WO2006102780A1 - Mehrlagige hartstoffbeschichtung für werkzeuge - Google Patents

Mehrlagige hartstoffbeschichtung für werkzeuge Download PDF

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Publication number
WO2006102780A1
WO2006102780A1 PCT/CH2006/000177 CH2006000177W WO2006102780A1 WO 2006102780 A1 WO2006102780 A1 WO 2006102780A1 CH 2006000177 W CH2006000177 W CH 2006000177W WO 2006102780 A1 WO2006102780 A1 WO 2006102780A1
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Prior art keywords
layer
hard material
material layer
layers
followed
Prior art date
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PCT/CH2006/000177
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German (de)
English (en)
French (fr)
Inventor
Volker Derflinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
OC Oerlikon Balzers AG
Original Assignee
Oerlikon Trading AG Truebbach
Unaxis Balzers AG
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Application filed by Oerlikon Trading AG Truebbach, Unaxis Balzers AG filed Critical Oerlikon Trading AG Truebbach
Priority to BRPI0609661A priority Critical patent/BRPI0609661B1/pt
Priority to KR1020077025092A priority patent/KR101227337B1/ko
Priority to PL06705417T priority patent/PL1863946T3/pl
Priority to MX2007012099A priority patent/MX2007012099A/es
Priority to EP20060705417 priority patent/EP1863946B1/de
Priority to ES06705417T priority patent/ES2418146T3/es
Priority to CN2006800102634A priority patent/CN101151397B/zh
Priority to JP2008503344A priority patent/JP5289042B2/ja
Publication of WO2006102780A1 publication Critical patent/WO2006102780A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12576—Boride, carbide or nitride component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal

Definitions

  • the present invention relates to multilayer hard coating for tools (cemented carbide and high speed steel) for cutting applications - especially for drilling applications.
  • Hard material coated workpieces with a sequence of several different aluminum chromium nitride or carbonitride and titanium silicon nitride or carbonitride layers.
  • tools in particular cutting and forming tools (drills, milling cutters, taps, formers, hobs, punches, dies, drawing dies, etc.) with a sequence of several different aluminum chromium nitride or carbonitride and titanium silicon nitride, or carbonitride layers as well as the application of these tools.
  • EP 1174528 A2 describes a coating consisting of a sequence of several individual layers on tools, wherein a first layer consists of a nitride, carbide, carbonitride, boride, oxide, etc. of the elements Ti, Al and / or Cr, and a second layer of a nitride, carbide, carbonitride, boride, oxide, etc. of the Si and at least one of the groups 4a, 5a and 6a of the PSE.
  • the advantage of this coating is indicated by the fact that the wear resistance and the oxidation resistance are significantly improved by the Si in the upper layer. Especially Cr-Si-based overcoats showed improvements in service life. TiAIN, CrAIN and TiN layers were chosen as the underlayer.
  • EP 1422311 A2 describes hard coatings based on Al-Cr (Si) -O, which may be in the form of nitrides, carbides, oxides, borides, etc. It applies to all layers that a low oxygen content (1-25at%) j n layers is included. In addition, it is mentioned that a further layer of hard material is deposited on the coating mentioned in the invention. can be wearing. As examples, among others, Ti-Si-N, Ti-BN, BN, Cr-Si-N, etc. are given. As an advantage of this invention, especially the incorporation of small amounts of oxygen or silicon and oxygen is given here, as this leads to a higher hardness and improved wear and high temperature oxidation resistance.
  • the present invention is intended to avoid the disadvantages of the prior art and serves in particular to improve the service life of coated workpieces, such as, for example, cutting tools, cutting and shaping tools or components for machine and mold construction. It is a further object of the present invention to provide a method for depositing such layers, in particular for depositing such layers on said workpieces.
  • the invention describes a special multilayer structure of a coating which is intended to prevent premature decay (wear) of the coating during use.
  • the multilayer structure prevents or at least delays the decay and subsequent diffusion of the CrN fraction within the AlCrN coating at higher temperatures.
