WO1994007812A1 - Sintered oxide ceramics and method of making said ceramics - Google Patents
Sintered oxide ceramics and method of making said ceramics Download PDFInfo
- Publication number
- WO1994007812A1 WO1994007812A1 PCT/JP1992/001267 JP9201267W WO9407812A1 WO 1994007812 A1 WO1994007812 A1 WO 1994007812A1 JP 9201267 W JP9201267 W JP 9201267W WO 9407812 A1 WO9407812 A1 WO 9407812A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sintered body
- ceramics
- oxide ceramics
- sintered
- oxide
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/46—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on titanium oxides or titanates
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
- C04B35/6455—Hot isostatic pressing
Definitions
- the present invention relates to vacuum chucks, back-up bins, and nodes such as vacuum chucks used for cleaning, moving, and surface treatment of si wafers in the semiconductor industry.
- Products made with these ceramic materials are usually used by polishing and rubbing the parts that come into contact with the silicon wafer.
- the bore of the material itself remains on the surface of the hose, and dust and dirt may adhere to this bore.
- semiconductor elements become more dense and highly integrated, such ceramic materials themselves will have dirt and dust in their own pores during the manufacturing process. Doing that has become a problem.
- the present inventor has made an oxide ceramic material composed of a single component sintered at a relatively low temperature to have a very small number of bores. This has been found, and the present invention has been completed.
- the gist of the present invention is to use a fine powder of high-purity oxide ceramic powder as a raw material and fire it at a temperature lower than the firing temperature of ordinary oxide ceramics.
- a fine powder of high-purity oxide ceramic powder as a raw material and fire it at a temperature lower than the firing temperature of ordinary oxide ceramics.
- HIP processing hot isostatic pressing
- HIP processing hot isostatic pressing
- the firing at a temperature lower than the firing temperature of ordinary oxide ceramics is generally performed in the range of 100 to 1500. It refers to firing, and the temperature varies within this temperature range depending on the material of the oxide ceramics. For example, in the case of aluminum ceramics, it is 120 0 to 150 ⁇ , and in the case of titanium ceramics, it is 100 ⁇ to 130 0. However, in each case, the temperature is lower than the original firing temperature. At a temperature lower than the firing temperature specified in the present invention, the sintering itself does not proceed, and at a high temperature, the grain growth is remarkable, and the pores move to the grain boundary phase and are accompanied by the grain growth. The coarsening of the key occurs.
- the raw material powder does not have a purity of 99% or more, or if the average particle size is coarser than 1 micron, the properties of low-temperature easy sintering are lost, and sufficient sintering is performed.
- the consolidation density does not increase. Sintering at a high temperature to increase the sintering density causes grain growth and coarsens the pores.
- the purity of the raw material powder is at least 99%, preferably at least 99.8%, and the average particle size of the raw material powder is 1 micron or less, preferably 0. Good around 5 micron.
- This raw material of oxide ceramics is formed by various methods. For example, in the case of a thin plate such as a vacuum chuck or a vacuum bin set, it is formed into a thin plate by a doctor blade method and an extrusion forming method. When mass-producing ornaments such as neck-bins and earrings, perform molding. Furthermore, for large-area flat plates such as mirrors, CIP molding (cold isostatic press molding) and $ molding are used. In any case, an organic binder suitable for each molding method is used as a molding aid.
- the molded body obtained in this way is fired at the above-mentioned optimum firing temperature of 100 to 150 ° C., and the oxide ceramic having a very small number of bores is obtained. Material is obtained.
- the HIP treatment should be performed at a temperature lower than the sintering temperature in order to prevent the bore from becoming coarse due to grain growth.
- the firing atmosphere can be either in the air or in an atmosphere gas such as an argon gas.
- atmosphere gas such as an argon gas.
- the oxide ceramics sintered body obtained in this way is processed into flat grinding, bonding, rubbing, etc. to produce products, but the most important is
- the characteristic is that the number of pores is small, and the present inventors have devised for evaluation of this characteristic.
- the oxide sintered body is polished using a diamond disk, a knob, etc., as in the case of ordinary structure observation, and the mirror surface is obtained. To form. Next, place the carbon black on the balling buff in place of the diamond and slide it while pressing the mirror surface. , Pack a power black into the pores. Observe the mirror surface with a microscope, and count the black spots filled with carbon black per 1 mm 2 . Oxide ceramics that had been subjected to HIP treatment were blackened and translucency was reduced, but black spots were counted in the same manner.
