WO2006106069A1 - Wellendichtung - Google Patents
Wellendichtung Download PDFInfo
- Publication number
- WO2006106069A1 WO2006106069A1 PCT/EP2006/061185 EP2006061185W WO2006106069A1 WO 2006106069 A1 WO2006106069 A1 WO 2006106069A1 EP 2006061185 W EP2006061185 W EP 2006061185W WO 2006106069 A1 WO2006106069 A1 WO 2006106069A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sealing
- chamber
- shaft seal
- gap
- seal according
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/406—Sealings between relatively-moving surfaces by means of fluid by at least one pump
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/44—Free-space packings
- F16J15/447—Labyrinth packings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
- F04C27/009—Shaft sealings specially adapted for pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/10—Shaft sealings
- F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
- F04D29/104—Shaft sealings especially adapted for elastic fluid pumps the sealing fluid being other than the working fluid or being the working fluid treated
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
Definitions
- the invention relates to a shaft seal, which is particularly suitable for vacuum pumps, such as screw pumps.
- the gas seal is formed as a labyrinth seal in combination with a plurality of piston rings.
- a radially extending separation chamber is provided, which is connected to a Trennkammcr ventilation duct with the environment.
- a desired gas pressure preferably ambient pressure. This ensures that the drop across the gas seal pressure difference and the drop across the oil seal pressure difference can be adjusted.
- an appropriate pressure setting can It is avoided that oil passes from the bearingcite through the oil seal and through the gas seal into the pump chamber's pump chamber.
- sealing gas Wcllendichtung is supplied so that penetration of the lubricant, in particular of the oil, is avoided in the dry area or the pump chamber of the pump.
- Such a supply of sealing gas increases the pressure in a gear chamber in which the lubricant provided for lubricating the bearing points is arranged. In a required venting of the gear chamber thus exits an oil mist from the gear chamber. This is an escape of oil into the environment.
- the object of the invention is to provide a Weüendichtung whose components are protected from damage by corrosive media, dirt and the like.
- the shaft seal according to the invention which is particularly suitable for vacuum pumps and particularly preferably for screw pumps, has an inner sealing ring which can be connected in particular to a rotor shaft.
- the inner sealing ring is at least partially surrounded by an outer sealing ring, wherein the outer sealing ring is preferably arranged stationary, for example, held in a housing.
- a barrier gas chamber is provided which at least partially passes through the sealing rings is formed and can be introduced into the arranged via a preferably arranged in the stationary outer sealing gas feed channel sealing gas.
- the barrier gas chamber is connected to a sealing gap arranged between the inner and the outer sealing ring as well as to an outlet gap, so that sealing gas can escape from the barrier gas chamber both into the diffusion gap and into the outlet gap.
- the outlet gap is in this case preferably connected to a suction chamber.
- the sealing gap and the outlet gap are thus preferably fluidly connected to one side of the seal.
- the cross-section of the Dchschtspaltes and the exit slit is dimensioned such that the flow resistance is greater in the Dichtspait a ⁇ s in the exit slit.
- This has the consequence that always a larger amount of sealing gas flows in the direction of the pump chamber or on a transmission side facing away from the seal and thus the security that corrosive media or the like. Penetrate into the seal is further increased. A smaller part of the sealing gas flows through the sealing gap, in which preferably piston rings are arranged, in a subsequent separation chamber.
- a circumferential groove is preferably arranged.
- a sealing gas disc which can be connected to the shaft is preferably provided.
- the Sperrgasscheibc has a projecting into the groove approach, the dimensions of the particular annular approach are chosen such that the approach in the assembled state to form the sealing gas chamber does not completely into the groove protrudes ..
- the chamber gap is defined by the arrangement and the design of the Sperrgasscheibc.
- the Kammerspait between the groove and the projecting into the groove lug is formed.
- the sealing gas can pass into a sealing gap which is provided between the inner and outer sealing ring.
- a sealing gap Preferably, in the region of the sealing gap for sealing piston rings and / or a labyrinth seal are provided.
- the sealing gas passes into a subsequent to the sealing gap separating chamber, which is preferably in turn formed by the inner and outer sealing ring.
- the separation chamber is connected to Sperrgasabschreib with a discharge channel, wherein the discharge channel is preferably connected to the environment.