  • the geometry of the target arrangement is essentially determined by the octagonal layout of the RCS system, in which two oppositely disposed heating segments separate two groups of three successive segments each equipped with an arctode.
  • a SiTi target was installed in the opposite middle element of each triad.
  • other target arrangements are possible to make such layers.
  • such layers can be deposited in any system which has at least two arctathodes in a geometrically equivalent position, for example at the same coating height of a single or multiple rotating substrate holder. the It is known to a person skilled in the art how, depending on the type of installation, he can further influence the layer thickness of the individual layers or layers by arranging the targets or setting the respective substrate movement or rotation or the angular velocity of a workpiece rotation.
  • the workpieces were first brought to a temperature of about 500 ° C. by radiation heaters likewise mounted in the system, and subsequently the surface was applied by applying a DC bias voltage of -100 to -200 V under Ar atmosphere at a pressure of 0, 2 Pa subjected to an etching cleaning by Ar ions.
  • a pure Al-Cr-N coating is deposited for a further 5 minutes.
  • This sequence for the layer package is passed through several times during the deposition within the scope of the invention.
  • a cover layer which is produced exclusively with the Ti-Si sources, is applied with a thickness of about 0.5 ⁇ m.
  • a thicker AlCrN cover layer can be applied. All layers were deposited in a pure nitrogen atmosphere at a pressure of about 3 Pa and a negative substrate bias of about 50 volts.
  • the process pressure in each of these steps may be set in a range of 0.5 to about 8 Pa, but preferably between 0.8 and 5 Pa, using either a pure nitrogen atmosphere or a mixture of nitrogen and a noble gas, e.g. Argon, for nitridic layers, or a mixture of nitrogen and a carbon-containing gas, which can be mixed with a noble gas if necessary, used for carbonitridic layers.
  • a noble gas e.g. Argon
  • oxygen or a boron-containing gas can be admixed as known.
  • Target composition crystal structure of the layer and adhesion are shown in Table 1.
  • Process parameters such as Target rice Tung, "negative Substrätvörspa ⁇ ⁇ Ueng, process pressure and temperature are summarized in Table 2 below.
  • the layer structure is microcrystalline in two layers with an average grain size of about 5 - 150 nm, but preferably from approx. 10 - 120 nm is advantageous for the coating, additional intermediate layers between the pure (A l y Cr 1-y) X- and the (Ti z Si 1-z ) X-layers, in which all coating sources run and thus an (Al y Cr 1 - Y Ti 2 Si 1-2 ) X-layer is deposited (see Fig. 1b).
  • these intermediate layers can, if necessary, bring about improved adhesion between the individual layers.
  • a further possibility of constructing the desired multilayer system can be carried out by periodically connecting or disconnecting coating sources analogously to FIG. 1c.
  • the coating sources for a coating material run during the entire deposition process, while the coating sources are periodically added to the second coating material. In this case, during the joint operation of the arc sources, an additional multilayer structure as mentioned above can be generated.
  • the inventive method is characterized in that a process control is selected to deposit the layer package described above.
  • the multi-layer structure is achieved by targeted switching on and off of the coating sources.
  • the multilayer substructure is additionally obtained by rotation or movement of the workpieces to be coated within the coating system.
  • Example 1 coatings are compared with a defined number of layers or layer packages, wherein a layer package each consists of a layer sequence of an AICrTiSiN: followed by a TiSiN, an AICrTiSiN and an AlCrN layer. It can clearly be seen that, compared to the layer tested in Experiment No. 1, which was deposited according to the prior art, with the coating according to the invention. an improvement in service life can be achieved. It can also be seen that an optimum layer thickness of the individual layers of Al y Cr 1-y N and Ti 2 Si 1-2 N is important for the required increase in service life.
  • this layer thickness is between 75 nm and 200 nm, preferably between 120 nm and 170 nm, and with Ti z Sii -z N between 50 and 150 nm, preferably between 70 and 120 nm
  • these layer thicknesses were changed over the coating time so that a comparable total layer thickness of about 4 ⁇ m could be obtained for all experiments.