- the oxide ceramics according to the present invention has 100 or less per lmm 2 , which is very small and has few bores. X-ray material was obtained.
- HIP treatment at 500 kg / cm 2 or more Grind and polish the obtained normal pressure sintered body and HIP treated body.
- Example 2 An average particle size of 0.4 micron and a purity of 99.9% aluminum powder (Taimicron manufactured by Daimei Chemical Co., Ltd.) was used as a raw material and molded in the same manner as in Example 1. After that, normal pressure sintering is performed at 1200 to 1500 in the atmosphere. Next, HIP treatment is performed in a nitrogen atmosphere at a temperature of 100 to 1500 and a pressure of 500 kg / cm 2 or more. The obtained normal pressure sintered body and the HIP-treated body were subjected to bolling in the same manner as in Example 1 and then observed with an optical microscope. The results are shown in Table 1 at N 0.3 to N 4.
- a CIP compact was manufactured in the same manner as in Examples 1 and 2, and the results obtained when sintering at a normal firing temperature or when the HIP treatment temperature was increased were shown in Table 1 as N0.5 to N0.5. Shown in 10.
- the high-purity * fine oxide ceramic powder was fired at a lower temperature than the normal firing temperature, so that the bore was not observed with a microscope.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Compositions Of Oxide Ceramics (AREA)
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE69231839T DE69231839D1 (de) | 1992-10-01 | 1992-10-01 | Verfahren zur Herstellung von gesinterten Keramiken aus Titandioxid oder Aluminiumoxid. |
KR1019930701726A KR960011355B1 (ko) | 1992-10-01 | 1992-10-01 | 산화물 세라믹스 소결체 및 그 제조방법 |
EP92920993A EP0614861B1 (en) | 1992-10-01 | 1992-10-01 | Method of manufacturing titania and alumina ceramic sintered bodies |
PCT/JP1992/001267 WO1994007812A1 (en) | 1992-10-01 | 1992-10-01 | Sintered oxide ceramics and method of making said ceramics |
US08/554,098 US5665663A (en) | 1992-10-01 | 1995-11-06 | Method for manufacturing oxide ceramic sintered bodies |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP1992/001267 WO1994007812A1 (en) | 1992-10-01 | 1992-10-01 | Sintered oxide ceramics and method of making said ceramics |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1994007812A1 true WO1994007812A1 (en) | 1994-04-14 |
Family
ID=14042567
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP1992/001267 WO1994007812A1 (en) | 1992-10-01 | 1992-10-01 | Sintered oxide ceramics and method of making said ceramics |
Country Status (4)
Country | Link |
---|---|
US (1) | US5665663A (ja) |
EP (1) | EP0614861B1 (ja) |
DE (1) | DE69231839D1 (ja) |
WO (1) | WO1994007812A1 (ja) |
Families Citing this family (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4236292B2 (ja) * | 1997-03-06 | 2009-03-11 | 日本碍子株式会社 | ウエハー吸着装置およびその製造方法 |
JP4129602B2 (ja) * | 1998-04-01 | 2008-08-06 | 古河機械金属株式会社 | 皮接式健康維持用具及びその製造方法 |
KR101607883B1 (ko) | 2010-12-31 | 2016-03-31 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 특정 모양의 연마 입자 및 그러한 입자의 형성 방법 |
US8986409B2 (en) | 2011-06-30 | 2015-03-24 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles including abrasive particles of silicon nitride |
US8840694B2 (en) | 2011-06-30 | 2014-09-23 | Saint-Gobain Ceramics & Plastics, Inc. | Liquid phase sintered silicon carbide abrasive particles |
BR112014007089A2 (pt) | 2011-09-26 | 2017-03-28 | Saint-Gobain Ceram & Plastics Inc | artigos abrasivos incluindo materiais de partículas abrasivas, abrasivos revestidos usando os materiais de partículas abrasivas e os métodos de formação |
CN104114664B (zh) | 2011-12-30 | 2016-06-15 | 圣戈本陶瓷及塑料股份有限公司 | 形成成型研磨颗粒 |
CN104114327B (zh) | 2011-12-30 | 2018-06-05 | 圣戈本陶瓷及塑料股份有限公司 | 复合成型研磨颗粒及其形成方法 |
