WO2004078447A1 - 樹脂成型機及び不働態膜を有する樹脂成型機用部材 - Google Patents
樹脂成型機及び不働態膜を有する樹脂成型機用部材 Download PDFInfo
- Publication number
- WO2004078447A1 WO2004078447A1 PCT/JP2004/002263 JP2004002263W WO2004078447A1 WO 2004078447 A1 WO2004078447 A1 WO 2004078447A1 JP 2004002263 W JP2004002263 W JP 2004002263W WO 2004078447 A1 WO2004078447 A1 WO 2004078447A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- resin
- molding machine
- base material
- resin molding
- film
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/56—Coatings, e.g. enameled or galvanised; Releasing, lubricating or separating agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C33/00—Moulds or cores; Details thereof or accessories therefor
- B29C33/38—Moulds or cores; Details thereof or accessories therefor characterised by the material or the manufacturing process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/17—Component parts, details or accessories; Auxiliary operations
- B29C45/26—Moulds
- B29C45/37—Mould cavity walls, i.e. the inner surface forming the mould cavity, e.g. linings
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
- C23C8/12—Oxidising using elemental oxygen or ozone
- C23C8/14—Oxidising of ferrous surfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
- C23C8/10—Oxidising
- C23C8/16—Oxidising using oxygen-containing compounds, e.g. water, carbon dioxide
- C23C8/18—Oxidising of ferrous surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2031/00—Other particular articles
- B29L2031/34—Electrical apparatus, e.g. sparking plugs or parts thereof
- B29L2031/3475—Displays, monitors, TV-sets, computer screens
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S425/00—Plastic article or earthenware shaping or treating: apparatus
- Y10S425/808—Lens mold
Definitions
- the present invention relates to a resin molding machine, and more particularly to an improvement in a member for a resin molding machine.
- optical materials made of resin are lighter than glass.
- Optical materials made of resin also have the advantage that non-curved or complicated optical members, which have been difficult with glass, can be easily mass-produced. For these reasons, optical devices using optical materials made of resin have become much lighter and smaller than before.
- an optical lens for a telephoto lens mounted on a high-performance camera conventionally used a plurality of curved glass layers.
- telephoto lenses became larger, heavier, and difficult to handle.
- the use of non-curved resin lenses has made it possible to greatly reduce the number of lenses, making the telephoto lens lightweight and compact, making it easy for anyone to handle.
- the transparency of an optical member is important.
- the resin that is heated and melted tends to decompose and deteriorate as the temperature increases.
- oxygen is present during high-temperature melting, the molten resin reacts with oxygen and is easily oxidized and deteriorated.
- the oxidative deterioration temperature of the resin is lower than the decomposition deterioration temperature.
- the oxidized resin is colored or its refractive index changes. These remain as they are in the molded product and become foreign matter, which lowers the transparency and causes quality deterioration.
- the longer the residence time of the resin at a high temperature the more easily the resin is susceptible to oxidation.
- the surface roughness of materials such as cylinders, screws, nozzles, dies and the like, which are in contact with the molten resin, among the members that make up the resin molding machine, is related to the cause of the occurrence of burnt oxides and the like. If these surfaces have irregularities, the molten resin stays in those parts for a long period of time, deteriorates, and eventually peels off and enters the molded product. Therefore, these surfaces are usually well polished. Also, if that is not enough, plating or coating Is applied to flatten the surface.
- the resin adhering and staying on the surface of the member is oxidized and degraded due to the catalytic property of the surface.
- the plating or coating applied to the surface may peel off physically or sometimes chemically, and it is mixed into the molded product, which also causes defects. Therefore, the materials used for surfaces need to be scrutinized, but the best way to meet all has not yet been developed.
- the present invention eliminates foreign matter caused by deterioration of molten resin mixed in a molded product by using a metal member which has a weak affinity for resin, and is subjected to an inert and non-peeling passivated surface treatment.
- the purpose of the present invention is to provide a resin molding machine capable of dramatically improving the quality of the resin.