  • a layer structure was chosen, as described in Fig.1b. The layers in which all coating sources were used were not changed for the respective experiments and gave a single-layer thickness of about 20 ⁇ 10 nm in each case.
  • One possibility for improving the layer properties of the Al y Cr 1-y N / Ti 2 Si 1-z N multilayers consists in the classification of further chemical elements from one or more groups of Groups IVb, Vb and / or VIb of the Periodic Table Elements, or of silicon.
  • the alloying within the layer package of the be with 0 ⁇ m ⁇ 0.25, preferably 0 ⁇ m ⁇ 0.15.
  • the sliding layer system may be composed of at least one metal or a carbide of at least one metal and disperse carbon, MeC / C, wherein the metal is a metal of group IVb, Vb and / or VIb and / or silicon.
  • MeC / C a metal of group IVb, Vb and / or VIb and / or silicon.
  • this is particularly suitable for a WC / C cover layer with a hardness adjustable between 1000 and 1500 HV, which has excellent run-in properties.
  • CrC / C layers show a similar behavior, but with a slightly higher coefficient of friction.
  • a final sliding layer is metal-free diamond-like carbon layers, or a MoS x , WS x or titanium-containing MoS x or MoW x layers.
  • the sliding layer can, as mentioned, be applied directly to the multi-layer system or after application of a further adhesive layer in order to effect the best possible adhesion of the layer composite.
  • the adhesive layer may be metallic, nitridic, carbidic, carbonitridic or even gradient layer.
  • WC / C or CrC / C layers can be advantageously produced by sputtering WC targets with the addition of a carbon-containing gas after application of a sputtered or a Cr or Ti adhesion layer.
  • the proportion of the carbon-containing gas is increased over time in order to achieve a greater proportion of free carbon in the layer.
  • Tooth advance f z 0.2 mm / revolution
  • Corner wear VB 0.2 mm
  • One (1x) layer package corresponds to a one-time sequence of "AICrTi-20 SiN + TiSiN + AICrTiSiN + AICrN".
  • Example 1 shows a comparison of the service lives of coated carbide drills, in which a different number of layer packages each having the same adhesion, namely AICrN, and top layer, namely TiSiN, was applied.
  • An optimum in the overall service life was in Experiment No. 4 found with a total of 37 plies showing a clear improvement over the prior art of Experiment No. 1.
  • Example 2 Drilling with internally cooled HM drills in structural steel
  • Tooth advance f z 0.2 mm / revolution
  • Corner wear VB 0.2 mm
  • Example 2 shows a comparison of the service lives of coated carbide drills.
  • the AlCrN / TiSiN multilayer coating improved tool life compared to industrially used hard coatings of TiAIN / TiN multilayer and TiAIN monolayer coatings.
  • Diameter D. _6..8_mm _ Workpiece: mild steel DIN 1.1191 (Ck45)
  • Example 3 shows a comparison of the service lives of coated carbide drills.
  • the AlCrN / TiSiN multilayer coating was able to improve tool life compared to industrially used Ti-Al-N-based hard coatings.
  • Tooth feed f z 0.3 mm / revolution
  • Corner wear VB 0.1 mm
  • Example 4 shows a comparison of the service life of coated HM drills.
  • the AlCrN / TiSiN multilayer coating has improved the tool life compared to industrially used TiAIN / TiN multilayer coatings and TiAIN monolayer coatings.
  • Tooth advance f z 0.2 mm / revolution
  • Corner wear VB 0.2 mm
  • a (1x) layer package 2 * corresponds to a unique layer sequence of "AICrMTi-SiN + TiSiN + AICrMTiSiN + AICrMN", where M stands for one of the elements W, Nb, Mo, V or the Si.
  • Example 5 shows a comparison of the service life of coated according to the invention HM drills on which multi-layer systems with different chemical composition, but the same top layer (TiSiN) were deposited.
  • the target composition was varied while keeping Al constant and partially replacing Cr with a third element.
  • the process parameters for the layer deposition were kept the same as for the other experiments.
  • a further possibility of producing a corresponding layer package results if, analogously to FIG. 1c, either the AICr or AlCrM sources or the TiSi source or sources are operated continuously and the respective other source or sources, if required, for this purpose - be switched.
