WO2002063401A1 - Unite de commande de localisation et de suppression de vibrations - Google Patents
Unite de commande de localisation et de suppression de vibrations Download PDFInfo
- Publication number
- WO2002063401A1 WO2002063401A1 PCT/JP2002/000531 JP0200531W WO02063401A1 WO 2002063401 A1 WO2002063401 A1 WO 2002063401A1 JP 0200531 W JP0200531 W JP 0200531W WO 02063401 A1 WO02063401 A1 WO 02063401A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- command
- position command
- output
- target
- zero
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B5/00—Anti-hunting arrangements
- G05B5/01—Anti-hunting arrangements electric
Definitions
- the present invention relates to a positioning control device for positioning a motor by driving a load, and more particularly to a technique for suppressing low-frequency vibrations present in a load or a machine on which the load is placed.
- a servo control device described in “IEEJ Technical Meeting,” C-96-17, pp. 75-84, as shown in Fig. 3, has been proposed.
- 31 is an S standing command generator
- 32 is a metastable pre-filter
- 33 is a semi-closed feedback position control system
- 33a is from the position command of the feedback control system to the motor position.
- 33 b is the transfer function from the motor position to the load position.
- Natural oscillation angular frequency of the load in the feedback control system is omega a, if the speed pattern * M S-position command theta * M is the acceleration time and deceleration time as shown in FIG. 5 has equal trapezoid Is exemplified.
- t A is acceleration and deceleration time
- - a (t D t A) is uniform time.
- the vibration electrode omega a feed pack position control system 3 3, as can be seen from FIG. 3, the metastable type prefilter 3 2 transfer function
- the vibration suppression control is realized by canceling by the zero point of ⁇ and setting co an so as to satisfy any of the equations (2).
- Equation (2) Equation (2) must be strictly satisfied, otherwise a continuous oscillation will occur.
- the acceleration / deceleration time of the target position command ⁇ * ⁇ ⁇ changes by only 5%
- the position command ⁇ ** ⁇ of the feedback system continuously vibrates as shown in FIG. 7 described later.
- the critical stable pole of the metastable prefilter becomes an unstable pole due to an error due to discrete time.
- the pre-filter becomes unstable. For example, even if the sample time is only 100 s, the position command ⁇ ⁇ ⁇ ⁇ ⁇ ⁇ ** ⁇ of the feedback system becomes unstable ( diverges while oscillating) as shown in Fig. 8.
- the present invention solves this fundamental problem by setting the output of the pre-filter to zero when the position command of the feedback control system matches the target command, thereby setting the position command of the feedback control system to the target command.
- An object of the present invention is to provide a vibration suppression positioning control device capable of fixing a position and performing stable positioning in a short time.
- the vibration suppression positioning control device generates a position command when a differential value of a target position command that changes in a predetermined pattern is given, and inputs the position command to a feedback control system to load the load.
- a positioning control device for following a position command, an integrator for integrating a differential value of the target position command, a subtractor for subtracting an output of the integrator from the position command to output a position command deviation, and
- the vibration pole ⁇ of the feedback control system is obtained.
- a stable pre-filter that removes the same frequency component as the above, and the output of the stable pre-filter and the position command deviation are input, and the differential value of the target position command is zero.
- the vibration suppression positioning control device provides a target position command that changes in a predetermined pattern, generates a position command, inputs the position command to a feedback control system, and causes a load to follow the position command.
- the vibration pole ⁇ of the feedback control system is obtained.
- a stable pre-filter that removes the same frequency components as above, and the output of the stable pre-filter and the position command deviation are input. If the differential value of the target position command becomes non-zero from zero force, it is determined that the command is started.
- the differential value of the target position command changes from non-zero to zero, it is determined that the command has ended, and after the end of the command, 0 is output from when the position command deviation becomes 0 until the next command starts, Otherwise, it comprises a command fixing means for outputting the output of the stable pre-filter as it is, and a second integrator for integrating the output of the command fixing means and outputting the position command. .
