WO2007032077A1 - Dispositif de gestion de protocole tcp - Google Patents

Dispositif de gestion de protocole tcp Download PDF

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Publication number
WO2007032077A1
WO2007032077A1 PCT/JP2005/017068 JP2005017068W WO2007032077A1 WO 2007032077 A1 WO2007032077 A1 WO 2007032077A1 JP 2005017068 W JP2005017068 W JP 2005017068W WO 2007032077 A1 WO2007032077 A1 WO 2007032077A1
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WO
WIPO (PCT)
Prior art keywords
contact
tcp
terminal
terminals
external
Prior art date
Application number
PCT/JP2005/017068
Other languages
English (en)
Japanese (ja)
Inventor
Takeshi Onishi
Hisashi Murano
Masahito Kondo
Katsuhiro Imaizumi
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to PCT/JP2005/017068 priority Critical patent/WO2007032077A1/fr
Priority to JP2007535357A priority patent/JP4885139B2/ja
Priority to TW095130794A priority patent/TW200720682A/zh
Publication of WO2007032077A1 publication Critical patent/WO2007032077A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Definitions

  • the present invention is manufactured using TCP (Tape Carrier Package) and COF (Chip On Film) (hereinafter, TCP, COF, and other TAB (Tape Automated Bonding) mounting technologies, which are one type of IC device. It relates to a TCP handling device that is used to collectively test devices and test "TCP".
  • TCP Transmission Carrier Package
  • COF Chip On Film
  • TAB Tape Automated Bonding
  • a test apparatus for TCP is generally composed of a tester body, a test head, and a TCP handling apparatus (hereinafter sometimes referred to as “TCP handler”).
  • TCP handler transports a carrier tape on which multiple TCPs are formed on a tape (including the concept of film; the same shall apply hereinafter) and carries the carrier to the probe card probe that is electrically connected to the test head.
  • This TCP handler transports a carrier tape on which multiple TCPs are formed on a tape (including the concept of film; the same shall apply hereinafter) and carries the carrier to the probe card probe that is electrically connected to the test head.
  • the TCP handler should be connected in advance to ensure that the TCP test pad and each probe of the probe card can be contacted before performing a test in actual operation.
  • the initial settings are made for, and the settings are registered.
  • the initial setting of the TCP handler is performed as follows, for example. First, after determining the rough position of the TCP and probe card transported to the test position, the probe on the probe card and the TCP test pad are photographed with a camera, and the obtained image is displayed on the display device. The operator visually confirms the image while all the probes on the probe card are TCP. Manually adjust the position of each probe so that it can contact all test pads. The position set in this way is registered as an initial setting and used for alignment during actual operation.
  • TCP test pads have become smaller and narrower, so the probes and test pads displayed on the display device are also smaller and more powerful. Yes. For this reason, it is difficult to align the pad and the probe in the initial setting, and the time required for the initial setting becomes longer. Also, the TCP and probe may not always be accurately aligned, which may cause contact failure, unstable contact resistance, short-circuit between adjacent pins, etc. during actual operation. It may occur.
  • the present invention has been made in view of such a situation, and provides a TCP handling device capable of accurately and easily aligning a contact terminal of a contact portion with an external terminal of a TCP.
  • the purpose is to provide.
  • the present invention conveys a carrier tape having a plurality of TCPs formed on the tape, and attaches the carrier tape to a contact portion electrically connected to the test head.
  • a plurality of TCPs can be sequentially subjected to the test, and the TCP external terminal and the contact terminal outside the contour are photographed with an imaging device,
  • a TCP handling device capable of displaying an obtained image on a display device, wherein the display device can be positioned by specifying a positional relationship between a TCP external terminal and a contact terminal outside the contour.
  • a TCP that is characterized by displaying a standard image that displays the entire object captured by the imaging device and an enlarged image that magnifies and displays a portion of the object captured by the imaging device.
  • Providing Ndori packaging apparatus (invention 1).
  • the imaging device can identify the positional relationship between the external terminal of the TCP and the contact terminal even when displaying an enlarged image, and can position both terminals. It is preferable that the imaging device has a high resolution (Invention 2). By using a high-resolution imaging device, the TCP external terminals and contact terminals can be displayed clearly.
  • Alignment work can be performed more accurately.
  • the number of images to be taken can be reduced by widening the shooting range at one time, thereby reducing the frequency of moving the image pickup device and mechanical movement. Errors and errors such as multiple image overlay processing can be reduced, and therefore, it is possible to cope with TCP having finer, narrower pitch external terminals.
  • the TCP handling device includes an imaging stage for moving the imaging device so that the external terminal of the TCP at a predetermined position and the contact terminal of the contact portion can be photographed. (Invention 3).
  • the TCP handling device preferably includes an enlarged display operation unit, and enlarges the standard image according to an operation by the enlarged display operation unit to obtain an enlarged image.
  • Invention 3 If an enlarged display operation unit is provided as in the present invention (invention 3), an enlarged image can be easily displayed by operating the enlarged display operation unit, and the operability is excellent.
  • the TCP handling device when there is a displacement or a contact failure between the external terminal of the TCP and the contact terminal of the contact part during actual operation, the displacement or contact It is preferable that the defective portion can be automatically displayed on the display device as an enlarged image (Invention 4).
  • the position of misalignment or poor contact can be visually recognized as an enlarged image, so that the situation of misalignment or poor contact can be accurately grasped.
