JP4885139B2 - Ｔｃｐハンドリング装置 - Google Patents

Ｔｃｐハンドリング装置 Download PDF

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Publication number
JP4885139B2
JP4885139B2 JP2007535357A JP2007535357A JP4885139B2 JP 4885139 B2 JP4885139 B2 JP 4885139B2 JP 2007535357 A JP2007535357 A JP 2007535357A JP 2007535357 A JP2007535357 A JP 2007535357A JP 4885139 B2 JP4885139 B2 JP 4885139B2
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JP
Japan
Prior art keywords
contact
tcp
terminal
terminals
external
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007535357A
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English (en)
Japanese (ja)
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JPWO2007032077A1 (ja
Inventor
武士 大西
寿 村野
雅史 近藤
勝博 今泉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
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Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
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Publication of JPWO2007032077A1 publication Critical patent/JPWO2007032077A1/ja
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Publication of JP4885139B2 publication Critical patent/JP4885139B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2891—Features relating to contacting the IC under test, e.g. probe heads; chucks related to sensing or controlling of force, position, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2007535357A 2005-09-15 2005-09-15 Ｔｃｐハンドリング装置 Expired - Fee Related JP4885139B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2005/017068 WO2007032077A1 (fr) 2005-09-15 2005-09-15 Dispositif de gestion de protocole tcp

Publications (2)

Publication Number Publication Date
JPWO2007032077A1 JPWO2007032077A1 (ja) 2009-03-19
JP4885139B2 true JP4885139B2 (ja) 2012-02-29

Family

ID=37864683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007535357A Expired - Fee Related JP4885139B2 (ja) 2005-09-15 2005-09-15 Ｔｃｐハンドリング装置

Country Status (3)

Country Link
JP (1) JP4885139B2 (fr)
TW (1) TW200720682A (fr)
WO (1) WO2007032077A1 (fr)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05326675A (ja) * 1992-03-23 1993-12-10 Tokyo Electron Ltd プローブ装置
JPH10206491A (ja) * 1996-09-30 1998-08-07 Ando Electric Co Ltd プローブ接触痕の確認方式
JPH11344538A (ja) * 1998-05-29 1999-12-14 Hioki Ee Corp 回路基板検査装置
JP2002181889A (ja) * 2000-12-13 2002-06-26 Ando Electric Co Ltd プローブカードとｔａｂの位置決め装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001033520A (ja) * 1999-07-26 2001-02-09 Advantest Corp Ｉｃハンドラ装置のｉｃコンタクト部

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05326675A (ja) * 1992-03-23 1993-12-10 Tokyo Electron Ltd プローブ装置
JPH10206491A (ja) * 1996-09-30 1998-08-07 Ando Electric Co Ltd プローブ接触痕の確認方式
JPH11344538A (ja) * 1998-05-29 1999-12-14 Hioki Ee Corp 回路基板検査装置
JP2002181889A (ja) * 2000-12-13 2002-06-26 Ando Electric Co Ltd プローブカードとｔａｂの位置決め装置

Also Published As

Publication number Publication date
WO2007032077A1 (fr) 2007-03-22
TW200720682A (en) 2007-06-01
TWI346210B (fr) 2011-08-01
JPWO2007032077A1 (ja) 2009-03-19

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