WO2009011232A1 - 複合酸化物焼結体、アモルファス複合酸化膜の製造方法、アモルファス複合酸化膜、結晶質複合酸化膜の製造方法及び結晶質複合酸化膜 - Google Patents
複合酸化物焼結体、アモルファス複合酸化膜の製造方法、アモルファス複合酸化膜、結晶質複合酸化膜の製造方法及び結晶質複合酸化膜 Download PDFInfo
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- WO2009011232A1 WO2009011232A1 PCT/JP2008/062171 JP2008062171W WO2009011232A1 WO 2009011232 A1 WO2009011232 A1 WO 2009011232A1 JP 2008062171 W JP2008062171 W JP 2008062171W WO 2009011232 A1 WO2009011232 A1 WO 2009011232A1
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- composite oxide
- oxide film
- film
- producing
- amorphous
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
- C04B35/457—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates based on tin oxides or stannates
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- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
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- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
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- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/632—Organic additives
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
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Abstract
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009523598A JP4489842B2 (ja) | 2007-07-13 | 2008-07-04 | 複合酸化物焼結体、アモルファス複合酸化膜の製造方法、アモルファス複合酸化膜、結晶質複合酸化膜の製造方法及び結晶質複合酸化膜 |
EP08777886.6A EP2172436A4 (en) | 2007-07-13 | 2008-07-04 | VERBUNDOXIDSINTER, METHOD FOR THE PREPARATION OF AN AMORPHOUS VERBUNDOXIDFILMS, AMORPHER VERBUNDOXIDFILM, METHOD FOR THE PRODUCTION OF A CRYSTALLINE COMPOSITE OXIDE FILM AND CRYSTALLINE COMPOSITE OXIDE FILM |
CN2008800226763A CN101687708B (zh) | 2007-07-13 | 2008-07-04 | 复合氧化物烧结体、非晶复合氧化膜及其制造方法和晶体复合氧化膜及其制造方法 |
US12/668,216 US8277694B2 (en) | 2007-07-13 | 2008-07-04 | Sintered compact of composite oxide, amorphous film of composite oxide, process for producing said film, crystalline film of composite oxide and process for producing said film |
KR1020097025400A KR101155358B1 (ko) | 2007-07-13 | 2008-07-04 | 복합 산화물 소결체, 아모르퍼스 복합 산화막의 제조 방법, 아모르퍼스 복합 산화막, 결정질 복합 산화막의 제조 방법 및 결정질 복합 산화막 |
US13/592,520 US8728358B2 (en) | 2007-07-13 | 2012-08-23 | Sintered compact, amorphous film and crystalline film of composite oxide, and process for producing the films |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-183799 | 2007-07-13 | ||
JP2007183799 | 2007-07-13 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/668,216 A-371-Of-International US8277694B2 (en) | 2007-07-13 | 2008-07-04 | Sintered compact of composite oxide, amorphous film of composite oxide, process for producing said film, crystalline film of composite oxide and process for producing said film |
US13/592,520 Continuation US8728358B2 (en) | 2007-07-13 | 2012-08-23 | Sintered compact, amorphous film and crystalline film of composite oxide, and process for producing the films |
Publications (1)
Publication Number | Publication Date |
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WO2009011232A1 true WO2009011232A1 (ja) | 2009-01-22 |
Family
ID=40259570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2008/062171 WO2009011232A1 (ja) | 2007-07-13 | 2008-07-04 | 複合酸化物焼結体、アモルファス複合酸化膜の製造方法、アモルファス複合酸化膜、結晶質複合酸化膜の製造方法及び結晶質複合酸化膜 |
Country Status (7)
Country | Link |
---|---|
US (2) | US8277694B2 (ja) |
EP (1) | EP2172436A4 (ja) |
JP (1) | JP4489842B2 (ja) |
KR (1) | KR101155358B1 (ja) |
CN (1) | CN101687708B (ja) |
TW (2) | TWI573773B (ja) |
WO (1) | WO2009011232A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010202930A (ja) * | 2009-03-03 | 2010-09-16 | Nippon Mining & Metals Co Ltd | 酸化物焼結体ターゲット、該ターゲットの製造方法、透明導電膜および該透明導電膜の製造方法 |
WO2015115237A1 (ja) * | 2014-01-28 | 2015-08-06 | 株式会社カネカ | 透明電極付き基板およびその製造方法 |
JP2015158014A (ja) * | 2009-11-19 | 2015-09-03 | 株式会社アルバック | 透明導電膜の製造方法、透明導電膜の製造装置、スパッタリングターゲット及び透明導電膜 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4885274B2 (ja) * | 2007-06-26 | 2012-02-29 | Jx日鉱日石金属株式会社 | アモルファス複合酸化膜、結晶質複合酸化膜、アモルファス複合酸化膜の製造方法および結晶質複合酸化膜の製造方法 |
KR101224769B1 (ko) * | 2008-06-10 | 2013-01-21 | 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 | 스퍼터링용 산화물 소결체 타겟 및 그 제조 방법 |
KR101267164B1 (ko) | 2009-06-05 | 2013-05-24 | 제이엑스 닛코 닛세키 킨조쿠 가부시키가이샤 | 산화물 소결체, 그 제조 방법 및 산화물 소결체 제조용 원료 분말 |
CN105439541B (zh) | 2009-10-06 | 2018-09-14 | 吉坤日矿日石金属株式会社 | 氧化铟烧结体、氧化铟透明导电膜以及该透明导电膜的制造方法 |
JP5411945B2 (ja) | 2009-10-26 | 2014-02-12 | Jx日鉱日石金属株式会社 | 酸化インジウム系焼結体及び酸化インジウム系透明導電膜 |
TWI494553B (zh) | 2010-02-05 | 2015-08-01 | Samsung Electronics Co Ltd | 評估led光學性質之設備及方法以及製造led裝置之方法 |
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JPWO2009011232A1 (ja) | 2010-09-16 |
US8728358B2 (en) | 2014-05-20 |
EP2172436A4 (en) | 2013-07-31 |
US20120319057A1 (en) | 2012-12-20 |
US20100140570A1 (en) | 2010-06-10 |
EP2172436A1 (en) | 2010-04-07 |
CN101687708A (zh) | 2010-03-31 |
TWI476159B (zh) | 2015-03-11 |
CN101687708B (zh) | 2013-01-02 |
JP4489842B2 (ja) | 2010-06-23 |
TWI573773B (zh) | 2017-03-11 |
TW201504188A (zh) | 2015-02-01 |
KR20100010926A (ko) | 2010-02-02 |
US8277694B2 (en) | 2012-10-02 |
KR101155358B1 (ko) | 2012-06-19 |
TW200906729A (en) | 2009-02-16 |
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