WO2005114084A1 - Dissipateur de chaleur a conduit pour circuit integre avec trous de montage traversants - Google Patents
Dissipateur de chaleur a conduit pour circuit integre avec trous de montage traversants Download PDFInfo
- Publication number
- WO2005114084A1 WO2005114084A1 PCT/US2005/006370 US2005006370W WO2005114084A1 WO 2005114084 A1 WO2005114084 A1 WO 2005114084A1 US 2005006370 W US2005006370 W US 2005006370W WO 2005114084 A1 WO2005114084 A1 WO 2005114084A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plate
- heat pipe
- particles
- spreading
- heat
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/40—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs
- H01L23/4006—Mountings or securing means for detachable cooling or heating arrangements ; fixed by friction, plugs or springs with bolts or screws
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/11—Making porous workpieces or articles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0233—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes the conduits having a particular shape, e.g. non-circular cross-section, annular
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
- F28D15/046—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2275/00—Fastening; Joining
- F28F2275/04—Fastening; Joining by brazing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- This invention relates generally to active solid state devices, and more specifically to a heat pipe for cooling an integrated circuit chip, with the heat pipe designed to be held in direct contact with the integrated circuit.
- Heat sinks are most effective when there is a uniform heat flux applied over the entire heat input surface. When a heat sink with a large heat input surface is attached to a heat source of much smaller contact area, there is significant resistance to the flow of heat along the heat input surface of the heat sink to the other portions of the heat sink surface which are not in direct contact with the contact area of the integrated circuit chip.
- the present invention is an inexpensive heat pipe heat spreader for integrated circuit chips which is of simple, light weight construction. It is easily manufactured, requires little additional space, and provides additional surface area for cooling the integrated circuit and for attachment to heat transfer devices for moving the heat away from the integrated circuit chip to a location from which the heat can be more easily disposed of. Furthermore, the heat pipe heat spreader is constructed to assure precise flatness and to maximize heat transfer from the heat source and to the heat sink, and has holes through its body to facilitate mounting. [0007]
- the heat spreader of the present invention is a heat pipe which requires no significant modification of the circuit board or socket because it is held in intimate contact with the integrated circuit chip by conventional screws attached to the integrated mounting board. This means that the invention uses
- the internal structure of the heat pipe is an evacuated vapor chamber with a limited amount of liquid and includes a pattern of spacers extending between and contacting the two plates or any other boundary structure forming the vapor chamber.
- the spacers prevent the plates from bowing inward, and therefore maintain the vital flat surface for contact with the integrated circuit chip.
- These spacers can be solid columns, embossed depressions formed in one of the plates, or a mixture of the two.
- Porous capillary wick material also covers the inside surfaces of the heat pipe and has a substantial thickness surrounding the surfaces of the spacers within the heat pipe, thus forming pillars of porous wick surrounding the supporting spacers.
- the wick therefore spans the space between the plates in multiple locations, and comprises a plurality of particles joined together by a brazing compound such that fillets of the brazing compound are formed between adjacent ones of the plurality of particles so as to form a network of capillary passageways between the particles.
- the spacers thus serve important purposes. They support the flat plates and prevent them from deflecting inward and distorting the plates to deform the flat surfaces which are required for good heat transfer.
- the spacers also serve as critical support for the portions of the capillary wick pillars which span the space between the plates provide a gravity independent characteristic
- the spacers also make it possible to provide holes into and through the vapor chamber, an apparent inconsistency since the heat pipe vacuum chamber is supposed to be vacuum tight. This is accomplished by bonding the spacers, if they are solid, to both plates of the heat pipe, or, if they are embossed in one plate, bonding the portions of the depressions which contact the opposite plate to that opposite plate.
- An alternate embodiment of the invention provides the same provision for mounting the heat pipe spreader with simple screws even when the heat pipe is constructed without internal spacers.
- This embodiment forms the through holes in the solid boundary structure around the outside edges of the two plates.