- the target command signal is passed through the stable pre-filter, the natural vibration frequency component of the machine included in the target command signal is removed, and furthermore, after passing through the stable pre-filter.
- the command signal is stable and gentle. Further, since the command signal after passing through the stable type pre-filter is passed through the command fixing section, the final command signal applied to the feedback control system reaches the target position quickly. Therefore, there is a great effect that a stable positioning command with a short command fixing time can be obtained without exciting machine vibration.
- FIG. 1 is a block diagram showing Embodiment 1 of the present invention.
- FIG. 2 is a block diagram showing a second embodiment of the present invention.
- Fig. 3 shows the configuration of a conventional vibration suppression positioning control device.
- FIG. FIG. 4 is a system configuration diagram of the embodiment of the present invention.
- FIG. 5 is a diagram showing a time function of the S-shaped position command and the speed pattern of the command.
- Figure 6 is a t A is constant, shows the time function of the position command of the prior art when implementing the metastable type prefilter in a continuous system.
- FIG. 7 is a diagram showing a time function of a position command according to the related art when the meta-stable prefilter is realized by a continuous system in which t A is reduced by 5%.
- Figure 8 is a t A is constant, shows the time function of the position command of the prior art when implementing a discrete system the metastable type prefilter.
- Figure 9 is a t A is constant, shows the time function of the position command of the present invention when realizing the stable prefilter in a continuous system.
- FIG. 10 is a diagram showing a time function of the position command of the present invention when the stable pre-filter is realized by a continuous system in which t A is reduced by 5%.
- Figure 1 1 is a t A is constant, shows the time function of the position command of the present invention when realizing the stable prefilter in a discrete system.
- FIG. 1 and 2 are block diagrams showing Embodiments 1 and 2 of the present invention, respectively, and FIG. 4 is a configuration diagram of a system to which the present invention is applied.
- reference numeral 41 denotes a motor
- reference numeral 43 denotes a load
- reference numeral 42 denotes a force transmission mechanism for connecting the motor 41 and the load 43 to transmit torque
- reference numeral 44 denotes a machine base on which these are mounted.
- Reference numerals 4 and 5 denote supporting feet for supporting the machine base 4 4.
- the machine base 44 If the rigidity of the support feet 4 5 is low, the machine base 44 is likely to vibrate, and if the motor drives the load at high acceleration / deceleration, the driving force cycle is particularly close to the natural vibration cycle of the machine base 4 4 When the machine stand 4 4 is easy to vibrate.
- FIGS. 1 and 2 In order to suppress such vibration of the machine stand 44, the control systems of the first and second embodiments of the present invention are configured as shown in FIGS. 1 and 2, respectively.
- 5 is the feedback control system
- 5a is the stability term of the transfer function from the position command X *** of the feedback control system 5 to the machine displacement y
- 5b is the transfer function It is a stable term.
- ⁇ Is the natural vibration frequency of machine stand 4 4.
- the integrator 6 integrates the differential value V * of the target position command to obtain a target position command X *.
- the differentiator 8 calculates the target position command ⁇ * Then, the differential value v * of the target position command is obtained.
- the start and end of the target command are determined based on the differential value V * of the target position command.
- V * changes from zero to non-zero it is determined that the command has started, and when V * changes from non-zero to zero, it is determined that the command has ended.
- the switching switch is tilted to the B side and 0 is output. ** is output. That is, before the position command of the feedback control system reaches the target position, the signal V ** after passing through the stable pre-filter 1 is output, and after the position command of the feedback control system reaches the target position, The operation of outputting 0 is taken.
- the differential value of the target position command to pass through the stable type pre-filter 1, the natural vibration frequency ⁇ of the machine included in the differential value of the target position command. Since the components are removed, the command signal after passing through the stable pre-filter 1 has a stable stability and does not excite the machine vibration.