- sealing gap By providing a sealing gap according to the invention, to which a separation chamber with discharge channel connects, it is ensured that no corrosive media or dirt particles and dg! Penetrate into the sealing gap. As a result, the preferably arranged in the sealing gap piston rings are protected from damage.
- the barrier gas chamber has an outlet gap connected to or independent of the chamber gap.
- the exit slit is connected to the pump chamber. This ensures that, for example, explosive or toxic gases can not escape from the pump chamber through the sealing gap or the gas seal into the environment. This is achieved in particular by the fact that a small amount of sealing gas always exits through the outlet gap into the suction chamber.
- a separation chamber with discharge channel has the particular advantage that the sealing gas does not enter a transmission housing, Thus, a ventilation of a transmission housing, in which oil can be entrained, not required. Furthermore, due to the through the discharge channel flowing out of the barrier gas, the penetration of corrosive media or particles avoided.
- At least one spin chamber is preferably arranged between the separation chamber and the gear chamber or the Lagcrsrelle. These are preferably essentially radially formed chambers in which the lubricant is spun off.
- the centrifugal chambers are preferably connected to the gear chamber for returning the lubricant. It is also particularly preferred to also design the at least one spin chamber through the inner and outer sealing rings. Here is the smallest possible gap between the two sealing rings.
- a throttle is provided in the supply channel connected to the barrier gas chamber, which is operated supercritically, This ensures that the barrier gas chamber, regardless of the pressure in the pumping chamber, a constant Sperrgasmasscnstrom is supplied. Since the flow resistance of the outlet gap is made considerably smaller than that of the sealing gap, a predominant part of the sealing gas flows into the suction chamber, even if the pressure is above the pressure in the separation chamber.
- the pressure in the barrier gas chamber follows and is higher than the pressure in the suction chamber.
- the sealing gas is preferably additionally supplied via a pressure regulator.
- a filter is connected upstream to protect the nozzle from contamination of the nozzle.
- a particular advantage of the shaft seal according to the invention is that the supply of sealing gas is optional. Depending on the requirements of the shaft seal, the supply of protective gas can be omitted. Even without that Injections of inert gas, the shaft seal has good sealing properties.
- the invention relates to a vacuum pump, in particular a screw pump, with at least one rotor shaft.
- the rotor shaft is connected to a rotor and a bearing.
- a shaft seal is provided between the rotor, which is preferably arranged in a pump chamber, and the bearing, which is usually an oil-lubricated bearing arranged in a gear housing.
- the shaft seal is designed as described above.
- FIG r 1 is a schematic sectional view of a first embodiment of a rotor shaft of a screw pump in the area of Wellcndichtung,
- Fig. 2 is a Tcil sectional view of a second embodiment of
- FIG. 3 shows a schematic sectional view of a further embodiment of a rotor shaft of a screw pump in the region of the shaft seal
- Fig. 4 is a partial sectional view of another embodiment of the
- Fig. 5 is a partial sectional view of another embodiment of the
- a rotor shaft 10 is connected on a pump chamber or dry side 12 with a rotor 14, wherein for ease of illustration in Fig. 1, only one rotor blade of a rotor designed for example as a rotor is shown.
- a bearing 16 is connected to the rotor shaft 10, which is a ball bearing in the illustrated embodiment, the bearing 16 is, for example oil lubricated. Between the rotor 14 and the bearing 16, the shaft seal according to the invention is arranged.
- the shaft seal has an inner sealing ring 18, which is firmly connected to the rotor shaft 10.
- the inner sealing ring 18 is surrounded by an outer sealing ring 20, which is for example fixed in a housing, not shown.
- a feed channel 22 is provided, which is connected to a housing 26 disposed in a channel 26. Via the channel 26 and the feed channel 22, a sealing gas of a barrier gas chamber 28 can be supplied.
- the sealing gas chamber is formed by a circumferential groove 30 provided in the outer sealing ring 20, in which groove 30 a projection 32 of a sealing gas disk 34 firmly connected to the shaft 10 protrudes.
- the outer dimensions of the circular-shaped projection 32 are slightly smaller than the dimensions of the groove 30, so that between the projection 32 and the groove 30 on the inside of a chamber gap 36, and on the outside of an outlet gap 38 is formed.
