WO2009119377A1 - Dispositif de support sans contact - Google Patents

Dispositif de support sans contact Download PDF

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Publication number
WO2009119377A1
WO2009119377A1 PCT/JP2009/055118 JP2009055118W WO2009119377A1 WO 2009119377 A1 WO2009119377 A1 WO 2009119377A1 JP 2009055118 W JP2009055118 W JP 2009055118W WO 2009119377 A1 WO2009119377 A1 WO 2009119377A1
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WO
WIPO (PCT)
Prior art keywords
fluid
flow forming
forming body
swirl flow
contact
Prior art date
Application number
PCT/JP2009/055118
Other languages
English (en)
Japanese (ja)
Inventor
秀夫 小澤
耕一 角田
光 佐藤
斉 岩坂
英幸 徳永
裕二 河西
Original Assignee
オイレス工業株式会社
株式会社ハーモテック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by オイレス工業株式会社, 株式会社ハーモテック filed Critical オイレス工業株式会社
Priority to JP2010505547A priority Critical patent/JP5237357B2/ja
Priority to KR1020107018944A priority patent/KR101530978B1/ko
Priority to CN200980109753.3A priority patent/CN101977831B/zh
Publication of WO2009119377A1 publication Critical patent/WO2009119377A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Definitions

  • the present invention relates to a non-contact conveyance device, and more particularly to a rail-shaped non-contact conveyance device used for production of a large FPD panel, a solar cell panel, and the like.
  • an air levitation transport device As an example of an air levitation transport device, a plurality of small-diameter holes are provided to float glass for liquid crystal, and a plurality of plate-like rails through which air is ejected from these small-diameter holes are matched to the size of the glass. It is practiced to form a transport device by connecting them together. There is also a method in which porous carbon is used as a rail material and air is ejected from the pores.
  • the air flow rate per area of 1000 ⁇ 1000 mm requires a very large air flow rate of 250 L / min for the multi-hole type and 150 L / min for the carbon porous type.
  • the conventional non-contact conveyance device uses a balance principle between vacuum suction and air ejection force in order to maintain the flying height accuracy. Therefore, it is necessary to always operate the pump for vacuum adsorption, which requires a great deal of energy.
  • the present invention has been made in view of the problems in the conventional non-contact conveyance device, and has a low air flow rate and energy consumption, and can maintain a high flying height accuracy.
  • the purpose is to provide.
  • the present invention is a non-contact transfer device, comprising a fluid outlet on the back surface of a ring-shaped member having a circular cross-sectional through-hole penetrating from the front surface to the back surface.
  • a swirling flow is generated on the surface side of the ring-shaped member in a direction away from the surface, and in the vicinity of the opening of the through hole on the surface side of the ring-shaped member in the direction of the back surface. It is characterized in that two or more swirling flow forming bodies for generating the fluid flow are provided on the transport surface of the substrate.
  • the fluid is ejected from the fluid ejection port, and on the surface side of the ring-shaped member, the fluid flow and the swirling flow in the direction away from the surface are generated to float the conveyed object. Therefore, it is possible to carry with a fluid flow rate as low as about 100 L / min.
  • a fluid flow in the direction of the back surface is generated in the vicinity of the opening of the through hole on the ring-shaped member surface side, which is equivalent to vacuum suction for maintaining the flying height accuracy.
  • a vacuum suction pump is not required and energy consumption can be kept low.
  • the fluid supply port that communicates the base body with the conveyance surface and the groove portion so that the swirl flow forming body has a circular groove portion in plan view that communicates with the fluid ejection port on the back surface. And the fluid is supplied to the groove through the fluid supply port.
  • the base is configured so that the swirl flow forming body includes a fluid passage communicating with the groove and the fluid ejection port so that the conveyance surface includes a circular groove in plan view.
  • the fluid can be supplied to the fluid supply port through the groove.
  • the swirl flow forming body can be accommodated in a recess formed on the transfer surface of the substrate.
  • the surface spreading from the swirling flow forming body is flush with the plurality of swirling flow forming bodies, and the reference surface for levitating the conveyed object is the conveying surface of the substrate, so the flying height of the conveyed object is increased.
  • the accuracy can be controlled.
  • the swirl flow forming body is accommodated in a recess formed on the transfer surface of the base, and the outer peripheral surface of the swirl flow forming body is caulked and joined by a raised portion protruding around the recess. Can do.
  • the swirl flow forming body can be easily attached to the substrate without using an adhesive and maintaining an airtight state between the swirl flow forming body and the substrate.