- the final command signal applied to the feedback control system can quickly reach the target position. Thus, without exciting the vibration of the machine, A stable positioning command with a short command fixing time can be obtained.
- the time response is significantly improved as compared with the conventional technology.
- the position command X ** after passing through the stable pre-filter F 2 (s) has overshot
- the position command X *** of the feedback control system which is the output of the command fixing unit 2
- the command fixation time is very short.
- the target command signal is passed through the stable pre-filter, the natural vibration frequency component of the machine included in the target command signal is removed, and the command signal after passing through the stable pre-filter is stable. It has become gentle. Also, since the command signal after passing through the stable pre-filter is passed through the command fixing unit, the final command signal applied to the feedback control system reaches the target position quickly. Therefore, there is a great effect that the command fixing time is short and a stable positioning command can be obtained without exciting the machine vibration.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Control Of Position Or Direction (AREA)
- Feedback Control In General (AREA)
- Control Of Electric Motors In General (AREA)
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020037010392A KR100664468B1 (ko) | 2001-02-07 | 2002-01-24 | 진동 억제 위치 결정 제어 장치 |
DE60228819T DE60228819D1 (de) | 2001-02-07 | 2002-01-24 | Vibrationsunterdrückende positionsregelung |
US10/467,086 US6801010B2 (en) | 2001-02-07 | 2002-01-24 | Vibration suppression positioning controller |
EP02716376A EP1359480B1 (en) | 2001-02-07 | 2002-01-24 | Vibration suppression positioning controller |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001-30290 | 2001-02-07 | ||
JP2001030290A JP3815545B2 (ja) | 2001-02-07 | 2001-02-07 | 振動抑制位置決め制御装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2002063401A1 true WO2002063401A1 (fr) | 2002-08-15 |
Family
ID=18894526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2002/000531 WO2002063401A1 (fr) | 2001-02-07 | 2002-01-24 | Unite de commande de localisation et de suppression de vibrations |
Country Status (7)
Country | Link |
---|---|
US (1) | US6801010B2 (ja) |
EP (1) | EP1359480B1 (ja) |
JP (1) | JP3815545B2 (ja) |
KR (1) | KR100664468B1 (ja) |
DE (1) | DE60228819D1 (ja) |
TW (1) | TW513627B (ja) |
WO (1) | WO2002063401A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7778716B2 (en) * | 2005-04-08 | 2010-08-17 | Mitsubishi Denki Kabushiki Kaisha | Position command generating device |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3946046B2 (ja) * | 2002-01-15 | 2007-07-18 | 富士機械製造株式会社 | 機械の制振制御方法および制振制御型機械 |
AU2003218101A1 (en) * | 2002-03-13 | 2003-09-29 | Georgia Tech Research Corporation | Shaping and smooth baseline function command generator |
JP4228389B2 (ja) * | 2003-06-30 | 2009-02-25 | 株式会社安川電機 | 位置決め制御装置 |
JP4926559B2 (ja) * | 2006-06-26 | 2012-05-09 | 国立大学法人長岡技術科学大学 | 位置制御装置、位置制御方法、ロボット制御装置およびロボット制御方法 |
US8235351B1 (en) * | 2009-08-27 | 2012-08-07 | Lockheed Martin Corporation | Shock load isolation mounting |