EP2797715A4 (en) | 2011-12-30 | 2016-04-20 | Saint Gobain Ceramics | SHAPED ABRASIVE PARTICLE AND METHOD OF FORMING THE SAME |
US8840696B2 (en) | 2012-01-10 | 2014-09-23 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
EP3705177A1 (en) | 2012-01-10 | 2020-09-09 | Saint-Gobain Ceramics & Plastics Inc. | Abrasive particles having complex shapes and methods of forming same |
WO2013149209A1 (en) | 2012-03-30 | 2013-10-03 | Saint-Gobain Abrasives, Inc. | Abrasive products having fibrillated fibers |
EP2852473B1 (en) | 2012-05-23 | 2020-12-23 | Saint-Gobain Ceramics & Plastics Inc. | Shaped abrasive particles and methods of forming same |
WO2014005120A1 (en) | 2012-06-29 | 2014-01-03 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
KR101736085B1 (ko) | 2012-10-15 | 2017-05-16 | 생-고뱅 어브레이시브즈, 인코포레이티드 | 특정한 형태들을 가진 연마 입자들 및 이러한 입자들을 형성하는 방법들 |
JP2016503731A (ja) | 2012-12-31 | 2016-02-08 | サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド | 粒子材料およびその形成方法 |
KR101850281B1 (ko) | 2013-03-29 | 2018-05-31 | 생-고뱅 어브레이시브즈, 인코포레이티드 | 특정한 형태들을 가진 연마 입자들 및 이러한 입자들을 형성하는 방법들 |
TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
MX2016004000A (es) | 2013-09-30 | 2016-06-02 | Saint Gobain Ceramics | Particulas abrasivas moldeadas y metodos para formación de ellas. |
US9566689B2 (en) | 2013-12-31 | 2017-02-14 | Saint-Gobain Abrasives, Inc. | Abrasive article including shaped abrasive particles |
US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
US10557067B2 (en) | 2014-04-14 | 2020-02-11 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
EP3131705A4 (en) | 2014-04-14 | 2017-12-06 | Saint-Gobain Ceramics and Plastics, Inc. | Abrasive article including shaped abrasive particles |
WO2015184355A1 (en) | 2014-05-30 | 2015-12-03 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
US9951952B2 (en) | 2014-10-15 | 2018-04-24 | Specialized Component Parts Limited, Inc. | Hot surface igniters and methods of making same |
US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
WO2016161157A1 (en) | 2015-03-31 | 2016-10-06 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
CA3118239A1 (en) | 2015-06-11 | 2016-12-15 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
EP3455321B1 (en) | 2016-05-10 | 2022-04-20 | Saint-Gobain Ceramics&Plastics, Inc. | Methods of forming abrasive particles |
KR102422875B1 (ko) | 2016-05-10 | 2022-07-21 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자들 및 그 형성 방법 |
EP4349896A3 (en) | 2016-09-29 | 2024-06-12 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
US10865148B2 (en) | 2017-06-21 | 2020-12-15 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
WO2021133901A1 (en) | 2019-12-27 | 2021-07-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive articles and methods of forming same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01129904A (ja) * | 1987-11-16 | 1989-05-23 | Fujitsu Ltd | 高密度焼結体の製造方法 |
JPH03150258A (ja) * | 1989-11-02 | 1991-06-26 | Narumi China Corp | 焼成用セッター |
JPH04114984A (ja) * | 1990-08-30 | 1992-04-15 | Ibiden Co Ltd | 平滑面を備えた窒化アルミニウム焼結体の製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3459503A (en) * | 1966-01-03 | 1969-08-05 | Eastman Kodak Co | Hot pressing titanium dioxide |
AU573631B2 (en) * | 1983-10-17 | 1988-06-16 | Tosoh Corporation | High strength zirconia type sintered body |
GB8527334D0 (en) * | 1984-11-20 | 1985-12-11 | Ici Plc | Composition comprising ceramic particles |
US4849142A (en) * | 1986-01-03 | 1989-07-18 | Jupiter Technologies, Inc. | Superplastic forging of zirconia ceramics |
KR910009894B1 (ko) * | 1987-03-26 | 1991-12-03 | 도도 기끼 가부시끼가이샤 | 세라믹스 제품 및 그 제조방법 |
JPS63241408A (ja) * | 1987-03-30 | 1988-10-06 | Narumi China Corp | 陶磁器製品のクラツク検査装置 |
