WO2009078370A1 - ガスセンサ - Google Patents
ガスセンサ Download PDFInfo
- Publication number
- WO2009078370A1 WO2009078370A1 PCT/JP2008/072709 JP2008072709W WO2009078370A1 WO 2009078370 A1 WO2009078370 A1 WO 2009078370A1 JP 2008072709 W JP2008072709 W JP 2008072709W WO 2009078370 A1 WO2009078370 A1 WO 2009078370A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- gas
- detecting
- gas detecting
- contact layer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/128—Microapparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP08862844.1A EP2224231B1 (en) | 2007-12-14 | 2008-12-12 | Gas sensor |
JP2009517782A JP5161210B2 (ja) | 2007-12-14 | 2008-12-12 | ガスセンサ |
US12/527,824 US8393196B2 (en) | 2007-12-14 | 2008-12-12 | Gas sensor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-323238 | 2007-12-14 | ||
JP2007323238 | 2007-12-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009078370A1 true WO2009078370A1 (ja) | 2009-06-25 |
Family
ID=40795486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/072709 WO2009078370A1 (ja) | 2007-12-14 | 2008-12-12 | ガスセンサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US8393196B2 (ja) |
EP (1) | EP2224231B1 (ja) |
JP (1) | JP5161210B2 (ja) |
KR (1) | KR20100101046A (ja) |
WO (1) | WO2009078370A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022506000A (ja) * | 2018-06-29 | 2022-01-17 | 上海汽▲車▼集▲團▼股▲フン▼有限公司 | セラミックベースマイクロホットプレート及びその製造方法 |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITMI20080532A1 (it) * | 2008-03-28 | 2009-09-29 | St Microelectronics Srl | Metodo di fabbricazione di un sensore di gas integrato su substrato semiconduttore |
JP5287807B2 (ja) * | 2009-10-28 | 2013-09-11 | 株式会社デンソー | ガスセンサ素子 |
EP2559996B1 (en) | 2011-08-16 | 2017-11-22 | Nxp B.V. | Gas sensor |
EP2762865A1 (en) * | 2013-01-31 | 2014-08-06 | Sensirion Holding AG | Chemical sensor and method for manufacturing such a chemical sensor |
KR101772575B1 (ko) * | 2013-07-19 | 2017-08-30 | 한국전자통신연구원 | 저전력 구동을 위한 마이크로 반도체식 가스 센서 및 그 제조 방법 |
US9453807B2 (en) | 2014-04-08 | 2016-09-27 | Ams International Ag | Thermal conductivity gas sensor with amplification material |
CN105118854B (zh) * | 2015-07-01 | 2019-03-01 | 京东方科技集团股份有限公司 | 金属氧化物半导体薄膜、薄膜晶体管、制备方法及装置 |
TWI565944B (zh) * | 2015-12-11 | 2017-01-11 | 台灣奈米碳素股份有限公司 | 一種氣體感測器及其製作方法 |
EP3475690A4 (en) * | 2016-10-05 | 2019-05-08 | Hewlett-Packard Development Company, L.P. | INSULATED SENSORS |
KR102630480B1 (ko) * | 2016-10-06 | 2024-01-31 | 엘지전자 주식회사 | 센서 |
US11257985B2 (en) | 2016-12-05 | 2022-02-22 | Suzhou Lekin Semiconductor Co., Ltd. | Semiconductor element and sensing device having a light emitting unit and a sensor unit |
NL2020518B1 (en) * | 2018-03-02 | 2019-09-12 | Mimetas B V | Device and method for performing electrical measurements |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63279150A (ja) | 1987-05-11 | 1988-11-16 | Fuji Electric Co Ltd | 半導体式ガスセンサ |