  • a fluid pressure edge kerf that is formed on the transfer surface of the substrate and partitions between adjacent recesses and opens on a side surface of the substrate can be provided.
  • a plurality of the swirl flow forming bodies are arranged in each row in two rows on the base, and each swirl flow forming body belonging to one row has a direction of swirl flow and the other row.
  • the direction of each swirl flow of the swirl flow forming body to which it belongs can be configured to be different from each other.
  • the substrate may be provided with a porous pellet for blowing out the fluid around the swirling flow forming body, and the floating amount of the conveyed object is further increased by blowing out the fluid from the porous pellet. It can be controlled with high accuracy and can easily cope with process steps.
  • the conveyance surface of the base body can be a surface inclined with respect to a horizontal plane, or a plane parallel to the horizontal plane and facing the ground, thereby reducing the installation area of the non-contact conveyance device. Or can easily cope with various manufacturing processes.
  • FIGS. 1C and 1D show a first embodiment of a swirl flow forming body used in a non-contact conveying apparatus according to the present invention, where FIG. 1A is a top view and FIG. 1B is a cross-sectional view taken along line AA in FIG. , (C) is a bottom view, and (d) is a sectional view taken along line BB of (c).
  • FIG. 1E will be described later.
  • the swirl flow forming body 1 has a through hole 1a penetrating from the front surface to the back surface, and a recess 1b as an air passage and air from the recess 1b on the back surface.
  • a pair of outlets 1d for ejecting in a tangential direction with respect to the inner peripheral surface is provided near the inner peripheral surface of the through hole 1a via the air passage 1c.
  • FIG. 2 shows a state where the bottom surface of the swirl flow forming body 1 is fixed to the base body 2 formed in a plate shape with an adhesive, and a plurality of swirl flow forming bodies 1 are provided on the base body 2 as will be described later.
  • the non-contact conveyance apparatus concerning this invention is comprised.
  • the base body 2 has a through hole 2b through which air is supplied from a pump (not shown) through an air passage 2a, and a recess 1b provided on the back surface of the swirl flow forming body 1 with air from the through hole 2b (see FIG. 1). And an annular groove 2c having a circular shape in plan view.
  • the air supplied from the pump to the air passage 2a of the base 2 is supplied to the annular groove 2c through the through hole 2b, supplied from the annular groove 2c to the concave portion 1b of the swirling flow forming body 1, and through the air passage 1c. It ejects from the spout 1d to the through hole 1a. As a result, an upward swirling flow is generated above the surface-side flat plate portion 1e of the swirling flow forming body 1, and the glass 3 for liquid crystal, which is the object to be conveyed, is levitated by this swirling flow. Further, by sucking air from the jet outlet 1d, an air flow is generated in the vicinity of the opening of the through hole 1a on the surface side of the swirling flow forming body 1, and the vacuum suction for maintaining the flying height accuracy. Has the same effect as
  • FIGS. 3A and 3B show a second embodiment of the swirl flow forming body used in the non-contact conveying apparatus according to the present invention, wherein FIG. 3A is a top view and FIG. 3B is a sectional view taken along the line DD in FIG. , (C) is a bottom view, and (d) is a cross-sectional view taken along line EE of (c). Note that the description regarding FIG. 3E will be described later.
  • the swirl flow forming body 21 includes a through hole 21a penetrating from the front surface to the back surface, an annular groove 21b that is provided on the back surface and receives air, and an annular groove 21b.
  • the accumulated air is formed in the vicinity of the inner peripheral surface of the through-hole 21a via the air passage 21c, and a jet outlet 21d for ejecting the air in a tangential direction with respect to the inner peripheral surface, and the surface side is chamfered (surface Torayo and 21e, 21f).
  • FIG. 4 shows a state in which the swirl flow forming body 21 is placed in the concave portion 22c of the base body 22 formed in a plate shape.
  • the non-contact conveyance apparatus concerning invention is comprised.
  • the base body 22 is supplied from a pump (not shown) through an air passage 22a and has a through hole 22b provided with an air supply port 22f for supplying air to the annular groove 21b of the swirling flow forming body 21, and the swirling flow forming body 21. And a concave portion 22c for attaching the swirling flow forming body 21 attached to the concave portion 22c and a raised portion 22e.
  • the tip 24a of the jig 24 is inserted into the annular recess 22d of the base body 22 so as to be indicated by a two-dot chain line. Then, the raised portion 22 e is pressed by the chamfered portion 21 e of the swirling flow forming body 21, and the swirling flow forming body 21 can be caulked and joined to the base body 22.
