WO2010010833A1 - Au-Ga-In系ろう材 - Google Patents
Au-Ga-In系ろう材 Download PDFInfo
- Publication number
- WO2010010833A1 WO2010010833A1 PCT/JP2009/062793 JP2009062793W WO2010010833A1 WO 2010010833 A1 WO2010010833 A1 WO 2010010833A1 JP 2009062793 W JP2009062793 W JP 2009062793W WO 2010010833 A1 WO2010010833 A1 WO 2010010833A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- brazing material
- point
- sealing
- package
- brazing
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/3006—Ag as the principal constituent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0227—Rods, wires
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/3013—Au as the principal constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/02—Alloys based on gold
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
Definitions
- the present invention relates to a brazing material and a sealing method using the brazing material. Specifically, regarding the brazing material used in hermetic sealing of various electronic component packages, it does not damage the elements inside the package at the time of sealing, and does not remelt when mounted on the board, etc. A brazing material having various characteristics is provided.
- the Au—Sn brazing material has preferable characteristics in package sealing work, but has a problem. This is a problem that occurs when the package after sealing is mounted on the substrate. Since the temperature during mounting is close to the melting point of the Au—Sn brazing material, the heat remelts the brazing material and seals the package. The stop portion peels off or leaks. In addition to packaging the package on the board, when recovering a failed part by heating the board for repairing an electronic device, the heat may break the sealing of the other parts that are not defective. There is a concern that there is a problem.
- Patent Document 2 proposes application of an Au—Ge brazing material, in particular, an Au-12.5% Ge brazing material.
- the melting point of the Au—Ge brazing material exceeds 360 ° C.
- Patent Document 3 also proposes a brazing material made of a ternary alloy of Au, Ge, and Sn. JP 7-151943 A JP2007-160340
- Both the Au—Ge brazing material and the Au—Ge—Sn brazing material have a melting point higher than that of the Au—Sn brazing material. It will be less.
- the melting point of Au—Ge brazing material tends to be too high, and the sealing temperature must be 400 ° C. or higher in view of the melting point.
- thermal damage to the elements inside the package increases, and in some cases, there is a risk of damage.
- the Au—Ge—Sn brazing material has a lower melting point than the Au—Ge brazing material, and it can be said that there is less problem of damage to the composition during sealing.
- a ternary alloy such as an Au—Ge—Sn brazing material may cause a problem of a temperature difference between a liquidus and a solidus.
- the wide and narrow temperature difference between the liquidus line and the solidus line affects the workability during package sealing. And in patent document 3, although this temperature difference is set as less than 50 degree
- the present invention is based on such a background, and does not damage elements inside the package at the time of sealing, and on the other hand, an appropriate temperature that does not remelt when mounted on a substrate, etc. Further, it is possible to melt at a low temperature difference between a liquidus and a solidus. Specifically, the liquidus and / or solidus is above 280 ° C and below 360 ° C (preferably, both the liquidus and solidus are in the range of 300 to 340 ° C), and A brazing material in which the difference between the liquidus and the solidus is less than 45 ° C. (preferably less than 40 ° C.) is provided.
- the present inventors have examined the application of a brazing material made of ternary alloy composed of Au, Ga, and In as alloying elements.
- the inventors have found a composition having a predetermined composition range and have come up with the present invention.
- the present invention is made of an Au—Ga—In ternary alloy, and the weight concentration of these elements is point A in the Au—Ga—In ternary phase diagram (Au: 90%, Ga: 10%, In: 0%), B point (Au: 70%, Ga: 30%, In: 0%), C point (Au: 60%, Ga: 0%, In: 40%), D point (Au: 80 %, Ga: 0%, In: 20%) is a brazing material in a polygonal region (excluding lines on which In and Ga are 0%).
- FIG. 1 shows a ternary phase diagram showing the composition of the material according to the present invention.
- the ternary alloy is applied by adding two elements of Ga and In to Au at the same time, so that the melting point is more effective than the binary Au alloy (Au—In, Au—Ga). This is because it can be adjusted.
- the melting point (liquidus, solidus) can be kept within a suitable range by setting the addition amount of Ga and In within the above range.
- the temperature difference between the liquidus and the solidus can be appropriately reduced by adjusting the composition.
- the brazing material in the above composition range can be suitable in terms of workability and hardness.
- the temperature difference between the liquidus and the solidus, and the workability it will be made of an Au—Ga—In ternary alloy.
- the weight concentration of the element of the material is E point (Au: 86%, Ga: 13%, In: 1%), F point (Au: 81%, Ga: 17%) in the Au-Ga-In ternary phase diagram.
