WO2007074854A1 - Dispositif de transport sans contact - Google Patents

Dispositif de transport sans contact Download PDF

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Publication number
WO2007074854A1
WO2007074854A1 PCT/JP2006/326019 JP2006326019W WO2007074854A1 WO 2007074854 A1 WO2007074854 A1 WO 2007074854A1 JP 2006326019 W JP2006326019 W JP 2006326019W WO 2007074854 A1 WO2007074854 A1 WO 2007074854A1
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WO
WIPO (PCT)
Prior art keywords
cylindrical chamber
concave cylindrical
fluid
nozzle
contact
Prior art date
Application number
PCT/JP2006/326019
Other languages
English (en)
Japanese (ja)
Inventor
Hitoshi Iwasaka
Hideyuki Tokunaga
Kotaro Kobayashi
Yuji Kasai
Original Assignee
Harmotec Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harmotec Co., Ltd. filed Critical Harmotec Co., Ltd.
Publication of WO2007074854A1 publication Critical patent/WO2007074854A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention relates to a non-contact conveyance device used for holding, conveying, rotating, etc. a plate-like body in a non-contact manner.
  • Patent Document 1 JP 2005-51260 A
  • the present invention has been made in view of the above-mentioned circumstances, paying attention to microscopic energy loss that has not been paid attention to in the conventional non-contact transfer device, and effectively using the energy of the fluid, thereby improving the energy efficiency.
  • the purpose is to improve and save energy.
  • the present invention is formed on a substantially columnar main body having a concave cylindrical chamber having an inner circumferential surface formed on the opening side of the concave cylindrical chamber.
  • two nozzles may be arranged at positions that are point-symmetric with respect to the center of the circumference of the concave cylindrical chamber.
  • the nozzle may be disposed in the middle of the concave cylindrical chamber.
  • the nozzle is provided so as to have a predetermined angle ⁇ with respect to a tangent that is in contact with the inner periphery at the discharge point P.
  • the angle ⁇ is a fluid from the discharge point P.
  • the opening edge of the concave cylindrical chamber may be smoothly curved from the inner peripheral surface of the concave cylindrical chamber and extend to the outer edge of the concave cylindrical chamber opening.
  • FIG. 1 is a perspective view showing a configuration of a non-contact transfer device 1 according to a first embodiment, and (a) is an oblique view From below, (b) is a perspective view of the oblique upward force.
  • FIG. 2 is a cross-sectional view of the non-contact transfer apparatus 1 according to the embodiment, (a) is a cross-sectional view taken along line II in FIG. 1 (a), and (b) is II II in FIG. 1 (a). It is line sectional drawing.
  • FIG. 3 is a diagram showing the relationship between the position of the short offset nozzle 5 and the suction force.
  • FIG. 4 (a) is a diagram showing the pressure distribution when two short offset nozzles 5 are arranged point-symmetrically, and (b) is a diagram showing the velocity distribution.
  • FIG. 5 (a) is a diagram showing a pressure distribution when only one short offset nozzle 5 is arranged, and (b) is a diagram showing a velocity distribution.
  • FIG. 6 is a diagram showing the relationship between the number of short offset nozzles 5 and the suction force.
  • FIG. 7 is a diagram showing energy efficiency of the non-contact conveyance device 1 according to the first embodiment with respect to the non-contact conveyance device according to the prior art using the concept of air power.
  • FIG. 8 is a view showing energy efficiency of the non-contact conveyance device 1 according to the first embodiment with respect to the non-contact conveyance device according to the prior art using the concept of air power.
  • FIG. 9 is a diagram showing the energy efficiency of the non-contact conveyance device 1 according to the first embodiment with respect to the non-contact conveyance device according to the prior art using the concept of air power.
  • FIG. 10 is a perspective view showing a configuration of a non-contact transfer device 10 according to a second embodiment.
  • FIG. 11 is a view showing the configuration of the non-contact transfer apparatus 10 according to the embodiment, wherein (a) is a top view, (b) is a side view, and (c) is a bottom view.
  • FIG. 12 is a drive explanatory diagram of a centering mechanism provided in the non-contact transfer apparatus 10 according to the embodiment.
  • FIG. 13 is a perspective view showing a configuration of a non-contact transfer device 20 according to a third embodiment.