- This region of the heat pipe is by its basic function already sealed off from the vapor chamber by the bond between the two plates, and the only additional requirement for forming a through hole within it is that the width of the bonded region be larger than the diameter of the hole.
- the heat pipe boundary structure can be any shape.
- Another alternative embodiment of the invention provides for improved heat transfer between the integrated circuit chip and the heat pipe
- Fig. 1 is a cross-sectional view of one embodiment of a flat plate heat pipe with through holes through its vapor chamber and in contact with a finned heat sink;
- Fig. 2 is a cross-sectional view of the flat plate heat pipe shown in Fig. 1 , with the finned heat sink removed for clarity of illustration;
- Fig. 3 is a plan view of the flat plate heat pipe shown in Figs. 1 and 2;
- Fig. 4 is an exploded and enlarged view of a portion of the wick structure formed in accordance with the present invention;
- Fig. 5 is a representation of a brazed wick formed in accordance with one embodiment of the present invention; and
- Fig. 6 is a representation of another brazed wick formed in accordance with a further embodiment of the present invention.
- Heat pipe 10 is constructed by forming a boundary structure by sealing together two formed plates, contact plate 18 and cover plate 20. Contact plate 18 and cover plate 20 are sealed together at their peripheral lips 22 and 24 by conventional means, such as soldering or brazing, to form heat pipe 10. Heat pipe 10 is then evacuated to remove all non-condensible gases and a suitable quantity of heat transfer fluid is placed within it. This is the conventional method of constructing a heat pipe, and is well understood in the art of heat pipes. [0022] The interior of heat pipe 10 is, however, constructed unconventionally. While contact plate 18 is essentially flat with the exception of peripheral lip 24, cover plate 20 includes multiple depressions 26. Depressions
- Heat pipe 10 also includes internal sintered metal capillary wick 30 which covers the entire inside surface of contact plate 18. As is well understood in the art of heat pipes, a capillary wick provides the mechanism by which liquid condensed at the cooler condenser of a heat pipe is transported back to the hotter evaporator where it is evaporated.
- heat pipe 10 also has capillary wick pillars 32 which bridge the space between contact plate 18 and cover plate 20. Pillars 32 thereby interconnect cover plate 16 and contact plate 14 with continuous capillary wick. This geometry assures that, even if heat pipe 10 is oriented so that cover plate 16 is lower than contact plate 14, liquid condensed upon inner surface 34 of cover plate 20 will still be in contact with capillary pillars 32. The liquid will therefore be moved back to raised surface 28 which functions as the evaporator because it is in contact with a heat generating integrated circuit (not
- FIG. 1 also shows frame 36 which is typically used to surround and protect heat pipe 10.
- Frame 34 completely surrounds heat pipe 10 and contacts lip 24 of contact plate 18.
- heat pipe 10 The entire assembly of heat pipe 10, frame 34, and fin plate 38 is held together and contact plate 18 is held against an integrated circuit chip by conventional screws 40, shown in dashed lines, which are placed in holes 42 in fin plate 38 and through holes 12 in heat pipe 10, and are threaded into the mounting plate (not shown) for the integrated circuit chip.
- Holes 12 penetrate heat pipe 10 without destroying its vacuum integrity because of their unique location. Holes 12 are located within sealed structures such as solid columns 44, and since columns 44 are bonded to cover plate 20 at locations 46, holes 12 passing through the interior of columns 44 have no affect on the interior of heat pipe 10.
- the preferred embodiment of the invention has been constructed as heat pipe 10 as shown in FIG. 1.
- This heat pipe is approximately 3.0 inches by 3.5 inches with a total thickness of .200 inch.
- Cover plate 20 and contact plate 18 are constructed of OFHC copper .035 inch thick, and depressions 26 span the .100 inch height of the internal volume of heat pipe 10. The flat
- FIG. 2 is a cross section view of an alternate embodiment of the flat plate heat pipe 11 of the invention with through holes 48 located within peripheral lips 22 and 24 of the heat pipe and hole 50 shown in another sealed structure, one of the depressions 26.
