WO2000059275A1 - Procede et systeme de traitement d'un lamine recouvert de metal pour carte a circuit imprime - Google Patents

Procede et systeme de traitement d'un lamine recouvert de metal pour carte a circuit imprime Download PDF

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Publication number
WO2000059275A1
WO2000059275A1 PCT/JP1999/006461 JP9906461W WO0059275A1 WO 2000059275 A1 WO2000059275 A1 WO 2000059275A1 JP 9906461 W JP9906461 W JP 9906461W WO 0059275 A1 WO0059275 A1 WO 0059275A1
Authority
WO
WIPO (PCT)
Prior art keywords
strip
laminated
resist film
band
roll
Prior art date
Application number
PCT/JP1999/006461
Other languages
English (en)
Japanese (ja)
Inventor
Yasufumi Fukumoto
Shuji Kitagawa
Keita Kono
Tetsuya Oguchi
Hiroyuki Ishiguro
Takeshi Kitamura
Original Assignee
Matsushita Electric Works, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP11083467A external-priority patent/JP2000271942A/ja
Priority claimed from JP14734699A external-priority patent/JP2000340927A/ja
Priority claimed from JP21142399A external-priority patent/JP2001031305A/ja
Application filed by Matsushita Electric Works, Ltd. filed Critical Matsushita Electric Works, Ltd.
Publication of WO2000059275A1 publication Critical patent/WO2000059275A1/fr

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/061—Etching masks
    • H05K3/064—Photoresists
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1545—Continuous processing, i.e. involving rolls moving a band-like or solid carrier along a continuous production path
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/15—Position of the PCB during processing
    • H05K2203/1572—Processing both sides of a PCB by the same process; Providing a similar arrangement of components on both sides; Making interlayer connections from two sides
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H05K3/068—Apparatus for etching printed circuits

Definitions

  • the present invention relates to a method of treating a metal foil-clad laminate for forming a printed circuit board and a system thereof.
  • the present invention relates to a method and a system for treating a metal foil-clad laminate for forming a printed circuit board, and more particularly, to a laminate belt having a metal foil on an insulating substrate without using another conveyor.
  • the present invention relates to a method and a system for continuously treating this laminated strip while directly transporting the laminate.
  • the laminate is cut into a plurality of individual sheets, and the individual sheets are passed through a processing section using a roller conveyer or the like.
  • a processing section using a roller conveyer or the like.
  • To the required processing such as laminating a photosensitive resist film on each sheet, exposing the resist film, forming a circuit by developing and etching the exposed resist film, and oxidizing the circuit.
  • Forming a protective film has been performed.
  • some of the sheets may bend or warp when conveyed on the conveyor, which makes it impossible to perform the required processing on each sheet accurately, reducing productivity. There was a problem. This means that the thickness is 0.04 mn! This is remarkable when a strip lint circuit board is formed using a thin laminated sheet of about 0.06 mm. Disclosure of the invention
  • the present invention has been made to overcome the above problems, and a main object of the present invention is to form a printed circuit board while directly and continuously transporting a metal foil-clad laminate. It is an object of the present invention to provide a processing method and a system capable of giving a highly accurate processing to a laminated plate strip.
  • the processing method according to the present invention uses a roll 11 1, 11 ′ of a continuous metal-foil-laminated laminated plate strip 1 provided with a metal foil on an insulating substrate, and unwinds this roll to obtain a laminated strip. While transporting the body through the processing section 60, 90, 110, 120, 130, tension is applied to the laminated strip to extend straight through the processing section, and pass through the processing section. The continuous processing is performed on the laminated sheet strip being transported. This process is at least one of the following processes (a) to (d).
  • the photosensitive resist film 5 is developed to remove the uncured portion, and the portion of the metal foil that is not covered by the cured portion is etched to form a metal foil circuit pattern on the insulating substrate. ;
  • the tension is applied to the metal foil-clad laminate so that the laminate can be extended straight through the processing section, so that the necessary processing can be continuously and accurately performed on the metal-clad laminate.
  • the lint circuit board productivity can be improved.
  • the metal foil-clad laminate strip 1 is a double-sided metal foil-clad laminate strip having metal foil on both sides, and necessary processing is simultaneously performed on both sides. This is particularly useful when providing a printed circuit board provided with circuits on both sides used as an inner layer of a multilayer laminated circuit board.
  • a first and second unwinder 12 respectively holding separate unfinished rolls 11 and 11 'of the first and second laminated strips, and a laminated strip It is preferred to use first and second winders 42 which can wind 1 onto first and second separate finishing rolls 41, 41 '.
  • the second unfinished roll 1 1 ′ Of the second unfinished roll 1 1 ′ is connected to the rear end of the laminated strip 1 unwound from the first unfinished roll 11 1. Conveyed continuously through the processing unit 60.
  • lamination from the first unfinished roll 11 1 is performed.
  • the strip is cut from the laminated strip from the second unfinished roll 11 ', and finally, the laminated strip from the second unfinished roll 11' is passed through the processing section.
  • a second finishing roll 4 1 ′ In this way, the lamination strips are transferred to the corresponding number of finishing rolls 41, 4 1 ′ while continuously passing the laminate strip from the plurality of unfinished rolls 11, 11 ′.
  • the band can be wound up, and individual processing can be performed efficiently.
  • the system according to the present invention includes a feeder 10 for supplying the laminated plate 1 from its rolls 11 and 11 'and a collector 40 for collecting the laminated plate 1.
  • the collector and the feeder 10 are provided.
  • a pair of feed rollers are spaced apart along this transport path, and the feed rollers are in direct contact with and apply tension to the laminated strip, so that the laminated strip is aligned straight between the feed rollers.
  • a processing unit is provided between the feed rollers to continuously apply at least one of the processes (a) to (d) to the laminated plate. This makes it possible to continuously and accurately perform a desired process on the laminated strip in producing a printed circuit board.
