WO2003083128A2 - Method for assembling nano objects - Google Patents
Method for assembling nano objects Download PDFInfo
- Publication number
- WO2003083128A2 WO2003083128A2 PCT/US2003/006345 US0306345W WO03083128A2 WO 2003083128 A2 WO2003083128 A2 WO 2003083128A2 US 0306345 W US0306345 W US 0306345W WO 03083128 A2 WO03083128 A2 WO 03083128A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- nano objects
- substrate
- suspension
- nano
- objects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
- B05D1/20—Processes for applying liquids or other fluent materials performed by dipping substances to be applied floating on a fluid
- B05D1/202—Langmuir Blodgett films (LB films)
- B05D1/204—LB techniques
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
- B05D1/12—Applying particulate materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- D—TEXTILES; PAPER
- D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
- D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
- D01F9/00—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments
- D01F9/08—Artificial filaments or the like of other substances; Manufacture thereof; Apparatus specially adapted for the manufacture of carbon filaments of inorganic material
- D01F9/12—Carbon filaments; Apparatus specially adapted for the manufacture thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S427/00—Coating processes
- Y10S427/102—Fullerene type base or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/842—Manufacture, treatment, or detection of nanostructure for carbon nanotubes or fullerenes
- Y10S977/847—Surface modifications, e.g. functionalization, coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/842—Manufacture, treatment, or detection of nanostructure for carbon nanotubes or fullerenes
- Y10S977/848—Tube end modifications, e.g. capping, joining, splicing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/882—Assembling of separate components, e.g. by attaching
Definitions
- the present invention relates generally to methods to assemble nano objects into functional structures.
- nanostructure material is used by those familiar with the art to designate materials including nanoparticles such as C 60 fullerenes, fullerene-type concentric graphitic particles; inorganic and organic nanowires/nanorods composed of either single or multiple elements such as Si, Ge, metals, oxides such as SiO x , GeO x ; carbides such as silicon carbides; nitrides, borides, or hollow nanotubes composed of either single or multiple elements such as carbon, B x N y , C x B y N z MoS 2 , and WS 2 .
- One of the common features of nanostructure materials is the dimension of their basic building blocks.
- a single nanoparticle or a nanotube or a nanowire has a dimension that is less than 1 micron in at least one direction.
- Patterned Carbon Nanotube Films discloses a method of fabricating adherent, patterned carbon nanotube films onto a substrate.
- Carbon nanotubes are one type of nano objects .
- CNTs are cylindrical carbon structures with a length between 0.1 ⁇ m and 100 ⁇ m and a diameter between 0.4 run and 50 nm (see, e.g. M.S. Dresselhaus, G. Dresselhaus, and P. Avouris, eds. Carbon Nanotubes : Synthesis, Structure, Properties, and Applications. Topics in Applied Physics. Vol. 80. 2000, Springer- Verlag).
- CNTs can have either a single graphite shell per nanotube in which case CNTs are called single-wall carbon nanotubes (SWNTs).
- SWNTs single-wall carbon nanotubes
- CNTs may also have concentric multi-shell graphite structures in which case CNTs are called multi-wall carbon nanotubes (MWNTs).
- MWNTs multi-wall carbon nanotubes
- Carbon nanotubes have exceptional mechanical properties with high elastic modulus, high ductility, high electrical and high thermal conductivity, thermal stability and chemical stability.
- CNTs are excellent electron field emitters since CNTs have a large aspect ratio and a sharp tip.
- P.M. Ajayan and O. Zhou in "Topics in Applied Physics, 80," M.S. Dresselhaus, G. Dresselhaus, and P. Avouris, Editors. 2000, Springer- Verlag.
- carbon-nanotube materials exhibit low emission threshold fields as well as large emission current densities.
- Carbon nanotubes, nanowires and nanorods, nanoparticles are typically fabricated by techniques such as laser ablation, arc discharge, and chemical vapor deposition methods. In some cases they can also be made via solution or electrochemical synthesis. However, in most cases, the as-synthesized materials cannot be utilized without further processing.
- carbon nanotubes produced by the laser ablation and arc discharge techniques are in the form of porous mats and powders.
- Device applications require assembling these nano objects into ordered, patterned films, membranes, crystals on desired supporting surfaces and the pre-determined locations.
- elongated nano objects such as the carbon nanotubes into orientationally ordered macroscopic structures which provide properties such as anisotropic electrical, mechanical, thermal, magnetic and optical properties.
- the conditions used to assemble the nano objects need to be compatible with the conditions used for device fabrications.
- nano objects which are to be used as field emission cathodes in field emission displays should not have a fabrication temperature which exceeds the melting point of glass substrates (about 650° C).
- the temperature should be substantially lower when supporting surfaces of the nano objects are polymer.
- CVD techniques generally require relatively high temperatures (800 °C -
- post-processing which includes synthesis of nano objects by arc discharge, laser ablation, or chemical vapor deposition techniques and assembly of these "pre-formed" nano objects into a macroscopic structure.
- Post- deposition processes that have been employed in the past include screen printing, (see, e.g. W.B. Choi, et al., Appl. Phys. Lett., 75, 3129 (1999)), spraying, and electrophoretic deposition (see, e.g. B. Gao et al. Adv. Mater., 13 (23), 1770, 2001)
- screen printing see, e.g. W.B. Choi, et al., Appl. Phys. Lett., 75, 3129 (1999)
- spraying see, e.g. B. Gao et al. Adv. Mater., 13 (23), 1770, 2001
- electrophoretic deposition see, e.g. B. Gao et al. Adv. Mater., 13
- screen printing includes admixture of pre-formed nano objects with an organic or inorganic paste in order to form a thick paste.
- the thick paste is then placed on a substrate. After placement of the thick paste onto the substrate, the organic binder resides at an exposed surface of the paste. Therefore, an additional step is required to expose the nano objects within the thick paste.
- a plasma etching process or similar chemical process is used to expose the nano objects.
- the use of thick paste limits the size of a structure can be formed. In general it is difficult to form structures less than 20 microns-50 microns using the screen printing methods.
- screen printing methods requires considerable amount of materials. Spraying can be inefficient and is not practical for large-scale fabrication. Neither of these processes can control the orientation of the nano objects.
- the present invention provides a method for forming microscopic and macroscopic structures using nano objects.
- the method of the present invention allows self assembly of nano objects onto a supporting surface, into a free-standing structure, or into a crystal.
- the present invention provides a method for assembling the nano objects into patterned structures with a controlled thickness, density and a controlled orientation of the nano objects.
- the present invention provides an efficient process to assemble pre-formed nano objects under mild conditions that are acceptable for a wide range of substrates and devices.
- a method for assembling a macroscopic structure with pre-formed nano objects comprises processing the nano objects such that they form a stable suspension or solution in a solvent. Once the nano objects are processed, the nano objects are admixed with a solvent to form a stable suspension or a solution. Upon formation of the stable suspension or solution, a substrate is submersed into the suspension or solution. Upon changing either the concentration, temperature, or pH value of the suspension, the nano objects deposit on the surface of the substrate.
- a method for assembling pre-formed nano objects into a patterned structure comprises processing pre-formed nano objects such that they form a stable suspension or solution in a suitable solvent. After processing the nano objects, the processed pre-formed nano object is mixed with a solvent to form a stable suspension or a solution. A patterned substrate is then inserted into the liquid. Upon changing either the concentration, temperature, or the pH value of the liquid, the nano objects assemble on certain regions of the substrate surface to form a patterned structure comprising the nano objects.
- a method for assembling pre-formed nano objects into a crystal or a membrane comprises processing the nano objects so that they form a stable suspension or solution in a solvent.
- the processed nano objects are mixed with a solvent to form a suspension or a solution in a container that does not attract the nano objects.
- a seed crystal may be used to form the crystal.
- a method for assembling pre-formed nano objects into multi-layered structures comprises first processing the nano objects so that they form a stable suspension or solution in a solvent. The processed nano object is then mixed with a solvent to form a suspension or a solution. After formation of the stable suspension or solution, a substrate is submersed into the suspension or solution. Upon changing the concentration, temperature or the pH value of the suspension or solution, the nano objects assemble on the surface of the substrate. The substrate is then removed from the suspension or solution. After removal, a second type of material is coated on the surface of the self-assembled nano objects on the substrate. The substrate is then submersed into the suspension or solution containing the nano objects. The process is repeated until a multi-layer structure with a desired thickness and number of repeating layers are obtained.
- a method for assembling elongated nano objects into orientational ordered structures comprises forming a stable suspension or solution of the nano objects in a suitable solvent.
- a substrate is then submersed into the liquid and the solvent gradually evaporated.
- the nano objects deposit on the surface of the substrate such that longitudinal axes of the nano objects align parallel to the substrate surface.
- the process can further comprise the use of an external field such as either an AC or a DC electrical field or a magnetic field during the assembly process.
- a method for assembling elongated nano objects into a vertically aligned structure on a supporting surface comprises first processing the nano objects such that a tail and a body of the nano objects have different affinities toward certain types of solvents.
- the tails are hydrophobic and the bodies are hydrophilic.
- the processed nano objects are dispersed in a suitable solvent where the solvent has an affinity towards the tails of the nano objects.
- a substrate with one of the surfaces having the same affinity towards the solvent and the tails of the nano objects is submersed into the liquid.
- the nano objects Upon changing the concentration, temperature, or pH value of the solvent, the nano objects deposit on the substrate with their tails bonded to the surface and longitudinal axes of the nano objects vertically aligned with respect to the surface of the substrate.
- the present invention provides a method for self assembly of nano objects, such as carbon nanotubes, nanowires and nanorods, onto a substrate, into free-standing membranes, into a crystal, or a into multi-layer structure.
- the nano objects form into functional structures having long range ordering.
- the present invention provides a method for controlling the functionality of formed macroscopic structures.