  • the position of the external terminal of the TCP and the contact terminal of the contact part should be adjusted manually during actual operation. Since it is possible to quickly grasp and deal with the location of misalignment or contact failure, the test throughput can be improved.
  • the present invention electrically connects a plurality of contact terminals provided in a contact portion that transmits and receives a test signal, and a plurality of external terminals provided in a TCP to be tested disposed on a carrier tape.
  • a TCP handling device that performs a test by contact with air, an imaging device that images a contact terminal and a TCP external terminal corresponding to the contact terminal, a contact terminal imaged by the imaging device, and an external TCP A display device that processes and displays an image of the terminal as desired.
  • the imaging device has a zoom function, and in a zoom state, the contact terminal and a TCP external terminal corresponding to the contact terminal.
  • a TCP handling device characterized by having a resolution that can identify the positional relationship between the two (invention 6).
  • invention 6 it is possible to enlarge and display the TCP external terminal and the contact terminal of the probe card, which are objects of alignment, by bringing the imaging device into a zoom state. Therefore, the alignment between the external terminal of the TCP and the contact terminal of the contact portion can be performed accurately and easily. Therefore, when using a TCP handling device, the initial setting can be performed efficiently in a short time. In addition, when a contact failure occurs during actual operation of the TCP handling device, it is also possible to check the contact failure status using an enlarged display.
  • the imaging apparatus can image at least two external terminals located on a diagonal line or at least two external terminals far away from each other among a plurality of external terminals of the TCP.
  • the imaging stage is moved as described above, and the positional deviation amount between the at least two external terminals and the contact terminal corresponding to the external terminal is specified based on the image data obtained by the imaging device.
  • the carrier tape or the contact terminal group may be moved so as to obtain a stable contact based on the amount of displacement.
  • Preferred (Invention 8) According to this invention (Invention 7), it is possible to specify a more accurate displacement correction amount, and in particular, it is possible to correct a deviation in the ⁇ rotation direction.
  • the shape of the contact terminal is extracted on the basis of the image data obtained by photographing with the imaging device, and the contact terminal is the TCP of the extracted shape from the extracted shape. Identify the contact point that contacts the external terminal, and secondly, extract the shape of the TCP external terminal based on the image data, identify the center position point of the external terminal from the extracted shape, and A mark indicating the contact point and a mark indicating the position of the central position point of the external terminal may be overlaid on the display device (Invention 9). According to this invention (Invention 9), the operator can clearly grasp the shift state between the center position point of the external terminal and the contact point of the contact terminal, and therefore can perform the alignment adjustment work accurately.
  • the contact check function is applied, and the carrier tape or the contact terminal group is moved in the plane direction, and all the contact terminals and TCP corresponding to the contact terminals are moved. An electrical contact state with an external terminal is detected, and an effective movement area where any contact terminal can be contacted effectively without contact failure is determined. Based on the effective movement area, a carrier tape and a contact terminal group It may be possible to specify the best position of the invention (Invention 10). According to this invention (Invention 10), for example, even when the contact terminals vary due to pressing stress, the best positions of the carrier tape and the contact terminal group can be efficiently identified. .
  • the contact check function is applied to detect the electrical contact state between all the contact terminals and the TCP external terminals corresponding to the contact terminals, and the control is performed.
  • the contact failure part is photographed by moving the imaging device to the position of the contact terminal that caused the contact failure and the position of the external terminal corresponding to the contact terminal.
  • An image may be displayed on a display device (Invention 11). According to the present invention (Invention 11), it is possible to accurately grasp the state of the contact failure site by the image.
  • the contact terminal and the contact terminal are obtained from non-contact state image data obtained by imaging the contact terminal and the TCP external terminal corresponding to the contact terminal in the non-contact state. From the contact state image data obtained by imaging the contact terminal and the external terminal of the TCP corresponding to the contact terminal in the contact state related to the test. And the external terminal corresponding to the contact terminal are identified, the amount of change of the identified positional relationship is obtained, and the contact terminal and the external terminal corresponding to the contact terminal are determined based on the amount of change. It is also possible to correct the misalignment (Invention 13). According to this invention (Invention 13), since it is possible to perform misalignment correction including the misalignment amount generated in the non-contact state force contact state, it is possible to realize a more stable contact.
  • the alignment operation between the contact terminal of the contact portion and the external terminal of the TCP can be performed accurately and easily.
  • FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to an embodiment of the present invention.
  • FIG. 2 is a side view of a pusher unit in the TCP handler according to the embodiment.
  • FIG. 3 is a plan view of a pusher stage in the TCP handler according to the embodiment.
  • FIG. 4 is a plan view of a probe card stage in the TCP handler according to the same embodiment.
  • FIG. 5 is a front view of a probe card stage in the TCP handler according to the same embodiment.
  • FIG. 6 (a) is a plan view showing an example of a display device in a state where a standard image is displayed.
  • FIG. 7 is a flowchart showing the operation of a TCP handler according to an embodiment of the present invention during a test.
  • FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to an embodiment of the present invention
  • FIG. 2 is a side view of a pusher unit in the TCP handler according to the embodiment
  • 3 is a plan view of a pusher stage in the TCP handler according to the embodiment
  • FIG. 4 is a plan view of a probe card stage in the TCP handler according to the embodiment
  • FIG. 6 (a) is a plan view showing an example of a display device in which a standard image is displayed
  • FIG. 6 (b) is an enlarged image of the probe card stage in the TCP handler
  • FIG. 7 is a plan view showing an example of a display device in a displayed state
  • FIG. 7 is a flowchart showing an operation at the time of testing a TCP handler according to an embodiment of the present invention.
