WO2009142238A1 - 焼結体およびその製造方法ならびに光学部品 - Google Patents
焼結体およびその製造方法ならびに光学部品 Download PDFInfo
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- WO2009142238A1 WO2009142238A1 PCT/JP2009/059266 JP2009059266W WO2009142238A1 WO 2009142238 A1 WO2009142238 A1 WO 2009142238A1 JP 2009059266 W JP2009059266 W JP 2009059266W WO 2009142238 A1 WO2009142238 A1 WO 2009142238A1
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- sintered body
- pressure
- residual stress
- stress
- sintered compact
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Definitions
- the present invention relates to a sintered body, a manufacturing method thereof, and an optical component, and more particularly, to a sintered body based on ceramics, a manufacturing method thereof, and an optical component including the sintered body.
- Patent Document 1 Before coating a vapor deposition layer on an elastic substrate, the amount of deformation due to internal stress of the coating layer is predicted, and the substrate surface is deformed in the opposite direction by that amount in advance. It shows how to prevent deformation and delamination after processing.
- Patent Document 2 In Japanese Patent No. 3639822 (Patent Document 2), in order to prevent peeling of the base material and the coating layer, an adhesion layer is provided at the interface between them, and the coating thereon is made into a laminated structure, so A method of relieving stress is shown.
- Patent Document 3 shows an optical device including an optical element having a wide bandwidth and high transmittance, in which layers of high and low refractive indexes are stacked.
- Patent Document 4 discloses a technique in which a mold is brought into close contact with an optical element that has been heat-press-molded with a net size to smoothly separate the mold while maintaining shape accuracy. A method of cooling while pressurizing with pressure is shown.
- Patent Document 5 discloses that the material of the upper die and the lower die used for press molding of a glass lens is graphite.
- Non-patent Document 1 “Precision processing of fine ceramics” shows that a deteriorated layer is formed on the processed surface by grinding or polishing (polishing) of fine ceramics.
- Non-patent Document 2 shows the crystal structure of the polished product of the ZnS sintered body (p76, FIG. 8).
- Non-Patent Document 3 Optical Element and Mechanism Inspection Technique
- JP 58-113901 A Japanese Patent No. 3639822 JP 2006-053180 A JP-A-2-252629 JP 60-246231 A
- the functional surface is easily deformed. Further, when the functional surface is coated with another material or bonded, peeling of the coating or the bonding interface becomes a problem. For example, even if it is intended to improve the corrosion resistance by coating, if the coating layer has a larger coefficient of thermal expansion than the substrate, the force to peel off the substrate and the coating layer by subsequent heating works, The adhesion will be reduced. For this reason, a limit may arise naturally in the combination of a base material and a surface layer. On the other hand, a design (for example, shown in Patent Documents 1 to 3) that can take a stress relaxation measure corresponding to the situation is required. In addition, an appropriate stress relaxation measure is required for practical use of the polished surface of the zinc sulfide sintered body described in Non-Patent Document 2.
- Patent Document 4 is based on the premise that an optical element is formed of glass, and the premise and configuration are completely different from those of the present invention.
- Patent Document 5 only describes the materials of the upper mold and the lower mold used for press molding of a glass lens, and neither the idea nor the suggestion of the present invention is described.
- the present invention has been made in view of the above problems, and an object of the present invention is a sintered body that is less likely to be deformed in practical use and has a high degree of freedom in designing a surface layer, and a method for manufacturing the same. Another object is to provide an optical component including the sintered body.
- the sintered body according to the present invention is a sintered body based on ceramics and has no residual stress on the surface or is oriented in the tensile direction.
- an unprocessed surface is provided on the surface of the base material.
- the “unprocessed surface” means “a surface that has not been subjected to mechanical processing such as grinding and polishing, and surface treatment such as film formation, heat treatment, and chemical treatment”. Further, the unprocessed surface may be provided on the entire surface of the base material, or may be provided on a part of the surface of the base material.
- compressive stress tends to remain on the surface of the substrate by subjecting the surface of the substrate to processing such as polishing.