- Figure 1 A illustrates a substrate within a suspension where the suspension includes nano objects for deposition onto the substrate in accordance with an embodiment of the present invention.
- Figure IB shows an embodiment of the present invention where the substrate shown with reference to Figure 1A includes hydrophobic regions and hydrophillic regions.
- Figure 2 illustrates the evaporation of the suspension during submersion of the substrate shown with respect to Figure 1A in accordance with an embodiment of the present invention.
- Figure 3 is an embodiment of the present invention illustrating a air/liquid/substrate triple line on the substrate shown with respect to Figure 1 A where nano objects deposit on the substrate along the air/liquid/substrate triple line.
- Figure 4 illustrates the deposition of nano objects onto a substrate to form a nano object film, in accordance with an embodiment of the present invention.
- Figure 5 is an optical microscope image showing a self-assembled carbon nanotube film on a glass substrate. It is fabricated according to the method of this invention.
- Figure 6A illustrates a method of submersing a seed crystal into a solution for assembling nano objects into a crystal in accordance with an embodiment of the present invention.
- Figure 6B is an embodiment of the present invention illustrating the formation of a crystal formed with the nano objects shown with reference to Figure 6A.
- Figure 7 A illustrates a method of assembling elongated nano objects on a surface such at they are aligned vertically in respect to the supporting surface in accordance with an embodiment of the present invention.
- Figure 7B shows nano objects shown with respect to Figure 7 A in accordance with an embodiment of the present invention.
- Figure 8 A illustrates a multi-layer structure fabricated in accordance with an embodiment of the present invention.
- Figure 8B shows a tri-layer multi-layer structure made in accordance with an embodiment of the present invention.
- Figure 9A illustrates a glass substrate patterned with photoresist and hydrophilic regions in accordance with an embodiment of the present invention.
- Figure 9B illustrates an embodiment of the present invention where the substrate shown with respect to Figure 9A includes a SWNTs.
- Figure 9C shows a phosphor screen for placement over the glass substrate shown with reference to Figure 9B in accordance with an embodiment of the present invention.
- the present invention discloses a method for assembling nano objects.
- the nano objects formed in accordance with the present invention may be formed onto a supporting surface, into free-standing membranes and into multi-layer structures.
- the nano objects may be a variety of materials, including hollow nano tubes which are composed of single or multiple elements.
- the single or multiple elements may be carbon, boron, nitrogen, solid inorganic or organic nanowires/nanorods.
- the nano objects Prior to assembling the nano objects, the nano objects are processed such that they form a stable suspension or a solution in a suitable solvent.
- the processing operation includes attaching chemical groups to the surface of the nano objects and reducing aspect ratios of elongated nano objects. After processing, a suspension or a solution is formed by admixture of the processed nano objects with a solvent.
- a substrate such as glass
- the nano objects Upon formation of the suspension, a substrate, such as glass, is submersed into the substrate. After submersion of the substrate, the nano objects self assemble into uniform thin films on the substrate. The nano objects self assemble when either of the following occur: evaporation of the suspension, a concentration change of the suspension, a temperature change of the suspension or a pH level change of the concentration.
- the nano objects which self assemble onto the uniform film may be any nano object, such as carbon nanotubes, silicon nanowires or the like.
- Figure 1A illustrates a substrate 100 within a suspension 102 having nano objects 104, in accordance with an embodiment of the present invention.
- the substrate 100 may be any substrate which allows deposition of nano objects such as carbon nanotubes onto the substrate, such as hydrophilic glass, gold (Au), a silicon wafer, aluminum, chromium, tin, a polymer, a metal or the like.
- the substrate may include regions with alternating chemical properties such as hydrophilic and hydrophobic regions, as shown in greater detail with reference to Figure IB.
- Figure IB illustrates an embodiment of the present invention where the substrate 100 includes hydrophobic regions 100a and hydrophilic regions 100b.
- the nano objects deposit on one of these regions. Where the nano objects deposit depend on the properties of the nano objects and how they are processed. In the case where nano objects are hydrophilic, the nano objects deposit on the hydrophilic regions 100b and resist the hydrophobic regions 100a during deposition. Therefore, a user may control deposition formation on a substrate and functionality of the substrate by controlling the location of hydrophillic and hydrophobic regions on the surface of the substrate. As may be appreciated, controlling the functionality of the substrate enables the fabrication of patterned nano object films.
- the hydrophobic regions 100a may be formed using any suitable technique, such as spin coating a thin layer of hydrophobic polymers such as polystyrene over the surface of the substrate 100, by deposition of a monolayer of hydrophobic chemical groups or the like. Moreover, after nano object deposition, the hydrophobic regions 100a may be removed by washing the substrate 100 in any suitable solvent, such as acetone, methanol, ethanol, buffered hydroflouric acid or the like. Therefore a user may pattern the substrate such that the formed carbon nanotube film may have different uses, such as the basic field emission pixels for field emission displays.
- any suitable solvent such as acetone, methanol, ethanol, buffered hydroflouric acid or the like. Therefore a user may pattern the substrate such that the formed carbon nanotube film may have different uses, such as the basic field emission pixels for field emission displays.
- the substrate 100 is submersed into the suspension 102.
- the suspension 102 includes nano objects 104 admixed with suitable solvents.
- the solvent can be either de-ionized water or alcohol.
- Some of the nano objects 104 may be dispersed or dissolved in a suitable solvent after fabrication without further processing.
- Other materials, such as carbon nanotubes or Si nanowires, are processed in order to form a stable suspension.
- the processing operation includes the following: attaching chemicals to the surfaces of the nano objects and/or reducing the aspect ratios of the elongated nano objects.
- the the nano objects 104 are single-wall carbon nanotube (SWNT) bundles which are produced by either arc-discharge, laser ablation, or other suitable techniques. They are then purified by a refluxing operation in hydrogen peroxide and filtration. After purification, the nano objects 104 are etched to uniform lengths. The nano objects 104 can be cut by a variety of techniques including sonication in concentrated acides such as sulfuric and nitric acids, or a mechanical process such as ball-milling or mechanical cutting. Upon etching, the SWNT bundles are rinsed in de-ionized water and annealed at 200°C in a 10 "6 torr dynamic vacuum.
- SWNT single-wall carbon nanotube
- the etching operation changes a morphology of the SWNT bundles from highly entangled to a rigid-rod structure after reducing the aspect ratio of the SWNT bundles to less than 100.
- SWNT bundles processed for 30 hours had an indicated bundle length of 0.5 ⁇ m.
- the etched SWNTs are metallic like and have less than 2.0% hydrogen (H).
- the above method used for processing the SWNT bundles maintains the frequency of a Raman-active SWNT breathing mode at a same amount while reducing the aspect ratio and changing the morphology of the SWNT bundles.
- the nano objects 104 may also be multi-walled nano tube bundles and nanowires/nanorods.
- the nano objects 104 are admixed with a solution such as de-ionized water to form the suspension 102.
- a solution such as de-ionized water
- the nano objects 104 and the de-ionized water admix to form a homogeneous suspension which is stabilized with a carbon nanotube concentration up to 1.0 mg/mL without flocculation for several days.
- other solvents such as alcohol, may also be used in the suspension 102.
- the solvent 102 evaporates as shown with reference to Figure 2.
- Figure 2 illustrates the evaporation of the suspension 102 during submersion of the substrate 100 in accordance with an embodiment of the present invention.
- the nano objects 104 transfer to the substrate as the suspension 102 evaporates.
- deposition occurs along an air/liquid/substrate line or triple line 106, as shown with reference to Figure 3.
- the triple line 106 is an area on the substrate 100 where the suspension 102 ends on the substrate 102 as indicated by a point A.
- the point A moves in a downward direction Y along the substrate 100 as the suspension 102 evaporates.
- the rate of evaporation may be controlled through controlling the ventilation of an area immediately surrounding the substrate 100 and the suspension 102 and increasing or decreasing the temperature of the suspension 102. It should also be noted that in an embodiment of the present invention, the suspension evaporates at room temperature.
- Figure 4 illustrates the deposition of the nano objects 104 onto the substrate 100 to form a macroscopic structure, such as a film 108 in accordance with an embodiment of the present invention.
- the nano objects 104 continue to deposit on the substrate 102 forming the film 108.
- the film 108 has a uniform thickness, as demonstrated by the image shown in Figure 1, which varies in a range between about 1 nm to about 10 microns.
- the thickness of the deposited film may be controlled through controlling the concentration of the nano objects 104 in the suspension 102.
- a concentration in a range preferably between about of 0.2 mg/mL of nano tube/water and about 0.5 mg/mL of nano tube/water suspension may be used.
- a concentration preferably in a range between about 0.5 mg/mL and about 1 mg/mL may be used.
- carbon nanotube film deposition occurs for the film 108 when the suspension 102 is super saturated.
- a concentration C 0 of the suspension 102 is less than a critical concentration C* of the suspension 102, deposition occurs during evaporation of the suspension, as previously described. For example, if the concentration C 0 of the suspension is 0.5mg/mL and the critical concentration C* of the suspension 102 is lmg/mL deposition occurs at the triple line 106.
- the concentration C 0 of the suspension 102 is substantially smaller than a critical concentration of the suspension, even when the suspension 102 has a high evaporation rate (i.e., an evaporation rate of 1 mm/hour), the nano objects 104 may not deposit on the substrate.
- a critical concentration of the suspension i.e., an evaporation rate of 1 mm/hour
- the nano objects 104 in the self-assembled film 108 are orientational ordered such that longitudinal axes of the nano objects 104 which deposit on the substrate 100 lie along the triple line 106 direction. This is demonstrated in Figure 4, which shows a TEM image of the aligned SWNT bundles after assembly.
- a degree of ordering of the nano objects in the film 108 maybe controlled by length and length distribution of the nano objects 104 and the thickness of the film 108 deposited on the substrate 100.
