WO2007074855A1 - Dispositif de transport sans contact - Google Patents

Dispositif de transport sans contact Download PDF

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Publication number
WO2007074855A1
WO2007074855A1 PCT/JP2006/326021 JP2006326021W WO2007074855A1 WO 2007074855 A1 WO2007074855 A1 WO 2007074855A1 JP 2006326021 W JP2006326021 W JP 2006326021W WO 2007074855 A1 WO2007074855 A1 WO 2007074855A1
Authority
WO
WIPO (PCT)
Prior art keywords
cylindrical chamber
fluid
contact
concave cylindrical
plate
Prior art date
Application number
PCT/JP2006/326021
Other languages
English (en)
Japanese (ja)
Inventor
Hitoshi Iwasaka
Hideyuki Tokunaga
Kotaro Kobayashi
Yuji Kasai
Original Assignee
Harmotec Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harmotec Co., Ltd. filed Critical Harmotec Co., Ltd.
Publication of WO2007074855A1 publication Critical patent/WO2007074855A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention relates to a non-contact conveyance device used for holding, conveying, rotating, etc. a plate-like body in a non-contact manner.
  • Patent Document 1 JP 2005-51260 A
  • the present invention has been made in view of the above-mentioned circumstances, paying attention to microscopic energy loss that has not been paid attention to in the conventional non-contact transfer device, and effectively using the energy of the fluid, thereby improving the energy efficiency.
  • the purpose is to improve and save energy.
  • the present invention is formed on a substantially columnar main body having a concave cylindrical chamber having an inner circumferential surface formed on the opening side of the concave cylindrical chamber.
  • a bell mouth fluid passage for supplying fluid into the concave cylindrical chamber.
  • FIG. 1 is a perspective view showing a configuration of a non-contact transfer apparatus 1 according to a first embodiment, where (a) is a diagonal view from below and (b) is a perspective view showing an oblique upward force.
  • FIG. 2 is a cross-sectional view of the non-contact transfer apparatus 1 according to the embodiment, (a) is a cross-sectional view taken along line II in FIG. 1 (a), and (b) is II II in FIG. 1 (a). It is line sectional drawing.
  • FIG. 3 is a diagram showing the relationship between the position of the short offset nozzle 5 and the suction force.
  • FIG. 4 (a) is a diagram showing the pressure distribution when two short offset nozzles 5 are arranged point-symmetrically, and (b) is a diagram showing the velocity distribution.
  • FIG. 5 (a) is a diagram showing a pressure distribution when only one short offset nozzle 5 is arranged, and (b) is a diagram showing a velocity distribution.
  • FIG. 6 is a diagram showing the relationship between the number of short offset nozzles 5 and the suction force.
  • FIG. 7 is a diagram showing energy efficiency of the non-contact conveyance device 1 according to the first embodiment with respect to the non-contact conveyance device according to the prior art using the concept of air power.
  • FIG. 8 is a view showing energy efficiency of the non-contact conveyance device 1 according to the first embodiment with respect to the non-contact conveyance device according to the prior art using the concept of air power.
  • FIG. 9 is a diagram showing the energy efficiency of the non-contact conveyance device 1 according to the first embodiment with respect to the non-contact conveyance device according to the prior art using the concept of air power.
  • FIG. 10 is a perspective view showing a configuration of a non-contact transfer device 10 according to a second embodiment.
  • FIG. 11 is a view showing the configuration of the non-contact transfer apparatus 10 according to the embodiment, wherein (a) is a top view, (b) is a side view, and (c) is a bottom view.
  • FIG. 12 is a drive explanatory diagram of a centering mechanism provided in the non-contact transfer apparatus 10 according to the embodiment.
  • FIG. 13 is a perspective view showing a configuration of a non-contact transfer device 20 according to a third embodiment.
  • FIG. 14 is a view showing a configuration of a non-contact transfer device 20 according to the embodiment, wherein (a) is a top view and (b) is a side view.
  • FIG. 15 is a drive explanatory diagram of a centering mechanism 22 provided in the non-contact transport apparatus 10 according to the same embodiment.
  • FIG. 1 is a perspective view showing a configuration of a non-contact transport apparatus 1 according to the present embodiment.
  • (A) is an oblique view from below, and (b) is a view of the oblique upward force.