- processing such as polishing.
- by providing the “unprocessed surface” on at least a part of the substrate surface it is possible to suppress the compression stress from remaining on the surface of the sintered body.
- the residual stress is a tensile stress of 1 MPa or more.
- the residual stress (tensile direction) on the surface of the sintered body is less than 1 MPa, the sintered body may be less likely to be shattered when the sintered body is damaged, and it may be difficult to determine replacement due to the damage.
- the residual stress in the tensile direction is 1 MPa or more as described above, it is possible to provide a sintered body that can be easily replaced by damage.
- the base material contains at least one substance selected from the group consisting of zinc sulfide, germanium, zinc selenide, calcium fluoride, and spinel.
- the method for producing a sintered body according to the present invention is a method for producing a sintered body having a predetermined shape using a ceramic as a base material, the step of preparing a ceramic preform, and a predetermined having an upper mold and a lower mold And forming a pressure sintered body by pressing and sintering a ceramic preform using a mold of 5 and 5 to 100 percent of the pressure load applied during the step of forming the pressure sintered body And a step of cooling the pressure sintered body while applying a pressure load of preferably 20% or more and 40% or less (preferably 20% or less).
- the step of cooling the pressure sintered body by applying a predetermined pressure load to the pressure sintered body, a tensile stress can be generated on the surface of the sintered body after cooling. it can. Therefore, there is provided a sintered body that has no residual stress in the compression direction on the surface and hardly deforms during practical use. In addition, by the said method, the residual stress of a compression direction and a tension direction may not be formed on the surface.
- the thermal expansion coefficient of at least one of the upper mold and the lower mold is lower than the thermal expansion coefficient of the sintered body.
- the optical component according to the present invention includes the sintered body described above or the sintered body manufactured by the method for manufacturing a sintered body described above. Thereby, the optical component provided with the sintered compact which does not produce a deformation
- the sintered body according to the present invention can be used for, for example, precision and high-precision parts in addition to optical parts.
- the base material alumina, zirconia, silicon nitride, silicon carbide and the like can be used in addition to those described above.
- FIG. 1 is a diagram showing an optical component as a sintered body according to one embodiment of the present invention.
- an optical component 1 is a lens member that includes at least one substance selected from the group consisting of zinc sulfide, germanium, zinc selenide, calcium fluoride, and spinel.
- the optical component 1 shown in FIG. 1 will be described, but the scope of the “sintered body” according to the present invention is not limited to the optical component 1.
- the optical component 1 according to the present embodiment is a sintered body having ceramic as a base material, and has no residual stress on the surface, or the residual stress is in the tensile direction. Ceramics may be any material.
- Adjusting the residual stress on the surface of the ceramic as described above increases the proof strength of the ceramic substrate itself against thermal or mechanical external forces. Furthermore, the adhesion between the base material and the coating material when the base material itself is coated with a material having a large thermal expansion coefficient is improved. Therefore, the stress buffering of the metallized layer and the hard film is facilitated, and the variation of the laminated design increases. Moreover, the durability in a cooling / heating cycle is improved.
- the base material is a state formed by a hot forming method such as hot pressing, and has a surface that is not newly chemically or physically processed (referred to herein as an “unprocessed surface”). It may be.
- the base material is formed by hot forming such as hot press, and then chemically or physically processed (for example, the grain boundary is corroded, cut or polished) And may be heat-treated after being applied, another material joined and combined, or a coating layer formed on an unprocessed surface).
- the unprocessed surface may be provided on the entire surface of the ceramic substrate, or may be provided on a part of the surface of the ceramic substrate.
- the residual stress on the ceramic substrate surface is a tensile stress of 1 MPa or more (more preferably 4 MPa or more).
- the optical component 1 When the residual stress (tensile direction) on the ceramic substrate surface is smaller than 1 MPa, the optical component 1 is not easily shattered when the optical component 1 is broken, and a relatively large range (for example, about 50% or more) remains. In some cases, it may be difficult to determine replacement due to damage. On the other hand, by setting the residual stress in the tensile direction to 1 MPa or more (more preferably 4 MPa or more) as described above, it is possible to provide the optical component 1 in which replacement can be easily determined due to breakage.