  • the air supplied from the pump to the air passage 22a of the base body 22 is supplied to the annular groove 21b of the swirl flow forming body 21 through the through hole 22b, and is ejected from the jet outlet 21d through the air passage 21c.
  • an upward swirling flow is generated above the flat plate portion 21g on the surface side of the swirling flow forming body 21, and the glass 3 that is the object to be conveyed is floated by the swirling flow.
  • sucking air from the jet outlet 21d an air flow is generated in the vicinity of the opening of the through hole 21a on the front surface side of the swirl flow forming body 21, and the vacuum suction for maintaining the flying height accuracy.
  • the swirl flow forming body 21 is caulked and joined to the base body 22, it is not necessary to consider the inclination of the swirl flow forming body 21 due to the application of the adhesive, and compared to the case of fixing with an adhesive.
  • the flying height accuracy of the glass 3 can be improved.
  • This non-contact conveyance device 40 is used in a conveyance process of the glass 3 or the like, and a swirl flow forming body 31 and a swirl flow forming body 32 that generates a swirl flow opposite to the swirl flow forming body 31 are provided on the base 33.
  • a plurality of non-contact conveying devices 30 configured by caulking and joining alternately vertically and horizontally on the paper surface of FIG. In order to make the drawing easy to see, the flat plate portion 32e on the surface side of the swirl flow forming body 32 is shown in black.
  • the swirling flow forming body 31 either the swirling flow forming body 1 (see FIG. 1) or the swirling flow forming body 21 (see FIG. 3) is used.
  • the base body 33 is used as the base body 2 (see FIG. 2)
  • the base body 22 is used as the base body 33.
  • the swirling flow forming body 32 When the swirling flow forming body 1 is used as the swirling flow forming body 31, the swirling flow forming body 32 has a swirling flow forming body shown in FIG. 1 (c) on its back side as shown in FIG. 1 (e). It is formed to be different from 1. Thereby, the swirl flow forming body 32 can generate a swirl flow in the opposite direction to the swirl flow formed by the swirl flow forming body 31.
  • the swirl flow forming member 21 is used as the swirl flow forming member 31, the swirl flow forming member 32 has a swirl flow on the back side as shown in FIG. It is formed to be different from the formed body 21.
  • the other components of the swirling flow forming body 32 are the same as those of the swirling flow forming bodies 1 and 21, and thus detailed description thereof is omitted.
  • the air from the pump passes through the through hole or the like of the base body 33 and is ejected from the air ejection ports of the swirl flow forming bodies 31 and 32. Thereby, an upward swirling flow is generated above the flat plate portions 31e, 32e on the surface side of the swirling flow forming bodies 31, 32, and the glass 3 is floated by the swirling flow.
  • the swirl flows of the swirl flow forming bodies 31 and 32 are in opposite directions, and the swirl flow form forming bodies 31 and 32 are alternately arranged vertically and horizontally on the paper surface of FIG. Therefore, the horizontal component force (force in the direction indicated by the arrow) of the swirl flow formed by the swirl flow forming bodies 31 and 32 is canceled out.
  • the force applied to the glass 3 by the swirl flow is only the force of two vertical components of the levitation force and the suction force, and the rotation of the glass 3 can be reliably prevented.
  • the glass 3 that has floated in this manner is conveyed in the direction of the arrow shown in FIG. 6 by applying a conveyance driving force by a linear motor, a friction roller, a belt, or the like (not shown).
  • FIG. 4 constitutes a non-contact conveying device 50 as shown in FIG. 8A by arranging a large number of swirling flow forming bodies 21 on the base body 22 (the swirling flow forming bodies 21A and 21B are respectively). If the basic structure is the same as the swirl flow forming body 21 shown in FIG. 4 and swirl flows having different swirl directions are generated, and air is supplied to the base 22, the swirl flow forming body 21 (21A, 21A, 21B) is housed in the recess 22c of the base body 22, air tends to remain between the base body 33 and the glass 3. In particular, air tends to remain in the central portion 51 of the base body 33. Thereby, not only the swirl flow of the swirl flow forming body 21 but also the air remaining in the central portion 51 of the base body 22 may cause the glass 3 to float, and the flying height accuracy of the glass 3 may become unstable.
  • a lattice-shaped pneumatic edge that partitions between the adjacent swirl flow forming bodies 21 on the conveyance surface of the base body 22 and opens on the side surface of the base body 22. It is preferable to form the kerf 54. Thereby, since the air remaining between the base 22 and the glass 3 can easily escape to the outside, the flying height accuracy of the glass 3 can be reliably maintained.