- the only requirement for forming hole 50 within a depression 26 is that the bottom of depression 26 must be bonded to inner surface 28 of contact plate 18 to prevent loss of vacuum within the heat pipe.
- FIG. 3 is a plan view of the internal surface of the contact plate 18 of the heat pipe 10 of the invention showing region 31 of capillary wick 30.
- Region 31 is constructed of sintered silver powder. While the balance of capillary wick 30 is conventional sintered metal such as copper, region 31 of capillary wick 30, which is on the opposite surface of contact plate 18 from the integrated circuit chip (not shown), is formed of powdered silver. The higher thermal conductivity of silver yields significantly better heat conduction through region 31 of the wick 30, and thereby reduces the temperature difference between the integrated circuit chip and the vapor within heat pipe 10. This reduction of temperature difference directly affects the operation of heat pipe 10, and essentially results in a similar reduction in the operating temperature of the chip. [0031] In one embodiment of the present invention, a brazed wick 65 is l located on the inner surface of contact 18.
- Brazed wick 65 comprises a plurality of metal particles 67 combined with a filler metal or combination of metals that is often referred to as a "braze” or brazing compound 70. It will be understood that “brazing” is the joining of metals through the use of heat and a filler metal, i.e., brazing compound 70. Brazing compound 70 very often comprises a melting temperature that is above 450°C-1000C but below the melting point of metal particles 67 that are being joined to form brazed wick 65.
- brazed wick 65 In general, to form brazed wick 65 according to the present invention, a plurality of metal particles 67 and brazing compound 70 are heated together to a brazing temperature that melts brazing compound 70, but does not melt plurality of metal particles 67. Significantly, during brazing metal particles 67 are not fused together as with sintering, but instead are joined together by
- brazing compound 70 is drawn through the porous mixture of metal particles 67 to create fillets 73 is "capillary action", i.e., the movement of a liquid within the spaces of a porous material due to the inherent attraction of molecules to each other on a liquid's surface.
- brazing compound 70 liquefies, the molecules of molten brazing metals attract one another as the surface tension between the molten braze and the surfaces of individual metal particles 67 tends to draw the molten braze toward each location where adjacent metal particles 67 are in contact with one another.
- Fillets 73 are formed at each such location as the molten braze metals resolidify.
- brazing compound 70 and fillets 73 create a higher thermal conductivity wick than, e.g., sintering or fusing techniques. This higher thermal conductivity wick directly improves the thermal conductance of the heat transfer device in which it is formed, e.g., heat pipe, loop heat pipe, etc.
- the conductance of brazed wick 65 has been found to increase between directly proportional to and the square root of the thermal conductivity increase.
- brazing compound 70 must be selected so as not to introduce chemical incompatibility into the materials system comprising flat plate heat pipe 10.
- Metal particles 67 may be selected from any of the materials having high thermal conductivity, that are suitable for fabrication into brazed porous structures, e.g., carbon, tungsten, copper, aluminum, magnesium, nickel, gold, silver, aluminum oxide, beryllium oxide, or the like, and may comprise either substantially spherical, oblate or prolate spheroids, ellipsoid, or less preferably, arbitrary or regular polygonal, or filament-shaped particles of varying cross-sectional shape. For example, when metal particles 67 are formed from copper spheres (Fig. 5) or oblate spheroids (Fig.
- the overall wick brazing temperature for flat plate heat pipe 10 will be about 1000C.
- the percentage brazing compound 70 within the mix of metal particles 67 or, by using a more "sluggish" alloy for brazing compound 70 a wide range of heat-conduction characteristics may be provided between metal particles 67 and fillets 73.
- any ratio of copper/gold braze could be used, although brazes with more gold are more expensive.
- brazing compound 30 has been found to be about six percent (6)% by weight of a finely divided (-325 mesh), 65%/35% copper/gold brazing compound, that has been well mixed with the copper powder (metal particles 67). More or less braze is also possible, although too little braze reduces the thermal conductivity of brazed wick 65, while too much braze will start to fill the wick pores with solidified braze metal.
