WO2009069557A1 - ３次元パターン形成材料 - Google Patents

３次元パターン形成材料 Download PDF

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Publication number
WO2009069557A1
WO2009069557A1 PCT/JP2008/071242 JP2008071242W WO2009069557A1 WO 2009069557 A1 WO2009069557 A1 WO 2009069557A1 JP 2008071242 W JP2008071242 W JP 2008071242W WO 2009069557 A1 WO2009069557 A1 WO 2009069557A1
Authority
WO
WIPO (PCT)
Prior art keywords
photo
dimensional pattern
imprinting
dispersant
forming material
Prior art date
Application number
PCT/JP2008/071242
Other languages
English (en)
French (fr)
Inventor
Makoto Hanabata
Original Assignee
Nissan Chemical Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Chemical Industries, Ltd. filed Critical Nissan Chemical Industries, Ltd.
Priority to US12/743,681 priority Critical patent/US8344039B2/en
Priority to JP2009543778A priority patent/JP5099382B2/ja
Publication of WO2009069557A1 publication Critical patent/WO2009069557A1/ja

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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F292/00—Macromolecular compounds obtained by polymerising monomers on to inorganic materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/44—Polymerisation in the presence of compounding ingredients, e.g. plasticisers, dyestuffs, fillers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F2/00—Processes of polymerisation
    • C08F2/46—Polymerisation initiated by wave energy or particle radiation
    • C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K3/00—Use of inorganic substances as compounding ingredients
    • C08K3/34—Silicon-containing compounds
    • C08K3/36—Silica
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Polymerisation Methods In General (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Graft Or Block Polymers (AREA)

Abstract

【課題】光インプリント法によって3次元パターンを形成する工程において、残膜形成の抑制と、基板への高い密着性を付与されてなる光硬化性組成物を提供する。 【解決手段】光インプリント法によって３次元パターンを形成するための光硬化性組成物であって、該組成物が光重合性基を有するモノマー、分散剤が付加された無機微粒子、光重合開始剤を含むことを特徴とする光硬化性組成物。前記無機微粒子の平均粒子径が、１乃至１０００ｎｍである。前記無機微粒子が、シリカである。前記分散剤が、シランカップリング剤である。前記分散剤が、炭素と炭素の不飽和結合を有する有機基又はエポキシ基を有する有機基を含むシランカップリング剤である。
PCT/JP2008/071242 2007-11-29 2008-11-21 ３次元パターン形成材料 WO2009069557A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/743,681 US8344039B2 (en) 2007-11-29 2008-11-21 Three-dimensional pattern forming material
JP2009543778A JP5099382B2 (ja) 2007-11-29 2008-11-21 ３次元パターン形成材料

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007309256 2007-11-29
JP2007-309256 2007-11-29

Publications (1)

Publication Number Publication Date
WO2009069557A1 true WO2009069557A1 (ja) 2009-06-04

Family

ID=40678455

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/071242 WO2009069557A1 (ja) 2007-11-29 2008-11-21 ３次元パターン形成材料

Country Status (5)

Country Link
US (1) US8344039B2 (ja)
JP (1) JP5099382B2 (ja)
KR (1) KR101552526B1 (ja)
TW (1) TWI449712B (ja)
WO (1) WO2009069557A1 (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101928436A (zh) * 2009-06-23 2010-12-29 Dic株式会社 二氧化硅分散体的制造方法、能量射线固化型树脂组合物及膜
JP2011066074A (ja) * 2009-09-15 2011-03-31 Fujifilm Corp インプリント用硬化性組成物
CN102206439A (zh) * 2010-03-24 2011-10-05 Dic株式会社 无机粒子分散体、能量线固化性树脂组合物以及膜
WO2013176020A1 (ja) * 2012-05-25 2013-11-28 綜研化学株式会社 インプリント用光硬化性樹脂組成物、その製造方法および構造体
WO2014065149A1 (ja) * 2012-10-22 2014-05-01 綜研化学株式会社 インプリント用光硬化性樹脂組成物、インプリント用モールドの製造方法およびインプリント用モールド
WO2015159821A1 (ja) * 2014-04-18 2015-10-22 東京応化工業株式会社 細胞培養基材形成用の感光性樹脂組成物
WO2020013213A1 (ja) * 2018-07-10 2020-01-16 積水化学工業株式会社 光反応性組成物
JP2020164881A (ja) * 2018-12-27 2020-10-08 パナソニックＩｐマネジメント株式会社 紫外線硬化性樹脂組成物、発光装置の製造方法及び発光装置
JP2022501461A (ja) * 2018-09-28 2022-01-06 エルジー・ケム・リミテッド 密封材組成物
WO2024024370A1 (ja) * 2022-07-25 2024-02-01 信越化学工業株式会社 光硬化性組成物およびその硬化物ならびに被覆物品

Families Citing this family (1)

* Cited by examiner, † Cited by third party
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CN109414726A (zh) * 2016-07-08 2019-03-01 马萨诸塞大学 使用压印光刻的纳米结构图案化

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03149267A (ja) * 1989-11-02 1991-06-25 Sharp Corp 光重合性感光塗料組成物
JP2003330180A (ja) * 2002-05-13 2003-11-19 Tokyo Ohka Kogyo Co Ltd 感光性樹脂組成物及びそれを用いたパターンの形成方法
JP2007177194A (ja) * 2005-11-30 2007-07-12 Kri Inc 光硬化性組成物
JP2007216501A (ja) * 2006-02-16 2007-08-30 Kri Inc パターン形成用モールドの製造方法およびパターン形成用モールド
JP2007250253A (ja) * 2006-03-14 2007-09-27 Matsushita Electric Ind Co Ltd 導電性パターンの形成方法、導電性パターン形成用組成物および導電性パターンを有する電子部品