- the present invention uses a metal member that has a weak affinity for resin and is subjected to an inactive and non-peeling passivated surface treatment, thereby resulting from a molten resin mixed into a molded product. It is an object of the present invention to provide a member for a resin molding machine capable of eliminating foreign matter generated and greatly improving the yield.
- Still another object of the present invention is to provide a resin molding machine member necessary for molding a resin optical molded product for a large flat panel liquid crystal display having a screen diagonal of 28 inches or more with high yield. Disclosure of the invention
- the contact surface is formed by directly oxidizing a base material or some components contained in the base material.
- a member for a resin molding machine characterized by being covered with the formed oxide film is obtained.
- the metal capable of forming an oxide film used herein is preferably a metal capable of forming a passive metal oxide, and more preferably aluminum.
- the metal that forms the oxide film is one of the constituents of the base metal, and is directly oxidized. It is desirable that a film be formed by the treatment.
- the content of the metal component for forming a passive oxide film in the base material is preferably 3% by weight to 7% by weight when the material is aluminum.
- the thickness of the metal oxide film formed in any one of the above is not less than 5 nm and not more than 100 nm.
- the molding machine member of the present invention is a member in which an oxidizing gas is brought into contact with a required surface of the base material and heat treatment is performed to form a passive oxide film.
- the oxidizing gas is preferably a gas containing oxygen or moisture.
- a passive oxide film By contacting the base material with an oxidizing gas containing oxygen or moisture, a passive oxide film can be easily formed.
- the oxygen concentration used during production is from 500 ppb: L00 ppm, preferably from 1 ppm to 50 pm.
- the water concentration is between 200 ppb and 50 ppm, preferably between 500 ppb and 10 ppm. Further, a mixed gas containing hydrogen is more preferable.
- the oxidation treatment temperature is 700 ° C to 1200 ° C, preferably 800 to 1100 ° C.
- FIG. 1 is a schematic diagram of a resin molding machine member provided with an oxide film of the present invention.
- FIG. 2 is a schematic view of an injection molding machine as an example to which the member for a resin molding machine of the present invention is applied.
- FIG. 3 is a schematic diagram of the structure of a large flat panel liquid crystal display using a molded product molded using a resin molding machine using the member for a resin molding machine of the present invention.
- the present inventors have found the following points in the process of preparing a resin molding machine member that is less likely to deteriorate during melting at high temperatures, and have reached the present invention.
- the contact surface where the resin melted at high temperature contacts the base material or some of the components contained in the base material A resin molding machine member covered with a passive oxide film formed by directly oxidizing the resin has a property that the molten resin is less likely to deteriorate even at high temperatures and for a long period of time, compared to other members.
- FIG. 1 is a partial schematic sectional view showing an example of a member for a resin molding machine of the present invention.
- a resin molding machine member 3 according to one embodiment of the present invention shown in FIG. 1 has an oxide film layer 2 formed on one surface of a substrate 1.
- the illustrated substrate 1 is composed of commonly used steel materials such as commonly used stainless steel and carbon steel. However, there must be components capable of forming a passive oxide film in the steel material used.
- the components contained in the steel material iron, cobalt, nickel, chromium, and aluminum capable of forming a passive oxide film are preferable.
- the metal to be oxidized is a kind, and when the metal is selectively oxidized, the arrangement of oxides in the oxide film becomes regular, so that the oxide becomes dense and more stable. It becomes a film.
- the component is aluminum.
- One example is stainless steel containing 3% to 73% aluminum by weight.
- the average thickness of the oxide layer shown is between 5 nm and 100 nm. However, in order to prevent the dielectric breakdown of the oxidized film by flowing the static electricity generated by the friction between the molten resin and the member interface to the metal base material by the tunnel effect, the average thickness of the oxide film layer is 5 It is preferably from 0 to 300 angstroms, that is, about 5 nm to 30 nm.
- an aluminum oxide passivation film is formed by contacting an aluminum-containing stainless steel with an oxidizing gas containing oxygen or moisture.
