US8152953B2 - Method of making printed wiring board and method of making printed circuit board unit - Google Patents
Method of making printed wiring board and method of making printed circuit board unit Download PDFInfo
- Publication number
- US8152953B2 US8152953B2 US12/365,279 US36527909A US8152953B2 US 8152953 B2 US8152953 B2 US 8152953B2 US 36527909 A US36527909 A US 36527909A US 8152953 B2 US8152953 B2 US 8152953B2
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- conductive
- adhesive sheet
- fillers
- matrix material
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4614—Manufacturing multilayer circuits by laminating two or more circuit boards the electrical connections between the circuit boards being made during lamination
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0218—Composite particles, i.e. first metal coated with second metal
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/032—Materials
- H05K2201/0323—Carbon
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0361—Etched tri-metal structure, i.e. metal layers or metal patterns on both sides of a different central metal layer which is later at least partly etched
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10227—Other objects, e.g. metallic pieces
- H05K2201/10378—Interposers
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10674—Flip chip
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0147—Carriers and holders
- H05K2203/0156—Temporary polymeric carrier or foil, e.g. for processing or transferring
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/06—Lamination
- H05K2203/061—Lamination of previously made multilayered subassemblies
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/4038—Through-connections; Vertical interconnect access [VIA] connections
- H05K3/4053—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
- H05K3/4069—Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in organic insulating substrates
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4641—Manufacturing multilayer circuits by laminating two or more circuit boards having integrally laminated metal sheets or special power cores
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
Definitions
- the embodiments discussed herein are related to a technique of bonding substrates together or an electronic component and a substrate together.
- the electrically-conductive paste includes matrix material made of a thermosetting resin and electrically-conductive particles dispersed in the matrix material.
- the electrically-conductive particles are metallic particles, for example.
- An adhesive sheet made of a resin material is sandwiched between printed wiring boards so as to bond the printed wiring boards to each other, for example. Lands on the printed wiring boards are opposed to each other through a through bore formed in the adhesive sheet. The through bore is filled with the electrically-conductive paste.
- the electrically-conductive paste is hardened or cured by heating. The adhesive sheet bonds the printed wiring boards to each other. An electric connection is established between the lands opposed to each other.
- a method of making a printed wiring board includes: setting an adhesive sheet made of a thermosetting resin between a first support body and a second support body so that a first electrically-conductive land on the first support body is opposed to a second electrically-conductive land on the second support body through an opening formed in the adhesive sheet; filling the opening with an electrically-conductive binder including matrix material and fillers when the first electrically-conductive land is opposed to the second electrically-conducive land, the matrix material containing a thermosetting resin, the fillers dispersed in the matrix material so as to unite with the first and second electrically-conductive lands based on intermetallic compounds formed between the fillers and the first and second electrically-conductive lands, respectively; softening the adhesive sheet by heating while the first support body is pressed against the second support body; inducing melting of the fillers by heating after the adhesive sheet has been softened; curing the matrix material by heating after the fillers have molten; and curing the adhesive sheet by heating after the matrix material
- a method of making a printed circuit board unit includes: setting an adhesive sheet made of a thermosetting resin between a first support body and a second support body so that a first electrically-conductive land on the first support body is opposed to a second electrically-conductive land on the second support body through an opening formed in the adhesive sheet; filling the opening with an electrically-conductive binder including matrix material and fillers when the first electrically-conductive land is opposed to the second electrically-conducive land, the matrix material containing a thermosetting resin, the fillers dispersed in the matrix material so as to unite with the first and second electrically-conductive lands based on intermetallic compounds formed between the fillers and the first and second electrically-conductive lands, respectively; softening the adhesive sheet by heating while the first support body is pressed against the second support body; inducing melting of the fillers by heating after the adhesive sheet has been softened; curing the matrix material by heating after the fillers have molten; and curing the adhesive sheet by heating after the matrix