- the optical component 1 with high durability can be provided by setting the residual stress in the tensile direction to 1 MPa or more as described above.
- FIG. 2 is a flowchart for explaining a method of manufacturing the optical component 1 according to the present embodiment.
- the manufacturing method of the optical component 1 which concerns on this Embodiment is a method of manufacturing the optical component 1 of the predetermined shape (lens shape) which uses ceramics as a base material, Comprising: A step of preparing (S10), a step of pressurizing and sintering the ceramic preform using a predetermined mold having an upper die and a lower die (S20), and pressurizing A step of cooling the pressure-sintered body while applying a pressure load of about 5 to 100 percent (preferably about 20 to 40 percent) of the pressure load applied during the step of forming the bonded body (S30).
- the thermal expansion coefficient of at least one of the upper mold and the lower mold is lower than the thermal expansion coefficient of the sintered body.
- the pressure sintered body cooling step (S30) by applying a predetermined pressure load to the pressure sintered body, tensile stress is generated on the surface of the sintered body after cooling. Can be made. Therefore, there is provided a sintered body that has no residual stress in the compression direction on the surface and hardly deforms during practical use. In addition, by the said method, the residual stress of a compression direction and a tension direction may not be formed on the surface.
- the pressure load during the cooling step (S30) is less than 5 percent of the pressure load applied during the step of forming the pressure sintered body, the residual stress in the tensile direction is not always sufficient, When an optical component is damaged due to a mechanical factor, it is difficult to break down and it is difficult to determine whether or not to replace it. Furthermore, when a coating layer is provided on the surface by a vacuum vapor deposition method, the durability against the temperature cycle test is likely to decrease.
- the pressure load during the cooling step (S30) exceeds 100% of the pressure load applied during the step of forming the pressure sintered body, the residual stress in the tensile direction becomes too large. As a result, distortion (asp) is caused and the function as an optical component is lowered. From the above viewpoint, more preferably, the pressure load during the cooling step (S30) is not less than 20 percent and not more than 40 percent of the pressure load applied during the step of forming the pressure sintered body.
- the end point temperature of the pressurization during the cooling step (S30) is preferably 90% or less of the holding temperature of the pressure sintering step. However, if this end point temperature is lower than 25% of the holding temperature in the pressure sintering process, cracks may occur during deformation. Therefore, the end point temperature of the pressurization in the cooling step (S30) is preferably 25% or more and 90% or less of the holding temperature of the pressure sintering step.
- the stress in the compression direction of the surface due to the shrinkage does not remain on the pressure surface of the ceramic base material, but rather the stress in the tensile direction remains. .
- the conventional base material surface has a material with a large thermal expansion coefficient as a counterpart material. It was not possible to use it, and it was necessary to use a material with a low coefficient of thermal expansion, or to consider laminate bonding to relieve stress.
- the optical component 1 according to the present embodiment it is possible to use a material having a large thermal expansion coefficient as the counterpart material. That is, according to the present embodiment, it is possible to provide the optical component 1 that is hardly deformed in practical use and that has a high degree of freedom in designing the surface layer.
- Example 1 all of ZnS (zinc sulfide), ZnSe (zinc selenide), CaF 2 (calcium fluoride), spinel and Ge (germanium) having an average particle diameter of 1 to 3 ⁇ m and a purity of 95.5% or more.
- a ceramic preform from powder and pre-sintering the ceramic preform, a flat plate shape with dimensions of 20 mm ( ⁇ ) ⁇ 5 mm (thickness), or 20 mm ( ⁇ ) ⁇ 6 mm (thickness), Pre-sintered ceramic preforms (Nos. 1 to 18 in Table 1) having a plano-convex lens shape with a radius of curvature of 18 and a relative density of about 60% were prepared.