- the nano objects 104 are preferably in a range between about 0.01 ⁇ m and about l ⁇ m with a thin deposited film 108 in a range preferably between about 10 nm and about 1 micron, the film 108 has a higher degree of ordering.
- the nano objects 104 are longer (i.e. 2 ⁇ m or more in length), a nano object film having a polycrystalline structure tends to form with well-ordered domains and partial alignment of neighboring domains.
- the carbon nanotube film 108 Upon formation, the carbon nanotube film 108 displays anisotropic polarization of individual carbon nanotubes.
- the individual carbon nanotubes also demonstrate long-range orientational ordering.
- the electrical conductivity of the film 108 is higher when measured parallel to the alignment direction as opposed to being perpendicular with the alignment direction.
- the substrate 100 may have a plurality of shapes in addition to the planar configuration shown with respect to the Figures.
- the substrate 100 may also include a curved surface, a sandwich structure or the like.
- electrophoresis may be used to deposit the film 108 onto the substrate 100, as more fully discussed with reference to commonly owned Application No. 09/996,695 filed on November 30, 2001, the specification of which is herein incorporated by reference in its entirety.
- One advantage of present invention includes strong bonding and selectivity of the nano objects 104 to the substrate 100.
- the nano objects 104 are both mechanically and chemically stable in certain solvents. The stability and selectivity of the self assembled nano objects are attractive from a fabrication standpoint and for use in device applications.
- the nano objects bond strongly to the substrate.
- the nano objects may not be removed by mechanical scratching or through the use of a solvent such as acetone. Nonetheless, the nano objects may be removed by washing or sonication in water.
- water is stirred into a suspension, such as the suspension 102, and the nano objects, such as the film 108, separate into smaller free standing membranes which float on a surface of the water.
- Figure 5 illustrates a method 200 for assembling a macroscopic structure with pre formed carbon nanotubes onto a substrate in accordance with an embodiment of the present invention.
- starting materials used for forming the macroscopic structures are processed.
- a user processes the nano objects 104 and the substrate 100.
- the SWNT bundles 104 are etched to controlled lengths by sonication in concentrated sulfuric and nitric acids after purification by reflux in hydrogen peroxide and filtration.
- the SWNT bundles are rinsed in de- ionized water and annealed at 200°C in a 10 "6 torr dynamic vacuum to form the nano objects 104.
- the user desires to pattern the carbon nano object film deposition onto a substrate, the user patterns hydrophobic regions and hydrophilic regions onto the substrate, as discussed with reference to Figure IB and the substrate 100.
- an operation 204 is performed, as shown with reference to Figure 5.
- the suspension is formed with the starting materials.
- the user admixes the processed starting materials at a given concentration with a solution in order to form the suspension.
- the user admixes the nano objects 104 with de-ionized water such that the concentration of the nano objects 104 within the suspension 102 is 1.0 mg/mL in this example.
- the method 200 Upon formation of the suspension with the starting materials, the method 200 performs an operation 206.
- a user inserts a substrate into the suspension.
- an operation 208 is performed.
- the suspension evaporates, thereby forming a nano object film on a surface of the substrate.
- the suspension 102 upon submersion of the substrate 100 into the suspension 102 in the operation 206, the suspension 102 begins evaporation in the operation 208.
- the film 108 deposits on the substrate 100, thereby forming a macroscopic structure with the preformed nano objects 104 in accordance with an embodiment of the present invention.
- the substrate 100 may be annealed in a vacuum at a temperature in a range preferably between 100°C and about 500°C.
- Figure 6A illustrates a method for assembling pre-formed nano objects into a crystal or a membrane in accordance with an embodiment of the present invention.
- the method comprises processing the nano objects so that they form a stable suspension or solution in a suitable solvent as discussed earlier.
- a processed nano object 610 is mixed with a solvent 600 to form a suspension or a solution in a container 620 that does not attract the nano objects 610, such as Teflon® or the like if the nano objects are hydrophilic.
- a seed crystal 630 comprising the same nano objects or similar materials as the nano object 610 is either submersed in the solution or touches the surface of the solution.
- the solvent 600 can be water and preferably de-ionized water.
- the temperature or the pH value of the suspension or solution is changed after contact of the seed crystal 620 with the solution to bring it to super-saturation.
- the nano objects assemble in the liquid or around the seed crystal 630 to form a crystal 640 (shown with reference to Figure 6B).
- the seed crystal may be slowly withdrawn from the solution such that nano objects in the solution assemble around a lower surface of the seed crystal 630.
- the nano objects 610 assemble around the seed crystal 630 thereby forming a crystal 640, as shown with respect to Figure 6B.
- the nano objects 610 form around the seed crystal 630 such that a structure of the crystal 640 is the same as a structure of the seed crystal 630. Additionally, the crystal 640 may have a thickness in a range preferably between about 1 nanometer and about 10 microns. Moreover, the area of the freestanding membrane is in a range between 1 micron X 1 micron and 10 cm X 10 cm. In a further embodiment of the present invention, nano objects may be formed in a vertical structure, as shown with reference to Fig. 7A.
- Figure 7A illustrates a method for vertically aligning nano objects 711 into a vertically aligned structure on a substrate surface 760.
- nano objects 711 are processed such that the nano objects 711 have a tail 720 and a body 710 which have different affinities toward certain types of solvents.
- the tails 720 are hydrophobic and the bodies 710 are hydrophilic.
- the tails 720 may be a chemical group comprising _hydrocarbons such as C17H35.
- the bodies 710 may be a chemical group comprising _carboxylic acid -CO2H.
- the processed nano objects 711 are dispersed in a solvent 750 which attracts the tail 720 but repels the bodies 710 of the nano objects 711.
- the nano objects float on a surface of the solvent 750 and more preferably with the tails 720 in contact with the solvent and bodies 710 away from the solvent 750.
- An example of a solvent which may be used when the tail 720 is composed of hydrocarbons is toluene or the like. It is also possible through applying pressure or external electrical or magnetic field to assist with the assembly of the nano objects 711 on the surface of the solvent 750.
- a substrate 760 with a surface 730 having the same affinity as the tails 720 is submersed into the solvent 750. After submersing the substrate 760 into the solvent 750, the substrate 760 is withdrawn from the solvent 750. Upon withdrawing the substrate 760 from the solvent 750, the nano objects 711 deposit on the substrate 760 with the tails 720 bonded to the surface 730 and longitudinal axes of the nano objects 711 vertically aligned with respect to the surface 730 of the substrate 760.
- the nano objects 711 can be carbon nano tubes made hydrophilic by oxidation in acid.
- a hydrophobic chemical group can be attached to the ends of the carbon nano tubes 711 that are open after the oxidation process.
- the substrate may be glass coated with a layer of hydrophobic chemicals such that the carbon nano tubes vertically align with the structure.
- the vertically aligned structure is useful, for example, as sensors which detect biological systems, chemicals or gases.
- the vertically aligned structure may also be useful as an electron field emission cathode.
- bodies of carbon nanotubes hydrophobic and tails of carbon nanotubes hydrophilic A vertically aligned structure can also be formed using this type of carbon nanotube.
- the solvent 650 may be hydrophilic.
- the hydrophilic tails attach to the surface 730 such that longitudinal axes of the nano objects are perpendicular to the surface 730.
- Figure 8A discloses assembled preformed nano objects which form a multi-layered structure in accordance with an embodiment of the present invention.
- a self-assembled nano object film 810A is first deposited on a substrate 830. After deposition, the substrate 830 is removed from a solution having nano objects which formed the self-assembled nano object film 810A.
- a second material 820A is then coated on the surface of the self- assembled nano objects 810A on the substrate. The second material may be coated onto the self assembled nano object film 810A using a variety of techniques such as spin-coating, spray, electrophoresis, evaporation or sputtering.
- the material 820A has the same affinity to the self-assembled nano object film 810A as a surface of the substrate.
- An example of the type of material which may be used for the material 820A includes polymers, metals, ceramics, semiconductors, inorganic materials, organic materials, biological materials or the like.
- the substrate 830 is re-submersed into the solution containing the nano objects to form a nano object film 810B similar to the nano object film 810A.
- the process is repeated until a multi-layer structure with a desired thickness and a desired number of repeating layers are obtained as shown with reference to Figure 8 A.
- a third material 860 can be deposited on top of the second layer 850 to form a tri-layer structure as shown with respect to Figure 8B, the structure of which may be used as a thin film re-chargeable battery.
- a first layer electrode of the re-chargeable battery is carbon nanotubes 840 which are deposited on a conducting surface 830.
- the second layer 850 is an electrolyte material that can be deposited over the carbon nanotubes 840 using any suitable technique such as evaporation, pulsed laser deposition, sputtering or the like.
- a third layer 860 is a second electrode of the rechargeable battery which can be Li x MnO 4 or Li x CO 2 .
- the third layer 860 can be deposited by any suitable technique including evaporation, pulsed laser deposition, sputtering or the like.
- the multi- layer structure can then be used as a re-chargeable battery or as a fuel cell.
- carbon nanotubes are assembled into a structure which can be used as an electron field emission cathode for applications such as field emission flat panel displays.
- SWNTs are first synthesized by the laser ablation method and then raw materials are purified. The average bundle length is then reduced from >10 ⁇ m to -0.5 ⁇ m by, for example, sonication in a mixture of HNO 3 and H 2 SO 4 for 30 hours.
- the short SWNTs are then rinsed in de- ionized water and annealed at 200°C in 10 "6 torr dynamic vacuum before use.
- a homogeneous suspension of shortened SWNTs is stabilized in de-ionized water at a nanotube concentration of 1.Omg/mL.
- Figure 9A illustrates a patterned substrate 900 in accordance with an embodiment of the present invention.
- a thin layer of photoresist is spin-coated onto a top surface of the glass slide 900.