- FIG. 1 is a side view schematically illustrating the cross-section of a printed wiring board according to an embodiment of the present invention
- FIG. 2 is an enlarged partial sectional view schematically illustrating an electrically-conductive body
- FIG. 3 is an enlarged partial sectional view schematically illustrating an adhesive sheet and an electrically-conductive binder for bonding a core substrate and a build-up layer unit;
- FIG. 4 is a graph presenting the relationship between the viscosity and the temperature, of the adhesive sheet
- FIG. 5 is a graph presenting the relationship between the elapsed time and the rate of curing reaction during a heat treatment on the adhesive sheet;
- FIG. 6 is a graph presenting the relationship between the viscosity and the temperature of matrix material contained in the electrically-conductive binder
- FIG. 7 is a graph presenting the relationship between the elapsed time and the rate of curing reaction during a heat treatment on the matrix material contained in the electrically-conductive binder;
- FIG. 8 is a sectional view schematically illustrating a metallic foil overlaid on a support body
- FIG. 9 is a sectional view schematically illustrating the metallic foil
- FIG. 10 is a sectional view schematically illustrating a method of forming an electrically-conductive land
- FIG. 11 is a sectional view schematically illustrating an insulating sheet overlaid on a copper foil
- FIG. 12 is a sectional view schematically illustrating an electrically-conductive layer formed on the insulating sheet
- FIG. 13 is a sectional view schematically illustrating a photoresist formed on the surface of the electrically-conductive layer
- FIG. 14 is a sectional view schematically illustrating an electrically-conductive pattern formed on the insulating sheet
- FIG. 15 is a sectional view schematically illustrating the build-up layer unit established on the support body
- FIG. 16 is a sectional view schematically illustrating the build-up layer unit after removal of the copper foil
- FIG. 17 is a side view schematically illustrating the cross-section of a printed circuit board unit according to an embodiment of the present invention.
- FIG. 18 is an enlarged partial sectional view schematically illustrating a method of making the printed circuit board unit.
- FIG. 1 schematically illustrates the cross-section of a printed wiring board 11 according to an embodiment of the present invention.
- the printed wiring board 11 is utilized as a probe card, for example. Such a probe card is set in a probe apparatus, for example. It should be noted that the printed wiring board 11 may be utilized in any other electronic apparatus.
- the printed wiring board 11 includes a core substrate 12 .
- the core substrate 12 includes a core layer 13 in the form of a thin plate.
- the core layer 13 includes an electrically-conductive layer 14 .
- Carbon fiber cloth is embedded in the electrically-conductive layer 14 .
- the fibers of the carbon fiber cloth extend in the in-plane direction of the core layer 13 . This results in a significant restriction of the thermal expansion of the electrically-conductive layer 14 in the in-plane direction.
- the carbon fiber cloth has an electrical conductivity.
- the carbon fiber cloth is impregnated with a resin material so as to form the electrically-conductive layer 14 .
- the resin material is a thermosetting resin such as epoxy resin.
- the carbon fiber cloth is a woven or nonwoven cloth made of carbon fiber yarns.
- the core layer 13 includes core insulating layers 15 , 16 overlaid on the front and back surfaces of the electrically-conductive layer 14 , respectively.
- the electrically-conductive layer 14 is sandwiched between the core insulating layers 15 , 16 .
- the core insulating layer 15 , 16 are insulative.
- Glass fiber cloth is embedded in the core insulating layers 15 , 16 .
- the fibers of the glass fiber cloth extend along the front and back surfaces of the core layer 13 .
- the glass fiber cloth is impregnated with a resin material so as to form the core insulating layers 15 , 16 .
- the resin material is a thermosetting resin such as epoxy resin.
- the glass fiber cloth is a woven or nonwoven cloth made of glass fiber yarns.
- Through bores 17 are formed in the core layer 13 .
- the through bores 17 penetrate through the core layer 13 .
- the through bores 17 each define a columnar space.
- the longitudinal axis of the columnar space is set perpendicular to the front and back surfaces of the core layer 13 .
- the through bores 17 define circular openings on the front and back surfaces of the core layer 13 , respectively.
- a large-sized via 18 having a large diameter is formed in the individual through bore 17 .
- the large-sized via 18 is electrically conductive.
- the large-sized via 18 is formed in the shape of a cylinder along the inward wall surface of the through bore 17 .
- the large-sized via 18 is connected to annular electrically-conductive lands 19 on the front and back surfaces of the core layer 13 .