  • FIG. 2 is a cross-sectional view of the non-contact conveyance device 1.
  • (A) is a cross-sectional view taken along line II in FIG. 1 (a)
  • (b) is a cross-sectional view taken along line II-II in FIG. 1 (a).
  • the non-contact transfer device 1 has a substantially columnar swirl flow forming body 2. is doing.
  • a concave cylindrical chamber 3 is formed in the swirl flow forming body 2 so as to form a columnar space and its lower end is an opening.
  • the opening side of the concave cylindrical chamber 3 faces a plate-like body (a plate-like workpiece such as a wafer) and is a flat facing surface 4 in which the facing surface is formed flat.
  • the opening edge 7 that forms the periphery of the opening of the concave cylindrical chamber 3 has a curved shape with a smooth cross section. That is, the cross-sectional shape of the opening edge 7 is a shape that smoothly curves from the inner peripheral surface of the recessed cylindrical chamber 3 and extends to the outer edge of the opening as shown in FIG. 2 (b). In this case, the curvature of the opening edge 7 is, for example, about R2.5, and the surface is preferably extremely smooth.
  • 5 in FIG. 1 and FIG. 2 is a short offset nozzle that discharges the fluid into the concave cylindrical chamber 3, and is formed so as to face the concave cylindrical chamber 3.
  • the short offset nozzle 5 is connected to a bell mouth-like fluid passage 6 for supplying fluid into the concave cylindrical chamber 3 through the nozzle.
  • the short offset nozzle 5 is provided so as to have a predetermined angle ⁇ with respect to a tangent line that is in contact with the inner periphery at the discharge point P.
  • This angle ⁇ is determined by subtracting the radius rl perpendicular to the line L1 extending in the fluid discharge direction and the point P2 between the radius rl and the line L1 and the point P3 between the radius rl and the circumference P3.
  • the offset ⁇ When the offset ⁇ is provided in this way, the shear resistance force on the wall surface of the concave cylindrical chamber 3 when fluid is discharged from the short offset nozzle 5 into the concave cylindrical chamber 3 can be suppressed, and the entrainment effect can be increased. Therefore, the input energy can be more efficiently converted into rotational momentum.
  • the short offset nozzle 5 is disposed so as to face the middle of the concave cylindrical chamber 3 in the vertical direction.
  • FIG. 4 (a) is a diagram showing the pressure distribution when two short offset nozzles 5 are arranged point-symmetrically
  • FIG. 4 (b) is a diagram showing the velocity distribution.
  • FIG. 5 (a) is a diagram showing the pressure distribution when only one short offset nozzle 5 is arranged
  • FIG. 5 (b) is a diagram showing the velocity distribution.
  • the pressure distribution and velocity distribution are biased. This is because the wall flow that forms a swirling flow along the inner wall of the concave cylindrical chamber 3 causes friction due to the centrifugal force and the entrainment effect of the fluid with a high flow velocity discharged from the short offset nozzle 5 and the viscosity of the fluid. It happens because of the slowdown due to the development of the boundary layer.
  • the plate-like body is sucked in this state, the plate-like body is tilted and sucked and held, resulting in an unstable state.
  • the stress and bias in the pressure distribution can cause large stress on the wafer, which can lead to cracks and cracks.
  • two short-offset nozzles 5 are arranged point-symmetrically, the above problem is solved, and the flow rate per nozzle is the same as shown in FIG.
  • the short offset nozzle 5 is shorter in length than the nozzle according to the prior art in order to minimize the pressure loss in the nozzle.
  • the bell mouth-like fluid passage 6 is drilled horizontally from the fluid inlet 8 formed on the side surface of the swirling flow forming body 2 to the closed end surface 7 and faces the inner peripheral surface of the concave cylindrical chamber 3. Offset It communicates with Zulu 5. As shown in Fig. 2 (a), the bellmouth fluid passage 6 communicates with the short offset nozzle 5 with a smooth curved surface, so that loss due to separation when fluid flows into the nozzle Can be greatly reduced.
  • the non-contact conveyance device 1 having the above-described configuration, when a fluid is supplied from an air supply device (not shown) to the fluid introduction port 8, the fluid is short-circuited via the bell mouth fluid passage 6. It is blown into the concave cylindrical chamber 3 from the offset nozzle 5. The fluid blown into the concave cylindrical chamber 3 is rectified as a swirling flow in the internal space of the concave cylindrical chamber 3 and then flows out of the concave cylindrical chamber 3.