  • the deposition rate can thus be increased and, for example, the following layer system can be deposited:
  • FIG. 1 shows different layer variants.
  • a-c discusses three variants of how a multilayer coating can be constructed.
  • FIG. Fig. 1a shows a sequence of layers with sharp transitions.
  • a layer system (2) is deposited directly on a second layer system (1). This process is repeated until the desired total layer thickness is reached. As the last layer, a cover layer (3) with a higher layer thickness can be deposited.
  • mixed layers (4) are deposited between the individual layers, in which both layer systems are applied simultaneously.
  • a cover layer can additionally be applied as the last individual layer.
  • the mixed layer can either be thin as a sliding transition layer or thicker with a region of constant layer composition.
  • the composition of a mixed layer with a constant composition is advantageously set in the following range:
  • Al 1-a - b c Cr a Ti b Si 0 X where 0.18 ⁇ a ⁇ 0.48; 0.28 ⁇ b ⁇ 0.4; 0.004 ⁇ c ⁇ 0.12.
  • the aluminum content is advantageously kept above 10 at%. If, in addition, as mentioned above, further elements are added, in order to achieve a corresponding effect, a minimum concentration of 0.5 to 1 atomic percent and a maximum concentration of 15 to 25% should be added, depending on the element.
  • a multilayer coating is deposited by applying a layer system (5) during the entire coating time and periodically mixing in the second layer system by switching on the corresponding coating source.
  • FIG. 2 shows a modified representation of the structure of the layer packages of FIG. 1.

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  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Drilling Tools (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Laminated Bodies (AREA)
PCT/CH2006/000177 2005-04-01 2006-03-28 Mehrlagige hartstoffbeschichtung für werkzeuge Ceased WO2006102780A1 (de)

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BRPI0609661A BRPI0609661B1 (pt) 2005-04-01 2006-03-28 camada de material duro com estrutura de múltiplas camadas para aperfeiçoamento da resistência a desgaste de peças de ferramentas e ferramenta
KR1020077025092A KR101227337B1 (ko) 2005-04-01 2006-03-28 공구용 다층 경질 재료 코팅층
PL06705417T PL1863946T3 (pl) 2005-04-01 2006-03-28 Wielowarstewkowa powłoka z bardzo twardego materiału do narzędzi
MX2007012099A MX2007012099A (es) 2005-04-01 2006-03-28 Recubrimiento de material duro de multiples capas para herramientas.
EP20060705417 EP1863946B1 (de) 2005-04-01 2006-03-28 Mehrlagige hartstoffbeschichtung für werkzeuge
ES06705417T ES2418146T3 (es) 2005-04-01 2006-03-28 Revestimiento duro multicapas para herramientas
CN2006800102634A CN101151397B (zh) 2005-04-01 2006-03-28 用于工具的多层硬质材料涂层
JP2008503344A JP5289042B2 (ja) 2005-04-01 2006-03-28 工具のための多層硬物質被覆

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008162009A (ja) * 2006-12-27 2008-07-17 Sandvik Intellectual Property Ab 切削工具