  • the test apparatus 1 for TCP includes a tester body (not shown), a test head 10 electrically connected to the tester body, and a TCP handler 2 provided on the upper side of the test head 10. .
  • the TCP handler 2 sequentially attaches a plurality of TCPs formed on the carrier tape 5 to the test.
  • each TCP handler is attached to the test. Let's say.
  • the present invention is not limited to this, and a plurality of TCPs arranged in the series direction and in the Z or parallel direction on the carrier tape 5 may be simultaneously subjected to the test.
  • the TCP handler 2 includes a feeding reel 21 and a take-up reel 22, and a carrier tape 5 before the test is wound around the feed reel 21.
  • the carrier tape 5 is also unwound on the take-up reel 21 and is taken up on the take-up reel 22 after being subjected to the test.
  • the space between the take-out reel 21 and the take-up reel 22 is composed of three spacer rolls 23a, which bridge the protective tape 51 peeled off from the carrier tape 5 from the take-out reel 21 to the take-up reel 22.
  • 23b and 23c are provided.
  • Each of the spacer rolls 23a, 23b, 23c is movable up and down so that the tension of the protective tape 51 can be adjusted.
  • a tape guide 24a, a feeding limit roller 25a, an inboard subs A procket 25b and an in-side guide roller 25c are provided, and the carrier tape 5 unrolled from the unloading reel 21 is guided by the tape guide 24a while the unloading limit roller 25a, the in-side sub-sprocket 25b and the It is conveyed to the pusher unit 3 via the side guide roller 25c.
  • a tape guide 24b, a take-off limit roller 25f, an out-side sub sprocket 25e and an out-side guide roller 25d are provided below the take-up reel 22, and the carrier tape 5 after being subjected to the test is provided. Is wound around the take-up reel 22 while being guided by the tape guide 24b via the out-side guide roller 25d, the out-side sub-sprocket 25e and the take-up limit roller 25f.
  • a push unit 3 is provided between the in-side guide roller 25c and the out-side guide roller 25d.
  • a servo motor 31 capable of rotating a ball screw 32 is attached to a frame (pusher frame) 36 of the pusher unit 3 via a bracket 361.
  • a pusher body 33 to which the ball screw 32 is screwed is attached via two linear motion guides (hereinafter referred to as “LM guides”) 37 in the Z-axis direction.
  • the pusher body 33 is movable in the vertical direction (Z-axis direction) while being guided by the re-motion guide 37 by driving the servo motor 31.
  • a suction plate 34 that is connected to a negative pressure source (not shown) and can suck and hold the carrier tape 5 is provided.
  • a tension sprocket 35a is provided on the front side of the pusher body 33 (left side in FIG. 1), and a main sprocket 35b is provided on the rear side of the pusher body 33 (right side in FIG. 1).
  • the carrier tape 5 is held with a desired tension.
  • a pusher stage 4 is installed on the back surface side of the pusher main body 33 in the pusher frame 36 so as to be placed on the base 38.
  • the top table 48 which is a rotating table, is fixed to the pusher frame 36.
  • a ball screw 42a having an axis in the X-axis direction is turned on the base 40 of the pusher stage 4.
  • Servo motor 41a for rotating, servo motor 41b for rotating ball screw 42b having an axis in the Y-axis direction, and servo motor 41c for rotating ball screw 42c having an axis in the Y-axis direction are provided. 41b and servo motor 41c are located at both ends on base 40, respectively.
  • a sliding block 44a that is guided by LM guides 43a, 43a in the X-axis direction and is slidable in the X-axis direction is screwed into the ball screw 42a.
  • a sliding plate 46a is attached to the sliding block 44a via a Y-axis LM guide 45a so as to be slidable in the Y-axis direction.
  • a rotating member 47a having a roller ring inside is fixed to the upper side of the sliding plate 46a, and the rotating member 47a is rotatably attached to the top table 48.
  • a sliding block 44b that is guided by LM guides 43b, 43b in the Y-axis direction and is slidable in the Y-axis direction is screwed into the ball screw 42b.
  • a sliding plate 46b is attached to the sliding block 44b through an LM guide 45b in the X-axis direction so as to be slidable in the X-axis direction.
  • a rotating member 47b having a roller ring inside is fixed to the upper side of the sliding plate 46b, and the rotating member 47b is rotatably attached to the top table 48.
  • a sliding block 44c that is guided by LM guides 43c, 43c in the Y-axis direction and is slidable in the Y-axis direction is screwed into the ball screw 42c.
  • a sliding plate 46c is attached to the sliding block 44c through an LM guide 45c in the X-axis direction so as to be slidable in the X-axis direction.
  • a rotating member 47c having a roller ring inside is fixed to the upper side of the sliding plate 46c, and the rotating member 47c is rotatably attached to the top table 48.
  • the servo motor 41a is driven to slide the sliding block 44a, the sliding plate 46b, and the sliding plate 46c in the X-axis direction.
  • the top table 48 can be moved in the X-axis direction. Also, the top table 48 is moved in the Y-axis direction by driving the servo motor 41b and the servo motor 41c and sliding the sliding block 44b, the sliding block 44c, and the sliding plate 46a in the same direction as the Y-axis. Can be made.