- sealing gas exits into the suction chamber 12.
- the chamber gap 36 is connected to a sealing gap 40, so that sealing gas from the sealing gas chamber 28 passes through the chamber gap 36 in the sealing gap 40 and flows through it into a separation chamber 42. From the separation chamber 42, the sealing gas passes through an exhaust duct 44, for example into the environment or into a collecting space,
- the separation chamber 42 is formed by a provided in the outer sealing ring 20 radial groove 46 and provided in the inner sealing ring 18 inner Rad ⁇ al groove 48, wherein the two grooves 46, 48 are arranged opposite to each other.
- the centrifugal chambers 52 are formed by substantially radially extending annular grooves in the outer sealing ring 20.
- the centrifugal chambers are used for centrifuging or for receiving lubricant, in particular lubricating oil, which emerges from the bearing 16 in the direction of the rotor 14.
- the centrifugal chambers 52 are connected via a transverse bore, not shown, with the Getr ⁇ ebcgephaseuse for returning the lubricant.
- FIG. 2 A further embodiment of the sealing gas chamber is shown in Fig. 2, wherein the same or similar components are identified by the same reference numerals.
- the sealing gas disc 34 has two mutually rotationally symmetrical lugs 54, 56, wherein the projection 54 has a greater distance from a center line 58 than the projection 56.
- the sealing gas chamber 28 is arranged, wherein for enlarging the sealing gas chamber 28 in the sealing gas disc 34, a groove 30 opposite groove 60 is formed.
- the two projections 54, 56 protrude into two annular, provided in the outer sealing ring 20 grooves 62 and 64.
- the outer dimensions of the annular projections 54, 56 are again slightly smaller than the width of the grooves 62, 64. This is between the approach 54 and the groove 62 of the exit slit 38, and formed between the groove 64 and the projection 56 of the Kammcrspalt 36.
- a purging gas disk 66 having the same function as the purging gas disk 34 is in two parts.
- an inner Sperrgasr ⁇ ng 68 of the sealing gas disc 66 is fixedly connected to the shaft 10.
- An outer sealing gas ring 70 may be fixedly connected to the outer sealing ring 20.
- the outer sealing gas ring 70 has a head-shaped, symmetrical to the line of symmetry 58 approach 72 which in a correspondingly formed, also rotationally symmetrical to the axis 58 recess 74- in the inner sealing gas ring protrudes.
- a second sealing gas chamber 76 which is also annular, is provided in the sealing gas disc 66 between the two sealing gas rings 68, 70.
- This second barrier gas chamber 76 leads the sealing gas, which has passed the gap 38, to a second gap 80, through which the sealing gas is evenly distributed around the periphery, flows out into the suction chamber 12 and thereby the penetration of particles, condensates and prevents corrosive or toxic gases. Since the sealing gas is guided into the suction chamber 12 through the annular gap 80 in the main conveying direction of the rotor 14, the opening of the annular gap 80 remains in the slipstream of the sealing gas disk 66. In this way, when operating without sealing gas, the risk is greatly reduced that particles or condensates from the conveying gas flow into the annular gap 80 arrive.
- This Rspngspalt 80 has a larger annular surface than the annular gap 38, so that the gap 38, the determining throttle, downstream of the sealing gas chamber 28, represents.
- the barrier gas chamber 28 is connected via a distribution groove 78 to the annular gaps 36 and 38, wherein the annular gap 36 between the outer sealing ring 20 and the inner sealing ring 18 is very short and the gas leads directly to the sealing gap 40, which in turn constricted by the piston rings 50 becomes, whereby the passing through this barrier gas amount extremely low.
- FIGS. 4 and 5 show two further embodiments in a partial Schn ⁇ ttans ⁇ cht, wherein similar or corresponding components are identified by the same reference numerals.