- One optimal range has been found to be between about 2% and about 10% braze compound, depending upon the braze recipe used.
- H 1799-00232 powder as metal particles 67 a preferred shape of particle is spherical or spheroidal.
- Metal particles 67 should often be coarser than about 200 mesh, but finer than about 20 mesh. Finer wick powder particles often require use of a finer braze powder particle.
- the braze powder of brazing compound 70 should often be several times smaller in size than metal particles 67 so as to create a uniformly brazed wick 65 with uniform properties.
- Other brazes can also be used for brazing copper wicks, including nickel-based Nicrobrazes, silver/copper brazes, tin/silver, lead/tin, and even polymers.
- the invention is also not limited to copper/water heat pipes.
- brazing compound 70 should often be well distributed over each metal particle surface. This distribution of brazing compound 70 may be accomplished by mixing brazing compound 70 with an organic liquid binder, e.g., ethyl cellulose, that creates an adhesive quality on the surface of each metal particle 67 (i.e., the surface of each sphere or spheroid of metal) for brazing compound 70 to adhere to.
- an organic liquid binder e.g., ethyl cellulose
- one and two tenths grams by weight of copper powder (metal particles 67) is mixed with two drops from an eye dropper of an organic liquid binder, e.g., ISOBUTYL METHACRYLATE LACQUER to create an adhesive quality on the surface of each metal particle 67 (i.e., the surface of each sphere or spheroid of metal) for braze compound 70 to adhere to.
- a finely divided (e.g., -325 mesh) of braze compound 70 is mixed into the liquid binder coated copper powder particles 67
- vacuum brazing or hydrogen brazing at about 1020C for between two to eight minutes, and preferably about five minutes, has been found to provide adequate fillet formation within a brazed wick.
- a vacuum of at least 10 "5 torr or lower has been found to be sufficient, and if hydrogen furnaces are to be used, the hydrogen furnace should use wet hydrogen.
- the assembly is vacuum fired at 1020° C, for 5 minutes, in a vacuum of about 5 x 10 "5 torr or lower.
- through holes could also penetrate heat pipe boundary structures with curved surfaces or heat pipe boundary structures with offset planes which create several different levels for contact with heat sources or heat sinks.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112005001051T DE112005001051T5 (de) | 2004-05-07 | 2005-02-28 | Wärmerohr-Wärmeverteiler mit durchragenden Befestigungsöffnungen für eine integrierte Schaltung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/841,784 US6896039B2 (en) | 1999-05-12 | 2004-05-07 | Integrated circuit heat pipe heat spreader with through mounting holes |
US10/841,784 | 2004-05-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005114084A1 true WO2005114084A1 (fr) | 2005-12-01 |
Family
ID=35428471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/006370 WO2005114084A1 (fr) | 2004-05-07 | 2005-02-28 | Dissipateur de chaleur a conduit pour circuit integre avec trous de montage traversants |
Country Status (4)
Country | Link |
---|---|
US (3) | US6896039B2 (fr) |
CN (1) | CN1957221A (fr) |
DE (1) | DE112005001051T5 (fr) |
WO (1) | WO2005114084A1 (fr) |
Cited By (1)
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DE102011119174A1 (de) | 2011-11-23 | 2013-05-23 | Inheco Industrial Heating And Cooling Gmbh | Vapor Chamber |
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WO2013075839A2 (fr) | 2011-11-23 | 2013-05-30 | Inheco Industrial Heating And Cooling Gmbh | Chambre à vapeur |
Also Published As
Publication number | Publication date |
---|---|
US7028760B2 (en) | 2006-04-18 |
US20050145374A1 (en) | 2005-07-07 |
DE112005001051T5 (de) | 2007-05-16 |
CN1957221A (zh) | 2007-05-02 |
US6896039B2 (en) | 2005-05-24 |
US20040244951A1 (en) | 2004-12-09 |
US20050217826A1 (en) | 2005-10-06 |
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