  • FIG. 14 is a view showing a configuration of a non-contact transfer device 20 according to the embodiment, wherein (a) is a top view and (b) is a side view.
  • FIG. 15 is a drive explanatory diagram of a centering mechanism 22 provided in the non-contact transport apparatus 10 according to the same embodiment.
  • Non-contact transfer device 2... Swirl flow forming body, 3... Recessed cylindrical chamber, 4... Flat facing surface, 5... Short offset nozzle, 6... Belmouth fluid passage, ⁇ ⁇ Open edge, 8 ... flow Body conductor Pl, 11 ⁇ Base 12, ⁇ ⁇ Centering mechanism, 121, 221 ⁇ Cylinder, 122 ⁇ Link arm, 222 ⁇ Zinc pre-clamp, 123, 213, 223 ⁇ ⁇ Centering guide ⁇ Fluid supply port, 21 ⁇ •
  • FIG. 1 is a perspective view showing a configuration of a non-contact transport apparatus 1 according to the present embodiment.
  • (A) is an oblique view from below, and (b) is a view of the oblique upward force.
  • FIG. 2 is a cross-sectional view of the non-contact conveyance device 1.
  • (A) is a cross-sectional view taken along line II in FIG. 1 (a)
  • (b) is a cross-sectional view taken along line II-II in FIG. 1 (a).
  • the non-contact conveyance device 1 has a substantially columnar swirl flow forming body 2.
  • a concave cylindrical chamber 3 is formed in the swirl flow forming body 2 so as to form a columnar space and its lower end is an opening.
  • the opening side of the concave cylindrical chamber 3 faces a plate-like body (a plate-like workpiece such as a wafer) and is a flat facing surface 4 in which the facing surface is formed flat.
  • the opening edge 7 that forms the periphery of the opening of the concave cylindrical chamber 3 has a curved shape with a smooth cross section. That is, the cross-sectional shape of the opening edge 7 is a shape that smoothly curves from the inner peripheral surface of the recessed cylindrical chamber 3 and extends to the outer edge of the opening as shown in FIG. 2 (b). In this case, the curvature of the opening edge 7 is, for example, about R2.5, and the surface is preferably extremely smooth.
  • reference numeral 5 in FIGS. 1 and 2 denotes a short offset nozzle that discharges fluid into the concave cylindrical chamber 3, and is formed so as to face the concave cylindrical chamber 3.
  • the short offset nozzle 5 is connected to a bell mouth-like fluid passage 6 for supplying fluid into the concave cylindrical chamber 3 through the nozzle.
  • the short offset nozzle 5 is provided so as to have a predetermined angle ⁇ with respect to a tangent line that is in contact with the inner periphery at the discharge point P.
  • This angle ⁇ is determined by subtracting the radius rl perpendicular to the line L1 extending in the fluid discharge direction and the point P2 between the radius rl and the line L1 and the point P3 between the radius rl and the circumference P3.
  • the offset ⁇ When the offset ⁇ is provided in this way, the shear resistance force on the wall surface of the concave cylindrical chamber 3 when fluid is discharged from the short offset nozzle 5 into the concave cylindrical chamber 3 can be suppressed, and the entrainment effect can be increased. Therefore, the input energy can be more efficiently converted into rotational momentum.
  • the short offset nozzle 5 is arranged so as to face the middle of the concave cylindrical chamber 3 in the vertical direction.
  • the fluid discharged into the concave cylindrical chamber 3 causes friction with the upper surface of the concave cylindrical chamber 3 due to its viscosity, and the boundary layer develops.
  • the nozzle position is located in the middle of the concave cylindrical chamber 3, friction between the upper surface of the concave cylindrical chamber 3 can be suppressed, and as a result, it can be efficiently converted into rotational force. Can reduce energy loss.
  • two short offset nozzles 5 are arranged at positions that are point-symmetric with respect to the center 0 of the circumference as shown in FIG. 2 (a).
  • the fluid discharged from the short-offset nozzle 5 facing the point symmetry into the concave cylindrical chamber 3 is a force that decelerates and gradually decelerates along the inner wall of the concave cylindrical chamber 3. Increase the mentament effect and centrifugal force.