  • the servo motor 41a is driven to slide the slide block 44a in the X-axis direction
  • the servo motor 41b and the servo motor 41c are driven to make the slide block 44b and the slide block 44c Y Slide the top table 48 in its vertical axis by sliding in the opposite direction and rotating each rotating member 47a, 45b, 45c. Can be rotated.
  • the pusher unit 3 can be moved in the X-axis and Y-axis directions and rotated around the vertical axis.
  • the pusher stage 4 can move in a shorter time than the probe card stage 7. However, since the pusher stage 4 moves the TCP while the carrier tape 5 is sucked and held, the amount of movement in the X-axis and Y-axis directions and the rotational movement is small, but it can be used practically.
  • a probe card stage 7 on which a probe card 8 is mounted is installed below the pusher unit 3 and above the test head 10.
  • the probe card stage 7 includes a type that can be moved and controlled by a motor drive mechanism and a type that has only a manual adjustment function.
  • the probe card stage 7 has a motor drive mechanism.
  • a servo motor 711 that rotates a ball screw 712 having an axis in the X-axis direction, and four LMs in the X-axis direction Guide 713 is provided.
  • rectangular X bases 72 are provided which are guided by the LM guides 713 so as to be slidable in the X-axis direction.
  • a threaded portion 721 into which a ball screw 712 is threaded is formed on one side of the X base 72.
  • a servo motor 722 for rotating a ball screw 723 having an axis in the Y-axis direction and two LM guides 724 in the Y-axis direction are provided on the X base 72.
  • a rectangular Y base 73 is provided that is slidably guided in the Y-axis direction by the LM guides 724.
  • a ball screw 723 is screwed to one side of the Y base 73 to form a screwed portion 731.
  • a servo motor 732 for rotating a ball screw 733 having an axis in the Y-axis direction, and a connection ring 734 for rotatably supporting the card ring 735 are provided on the Y base 73.
  • a part of the card ring 735 is formed with a threaded portion 736 into which a ball screw 733 is threaded.
  • a probe card 8 with multiple probes 81 is detachably attached to the card ring 735 with four pins 82! / Although not shown in FIGS. 4 and 5, each probe 81 of the probe card 8 is electrically connected to the tester body via the test head 10.
  • the probe card stage 7 having such a configuration, by driving the servo motor 711, the X base 72, and hence the probe card 8 can be moved in the X-axis direction, and the servo motor 722 is driven. As a result, the Y base 73 and thus the probe card 8 can be moved in the Y-axis direction. Further, the card ring 735 and the probe card 8 can be rotated around the vertical axis by driving the servo motor 732 to rotate the ball screw 733 and moving the screwing portion 736.
  • the first camera 6a force is placed on the front side of the pusher unit 3 (left side in FIG. 1), and the second camera (imaging device) 6b is placed on the lower side of the test head 10.
  • a third camera 6c is provided on the rear side of 3 (right side in Fig. 1).
  • the test head 10 is formed with a gap through which the second camera 6b can photograph the probe card 8.
  • a mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c. Based on the test results, the mark punch 26a has one or more holes in the specified position in the corresponding TCP, and the reject punch 26b is determined to be defective as a result of the test. It is something that punches out TCP.
  • Each camera 6a, 6b, 6c causes the display device 9 to display images taken by these cameras so that the operator can approve the images.
  • the first camera 6a and the third force camera 6c are for determining the presence or absence of TCP on the carrier tape 5 and the position and number of holes by the mark punch 26a.
  • the second camera 6b is for acquiring positional deviation information between the TCP and the probe card 8, and can acquire positional deviation information for a plurality of objects in the field of view.
  • the second camera 6b is mounted on the camera stage 61, and can be moved in the vertical and horizontal directions (X-axis Y-axis direction) and in the vertical direction (Z-axis direction) by an actuator provided in the camera stage 61. It has become.
  • the display device 9 has the image processing unit 90 and a standard image (an image that has been enlarged by the image processing unit 90) taken by the second camera 6b or an enlargement processed by the image processing unit 90. Change the display panel 91 that displays the enlarged image and the magnification of the image displayed on the display panel 91. And an area specifying button 93 (area specifying section) for specifying an area to be displayed.
  • a touch panel on the display screen and a screen scroll button may be provided.
  • the image processing unit 90 is configured by a computer that can digitally process image data.
  • the operation button 92 includes an enlargement button 92a with a “+” sign and a reduction button 92b with a “ ⁇ ” sign.
  • the image processing unit 90 performs image processing for displaying a part of the standard image in a large size, and the enlarged image is displayed on the display panel 91.
  • the reduction button 92b is pressed, the image processing unit 90 performs image processing for displaying an enlarged image in a small size, and an enlarged image or a standard image with a reduced magnification is displayed on the display panel 91.
  • the display device 9 can continuously change the enlargement magnification by pressing the operation button 92.
  • the lower limit value (1 ⁇ ) and the upper limit value (for example, 5 ⁇ ) of the enlargement magnification can be obtained. Any magnification can be selected between and.
  • the area designation button 93 is composed of four buttons with arrow symbols pointing up, down, left, and right. By pressing these buttons, the area displayed on the display panel 91 is moved up, down, left, and right. It can move in any direction.
  • the signal generated by the operation of the area specifying button 93 is input to the image processing unit 90, and the image processing unit 90 displays the image data to be displayed in response to this input. Output to panel 91.
  • a method of moving the second camera 6b may be used as a method of moving the region.