  • the system is provided with an edge finishing section 34 on the upstream side of the processing section to form a base material of the laminated strip by applying a smooth finish to both edges of the laminated strip.
  • a smooth finish to both edges of the laminated strip.
  • the laminated strips may be rolled into small diameters or winding diameters, or the Lonore itself may collide with obstacles during transport within the factory, Stress may be applied to the side edges of the strip to generate small cracks, leaving a residue on the end face. If such residue is left on the edge of the laminated strip, it will contaminate the transport path of the system and the surface of the laminated strip to be processed thereafter, thereby reducing the quality of the final circuit board product. It will lower it.
  • the provision of the edge finish can eliminate such a bad V and a residue that results, and can improve the manufacturing process of a high-quality circuit board.
  • the feeder 110 is provided on a movable stand 17 which is movable in a direction orthogonal to the transport path, and the position of the lateral edge of the laminated plate band is detected to indicate the position. It is preferable to provide an edge sensor 30 that outputs the following.
  • a controller is provided that adjusts the lateral position of the laminated plate band being conveyed toward the processing unit 60 based on the position signal, whereby the laminated plate band is always aligned along the conveying path to be correct. It can be placed at a position and can perform stable processing.
  • the processing section for laminating the photosensitive resist film 5 on the laminate strip 1 includes a film supply 7 for continuously supplying the resist film onto the laminate strip, and a resist film which is heated and heated. There is provided a pair of press rollers 64 that press tightly against the body 1. A pair of preheating rollers 63 is provided on the conveying path immediately upstream of the press roller 64 for laminating the resist film by heating and pressing the laminate film to the lamination plate strip 1, and the preheating roller 63 is provided with the preheating roller 63.
  • the laminate is preheated by direct contact with the strip.
  • a cooling means 67 is provided in a transport path immediately downstream of the press roller 64 to cool the laminated plate strip together with the photosensitive resist film superposed thereon.
  • Pre-heat treatment is useful for improving the adhesion between the resist film and the laminate, and cooling the combination of the resist film and the laminate is undesirable because it adversely affects subsequent circuit pattern processing. Excessive chemical reactions on the resist film It is useful to prevent. Therefore, the resist film can be tightly adhered to the laminated band, and a combined body in which the resist film and the laminated band are closely bonded can be obtained, and highly reliable circuit pattern processing can be performed.
  • a pair of post-heater rollers 65 are provided in the conveyance path between the press roller 64 and the cooling means 67, and this is brought into direct contact with the resist film on the laminated plate strip to remove the resist film. By heating, the adhesiveness of the resist film to the laminated strip can be increased.
  • the first and second exposure units are provided immediately before and after the exposure unit.
  • a second dancer roller set 7 OA, 8 OA will be set up.
  • the first and second dancer roller sets can apply a uniform tension to the laminated band passing through the exposure unit, and expose the laminated band at a speed different from the transport speed before and after the exposure unit. Section.
  • the exposure unit includes a frame 101 that holds a photomask 103, a light source 104 that irradiates the resist film with light through the photomask, and a pair of elevating rollers 95 that are separated along the transport path. Is preferably provided.
  • the elevating rollers 95 extend over the frame 101 to stretch the laminated sheet strip 1 linearly between the elevating rollers in close proximity to the photomask 103, and the elevating rollers 95 are provided inside the frame.
  • the photomask is controlled so that a part of the laminated plate band can be freely moved toward and away from the photomask. This allows the laminate to be kept away from the photomask, while providing sufficient space for photomask replacement and cleaning.
  • the feeder 10 is preferably provided with two unwinders 12 for unwinding the laminated plate strip 1 from the respective rolls 11 and 11 'to the transport path, and one roll is composed of a laminated plate.
  • Roll in use 11 that continuously pulls out the strip to the transport path, and the other rolls are joined together at the front end of the stack of strips next to the rear end of the stack of used rolls.
  • Replenishment roll 1 1 ′ The feeder 10 has a joining table 26 for releasably holding the laminated strip at a position near the upstream end of the transport path, and a replenishing roll 11 'for releasing all the ends of the laminated strip. And a drive roller 23 that engages with the laminated plate band at the downstream side of the joining table 26 and pulls out the roll from the roll.
  • a dancer roller set 70 is provided immediately downstream of the drive roller 23, and the laminated plate band is transported at different speeds between the downstream side and the upstream side before and after the dancer roller set. be able to.
  • the drive roller 23 engages with the laminated strip, and when the rear end of the laminated strip 1 unwound from the roller 11 in use reaches the joining table 26, the driving roller 23 Stopping the unwinding and the transfer beyond the set of dancer openings, and at this time the dancer roller set 70 continuously transfers the laminated plate band to the collector 40 side and unwinds from the roll 11 in use. This allows the rear end of the laminated strip 1 to be joined to the front end of the laminated strip from the replenishment roll 11 '. In this way, the in-use roll 11 1 force ⁇ the unwound laminate strip can be successfully joined to the replenishment roll 11 1 'force laminate strip, and the joined strips can be continuously connected. Through the processing unit to perform the continuous processing here.
  • the collector 40 also preferably has two winders 42 for winding the laminate strip 1 around the respective axes 43.
  • Each of the winders 42 has a function of selectively driving / stopping the rotation of the shaft and a function of applying a uniform tension to the laminated plate band wound on the shaft.
  • a switching table 56 is provided near the downstream end of the transport path to freely hold the front end of the laminated strip and the rear end of the lead strip 3 reaching the shaft 43 to lead the laminated strip 1.
  • the collector 40 further includes a holding table 59 for holding the rear end of the lead strip 3 releasably, and a switching table 56. And a pressing roller 55 that can be engaged with the laminated strip 1 on the upstream side.