  • FIG. 4 (a) is a diagram showing the pressure distribution when two short offset nozzles 5 are arranged point-symmetrically
  • FIG. 4 (b) is a diagram showing the velocity distribution.
  • FIG. 5 (a) is a diagram showing the pressure distribution when only one short offset nozzle 5 is arranged
  • FIG. 5 (b) is a diagram showing the velocity distribution.
  • the pressure distribution and velocity distribution are biased. This is because the wall flow that forms a swirling flow along the inner wall of the concave cylindrical chamber 3 causes friction due to the centrifugal force and the entrainment effect of the fluid with a high flow velocity discharged from the short offset nozzle 5 and the viscosity of the fluid. It happens because of the slowdown due to the development of the boundary layer. If the plate is sucked in this state, the plate will tilt. It will be sucked and held, resulting in an unstable state.
  • the short offset nozzle 5 is shorter in length than the nozzles according to the prior art in order to minimize the pressure loss in the nozzle.
  • the bell mouth-like fluid passage 6 is drilled horizontally from the fluid inlet 8 formed on the side surface of the swirling flow forming body 2 to the closed end surface 7 and faces the inner peripheral surface of the concave cylindrical chamber 3. It communicates with offset nozzle 5. As shown in Fig. 2 (a), the bellmouth fluid passage 6 communicates with the short offset nozzle 5 with a smooth curved surface, so that loss due to separation when fluid flows into the nozzle Can be greatly reduced.
  • the non-contact transfer device 1 having the above-described configuration, when a fluid is supplied from an air supply device (not shown) to the fluid introduction port 8, the fluid is short-circuited via the bell mouth fluid passage 6. It is blown into the concave cylindrical chamber 3 from the offset nozzle 5. The fluid blown into the concave cylindrical chamber 3 is rectified as a swirling flow in the internal space of the concave cylindrical chamber 3 and then flows out of the concave cylindrical chamber 3.
  • the energy consumption of pneumatic equipment including the non-contact conveyance device as described above is expressed by air consumption, and has been evaluated by being converted into power consumption through the specific energy of the compressor used.
  • air consumption is not directly linked to energy, it is desirable to define and quantify energy flow with compressed air flow. Therefore, in this specification, we focus on the energy of compressed air flowing and introduce the concept of effective energy and air power in evaluating energy efficiency.
  • Air power is expressed in units of kw (kilowatts), as is electric power. Air power is defined as the effective energy flux of compressed air and is expressed as:
  • a is the absolute pressure and atmospheric pressure of compressed air, Q and Q, respectively
  • a is the volumetric flow rate in the compressed state and the volumetric flow rate converted to the atmospheric pressure state. Even if the pressure is different, the energy consumption varies greatly even with the same consumption flow rate, and these must be handled appropriately.
  • the compressed air can be handled in the same way as electric power in the energy quantification process.
  • FIGS. 7 to 9 show a non-contact conveyance device according to the prior art of the non-contact conveyance device 1 according to the present embodiment (specifically, a non-contact conveyance device disclosed in Japanese Patent Laid-Open No. 2005-51260). It is a figure which displays the energy efficiency with respect to using the concept of air power.
  • the non-contact conveyance device 1 formed with a smooth curved surface at the opening ridge angle prevents non-contact conveyance according to the conventional technique in which the opening edge is chamfered as a result of suppressing the separation due to the ridge angle.
  • An average 12% improvement in efficiency was seen compared to the equipment.
  • the stability of holding the plate-like body is increased as compared with the non-contact transfer device according to the prior art.
  • FIG. 7 as a result of the short offset nozzle 5 being arranged so as to face the middle of the concave cylindrical chamber 3, it is generated by friction due to the viscosity of the fluid and the upper surface of the concave cylindrical chamber 3. As a result, energy loss was suppressed, and an average 21% improvement in efficiency was seen compared to the non-contact transfer device according to the prior art in which the nozzles are arranged on the bottom surface of the concave cylindrical chamber 3.
  • the non-contact transfer device 1 in which the short offset nozzle 5 is disposed at a position farther inward than the inner peripheral surface of the concave cylindrical chamber 3 includes the inner peripheral surface of the concave cylindrical chamber 3
  • the nozzle is arranged along the inner wall of the recessed cylindrical chamber 3 as a result of energy attenuation due to the large shearing force in the cylinder being avoided, and the input energy is more efficiently converted into rotational momentum. An average improvement of 17% was seen compared to the equipment.