  • test pad P and the alignment mark 55 are displayed at the same time. Further, on the display panel 91, although omitted in FIG. 6, it is desirable to display information that is easy for the operator to work.
  • camera information magnification value, camera XY movement range, current XY position information, etc.
  • TCP information to be observed TCP number, distance value in the pressing direction, X-axis coordinate value, Y-axis coordinate value, etc.
  • Cross cursor and its intersection coordinate information relative XY coordinate value with reference to alignment mark 55
  • cross force close to the intersection of one sol ! number information of test pad P in position, each test pad No position
  • XY deviation value indicating the amount of deviation.
  • the two images of the standard image and the enlarged image can be displayed at the same time, and the display operation of the two images can facilitate the alignment operation.
  • the TCP test pad ⁇ ⁇ ⁇ shown in Fig. 6 is arranged in a straight line.
  • the test pad P is formed by a simple staggered arrangement or a complicated arrangement. TCP also exists.
  • the second camera 6b is a high-resolution camera or operator that allows the image processing unit 90 to obtain the positional deviation amount of the probe 81 / test node P with a desired accuracy at the maximum magnification. It is desirable that the camera be a high-resolution camera that can grasp the position displacement of the probe 81Z test pad P while viewing the enlarged image by manual operation and can adjust the position of the probe 81.
  • the operator operates the magnifying magnification of the image at any time while observing the screen of the display device 9, so that the operator can check the image accurately.
  • the contour of the image does not appear jagged.
  • the operator can accurately align the probe 81 and the test pad P.
  • the test pad P can cope with TCP with a narrower pitch, and the status of the misalignment of many probes 81Z test pad P and their contours can be confirmed accurately.
  • the same image data can be used in the rough positioning process and detailed positioning process of many probes 81Z test pad P.
  • the mechanical movement error of the probe card stage 7 is reduced, so the future TCP with a fine and narrow-pitch test pad P can be positioned with high accuracy. be able to.
  • probe card 8 When using TCP handler 2, move probe card 8 so that all probes 81 of probe card 8 are positioned in the center of corresponding test pad P before operating TCP handler 2. It is necessary to make initial settings. This means that if you change the TPP varieties, test different production lots of TCP, or When the probe card 8 is changed, the reference position of the X-axis position ZY-axis position Z ⁇ rotation angle of the probe card stage 7 is determined so that the TCP test pad P and the probe card 8 probe 81 contact each other. Therefore, it is necessary to register (this position is referred to as “registered position”). Since pusher stage 4 is used during TCP test execution, it is assumed that it remains in the uncontrolled state by default.
  • the TCP test pad P and the probe 81 of the probe card 8 are photographed and photographed by the second camera 6b.
  • a standard image is displayed on the display panel 91 (see FIG. 6 (a)). Therefore, the operator moves the main sprocket 35b and Z or the probe card stage 7 by manual operation while visually recognizing the image displayed on the display panel 91, so that a plurality of locations (for example, as shown in FIG. 9) Determine the coarse position of the probe 81 and the corresponding test node P.
  • the coarse position can be determined automatically instead of manually, if desired!
  • the operator manually moves the probe card stage 7 in the X axis direction, the ZY axis direction, and the Z ⁇ rotation direction so that the plurality of probes 81 come into contact with the center position of the test pad P as much as possible. Adjust the position.
  • This adjustment work is generally performed for a plurality of test pads P and corresponding probes 81 in the four corners of the TCP.
  • the state of the probe force stage 7 that is in the best state for all the probes 81 by this adjustment work is registered as a reference position.
  • the contact ends of all the probes 81 are not necessarily at the center position of the test pad P. Therefore, the best condition that all probes 81 can contact the test pad P stably. It is necessary to set to.
  • the position coordinates of a predetermined position in the field of view of the second camera 6b are also registered. It is preferable to register three or more position coordinates, especially for distant objects in the camera's field of view. This makes it possible to acquire positional deviation information with high accuracy. For example, alignment mark 55 on carrier tape 5, two or more test pads P or characteristic leads on the diagonal of TCP, two or more probes corresponding to them 81 Etc. can be selected.
  • the probe card stage 7 moves the probe card 8 to the registration position registered in the initial setting to be in a fixed state, and corrects misalignment performed before each TCP test that is sequentially transferred.
  • This fine adjustment is performed by the pusher stage 4 for fine adjustment.
  • this fine adjustment is also possible by moving the probe card stage 7 in place of the pusher stage 4.
  • the second camera 6b is moved to the shooting position shown in FIG. 6 (a) (the position where both the alignment mark 55 and the test pad are shot) by the camera stage 61 in the initial stage. It is assumed that all the TCP tests are in a stationary state, and therefore the misalignment is corrected based only on the nine test pads P and the probe 81.
  • the probe card stage 7 moves to the registration position registered in the initial setting (step SO1). From this point on, it is necessary to correct small misalignments caused by the transport system for each TCP and others.
  • the main sprocket 35b and the tension sprocket 35a rotate by a predetermined angle to move the carrier tape 5 and transport the first TCP to a predetermined position below the suction plate 34 (step S02).
  • the servo motor 31 of the pusher unit 3 is driven to move the suction plate 34 downward through the pusher body 33.
  • the tension sprocket 35a is given a predetermined tension to the carrier tape 5 by being given a torque in the direction opposite to the traveling direction of the carrier tape 5, the carrier tape 5 is in a state without sagging, The positional accuracy of the carrier tape 5 is improved.
