Classifications

• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
  • H10D89/211—Design considerations for internal polarisation
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
  • H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
  • H10D89/10—Integrated device layouts

Definitions

• the present invention relates to a layout of a semiconductor integrated circuit device in which a large number of signal wirings are arranged in parallel with a power supply wiring, such as a signal wiring for driving a decoder circuit in a memory chip. And a semiconductor integrated circuit device using the wiring layer.
• FIG. 4 shows the layout of a conventional memory chip.
• This memory chip 1 is a read only memory (ROM) and is composed of four memory cell blocks 2a to 2d. Between the memory cell blocks 2a and 2b, there is a row decoder circuit 3a including a decoder and a buffer for running the word line of the memory cell block 2a, and a memory cell block 2b. Are arranged so as to face each other. Row decoder circuits 3c and 3d are also arranged between memory cell blocks 2c and 2d so as to face each other.
• ROM read only memory
• Peripheral circuits 4a and 4b including a predecoder circuit for generating a signal are arranged.
• the peripheral circuit 4a is a circuit common to the decoder circuits 3a and 3b, and is arranged below the memory cell blocks 2a and 2b.
• the peripheral circuit 4b is a circuit common to the decoder circuits 3c and 3d, and the memory cell block 2c and the
• a pad 7 to which Vss (0 V) is supplied is placed on the outer peripheral side of the sense amplifier circuits 6a to 6b.
• the pad 8 to which Vdd (5 V) is supplied is arranged on the outer peripheral side of the predecoder surface paths 4a to 4b.
• the bus wiring 11 is arranged around the chip 1 from the socket 7, and is arranged in parallel with each circuit from the mother wiring 11 to the center of the chip 1. It is supplied to each circuit by the branch wiring 12.
• branch wiring 12 a part of -12a of the branch wiring 12 is supplied to the cells 2a to 2d or the circuits 3a to 3d by branch wiring 13 which is further branched.
• the bus wiring 21 is arranged between the memory cell blocks 2b and 2c, which are the center of the memory chip 1, and the bus wiring 21 is arranged from the mother wiring 21 to the periphery of the chip 1.
• the power is supplied to each circuit by a branch wiring 22 arranged in parallel with each circuit.
• a part 2 of the technical wiring 2 2 In the row decoder areas 3a to 3d, a part 2 of the technical wiring 2 2
• the power supply wiring for the two power supplies V ss and V dd In this arrangement, s is separated from the outer periphery of the chip 1 toward the center, and V dd is separated from the center toward the outer periphery.
• the wirings of V ss and V dd do not cross each other.
• an area ⁇ where signal wirings connecting the peripheral circuits 4 a and 4 b and the row decoders 3 a to 3 d are gathered is an area where the signal wiring and the power supply wiring intersect. It is also one of the densest wiring paths in Chip 1. For this reason, how to lay out this area is one of the important factors that determine the access speed and chip size of the memory chip 1.
• FIG. 5 shows the layout of an area in a conventional apparatus.
• n signal wirings 31.1 to 3 1.n from the peripheral circuit 4a to the decoder circuits 3a and 3b are arranged in parallel between the power supply wirings 23a and 23b.
• These wirings 31.1 to 3.1.n are connected to the respective connection parts 42, 1 to 42.n of the n function cells 41.1 to 41.n of the peripheral circuit 4a. ing.
• the wiring of the signals output from these connection parts 42.1 to 42.2n generally intersects with the power supply wiring 12 of the peripheral circuit 4a laid out along both ends of the peripheral circuit 4a. I do.
• connection portions 42.1 to 42.2n are formed of polycrystalline silicon below the power supply wiring 12 with an insulating layer interposed therebetween.
• Each functional cell 41.1 to 4 1.n Connection part arranged at 4n n Each signal wiring connected to 4.2.1 to 4.2.n 31.1 to 3 1.n is a row decoder circuit The area between 3a, 3b and the peripheral circuit 4a is used as a collective area 50 and collected toward the common bus line 30.