- Its oxygen concentration is from 500 ppb to 100 ppb, preferably from 1 ppm to 50 ppm. Further, the water concentration is 0.20 ppb to 50 ppm, preferably 500 ppb to 1 Oppm.
- an oxidizing gas mixture containing hydrogen in the oxidizing gas is preferable.
- Aluminum-containing stainless steel contains stainless steel components such as iron, chromium, and nickel in addition to aluminum. If there is a large amount of oxidizing components, other metals are oxidized together with aluminum, and other metals are oxidized. It is difficult to form a passivated aluminum oxide film without a film. On the other hand, if the amount of the oxidizing component is too small, an oxide film cannot be formed, so that other metals are not oxidized. By performing the treatment in the oxidizing atmosphere described above in which only aluminum is oxidized, an aluminum oxide passivation film can be formed. In addition, reducing hydrogen was added even in an excessively oxidizing atmosphere, so that the concentration of oxidizing components in the oxidizing atmosphere could be set widely.
- the oxide film forming temperature of the present invention is such that the oxidation treatment temperature is 700 ° C. to 1200 ° C. (: preferably 800 to 110 Ot.
- the other metal oxide film described above In the method of forming an aluminum oxide passivation film in which no metal is present, oxidation is performed at the above temperature to selectively oxidize only aluminum, thereby preventing oxidation of other metals. Iron and chromium are also oxidized underneath, whereas above 120 ° C, aluminum oxide crystals precipitate on the surface of the formed aluminum oxide passivation film. The deposited aluminum oxide crystals may be peeled off or cracked, which may contaminate the supply fluid, for which reason the processing temperature is 700 ° C. to 1200 ° C. ° C is suitable.
- the oxidation treatment time is 30 minutes to 3 hours. Since the time required to form the aluminum oxide passivation film is as short as 30 minutes to 3 hours, the aluminum There is no need to perform heat treatment after coating the nickel, and productivity can be improved.
- the member was gradually heated using a hot plate. Around 250, the resin melted.
- the resin placed on the member for a resin molding machine having the oxide film of the present invention maintained its colorless transparency.
- the resins placed on these members were similarly heated and melted, cooled before they started to deteriorate, and solidified, and the peelability of each solidified resin was examined.
- the resin solidified on the iron member was strongly adhered to the surface, and when the resin was peeled off with a pair of pliers, the resin remained on the surface of the iron member.
- the resin solidified on the nickel plating surface was peeled off, there were cases where the resin was peeled off to the plating surface.
- the resin solidified on the oxide film was peeled off with a pair of pliers, the resin was peeled off without any problem, although some traces remained on the surface.
- the molding machine using the member according to the present invention is effective for any molding machine used for resin molding.
- Molding machines used for resin molding include injection molding machines, transfer molding machines, extrusion molding machines, blow molding machines, compression molding machines, vacuum molding machines, etc. That is.
- a molding machine for obtaining a molded product but also an extruder, a melt kneader, a roll kneader, etc. for adding a compounding agent or for preparing a resin pellet, etc. Can be applied.
- the member of the present invention is applied to a portion of the molding machine that comes into contact with the molten resin.
- FIG. 2 shows the structure of the injection molding machine 8 as an example.
- the injection molding machine 8 includes a cylinder 5, a screw 4, a nozzle 6, and a mold 7. Cylinder 4 is supplied with resin pellets from hopper 5-1.
- the screw 4 the cylinder 5, the nozzle 6, and the mold 7 are in contact with the molten resin, so the present invention is applied to these members.
- the present invention can be applied to a die or a roll of an extrusion molding machine, a screw or a roll of a kneading machine, in addition to the injection molding machine.
- the resin material used in the molding machine using the member according to the present invention is not particularly limited, but transparent optics such as an optical lens, a prism, an optical sheet, a reflecting plate, etc., which frequently cause a defect to be solved by the present invention. It is especially effective for resin used for molded products or fine surface shape molded plates.
- the effect can be maximized.
- FIG. 3 shows the structure of the large flat liquid crystal display 14.
- the illustrated large flat-panel liquid crystal display 14 has a first optical film 9 on one surface and a second optical film 10 on the other surface.