  • the suction plate 34 sucks the carrier tape 5 to hold and fix the TCP, and then descends to the photographing position (step S03).
  • the second camera 6b performs photographing (step S04), and transmits the obtained image data to the image processing unit 90.
  • the image processing unit 90 receives the received image data and displays the standard image on the display panel 91 together with various information (X coordinate value, Y coordinate value, magnification, pusher position information, etc.) (step S05). , Allowing the operator to confirm.
  • the image processing unit 90 obtains positional deviation information (the direction of positional deviation (X-axis direction / Y-axis direction) and the amount of positional deviation) between the test pad P and the probe 81 by calculation (step SO 6 ).
  • the image processing unit 90 first identifies the alignment mark 55 and obtains position information of the alignment mark 55 from the position of the alignment mark 55 on the image and the stage position of the camera stage 61. From the position information of the alignment mark 55, the displacement of the carrier tape 5 itself in the X-axis direction and the Y-axis direction can be obtained.
  • the positional relationship between each test pad P and the probe 81 is relative to the position of the alignment mark 55 as a reference point.
  • the positional deviation information is obtained based on the superposition state between the test pad P to be observed and the tip of the probe 81, and it is desirable that the number of observation objects be increased within the range of the processing capability.
  • the amount of deformation due to the deformation of the probe 81 is not negligible in the position displacement information and is present to some extent, it is based on a plurality of pieces of position displacement information obtained from a plurality of observation targets. It is also possible to obtain an approximate straight line that can stably contact multiple observation objects and obtain the best correction amount for the X-axis direction and Y-axis direction from the approximate line! /. Note that by applying a high-resolution camera as the second camera 6b, it is possible to clearly obtain a large number of image data to be observed, and as a result, it becomes easy to specify a more accurate correction amount.
  • the amount of displacement ⁇ ⁇ ( ⁇ ⁇ , ⁇ ) between the test pad P and the probe 81 in the X-axis direction and the Y-axis direction is the center position of the test pad ⁇ at the position where the probe 81 and the test pad ⁇ contact each other.
  • the image processing unit 90 obtains the positional deviation amount ⁇ ⁇ ( ⁇ , Ay) by calculation.
  • the positional deviation amount AD includes a deviation amount ⁇ X in the X-axis direction and a deviation amount ⁇ y in the Y-axis direction.
  • the positional deviation amount ⁇ ⁇ ( ⁇ , Ay) in the X-axis direction and the Y-axis direction is obtained for each of the nine probes 81 and the corresponding test pads P.
  • An approximate straight line may be obtained from the obtained nine position shift amounts ⁇ D, and the most accurate positional shift amount ⁇ D (A x, Ay) may be obtained based on the approximate lines! With this approximate line, the amount of misalignment in the zero rotation direction can be obtained at the same time.
  • misalignment correction based on the misalignment amount ⁇ D acquired using the approximate line, a more stable contact state can be obtained for the probe 81 and the test pad P at multiple points.
  • step S07 when it is determined that the positional deviation correction ⁇ D is not necessary (No in step S07), the process proceeds to step S10 described later. skip.
  • This skip can improve test throughput.
  • step S07—Yes the image processing unit 90 displays an enlarged image of the probe 81Z test pad P causing a large misalignment on the display panel 91. Automatically (Step S08).
  • the TCP handler 2 then drives the pusher stage 4 after obtaining the optimal amount of movement that can be contacted from the relationship between the probe 81 causing the large positional deviation as described above and the other probes 81.
  • misalignment correction is performed (step S09). It is also possible to specify a correction amount for the X-axis direction / ⁇ -axis direction from the above approximate line and execute the correction.
  • the servo motors 41a, 41b, 41c of the pusher stage 4 are driven to move the top table 48 and eventually the pusher unit 3, and the suction plate 34 is sucked.
  • the carrier tape 5 is moved in the X-axis—Y-axis direction and rotated around the Z or vertical axis.
  • the force pusher stage 4 can be controlled to move in a shorter time than the probe card stage 7, so it is advantageous to move the pusher stage 4 from the viewpoint of throughput. is there.
  • the servo motor 31 of the pusher unit 3 is driven to move the suction plate 34 further downward in the Z axis via the pusher main body 33.
  • the suction plate 34 that sucks the carrier tape 5 descends to the contact position and presses the TCP against the probe 81 of the probe card 8 (step S10).
  • the suction plate 34 may be slightly swung back and forth and left and right, or ultrasonic vibrations may be applied to the suction plate 34 in a contact state.
  • a process for obtaining a slight contact deviation amount at the time of contact with respect to the positional deviation correction amount at the time of contact with respect to the positional deviation correction amount at the time of non-contact by imaging the positional relationship of the probe 81Z test pad P in the contact state. You may be careful. This additional processing can be performed in parallel with the test execution, so it does not affect the throughput. Further, by adding the obtained slight contact deviation amount to the positional deviation correction amount after the next time, a more stable contact can be realized.
  • step Sl l the TCP test pad P contacts the probe 81.
  • a minute DC current is applied to each test pad P, and the presence or absence of current flowing through the TCP internal circuit (for example, a protective diode) or voltage Measure the value and check (contact check) whether the test pads are in electrical contact with each other and whether there is a short between adjacent pins (step Sl l). If a contact failure occurs during the contact check, the suction plate 34 can be slightly swayed (scribed) back and forth, left and right in the contact state, ultrasonic vibration can be applied to the suction plate 34, or the pusher body Move part 33 up and down to perform contact operation again. If the contact fails again, the TCP is judged to be defective. Here, it is assumed that it is difficult to confirm whether the contact resistance value at the time of contact is larger than the allowable resistance value that can be normally tested.