  • a dancer roller ⁇ 70 is provided between the pressing roller 55 and the processing unit 60, and the dancer roller set 70 enables the laminated strip to be transported at different speeds before and after the processing unit 60. .
  • the pressing roller 5 5 is interlocked with the winding machine 4 2 and engages with the laminate band when the start end of the laminate band 1 reaches the switching table 56 to stop the conveyance of the laminate band 1.
  • the take-up device 42 is stopped, and the laminated plate band continuously conveyed toward the pressing roller 55 is received by the dancer roller set 70, and the laminated plate band 1 is joined to the lead band 3. Can be matched. In this way, the laminated strips conveyed through the processing section are wound up on separate rolls, so that the rolls can be easily carried in later processing steps.
  • the system comprises four independent subsystems, a first, a second, a third, and a fourth, each subsystem comprising a feeder, a collector, a feed roller, and a processing system. It has a unit.
  • the processing section of the first subsystem is the laminating section.
  • the processing section of the second subsystem is an exposure section.
  • the processing section of the third subsystem is a development and etching section, where the photosensitive resist film is developed to remove the uncured portion, and the metal foil portion is etched on the base material if it is not covered with the cured portion.
  • a metal foil circuit pattern is formed on the substrate.
  • the processing unit of the fourth subsystem is a surface processing unit, which performs surface processing on the circuit pattern and forms a protective film thereon.
  • the above four processing units may be arranged continuously between the feeder and the collector.
  • the laminated board strip 1 on which a plurality of circuit patterns 160 are formed is finally cut into individual circuit boards 220 using a cutting device.
  • the metal foil-clad laminate strip 1 is provided with position marks 161, which are arranged at regular intervals along the length of the laminate strip.
  • the cutting device includes a second feeder 170 that supplies the laminated plate strip on which the circuit pattern is formed from the rolls 171 along the second transport path, and a second feeder 170 along the second transport path.
  • a pair of second feed rollers 191, 213 arranged side by side is provided.
  • the second outlet is By directly contacting and applying tension to the laminated strip, the laminated strip extends linearly between the second feed rollers.
  • One of the pair of second feed rollers is a drive roller 213 for selectively driving and stopping the laminated plate band.
  • a cutter 2 12 is provided on the downstream side of the second feed roller, and this cutter cuts the laminated plate strip 1 into circuit boards 220 on which circuit patterns are individually formed.
  • a position detector 2 16 is provided between the pair of second feed rollers, and the position detector detects a position mark 161, and generates a position signal indicating the position mark.
  • a controller 200 is connected to the driving roller 2 13, the position detector 2 16, and the power unit 2 12 to control them.
  • the laminate is conveyed forward by a predetermined step to stop the laminated strip, and the cutter 2 12 is operated to cut out one circuit board 220 from the laminated strip 1. In this way, the laminated board strip can be cut accurately into a plurality of circuit boards while being transported from the rolls.
  • FIG. 1 shows a unit for laminating a metal foil-clad laminate used in the system of the present invention.
  • Fig. 2 shows a feeder used for the above-mentioned cutout.
  • FIG. 3 shows the collector used for the same unit.
  • Fig. 4 ⁇ — 4F is an explanatory diagram of the operation of the feeder 1 of the above.
  • FIG. 5 shows the connection between the metal foil-clad laminate and the lead band.
  • FIG. 6 is a cross-sectional view showing an edge sensor used in the above-mentioned system for detecting a horizontal edge of a metal foil-clad laminate.
  • FIG. 7-10 is a cross-sectional view showing various edge treatments performed on a metal foil-clad laminate strip.
  • FIG. 11A—11F is an operation explanatory diagram of a feeder used for the unit of the above.
  • FIG. 12 shows a unit for performing an exposure process on a metal foil-clad laminate.
  • FIGS. 13A-13C are explanatory diagrams of operations related to the above exposure processing.
  • FIG. 14 shows a unit for developing and etching a metal foil-clad laminate.
  • FIG. 15 shows a unit for performing a process of forming a protective film on a metal foil-clad laminate strip.
  • FIG. 16 shows a single unit according to another embodiment of the present invention in which various treatments are continuously performed on the metal foil-clad laminate.
  • FIG. 17 shows a cutting device used in the system of the present invention.
  • FIG. 18 is a plan view showing a metal foil-clad laminate strip on which position marks are formed.
  • FIG. 19 is an explanatory view showing position adjustment by the cutting device of the above. BEST MODE FOR CARRYING OUT THE INVENTION
  • the present invention provides a method and system for treating a metal foil clad laminate strip in forming a printed circuit board, particularly a circuit board used as an inner layer in a multilayer laminate structure.
  • the laminated strip is a double-sided laminated board provided with metal foil on both sides, and is provided with an electrical insulator, for example, a metal foil on both sides of a 0.2 mm thick resin-impregnated fibrous sheet, for example, a It has copper foil.
  • an epoxy resin, a phenol resin, a polyphenylene ether resin, and a polyimide resin are used.
  • the fibrous sheet for example, a woven or nonwoven fabric of glass fiber, aramid fiber, polyester fiber, or nylon fiber, or kraft paper or linter paper is used.
  • This system mainly consists of four sub-systems, namely, a unit.Laminate unit for laminating a photosensitive resist film on both sides of a laminated plate strip, and exposing a resist film through a photomask.
  • a developing unit for developing a resist pattern, developing a resist film, removing an uncured portion, and etching a metal foil of a portion not covered with the cured portion to form a circuit pattern; and Surface treatment to form a protective film on the circuit pattern by surface treatment Unit.
  • FIG. 1 shows a laminate unit constructed according to a preferred embodiment of the present invention.
  • the laminated strip 1 is prepared as a roll together with the protective paper 2, is mounted on a feeder 10, and is conveyed from here to a collector 40 via a processing section, that is, a laminating section 60.
  • the photosensitive resist film 5 is laminated on both sides of the laminate strip 1 to cover the copper foil layer.