  • FIG. 9 shows a second embodiment of the non-contact conveying apparatus according to the present invention, and this non-contact conveying apparatus 70 includes a process step 72 sandwiched between two conveying steps 71 and 73.
  • the swirling flow forming body 31 and the swirling flow forming body 32 that generates a swirling flow in the opposite direction to the swirling flow forming body 31 are vertically moved over the base 63 in three rows.
  • a plurality of air blown porous pellets (hereinafter referred to as “pellets”) 64 that are alternately arranged on the left and right sides and blow out a small amount of air are provided in a plurality of rows around these swirl flow forming bodies 31 and 32. As shown in FIG.
  • the process step 72 is a step that requires a highly accurate flying height, such as a step of inspecting an exposure pattern for manufacturing a semiconductor device or a resist coating step.
  • the pellet 64 is a porous stainless sintered body or the like, embedded in the transport surface of the base 63, and the air supplied to the air passage formed in the base 63 has minute holes on the surface of the pellet 64. And the height of the glass 3 can be precisely controlled.
  • the glass 3 that has been floated in the transporting process 71 and transported by an air blowing device or the like enters the process process 72, and its flying height is controlled with high accuracy by the air blown upward from the plurality of pellets 64. Various inspections and processing are performed. Thereafter, the glass 3 is conveyed to the next process by an air ejection device (not shown) in the state of being floated by the non-contact conveying device 73.
  • the flying height of the glass 3 can be appropriately changed by adjusting the flow rate of air blown from each pellet 64.
  • FIGS. 2A and 2B are diagrams showing a state where the swirl flow forming body of FIG. 1 is fixed to a base with an adhesive, wherein FIG. 1A is a front cross-sectional view, and FIG.
  • FIGS. 4A and 4B are diagrams showing a state in which the swirl flow forming body of FIG.
  • FIG. 3 is caulked and joined to a recess of a base, in which FIG. 3A is a front cross-sectional view, and FIG. It is sectional drawing for demonstrating the point which crimps and joins the swirl
  • FIG. 3A is a front cross-sectional view
  • FIG. It is sectional drawing for demonstrating the point which crimps and joins the swirl
  • It is a top view which shows 1st Embodiment of the non-contact conveying apparatus concerning this invention.
  • FIG. 5 is a view showing a case where a non-contact conveyance device is configured by arranging a plurality of swirl forming bodies shown in FIG. 4 on a substrate, where (a) shows a case where no pneumatic edge kerf is provided, and (b) shows an empty case. The case where a pressure edge kerf is provided is shown.
  • It is a top view which shows 2nd Embodiment of the non-contact conveying apparatus concerning this invention, Comprising: (a) is a part of non-contact conveying apparatus for process processes, (b) is a non-contact conveying including a conveying process. The whole apparatus is shown.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention porte sur un dispositif de support sans contact qui peut conserver une hauteur de flottaison de haute précision tout en réduisant un débit de fluide et une consommation d'énergie. Un dispositif de support sans contact (40) comporte, sur la surface de support d'un substrat (2), au moins deux corps de formation d'écoulement turbulent, chacun comportant une sortie de jet de fluide (1d) dans la surface arrière d'un élément de forme annulaire ayant un trou traversant (1) de section transversale circulaire pénétrant de la surface avant à la surface arrière de façon à produire un écoulement turbulent, s'écoulant dans la direction à l'opposée de la surface avant, sur le côté de la surface avant de l'élément de forme annulaire, et à produire un écoulement de fluide dans la direction de la surface arrière à proximité de l'ouverture d'un trou traversant sur le côté de surface avant de l'élément de forme annulaire par expulsion de fluide à partir de la sortie de jet de fluide. Etant donné qu'un article devant être supporté est amené à flotter par expulsion de fluide à partir de la sortie de jet de fluide, l'article peut être porté à un débit faible de fluide. Un effet équivalent à une aspiration sous vide pour conserver une précision de hauteur de flottaison est atteint par la production d'un écoulement de fluide dans la direction de surface arrière à proximité de l'ouverture d'un trou traversant dans l'élément de forme annulaire sur le côté de la surface avant. La hauteur de flottaison d'un article devant être porté peut être contrôlée avec une précision accrue par la disposition d'une pastille poreuse, pour souffler le fluide, sur la périphérie du corps de formation d'écoulement turbulent sur la surface de support du substrat.
PCT/JP2009/055118 2008-03-24 2009-03-17 Dispositif de support sans contact WO2009119377A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010505547A JP5237357B2 (ja) 2008-03-24 2009-03-17 非接触搬送装置
KR1020107018944A KR101530978B1 (ko) 2008-03-24 2009-03-17 비접촉 반송 장치
CN200980109753.3A CN101977831B (zh) 2008-03-24 2009-03-17 非接触式运送装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008075068 2008-03-24
JP2008-075068 2008-03-24