JP2008188689A (ja) * 2007-02-01 2008-08-21 Sumitomo Electric Hardmetal Corp 表面被覆切削工具
US7537822B2 (en) 2005-05-26 2009-05-26 Hitachi Tool Engineering, Ltd. Hard-coated member
EP2100985A1 (en) * 2008-01-31 2009-09-16 Union Tool Co. Hard film for cutting tool
EP2163661A1 (de) * 2008-09-05 2010-03-17 Fette GmbH Wälzfräswerkzeug mit einer Beschichtung und Verfahren zur Neubeschichtung eines Wälzfräswerkzeuges
EP2156912A4 (en) * 2007-05-30 2010-06-02 Sumitomo Elec Hardmetal Corp SURFACE-FINISHED CUTTING TOOL
WO2014049105A1 (de) * 2012-09-28 2014-04-03 Walter Ag Werkzeug mit tialcrsin-pvd-beschichtung
JP2014069258A (ja) * 2012-09-28 2014-04-21 Nachi Fujikoshi Corp 硬質皮膜被覆切削工具
WO2016184954A1 (en) * 2015-05-21 2016-11-24 Walter Ag Tool with multi-layer arc pvd coating
US9840768B2 (en) 2013-07-03 2017-12-12 Oerlikon Surface Solutions Ag, Pfäffikon TixSi1-xN layers and their production

Families Citing this family (83)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120222315A1 (en) * 2001-11-13 2012-09-06 Larry Buchtmann Cutting Instrument and Coating
US7348074B2 (en) * 2005-04-01 2008-03-25 Oc Oerlikon Balzers Ag Multilayer hard coating for tools
EP1783245B1 (de) * 2005-11-04 2018-01-24 Oerlikon Surface Solutions AG, Pfäffikon Werkzeug oder verschleissteil sowie ein pvd-beschichtungsverfahren zum aufbringen einer oberflächenschicht auf einem werkzeug oder verschleissteil
US20070228664A1 (en) * 2006-03-31 2007-10-04 Krishnamurthy Anand Mechanical seals and methods of making
EP2010691B1 (de) * 2006-04-21 2017-12-06 CemeCon AG Beschichteter körper
US20080014420A1 (en) * 2006-07-11 2008-01-17 Ion Technology (Hong Kong) Limited Surface treatment for titanium or titanium-alloys
MX2009003288A (es) 2006-09-26 2009-06-30 Oerlikon Trading Ag Pieza de trabajo con revestimiento duro.
EP1918421B1 (en) * 2006-09-27 2017-03-15 Hitachi Metals, Ltd. Hard-material-coated member excellent in durability
DE102006046915C5 (de) * 2006-10-04 2015-09-03 Federal-Mogul Burscheid Gmbh Kolbenring für Verbrennungskraftmaschinen
DE102006046917C5 (de) * 2006-10-04 2014-03-20 Federal-Mogul Burscheid Gmbh Kolbenring für Verbrennungskraftmaschinen
SE0700800L (sv) * 2006-12-15 2008-06-16 Sandvik Intellectual Property Belagt skärverktyg
JP4668214B2 (ja) * 2007-01-17 2011-04-13 株式会社神戸製鋼所 成形用金型
US7960016B2 (en) * 2007-03-23 2011-06-14 Oerlikon Trading Ag, Truebbach Wear resistant hard coating for a workpiece and method for producing the same
US7960015B2 (en) * 2007-03-23 2011-06-14 Oerlikon Trading Ag, Truebbach Wear resistant hard coating for a workpiece and method for producing the same
JP5070622B2 (ja) * 2007-06-07 2012-11-14 住友電工ハードメタル株式会社 表面被覆切削工具
US8389115B2 (en) * 2008-03-07 2013-03-05 Seco Tools Ab Thermally stabilized (Ti,Si)N layer for cutting tool insert
SE532049C2 (sv) * 2008-03-07 2009-10-13 Seco Tools Ab Oxidbelagt skärverktygsskär för spånavskiljande bearbetning av stål
JP5129009B2 (ja) * 2008-04-21 2013-01-23 株式会社神戸製鋼所 金型用被膜
JP5234931B2 (ja) * 2008-06-23 2013-07-10 株式会社神戸製鋼所 硬質皮膜被覆部材および成形用冶工具