  • the pressure at the center of the swirl flow in the concave cylindrical chamber 3 rises and the plate-like body does not come into contact with the flat opposed surface 4 and the plate-like shape. Body distance is maintained. Further, the plate-like body is stably held in a non-contact state by the air interposed between the flat opposing surface 4 and the plate-like body.
  • the energy consumption of pneumatic equipment including the non-contact conveyance device as described above is expressed by air consumption, and has been evaluated by being converted into power consumption through the specific energy of the compressor used.
  • air consumption is not directly linked to energy, it is desirable to define and quantify energy flow with compressed air flow. Therefore, in this specification, we focus on the energy of compressed air flowing and introduce the concept of effective energy and air power in evaluating energy efficiency.
  • Air power is electric Like power, it is expressed in units of kw (kilowatts). Air power is defined as the effective energy flux of compressed air and is expressed as:
  • volume flow rate and volume flow rate converted to atmospheric pressure and even with the same consumption flow rate, if the pressure is different, the energy consumption will vary greatly and these need to be handled appropriately.
  • the compressed air can be handled in the same way as electric power in the energy quantification process.
  • FIGS. 7 to 9 show non-contact conveyance devices according to the prior art of the non-contact conveyance device 1 according to the present embodiment (specifically, non-contact conveyance devices disclosed in JP 2005-51260 A). It is a figure which displays the energy efficiency with respect to using the concept of air power.
  • the non-contact conveyance device 1 formed with a smooth curved surface at the opening ridge angle prevents non-contact conveyance according to the conventional technique in which the opening edge is chamfered as a result of suppressing the separation due to the ridge angle.
  • An average 12% improvement in efficiency was seen compared to the equipment.
  • the stability of holding the plate-like body is increased as compared with the non-contact transfer device according to the prior art. Further, as shown in FIG.
  • the non-contact transfer device 1 in which the short offset nozzle 5 is disposed at a position away from the inner peripheral surface of the concave cylindrical chamber 3 is the inner peripheral surface of the concave cylindrical chamber 3
  • the nozzle is arranged along the inner wall of the recessed cylindrical chamber 3 as a result of energy attenuation due to the large shearing force in the cylinder being avoided, and the input energy is more efficiently converted into rotational momentum. An average improvement of 17% was seen compared to the equipment.
  • FIG. 9 shows a result obtained by integrating the efficiency improvements shown in FIGS.
  • the non-contact conveyance device 1 showed a significant improvement in efficiency of 41% on average in comparison with the non-contact conveyance device according to the prior art.
  • the two short offset nozzles 5 are arranged in the circumference of the concave cylindrical chamber 3. Force arranged at a point symmetric with respect to the center O
  • the arrangement method of the two nozzles need not be limited to this.
  • the number of the short offset nozzles 5 is not limited to two as in the above example, and may be any number of two or more that allows the fluid to rotate efficiently and in a balanced manner.
  • FIG. 10 is a perspective view showing the configuration of the non-contact transport apparatus 10 according to the present embodiment.
  • FIG. 11 is a view showing the configuration of the non-contact transfer apparatus 10, where (a) is a top view, (b) is a side view, and (c) is a bottom view.
  • FIG. 12 is an explanatory view of driving of the centering mechanism 12 provided in the non-contact transport apparatus 10.
  • components that are substantially the same as those of the first embodiment are given the same reference numerals, and descriptions thereof are omitted.