  • FIG. 9 shows a result obtained by integrating the efficiency improvements shown in FIGS.
  • the non-contact conveyance device 1 showed a significant improvement in efficiency of 41% on average in comparison with the non-contact conveyance device according to the prior art.
  • the force in which the two short offset nozzles 5 are arranged in a point-symmetrical position with respect to the center O of the circumference of the concave cylindrical chamber 3 The arrangement method of the two nozzles is limited to this. There is no need to be done. Further, the number of the short offset nozzles 5 is not limited to two as in the above example, and may be any number of two or more that allows the fluid to rotate efficiently and in a balanced manner.
  • FIG. 10 is a perspective view showing the configuration of the non-contact transport apparatus 10 according to the present embodiment.
  • FIG. 11 is a view showing the configuration of the non-contact transfer apparatus 10, where (a) is a top view, (b) is a side view, and (c) is a bottom view.
  • FIG. 12 is an explanatory view of driving of the centering mechanism 12 provided in the non-contact transport apparatus 10.
  • the non-contact transfer device 10 according to the present embodiment is configured by using a plurality of swirl flow forming bodies 2 according to the first embodiment. Specifically, the non-contact transfer device 10 is attached to the base 11 and the base 11. 6 swirl flow forming bodies 2 provided, and a centering mechanism 12 mounted on the base 11 to prevent the plate-like body from being detached.
  • the six swirling flow forming bodies 2 are supported so that the closed end surface side is attached to the inner surface of the base portion 11, and the flat opposing surfaces 4 are all the same surface.
  • the outer surface of the base 11 The body supply port 13 is provided, and a base passage (not shown) that connects the fluid supply port 13 and the fluid introduction port 8 of the swirl flow forming body 2 corresponding to the fluid supply port 13 is provided in the wall body. Branching out.
  • a centering mechanism 12 is mounted on the outer surface of the base 11 for positioning and preventing the plate-like body held in a non-contact manner. As shown in FIG. 12, the centering mechanism 12 includes six cylinders 121 whose one ends communicate with each other, and six link arms each having one end connected to the other end of each cylinder 121.
  • each link arm 122 and six centering guides 123 suspended from the other end of each link arm 122. Since the six cylinders 121 communicate with each other at one end, they can be pressurized or depressurized by a single system of fluid. When the pressure inside the cylinder 121 is reduced by the fluid, the six centering guides 123 are driven in the center direction via the six link arms 122. Due to the movement in the center direction by the centering guide 123, the outer periphery of the plate-like body held in a non-contact manner by the non-contact conveying device 10 is regulated, and the center of the plate-like body is the center of the internal space of the base portion 11. Is positioned so as to match.
  • the six centering guides 123 are driven through the six link arms 122 in a direction in which the central force is also separated.
  • the restriction on the plate-like body is released, and the plate-like body becomes free.
  • the non-contact conveyance device 10 having the above-described configuration, when a fluid is supplied from an air supply device (not shown) to the fluid supply port 13, the fluid passes through a passage in the base portion 11 (not shown), and then passes through each passage. It is sent to the swirl flow forming body 2.
  • the fluid sent to each swirl flow forming body 2 is blown into the concave cylindrical chamber 3 from the short offset nozzle 5 through the fluid inlet 8 and the bell mouth fluid passage 6.
  • the fluid blown into the concave cylindrical chamber 3 is rectified as a swirling flow in the internal space of the concave cylindrical chamber 3 and then flows out of the concave cylindrical chamber 3.
  • each swirling flow forming body 2 is adjusted in advance so that the swirling flow is not rotated when the plate-like body is held in a non-contact manner.
  • the non-contact transfer device 10 among the six swirl flow forming bodies 2, three swirl swirl flows clockwise, and the remaining three swirl counterclockwise. It has been adjusted.
  • each swirl flow forming body 2 When the fluid flows out from the concave cylindrical chamber 3 of each swirl flow forming body 2, each swirl flow forming body 2
  • a plate-like body is arranged at a position facing the flat opposed surface 4, the atmospheric pressure supply from the outside to the inside of the recessed cylindrical chamber 3 is limited, and gradually per unit area due to the entrainment effect and centrifugal force. As a result, the density of the fluid molecules decreases, the pressure in the center of the swirling flow in the concave cylindrical chamber 3 decreases, and negative pressure is generated.