  • a UV-curable resist film for example, “Fotech” (trade name, manufactured by Hitachi Chemical Co., Ltd.) is used.
  • the resist film 5 is prepared as a roll 7 together with the protective sheet 6, and is unwound from both sides of the laminated strip 1.
  • the protective sheet 6 is peeled off from the film 5 and wound on a roll 8.
  • the feeder 10 is provided with a pair of unwinders 12 each equipped with a roll 11 of the laminated strip 1.
  • Each unwinder 12 is composed of a shaft 13 of Loh Nore 11 and a powder clutch 15 connected thereto, and the powder clutch acts as a brake and is uniformly applied to the laminated strip unwound from the roll. High tension.
  • the shaft 13 is provided with an expandable sleeve to detachably hold the roll 11 around the shaft.
  • the protective paper 2 peeled off from the laura 1 1 is wound on paper rolls 2 1 1.
  • These members are mounted on a stand 17, and the stand is movably supported by a fixed base 18, so that the roll 11 can move in a direction perpendicular to the transport direction toward the laminating section 60 of the laminate band 1. .
  • One of the rolls is used as a roll in use to transport the laminated sheet 1, and the other roll 1 1 ′ is joined to the previous strip 1 to make another strip continuous.
  • the laminating part connects the strips
  • Feeders 110 include drive rollers that are rotated by motors 24 in a controlled manner. 23 and a pressing roller 25 are provided, and the pressing roller 25 presses the laminated plate strip 1 against the driving roller 23 to convey the unrolled strip 1 to the laminating part 60. .
  • the belt 1 unwound from one of the rolls extends horizontally toward the drive roller 23 via the end roller 19. Between the end roller 19 and the drive roller 23, a coupling table 26 provided with clamps 27, 28, an edge sensor 30, and an edge finishing section 34 are provided. These operations will be described later.
  • a first set of dancer rollers that is, a first accumulator 70
  • a first accumulator 70 is provided in a transport path between the drive roller 23 and the laminating section 60, and thereby, a feeder for replacing the roll 11 is provided. Even when the supply of the laminated strip 1 from 10 is interrupted, the strip can be continuously supplied to the laminating section 60.
  • the accumulator 70 is composed of a pair of fixed feed rollers 71, a fixed pulley 73, and a pair of movable pulleys 74. The movable pulleys move up and down along the vertical rail, respectively, so that the laminating section 60 is moved. The difference between the transport speed passing through the feeder 10 and the transport speed passing through the feeder 10 is absorbed.
  • a second dancer roller set that is, an accumulator 80 is provided between the laminating section 60 and the collector 40.
  • the second accumulator 80 has the same configuration as the first accumulator 70, and includes a pair of fixed feed rollers 81, a fixed pulley 83, and a pair of movable pulleys 84, each of which corresponds to a movable pulley. It is supported by the rail and moves up and down along it.
  • the laminating section 60 is defined between the first and second accumulators 70 and 80, and the strip 1 extends in a straight line between the feed rollers 71 and 81.
  • the laminating section 60 is provided with a cleaning roller set 61, of which the adhesive roller comes into direct contact with the laminated plate strip 1, so that the resist film 5 is laminated to the strip 1 before laminating. Remove foreign bodies on the body surface.
  • a pair of preheating rollers 63 is provided, which directly contact the strip 1, and before the resist film 5 is laminated on the strip 1, the strip is heated. To preheat.
  • a pair of press rollers 64 and a pair of after-heat rollers 65 are provided in the transport path, and these rollers come into direct contact with the band and are driven by a common motor 66 to move the band 1 to a predetermined constant.
  • the resist film 5 unwound from the individual rolls 7 advances to press rollers 64, where it is pressed against both sides of the band 1.
  • the post-heat roller 65 heats the united product of the resist film 5 and the band 1 to bond the resist film 5 to the band 1 smoothly and uniformly.
  • the resist film 5 itself may be separately heated.
  • the band 1 thus bonded with the resist film 5 passes through a cooling zone defined between the cooling jackets 67 and is sufficiently cooled here to prevent an undesirable thermal reaction from being caused. Otherwise, the resist film 5 will be heated for a long time, and the resist film 5 will be at least partially cured, and the cured portion will be subjected to a subsequent circuit pattern forming process. In some cases, the desired circuit pattern cannot be formed on the band 1 due to the fact that it cannot be easily removed.
  • the collector 40 is provided with a pair of winders 42 in the same manner as the feeder 10 and is mounted with the rolls 41 of the laminated plate strip 1 taken in respectively.
  • Each of the winders 42 includes a shaft 43 around which the laminated plate band 1 is wound, and a gear motor, and selectively rotates or stops the shaft 43.
  • a powder clutch 45 which is a continuously variable transmission mechanism, is provided between the shaft 43 and the motor 46, and applies a constant tension to the laminated strip wound around the shaft.
  • the shaft 43 is provided with an expandable sleeve around which the roll 41 is detachably held. In the case of winding on a roll, the protective paper 2 is supplied from the roll 51 to the surface of the band 1 respectively.
  • the collector 40 is provided with a pressing roller 55, which is releasably engaged with the band 1 and presses the band against the guide roller 53, whereby the conveyance of the band 1 from the laminating section 60 and the conveyance of the band 1 are performed. Shut down selectively.
  • the band 1 having passed through the pressing roller 55 reaches one shaft 43 via the end roller 49 and is wound around the roller 41 in use. Between the end roll 49 and the pressing roller 55, there is provided a switching table 56 provided with clamps 57, 58. This is collected in step 41, and the detailed operation will be described later. Operation of feeder 10
  • FIGS. 4A-4F The details of unwinding the band 1 from the individual rolls 11 and passing through the laminating section 60 as a single band will be described with reference to FIGS. 4A-4F.