- a photo mask with periodic lines (less than 100 micron width) is placed on top of the glass surface coated with the photoresist.
- an ultraviolet light source is used to expose the glass.
- the exposed glass is then developed in chemicals to remove the photoresist materials that are exposed to UV light.
- the developed glass forms a patterned glass substrate with periodic hydrophobic regions which are covered by the photoresist 910 and hydrophilic regions 920 which are free of the photoresist.
- the glass with patterned hydrophobic and hydrophilic regions is submersed into the previously described SWNT/water suspension at room temperature. It should be noted that SWNTs having an aspect ratio preferably of about 10 and a bundle length in a range preferably between about 300 nm and about 1 micron may be used. As the water evaporates, SWNTs 930 deposit on the hydrophilic region of the glass slide. In a next operation, the glass slide coated with the SWNTs 930 is washed in a suitable solvent such as acetone, methanol, ethanol, buffered hydrochloric acid or the like. During the washing process, the remaining photoresist is removed and the SWNTs 930 remain on the glass surface.
- a suitable solvent such as acetone, methanol, ethanol, buffered hydrochloric acid or the like.
- the glass slide is heated in either air or vacuum at 200°C to remove the residual solvent to achieve SWNTs 930, as shown with reference to Figure 9B.
- the width of the SWNTs 930 can be as small as 0.1 micron and as wide as 1 cm or larger. It should be noted that the SWNTs 930 may have other patterns in addition to that shown with reference to Figure 9B, such as squares, circles, dots or any other geometry that can be patterned by photolithography.
- Electrical contacts 950 are coupled with each of the SWNTs 930 on the glass substrate 900 as shown with reference to Figure 9B.
- FIG. 9B When the structure shown with respect to Fig. 9B is placed inside a vacuum system and subjected to an electrical field in the order of 1-lOV/micron, electrons emit from the carbon nanotubes 930.
- a phosphor screen 960 Figure 9C is placed above the carbon nanotube structure, images can be obtained by controlling where the electrons emit and at which location the electrons strike the phosphor thereby forming a field emission flat display.
- a field emission cathode formed in accordance with the present invention may have a threshold electrical field in a range between about 1 V/micron to about 5V/micron for an emission current density of lmA cm 2 .
- the present invention provides a method for the self assembly of pre-formed nano objects onto a substrate. As may be appreciated, the present invention allows for higher packing densities than those techniques used in the prior art. Forming nano structures with filtration techniques form nanotube papers which have a lower packing density than that of nano structures formed in accordance with the present invention.
- the present invention may be performed at room temperature as previously mentioned. The efficient room temperature deposition process provides an attractive alternative to chemical vapor deposition techniques, more specifically in display applications having low melting temperatures.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Composite Materials (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Textile Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Carbon And Carbon Compounds (AREA)
- Inert Electrodes (AREA)
- Primary Cells (AREA)
- Secondary Cells (AREA)
- Battery Electrode And Active Subsutance (AREA)
- Electric Double-Layer Capacitors Or The Like (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003580561A JP2005521563A (ja) | 2002-03-25 | 2003-03-03 | ナノ物体を集める方法 |
| AU2003219976A AU2003219976A1 (en) | 2002-03-25 | 2003-03-03 | Method for assembling nano objects |
| KR10-2004-7015411A KR20050009987A (ko) | 2002-03-25 | 2003-03-03 | 나노 물체 조립 방법 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/103,803 | 2002-03-25 | ||
| US10/103,803 US7147894B2 (en) | 2002-03-25 | 2002-03-25 | Method for assembling nano objects |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2003083128A2 true WO2003083128A2 (en) | 2003-10-09 |
| WO2003083128A3 WO2003083128A3 (en) | 2004-04-08 |
Family
ID=28040470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2003/006345 Ceased WO2003083128A2 (en) | 2002-03-25 | 2003-03-03 | Method for assembling nano objects |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US7147894B2 (enExample) |
| JP (1) | JP2005521563A (enExample) |
| KR (1) | KR20050009987A (enExample) |
| CN (1) | CN100393427C (enExample) |
| AU (1) | AU2003219976A1 (enExample) |
| TW (1) | TWI343831B (enExample) |
| WO (1) | WO2003083128A2 (enExample) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006080083A (ja) * | 2004-09-08 | 2006-03-23 | Samsung Sdi Co Ltd | 燃料電池用電極,膜−電極アセンブリ,及び燃料電池システム |
| JP2006086125A (ja) * | 2004-09-14 | 2006-03-30 | Samsung Sdi Co Ltd | カーボンナノチューブの整列方法、及びそれを利用した電界放出素子の製造方法 |
| EP1618601A4 (en) * | 2003-03-21 | 2006-11-08 | Univ North Carolina | METHOD AND DEVICE FOR THE STRUCTURED DEPOSITION OF NANOSTRUCTURE-CONTAINING MATERIALS BY SELF-ORGANIZATION AND RELATED OBJECTS |
| JP2008504669A (ja) * | 2004-06-09 | 2008-02-14 | イムラ アメリカ インコーポレイテッド | 超高速パルスレーザ堆積を使用する電気化学デバイス作製方法。 |
| JP2008513318A (ja) * | 2004-06-23 | 2008-05-01 | ハイピリオン カタリシス インターナショナル インコーポレイテッド | 官能基化単層カーボンナノチューブ |
| US8007957B2 (en) | 2004-11-26 | 2011-08-30 | Samsung Sdi Co., Ltd. | Electrode for fuel cell, fuel cell system comprising the same, and method for preparing the same |
| US8034400B2 (en) | 2004-11-01 | 2011-10-11 | Nanofiber A/S | Soft-lift off of organic nanofibers |
| US8057958B2 (en) | 2005-07-29 | 2011-11-15 | Samsung Sdi Co., Ltd. | Electrode for fuel cell, membrane-electrode assembly comprising same and fuel cell system comprising same |
| US9346673B2 (en) | 2004-06-23 | 2016-05-24 | Samsung Sdi Co., Ltd. | Electrode for fuel cell, membrane-electrode assembly for fuel cell comprising the same, fuel cell system comprising the same, and method for preparing the electrode |
| US9608221B2 (en) | 2009-10-15 | 2017-03-28 | Samsung Electronics Co., Ltd. | Solar cell having organic nanowires |
| EP3105175A4 (en) * | 2014-02-11 | 2017-09-27 | Wisconsin Alumni Research Foundation | Floating evaporative assembly of aligned carbon nanotubes |
Families Citing this family (169)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6835591B2 (en) * | 2001-07-25 | 2004-12-28 | Nantero, Inc. | Methods of nanotube films and articles |
| US6706402B2 (en) | 2001-07-25 | 2004-03-16 | Nantero, Inc. | Nanotube films and articles |
| US6924538B2 (en) | 2001-07-25 | 2005-08-02 | Nantero, Inc. | Devices having vertically-disposed nanofabric articles and methods of making the same |
| US6574130B2 (en) | 2001-07-25 | 2003-06-03 | Nantero, Inc. | Hybrid circuit having nanotube electromechanical memory |
| US7252749B2 (en) * | 2001-11-30 | 2007-08-07 | The University Of North Carolina At Chapel Hill | Deposition method for nanostructure materials |
| US7455757B2 (en) * | 2001-11-30 | 2008-11-25 | The University Of North Carolina At Chapel Hill | Deposition method for nanostructure materials |
| US7147894B2 (en) * | 2002-03-25 | 2006-12-12 | The University Of North Carolina At Chapel Hill | Method for assembling nano objects |
| US8907323B2 (en) * | 2002-04-23 | 2014-12-09 | Philip D. Freedman | Microprocessor assembly |
| US7335395B2 (en) * | 2002-04-23 | 2008-02-26 | Nantero, Inc. | Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles |
| US7037319B2 (en) * | 2002-10-15 | 2006-05-02 | Scimed Life Systems, Inc. | Nanotube paper-based medical device |
| GB2395059B (en) | 2002-11-05 | 2005-03-16 | Imp College Innovations Ltd | Structured silicon anode |
| AU2003294586A1 (en) * | 2002-12-09 | 2004-06-30 | The University Of North Carolina At Chapel Hill | Methods for assembly and sorting of nanostructure-containing materials and related articles |