JPS6417460U (ja) * | 1987-07-21 | 1989-01-27 | ||
JPH0551096B2 (ja) | 1986-08-13 | 1993-07-30 | New Cosmos Electric Co | |
JPH0627719B2 (ja) | 1988-04-09 | 1994-04-13 | 新コスモス電機株式会社 | におい検知装置 |
JPH0933470A (ja) | 1995-07-14 | 1997-02-07 | Ricoh Co Ltd | ガスセンサ |
JP2001091486A (ja) | 1999-09-20 | 2001-04-06 | Yazaki Corp | 熱型センサ |
JP2002286673A (ja) * | 2001-03-28 | 2002-10-03 | Denso Corp | ガスセンサ及びその製造方法 |
JP2005164570A (ja) * | 2003-11-11 | 2005-06-23 | Ngk Spark Plug Co Ltd | ガスセンサ及びその製造方法 |
JP2005226992A (ja) * | 2004-02-10 | 2005-08-25 | Fuji Electric Fa Components & Systems Co Ltd | 薄膜ガスセンサの製造方法 |
JP2007139669A (ja) * | 2005-11-21 | 2007-06-07 | Ngk Spark Plug Co Ltd | ガスセンサ |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03156354A (ja) * | 1989-11-14 | 1991-07-04 | Toyota Motor Corp | 積層型ガスセンサの製造方法 |
JP2565436B2 (ja) | 1991-08-22 | 1996-12-18 | 株式会社タツノ・メカトロニクス | 給油装置 |
JPH0627719A (ja) | 1992-07-13 | 1994-02-04 | Konica Corp | 静電荷像現像剤 |
US5510013A (en) * | 1993-09-10 | 1996-04-23 | Robert Bosch Gmbh | Layer system for electrochemical probes |
JPH09229840A (ja) | 1996-02-20 | 1997-09-05 | Nohmi Bosai Ltd | ガスセンサ |
DE10213805A1 (de) * | 2001-03-28 | 2002-11-07 | Denso Corp | Gassensor und Verfahren zum Herstellen eines Gassensors |
JP5138134B2 (ja) * | 2001-07-16 | 2013-02-06 | 株式会社デンソー | 薄膜式センサの製造方法ならびにフローセンサの製造方法 |
JP3759027B2 (ja) | 2001-12-07 | 2006-03-22 | フィガロ技研株式会社 | ガスセンサとその製造方法 |
JP3810324B2 (ja) | 2002-01-29 | 2006-08-16 | 日本特殊陶業株式会社 | ガスセンサ |
JP5021377B2 (ja) | 2006-06-16 | 2012-09-05 | 日本特殊陶業株式会社 | ガスセンサ |
JP5134490B2 (ja) * | 2008-10-10 | 2013-01-30 | 日本特殊陶業株式会社 | ガスセンサ |
-
2008
- 2008-12-12 EP EP08862844.1A patent/EP2224231B1/en not_active Not-in-force
- 2008-12-12 JP JP2009517782A patent/JP5161210B2/ja active Active
- 2008-12-12 US US12/527,824 patent/US8393196B2/en active Active
- 2008-12-12 KR KR1020097018272A patent/KR20100101046A/ko not_active Application Discontinuation
- 2008-12-12 WO PCT/JP2008/072709 patent/WO2009078370A1/ja active Application Filing
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0551096B2 (ja) | 1986-08-13 | 1993-07-30 | New Cosmos Electric Co | |
JPS63279150A (ja) | 1987-05-11 | 1988-11-16 | Fuji Electric Co Ltd | 半導体式ガスセンサ |
JPS6417460U (ja) * | 1987-07-21 | 1989-01-27 | ||
JPH0627719B2 (ja) | 1988-04-09 | 1994-04-13 | 新コスモス電機株式会社 | におい検知装置 |
JPH0933470A (ja) | 1995-07-14 | 1997-02-07 | Ricoh Co Ltd | ガスセンサ |
JP2001091486A (ja) | 1999-09-20 | 2001-04-06 | Yazaki Corp | 熱型センサ |
JP2002286673A (ja) * | 2001-03-28 | 2002-10-03 | Denso Corp | ガスセンサ及びその製造方法 |
JP2005164570A (ja) * | 2003-11-11 | 2005-06-23 | Ngk Spark Plug Co Ltd | ガスセンサ及びその製造方法 |
JP2005226992A (ja) * | 2004-02-10 | 2005-08-25 | Fuji Electric Fa Components & Systems Co Ltd | 薄膜ガスセンサの製造方法 |
JP2007139669A (ja) * | 2005-11-21 | 2007-06-07 | Ngk Spark Plug Co Ltd | ガスセンサ |
Non-Patent Citations (1)
Title |
---|