Publications (1)

Publication Number Publication Date
WO2009119377A1 true WO2009119377A1 (fr) 2009-10-01

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JP (1) JP5237357B2 (fr)
KR (1) KR101530978B1 (fr)
CN (1) CN101977831B (fr)
WO (1) WO2009119377A1 (fr)

Cited By (14)

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Publication number Priority date Publication date Assignee Title
WO2010058689A1 (fr) * 2008-11-18 2010-05-27 オイレス工業株式会社 Dispositif de transport sans contact
WO2011129152A1 (fr) * 2010-04-14 2011-10-20 オイレス工業株式会社 Corps formant un écoulement en vortex et dispositif de transport sans contact
JP2011219250A (ja) * 2010-04-14 2011-11-04 Oiles Corp 非接触搬送装置
JP2011235999A (ja) * 2010-05-10 2011-11-24 Oiles Corp 非接触搬送装置
WO2012086279A1 (fr) * 2010-12-24 2012-06-28 オイレス工業株式会社 Élément de formation d'un écoulement vers le haut et dispositif de transfert sans contact l'utilisant
WO2012096033A1 (fr) * 2011-01-14 2012-07-19 オイレス工業株式会社 Appareil de transfert sans contact
JP2012176822A (ja) * 2011-02-25 2012-09-13 Oiles Corp 非接触搬送装置
WO2013014964A1 (fr) * 2011-07-26 2013-01-31 オイレス工業株式会社 Dispositif de transport sans contact
WO2013121634A1 (fr) * 2012-02-14 2013-08-22 オイレス工業株式会社 Dispositif et procédé de transport flottant
JP2014019514A (ja) * 2012-07-13 2014-02-03 Harmotec Corp 非接触搬送装置
JP5425069B2 (ja) * 2008-07-10 2014-02-26 オイレス工業株式会社 気体浮上搬送用旋回流形成体及び気体浮上搬送装置
JP2014133655A (ja) * 2014-03-17 2014-07-24 Oiles Ind Co Ltd 非接触搬送装置
WO2014181715A1 (fr) * 2013-05-09 2014-11-13 オイレス工業株式会社 Plaque d'air de soutien et résistance d'écoulement de gaz
WO2015019864A1 (fr) * 2013-08-09 2015-02-12 オイレス工業株式会社 Plaque à air de support et résistance à l'écoulement de gaz pour cette dernière

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CN103733323B (zh) * 2011-08-24 2016-08-17 哈莫技术股份有限公司 非接触式搬送设备
CN103662835B (zh) * 2013-09-03 2015-07-29 浙江大学 气旋流悬浮装置
CN106829481A (zh) * 2017-04-18 2017-06-13 武汉华星光电技术有限公司 一种传送装置
JP6924488B2 (ja) * 2018-04-12 2021-08-25 株式会社ハーモテック 旋回流形成体
CN112173725A (zh) * 2019-07-03 2021-01-05 上海睿范自动化设备有限公司 一种非接触传输装置
CN110525973A (zh) * 2019-08-20 2019-12-03 南京理工大学 一种抑制工件旋转的并列式双涡旋非接触真空吸盘
CN110589468B (zh) * 2019-08-20 2021-05-04 南京理工大学 一种并列式双涡旋非接触真空吸盘的切向喷嘴分布方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005051260A (ja) * 2000-06-09 2005-02-24 Harmotec Corp 非接触搬送装置
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WO2014181715A1 (fr) * 2013-05-09 2014-11-13 オイレス工業株式会社 Plaque d'air de soutien et résistance d'écoulement de gaz
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JP2014133655A (ja) * 2014-03-17 2014-07-24 Oiles Ind Co Ltd 非接触搬送装置

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