US5001093A (en) * | 1987-05-06 | 1991-03-19 | Coors Porcelain Company | Transparent polycrystalline body with high ultraviolet transmittance |
JPH06144920A (ja) * | 1991-07-26 | 1994-05-24 | Nippon Cement Co Ltd | 酸化物セラミックス焼結体及びその製造方法 |
JPH06208015A (ja) * | 1991-10-02 | 1994-07-26 | Nippon Cement Co Ltd | セラミックスミラー及びその製造方法 |
-
1992
- 1992-10-01 EP EP92920993A patent/EP0614861B1/en not_active Expired - Lifetime
- 1992-10-01 WO PCT/JP1992/001267 patent/WO1994007812A1/ja not_active Application Discontinuation
- 1992-10-01 DE DE69231839T patent/DE69231839D1/de not_active Expired - Lifetime
-
1995
- 1995-11-06 US US08/554,098 patent/US5665663A/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01129904A (ja) * | 1987-11-16 | 1989-05-23 | Fujitsu Ltd | 高密度焼結体の製造方法 |
JPH03150258A (ja) * | 1989-11-02 | 1991-06-26 | Narumi China Corp | 焼成用セッター |
JPH04114984A (ja) * | 1990-08-30 | 1992-04-15 | Ibiden Co Ltd | 平滑面を備えた窒化アルミニウム焼結体の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
DE69231839D1 (de) | 2001-06-28 |
EP0614861A1 (en) | 1994-09-14 |
US5665663A (en) | 1997-09-09 |
EP0614861A4 (en) | 1996-11-27 |
EP0614861B1 (en) | 2001-05-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO1994007812A1 (en) | Sintered oxide ceramics and method of making said ceramics | |
KR100695046B1 (ko) | 초미립자 취성재료의 저온성형방법 및 그것에 사용하는초미립자 취성재료 | |
TWI464133B (zh) | Polycrystalline MgO sintered body and its manufacturing method and MgO target for sputtering | |
US8148281B2 (en) | Titanium carbide powder and titanium carbide-ceramics composite powder and method for production thereof, and sintered compact from the titanium carbide powder and sintered compact from the titanium carbide/ceramics composite powders and method for production thereof | |
CN105981132A (zh) | 半导体用复合基板的操作基板及半导体用复合基板 | |
JP2002087878A (ja) | 耐プラズマ性部材およびその製造方法 | |
JP3693191B2 (ja) | インジウム酸化物系焼結体およびその製造方法ならびにインジウム酸化物系ターゲット | |
US5898008A (en) | Pore-free sintered bodies on the basis of silicon carbide which are suitable as substrates for hard disks, and methods for the fabrication thereof | |
JP4382919B2 (ja) | シリコン含浸炭化珪素セラミックス部材の製造方法 | |
US5731251A (en) | Oxide ceramic sintered bodies | |
EP0559917B1 (en) | Method of manufacturing a ceramic mirror | |
JP3129233B2 (ja) | Ba、SrおよびTiの複合酸化物焼結体からなる高誘電体膜形成用スパッタリングターゲット | |
JP3769416B2 (ja) | プラズマ処理装置用部材 | |
JPH06144920A (ja) | 酸化物セラミックス焼結体及びその製造方法 | |
KR960011355B1 (ko) | 산화물 세라믹스 소결체 및 그 제조방법 | |
JPH10338576A (ja) | 窒化ケイ素系焼結体及びその製造方法 | |
JP2001316174A (ja) | 複合材料およびその製造方法 | |
JPH10203870A (ja) | 炭化珪素焼結体及びその製造方法 | |
JP2000247728A (ja) | 耐食性に優れたアルミナセラミックス焼結体 | |
JP7396993B2 (ja) | 磁気記録媒体 | |
JP4243437B2 (ja) | 表面がポアレスな金属−セラミックス複合材料の製造方法 | |
JPH11147766A (ja) | 炭化珪素焼結体及びその製造方法 | |
JP3970629B2 (ja) | 低熱膨張セラミックスおよびその製造方法 | |
JP4766289B2 (ja) | 炭化珪素焼結体及びその製造法 | |
JP2001003164A (ja) | 高速成膜しても割れが発生することのない高誘電体膜形成用スパッタリングターゲット |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 1019930701726 Country of ref document: KR |
|
ENP | Entry into the national phase |
Ref document number: 1993 87746 Country of ref document: US Date of ref document: 19930712 Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1992920993 Country of ref document: EP |
|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): KR US |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH DE DK ES FR GB GR IE IT LU MC NL SE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWP | Wipo information: published in national office |
Ref document number: 1992920993 Country of ref document: EP |
|
ENP | Entry into the national phase |
Ref document number: 1996 753603 Country of ref document: US Date of ref document: 19961127 Kind code of ref document: A |
|
WWW | Wipo information: withdrawn in national office |
Ref document number: 1992920993 Country of ref document: EP |