- the sealing gas chamber 28 is formed by the inner D ⁇ chtring 18, the outer sealing ring 20 and the rotor 14.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Sealing Devices (AREA)
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP06725436A EP1866560A1 (de) | 2005-04-02 | 2006-03-30 | Wellendichtung |
CN2006800108950A CN101156008B (zh) | 2005-04-02 | 2006-03-30 | 轴封及具有该轴封的真空泵 |
JP2008503521A JP2008534877A (ja) | 2005-04-02 | 2006-03-30 | 軸シール |
CA002601180A CA2601180A1 (en) | 2005-04-02 | 2006-03-30 | Shaft seal |
US11/887,601 US20090140495A1 (en) | 2005-04-02 | 2006-03-30 | Shaft Seal |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005015212A DE102005015212A1 (de) | 2005-04-02 | 2005-04-02 | Wellendichtung |
DE102005015212.0 | 2005-04-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006106069A1 true WO2006106069A1 (de) | 2006-10-12 |
Family
ID=36648748
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2006/061185 WO2006106069A1 (de) | 2005-04-02 | 2006-03-30 | Wellendichtung |
Country Status (8)
Country | Link |
---|---|
US (1) | US20090140495A1 (de) |
EP (1) | EP1866560A1 (de) |
JP (1) | JP2008534877A (de) |
KR (1) | KR20070118158A (de) |
CN (1) | CN101156008B (de) |
CA (1) | CA2601180A1 (de) |
DE (1) | DE102005015212A1 (de) |
WO (1) | WO2006106069A1 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100189583A1 (en) * | 2007-08-23 | 2010-07-29 | Albert Cacard | Dry vacuum pump including a lubricating fluid sealing device and a centrifuge element equipping such a device |
US10392956B2 (en) | 2013-12-30 | 2019-08-27 | Siemens Aktiengesellschaft | Sealing system for a steam turbine, and steam turbine |
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US7943882B2 (en) * | 2007-11-20 | 2011-05-17 | Accutex Technologies Co., Ltd. | Sealing apparatus having circulating channel for wire cutting machine |
CN101705996B (zh) * | 2009-10-12 | 2011-09-14 | 江苏牡丹离心机制造有限公司 | 卧式离心机中传动机构的密封装置 |
KR101146635B1 (ko) * | 2010-04-08 | 2012-05-16 | (주)동일전자 | 이물질유입방지기능을 갖는 물순환용 펌프 |
DE102011005026A1 (de) | 2011-03-03 | 2012-09-06 | Siemens Aktiengesellschaft | Teilfugenabdichtung bei einem Gehäuse für eine Fluidmaschine |
JP2013002590A (ja) * | 2011-06-20 | 2013-01-07 | Ulvac Japan Ltd | 真空装置 |
EP2772670B1 (de) * | 2011-10-27 | 2017-06-14 | Mitsubishi Heavy Industries, Ltd. | Trockengasdichtungsstruktur |
CN105026761B (zh) | 2012-12-31 | 2017-06-06 | 冷王公司 | 用于延长开放式驱动的压缩机的轴封的使用寿命的装置和方法 |
GB201318765D0 (en) * | 2013-10-23 | 2013-12-04 | Romax Technology Ltd | Pressurised gearbox |
US9394903B2 (en) * | 2013-12-13 | 2016-07-19 | Imo Industries, Inc. | Dual mechanical seal with embedded bearing for volatile fluids |
JP6430718B2 (ja) * | 2014-05-12 | 2018-11-28 | 株式会社荏原製作所 | 真空ポンプ装置 |
EP3053653B1 (de) | 2015-02-06 | 2017-11-22 | Alfa Laval Corporate AB | Zentrifugenseparator für Plattenstapel |
JP6398897B2 (ja) * | 2015-07-23 | 2018-10-03 | 株式会社豊田自動織機 | 遠心圧縮機 |
DE202016003924U1 (de) * | 2016-06-24 | 2017-09-27 | Vacuubrand Gmbh + Co Kg | Vakuumpumpe mit Sperrgaszufuhr |
CN106390857B (zh) * | 2016-08-29 | 2023-02-28 | 常州一步干燥设备有限公司 | 一种湿法制粒机切割密封结构 |
CN106286836B (zh) * | 2016-09-22 | 2018-03-02 | 大连西力博机电设备科技有限公司 | 一种斗提机尾部传动轴密封装置 |