• the signal wirings 31.1 to 31.1n collected in this manner are connected to the power supply wirings 2 2a of the row decoders 3a and 3b in the narrowed area 51 at the entrance to the common bus line 30. Intersect. For this reason, the entrance 51 of each of the signal wirings 31.1 to 31.n is formed under the power supply wiring 22a by a second layer of high-resistance polycrystalline silicon formed by hollowing out an insulating layer. The wiring is made using 32.1 to 32.2n.
• the wirings 32.1 to 3.2.n of the second layer and the signal wirings 31.1 to 3.1.n correspond to the via holes 33 on the peripheral circuit 4a side and the common bus line for each wiring. It is connected by two via holes, 3 and 4, respectively.
• Some of the problems with the increased memory capacity and the demand for high access speed in the above-described memory chip with a layout are the above-mentioned problems regarding the area where signal wirings gather. You. In other words, as the memory capacity increases, the area of the memory area increases, and the number of signal wirings to the decoder also tends to increase. However, the size of the chip is limited due to the relationship between the package and the like. It is difficult to increase the width of the common bus line. For this reason, the width of the signal wiring tends to be narrowed. Similarly, the wiring width of the second layer of polycrystalline silicon has to be reduced.
• the wiring resistance decreases rapidly due to the reduction in the wiring width, and the access speed to the decoder may decrease. Many. Therefore, the access speed of the memory decreases. At the same time, the number of via holes connecting the second layer wiring and the signal wiring must be reduced, and the resistance at this part also increases, thus further reducing the access speed.
• the wiring! 5 resistance is reduced without increasing the area required for wiring, and the reliability of the wiring is reduced.
• the purpose is to realize a layout that can improve the access speed. Disclosure of the invention
• a polycrystalline silicon wiring used in a portion that interferes with a power supply wiring is a low-resistance aluminum wiring.
• Polycrystalline silicon wiring is used during surface processing of semiconductor devices. It is difficult to use a wiring layer on the upper part of the power supply wiring because it involves an increase in the number of processing steps. Further, even if such a rate is adopted, it is difficult to solve the above-mentioned problems of the resistance and reliability of the via hole.
• One power supply wiring will be arranged. Such a layout cannot be applied to a semiconductor device employing a layout in which power supply wirings are separated in order to avoid crossing of power supply wirings as described above. If adopted, two types of power supply will be placed around the semiconductor at the same time.
• the mother power supply line branched from the power supply line of the common bus line is provided along the vicinity of the peripheral circuit for signal processing and the like, which is provided around the memory cell block. by arranging. 2 5 solves the above problems. That is, according to the present invention, The number of signal processing circuits in which signal wiring connection areas are discretely arranged and the number of wiring-provided areas in which signal wirings connected to this signal processing circuit are gathered in parallel between a plurality of power supply wirings are reduced. In the semiconductor integrated circuit device having both, the mother power supply wiring branched from the power supply wiring is arranged along the vicinity of the connection region of the signal processing surface.
• the mother power supply wiring By arranging the mother power supply wiring near the connection area of the signal processing circuit, it is possible to avoid interference between the mother power supply wiring and each signal wiring in the narrowed area corresponding to the entrance portion of the wiring installation area. It becomes possible. Since the mother power supply wiring is arranged along the vicinity of the connection area of the signal processing circuit, it is possible to process the interference between the mother power supply wiring and the signal wiring in the vicinity of this area.
• the connection area of the signal processing circuit is discretely arranged from the space required for the logic circuit in the processing circuit. Therefore, the signal wiring connected to this connection area has the signal wiring in the vicinity of this area. The wiring spacing is sufficiently ensured.
• the mother power supply wiring in the vicinity of this region, the width of the signal wiring of the second layer necessary for processing the intersection between each signal wiring and the mother power supply wiring can be widened.
• a semiconductor device having a high wiring density of a common bus line corresponding to a wiring mounting area such as a memory chip a low-resistance second-layer signal wiring can be realized.