  • the non-contact transfer device 10 is configured by using a plurality of swirl flow forming bodies 2 according to the first embodiment. Specifically, the base portion 11 and the base portion 11 are attached. The six swirling flow forming bodies 2 and the centering mechanism 12 mounted on the base 11 to prevent the plate-like body from being detached are provided.
  • the six swirling flow forming bodies 2 are supported such that their closed end surfaces are attached to the inner surface of the base portion 11, and the flat opposing surfaces 4 are all the same surface.
  • a fluid supply port 13 is provided on the outer surface of the base 11, and a fluid supply port 13 and a fluid introduction port 8 of the swirl flow forming body 2 corresponding to the fluid supply port 13 are communicated inside the wall body (not shown).
  • a passage in the base portion is formed by branching from the fluid supply port 13.
  • a centering mechanism 12 is mounted on the outer surface of the base 11 for positioning and preventing the plate-like body held in a non-contact manner. As shown in FIG.
  • the centering mechanism 12 includes six cylinders 121 whose one ends communicate with each other, and six link arms each having one end connected to the other end of each cylinder 121. 122 and six centering guides 123 suspended from the other end of each link arm 122. Since the six cylinders 121 communicate with each other at one end, they can be pressurized or depressurized by a single system of fluid. When the pressure inside the cylinder 121 is reduced by the fluid, the six centering guides 123 are driven in the center direction via the six link arms 122.
  • This centering guide 123 moves in the center direction so that non-contact transfer
  • the plate-like body held in a non-contact manner by the device 10 is positioned so that the outer periphery thereof is regulated and the center of the plate-like body coincides with the center of the internal space of the base portion 11.
  • the six centering guides 123 are driven through the six link arms 122 in a direction in which the central force is also separated.
  • the non-contact conveyance device 10 having the above-described configuration, when a fluid is supplied from an air supply device (not shown) to the fluid supply port 13, the fluid passes through a passage in the base portion 11 (not shown), and then passes through each passage. It is sent to the swirl flow forming body 2.
  • the fluid sent to each swirl flow forming body 2 is blown into the concave cylindrical chamber 3 from the short offset nozzle 5 through the fluid inlet 8 and the bell mouth fluid passage 6.
  • the fluid blown into the concave cylindrical chamber 3 is rectified as a swirling flow in the internal space of the concave cylindrical chamber 3 and then flows out of the concave cylindrical chamber 3.
  • each swirling flow forming body 2 is adjusted in advance so that the swirling flow is not rotated when the plate-like body is held in a non-contact manner.
  • the non-contact transfer device 10 among the six swirl flow forming bodies 2, three swirl swirl flows clockwise, and the remaining three swirl counterclockwise. It has been adjusted.
  • the pressure at the center of the swirl flow in the concave cylindrical chamber 3 rises and the plate-like body does not come into contact with the flat opposed surface 4 and the plate.
  • the distance of the body is maintained.
  • the plate-like body is stably held in a non-contact state by the air interposed between the flat opposed surface 4 and the plate-like body.
  • the plate-like body is sucked by the swirling flow formed by the six swirling flow forming bodies 2, so that the suction force can be made extremely strong. Further, in this non-contact conveyance device 10, since a swirling flow is formed at six locations, even a plate-like body having a large diameter is sucked throughout. Therefore, even if the plate-like body is warped, it is possible to correct the warp throughout. Furthermore, since the non-contact conveying apparatus 10 uses the swirl flow forming body 2 similar to the non-contact conveying apparatus 1 according to the first embodiment, it is the same as the non-contact conveying apparatus 1 according to the first embodiment. In addition, significant energy efficiency and energy savings can be realized.
  • FIG. 13 is a perspective view showing a configuration of the non-contact transport device 20 according to the present embodiment.
  • FIG. 14 is a diagram showing the configuration of the non-contact transport device 20, where (a) is a top view and (b) is a side view.
  • FIG. 15 is an explanatory view of driving of the centering mechanism 22 provided in the non-contact transport device 20.