ES2658849T3 (es) * 2008-07-09 2018-03-12 Oerlikon Surface Solutions Ltd., Pfäffikon Sistema de recubrimiento, pieza de trabajo recubierta y método de fabricación de la misma
US20110117368A1 (en) * 2008-07-16 2011-05-19 Hideaki Matsubara Hard Powder, Process for Preparing Hard Powder and Sintered Hard Alloy
EP2149620B1 (en) * 2008-07-31 2020-04-29 Oerlikon Surface Solutions AG, Pfäffikon Multilayer film-coated member and method for producing it
EP2149624B1 (en) * 2008-07-31 2012-08-08 Sulzer Metaplas GmbH Multilayer film-coated member and method for producing it
JP5559575B2 (ja) 2009-03-10 2014-07-23 株式会社タンガロイ サーメットおよび被覆サーメット
RU2507302C2 (ru) * 2009-06-18 2014-02-20 Зульцер Метаплас Гмбх Защитное покрытие, покрытый элемент, имеющий защитное покрытие, а также способ получения защитного покрытия
WO2010150335A1 (ja) * 2009-06-22 2010-12-29 株式会社タンガロイ 被覆立方晶窒化硼素焼結体工具
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JP4753143B2 (ja) * 2009-12-21 2011-08-24 住友電工ハードメタル株式会社 表面被覆切削工具
CN102844684B (zh) 2010-04-15 2015-03-25 日东电工株式会社 硬涂膜、偏光板、图像显示装置、以及硬涂膜的制造方法
JPWO2011129422A1 (ja) 2010-04-16 2013-07-18 株式会社タンガロイ 被覆ｃＢＮ焼結体
US8673435B2 (en) 2010-07-06 2014-03-18 Tungaloy Corporation Coated cBN sintered body tool
JP5351875B2 (ja) * 2010-11-30 2013-11-27 株式会社神戸製鋼所 塑性加工用金型およびその製造方法、ならびにアルミニウム材の鍛造方法
EP2726648B1 (en) * 2011-06-30 2019-09-11 Oerlikon Surface Solutions AG, Pfäffikon Nano-layer coating for high performance tools
CN102296269B (zh) * 2011-09-07 2013-02-06 钢铁研究总院 一种硬质涂层及其制备方法
WO2013089254A1 (ja) * 2011-12-15 2013-06-20 株式会社神戸製鋼所 多層硬質皮膜およびその製造方法
WO2013145233A1 (ja) * 2012-03-29 2013-10-03 オーエスジー株式会社 切削工具用硬質被膜及び硬質被膜被覆切削工具
DE102012017694A1 (de) * 2012-09-07 2014-03-13 Oerlikon Trading Ag, Trübbach Mo-haltige Beschichtungen auf Werkzeugen für das direkte Presshärten
US9093102B1 (en) 2013-03-12 2015-07-28 Western Digital Technologies, Inc. Systems and methods for tuning seed layer hardness in components of magnetic recording systems
US9103036B2 (en) 2013-03-15 2015-08-11 Kennametal Inc. Hard coatings comprising cubic phase forming compositions
JP6016269B2 (ja) * 2013-03-29 2016-10-26 住友電工ハードメタル株式会社 表面被覆窒化硼素焼結体工具
DE102013005437A1 (de) * 2013-03-29 2014-10-02 Empa Hartstoffschichten mit ausgewählter Wärmeleitfähigkeit
JP6016271B2 (ja) 2013-03-29 2016-10-26 住友電工ハードメタル株式会社 表面被覆窒化硼素焼結体工具
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DE102013007305A1 (de) * 2013-04-29 2014-10-30 Oerlikon Trading Ag, Trübbach Reaktives Sputtern mit intermetallischem oder keramischem Target
JP5663814B2 (ja) 2013-07-03 2015-02-04 住友電工ハードメタル株式会社 表面被覆窒化硼素焼結体工具
JP5663813B2 (ja) 2013-07-03 2015-02-04 住友電工ハードメタル株式会社 表面被覆窒化硼素焼結体工具
JP5663815B2 (ja) 2013-07-03 2015-02-04 住友電工ハードメタル株式会社 表面被覆窒化硼素焼結体工具
US9896767B2 (en) 2013-08-16 2018-02-20 Kennametal Inc Low stress hard coatings and applications thereof
US9168664B2 (en) 2013-08-16 2015-10-27 Kennametal Inc. Low stress hard coatings and applications thereof
CN103789725B (zh) * 2014-01-29 2016-08-31 仪征亚新科双环活塞环有限公司 一种活塞环表面的多层多元复合硬质pvd镀层、活塞环及制备工艺