- the ceramic preform is placed between an upper mold and a lower mold made of glassy carbon as a mold, and the ceramic preform is pressed while being sintered.
- the pressurization described in Table 1 After reaching the holding temperature and holding load in the sintering step, the holding was performed for 300 seconds. Then, after reducing the pressure to the holding load of the cooling step described in Table 1, the ceramic optical of ⁇ 20 mm ⁇ 3 mmt is obtained by cooling to the holding temperature of the cooling step (end point temperature of pressurization) while maintaining the holding load. I got the parts. As a result of measuring the residual stress of these obtained samples using a Rigaku Co., Ltd. micro-part X-ray stress measurement apparatus, the residual stress shown in Table 1 was detected. In Table 1, No. 7, 10, 13, 15, and 17 are obtained by grinding and polishing a flat plate of ⁇ 20 mm ⁇ 3 mmt from a block ( ⁇ 100 mm ⁇ 30 mmt) obtained by hot pressing each powder.
- No. 1 shown in Table 1. Strain measurement was performed on samples 1 to 18 (see “5.2.4 Judgment of curvature (asphericity: asperity) on the ridge surface” on pages 88 to 89 of Non-Patent Document 3). .
- Table 2 shows the results of the copper ball drop test and strain measurement.
- the evaluation by the copper ball drop test is marked as follows. 1. Less than 20% of remaining area where lens function is completely eliminated: 2. Remaining area ratio of 20% or more and less than 50% where deterioration in lens functionality can be remarkably confirmed 3. Remaining area ratio of 50% or more and less than 80% at a level that affects the visibility through the lens: ⁇ 4). Remaining area rate of 80% or more that does not affect the visibility through the lens: ⁇
- a preferable range for the residual stress in the tensile direction is about 1 MPa to 15 MPa (more preferably about 4 MPa to 8 MPa).
- the temperature of the sample is set to about 100 to 200 ° C., and a predetermined coating material is coated with about 0.5 ⁇ m by a vacuum vapor deposition method, and they are placed in a constant temperature room at ⁇ 40 ° C. and 80 ° C.
- a temperature cycle test was performed with exposure every 30 minutes. Then, the entire front and back surfaces were observed using an optical microscope at a magnification of 10 times, and the number of cycles until partial peeling occurred was measured. Furthermore, the strain measurement and the copper ball drop test were performed on these samples in the same manner as described above.
- the coating is not limited to the single layer coating described in the present embodiment, and may be a multilayer coating. Further, the film thickness is not limited by the thickness described in this embodiment.
- Table 3 the evaluation by the temperature cycle test is marked as follows. 1. The number of cycles until partial peeling occurs is 10 or less: ⁇ 2. The number of cycles until partial peeling occurs 11 to 500 times: ⁇ 3. The number of cycles until partial peeling occurs 501 to 1000: ⁇ 4). The number of cycles until partial peeling occurs is 1001 times or more: ⁇
- Sample No. 2, no. 7, no. 9, no. 10, no. Table 4 shows the results obtained by coating 14 to 17 with a coating material different from the above by about 0.5 ⁇ m and conducting a durability test by a cycle test in the same manner as described above. Table 4 also shows the same tendency as described above.
- FIGS. 2 this example
- No. 2 7 shows a surface observation image related to 7 (Comparative Example).
- FIG. 5 comparative example
- FIG. 4 in this example, the crystal grain boundaries can be clearly confirmed, so that it is possible to easily determine the quality of the structure in the molded product.
- the dent corresponding to the crystal grain boundary exists on the surface, the anchor effect is obtained and the adhesion of the coat film is improved.
- Example 2 an alumina-based pre-sintered body containing 0.5 wt% MgO sintering aid and fired at 1500 ° C. in the air, containing 5 wt% Y 2 O 3 sintering aid and at 1600 ° C. in nitrogen
- a fired aluminum nitride presintered body and a silicon nitride presintered body containing 5 wt% MgO sintering aid and fired at 1600 ° C. in nitrogen were prepared.
