating method according to claim 1, wherein the number of droplets dropped on a predetermined coating range of the inspection substrate is the number of droplets coated on one concave portion of the product substrate.
When the image of the plurality of droplets applied to the predetermined application range of the substrate is not circular, the discharge direction of the droplets discharged from the nozzles of the application head is oblique to the vertical line in the plurality of droplets The droplet application method according to claim 1, wherein the droplet application method is determined to include discharged droplets.
The coating head includes a plurality of nozzles, and in the adjusting step, the ejection amount of droplets from each nozzle is adjusted so that the coating amounts of the plurality of droplets ejected from each nozzle are the same. The droplet coating method according to claim 3.
A droplet applying apparatus for applying droplets to a predetermined application range on a substrate,
Moving means for relatively moving the coating head provided with the nozzle and the substrate in a direction along the surface of the substrate;
An imaging unit that collectively images a plurality of droplets ejected from the nozzle and applied to a predetermined application range on the substrate;
Based on the images of the plurality of droplets imaged by the imaging unit, an inspection unit for obtaining the entire application area of the droplets;
A control unit that controls the coating head, the moving unit, the imaging unit, and the inspection unit;
When the control unit discharges a plurality of droplets from the nozzle of the coating head to the predetermined coating range, the control unit drops the plurality of droplets discharged from the nozzle at the same position in the predetermined coating range. And a liquid droplet coating apparatus for controlling driving of the coating head and the moving means.
The substrate is an inspection substrate;
The product substrate different from the inspection substrate has a recessed section partitioned for applying a plurality of droplets discharged from the nozzle of the application head,
6. The droplet coating apparatus according to claim 5, wherein the number of droplets dropped on a predetermined coating range of the inspection substrate is the number of droplets coated on one recess of the product substrate.
The control unit includes, when the images of the plurality of droplets imaged by the imaging unit are not circular, the plurality of droplets include droplets ejected obliquely with respect to a vertical line. The droplet applying apparatus according to claim 5, wherein the droplet applying device is determined.
6. The droplet coating apparatus according to claim 5, wherein the control unit adjusts the ejection amount of the droplets from the nozzle based on the coating area obtained by the inspection unit.
The coating head includes a plurality of nozzles, and the control unit adjusts the ejection amount of droplets from each nozzle so that the coating amounts of the plurality of droplets ejected from each nozzle are the same. The droplet applying apparatus according to claim 8.