  • components that are substantially the same as those of the first embodiment are given the same reference numerals, and descriptions thereof are omitted.
  • the non-contact conveyance device 20 is configured by using a plurality of swirl flow forming bodies 2 according to the first embodiment, and specifically, a plate having a flat surface facing the plate-like body.
  • the base 21, the six swirling flow forming bodies 2 attached to the base 21, the centering mechanism 22 provided below the base 21, and the base 21 are fixed so that the base 21 can be moved. And a gripping portion 23 for the purpose.
  • the base 21 is composed of a base 211 and two arms 212 branched from the base 211 in a bifurcated manner.
  • a protruding centering guide 213 is provided at the protruding end of each arm 212.
  • the six swirling flow forming bodies 2 are supported such that the closed end face side is attached to the upper surface of the base body 21, and the flat opposed faces 4 are all the same face.
  • fluid A supply port 24 is provided, and a fluid passage (not shown) that connects the fluid supply port 24 and the fluid introduction port 8 of the swirling flow forming body 2 corresponding to the fluid supply port 24 branches from the fluid supply port 24 inside the base 21. Is formed.
  • a centering mechanism 22 is provided below the base 21 for positioning and preventing separation of the plate-like body held in a non-contact manner. As shown in FIG.
  • the centering mechanism 22 includes a cylinder 221 provided in the gripping portion 23, one end connected to one end of the cylinder 221, and two centering guides provided to the other end. It consists of a link plate 222.
  • the two centering guides 22 are driven toward the plate-like body via the link plate 222. Due to the movement of the centering guide 223 toward the plate-like body, the plate-like body held in a non-contact manner by the non-contact conveying device 20 is moved to the centering guide 222 on the link plate 222 and the protruding end of the arm portion 212.
  • the centering guide 213 provided on the outer periphery restricts its outer periphery and positions it.
  • the two centering guides 223 are driven through the link plate 222 in a direction in which the plate-like body force is also separated.
  • the restriction on the plate-like body is released, and the plate-like body becomes free.
  • the non-contact conveyance device 20 having the above-described configuration, when a fluid is supplied from an air supply device (not shown) to the fluid supply port 24, the fluid passes through a fluid passage in the base body 21 (not shown), It is sent to the swirl flow forming body 2.
  • the fluid sent to each swirling flow forming body 2 is blown into the concave cylindrical chamber 3 from the short offset nozzle 5 via the fluid introducing port 8 and the bell mouth fluid passage 6.
  • the fluid blown into the concave cylindrical chamber 3 is rectified as a swirling flow in the internal space of the concave cylindrical chamber 3 and then flows out of the concave cylindrical chamber 3.
  • each swirl flow forming body 2 is adjusted in advance so that the swirl flow is not rotated when the plate-like body is held in a non-contact manner.
  • the non-contact conveyance device 20 among the six swirl flow forming bodies 2, three swirl swirl flows clockwise, and the remaining three swirl counterclockwise. Adjusted.
  • the pressure at the center of the swirl flow in the concave cylindrical chamber 3 rises and the plate-like body does not come into contact with the flat opposed surface 4 and the plate.
  • the distance of the body is maintained.
  • the plate-like body is stably held in a non-contact state by the air interposed between the flat opposed surface 4 and the plate-like body.
  • the suction force can be made extremely strong. Further, in this non-contact conveyance device 20, since a swirl flow is formed at six locations, even a plate-like body having a large diameter is sucked throughout. Therefore, even if the plate-like body is warped, it is possible to correct the warp throughout. Further, since the non-contact transfer device 20 is configured in a plate shape, it can freely access even the wafers in the stacked wafer cassettes that have been difficult to access.
  • this non-contact conveyance device 20 since the swirl flow forming body 2 similar to the non-contact conveyance device 1 according to the first embodiment is used, the same as the non-contact conveyance device 1 according to the first embodiment. In addition, enormous energy efficiency and energy saving can be realized.