See also references of EP2224231A4 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022506000A (ja) * | 2018-06-29 | 2022-01-17 | 上海汽▲車▼集▲團▼股▲フン▼有限公司 | セラミックベースマイクロホットプレート及びその製造方法 |
JP7270937B2 (ja) | 2018-06-29 | 2023-05-11 | 上海汽▲車▼集▲團▼股▲フン▼有限公司 | セラミックベースマイクロホットプレート及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20100147685A1 (en) | 2010-06-17 |
US8393196B2 (en) | 2013-03-12 |
EP2224231A1 (en) | 2010-09-01 |
JP5161210B2 (ja) | 2013-03-13 |
JPWO2009078370A1 (ja) | 2011-04-28 |
EP2224231A4 (en) | 2016-06-29 |
KR20100101046A (ko) | 2010-09-16 |
EP2224231B1 (en) | 2019-12-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2009078370A1 (ja) | ガスセンサ | |
WO2008084582A1 (ja) | 物質検知センサ | |
WO2010091680A3 (de) | Solarzellenstring und solarmodul mit derartigen solarzellenstrings | |
WO2011084261A3 (en) | Touch sensitive device with multilayer electrode having improved optical and electrical performance | |
WO2009155164A3 (en) | Conducting film or electrode with improved optical and electrical performance | |
WO2011087615A3 (en) | An open circuit wear sensor for use with a conductive wear counterface | |
WO2018189419A3 (en) | Multilayer structure and related method of manufacture of multilayer structure | |
WO2007096096A3 (en) | Biomedical surface electrode | |
WO2007034240A3 (en) | Sensor device with backside contacts | |
WO2009060607A1 (ja) | 回路保護素子およびその製造方法 | |
WO2010091334A3 (en) | Analyte sensor and fabrication methods | |
TW200725880A (en) | Semiconductor piezoresistive sensor and operation method thereof | |
PL1956647T3 (pl) | Układ przełączający z urządzeniem połączeniowym oraz sposób jego wykonania | |
TW200631059A (en) | Semiconducor device and manufacturing method thereof | |
WO2009050833A1 (ja) | 不揮発性記憶素子、並びにその不揮発性記憶素子を用いた不揮発性半導体装置 | |
WO2010101399A3 (ko) | 터치패널센서 | |
TW200735428A (en) | Electronic element, current control device, arithmetic device, and display device | |
WO2008033419A8 (en) | Electrochemical sensor with interdigitated microelectrodes and conducted polymer | |
EA201391792A1 (ru) | Пленочный нагревательный элемент | |
WO2009143249A3 (en) | Grounding electrode | |
WO2007001391A3 (en) | Metalized elastomeric electrical contacts | |
TW200628312A (en) | Adhesive membrane for force switches and sensors | |
WO2013048759A3 (en) | Photovoltaic cell interconnect | |
WO2009083849A3 (en) | Direct conversion detector | |
WO2008021809A3 (en) | Multi-layer windshield moisture detector |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ENP | Entry into the national phase |
Ref document number: 2009517782 Country of ref document: JP Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2008862844 Country of ref document: EP |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08862844 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 12527824 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1020097018272 Country of ref document: KR |
|
NENP | Non-entry into the national phase |
Ref country code: DE |