• connection region of the signal processing circuit is often connected to the signal wiring using the second wiring layer in order to avoid interference with the power supply wiring to the signal processing circuit. Therefore, the wiring of this second layer is By extending to the part that interferes with the wiring, the number of signal wiring connection points can be reduced, and the connection resistance can be reduced and the reliability can be prevented from being reduced due to connection point failures. It is.
• a mother power supply wiring is arranged near a plurality of peripheral circuits as signal processing circuits arranged around the memory cell area. The intersection between the signal wiring connecting the decoder circuit arranged between the memory cell blocks and the peripheral plane via a common bus line and the mother power supply wiring may be processed.
• the power supply wiring branched from the mother power supply wiring is collected on the common bus line in parallel with these signal wirings, so that the power supply wiring does not cross again at the entrance of the common bus line, etc.
• the power to the decoder circuits arranged on both sides can be supplied by the same mother power supply wiring as in the past, so there is no need to consider potential fluctuations and interference with other power supply wirings.
• the first and second wirings can be formed using a plurality of via holes. It is possible to connect the second signal wiring. For this reason, the resistance of the connection portion can be reduced. Furthermore, via hole defects that may occur during the manufacturing process can be eliminated by forming a plurality of via holes at one connection portion. For this reason, in the semiconductor integrated circuit device according to the present invention, an error associated with an increase in the resistance of the signal wiring is required. Access speed, and at the same time, the reliability of via holes.
• power wiring to the peripheral circuit is generally arranged on the connection region of the peripheral circuit, so that the above-mentioned mother power supply wiring is arranged in parallel with the power wiring to the peripheral circuit. Become. In such an arrangement, it is possible to extend the connection area formed in the second wiring layer to the intersection with the mother power wiring in order to avoid interference with the power wiring to peripheral circuits. . In this case, the two second-layer wirings, which were necessary in order to avoid interference with the power supply wiring to the peripheral circuit and to avoid the The power supply wiring to the power supply and the mother power supply wiring can be reduced to one second layer wiring common. Therefore, it is possible to reduce the connection resistance with the wiring of the second layer, and at the same time, reduce the number of gun contact points, thereby reducing manufacturing defects that often occur at the connection part. It is possible to improve the reliability of the device.
• the power supply wiring to the peripheral circuit and the mother power supply wiring are parallel as described above and the power consumption of the peripheral circuit is stable, the power supply wiring to the peripheral circuit is not used. It is also possible to use a common wiring for the power supply wiring and the mother power supply wiring. When such a layout is employed, in addition to the above-described effects, the wiring of the second layer can be further shortened, so that the wiring resistance can be further reduced.
• the common bus line and the mother power supply line are often orthogonal to each other due to interference between power supply lines and arrangement of functional cells. In this type of device, the power supply wiring branches from the mother power supply wiring to the common bus line. In the semiconductor device described above, the present invention can be applied even when the common bus line and the mother power supply line are not orthogonal.
• a low-resistance aluminum wiring can be used for the wiring of the same first layer as the mother power supply wiring.
• Both the aluminum wiring and the polycrystalline silicon wiring can be used for the wiring of the second layer formed above or below the one layer via the insulating layer.
• Minimized wiring has low resistance, but generally needs to be added above the first layer.
• polycrystalline silicon wiring has a high resistance, but has the advantage that it can be formed simultaneously with the surface processing of a semiconductor device. Further, in the present invention, since the width of the second layer wiring can be sufficiently ensured, the second layer signal wiring having a low resistance can be formed even if a polycrystalline silicon wiring is used. It is.
• FIG. 1 is a layout diagram for explaining a power supply wiring arrangement of the semiconductor integrated circuit device according to the first embodiment of the present invention.
• FIG. 2 is a layout diagram illustrating a portion where signal wiring according to the first embodiment is collected on a common bus line.
• FIG. 3 is a layout diagram showing a part where signal wiring according to the second embodiment of the present invention is collected on a common bus line.
• Figure 4 is a Reiau bets diagram order to explain the power supply wiring arrangement of a conventional semiconductor integrated circuit device e
• FIG. 7 is a diagram illustrating the layout.