US9805748B1 (en) * 2014-06-24 2017-10-31 Western Digital (Fremont), Llc System and method for providing a protective layer having a graded intermediate layer
EP3018233A1 (de) * 2014-11-05 2016-05-11 Walter Ag Schneidwerkzeug mit mehrlagiger PVD-Beschichtung
JP6577037B2 (ja) 2015-09-04 2019-09-18 オーエスジー株式会社 硬質被膜および硬質被膜被覆部材
BR112018004352B1 (pt) 2015-09-04 2022-06-28 Osg Corporation Revestimento rígido e membro coberto com revestimento rígido
CN105296949B (zh) * 2015-11-23 2018-08-28 上海理工大学 一种具有超高硬度的纳米结构涂层及其制备方法
PL3387164T3 (pl) * 2015-12-07 2024-04-15 Ihi Bernex Ag Pokryte powłoką narzędzie do wytłaczania
WO2017163535A1 (ja) * 2016-03-25 2017-09-28 株式会社神戸製鋼所 硬質皮膜及び硬質皮膜被覆部材
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US11014167B2 (en) * 2016-08-01 2021-05-25 Mitsubishi Materials Corporation Multilayer hard film-coated cutting tool
WO2018100849A1 (ja) 2016-11-29 2018-06-07 住友電工ハードメタル株式会社 表面被覆切削工具
CN106593458B (zh) * 2017-01-12 2019-03-01 河北工程大学 地铁施工用盾构机刀具
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US11413695B2 (en) 2017-08-04 2022-08-16 Oerlikon Surface Solutions Ag, Pfäffikon Tap drill with enhanced performance
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US11524339B2 (en) * 2018-08-24 2022-12-13 Sumitomo Electric Hardmetal Corp. Cutting tool
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US11731202B2 (en) 2021-04-19 2023-08-22 Kennametal Inc. Coating, method for coating, and coated cutting tool
CN117467949A (zh) * 2023-10-17 2024-01-30 广东华升纳米科技股份有限公司 氮化物涂层及其制备方法和涂层刀具
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JP7772337B1 (ja) 2024-05-22 2025-11-18 日進工具株式会社 被膜切削工具
CN118531349B (zh) * 2024-05-23 2025-02-11 佛山市巴尔斯新材料科技有限公司 一种异质复合涂层及其制备方法和应用

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1174528A2 (en) * 2000-07-13 2002-01-23 Hitachi Tool Engineering Ltd. Multilayer-coated cutting tool
EP1422311A2 (en) * 2002-11-19 2004-05-26 Hitachi Tool Engineering Ltd. Hard film and hard film coated tool
CA2523882A1 (en) * 2003-04-28 2004-07-15 Unaxis Balzers Ag Work piece with a layer of hard material that contains alcr and a method for producing this

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3027502B2 (ja) * 1993-03-15 2000-04-04 健 増本 耐摩耗性非晶質硬質膜及びその製造方法
JPH08134629A (ja) * 1994-09-16 1996-05-28 Sumitomo Electric Ind Ltd 超微粒積層膜と、それを有する工具用複合高硬度材料
JP3416938B2 (ja) * 1994-10-28 2003-06-16 住友電気工業株式会社 積層体
JPH0941127A (ja) * 1995-08-03 1997-02-10 Kobe Steel Ltd 硬質皮膜
US5790543A (en) * 1995-09-25 1998-08-04 Bell Atlantic Network Services, Inc. Apparatus and method for correcting jitter in data packets
JP3039381B2 (ja) * 1996-07-12 2000-05-08 山口県 耐高温酸化特性に優れた複合硬質皮膜の形成法
JPH10309605A (ja) * 1997-05-12 1998-11-24 Sumitomo Electric Ind Ltd 被覆硬質合金工具
US6827976B2 (en) * 1998-04-29 2004-12-07 Unaxis Trading Ag Method to increase wear resistance of a tool or other machine component
JP2000144376A (ja) * 1998-11-18 2000-05-26 Sumitomo Electric Ind Ltd 摺動特性の良好な皮膜
US6274257B1 (en) * 1999-10-29 2001-08-14 Ionbond Inc. Forming members for shaping a reactive metal and methods for their fabrication