- a diffusion plate 11, a light guide plate 12, and a reflection plate 13 are provided, all of which are large.
- Transparent or precision molded products are used for the large reflector 13, the large light guide plate 12, and the large optical films 9 and 10 of the large flat liquid crystal display 14.
- the member according to the present invention is made of resin for a large flat panel liquid crystal display having a screen diagonal of 28 inches or more, such as a large reflector 13, a large light guide plate 12, a first and a second large optical film 910. It is particularly effective as a member for a molding machine when molding a molded product.
- the present invention relates to the formation of a film of fluororesin, PFA, fluorocarbon resin, etc. Applicable to molds.
- the member for a molding machine according to the present invention is a member used for a surface contacted with a resin melted at a high temperature, and is characterized in that the molten resin is hardly deteriorated even at a high temperature for a long time as compared with other members.
- a molding machine member in which the base material or some of the components contained in the base material are directly oxidized and covered with a passive oxide film formed, and a resin using these members is obtained.
- High precision resin molded products can be obtained by molding with a molding machine. Industrial applicability
- the present invention relates to a resin molding machine such as an injection molding machine, a transfer molding machine, an extrusion molding machine, a blow molding machine, a compression molding machine, a vacuum molding machine, etc. It can also be applied to extrusion molding machines, melt kneaders, roll kneaders, etc. for making.
- a resin molding machine such as an injection molding machine, a transfer molding machine, an extrusion molding machine, a blow molding machine, a compression molding machine, a vacuum molding machine, etc. It can also be applied to extrusion molding machines, melt kneaders, roll kneaders, etc. for making.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
- Extrusion Moulding Of Plastics Or The Like (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Laminated Bodies (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/547,696 US7334769B2 (en) | 2003-03-03 | 2004-02-26 | Resin molding machine and member for resin molding machine having film in passive state |
EP04714928A EP1607202A4 (en) | 2003-03-03 | 2004-02-26 | RESIN MOLDING MACHINE AND ELEMENT FOR RESIN MOLDING MACHINE HAVING PASSIVE FILM |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003-055909 | 2003-03-03 | ||
JP2003055909A JP4185787B2 (ja) | 2003-03-03 | 2003-03-03 | 樹脂成型機および不働態膜を有する部材 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004078447A1 true WO2004078447A1 (ja) | 2004-09-16 |
Family
ID=32958677
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2004/002263 WO2004078447A1 (ja) | 2003-03-03 | 2004-02-26 | 樹脂成型機及び不働態膜を有する樹脂成型機用部材 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7334769B2 (ja) |
EP (1) | EP1607202A4 (ja) |
JP (1) | JP4185787B2 (ja) |
WO (1) | WO2004078447A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007032052A1 (ja) * | 2005-09-12 | 2007-03-22 | Tadahiro Ohmi | 樹脂成形機および樹脂成形方法 |
DE102006051308A1 (de) | 2006-10-31 | 2008-05-08 | Bayer Materialscience Ag | Verfahren zur Behandlung von Metalloberflächen |
JP5622139B2 (ja) * | 2009-02-04 | 2014-11-12 | 国立大学法人東北大学 | 噴霧ノズル及びミスト帯電防止方法 |
JP2011256946A (ja) * | 2010-06-09 | 2011-12-22 | Tohoku Univ | 減圧処理装置 |
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-
2004
- 2004-02-26 EP EP04714928A patent/EP1607202A4/en not_active Withdrawn
- 2004-02-26 US US10/547,696 patent/US7334769B2/en not_active Expired - Fee Related
- 2004-02-26 WO PCT/JP2004/002263 patent/WO2004078447A1/ja active Application Filing
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Also Published As
Publication number | Publication date |
---|---|
US7334769B2 (en) | 2008-02-26 |
EP1607202A1 (en) | 2005-12-21 |
US20060193940A1 (en) | 2006-08-31 |
JP2004262133A (ja) | 2004-09-24 |
EP1607202A4 (en) | 2007-08-01 |
JP4185787B2 (ja) | 2008-11-26 |
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