  • the plate-like body is pressed by the ambient atmospheric pressure and sucked toward the flat opposed surface 4 side, while when the distance between the flat opposed surface 4 and the plate-like body approaches, the discharge from the concave cylindrical chamber 3 is performed.
  • the pressure at the center of the swirl flow in the concave cylindrical chamber 3 rises and the plate-like body does not come into contact with the flat opposed surface 4 and the plate.
  • the distance of the body is maintained.
  • the plate-like body is stably held in a non-contact state by the air interposed between the flat opposed surface 4 and the plate-like body.
  • the plate-like body is sucked by the swirling flow formed by the six swirling flow forming bodies 2, so that the suction force can be made extremely strong. Further, in this non-contact conveyance device 10, since a swirling flow is formed at six locations, even a plate-like body having a large diameter is sucked throughout. Therefore, even if the plate-like body is warped, it is possible to correct the warp throughout. Furthermore, since the non-contact conveying apparatus 10 uses the swirl flow forming body 2 similar to the non-contact conveying apparatus 1 according to the first embodiment, it is the same as the non-contact conveying apparatus 1 according to the first embodiment. In addition, significant energy efficiency and energy savings can be realized.
  • FIG. 13 is a perspective view showing a configuration of the non-contact transport device 20 according to the present embodiment.
  • FIG. 14 is a diagram showing the configuration of the non-contact transport device 20, where (a) is a top view and (b) is a side view.
  • FIG. 15 is an explanatory view of driving of the centering mechanism 22 provided in the non-contact transport device 20.
  • the non-contact conveyance device 20 is configured by using a plurality of swirl flow forming bodies 2 according to the first embodiment, and specifically, a plate having a flat surface facing the plate-like body.
  • the base 21, the six swirling flow forming bodies 2 attached to the base 21, the centering mechanism 22 provided below the base 21, and the base 21 are fixed so that the base 21 can be moved. And a gripping portion 23 for the purpose.
  • the base 21 is composed of a base 211 and two arms 212 branched from the base 211 in a bifurcated manner.
  • a protruding centering guide 213 is provided at the protruding end of each arm 212.
  • the six swirling flow forming bodies 2 are supported so that the closed end face side is attached to the upper surface of the base body 21, and the flat opposed faces 4 are all the same face.
  • a fluid supply port 24 is provided on the side surface of the grip portion 23, and a fluid (not shown) that communicates the fluid supply port 24 with the fluid introduction port 8 of the swirling flow forming body 2 inside the base body 21.
  • a passage is formed by branching from the fluid supply port 24.
  • a centering mechanism 22 is provided below the base 21 for positioning and preventing separation of the plate-like body held in a non-contact manner. As shown in FIG. 15, the centering mechanism 22 includes a cylinder 221 provided in the gripping portion 23, one end connected to one end of the cylinder 221 and two centering guides provided to the other end.
  • the two centering guides 223 are driven through the link plate 222 in a direction in which the plate-like body force is also separated.
  • the restriction on the plate-like body is released, and the plate-like body becomes free.
  • the non-contact conveyance device 20 having the above configuration, when a fluid is supplied from an air supply device (not shown) to the fluid supply port 24, the fluid passes through a fluid passage in the base body 21 (not shown). And is sent to each swirl flow forming body 2.
  • the fluid sent to each swirling flow forming body 2 is blown into the concave cylindrical chamber 3 from the short offset nozzle 5 via the fluid introducing port 8 and the bell mouth fluid passage 6.
  • the fluid blown into the concave cylindrical chamber 3 is rectified as a swirling flow in the internal space of the concave cylindrical chamber 3 and then flows out of the concave cylindrical chamber 3.
  • each swirling flow forming body 2 has its swirling direction adjusted in advance so as not to rotate when the plate-like body is held in a non-contact manner.
  • the non-contact conveyance device 20 among the six swirl flow forming bodies 2, three swirl swirl flows clockwise, and the remaining three swirl counterclockwise. Adjusted.
  • the pressure at the center of the swirl flow in the concave cylindrical chamber 3 rises and the plate-like body does not come into contact with the flat opposed surface 4 and the plate.