EP1992717B1 (en) 2000-12-28 2012-02-15 Kabushiki Kaisha Kobe Seiko Sho Use of a target for arc ion plating to form a hard film
JP3454428B2 (ja) * 2001-05-11 2003-10-06 日立ツール株式会社 耐摩耗皮膜被覆工具
CN1282766C (zh) * 2001-11-07 2006-11-01 日立工具股份有限公司 涂覆硬质被膜工具
JP2004009267A (ja) * 2002-06-11 2004-01-15 Hitachi Tool Engineering Ltd 硬質皮膜被覆高速度鋼製ラフィングエンドミル
US7348074B2 (en) * 2005-04-01 2008-03-25 Oc Oerlikon Balzers Ag Multilayer hard coating for tools

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1174528A2 (en) * 2000-07-13 2002-01-23 Hitachi Tool Engineering Ltd. Multilayer-coated cutting tool
EP1422311A2 (en) * 2002-11-19 2004-05-26 Hitachi Tool Engineering Ltd. Hard film and hard film coated tool
CA2523882A1 (en) * 2003-04-28 2004-07-15 Unaxis Balzers Ag Work piece with a layer of hard material that contains alcr and a method for producing this

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7537822B2 (en) 2005-05-26 2009-05-26 Hitachi Tool Engineering, Ltd. Hard-coated member
JP2008162009A (ja) * 2006-12-27 2008-07-17 Sandvik Intellectual Property Ab 切削工具
JP2008188689A (ja) * 2007-02-01 2008-08-21 Sumitomo Electric Hardmetal Corp 表面被覆切削工具
EP2156912A4 (en) * 2007-05-30 2010-06-02 Sumitomo Elec Hardmetal Corp SURFACE-FINISHED CUTTING TOOL
US7923130B2 (en) 2007-05-30 2011-04-12 Sumitomo Electric Hardmetal Corp. Surface-coated cutting tool
EP2100985A1 (en) * 2008-01-31 2009-09-16 Union Tool Co. Hard film for cutting tool
EP2163661A1 (de) * 2008-09-05 2010-03-17 Fette GmbH Wälzfräswerkzeug mit einer Beschichtung und Verfahren zur Neubeschichtung eines Wälzfräswerkzeuges
US8349474B2 (en) 2008-09-05 2013-01-08 Fette Gmbh Hob cutter with a coating and method for coating hob cutter
WO2014049105A1 (de) * 2012-09-28 2014-04-03 Walter Ag Werkzeug mit tialcrsin-pvd-beschichtung
JP2014069258A (ja) * 2012-09-28 2014-04-21 Nachi Fujikoshi Corp 硬質皮膜被覆切削工具
US10487388B2 (en) 2012-09-28 2019-11-26 Walter Ag Tool with TiAlCrSiN PVD coating
US9840768B2 (en) 2013-07-03 2017-12-12 Oerlikon Surface Solutions Ag, Pfäffikon TixSi1-xN layers and their production
WO2016184954A1 (en) * 2015-05-21 2016-11-24 Walter Ag Tool with multi-layer arc pvd coating
US10655211B2 (en) 2015-05-21 2020-05-19 Walter Ag Tool with multi-layer arc PVD coating

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BRPI0609661A2 (pt) 2010-04-20
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US7718043B2 (en) 2010-05-18
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JP5648078B2 (ja) 2015-01-07
BRPI0609661B1 (pt) 2017-02-07
US20080131726A1 (en) 2008-06-05
PL1863946T3 (pl) 2013-09-30
USRE42491E1 (en) 2011-06-28
EP1863946A1 (de) 2007-12-12
CN101151397B (zh) 2010-12-01
US20100012483A1 (en) 2010-01-21
EP1863946B1 (de) 2013-04-17
JP5289042B2 (ja) 2013-09-11
ES2418146T3 (es) 2013-08-12
US7618720B2 (en) 2009-11-17
US7348074B2 (en) 2008-03-25
KR101227337B1 (ko) 2013-01-28
PT1863946E (pt) 2013-07-10
KR20080017000A (ko) 2008-02-25

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