• FIG. 1 shows a layout of a semiconductor integrated circuit device according to Embodiment 1 of the present invention.
• the semiconductor device of this example is similar to the conventional device described above.
• ROM Read Only Memory
• the row decoder circuits 3a and 3b, 3c and 3d are arranged so as to face each other. I have.
• the row decoders 5a to 5d, the sense amplifier circuits 6a to 6d, and the memory cell blocks 2a to 2d on the opposite side of these circuits are shown below the row decoder.
• Peripheral circuits 4a and 4b including a pre-decoder circuit for generating a signal for driving the circuit are provided.
• the arrangement of each cell and circuit is the same as that of the above-described conventional device, and the same number is assigned and the description is omitted.
• the layout of the power supply wiring for supplying power to these circuits is also changed.
• the wirings of V ss and V dd do not cross each other, and a layout in which the wiring paths of V ss and V dd are separated is adopted.
• V ss is supplied to each circuit by the technique wiring 12 from the socket 7 to the center of the chip 1 via the mother wiring 11 arranged around the chip 1. ing.
• a part 12a of the technical wiring 12 is supplied to each cell 2a-2d or the circuit 3a-3d by a branch wiring 13 which is further branched.
• Vdd is supplied to each circuit from the knot 8 via the branch wiring 22 via the mother wiring 21 arranged at the center of the memory chip 1.
• a part 22 a of the technical wiring 22 is supplied to the decoder circuits 3 a to 3 d through a branch wiring 23 that is further branched.
• a point to be focused on is an area where signal wirings connecting the peripheral circuits 4 a and 4 b, which are one of the densest wiring paths in the chip 1, and the row decoders 3 a to 3 d gather.
• This is the arrangement of the power supply wiring 22a in FIG.
• the power supply wiring 22a disposed immediately below the decoder circuits 3a and 3b is disposed immediately above the peripheral circuit 4a.
• the branch points 35a and 35b of the wirings 23a and 23b branched from the power supply wiring 22a are signal wirings 31.1 collected from the peripheral circuit 4a to the common bus line 3. ⁇ 31.n are located outside.
• the two power supply wires 23a and 23b are formed in a convex shape (almost inverted Y shape) along the outer circumference of the signal wires 31.1 to 31.n. It is collected on the common bus line 30.
• FIG. 2 shows details of a region ⁇ in which the signal wirings 31.1 to 31.1 are gathered on the common bus line 30.
• the layout of this region II is almost the same as that of the conventional device described above, and the peripheral circuit 4a and the decoder circuits 3a, 3b are connected to the common bus line 30 between the row decoder circuits 3a, 3b. Are connected in parallel and sandwiched between power supply lines 23a and 23b.
• These wiring 3 1. 1 to 3 1.n are connected to the connection parts 4.2.1 to 42.n of the function cells 41.1 to 41.n of the peripheral path 4a.
• connection portions 42.1 to 42.2n are made of polycrystalline silicon and are formed under the signal wiring 31.1 to 31.n wiring layers.
• the power supply wiring 23a of the row decoder 3a and 3b. Have been.
• the power supply wirings 2 3a and 2 3b are obtained by using the mother wirings 2 2a located outside the cells 41.1 and 4 1.n at both ends of the functional cell 4 1 as branch points 35a and 35b. Is branched.
• the branched power supply wirings 23a and 23b should be perpendicular to the mother wiring 22a along the outside of the signal wirings 31.1 and 31.1n at both ends gathered on the common bus line 30.
• the layout as described above is employed, and the mother wiring 22 a is arranged above the connection portions 42.1 to 42.n of the peripheral circuit 4a. Therefore, the interference between the signal wires 31.1 to 31.n and the bus wires 22a is processed in the connection portions 42.1 to 42.n. Therefore, like a conventional semiconductor device, a common bus line
• the interval of 15 minutes 42.1 to 4.2.n at the connection portion that interferes with the mother wiring 22a is included in the functional cell 41.1 to 41.1n.