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

La présente invention concerne la prise en compte des très faibles pertes d'énergie qui ont été ignorées dans un dispositif de transport sans contact classique, de manière que l'énergie d'un fluide soit effectivement utilisée pour obtenir une amélioration de l'efficacité énergétique et des économies d'énergie. Ledit dispositif de transport sans contact retient sans contact un corps en forme de plaque et le transporte. Ce dispositif de transport sans contact possède un corps en forme de colonne pourvu d'une chambre cylindrique dentelée comportant une surface interne circulaire, d'une surface terminale plate formée sur le côté d'ouverture de la chambre cylindrique dentelée du corps, d'une buse formée au-dessus de la circonférence interne de la chambre cylindrique dentelée et destinée à envoyer un fluide d'alimentation dans la chambre cylindrique dentelée et d'un passage de fluide à embouchure évasée communiquant avec la buse pour acheminer un fluide via la buse dans la chambre cylindrique dentelée.
PCT/JP2006/326021 2005-12-27 2006-12-27 Dispositif de transport sans contact WO2007074855A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005375624A JP2007176638A (ja) 2005-12-27 2005-12-27 非接触搬送装置
JP2005-375624 2005-12-27

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WO2007074855A1 true WO2007074855A1 (fr) 2007-07-05

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TW (1) TW200808637A (fr)
WO (1) WO2007074855A1 (fr)

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WO2009119377A1 (fr) * 2008-03-24 2009-10-01 オイレス工業株式会社 Dispositif de support sans contact
WO2011129152A1 (fr) * 2010-04-14 2011-10-20 オイレス工業株式会社 Corps formant un écoulement en vortex et dispositif de transport sans contact
CN103261063A (zh) * 2010-12-24 2013-08-21 翁令司工业股份有限公司 上升流形成体及使用该上升流形成体的非接触运送装置
CN103318647A (zh) * 2012-02-28 2013-09-25 柳州市中晶科技有限公司 力发生装置
JP5406852B2 (ja) * 2008-11-18 2014-02-05 オイレス工業株式会社 非接触搬送装置
JP5425069B2 (ja) * 2008-07-10 2014-02-26 オイレス工業株式会社 気体浮上搬送用旋回流形成体及び気体浮上搬送装置
CN103662835A (zh) * 2013-09-03 2014-03-26 浙江大学 气旋流悬浮装置
EP2750175A1 (fr) * 2011-08-24 2014-07-02 Harmotec Co., Ltd. Dispositif de transport sans contact
CN106829481A (zh) * 2017-04-18 2017-06-13 武汉华星光电技术有限公司 一种传送装置
JP2017521864A (ja) * 2014-07-08 2017-08-03 深▲せん▼市華星光電技術有限公司Ｓｈｅｎｚｈｅｎ Ｃｈｉｎａ Ｓｔａｒ Ｏｐｔｏｅｌｅｃｔｒｏｎｉｃｓ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．， Ｌｔｄ． ガラス基板のピック・アンド・プレース装置

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JP2010533970A (ja) * 2007-07-19 2010-10-28 セントロターム・サーマル・ソルーションズ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンデイトゲゼルシヤフト 平面状の基板用の非接触型搬送装置
JP2015162487A (ja) * 2014-02-26 2015-09-07 オイレス工業株式会社 非接触式浮上搬送装置
TWI814679B (zh) * 2023-02-13 2023-09-01 盛詮科技股份有限公司 載板懸浮手臂

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JPS52141955A (en) * 1976-03-09 1977-11-26 Wacker Chemitronic Retainer for fixing disk at opposite ends in nonncontact manner
JPH05223109A (ja) * 1992-02-13 1993-08-31 Hitachi Ltd 整流ダクト
JPH06297372A (ja) * 1993-04-15 1994-10-25 Hitachi Electron Eng Co Ltd 非接触保持ワークのガイド機構
JP2000320443A (ja) * 1999-01-12 2000-11-21 Sozoan:Kk 運動変換装置
JP2002064130A (ja) * 2000-06-09 2002-02-28 Harmotec Corp 非接触搬送装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52141955A (en) * 1976-03-09 1977-11-26 Wacker Chemitronic Retainer for fixing disk at opposite ends in nonncontact manner
JPH05223109A (ja) * 1992-02-13 1993-08-31 Hitachi Ltd 整流ダクト
JPH06297372A (ja) * 1993-04-15 1994-10-25 Hitachi Electron Eng Co Ltd 非接触保持ワークのガイド機構
JP2000320443A (ja) * 1999-01-12 2000-11-21 Sozoan:Kk 運動変換装置
JP2002064130A (ja) * 2000-06-09 2002-02-28 Harmotec Corp 非接触搬送装置

Cited By (19)

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WO2009119377A1 (fr) * 2008-03-24 2009-10-01 オイレス工業株式会社 Dispositif de support sans contact
JP5425069B2 (ja) * 2008-07-10 2014-02-26 オイレス工業株式会社 気体浮上搬送用旋回流形成体及び気体浮上搬送装置
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CN106829481A (zh) * 2017-04-18 2017-06-13 武汉华星光电技术有限公司 一种传送装置

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