- pre-sintered bodies are put into a graphite mold whose molding surface is coated with diamond, and alumina-based pre-sintered bodies are pre-sintered at 1600 ° C. in nitrogen and aluminum nitride and silicon nitride systems. The body was hot-pressed at 1700 ° C. in nitrogen with a pressure of 70 MPa applied for 20 minutes.
- Example 1 a copper ball drop test was performed in the same manner as in Example 1 using a separately prepared test piece. Ten test pieces, which were net-molded under the same conditions as described above, were used without being processed. The results of the copper ball drop test are also shown in Tables 5 and 6. Note that the notations ( ⁇ etc.) in Tables 5 and 6 are the same as those in Tables 2 and 3.
- a coating layer is formed on each sample surface, a material film having a larger thermal expansion coefficient is formed as in Example 1, and the same cooling cycle as in Example 1 is applied to provide a coating. The adhesion durability of the interface was compared.
- Chromium (the material has a thermal expansion coefficient of 11 ⁇ 10 ⁇ 6 / ° C.) is used for the alumina sample (the material has a thermal expansion coefficient of 8 ⁇ 10 ⁇ 6 / ° C.), and the aluminum nitride sample (the material has a thermal expansion coefficient of 5 ⁇ 10 -6 / ° C) for titanium oxide (the material has a thermal expansion coefficient of 7.5 ⁇ 10 -6 / ° C) and silicon nitride samples (the material has a thermal expansion coefficient of 3 ⁇ 10 -6 / ° C) Were vapor-deposited with diamond (the material has a thermal expansion coefficient of 4.5 ⁇ 10 ⁇ 6 / ° C.), each having a thickness of 2 ⁇ m.
- the present invention can be applied to, for example, a sintered body based on ceramics, a method for manufacturing the same, an optical component provided with the sintered body, and a precision high-precision component.
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Abstract
Description
たとえば、被覆によって耐食性を向上させるものを用いようとしても、その被覆層が基材よりも熱膨張係数の大きいものであれば、事後の加熱により基材と被覆層とを引き剥がす力が働き、密着力が低下することになる。このため、基材と表面層との組合せには自ずから限界が生じ得る。これに対し、状況に見合った応力緩和策の採れる設計(たとえば、特許文献1~3に例示)が必要である。また、非特許文献2に記載の硫化亜鉛燒結体の研磨加工面の実用にも、適正な応力緩和策が必要である。
焼結体の表面の残留応力(引張方向)が1MPaより小さい場合、焼結体の破損時に該焼結体が粉々になり難く、破損による交換の判断がつき難い場合が生じ得る。これに対し、引張方向の残留応力を上記のように1MPa以上とすることで、破損による交換の判断がつき易い焼結体を提供することができる。
本発明に係る光学部品は、上述した焼結体、または、上述した焼結体の製造方法により製造された焼結体を備える。これにより、変形の生じ難い焼結体を備えた光学部品が得られる。
これに対し、引張方向の残留応力を上記のように1MPa以上(より好ましくは、4MPa以上)とすることで、破損による交換の判断がつき易い光学部品1を提供することができる。
レンズ破片面積=A+B+C+D+E=W
有効径面積=S
残存エリア率=W/S
である(A,B,C,D,Eは図3を参照)。
1.レンズの機能が完全に無くなる残存エリア率20%未満:◎
2.レンズの機能性の低下が顕著に確認可能な残存エリア率20%以上50%未満:○
3.レンズを通した視認性に影響を与えるレベルの残存エリア率50%以上80%未満:△
4.レンズを通した視認性に影響が出ない残存エリア率80%以上:×
1.部分的な剥離が発生するまでのサイクル回数が10回以下:×