KR102329460B1 (ko) * | 2017-03-23 | 2021-11-22 | 한화파워시스템 주식회사 | 오일 시일 구조체 |
EP3396171B1 (de) * | 2017-04-26 | 2021-11-10 | Pfeiffer Vacuum Gmbh | Vakuumgerät mit wellendichtung |
CN106958526B (zh) * | 2017-05-16 | 2018-08-31 | 西南石油大学 | 一种天然气水合物管输用高压螺杆泵吸入口端密封结构 |
CN110026787B (zh) * | 2019-05-22 | 2024-04-16 | 宝鸡忠诚机床股份有限公司 | 一种机床主轴密封及排污结构 |
CN110792630B (zh) * | 2019-11-07 | 2020-09-01 | 南京工程学院 | 一种气冷式波纹管干气密封装置 |
CN111111325A (zh) * | 2020-01-30 | 2020-05-08 | 深圳市爱贝科精密机械有限公司 | 一种主轴气路滤水机构 |
CN111412289B (zh) * | 2020-03-26 | 2022-07-05 | 青岛中加特电气股份有限公司 | 一种用于旋转机械的密封装置 |
CN112431788B (zh) * | 2020-10-29 | 2022-04-22 | 北京航天动力研究所 | 一种高速低泄漏液封轮浮动环组合式密封装置 |
CN113137370A (zh) * | 2021-04-27 | 2021-07-20 | 浙江真空设备集团有限公司 | 一种真空泵的密封结构 |
CN116857191B (zh) * | 2023-05-10 | 2024-03-19 | 上海汉钟精机股份有限公司 | 一种具有非接触式密封结构的水蒸气螺杆压缩机 |
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-
2005
- 2005-04-02 DE DE102005015212A patent/DE102005015212A1/de not_active Withdrawn
-
2006
- 2006-03-30 CN CN2006800108950A patent/CN101156008B/zh not_active Expired - Fee Related
- 2006-03-30 CA CA002601180A patent/CA2601180A1/en not_active Abandoned
- 2006-03-30 US US11/887,601 patent/US20090140495A1/en not_active Abandoned
- 2006-03-30 JP JP2008503521A patent/JP2008534877A/ja active Pending
- 2006-03-30 WO PCT/EP2006/061185 patent/WO2006106069A1/de not_active Application Discontinuation
- 2006-03-30 EP EP06725436A patent/EP1866560A1/de not_active Withdrawn
- 2006-03-30 KR KR1020077025104A patent/KR20070118158A/ko active Search and Examination
Patent Citations (4)
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US3508758A (en) * | 1966-10-12 | 1970-04-28 | Sulzer Ag | Fluid-tight seal for rotating shaft |
JPH07217748A (ja) * | 1994-01-31 | 1995-08-15 | Hitachi Ltd | 真空ポンプ用軸封装置 |
US6330790B1 (en) * | 1999-10-27 | 2001-12-18 | Alliedsignal, Inc. | Oil sump buffer seal |
DE10207929A1 (de) * | 2002-02-23 | 2003-09-04 | Leybold Vakuum Gmbh | Vakuumpumpe |
Non-Patent Citations (1)
Title |
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PATENT ABSTRACTS OF JAPAN vol. 1995, no. 11 26 December 1995 (1995-12-26) * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100189583A1 (en) * | 2007-08-23 | 2010-07-29 | Albert Cacard | Dry vacuum pump including a lubricating fluid sealing device and a centrifuge element equipping such a device |
KR101227220B1 (ko) | 2007-08-23 | 2013-01-28 | 알까뗄 루슨트 | 건식 진공 펌프 및 윤활식 유체 밀봉 장치용 원심분리기 요소 |
US8465269B2 (en) * | 2007-08-23 | 2013-06-18 | Alcatel Lucent | Dry vacuum pump including a lubricating fluid sealing device and a centrifuge element equipping such a device |
US10392956B2 (en) | 2013-12-30 | 2019-08-27 | Siemens Aktiengesellschaft | Sealing system for a steam turbine, and steam turbine |
Also Published As
Publication number | Publication date |
---|---|
KR20070118158A (ko) | 2007-12-13 |
CN101156008A (zh) | 2008-04-02 |
CN101156008B (zh) | 2010-11-03 |
JP2008534877A (ja) | 2008-08-28 |
CA2601180A1 (en) | 2006-10-12 |
EP1866560A1 (de) | 2007-12-19 |
US20090140495A1 (en) | 2009-06-04 |
DE102005015212A1 (de) | 2006-10-05 |
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