  • a test signal is applied to the TCP through the test head 10 as well as the tester body force, and the response signal read from the TCP is sent to the tester body through the test head 10 (step S12).
  • TCP performance and functions are tested, and TCP is judged as good, defective, and ranked.
  • the determination of a defective product may be based on a contact failure between the TCP test pad P and the probe 81.
  • the probe 81Z test that may have a contact failure may occur.
  • the enlarged image is displayed together with information such as the TCP number, the test pad number, the distance value in the pressing direction, the X-axis coordinate value, and the Y-axis coordinate value. You may make it display automatically. This makes it possible to accurately grasp the state of the IC pin test pad where the contact failure actually occurs.
  • step S13 If it is determined that a contact failure has occurred (step S13—Yes), first, the operator adjusts the position of the probe 81 while viewing the enlarged image of the display panel 91 by a manual operation. (Step S14a). Since this position adjustment can be performed while viewing the enlarged image, it can be easily performed.
  • a retest can be automatically performed (step S14b).
  • the tester body strength also receives the test pad number information related to the determination of defective products, and the test pad P corresponding to the information and the surrounding test pads P are misaligned as described above. If the calculated amount of misalignment is out of the normal contact area force, move it to the non-contact state, move the pusher stage 4 in the direction to correct misalignment, and then enter the contact state. Run the test again. This retest may determine that TCP is good. In addition, the extraction of test pad P that may be a contact failure is obtained based on the above test results and contact check results.
  • Step S15 When the probe card stage 7 is applied for misalignment correction, return it to the registration position. Then, the suction plate 34 stops the suction of the carrier tape 5 to release the carrier tape 5, and further moves upward in the Z-axis (step S16).
  • the TCP handler 2 determines whether or not the tested TCP is the last device (step S17). If it is determined that the TCP is the last device (step S17—Yes) ), Main operation ends. On the other hand, if it is determined that it is not the last device (step S17—No), the process returns to step S02.
  • the image enlargement processing function of the image processing unit 90 may apply a high-resolution power camera as the second camera 6b, and the camera may be provided with the function, or a power provided with an optical zoom function.
  • a zoom operation may be performed in accordance with a command from the image processing unit 90 by applying a camera.
  • the probe contact point of the probe 81 and the center position point of the test pad P may be displayed on the screen of the display device 9 in an overlay manner. That is, the image data received by the image processing unit 90 is processed, and first, the shape (outer shape or contour) of the probe 81 is extracted, and the position of the protruding end of the probe 81 (from the test pad P) is extracted from the extracted shape. Specify the probe contact point). Here, the positional relationship of the probe contact point with respect to the shape of the probe 81 is assumed to be registered in advance. Second, the shape (outer shape or contour) of the test pad P is extracted, and the center position point of the test pad P is specified from the extracted shape.
  • a mark indicating the position of the probe contact point and a mark indicating the position of the center position point of the test pad P are displayed on the display panel 91 in an overlay manner.
  • the operator can clearly grasp the deviation state between the center position point of the test pad P and the probe contact point, so that the alignment adjustment work can be performed accurately.
  • the probe contact point and the center position point of the test pad P extracted above can be stored in the storage device together with the position information of the alignment mark 55, and used for recognition of deformation of the probe 81 and other statistical processing. You may be able to do it.
  • the camera stage 61 is moved to a predetermined position at the first stage (a position where both the alignment mark 55 and the test pad P are photographed as shown in FIG.
  • a predetermined position at the first stage a position where both the alignment mark 55 and the test pad P are photographed as shown in FIG.
  • the camera stage 61 is stationary until all TCP tests are completed after moving to a known position with reference to the mark 55, but TCP has a very large number of test pads. If there is P or if more precise positioning is required, the camera should be connected to at least two test pads P on the diagonal line of multiple test pads P or at least two test pads P far from each other.
  • the stage is moved sequentially, and the amount of positional deviation ⁇ D ( ⁇ X, ⁇ y) between the plurality of probes 81 and the corresponding test pad P is calculated in the same manner as above.
  • Each may be obtained.
  • the pusher stage 4 or the probe card 8 may be moved in the X-axis direction, the Z-Y-axis direction, and the Z-theta rotation direction in a direction in which stable contact can be obtained based on all the positional deviation amounts AD obtained above. .
  • the alignment mark 55 is first specified and then an accurate positioning process is performed has been described.
  • the accurate positioning process described above may be omitted from the viewpoint of improving the throughput.
  • the position of the alignment mark 55 is specified, a deviation from a previously registered position is calculated, and after positioning based on the positional deviation information, a test form in which a test is executed immediately may be adopted.
  • the multiple probes 81 may be deformed with several to tens of thousands of pressing stresses. For this reason, all the probes 81 in contact with the TCP may be in a variation state in which the center position force of each corresponding test node is also shifted. Therefore, the probe card stage 7 is sequentially moved in the X axis direction and the horizontal axis direction until a contact failure is detected by any of the probes 81, and the effective movement region is specified. Based on this, the best position (center position in the XY direction and ⁇ rotation amount) in the current probe 81 is specified. Then, the registered position of the probe card 8 may be specified based on the specified best position.