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JP4050370B2 (ja) * 1998-01-07 2008-02-20 株式会社Ｋｒｉ 無機質含有感光性樹脂組成物および無機パターン形成方法
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US6399670B1 (en) * 2000-01-21 2002-06-04 Congoleum Corporation Coating having macroscopic texture and process for making same
US6534235B1 (en) * 2000-10-31 2003-03-18 Kansai Research Institute, Inc. Photosensitive resin composition and process for forming pattern
KR100784602B1 (ko) * 2000-12-05 2007-12-11 가부시끼가이샤 케이알아이 활성 성분 및 그것을 이용한 감광성 수지 조성물
JP4712236B2 (ja) 2001-01-15 2011-06-29 大日本印刷株式会社 反射防止膜、反射防止フィルム、画像表示装置、及び、それらの製造方法
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03149267A (ja) * 1989-11-02 1991-06-25 Sharp Corp 光重合性感光塗料組成物
JP2003330180A (ja) * 2002-05-13 2003-11-19 Tokyo Ohka Kogyo Co Ltd 感光性樹脂組成物及びそれを用いたパターンの形成方法
JP2007177194A (ja) * 2005-11-30 2007-07-12 Kri Inc 光硬化性組成物
JP2007216501A (ja) * 2006-02-16 2007-08-30 Kri Inc パターン形成用モールドの製造方法およびパターン形成用モールド
JP2007250253A (ja) * 2006-03-14 2007-09-27 Matsushita Electric Ind Co Ltd 導電性パターンの形成方法、導電性パターン形成用組成物および導電性パターンを有する電子部品

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101928436A (zh) * 2009-06-23 2010-12-29 Dic株式会社 二氧化硅分散体的制造方法、能量射线固化型树脂组合物及膜
CN101928436B (zh) * 2009-06-23 2014-09-24 Dic株式会社 二氧化硅分散体的制造方法、能量射线固化型树脂组合物及膜
JP2011066074A (ja) * 2009-09-15 2011-03-31 Fujifilm Corp インプリント用硬化性組成物
CN102206439A (zh) * 2010-03-24 2011-10-05 Dic株式会社 无机粒子分散体、能量线固化性树脂组合物以及膜
KR101292720B1 (ko) * 2010-03-24 2013-08-01 디아이씨 가부시끼가이샤 무기 입자 분산체, 에너지선 경화성 수지 조성물, 및 필름
JPWO2013176020A1 (ja) * 2012-05-25 2016-01-12 綜研化学株式会社 インプリント用光硬化性樹脂組成物、その製造方法および構造体
WO2013176020A1 (ja) * 2012-05-25 2013-11-28 綜研化学株式会社 インプリント用光硬化性樹脂組成物、その製造方法および構造体
WO2014065149A1 (ja) * 2012-10-22 2014-05-01 綜研化学株式会社 インプリント用光硬化性樹脂組成物、インプリント用モールドの製造方法およびインプリント用モールド
CN104737272A (zh) * 2012-10-22 2015-06-24 综研化学株式会社 压印用光固化性树脂组合物、压印用模具的制造方法以及压印用模具
JPWO2014065149A1 (ja) * 2012-10-22 2016-09-08 綜研化学株式会社 インプリント用光硬化性樹脂組成物、インプリント用モールドの製造方法およびインプリント用モールド
WO2015159821A1 (ja) * 2014-04-18 2015-10-22 東京応化工業株式会社 細胞培養基材形成用の感光性樹脂組成物
JP2015204768A (ja) * 2014-04-18 2015-11-19 東京応化工業株式会社 細胞培養基材形成用の感光性樹脂組成物
US10336976B2 (en) 2014-04-18 2019-07-02 Tokyo Ohka Kogyo Co., Ltd. Photosensitive resin composition for forming cell culture substrate
WO2020013213A1 (ja) * 2018-07-10 2020-01-16 積水化学工業株式会社 光反応性組成物
JPWO2020013213A1 (ja) * 2018-07-10 2021-05-20 積水化学工業株式会社 光反応性組成物
JP7285486B2 (ja) 2018-07-10 2023-06-02 積水化学工業株式会社 光反応性組成物
JP2022501461A (ja) * 2018-09-28 2022-01-06 エルジー・ケム・リミテッド 密封材組成物
JP7180837B2 (ja) 2018-09-28 2022-11-30 エルジー・ケム・リミテッド 密封材組成物
JP2020164881A (ja) * 2018-12-27 2020-10-08 パナソニックＩｐマネジメント株式会社 紫外線硬化性樹脂組成物、発光装置の製造方法及び発光装置
WO2024024370A1 (ja) * 2022-07-25 2024-02-01 信越化学工業株式会社 光硬化性組成物およびその硬化物ならびに被覆物品

Also Published As

Publication number Publication date
US20100286300A1 (en) 2010-11-11
US8344039B2 (en) 2013-01-01
TWI449712B (zh) 2014-08-21
KR20100113499A (ko) 2010-10-21
JP5099382B2 (ja) 2012-12-19
TW200940565A (en) 2009-10-01
KR101552526B1 (ko) 2015-09-14
JPWO2009069557A1 (ja) 2011-04-14

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