  • the distance of the body is maintained.
  • the plate-like body is stably held in a non-contact state by the air interposed between the flat opposed surface 4 and the plate-like body.
  • this non-contact conveyance device 20 since the plate-like body is sucked by the swirling flow formed by the six swirling flow forming bodies 2, the suction force can be made extremely strong. Further, in this non-contact conveyance device 20, since a swirl flow is formed at six locations, even a plate-like body having a large diameter is sucked throughout. Therefore, even if the plate-like body is warped, it is possible to correct the warp throughout. Further, since the non-contact transfer device 20 is configured in a plate shape, it can freely access even the wafers in the stacked wafer cassettes that have been difficult to access. Further, in this non-contact conveying apparatus 20, the same swirling flow as that in the non-contact conveying apparatus 1 according to the first embodiment is used. Since the formed body 2 is used, as in the non-contact transfer apparatus 1 according to the first embodiment, a great improvement in energy efficiency and energy saving can be realized.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention permet d'examiner avec attention de très faibles pertes d'énergie qui n'ont pas été prises en compte dans un dispositif de transport sans contact classique afin d'utiliser efficacement l'énergie d'un fluide et d'améliorer l'efficacité et l'économie énergétiques Ledit dispositif de transport sans contact comprend un corps en forme de plaque, un corps en colonne doté d'une chambre cylindrique à encoche formé d'une surface périphérique intérieure; une surface d'extrémité plate formée au niveau du côté ouverture de la chambre cylindrique à encoche; une buse formée sur la périphérie interne de la chambre cylindrique à encoche afin de décharger un fluide d'alimentation dans ladite chambre; et un chemin de fluide communiquant avec la buse afin de fournir un fluide dans la chambre cylindrique à encoche. Ladite buse est agencée au niveau d'une position séparée vers l'intérieur de la surface périphérique intérieure de ladite chambre cylindrique.
PCT/JP2006/326019 2005-12-27 2006-12-27 Dispositif de transport sans contact WO2007074854A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005375623A JP2007176637A (ja) 2005-12-27 2005-12-27 非接触搬送装置
JP2005-375623 2005-12-27

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Publication Number Publication Date
WO2007074854A1 true WO2007074854A1 (fr) 2007-07-05

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TW (1) TW200804160A (fr)
WO (1) WO2007074854A1 (fr)

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CN101422904B (zh) * 2008-12-09 2011-04-13 友达光电股份有限公司 承载构件
TWI481542B (zh) * 2011-08-24 2015-04-21 Harmotec Co Ltd Non - contact conveyor
CN110610894B (zh) * 2012-11-27 2023-08-04 盛美半导体设备(上海)股份有限公司 使用基板支撑装置清洗基板背面的方法
JP2014165217A (ja) 2013-02-21 2014-09-08 Tokyo Electron Ltd 基板搬送装置および剥離システム
TWI611997B (zh) * 2013-09-26 2018-01-21 應用材料股份有限公司 用於傳送基板的氣動端效器設備與基板傳送系統
JP2015076469A (ja) * 2013-10-08 2015-04-20 株式会社ディスコ ウェーハ搬送装置
SG11201811778PA (en) * 2016-07-06 2019-01-30 Acm Res Shanghai Inc Substrate supporting apparatus

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JPH0676985A (ja) * 1983-01-21 1994-03-18 Plasma Energ Corp プラズマ・アークを開始させかつ維持する装置
JPH04199732A (ja) * 1990-11-29 1992-07-20 Shin Meiwa Ind Co Ltd 非接触式チャック装置
JPH11254369A (ja) * 1998-03-06 1999-09-21 Seibu Giken Co Ltd 無接触搬送装置
JPH11330203A (ja) * 1998-03-11 1999-11-30 Trusi Technol Llc 物品ホルダ及び保持方法
JP2002064130A (ja) * 2000-06-09 2002-02-28 Harmotec Corp 非接触搬送装置
JP2006114748A (ja) * 2004-10-15 2006-04-27 Taiheiyo Cement Corp 非接触吸着治具及び非接触チャック装置
JP2006339234A (ja) * 2005-05-31 2006-12-14 Murata Mach Ltd 非接触保持装置

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