JP5928691B2 - 吸引チャック及び移載装置 - Google Patents
吸引チャック及び移載装置 Download PDFInfo
- Publication number
- JP5928691B2 JP5928691B2 JP2012010480A JP2012010480A JP5928691B2 JP 5928691 B2 JP5928691 B2 JP 5928691B2 JP 2012010480 A JP2012010480 A JP 2012010480A JP 2012010480 A JP2012010480 A JP 2012010480A JP 5928691 B2 JP5928691 B2 JP 5928691B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- suction chuck
- workpiece
- suction
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
- B25J15/0683—Details of suction cup structure, e.g. grooves or ridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Robotics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Treatment Of Fiber Materials (AREA)
Description
10 吸引チャック
11 本体
31 対向面
41 空気噴出口(噴出口)
42 貫通孔
44 ノズル流路
Claims (4)
- 薄い平板状のワークを吸引して非接触状態で保持する吸引チャックであって、
圧縮気体の流路が内部に形成された平板状の本体と、
前記本体の前記ワークに対向する側の面である対向面と、
前記流路から供給される圧縮気体を噴出するために前記対向面に開口する複数の噴出口と、
前記噴出口の周囲において前記対向面に開口するとともに前記本体を厚み方向で貫通するように形成された複数の排気孔と、
を備え、
各噴出口は、前記噴出口の直径に比して浅い円柱状の空間として形成されるとともに、当該空間の内部に臨んで開口するノズル流路を3つ備え、各ノズル流路は前記円柱状の空間の内壁に沿う向きに圧縮気体を噴出し、
前記3つのノズル流路の前記開口は、前記噴出口の周方向で均等間隔に形成され、
前記噴出口の最近傍の排気孔は、当該噴出口を中心とした同心円上に少なくとも3つ形成され、
前記噴出口の最近傍の排気孔は、前記同心円上で均等間隔に形成されることを特徴とする吸引チャック。 - 請求項1に記載の吸引チャックであって、
前記ノズル流路の長手方向は、前記対向面に対して平行に形成されていることを特徴とする吸引チャック。 - 請求項1又は2に記載の吸引チャックであって、
任意の噴出口の内部空間における当該噴出口の軸線周りでの圧縮気体の流れ方向が、当該噴出口の最近傍に形成された他の噴出口とは逆方向となるように、前記ノズル流路が形成されることを特徴とする吸引チャック。 - 請求項1から3までの何れか一項に記載の吸引チャックと、
前記吸引チャックを所定範囲内で3次元的に移動させることが可能なパラレルメカニズムと、
を備えることを特徴とする移載装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012010480A JP5928691B2 (ja) | 2012-01-20 | 2012-01-20 | 吸引チャック及び移載装置 |
KR1020120133665A KR101646946B1 (ko) | 2012-01-20 | 2012-11-23 | 흡인 척 및 이송 장치 |
CN201210535513.3A CN103219271B (zh) | 2012-01-20 | 2012-12-12 | 吸引夹持器及移载装置 |
TW102100706A TWI555617B (zh) | 2012-01-20 | 2013-01-09 | Attracting fixture and transfer device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012010480A JP5928691B2 (ja) | 2012-01-20 | 2012-01-20 | 吸引チャック及び移載装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013146837A JP2013146837A (ja) | 2013-08-01 |
JP5928691B2 true JP5928691B2 (ja) | 2016-06-01 |
Family
ID=48816953
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012010480A Active JP5928691B2 (ja) | 2012-01-20 | 2012-01-20 | 吸引チャック及び移載装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5928691B2 (ja) |
KR (1) | KR101646946B1 (ja) |
CN (1) | CN103219271B (ja) |
TW (1) | TWI555617B (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5979594B2 (ja) * | 2012-09-13 | 2016-08-24 | 村田機械株式会社 | 吸引チャック、及びこれを備えた移載装置 |
CN112388660A (zh) * | 2019-08-19 | 2021-02-23 | 浙江大学 | 吸附器 |
CN111900119A (zh) * | 2020-07-31 | 2020-11-06 | 上海华力集成电路制造有限公司 | 减少接触摩擦的承载装置及利用该承载装置的传输方法 |
CN114552022B (zh) * | 2021-09-02 | 2023-09-05 | 万向一二三股份公司 | 一种固体电池的制造装置和制造方法 |
CN115360031B (zh) * | 2022-10-21 | 2023-02-03 | 四川省科学城久信科技有限公司 | 一种薄膜电容器生产用柔性薄膜抓手 |
CN117184903B (zh) * | 2023-11-07 | 2024-02-13 | 四川名人居门窗有限公司 | 一种玻璃吸盘车 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3782791A (en) * | 1971-03-17 | 1974-01-01 | Udylite Corp | Vortex diffuser fluid bearing device |
US5687766A (en) * | 1996-01-18 | 1997-11-18 | B. W. Vortex, Inc. | Apparatus for forming a vortex |
JP3981241B2 (ja) | 2000-06-09 | 2007-09-26 | 株式会社ハーモテック | 旋回流形成体および非接触搬送装置 |
JP5159528B2 (ja) * | 2008-09-09 | 2013-03-06 | リンテック株式会社 | 板状部材の支持装置および支持方法 |
JP2010253658A (ja) * | 2009-04-28 | 2010-11-11 | Nitta Moore Co | 非接触ワーク保持装置 |
JP5287491B2 (ja) * | 2009-05-18 | 2013-09-11 | 株式会社島津製作所 | 基板吸着装置 |
JP5403247B2 (ja) * | 2009-09-07 | 2014-01-29 | 村田機械株式会社 | 基板移載装置 |
JP5536516B2 (ja) * | 2010-04-14 | 2014-07-02 | オイレス工業株式会社 | 非接触搬送装置 |
-
2012
- 2012-01-20 JP JP2012010480A patent/JP5928691B2/ja active Active
- 2012-11-23 KR KR1020120133665A patent/KR101646946B1/ko active IP Right Grant
- 2012-12-12 CN CN201210535513.3A patent/CN103219271B/zh not_active Expired - Fee Related
-
2013
- 2013-01-09 TW TW102100706A patent/TWI555617B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP2013146837A (ja) | 2013-08-01 |
KR101646946B1 (ko) | 2016-08-09 |
TW201345812A (zh) | 2013-11-16 |
CN103219271A (zh) | 2013-07-24 |
CN103219271B (zh) | 2017-03-01 |
TWI555617B (zh) | 2016-11-01 |
KR20130085925A (ko) | 2013-07-30 |
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