  • a controller (not shown) alerts the operator. Give and prepare to join the replenishing roll 1 1 ′ to the rear end of the band 1 unwound from the roll 11 in use.
  • the controller automatically or manually lowers the rotation speed of the drive roller 23 to reduce the transport speed of the band 1, and moves the unwound band from the position of FIG. 4B to the position of FIG. 4C. Gently move the rear end of 1 onto the binding table 26.
  • the movable pulley 74 of the accumulator 70 moves upward to convey the band 1 continuously through the laminating section 60 at a constant speed.
  • FIG. 4C when the rear end of the band 1 advances directly below the clamp 28, the driving roller 23 is stopped, and the clamp 28 is pressed against the table 26 to move the band 1 here. To be kept.
  • FIG. 4D the lead strip 3 from the replenishing roll 1 1 ′ is pulled out onto the table 26 and is held by the clamp 27 pressed against the table 26 to remove the lead strip 3. Attach to the back end of band 1.
  • the lead strip 3 is made of, for example, polytetrafluoroethylene, and as shown in FIG.
  • the safety limit sensor 7 8 is located sufficiently above the upper limit sensor 7 6, for example, if the band 1 cannot be connected within a predetermined time, the band 7 4 When sensor 78 is reached, stop the entire unit.
  • These sensors 76, 77, 78 are coupled to a controller and drive roller 23, motor 15 of feeder 10, so as to pass the laminating section 60 through the strip at a substantially constant speed. , And the rotation speed of the motor 45 of the collector 40 is adjusted.
  • the feeder 10 is provided with a pair of holding tables 29 to hold the front end of the lead strip 3 pulled out from a new roll mounted on the shaft 13 and to carry the current feed. Prepare to connect immediately to the rear end of the inner band 1. Operation of collector 40
  • FIG. 11A shows a normal state, in which the movable pulley 84 of the second accumulator 80 is maintained near the upper limit position defined by the upper limit sensor 86 so that the motor 4 is wound around the belt 1. 5 is controlled.
  • the controller issues a warning that the seam has come, and presses the pressing roller 55 to the guide roller 55. Press strongly to 3, apply brake to motor 45, and stop supply of band 1 to roll 41.
  • FIG. 11A shows a normal state, in which the movable pulley 84 of the second accumulator 80 is maintained near the upper limit position defined by the upper limit sensor 86 so that the motor 4 is wound around the belt 1. 5 is controlled.
  • the controller issues a warning that the seam has come, and presses the pressing roller 55 to the guide roller 55. Press strongly to 3, apply brake to motor 45, and stop supply of band 1 to roll 41.
  • FIG. 11A shows a normal state, in which the movable pulley 84 of the second accumulator 80 is maintained near the upper limit position defined by the upper limit
  • the accumulator 80 accommodates the strip 1 continuously supplied through the laminating section 60 by lowering the pulley 84.
  • the band is cut at the joining portion, and the rear end of the band 1 extending from the take-up roll 41 is held on the holding table 59 to collect the collector. Ready to be removed from 40.
  • the empty roll 4 1 ′ that is, the lead band 3 extending from the shaft 43 is switched upward from the holding table 59 through the end roller 49. It is pulled out to above 56, where it is held together with the rest of the band 1 by the clamps 57, 58 and is joined to the remaining band 1 by a patch.
  • the pressing roller 55 keeps stopping the band, and the band body 84 continues to descend, so that the band continuously conveyed from the laminating section 60 is stored in the accumulator 80. Thereafter, as shown in FIG. 11E, the clamps 57 and 58 are released. Thereafter, as shown in FIG. 11F, the pressing roller 55 is released, and the motor 46 winds the belt 1 around the roll 41 ′ at a relatively high speed until the pulley 84 moves to the upper limit. Next, the motor 46 is driven at a low speed so as to synchronize with the transport speed of the band 1 passing through the laminating section, and keeps the band 84 near the upper limit position.
  • the strip 1 continuously supplied from the plurality of rolls 1 1 can be collected into the corresponding number of rolls 41, and the strip 1 connected therebetween is continuously passed through the laminating section 60. Can be processed properly.
  • the controller stops winding the band on the roll. If the pulley 84 exceeds the lower limit sensor 87 during operation in Fig. 11B—11E, The controller stops all the units and stops the conveyance of the band passing through the laminating section 60.
  • the edge sensor 30 provided in the feeder 10 is a position sensor, detects the position of the lateral edge of the strip 1 conveyed toward the laminating section 60, and detects the position in the direction orthogonal to the correct conveyance direction. Measure the lateral displacement.
  • the measured lateral displacement is provided to the controller, which moves the stand 17 laterally and correspondingly to correct the lateral displacement and realign the band 1 in the correct transport direction.
  • the sensor 30 is composed of a pair of light emitting elements 31 and a pair of light receiving elements 32 provided on the fixed frame 33 so as to be close to the lateral edge of the band 1. Is done.
  • the sensor 30 may be an ultrasonic sensor for applying ultrasonic waves to the lateral edge or an air sensor for applying a pressurized air flow to the lateral edge.
  • the edge finishing portion 34 provided in the feeder 110 is a resin for forming a resin base material of the band 1 by supplying a smooth finish to the lateral edge of the band 1 and supplying the band to the laminating section.
  • the edge sensor 34 is composed of a pair of laser irradiators 35 for irradiating the lateral edge of the band 1 with a laser beam to partially melt the resin material. Is also good. The molten resin cools down and gives a smooth finish to the lateral edges, eliminating residues that are inconvenient for subsequent strip processing.
  • the edge finish 34 may be composed of a pair of far-infrared heaters 36 so that the far edge is partially melted by irradiation with far-infrared rays. Good. Further, as shown in FIG.
  • the edge finish 34 may be constituted by a pair of grinders 37, and the lateral edges may be polished to finish smoothly.