- the electrically-conductive lands 19 extend on the front and back surface of the core layer 13 .
- the large-sized via 18 and the electrically-conductive lands 19 are made of an electrically-conductive material such as copper.
- the inner space of the large-sized via 18 in the through bore 17 is filled with a filling material 21 made of a resin material.
- the filling material 21 takes the form of a cylinder along the inward wall surface of the large-sized via 18 .
- the filling material 21 is a thermosetting resin such as epoxy resin.
- a ceramic fillers are embedded in the epoxy resin, for example.
- the core substrate 12 includes insulating layers 22 , 23 overlaid on the front and back surfaces of the core layer 13 , respectively.
- the back surfaces of the insulating layers 22 , 23 are received on the front and back surfaces of the core layer 13 , respectively.
- the core layer 13 is sandwiched between the insulating layers 22 , 23 .
- the insulating layers 22 , 23 cover over the exposed surfaces of the filling material 21 .
- the insulating layers 22 , 23 are insulative.
- Glass fiber cloth is embedded in the insulating layers 22 , 23 .
- the fibers of the glass fiber cloth extend along the front and back surfaces of the core layer 13 .
- the glass fiber cloth is impregnated with a resin material so as to form the insulating layers 22 , 23 .
- the resin material is a thermosetting resin such as epoxy resin.
- the glass fiber cloth is a woven or nonwoven cloth made of glass fiber yarns.
- Through bores 24 are formed in the core substrate 12 .
- the through bores 24 penetrate through the core layer 13 and the insulating layers 22 , 23 .
- the individual through bore 24 is located inside the corresponding through bore 17 .
- the through bore 24 penetrates through the corresponding filling material 21 .
- the through bores 24 each define a columnar space.
- the individual through bore 24 is coaxial with the corresponding through bore 17 .
- the individual through bore 24 defines circular openings on the front and back surfaces of the core substrate 12 , respectively.
- a small-sized via 25 having a diameter smaller than that of the large-sized via 18 is formed in the individual through bore 24 .
- the small-sized via 25 is electrically conductive.
- the small-sized via 25 is formed in the shape of a cylinder along the inward wall surface of the through bore 24 .
- the filling material 21 serves to insulate the large-sized via 18 and the small-sized via 25 from each other.
- the small-sized via 25 is made of an electrically-conductive material such as copper.
- Electrically-conductive lands 26 are formed on the surfaces of the insulating layers 22 , 23 .
- the small-seized via 25 is connected to the electrically-conductive lands 26 on the surfaces of the insulating layers 22 , 23 .
- the electrically-conductive lands 26 are made of an electrically-conductive material such as copper.
- the inner space of the small-sized via 25 is filled with a filling material 27 made of an insulating resin between the electrically-conductive lands 26 , 26 .
- the filling material 27 is formed in the shape of a column, for example.
- the filling material 27 is a thermosetting resin such as epoxy resin. Ceramic fillers are embedded in the epoxy resin.
- Build-up layers 28 , 29 are formed on the surfaces of the insulating layers 22 , 23 , respectively.
- the back surfaces of the build-up layers 28 , 29 are received on the surfaces of the insulating layers 22 , 23 , respectively.
- the core layer 13 and the insulating layers 22 , 23 are sandwiched between the build-up layers 28 , 29 .
- the build-up layers 28 , 29 cover over the electrically-conductive lands 26 , 26 , respectively.
- the build-up layers 28 , 29 are insulative.
- Glass fiber cloth is embedded in the build-up layers 28 , 29 .
- the fibers of the glass fiber cloth extend along the surfaces of the insulating layers 22 , 23 .
- the glass fiber cloth is impregnated with a resin material so as to form the build-up layers 28 , 29 .
- the resin material is a thermosetting resin such as epoxy resin.
- the glass fiber cloth is a woven or nonwoven cloth made of glass fiber yarns.
- Electrically-conductive lands 31 , 31 are formed on the front surfaces of the build-up layers 28 , 29 .
- the electrically-conductive lands 31 extend along the front surfaces of the build-up layers 28 , 29 .