  • the determination of the rough position of the probe 81 and the test pad P corresponding to the probe 81 and the initial setting of the reference position (or reference movement amount) may all be performed automatically. That is, the main sprocket 35b and the probe card stage 7 are moved as required, and the force camera stage 61 is moved, and the position of the alignment mark 55 related to a predetermined TCP is specified by the second camera 6b, and the alignment between the TCP and alignment Based on the predetermined information indicating the positional relationship with the mark 55, the probe 81 at a plurality of locations near the alignment mark 55 (for example, 9 locations shown in FIG. Determine the location. After that, if necessary, the enlarged image state is set as shown in FIG. 6 (b), and as described above, the positional deviation amount is obtained from the multi-point probe 81Z test pad P and the reference position is set. Again Yes. In this case, the best positioning can be performed automatically without operator intervention.
  • an effective movement area (effective movement area) for the current probe card 8 may be obtained in advance by applying a contact check function. That is, while moving the probe card 8 or the pusher stage 4 in the XY plane direction by a desired amount of movement, the electrical contact state between all the probes and the corresponding test pads is detected, and either probe is detected. In 81, find the effective movement area that does not cause poor contact.
  • the best coarse position between the TCP and the probe card 8 is determined.
  • the tolerance in the X-axis direction and the Y-axis direction can be obtained from the effective movement area, the deformation state of all the probes 81 in the probe card 8 can be grasped, and therefore the effective movement area is used as maintenance information for the probe card 8. It can also be used. Note that it is desirable to store information on the effective movement area in a storage device.
  • the TCP handling device does not have to include the pusher stage 4 that can be moved and controlled by a motor.
  • the displacement correction can be performed by moving the probe card stage 7. it can.
  • the TCP handling device of the present invention may be of a manual adjustment mechanism provided with a mechanism by which the probe card stage 7 can be moved and controlled by a motor.
  • the operator manually sets the probe card stage 7 to the registration position while viewing the standard image or the enlarged image on the display device 9. Thereafter, the pusher stage 4 can automatically perform misalignment correction.
  • the TCP determined to be defective as a result of the test execution was imaged with the positional relationship of the probe 81Z test pad P while maintaining the current contact state. If a misalignment exceeding the maximum allowable deviation in direction is found, information related to the probe 81 (position misalignment, corresponding test pad P number, distance value in the pressing direction, etc.) is displayed on the display panel 91. You may make it display. By doing this, contact failure It is possible to automatically display the probe 81 and the test pad P having a high probability, and to confirm the contact state by an image.
  • the TCP handling device is extremely useful for reducing the burden on the operator who performs the alignment work between the contact terminal of the contact portion and the external terminal of the TCP.

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

La présente invention concerne un dispositif de gestion de protocole TCP (2) dans lequel un moyen qui est en mesure d'afficher une image agrandie d'une partie d'une image capturée est utilisé en tant qu'affichage (9) afin d'afficher l'image saisie par une deuxième caméra (6b). Avec le dispositif de gestion de protocole TCP (2), le rapport de position entre une pastille d'essai (P) d'un protocole TCP et une sonde (81) d'une carte test (8) peut être contrôlé visuellement à l'aide d'une image agrandie affichée sur l'affichage (9). Par conséquent, un positionnement facile, précis et rapide est possible lorsque l'alignement pour un réglage initial ou analogue est effectué.
PCT/JP2005/017068 2005-09-15 2005-09-15 Dispositif de gestion de protocole tcp WO2007032077A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/JP2005/017068 WO2007032077A1 (fr) 2005-09-15 2005-09-15 Dispositif de gestion de protocole tcp
JP2007535357A JP4885139B2 (ja) 2005-09-15 2005-09-15 Ｔｃｐハンドリング装置
TW095130794A TW200720682A (en) 2005-09-15 2006-08-22 Tcp handler

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2005/017068 WO2007032077A1 (fr) 2005-09-15 2005-09-15 Dispositif de gestion de protocole tcp

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WO2007032077A1 true WO2007032077A1 (fr) 2007-03-22

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05326675A (ja) * 1992-03-23 1993-12-10 Tokyo Electron Ltd プローブ装置
JPH10206491A (ja) * 1996-09-30 1998-08-07 Ando Electric Co Ltd プローブ接触痕の確認方式
JPH11344538A (ja) * 1998-05-29 1999-12-14 Hioki Ee Corp 回路基板検査装置
JP2001033520A (ja) * 1999-07-26 2001-02-09 Advantest Corp Ｉｃハンドラ装置のｉｃコンタクト部
JP2002181889A (ja) * 2000-12-13 2002-06-26 Ando Electric Co Ltd プローブカードとｔａｂの位置決め装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05326675A (ja) * 1992-03-23 1993-12-10 Tokyo Electron Ltd プローブ装置
JPH10206491A (ja) * 1996-09-30 1998-08-07 Ando Electric Co Ltd プローブ接触痕の確認方式
JPH11344538A (ja) * 1998-05-29 1999-12-14 Hioki Ee Corp 回路基板検査装置
JP2001033520A (ja) * 1999-07-26 2001-02-09 Advantest Corp Ｉｃハンドラ装置のｉｃコンタクト部
JP2002181889A (ja) * 2000-12-13 2002-06-26 Ando Electric Co Ltd プローブカードとｔａｂの位置決め装置

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JP4885139B2 (ja) 2012-02-29
TW200720682A (en) 2007-06-01
TWI346210B (fr) 2011-08-01

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