- brazing material is within the range shown in the ternary phase diagram of FIG.
- the ternary brazing filler metal according to the present invention may contain at least one additive element of Sn, Ge, Zn, Sb, Si, Bi, and Al. These additive elements are added for fine adjustment of the melting point of the brazing material and improvement of wettability.
- the content of this additive element is preferably 0.001 to 3.0% by weight, more preferably 0.01 to 3.0% by weight, and still more preferably 0.1 to 3.0% by weight. .
- the brazing material according to the present invention preferably has a material structure consisting of a rapidly solidified structure from a molten state. This is because wettability is improved by forming a material structure composed of fine crystal grains by rapid solidification. Although the relationship between this rapidly solidified structure and wettability improvement is not clear, this does not change the melting characteristics of the liquidus, solidus, etc., but improves the wetting spread when melted. There is a tendency to.
- the cooling rate for obtaining this rapidly solidified structure is preferably 2000 to 5000 ° C./min.
- the brazing material according to the present invention can be used in any form of a plate shape, a foil shape, a granular shape, a ball shape, a powder shape, and a paste shape.
- a method similar to a general brazing material can be used to form a ball.
- it can also be set as the window frame shape which considered the shape of the package member to seal.
- there is no particular difficulty and it can be manufactured by the melt casting method in the same manner as a normal Au alloy.
- plate-like and foil-like ones can be processed through rolling or punching if necessary, and the obtained rolled material can be stamped and slit without particular difficulty. Processing is possible, and predetermined shapes such as a ring shape and a ribbon shape can be obtained.
- granular and ball-shaped brazing filler metals can be manufactured from the molten state by an atomizing method, a rotating electrode method, a granulation method in oil, a droplet spraying method, or the like.
- plate-like and foil-like ones can be produced by solidification using a cooling mold, and are granular, ball-like.
- the brazing material can be manufactured according to manufacturing conditions (adjustment of droplet diameter, etc.).
- the brazing material according to the present invention is suitable for hermetic sealing of the package member.
- a package member for sealing there is a cap (lid) that serves as a lid and a base that accommodates the element, but any of them is preferably provided with a brazing material made of an alloy according to the present invention.
- the brazing material is fixed to the package member, the brazing material is placed on the member, and the brazing material is melted and solidified in a heated atmosphere to be fused.
- the package parts are generally made of Kovar (Fe-Ni-Co alloy) or 42 alloy (Fe-Ni alloy) for the cap, and the base is made of ceramic. Yes.
- brazing material when the brazing material is fused, Ni plating and / or Au plating is performed on the fused surface in advance for the purpose of improving the wettability of the brazing material.
- the brazing material according to the present invention can be fused to a package member provided with these plating layers in advance.
- the package member is joined so that the sealing temperature is 360 ° C. or higher and lower than 400 ° C., preferably 380 ° C. or lower. It is preferable.
- the brazing material according to the present invention has suitable melting characteristics and is suitable as a brazing material for package sealing. And the temperature difference between the liquidus and the solidus has been improved, and the workability is excellent. In addition, the brazing material according to the present invention has good workability, and can be processed into a brazing material for a package that requires a reduction in size and thickness.
- FIG. 3 is an Au—Ga—In ternary phase diagram showing the composition of the material according to the present invention.
- FIG. 3 is a Au—Ga—In ternary phase diagram showing a preferred composition of the material according to the present invention and a more preferred composition.
- Evaluation chart of wettability of Au—Ga—In ternary brazing material (Au: 82%, Ga: 10%, In: 8%)
- brazing materials made of Au—Ga—In alloys having various compositions inside and outside the region of FIG. 1 and brazing materials obtained by adding Sn to the Au—Ga—In alloy were manufactured, and their characteristics were examined.
- each metal weighed so as to have a predetermined composition was melted and cast, and rolled to obtain a brazing material having a thickness of 50 ⁇ m.
- the hardness, workability, and melting characteristics (liquidus, solidus) of each manufactured brazing material were evaluated.
- the workability is evaluated with a Vickers hardness tester, and the brazing material after processing is observed with a stereomicroscope (10 times) for the presence or absence of cracks and cracks. Those that were good, cracked or only cracked were evaluated as bad.
- the melting characteristics were measured by differential thermal analysis. These results are shown in Table 1. This evaluation was also performed for Au—Ga (15.2%) containing no In (sample No. 12) for comparison.
- the Au—Ga—In brazing material (samples 1 to 6) having the composition in the region of FIG. 1 has both solidus and liquidus in the range of 300 to 340 ° C. It can be seen that the difference between the phase line and the liquidus line is less than 20 ° C., indicating extremely excellent melting characteristics.