2.部分的な剥離が発生するまでのサイクル回数が11~500回:△
3.部分的な剥離が発生するまでのサイクル回数が501~1000回:○
4.部分的な剥離が発生するまでのサイクル回数が1001回以上:◎
Claims (7)
- セラミックスを基材とした焼結体であって、
表面の残留応力が無い、または、引張方向に向いている、焼結体。 - 前記基材の表面に未加工面が設けられている、請求項1に記載の焼結体。
- 前記残留応力が1MPa以上の引張応力である、請求項1または請求項2に記載の焼結体。
- 前記基材は、硫化亜鉛、ゲルマニウム、セレン化亜鉛、フッ化カルシウム、スピネルからなる群より選ばれた少なくとも一種の物質を含む、請求項1から請求項3のいずれかに記載の焼結体。
- セラミックスを基材とする所定形状の焼結体を製造する焼結体の製造方法であって、
セラミックス予備成形体を準備する工程と、
上型および下型を有する所定の成形型を用いて前記セラミックス予備成型体を加圧焼結して加圧焼結体を形成する工程と、
前記加圧焼結体を形成する工程時に付与される加圧荷重の5パーセント以上100パーセント以下の加圧荷重を付与しながら前記加圧焼結体を冷却する工程とを備えた、焼結体の製造方法。 - 前記上型および前記下型の少なくとも一方の熱膨張係数が、前記焼結体の熱膨張係数よりも低い、請求項5に記載の焼結体の製造方法。
- 請求項1から請求項4のいずれかに記載の焼結体、または、請求項5もしくは請求項6に記載の焼結体の製造方法により製造された焼結体を備えた、光学部品。
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JP2009546999A JP5418231B2 (ja) | 2008-05-23 | 2009-05-20 | 焼結体およびその製造方法ならびに光学部品 |
EP09750600A EP2213637A1 (en) | 2008-05-23 | 2009-05-20 | Sintered compact, process for production thereof, and optical element |
CN200980100281.5A CN101795995B (zh) | 2008-05-23 | 2009-05-20 | 烧结体、其制造方法和光学部件 |
US12/674,409 US8298975B2 (en) | 2008-05-23 | 2009-05-20 | Sintered compact, process for production thereof, and optical element |
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JP2014077931A (ja) * | 2012-10-11 | 2014-05-01 | Sumitomo Electric Ind Ltd | 光学部品の製造方法および光学部品 |
KR20210019854A (ko) * | 2019-08-13 | 2021-02-23 | 엘지이노텍 주식회사 | 황화아연 소결체 및 이를 포함하는 적외선 투과 렌즈 |
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US11104616B2 (en) | 2015-09-30 | 2021-08-31 | Apple Inc. | Ceramic having a residual compressive stress for use in electronic devices |
US11604514B2 (en) | 2016-04-14 | 2023-03-14 | Apple Inc. | Substrate having a visually imperceptible texture for providing variable coefficients of friction between objects |
US10264690B2 (en) | 2016-09-01 | 2019-04-16 | Apple Inc. | Ceramic sintering for uniform color for a housing of an electronic device |
US11088718B2 (en) | 2016-09-06 | 2021-08-10 | Apple Inc. | Multi-colored ceramic housings for an electronic device |
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CN103443658B (zh) * | 2012-03-09 | 2016-05-11 | 住友电气工业株式会社 | 光学部件及其制造方法 |
JP2014077931A (ja) * | 2012-10-11 | 2014-05-01 | Sumitomo Electric Ind Ltd | 光学部品の製造方法および光学部品 |
KR20210019854A (ko) * | 2019-08-13 | 2021-02-23 | 엘지이노텍 주식회사 | 황화아연 소결체 및 이를 포함하는 적외선 투과 렌즈 |
KR102599663B1 (ko) | 2019-08-13 | 2023-11-08 | 엘지이노텍 주식회사 | 황화아연 소결체 및 이를 포함하는 적외선 투과 렌즈 |
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JPWO2009142238A1 (ja) | 2011-09-29 |
US20110176958A1 (en) | 2011-07-21 |
JP5418231B2 (ja) | 2014-02-19 |
US8298975B2 (en) | 2012-10-30 |
EP2213637A1 (en) | 2010-08-04 |
CN101795995A (zh) | 2010-08-04 |
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