| US7858185B2 (en) | 2003-09-08 | 2010-12-28 | Nantero, Inc. | High purity nanotube fabrics and films |
| US7560136B2 (en) | 2003-01-13 | 2009-07-14 | Nantero, Inc. | Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles |
| US7419601B2 (en) * | 2003-03-07 | 2008-09-02 | Seldon Technologies, Llc | Nanomesh article and method of using the same for purifying fluids |
| US20100098877A1 (en) * | 2003-03-07 | 2010-04-22 | Cooper Christopher H | Large scale manufacturing of nanostructured material |
| DE602004028298D1 (de) | 2003-03-07 | 2010-09-02 | Seldon Technologies Llc | Reinigung von Flüssigkeiten mit Nanomaterialien |
| US7972616B2 (en) | 2003-04-17 | 2011-07-05 | Nanosys, Inc. | Medical device applications of nanostructured surfaces |
| US20060122596A1 (en) * | 2003-04-17 | 2006-06-08 | Nanosys, Inc. | Structures, systems and methods for joining articles and materials and uses therefor |
| AU2004256392B2 (en) * | 2003-04-28 | 2009-10-01 | Oned Material Llc | Super-hydrophobic surfaces, methods of their construction and uses therefor |
| US7803574B2 (en) | 2003-05-05 | 2010-09-28 | Nanosys, Inc. | Medical device applications of nanostructured surfaces |
| US7375369B2 (en) | 2003-09-08 | 2008-05-20 | Nantero, Inc. | Spin-coatable liquid for formation of high purity nanotube films |
| US7504051B2 (en) * | 2003-09-08 | 2009-03-17 | Nantero, Inc. | Applicator liquid for use in electronic manufacturing processes |
| JP2005114576A (ja) * | 2003-10-08 | 2005-04-28 | Hitachi Software Eng Co Ltd | 両親媒性分子固定化ビーズ、その製造方法、及びキャピラリビーズアレイのビーズ配列方法 |
| US7790331B1 (en) * | 2003-10-31 | 2010-09-07 | Hewlett-Packard Development Company, L.P. | Fuel cell with film having nanowires therein |
| US8025960B2 (en) | 2004-02-02 | 2011-09-27 | Nanosys, Inc. | Porous substrates, articles, systems and compositions comprising nanofibers and methods of their use and production |
| US20110039690A1 (en) | 2004-02-02 | 2011-02-17 | Nanosys, Inc. | Porous substrates, articles, systems and compositions comprising nanofibers and methods of their use and production |
| US7276389B2 (en) * | 2004-02-25 | 2007-10-02 | Samsung Electronics Co., Ltd. | Article comprising metal oxide nanostructures and method for fabricating such nanostructures |
| AU2005323492A1 (en) * | 2004-04-07 | 2006-07-13 | Eikos, Inc. | Fugitive viscosity and stability modifiers for carbon nanotube compositions |
| US8632699B2 (en) * | 2004-04-07 | 2014-01-21 | Eikos, Inc. | Fugitive viscosity and stability modifiers for carbon nanotube compositions |
| KR20050104840A (ko) * | 2004-04-29 | 2005-11-03 | 삼성에스디아이 주식회사 | 카본나노튜브, 이를 포함한 전자 방출원 및 이를 구비한전자 방출 소자 |
| US20070014148A1 (en) * | 2004-05-10 | 2007-01-18 | The University Of North Carolina At Chapel Hill | Methods and systems for attaching a magnetic nanowire to an object and apparatuses formed therefrom |
| US7556746B2 (en) * | 2004-06-03 | 2009-07-07 | Nantero, Inc. | Method of making an applicator liquid for electronics fabrication process |
| US7658869B2 (en) | 2004-06-03 | 2010-02-09 | Nantero, Inc. | Applicator liquid containing ethyl lactate for preparation of nanotube films |
| CN1313364C (zh) * | 2004-06-16 | 2007-05-02 | 东元奈米应材股份有限公司 | 纳米碳管悬浮液及其制造方法 |
| JP2006011296A (ja) * | 2004-06-29 | 2006-01-12 | Toshiba Corp | 偏光素子、偏光素子の製造方法、及び露光装置の評価方法 |
| WO2007001343A2 (en) * | 2004-08-20 | 2007-01-04 | Ion America Corporation | Nanostructured fuel cell electrode |
| TWI399864B (zh) | 2004-09-16 | 2013-06-21 | Nantero Inc | 使用奈米管之發光體及其製造方法 |
| US7717001B2 (en) | 2004-10-08 | 2010-05-18 | Sdc Materials, Inc. | Apparatus for and method of sampling and collecting powders flowing in a gas stream |
| US20060091123A1 (en) * | 2004-10-28 | 2006-05-04 | Hon Hai Precision Industry Co., Ltd. | Method for hydrophilic treatment of a surface of a material |
| US7553341B2 (en) * | 2004-11-24 | 2009-06-30 | The Regents Of The University Of California | High power density supercapacitors with carbon nanotube electrodes |
| WO2006065937A2 (en) * | 2004-12-16 | 2006-06-22 | Nantero, Inc. | Aqueous carbon nanotube applicator liquids and methods for producing applicator liquids thereof |
| US7635518B1 (en) * | 2005-02-04 | 2009-12-22 | University Of Louisiana At Lafayette | Dendritic magnetic nanostructures and method for making same |
| WO2006084413A1 (de) * | 2005-02-14 | 2006-08-17 | Tex-A-Tec Ag | Verfahren zur beschichtung von trägermaterialien mit nanopartikel enthaltenden dispersionen |
| US7671398B2 (en) * | 2005-02-23 | 2010-03-02 | Tran Bao Q | Nano memory, light, energy, antenna and strand-based systems and methods |
| US7597950B1 (en) * | 2005-02-28 | 2009-10-06 | Massachusetts Institute Of Technology | Nanoparticles having sub-nanometer features |
| US7218004B2 (en) * | 2005-03-11 | 2007-05-15 | Hewlett-Packard Development Company, L.P. | Fusing nanowires using in situ crystal growth |
| WO2006101659A2 (en) * | 2005-03-17 | 2006-09-28 | The George Washington University | Method of making nanoparticle wires |
| US8155262B2 (en) | 2005-04-25 | 2012-04-10 | The University Of North Carolina At Chapel Hill | Methods, systems, and computer program products for multiplexing computed tomography |
| WO2006116365A2 (en) * | 2005-04-25 | 2006-11-02 | The University Of North Carolina At Chapel Hill | X-ray imaging using temporal digital signal processing |
| EP1874531A2 (en) * | 2005-04-26 | 2008-01-09 | Nanosys, Inc. | Paintable nanofiber coatings |
| US7479654B2 (en) | 2005-05-09 | 2009-01-20 | Nantero, Inc. | Memory arrays using nanotube articles with reprogrammable resistance |
| US8066967B2 (en) * | 2005-06-13 | 2011-11-29 | Electrox Corporation | System and method for the manipulation, classification sorting, purification, placement, and alignment of nano fibers using electrostatic forces and electrographic techniques |
| US7118784B1 (en) * | 2005-06-27 | 2006-10-10 | The Regents Of The University Of California | Method and apparatus for controlling nucleation in self-assembled films |
| KR100818383B1 (ko) * | 2005-08-05 | 2008-04-01 | 마이티테크, 인코퍼레이티드. | 전기영동전착을 통한 나노구조 복합체 전극의 제조방법 및그 방법에 의해 제조된 제품 |
| JP4544530B2 (ja) * | 2005-09-05 | 2010-09-15 | ジャパンスーパーコンダクタテクノロジー株式会社 | Cnt配列材料の製造方法 |
| AU2006347609A1 (en) * | 2005-09-06 | 2008-05-08 | Nantero, Inc. | Carbon nanotubes for the selective transfer of heat from electronics |
| CN100482583C (zh) * | 2005-09-09 | 2009-04-29 | 鸿富锦精密工业(深圳)有限公司 | 加工碳纳米管的方法 |
| KR100776359B1 (ko) * | 2005-10-18 | 2007-11-15 | 부산대학교 산학협력단 | 전계 방출 표시 소자의 제조방법 |
| KR100682381B1 (ko) * | 2005-11-16 | 2007-02-15 | 광주과학기술원 | 단일벽 탄소 나노튜브-난백 단백질 복합체 및 그 제조 방법 |
| US7892596B2 (en) | 2005-12-19 | 2011-02-22 | GM Global Technology Operations LLC | Nanoparticle coating process for fuel cell components |
| US8859048B2 (en) * | 2006-01-03 | 2014-10-14 | International Business Machines Corporation | Selective placement of carbon nanotubes through functionalization |
| GB0601318D0 (en) | 2006-01-23 | 2006-03-01 | Imp Innovations Ltd | Method of etching a silicon-based material |
| GB0601319D0 (en) | 2006-01-23 | 2006-03-01 | Imp Innovations Ltd | A method of fabricating pillars composed of silicon-based material |
| US8907384B2 (en) | 2006-01-26 | 2014-12-09 | Nanoselect, Inc. | CNT-based sensors: devices, processes and uses thereof |
| US20090278556A1 (en) * | 2006-01-26 | 2009-11-12 | Nanoselect, Inc. | Carbon Nanostructure Electrode Based Sensors: Devices, Processes and Uses Thereof |
| KR100739943B1 (ko) | 2006-01-31 | 2007-07-16 | 삼성에스디아이 주식회사 | 이차전지용 전극 도전재 제조방법 및 상기 방법으로 제조된 도전재를 포함하는 리튬이차전지 |
| JP4982676B2 (ja) * | 2006-02-15 | 2012-07-25 | ニッタ株式会社 | 電子エミッタ |
| US8628819B2 (en) * | 2006-02-24 | 2014-01-14 | GM Global Technology Operations LLC | Method of depositing a nanoparticle coating on a bipolar plate and removing the nanoparticle coating from the lands of the bipolar plate |
| US20070207182A1 (en) * | 2006-03-06 | 2007-09-06 | Jan Weber | Medical devices having electrically aligned elongated particles |
| WO2007105405A1 (ja) * | 2006-03-10 | 2007-09-20 | Matsushita Electric Industrial Co., Ltd. | 異方性形状部材のマウント方法およびマウント装置と、電子デバイスの製造方法と、電子デバイスと、表示装置 |