  • FIG. 10 shows still another applicable edge finish 34, which is constituted by a pair of application rolls 38, and applies a resin coating film to the lateral edge of the band 1.
  • a resin coating film a thermosetting resin or a photo-setting resin is used, and a heater disposed immediately downstream of the application roll 38 or Cured by a light source to give a smooth finish to the side edges.
  • FIG. 12 shows an exposure unit according to the present invention.
  • This unit includes a processing unit, that is, an exposure unit 90 arranged along the transport path of the band 1 between the feeder 10A and the collector 4OA.
  • the structure and function of both the feeder 1 O A and the collector 4 O A are the same as those used in the laminating unit described above.
  • the same first and second accumulators 70 A and 8 OA used in the laminating unit are provided on the transport path of the laminated strip 1 at the upstream and downstream sides of the exposure unit 90. Is received. Similar members are indicated by similar numbers with an “A”.
  • the exposure unit 90 has a small chamber 100 having a pair of upper and lower frames 101, and each frame has a glass plate on which a photomask 103 is mounted.
  • the frames 101 are arranged on both sides of the strip 1 conveyed by the drive rollers 91 through the small chamber 100.
  • the driving roller 91 is rotated by a motor 92, and the pressing roller 93 maintains direct contact with the belt 1.
  • the laminated strip 1 is covered with a resist film, supplied from the feeder 10A through the first accumulator 70A and the cleaning roller set 61A, and is fixed to the fixed guide roller 94. Guided by the lifting roller 95 and passing through the small chamber.
  • the elevating roller 95 is vertically movable and is provided between the driving roller 91 and the fixed guide roller 94. The elevating roller 95 applies an appropriate tension to the belt 1 and extends it horizontally through the small chamber 100.
  • the lifting roller 95 is controlled to move stepwise along the vertical direction, and moves between the low position, the intermediate position, and the high position to move the band 1 in the small chamber 100 and the photomask 103.
  • the upper frame 101 is also controlled to move stepwise between the low, middle and high positions in the vertical direction as shown in Figure 13A-13C
  • the lower frame 1 0 1 is fixed Rest in position.
  • Fig. 13A shows the normal position, in which both the lifting roller 95 and the upper frame 101 are in the low position, and the belt 1 is held close to the photomask 103 to remove the resist film. Expose.
  • the lifting roller 95 and the upper frame must be connected. Are moved to the intermediate position to provide a sufficiently large space above the band 1 as shown in FIG. 13B to facilitate the predetermined operation.
  • replacement of the photomask of the lower frame and cleaning of the lower frame can be performed by moving both the lifting roller 95 and the upper frame to a high position as shown in FIG. 13C. Provides sufficient space above the lower frame. The exposure of the resist film is performed while the belt 1 is intermittently transported by the drive roller 91.
  • the drive roller 91 conveys the belt stepwise, and irradiates the resist film with the belt 1 in a stationary state in conjunction with the light source 104. Thereafter, the belt 1 is moved forward by a predetermined distance to expose the next area of the resist film.
  • the drive roller 91 is controlled so as to transport the belt 1 at a higher speed than the transport speed in the feeder 11 OA and the collector 4 OA, and the first and second accumulators 70 A, 8 In cooperation with OA, the transport speed during the exposure operation is compensated for, and as a result, the belt 1 is continuously transported from the feeder 11 OA to the collector 4 OA through the exposure unit 90 while the exposure is performed. Processing can be performed intermittently.
  • the first and second accumulators 70 A, 8 OA movable pulleys 74 A and 84 A have the upper limit while the belt 1 is transported through the exposure unit 90. Move between the lower bound. If one of the pulleys 74 A or 84 A exceeds the upper or lower limit, the entire unit stops for safety.
  • the upper and lower positions are defined by the corresponding limit sensors.
  • FIG. 14 shows a developing unit according to the present invention.
  • This unit includes a developing unit 110, an etching unit 120, and an etching unit 12 arranged side by side along the conveyance path of the band 1 between the feeder 10B and the collector 40B. It has a drive port 1 1 1 located downstream of 0.
  • the driving roller 1 1 1 is driven by a motor 1 1 2, and a driving force is applied directly to the band 1 by a corresponding pressing roller 1 13 to cause the band 1 to be developed into a developing section 1 1 10 and a jetting section 1 2 0. Through the line.
  • the feeder 10B and the collector 40B have the same configuration and function as those used in the above-mentioned laminator unit.
  • first and second accumulators 70 B and 80 B which are the same as those used in the laminating unit, are provided on the conveying path of the laminated plate strip 1, on the upstream side of the developing unit 110 and the etching unit 1. 20 downstream. Similar members are indicated by similar numbers with “B” attached.
  • the developing unit 110 is provided with a pair of peeling rollers 114, which peels off the cover film 9 from the exposure resist film on both sides of the belt 1 and collects it on the roll 115.
  • the strip 1 from which the cover film 9 has been removed is passed through the developing chamber 116, and a series of nozzles 117 provided along the transport path spray a developing solution, for example, an aqueous solution of sodium carbonate, onto the strip 1.
  • a developing solution for example, an aqueous solution of sodium carbonate
  • etching solution for example, an aqueous solution containing hydrochloric acid and copper ions is used, and a metal foil portion that is not covered with the cured resist film is removed to form a circuit pattern on both surfaces of the band 1.
  • the etching chamber 122 is further provided with a nozzle 123 for spraying a liquid for removing the cured resist film remaining on the surface of the band 1.
  • an appropriate tension is applied between the driving roller 111 and the feed roller ⁇ 1B of the first accumulator 70B, and the belt 1 is linearly moved through the developing unit 110 and the etching unit 120. It is extended.
  • FIG. 15 shows a surface treatment unit according to the present invention.
  • This unit performs an optimal surface treatment on the circuit pattern on the surface of the band 1, and uses the resulting circuit board as an inner layer of a multilayer laminated board.