• a sufficient interval is secured in comparison with the width of the signal wiring 31.1 to 31.n.
• the connection parts 42.1 to 42.n are high-resistance polycrystalline silicon, the connection parts 42.1 to 42.n are connected so that the resistance value is sufficiently small.
• the width H is secured. Then, it is possible to form a plurality of via holes 43 over this width H.
• connection portions 42.1 to 42.2n since a plurality of via holes are formed for one connection portion, even if one of the via holes is not connected due to a defect in the manufacturing process, the connection can be maintained by another via hole. A highly reliable s connection can be formed. Also, make sure that the space between So there is no short circuit in the manufacturing process. Further, in this example, the power supply wiring 12 of V ss to the peripheral circuit 4 a and the mother wiring 22 a of V dd to the decoder circuit can be arranged close to each other in parallel. For this reason, the intersection between these two wires 12 and 22a and the signal wires 31.1 to 31.1II can be handled only by the connection portions 42.1 to 42.2n.
• the number of connection points with the second-layer wiring formed below the power supply wiring is also reduced.
• the layout of the power supply wiring is seemingly complicated.
• the layout has been simplified in terms of the number of connection points, etc., and the reliability of the device has been improved and the access time has been reduced.
• FIG. 3 shows details of an area ⁇ ⁇ ⁇ in which the signal wirings 31.1 to 31.1n according to the second embodiment of the present invention are collected on the common bus line 30.
• further power supply wiring 2 3 a, 2 3 b layout of, per the same manner as in example 1 described above, in the c present embodiment will not be described bear the same number, a point Notably
• the power supply wirings 23a and 23b are also used as power supply wirings to the peripheral circuit 4a, which is a branching mother wiring 22a.
• Peripheral circuit 4a If there is a large power supply such as a buffer, which is composed of a power supply, a predecoder, etc., the potential fluctuation in the power supply wiring is small and it can be shared with the power supply of the decoder circuit. It is possible. In such a device, the arrangement of the V ss power supply wiring 12 and the V dd power supply wiring 22 in the peripheral circuit of the first embodiment is reversed. By doing so, the power supply wiring 22 and the mother wiring 22 a of the decoder circuit can be used as one power supply wiring.
• the surrounding portions 42.1 to 42.n formed below the power supply wiring 22a should have a length that can cause interference with one wiring.
• the resistance of the signal wires 31.1 to 31.1n can be further reduced. Then, the number of power supply wirings can be reduced, so that the lay-out can be simplified.
• the reliability of a common bus line for arranging a large number of wirings which increases with an increase in memory capacity, etc., and an increase in access speed are improved.
• the mother power supply wiring branched to the bus line should be placed near the signal wiring processing circuit arranged on the common bus line. Has been resolved.
• the rate adopted to solve the above problem is not a complicated rate as compared with the rate of the conventional semiconductor integrated circuit 111, but rather the number of connection points is reduced. It can be said that the layout is simplified from the point of view. Of course, the manufacturing process is not complicated from the conventional semiconductor integrated circuit.
• the layout of the power supply wiring according to the present invention can be adapted to the morph.
• the present invention can be applied not only to a memory chip but also to a semiconductor integrated circuit in which a memory cell is mounted, but furthermore, a combination of a common bus line type wiring and a signal processing circuit is used.
• the present invention can be applied to a semiconductor integrated circuit using the layout described above.

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• 1991
  • 1991-07-19 KR KR1019920700623A patent/KR100247267B1/ko not_active Expired - Fee Related
  • 1991-07-19 US US07/842,352 patent/US5378925A/en not_active Expired - Lifetime
  • 1991-07-19 JP JP51285391A patent/JP3182762B2/ja not_active Expired - Fee Related
  • 1991-07-19 DE DE69129445T patent/DE69129445T2/de not_active Expired - Fee Related
  • 1991-07-19 WO PCT/JP1991/000970 patent/WO1992002043A1/ja not_active Ceased
  • 1991-07-19 EP EP91913084A patent/EP0493615B1/en not_active Expired - Lifetime

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