| JP5108240B2 (ja) * | 2006-03-20 | 2012-12-26 | トヨタ自動車株式会社 | 燃料電池及び燃料電池の製造方法 |
| TWI313478B (en) * | 2006-04-13 | 2009-08-11 | Tatung Compan | Method for manufacturing field emission substrate |
| TW200804613A (en) * | 2006-04-28 | 2008-01-16 | Univ California | Synthesis of pure nanotubes from nanotubes |
| US8189893B2 (en) | 2006-05-19 | 2012-05-29 | The University Of North Carolina At Chapel Hill | Methods, systems, and computer program products for binary multiplexing x-ray radiography |
| US7393699B2 (en) | 2006-06-12 | 2008-07-01 | Tran Bao Q | NANO-electronics |
| WO2008027502A2 (en) * | 2006-09-01 | 2008-03-06 | Battelle Memorial Institute | Carbon nanotube nanocomposites, methods of making carbon nanotube nanocomposites, and devices comprising the nanocomposites |
| KR100768632B1 (ko) * | 2006-10-30 | 2007-10-18 | 삼성전자주식회사 | 나노입자의 분산방법 및 이를 이용한 나노입자 박막의제조방법 |
| CN1987454B (zh) * | 2006-10-31 | 2011-01-12 | 成都夸常医学工业有限公司 | 含定向纳米结构功能化区的纳米结构组成及其制备和应用方法 |
| CN101632185B (zh) * | 2007-02-12 | 2011-05-18 | 毫微纤维公司 | 有机纳米纤维的存储和转移 |
| JP5275342B2 (ja) | 2007-05-11 | 2013-08-28 | エスディーシー マテリアルズ インコーポレイテッド | 粒子生産システム及び粒子生産方法 |
| GB0709165D0 (en) | 2007-05-11 | 2007-06-20 | Nexeon Ltd | A silicon anode for a rechargeable battery |
| JP2008300190A (ja) * | 2007-05-31 | 2008-12-11 | Fuji Heavy Ind Ltd | 電極の製造方法 |
| US7959969B2 (en) | 2007-07-10 | 2011-06-14 | California Institute Of Technology | Fabrication of anchored carbon nanotube array devices for integrated light collection and energy conversion |
| US20100196446A1 (en) | 2007-07-10 | 2010-08-05 | Morteza Gharib | Drug delivery and substance transfer facilitated by nano-enhanced device having aligned carbon nanotubes protruding from device surface |
| GB0713898D0 (en) | 2007-07-17 | 2007-08-29 | Nexeon Ltd | A method of fabricating structured particles composed of silcon or a silicon-based material and their use in lithium rechargeable batteries |
| GB0713895D0 (en) | 2007-07-17 | 2007-08-29 | Nexeon Ltd | Production |
| GB0713896D0 (en) | 2007-07-17 | 2007-08-29 | Nexeon Ltd | Method |
| JP2009057249A (ja) * | 2007-08-31 | 2009-03-19 | Sumitomo Electric Ind Ltd | 炭素構造体、複合部材およびその製造方法 |
| EP2197508B1 (en) * | 2007-09-06 | 2014-12-10 | Boston Scientific Limited | Medical devices containing silicate and carbon particles |
| US8575059B1 (en) | 2007-10-15 | 2013-11-05 | SDCmaterials, Inc. | Method and system for forming plug and play metal compound catalysts |
| CN101425380B (zh) * | 2007-11-02 | 2013-04-24 | 清华大学 | 超级电容器及其制备方法 |
| US8319002B2 (en) | 2007-12-06 | 2012-11-27 | Nanosys, Inc. | Nanostructure-enhanced platelet binding and hemostatic structures |
| WO2009073854A1 (en) | 2007-12-06 | 2009-06-11 | Nanosys, Inc. | Resorbable nanoenhanced hemostatic structures and bandage materials |
| US8308930B2 (en) * | 2008-03-04 | 2012-11-13 | Snu R&Db Foundation | Manufacturing carbon nanotube ropes |
| WO2009128800A1 (en) * | 2008-04-17 | 2009-10-22 | The Board Of Trustees Of The University Of Illinois | Silicon nanowire and composite formation and highly pure and uniform length silicon nanowires |
| CA2723486A1 (en) * | 2008-05-07 | 2010-04-01 | Nanocomp Technologies, Inc. | Nanostructure composite sheets and methods of use |
| USD627900S1 (en) | 2008-05-07 | 2010-11-23 | SDCmaterials, Inc. | Glove box |
| WO2009149563A1 (en) * | 2008-06-13 | 2009-12-17 | Fablab Inc. | A system and method for fabricating macroscopic objects, and nano-assembled objects obtained therewith |
| US8673258B2 (en) * | 2008-08-14 | 2014-03-18 | Snu R&Db Foundation | Enhanced carbon nanotube |
| US8357346B2 (en) * | 2008-08-20 | 2013-01-22 | Snu R&Db Foundation | Enhanced carbon nanotube wire |
| US7959842B2 (en) * | 2008-08-26 | 2011-06-14 | Snu & R&Db Foundation | Carbon nanotube structure |
| US8021640B2 (en) * | 2008-08-26 | 2011-09-20 | Snu R&Db Foundation | Manufacturing carbon nanotube paper |
| GB2464158B (en) | 2008-10-10 | 2011-04-20 | Nexeon Ltd | A method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries |
| GB2464157B (en) | 2008-10-10 | 2010-09-01 | Nexeon Ltd | A method of fabricating structured particles composed of silicon or a silicon-based material |
| US7915637B2 (en) * | 2008-11-19 | 2011-03-29 | Nantero, Inc. | Switching materials comprising mixed nanoscopic particles and carbon nanotubes and method of making and using the same |
| US8540889B1 (en) | 2008-11-19 | 2013-09-24 | Nanosys, Inc. | Methods of generating liquidphobic surfaces |
| US8600003B2 (en) | 2009-01-16 | 2013-12-03 | The University Of North Carolina At Chapel Hill | Compact microbeam radiation therapy systems and methods for cancer treatment and research |
| WO2010120813A2 (en) * | 2009-04-13 | 2010-10-21 | Applied Materials, Inc. | Composite materials containing metallized carbon nanotubes and nanofibers |
| GB2470056B (en) | 2009-05-07 | 2013-09-11 | Nexeon Ltd | A method of making silicon anode material for rechargeable cells |
| US9853292B2 (en) | 2009-05-11 | 2017-12-26 | Nexeon Limited | Electrode composition for a secondary battery cell |
| GB2470190B (en) | 2009-05-11 | 2011-07-13 | Nexeon Ltd | A binder for lithium ion rechargeable battery cells |
| CN101944403A (zh) * | 2009-07-08 | 2011-01-12 | 群康科技(深圳)有限公司 | 导电板及其制作方法 |
| US8470112B1 (en) | 2009-12-15 | 2013-06-25 | SDCmaterials, Inc. | Workflow for novel composite materials |
| US8652992B2 (en) | 2009-12-15 | 2014-02-18 | SDCmaterials, Inc. | Pinning and affixing nano-active material |
| US9119309B1 (en) | 2009-12-15 | 2015-08-25 | SDCmaterials, Inc. | In situ oxide removal, dispersal and drying |
| US8803025B2 (en) | 2009-12-15 | 2014-08-12 | SDCmaterials, Inc. | Non-plugging D.C. plasma gun |
| US9126191B2 (en) | 2009-12-15 | 2015-09-08 | SDCmaterials, Inc. | Advanced catalysts for automotive applications |
| US8557727B2 (en) | 2009-12-15 | 2013-10-15 | SDCmaterials, Inc. | Method of forming a catalyst with inhibited mobility of nano-active material |
| US8545652B1 (en) | 2009-12-15 | 2013-10-01 | SDCmaterials, Inc. | Impact resistant material |
| US9149797B2 (en) | 2009-12-15 | 2015-10-06 | SDCmaterials, Inc. | Catalyst production method and system |
| US20110203632A1 (en) * | 2010-02-22 | 2011-08-25 | Rahul Sen | Photovoltaic devices using semiconducting nanotube layers |
| CN101798115B (zh) * | 2010-02-26 | 2012-08-15 | 中山大学 | 一种三元含氧酸盐化合物微-纳材料的制备方法 |
| FR2956991B1 (fr) * | 2010-03-02 | 2012-11-02 | Commissariat Energie Atomique | Procede de depot d'une couche de particules organisees sur un substrat |
| WO2011127207A2 (en) * | 2010-04-07 | 2011-10-13 | California Institute Of Technology | Simple method for producing superhydrophobic carbon nanotube array |
| GB201005979D0 (en) | 2010-04-09 | 2010-05-26 | Nexeon Ltd | A method of fabricating structured particles composed of silicon or a silicon-based material and their use in lithium rechargeable batteries |
| GB201009519D0 (en) | 2010-06-07 | 2010-07-21 | Nexeon Ltd | An additive for lithium ion rechargeable battery cells |
| US8358739B2 (en) | 2010-09-03 | 2013-01-22 | The University Of North Carolina At Chapel Hill | Systems and methods for temporal multiplexing X-ray imaging |
| GB201014707D0 (en) | 2010-09-03 | 2010-10-20 | Nexeon Ltd | Electroactive material |
| GB201014706D0 (en) | 2010-09-03 | 2010-10-20 | Nexeon Ltd | Porous electroactive material |
| WO2012079066A2 (en) | 2010-12-10 | 2012-06-14 | California Institute Of Technology | Method for producing graphene oxide with tunable gap |
| US8669202B2 (en) | 2011-02-23 | 2014-03-11 | SDCmaterials, Inc. | Wet chemical and plasma methods of forming stable PtPd catalysts |
| WO2012135238A1 (en) | 2011-03-29 | 2012-10-04 | California Institute Of Technology | Method to increase the capacitance of electrochemical carbon nanotube capacitors by conformal deposition of nanoparticles |
| US20130171401A1 (en) * | 2011-06-24 | 2013-07-04 | Charles P. Marsh | Meso-scale carbon nanotube self-assembled tube structures |
| CN107096576A (zh) | 2011-08-19 | 2017-08-29 | Sdc材料公司 | 用于催化和催化转化器中的涂覆基质和将基质用修补基面涂料组合物涂覆的方法 |