  • This unit is provided with a surface treatment 130 disposed on the conveyance path of the belt 1 between the feeder 110C and the collector 40C, and a drive port disposed downstream of the surface treatment 130. 1 3 1 is provided.
  • the driving roller 13 1 is driven by a motor 13 2, and a driving force is directly applied to the band 1 by a corresponding pressing roller 13 3 to convey the band 1 in a straight line through the surface treatment section 130.
  • the feeder 10C and the collector 40C are the same as those used in the laminate unit described above in the configuration and function.
  • first and second accumulators 70 C and 80 C used in the laminating unit are provided on the transport path of the laminated plate strip 1 on the upstream and downstream sides of the surface treatment section 130. And provided. Similar members are indicated by similar numbers with a “C”.
  • the surface treatment section 130 is in the soft etching section 141, the first washing section 144, the acid washing section 144, the second washing section 144, the oxidation section 144, the third washing section 1 4 6, reduction zone 1 4 7, fourth washing zone 1 4 8, and drying zone 1 4 9, which are arranged along the transport path in this order.
  • the circuit pattern on the band 1 is roughened using an aqueous solution containing, for example, sulfuric acid or hydrogen peroxide. This roughening of the circuit pattern increases the adhesive strength to the adjacent layer in the multilayer laminate.
  • the band 1 is sent to the first washing section 142, where it is washed to remove impurities generated by the soft etching process.
  • strip 1 removes remaining impurities using sulfuric acid or the like in acidic washing section 144. Impurities generated in the acidic washing section are removed by washing in the second washing section 144. Subsequently, the strip 1 is sent to the oxidized zone 1445 and treated with an aqueous solution of an acid such as sodium chlorite or sodium hydroxide to form a protective layer of copper oxide on the circuit pattern. The protective layer is controlled for optimum thickness, maintaining a roughened surface and increasing the bond strength to adjacent layers in the multilayer laminate. After that, the band 1 is washed with water in the third washing section 1 4 6 to remove impurities.
  • an acid such as sodium chlorite or sodium hydroxide
  • the removal After the removal, it is introduced into a reduction zone 147, where the surface of the protective layer is reduced using an appropriate reducing agent, for example, dimethylamine borane, to provide acid resistance and improve the adhesive strength.
  • an appropriate reducing agent for example, dimethylamine borane
  • the circuit pattern is protected from the plating solution used in manufacturing the multilayer laminate, and the acid contained in the plating solution dissolves the protective layer around the circuit pattern and through holes. This can prevent so-called “hallowing” from occurring.
  • the band 1 is washed with water in the fourth washing section 148 to remove impurities, dried in the drying section 149, and collected by the collector 4OC.
  • the strip 1 is conveyed continuously through the surface treatment 130 at a constant or variable speed, during which time the first and second accumulators 70C and 8OC maintain the speed at the oxidizing section 130 and the speed at the oxidizing section 130. Absorbs the difference between the speed at the feeder 10C and the speed at the collector 40C. In this unit, an appropriate tension is applied between the drive roller 131 and the feed roller 71C of the first accumulator 70C, and the belt 1 is linearly extended through the surface treatment section 130.
  • the surface treatment section 130 uses an aqueous solution containing sulfuric acid and copper ions, or as shown in JP-A-11-21517, sulfuric acid and hydrogen peroxide.
  • the surface of the circuit pattern may be subjected to a surface treatment using an aqueous solution containing water and copper ions.
  • FIG. 16 shows a system according to another embodiment of the present invention.
  • the upper four units are arranged in one transport path between the feeder 10D and the collector 40D, and both the feeder 10D and the collector 40D are used in the laminate unit described above.
  • the configuration and function are the same as those described above.
  • the four units, ie, the laminating section 60D, the exposing section 90D, the developing section 110D, and the surface treatment section 130D are separated by an intermediate accumulator 150.
  • the first and second accumulators 70D and 80D have the same configuration and function as those used in the above-mentioned laminator unit, and have the same position, that is, immediately downstream of the feeder 10D and immediately downstream of the collector 40D. It is located upstream.
  • the intermediate accumulator 150 is composed of a pair of fixed feed rollers 151, a fixed pulley 153, and a pair of movable pulleys 154, each of which has a corresponding rail. It is supported so that it can move up and down to absorb the difference in the transport speed of the belt between adjacent units. Similar members are indicated by similar numbers with a “D”.
  • FIG. 17 shows a cutting apparatus used in combination with the system of the present invention, for cutting the band 1 into individual circuit boards on which circuit patterns are formed. Individual circuit boards are used as the inner layers of the multilayer laminates described above. As shown in FIG. 18, a plurality of sets of position marks 161 are additionally formed on the band 1.
  • This position mark is formed on one surface of the band 1 at the same time as the circuit pattern 160, and a pair of position marks 161 are arranged in a horizontal direction at a position close to the corresponding circuit pattern 160.
  • the band 1 on which such a position mark is formed is prepared as a roll 17 1 on the surface of which a protective paper 2 is arranged, and is mounted on a feeder 170. When the band 1 is unwound from the roll 17 1, the protective paper 2 is collected on the paper roll 18 1.
  • the feeder 170 includes a stand 177 that is movable with respect to a fixed base 178 along a direction perpendicular to the transport direction of the band 1.
  • a torque motor 175 is attached to this stand 177, and this motor is coupled to the shaft 173 of the roll 171 via a powder clutch to control unwinding and stopping of the belt.
  • the belt 1 unwound from the roll 17 1 extends horizontally toward the accumulator 190 via the end roll 1 79, and is conveyed to the accumulator 190 by the drive roller 18 3.
  • the driving roller 183 is rotated by the motor 184 and is brought into direct contact with the belt 1 by the pressing roller 185.
  • the accumulator 190 is composed of a pair of fixed feed rollers 191 and one movable pulley 194.