- These brazing materials are expected to have a small difference from the sealing temperature at the time of package sealing, and are considered to be optimal as brazing materials for package sealing.
- the brazing materials of Samples 2 to 6 have sufficient hardness in addition to excellent melting characteristics.
- Samples 9 to 11 having compositions outside the region of FIG. 1 have high solidus lines and liquidus lines, and the difference between the two is wide.
- the Au—Ga brazing material containing no In (sample 12) is close to the eutectic composition, so the difference between the solidus and liquidus is narrow, but the melting point is high, which is preferable. I could't.
- FIG. 3 shows the results of evaluating the wettability of the ternary brazing material (Au: 82%, Ga: 10%, In: 8%) of Sample 2. Evaluation of wettability is carried out by placing a brazing material on Kov / Ni plating / Au plating, heating to 20 ° C. higher than the melting point in an inert atmosphere and holding it for 2 minutes, and melting the brazing material part entirely. If it spreads uniformly and wet, it was judged as good, otherwise it was judged as bad. As a result, it can be seen that the brazing material is uniformly spread throughout the brazing material portion and exhibits good wettability.
Abstract
Description
Claims (8)
- Au-Ga-In三元系合金からなり、これらの元素の重量濃度が、Au-Ga-In三元系状態図におけるA点(Au:90%、Ga:10%、In:0%)、B点(Au:70%、Ga:30%、In:0%)、C点(Au:60%、Ga:0%、In:40%)、D点(Au:80%、Ga:0%、In:20%)を頂点とする多角形の領域内(但し、In、Gaが0%となる線上を除く)にあるろう材。
- Au-Ga-In三元系合金の元素の重量濃度が、Au-Ga-In三元系状態図におけるE点(Au:86%、Ga:13%、In:1%)、F点(Au:81%、Ga:17%、In:2%)、G点(Au:79%、Ga:10%、In:11%)、H点(Au:84%、Ga:6%、In:10%)を頂点とする多角形の領域内にある請求項1記載のろう材。
- Au-Ga-In三元系合金の元素の重量濃度が、Au-Ga-In三元系状態図におけるI点(Au:85%、Ga:10%、In:5%)、J点(Au:80%、Ga:14%、In:6%)、G点(Au:79%、Ga:10%、In:11%)、H点(Au:84%、Ga:6%、In:10%)を頂点とする多角形の領域内にある請求項1または請求項2に記載のろう材。
- 更に、Sn、Ge、Zn、Sb、Si、Bi、Alの少なくとも1の添加元素を含む請求項1~請求項3のいずれかに記載のろう材。
- 添加元素の添加量は、0.001~3.0重量%である請求項4記載のろう材。
- その材料組織が、溶融状態からの急冷凝固組織からなる請求項1~請求項5のいずれかに記載のろう材。
- 請求項1~請求項6のいずれかに記載のろう材を備える気密封止用のパッケージ部品。
- 請求項1~請求項6のいずれかに記載のろう材を用いた封止方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NZ589711A NZ589711A (en) | 2008-07-24 | 2009-07-15 | Au-Ga-In brazing filler metal |
KR1020117003882A KR101686252B1 (ko) | 2008-07-24 | 2009-07-15 | Au-Ga-In계 납재 |
US12/993,992 US20110076183A1 (en) | 2008-07-24 | 2009-07-15 | Au-Ga-In Brazing Material |
JP2010521681A JP5421915B2 (ja) | 2008-07-24 | 2009-07-15 | Au−Ga−In系ろう材 |
EP09800347.8A EP2322316B1 (en) | 2008-07-24 | 2009-07-15 | Au-ga-in brazing filler metal |
CN2009801248798A CN102083582B (zh) | 2008-07-24 | 2009-07-15 | Au-Ga-In类钎料 |
US14/460,904 US9604317B2 (en) | 2008-07-24 | 2014-08-15 | Au—Ga—In brazing material |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008-191192 | 2008-07-24 | ||
JP2008191192 | 2008-07-24 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/993,992 A-371-Of-International US20110076183A1 (en) | 2008-07-24 | 2009-07-15 | Au-Ga-In Brazing Material |
US14/460,904 Division US9604317B2 (en) | 2008-07-24 | 2014-08-15 | Au—Ga—In brazing material |
Publications (1)
Publication Number | Publication Date |
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WO2010010833A1 true WO2010010833A1 (ja) | 2010-01-28 |
Family
ID=41570297