| CN102502485A (zh) * | 2011-11-10 | 2012-06-20 | 中山大学 | 一种纳米材料的图形化工艺方法 |
| WO2013090844A1 (en) | 2011-12-14 | 2013-06-20 | California Institute Of Technology | Sharp tip carbon nanotube microneedle devices and their fabrication |
| EP2837035A2 (en) * | 2012-04-12 | 2015-02-18 | Sol Voltaics AB | Methods of nanowire functionalization, dispersion and attachment |
| US9349543B2 (en) | 2012-07-30 | 2016-05-24 | California Institute Of Technology | Nano tri-carbon composite systems and manufacture |
| US9156025B2 (en) | 2012-11-21 | 2015-10-13 | SDCmaterials, Inc. | Three-way catalytic converter using nanoparticles |
| US9511352B2 (en) | 2012-11-21 | 2016-12-06 | SDCmaterials, Inc. | Three-way catalytic converter using nanoparticles |
| CN103227102B (zh) * | 2013-04-17 | 2016-06-15 | 北京大学 | 一种图形化纳米颗粒自组装制造方法 |
| US20140363643A1 (en) * | 2013-06-07 | 2014-12-11 | International Business Machines Corporation | Surface-Selective Carbon Nanotube Deposition Via Polymer-Mediated Assembly |
| CN105592921A (zh) | 2013-07-25 | 2016-05-18 | Sdc材料公司 | 用于催化转化器的洗涂层和经涂覆基底及其制造和使用方法 |
| EP3068517A4 (en) | 2013-10-22 | 2017-07-05 | SDCMaterials, Inc. | Compositions of lean nox trap |
| WO2015061477A1 (en) | 2013-10-22 | 2015-04-30 | SDCmaterials, Inc. | Catalyst design for heavy-duty diesel combustion engines |
| US9786853B2 (en) | 2014-02-11 | 2017-10-10 | Wisconsin Alumni Research Foundation | Floating evaporative assembly of aligned carbon nanotubes |
| US9687811B2 (en) | 2014-03-21 | 2017-06-27 | SDCmaterials, Inc. | Compositions for passive NOx adsorption (PNA) systems and methods of making and using same |
| US10980494B2 (en) | 2014-10-20 | 2021-04-20 | The University Of North Carolina At Chapel Hill | Systems and related methods for stationary digital chest tomosynthesis (s-DCT) imaging |
| CN104386647B (zh) * | 2014-10-27 | 2016-04-13 | 暨南大学 | 一种埃洛石纳米管的定向排列方法及其涂层和应用 |
| US9425405B1 (en) | 2015-02-11 | 2016-08-23 | Wisconsin Alumni Research Foundation | Continuous, floating evaporative assembly of aligned carbon nanotubes |
| CN105206485B (zh) * | 2015-08-19 | 2016-09-07 | 宁波工程学院 | P掺杂SiC纳米线在场发射阴极材料中的应用 |
| US9892914B2 (en) * | 2015-10-20 | 2018-02-13 | Taiwan Semiconductor Manufacturing Co., Ltd | Orientation layer for directed self-assembly patterning process |
| US10431740B2 (en) * | 2016-01-22 | 2019-10-01 | Carbonics Inc. | Continuous, scalable deposition of aligned carbon nanotubes using sprays of carbon nanotube solutions |
| US10835199B2 (en) | 2016-02-01 | 2020-11-17 | The University Of North Carolina At Chapel Hill | Optical geometry calibration devices, systems, and related methods for three dimensional x-ray imaging |
| US10814493B2 (en) * | 2017-01-12 | 2020-10-27 | Robotiq Inc. | Tactile sensor and a method of manufacturing thereof |
| TW201827120A (zh) * | 2017-01-27 | 2018-08-01 | 國立大學法人信州大學 | 碳被膜之製造方法及被膜之製造方法 |
| US10873026B2 (en) | 2017-03-10 | 2020-12-22 | Wisconsin Alumni Research Foundation | Alignment of carbon nanotubes in confined channels |
| US12132205B2 (en) * | 2017-09-01 | 2024-10-29 | Sk Innovation Co., Ltd. | Lithium composite anode, method of fabricating the same, and lithium secondary battery including the same |
| CN110240117B (zh) * | 2018-03-08 | 2022-04-19 | 中国科学院宁波材料技术与工程研究所 | 超薄透明纳米/微米结构自组装薄膜及其绿色制备方法 |
| CN110660973B (zh) * | 2018-06-29 | 2021-01-05 | 清华大学 | 可拉伸复合电极的制备方法 |
| US11302921B2 (en) * | 2018-11-19 | 2022-04-12 | Chongqing Jinkang Powertrain New Energy Co., Ltd. | Lithium-metal free anode for electric vehicle solid state batteries |
| JP7259948B2 (ja) * | 2019-05-23 | 2023-04-18 | 日本電気株式会社 | カーボンナノチューブの配向層を有するボロメータ及びその製造方法 |
| CN110182757A (zh) * | 2019-05-31 | 2019-08-30 | 南京大学 | 一种纳米结构的制造方法 |
| CN110482530B (zh) * | 2019-09-04 | 2020-12-29 | 北京华碳元芯电子科技有限责任公司 | 一种制备图案化碳纳米管薄膜的方法 |
| CN110841892B (zh) * | 2019-11-26 | 2021-04-23 | 清华大学 | 基于蒸发诱导张力梯度驱动自组装涂层快速制备的方法 |
| US11342181B2 (en) | 2020-05-15 | 2022-05-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor devices and methods of manufacture |
| EP3933881A1 (en) | 2020-06-30 | 2022-01-05 | VEC Imaging GmbH & Co. KG | X-ray source with multiple grids |
| US12230468B2 (en) | 2022-06-30 | 2025-02-18 | Varex Imaging Corporation | X-ray system with field emitters and arc protection |
Family Cites Families (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4249988A (en) * | 1978-03-15 | 1981-02-10 | Western Electric Company, Inc. | Growing crystals from a melt by controlling additions of material thereto |
| JPS61192045A (ja) * | 1985-02-20 | 1986-08-26 | Canon Inc | 情報記憶装置 |
| US4728576A (en) * | 1987-04-10 | 1988-03-01 | Hoechst Celanese Corporation | Langmuir-Blodgett coating process |
| JP2707736B2 (ja) * | 1989-04-10 | 1998-02-04 | 三菱マテリアル株式会社 | 単結晶育成方法 |
| US5078830A (en) * | 1989-04-10 | 1992-01-07 | Mitsubishi Metal Corporation | Method for growing single crystal |
| US5322591A (en) * | 1991-03-26 | 1994-06-21 | The United States Of America As Represented By The Secretary Of The Air Force | Hydrothermal growth on non-linear optical crystals |
| US5879836A (en) * | 1993-09-10 | 1999-03-09 | Hyperion Catalysis International Inc. | Lithium battery with electrodes containing carbon fibrils |
| DE19610782B4 (de) * | 1996-03-19 | 2004-08-12 | Robert Bosch Gmbh | Verfahren zur Herstellung von mikromechanischen Strukturen |
| KR100365444B1 (ko) * | 1996-09-18 | 2004-01-24 | 가부시끼가이샤 도시바 | 진공마이크로장치와이를이용한화상표시장치 |
| EP1015384B1 (en) | 1997-03-07 | 2005-07-13 | William Marsh Rice University | Carbon fibers formed from single-wall carbon nanotubes |
| US6683783B1 (en) * | 1997-03-07 | 2004-01-27 | William Marsh Rice University | Carbon fibers formed from single-wall carbon nanotubes |
| US5801092A (en) * | 1997-09-04 | 1998-09-01 | Ayers; Michael R. | Method of making two-component nanospheres and their use as a low dielectric constant material for semiconductor devices |
| JP3519623B2 (ja) * | 1998-03-13 | 2004-04-19 | 株式会社東芝 | 記録媒体およびその製造方法 |
| EP1068149A4 (en) * | 1998-03-24 | 2009-10-21 | Silverbrook Res Pty Ltd | PROCESS FOR CONSTRUCTING MATERIAL MATERIALS WITH NANOTUBES |
| JPH11283629A (ja) * | 1998-03-27 | 1999-10-15 | Japan Storage Battery Co Ltd | 有機電解質電池 |
| US6352758B1 (en) * | 1998-05-04 | 2002-03-05 | 3M Innovative Properties Company | Patterned article having alternating hydrophilic and hydrophobic surface regions |
| US6426134B1 (en) | 1998-06-30 | 2002-07-30 | E. I. Du Pont De Nemours And Company | Single-wall carbon nanotube-polymer composites |
| US6277740B1 (en) * | 1998-08-14 | 2001-08-21 | Avery N. Goldstein | Integrated circuit trenched features and method of producing same |
| JP3049019B2 (ja) * | 1998-09-11 | 2000-06-05 | 双葉電子工業株式会社 | 単層カーボンナノチューブの皮膜を形成する方法及びその方法により皮膜を形成された単層カーボンナノチューブ |
| JP2000090489A (ja) * | 1998-09-16 | 2000-03-31 | Mitsubishi Chemicals Corp | 光メモリ素子 |
| US6630772B1 (en) * | 1998-09-21 | 2003-10-07 | Agere Systems Inc. | Device comprising carbon nanotube field emitter structure and process for forming device |
| US6264741B1 (en) | 1998-11-25 | 2001-07-24 | Sandia Corporation | Self-assembly of nanocomposite materials |
| JP3943272B2 (ja) * | 1999-01-18 | 2007-07-11 | 双葉電子工業株式会社 | カーボンナノチューブのフイルム化方法 |
| US6250984B1 (en) * | 1999-01-25 | 2001-06-26 | Agere Systems Guardian Corp. | Article comprising enhanced nanotube emitter structure and process for fabricating article |
| US6280697B1 (en) * | 1999-03-01 | 2001-08-28 | The University Of North Carolina-Chapel Hill | Nanotube-based high energy material and method |
| AUPQ065099A0 (en) * | 1999-05-28 | 1999-06-24 | Commonwealth Scientific And Industrial Research Organisation | Substrate-supported aligned carbon nanotube films |
| EP2239794A3 (en) * | 1999-07-02 | 2011-03-23 | President and Fellows of Harvard College | Nanoscopic wire-based devices, arrays, and methods of their manufacture |
| US6420092B1 (en) * | 1999-07-14 | 2002-07-16 | Cheng-Jer Yang | Low dielectric constant nanotube |
| MXPA02000576A (es) * | 1999-07-21 | 2002-08-30 | Hyperion Catalysis Int | Metodos para oxidar nanotubos de carbono de paredes multiples. |