  • the movable pulley is vertically movable along a vertical rail and is stored in the accumulator 190. Adjust the length of body 1.
  • An edge sensor 186 is disposed between the end roller 179 and the driving roller 183 to detect a lateral displacement of the band 1 unwound from the roll 171.
  • the detected lateral displacement is Monitored by the controller 200, the controller adjusts the horizontal position of the stand 177 to accurately move the band 1 in the direction to transport the band 1 over the accumulator 190 to the cutting table 210. Align.
  • the cutting table 210 is provided on the fixed support base 211, and includes a cutter 212 for cutting the band 1 into individual circuit boards 220.
  • the belt 1 is pulled out onto the cutting table 210 by the drive roller 2 13, and the drive roller 2 13 is rotated by the motor 2 14, and directly contacts the belt 1 by the pressing roller 2 15 I do.
  • a camera 2 16 is arranged on the upstream side of the driving roller 2 13 to accurately send the band 1 forward by a predetermined step to the cutting position on the circuit board 220, and simultaneously with the band 1 Monitor the position mark to accurately align the paper in the transport direction. This means that each time the camera detects a position mark, the band 1 is step-conveyed by a predetermined length so that cutting is performed at a predetermined position, that is, between individual circuit patterns.
  • the controller 200 Based on the obtained ⁇ and ⁇ , the controller 200 generates a correction signal and eliminates this deviation before cutting the band 1 into the circuit board 220.
  • the driving roller 2 13, the motor 2 14, and the pressing roller 2 15 are arranged at both ends in the lateral direction of the belt 1, respectively, based on the controller 200 force S and the correction signal.
  • the drive roller 230 is controlled so that the belt 1 is step-transported to the cutting position at a speed higher than the transport speed of the feeder 170, and the speed between these is operated in cooperation with the accumulator 190. The difference is compensated, and the band 1 can be continuously supplied from the feeder 170.
  • the circuit boards 220 cut from the band 1 are sequentially transferred onto the stacking table 230 by the reciprocator 240 supported by the horizontal rails 241 and stacked there.
  • the reciprocator 240 is controlled so as to reciprocate in synchronism with the cutter 212, and the end of the circuit board 220 is caught by the catch 242 to hold the circuit board 220 on the table 23 °. Transfer upwards and release it on table 230.
  • the reciprocating element 240 is provided with a suction head 243, and the suction head picks up the protective paper 221 from the table 232 and stores it between the circuit board 224.
  • the replenishment roll for the band 1 is provided in the feeder 170.
  • the belt from multiple rolls can be cut continuously.

Abstract

Un rouleau de laminé recouvert de cuivre est étalé et allongé linéairement à travers des rouleaux d'entraînement et il est soumis en continu à une ou plusieurs des étapes suivantes de fabrication de cartes à circuits imprimés: (a) dépôt de photorésine sur le laminé; (b) exposition sélective de la photorésine à travers un photomasque en vue de son durcissement; (c) développement de la photorésine aux fins d'extraction des zones non durcies et gravure de la feuille métallique exposée aux fins de la formation des motifs du circuit; et (d) formation d'une couche protectrice sur le motif du circuit.
PCT/JP1999/006461 1999-03-26 1999-11-18 Procede et systeme de traitement d'un lamine recouvert de metal pour carte a circuit imprime WO2000059275A1 (fr)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP11083467A JP2000271942A (ja) 1999-03-26 1999-03-26 シート状樹脂成形基材の端部処理装置
JP11/83467 1999-03-26
JP11/147346 1999-05-26
JP14734699A JP2000340927A (ja) 1999-05-26 1999-05-26 内層用回路板の製造方法及び多層積層板及び多層積層板の製造方法
JP21142399A JP2001031305A (ja) 1999-07-27 1999-07-27 内層用回路板の巻取り装置
JP11/211423 1999-07-27

Publications (1)

Publication Number Publication Date
WO2000059275A1 true WO2000059275A1 (fr) 2000-10-05

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Application Number Title Priority Date Filing Date
PCT/JP1999/006461 WO2000059275A1 (fr) 1999-03-26 1999-11-18 Procede et systeme de traitement d'un lamine recouvert de metal pour carte a circuit imprime

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Country Link
CN (1) CN1181713C (fr)
WO (1) WO2000059275A1 (fr)

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US20140326402A1 (en) * 2013-05-02 2014-11-06 Tgo Tech. Corporation Method for manufacturing metal encapsulation member
CN106954344A (zh) * 2017-04-19 2017-07-14 广东永创鑫电子有限公司 柔性线路板模切生产线
US20220338354A1 (en) * 2021-04-16 2022-10-20 Shinko Electric Industries Co., Ltd. Resist layer forming method, method for manufacturing wiring board, and resist layer forming apparatus

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JP2005077955A (ja) * 2003-09-02 2005-03-24 Sanyo Electric Co Ltd エッチング方法およびそれを用いた回路装置の製造方法
CN101841971B (zh) * 2010-04-06 2012-07-18 周伟 挠性电路板的层压用辅助材料及挠性电路板的层压工艺
CN107539816B (zh) * 2017-07-04 2019-06-21 芜湖市亿仑电子有限公司 一种金属化薄膜自动输送夹紧装置
JP6831571B2 (ja) * 2017-08-09 2021-02-17 株式会社ミヤコシ 連続ラベル用紙の抜き粕巻取り装置および抜き粕巻取り方法
CN110371724B (zh) * 2019-06-18 2020-07-03 淮安信息职业技术学院 一种微牵伸自动柔性放卷装置及其放料方法
CN110642052B (zh) * 2019-09-19 2021-09-07 中建材创新科技研究院有限公司 一种接纸机的自动换卷运算控制装置及控制方法

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CN106954344B (zh) * 2017-04-19 2023-08-29 湖北永创鑫电子有限公司 柔性线路板模切生产线
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