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2009/062793 WO2010010833A1 (ja) | 2008-07-24 | 2009-07-15 | Au-Ga-In系ろう材 |
Country Status (8)
Country | Link |
---|---|
US (2) | US20110076183A1 (ja) |
EP (1) | EP2322316B1 (ja) |
JP (1) | JP5421915B2 (ja) |
KR (1) | KR101686252B1 (ja) |
CN (1) | CN102083582B (ja) |
NZ (1) | NZ589711A (ja) |
TW (1) | TWI445589B (ja) |
WO (1) | WO2010010833A1 (ja) |
Cited By (1)
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WO2016075983A1 (ja) * | 2014-11-11 | 2016-05-19 | 住友金属鉱山株式会社 | Au-Sn-Ag系はんだ合金とはんだ材料並びにこのはんだ合金又ははんだ材料を用いて封止された電子部品及び電子部品搭載装置 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103014401B (zh) * | 2012-12-05 | 2014-12-03 | 昆明贵金属研究所 | 一种金合金及其制备方法 |
KR101839876B1 (ko) * | 2015-04-09 | 2018-03-20 | 한국전자통신연구원 | 3d 프린팅용 귀금속 소재, 그 제조 방법, 및 그 소재를 이용한 3d 프린팅 방법 |
US10612112B2 (en) | 2015-04-09 | 2020-04-07 | Electronics And Telecommunications Research Institute | Noble metal material for 3-dimensional printing, method for manufacturing the same, and method for 3-dimensional printing using the same |
CN107350663B (zh) * | 2017-08-30 | 2019-06-11 | 桂林电子科技大学 | 液态金属增强基纳米银焊膏热界面材料及其制备方法 |
KR102426529B1 (ko) * | 2018-04-23 | 2022-07-29 | 다나카 기킨조쿠 고교 가부시키가이샤 | 은납재 및 해당 은납재를 사용한 접합 방법 |
CN109207752A (zh) * | 2018-09-26 | 2019-01-15 | 云南大学 | 一种AuGe共晶合金凝固组织调控方法及该合金材料 |
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-
2009
- 2009-07-15 US US12/993,992 patent/US20110076183A1/en not_active Abandoned
- 2009-07-15 WO PCT/JP2009/062793 patent/WO2010010833A1/ja active Application Filing
- 2009-07-15 EP EP09800347.8A patent/EP2322316B1/en active Active
- 2009-07-15 KR KR1020117003882A patent/KR101686252B1/ko active IP Right Grant
- 2009-07-15 JP JP2010521681A patent/JP5421915B2/ja active Active
- 2009-07-15 CN CN2009801248798A patent/CN102083582B/zh active Active
- 2009-07-15 NZ NZ589711A patent/NZ589711A/en unknown
- 2009-07-23 TW TW098124851A patent/TWI445589B/zh active
-
2014
- 2014-08-15 US US14/460,904 patent/US9604317B2/en active Active
Patent Citations (8)
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JPS62166096A (ja) * | 1986-01-17 | 1987-07-22 | Mitsubishi Heavy Ind Ltd | Au−Inろう及びその作成方法 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2016075983A1 (ja) * | 2014-11-11 | 2016-05-19 | 住友金属鉱山株式会社 | Au-Sn-Ag系はんだ合金とはんだ材料並びにこのはんだ合金又ははんだ材料を用いて封止された電子部品及び電子部品搭載装置 |
JP2016087681A (ja) * | 2014-11-11 | 2016-05-23 | 住友金属鉱山株式会社 | Au−Sn−Ag系はんだ合金とはんだ材料並びにこのはんだ合金又ははんだ材料を用いて封止された電子部品及び電子部品搭載装置 |
US10589387B2 (en) | 2014-11-11 | 2020-03-17 | Sumitomo Metal Mining Co., Ltd. | Au—Sn—Ag-based solder alloy and solder material, electronic component sealed with the same Au—Sn—Ag based solder alloy or solder material, and electronic component mounting device |
Also Published As
Publication number | Publication date |
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JPWO2010010833A1 (ja) | 2012-01-05 |
EP2322316A1 (en) | 2011-05-18 |
US20110076183A1 (en) | 2011-03-31 |
CN102083582B (zh) | 2013-05-29 |
EP2322316A4 (en) | 2012-02-01 |
KR101686252B1 (ko) | 2016-12-13 |
TWI445589B (zh) | 2014-07-21 |
EP2322316B1 (en) | 2014-05-14 |
US9604317B2 (en) | 2017-03-28 |
KR20110041533A (ko) | 2011-04-21 |
NZ589711A (en) | 2012-04-27 |
JP5421915B2 (ja) | 2014-02-19 |
CN102083582A (zh) | 2011-06-01 |
US20140356226A1 (en) | 2014-12-04 |
TW201016375A (en) | 2010-05-01 |
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