| US6277318B1 (en) * | 1999-08-18 | 2001-08-21 | Agere Systems Guardian Corp. | Method for fabrication of patterned carbon nanotube films |
| AUPQ304199A0 (en) * | 1999-09-23 | 1999-10-21 | Commonwealth Scientific And Industrial Research Organisation | Patterned carbon nanotubes |
| CN101104514A (zh) * | 1999-10-27 | 2008-01-16 | 威廉马歇莱思大学 | 碳质毫微管的宏观有序集合体 |
| US7045087B2 (en) | 2000-03-28 | 2006-05-16 | The Board Of Regents For Oklahoma State University | Assembly of free-standing films using a layer-by-layer process |
| KR100487069B1 (ko) * | 2000-04-12 | 2005-05-03 | 일진나노텍 주식회사 | 새로운 물질로 이루어진 전극을 이용하는 수퍼 커패시터 및 그 제조 방법 |
| US6334939B1 (en) | 2000-06-15 | 2002-01-01 | The University Of North Carolina At Chapel Hill | Nanostructure-based high energy capacity material |
| US6908572B1 (en) * | 2000-07-17 | 2005-06-21 | University Of Kentucky Research Foundation | Mixing and dispersion of nanotubes by gas or vapor expansion |
| US6297592B1 (en) * | 2000-08-04 | 2001-10-02 | Lucent Technologies Inc. | Microwave vacuum tube device employing grid-modulated cold cathode source having nanotube emitters |
| US6553096B1 (en) * | 2000-10-06 | 2003-04-22 | The University Of North Carolina Chapel Hill | X-ray generating mechanism using electron field emission cathode |
| JP3991602B2 (ja) * | 2001-03-02 | 2007-10-17 | 富士ゼロックス株式会社 | カーボンナノチューブ構造体の製造方法、配線部材の製造方法および配線部材 |
| US6965199B2 (en) * | 2001-03-27 | 2005-11-15 | The University Of North Carolina At Chapel Hill | Coated electrode with enhanced electron emission and ignition characteristics |
| JP4207398B2 (ja) * | 2001-05-21 | 2009-01-14 | 富士ゼロックス株式会社 | カーボンナノチューブ構造体の配線の製造方法、並びに、カーボンナノチューブ構造体の配線およびそれを用いたカーボンナノチューブデバイス |
| US20030090190A1 (en) * | 2001-06-14 | 2003-05-15 | Hyperion Catalysis International, Inc. | Field emission devices using modified carbon nanotubes |
| US6787122B2 (en) * | 2001-06-18 | 2004-09-07 | The University Of North Carolina At Chapel Hill | Method of making nanotube-based material with enhanced electron field emission properties |
| US6878361B2 (en) * | 2001-07-10 | 2005-04-12 | Battelle Memorial Institute | Production of stable aqueous dispersions of carbon nanotubes |
| US6896864B2 (en) * | 2001-07-10 | 2005-05-24 | Battelle Memorial Institute | Spatial localization of dispersed single walled carbon nanotubes into useful structures |
| TW502395B (en) * | 2001-08-29 | 2002-09-11 | Ind Tech Res Inst | Manufacturing method for large-area carbon nano-tube field emission display in low cost |
| US7252749B2 (en) * | 2001-11-30 | 2007-08-07 | The University Of North Carolina At Chapel Hill | Deposition method for nanostructure materials |
| US6686308B2 (en) * | 2001-12-03 | 2004-02-03 | 3M Innovative Properties Company | Supported nanoparticle catalyst |
| US7147894B2 (en) * | 2002-03-25 | 2006-12-12 | The University Of North Carolina At Chapel Hill | Method for assembling nano objects |
-
2002
- 2002-03-25 US US10/103,803 patent/US7147894B2/en not_active Expired - Fee Related
-
2003
- 2003-03-03 KR KR10-2004-7015411A patent/KR20050009987A/ko not_active Ceased
- 2003-03-03 WO PCT/US2003/006345 patent/WO2003083128A2/en not_active Ceased
- 2003-03-03 JP JP2003580561A patent/JP2005521563A/ja active Pending
- 2003-03-03 AU AU2003219976A patent/AU2003219976A1/en not_active Abandoned
- 2003-03-03 CN CNB038118858A patent/CN100393427C/zh not_active Expired - Fee Related
- 2003-03-14 TW TW092105642A patent/TWI343831B/zh not_active IP Right Cessation
-
2006
- 2006-05-25 US US11/441,261 patent/US20080199626A1/en not_active Abandoned
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1618601A4 (en) * | 2003-03-21 | 2006-11-08 | Univ North Carolina | METHOD AND DEVICE FOR THE STRUCTURED DEPOSITION OF NANOSTRUCTURE-CONTAINING MATERIALS BY SELF-ORGANIZATION AND RELATED OBJECTS |
| JP2008504669A (ja) * | 2004-06-09 | 2008-02-14 | イムラ アメリカ インコーポレイテッド | 超高速パルスレーザ堆積を使用する電気化学デバイス作製方法。 |
| US9346673B2 (en) | 2004-06-23 | 2016-05-24 | Samsung Sdi Co., Ltd. | Electrode for fuel cell, membrane-electrode assembly for fuel cell comprising the same, fuel cell system comprising the same, and method for preparing the electrode |
| JP2008513318A (ja) * | 2004-06-23 | 2008-05-01 | ハイピリオン カタリシス インターナショナル インコーポレイテッド | 官能基化単層カーボンナノチューブ |
| US8017284B2 (en) | 2004-09-08 | 2011-09-13 | Samsung Sdi Co., Ltd. | Electrode for a fuel cell, and a membrane-electrode assembly and fuel cell system comprising the same |
| JP2006080083A (ja) * | 2004-09-08 | 2006-03-23 | Samsung Sdi Co Ltd | 燃料電池用電極,膜−電極アセンブリ,及び燃料電池システム |
| JP2006086125A (ja) * | 2004-09-14 | 2006-03-30 | Samsung Sdi Co Ltd | カーボンナノチューブの整列方法、及びそれを利用した電界放出素子の製造方法 |
| US8034400B2 (en) | 2004-11-01 | 2011-10-11 | Nanofiber A/S | Soft-lift off of organic nanofibers |
| US8007957B2 (en) | 2004-11-26 | 2011-08-30 | Samsung Sdi Co., Ltd. | Electrode for fuel cell, fuel cell system comprising the same, and method for preparing the same |
| US8057958B2 (en) | 2005-07-29 | 2011-11-15 | Samsung Sdi Co., Ltd. | Electrode for fuel cell, membrane-electrode assembly comprising same and fuel cell system comprising same |
| US9608221B2 (en) | 2009-10-15 | 2017-03-28 | Samsung Electronics Co., Ltd. | Solar cell having organic nanowires |
| EP3105175A4 (en) * | 2014-02-11 | 2017-09-27 | Wisconsin Alumni Research Foundation | Floating evaporative assembly of aligned carbon nanotubes |
| EP4023597A1 (en) * | 2014-02-11 | 2022-07-06 | Wisconsin Alumni Research Foundation | Film umfassend ausgerichtete kohlenstoffnanoröhren und verfahren zu dessen herstellung |
Also Published As
| Publication number | Publication date |
|---|---|
| US20080199626A1 (en) | 2008-08-21 |
| AU2003219976A8 (en) | 2003-10-13 |
| CN100393427C (zh) | 2008-06-11 |
| WO2003083128A3 (en) | 2004-04-08 |
| TWI343831B (en) | 2011-06-21 |
| US20030180472A1 (en) | 2003-09-25 |
| AU2003219976A1 (en) | 2003-10-13 |
| KR20050009987A (ko) | 2005-01-26 |
| CN1656264A (zh) | 2005-08-17 |
| US7147894B2 (en) | 2006-12-12 |
| TW200307574A (en) | 2003-12-16 |
| JP2005521563A (ja) | 2005-07-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7147894B2 (en) | Method for assembling nano objects | |
| US8002958B2 (en) | Deposition method for nanostructure materials | |
| TWI296609B (en) | Methods and apparatus for patterned deposition of nanostructure-containing materials by self-assembly and related articles | |
| CN100554138C (zh) | 碳纳米管器件及该器件的制造方法和碳纳米管转印体 | |
| US7014743B2 (en) | Methods for assembly and sorting of nanostructure-containing materials and related articles | |
| CN100490076C (zh) | 自组装方法、制造阴极的方法和沉积材料的装置 | |
| US7618300B2 (en) | Method of synthesizing small-diameter carbon nanotubes with electron field emission properties | |
| US9177745B2 (en) | Organic/inorganic composite comprising three-dimensional carbon nanotube networks, method for preparing the organic/inorganic composite and electronic device using the organic/inorganic composite | |
| JP2002264097A (ja) | カーボンナノチューブ構造体、およびその製造方法 | |
| CN100537052C (zh) | 用于组装和分选含纳米结构的材料的方法和相关制品 | |
| JP2003277029A (ja) | カーボンナノチューブ及びその製造方法 | |
| Hu | Fabrication of Vertically Aligned Carbon Nanotubes and Horizontal Nano-structures | |
| Xie et al. | Aligned and coiled carbon nanotubes by microwave chemical vapor deposition |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AK | Designated states |
Kind code of ref document: A2 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SC SD SE SG SK SL TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
| AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
| WWE | Wipo information: entry into national phase |
Ref document number: 1020047015411 Country of ref document: KR |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 2003580561 Country of ref document: JP |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 20038118858 Country of ref document: CN |
|
| WWP | Wipo information: published in national office |
Ref document number: 1020047015411 Country of ref document: KR |
|
| 122 | Ep: pct application non-entry in european phase |