JP6818523B2 (ja) * | 2016-11-17 | 2021-01-20 | キヤノン株式会社 | インプリント装置及び物品の製造方法 |
JP6863818B2 (ja) * | 2017-05-01 | 2021-04-21 | 芝浦機械株式会社 | 位置制御装置 |
JP7013836B2 (ja) * | 2017-12-15 | 2022-02-01 | オムロン株式会社 | 制御装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5721477A (en) * | 1997-02-11 | 1998-02-24 | The University Of Manitoba | Nonlinear proportional integral controller |
JP2000035629A (ja) * | 1998-07-01 | 2000-02-02 | Eastman Kodak Co | 硬調ハロゲン化銀写真材料及びその処理方法 |
JP2000284805A (ja) * | 1999-03-31 | 2000-10-13 | Shibaura Mechatronics Corp | フィードバック制御装置 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3448991B2 (ja) * | 1994-11-29 | 2003-09-22 | 株式会社ニコン | ステージ移動制御装置、投影型露光装置およびステージ駆動方法ならびに露光方法。 |
JP3815809B2 (ja) * | 1995-08-07 | 2006-08-30 | 富士通株式会社 | 光学的記憶装置 |
US6128552A (en) * | 1996-11-08 | 2000-10-03 | Canon Kabushiki Kaisha | Anti-vibration apparatus and method |
KR100237306B1 (ko) * | 1997-03-25 | 2000-01-15 | 윤종용 | 2관성 공진계의 진동 억제방법 및 장치 |
JP4109747B2 (ja) * | 1998-05-07 | 2008-07-02 | キヤノン株式会社 | アクティブ除振装置および露光装置 |
JP2000274482A (ja) * | 1999-01-18 | 2000-10-03 | Canon Inc | 能動的除振装置、露光装置及び方法並びにデバイス製造方法 |
JP3430967B2 (ja) | 1999-04-22 | 2003-07-28 | 三菱電機株式会社 | サーボ制御装置 |
US6140791A (en) * | 1999-06-10 | 2000-10-31 | Samsung Information Systems America | Method and apparatus for controlling the acceleration trajectory of positioning a high-velocity transducer and for reducing the harmonic content thereof |
-
2001
- 2001-02-07 JP JP2001030290A patent/JP3815545B2/ja not_active Expired - Fee Related
-
2002
- 2002-01-24 US US10/467,086 patent/US6801010B2/en not_active Expired - Lifetime
- 2002-01-24 KR KR1020037010392A patent/KR100664468B1/ko not_active IP Right Cessation
- 2002-01-24 DE DE60228819T patent/DE60228819D1/de not_active Expired - Lifetime
- 2002-01-24 WO PCT/JP2002/000531 patent/WO2002063401A1/ja active IP Right Grant
- 2002-01-24 EP EP02716376A patent/EP1359480B1/en not_active Expired - Lifetime
- 2002-02-01 TW TW091101791A patent/TW513627B/zh not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5721477A (en) * | 1997-02-11 | 1998-02-24 | The University Of Manitoba | Nonlinear proportional integral controller |
JP2000035629A (ja) * | 1998-07-01 | 2000-02-02 | Eastman Kodak Co | 硬調ハロゲン化銀写真材料及びその処理方法 |
JP2000284805A (ja) * | 1999-03-31 | 2000-10-13 | Shibaura Mechatronics Corp | フィードバック制御装置 |
Non-Patent Citations (2)
Title |
---|
MAKOTO IWASAKI ET AL.: "Shindo yokusei koka o koryoshita robot arm no saiteki ichi shirei sekkeiho", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRICAL ENGINEERS OF JAPAN. C, vol. 117-C, no. 1, 20 December 1996 (1996-12-20), pages 50 - 56, XP002952459 * |
See also references of EP1359480A4 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7778716B2 (en) * | 2005-04-08 | 2010-08-17 | Mitsubishi Denki Kabushiki Kaisha | Position command generating device |
Also Published As
Publication number | Publication date |
---|---|
JP3815545B2 (ja) | 2006-08-30 |
US20040061609A1 (en) | 2004-04-01 |
US6801010B2 (en) | 2004-10-05 |
EP1359480B1 (en) | 2008-09-10 |
DE60228819D1 (de) | 2008-10-23 |
KR100664468B1 (ko) | 2007-01-04 |
KR20030075181A (ko) | 2003-09-22 |
EP1359480A1 (en) | 2003-11-05 |
JP2002229602A (ja) | 2002-08-16 |
TW513627B (en) | 2002-12-11 |
EP1359480A4 (en) | 2006-03-08 |
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