- the electrically-conductive lands 31 are electrically connected to the corresponding electrically-conductive lands 26 .
- Vias 32 are formed in the build-up layers 28 , 29 to connect the electrically-conductive lands 31 to the electrically-conductive lands 26 .
- Through bores are formed in the build-up layers 28 , 29 at positions between the electrically-conductive lands 31 and the corresponding electrically-conductive lands 26 so as to form the vias 32 .
- the through bores are filled with an electrically-conductive material.
- the electrically-conductive lands 31 and the vias 32 are made of an electrically-conductive material such as copper.
- the printed wiring board 11 includes build-up layer units 33 , 34 overlaid on the front and back surfaces of the core substrate 12 , respectively.
- the back surfaces of the build-up layer units 33 , 34 are received on the front and back surfaces of the core substrate 12 , respectively.
- the build-up layer units 33 , 34 each include a layered structure including insulating layers 35 and electrically-conductive patterns 36 .
- the insulating layers 35 and the electrically-conductive patterns 36 are alternatively overlaid on one another.
- the electrically-conductive patterns 36 in different layers are electrically connected to each other through a via or vias 37 .
- a through bore is formed in the insulating layer 35 at a position between the electrically-conductive patterns 36 so as to form the individual via 37 .
- the through bore is filled with an electrically-conductive material.
- the insulating layers 35 are made of a thermosetting resin such as epoxy resin.
- the electrically-conductive patterns 36 and the vias 37 are made of an electrically-conductive material such as copper.
- Electrically-conductive pads 38 are exposed on the front surfaces of the build-up layer units 33 , 34 .
- the electrically-conductive pads 38 are made of an electrically-conductive material such as copper.
- An overcoat layer 39 is overlaid on the front surface of the each of the build-up layer units 33 , 34 at positions off the electrically-conductive pads 38 .
- the overcoat layer 39 is made of a resin material, for example.
- Electrically-conductive lands 41 are exposed on the back surfaces of the build-up layer units 33 , 34 .
- the electrically-conductive lands 41 extend along the back surface of the lowest one of the insulating layers 35 in the individual build-up layer unit 33 , 34 .
- the electrically-conductive lands 41 are electrically connected to the corresponding electrically-conductive patterns 36 through the vias 37 .
- the electrically-conductive lands 41 are made of an electrically-conductive material such as copper.
- the electrically-conductive lands 41 are electrically connected to the corresponding electrically-conductive lands 31 as described later in detail. Electrical connection is thus established between the electrically-conductive pads 38 exposed on the front surface of the printed wiring board 11 and the corresponding electrically-conductive pads 38 exposed on the back surface of the printed wiring board 11 .
- the electrically-conductive pads 38 on the back surface of the printed wiring board 11 are connected to the corresponding electrode terminals of the probe apparatus, for example.
- the electrically-conductive pads 38 on the front surface of the printed wiring board 11 receive the corresponding electrode bumps of the semiconductor wafer, for example.
- the electrically-conductive pads 38 are connected to the corresponding electrode bumps.
- a heat cycle test is then executed so as to examine the semiconductor wafer, for example.
- Bonding layers 42 , 42 are sandwiched between the core substrate 12 and the build-up layer units 33 , 34 , respectively.
- the bonding layers 42 each include an insulating base 43 .
- the insulating base 43 is insulative.
- the insulating base 43 is made of a thermosetting resin such as epoxy resin. Glass fiber cloth may be embedded in the insulating base 43 in the same manner as described above, for example.
- Electrically-conductive bodies 44 are embedded in the bonding layers 42 .
- the individual electrically-conductive body 44 is sandwiched between the corresponding electrically-conductive lands 31 , 41 .
- the electrically-conductive body 44 includes a number of spherical conductive bodies 45 .
- the individual spherical conductive body 45 includes a metallic fine particle 46 such as a copper particle, as depicted in FIG. 2 .
- the surface of the metallic fine particle 46 is coated with a copper-tin alloy layer 47 .
- the copper-tin alloy layer 47 on the metallic fine particle 46 is in contact with the copper-tin alloy layers 47 on the adjacent metallic fine particles 46 .
- the copper-tin alloy layers 47 serve to establish an electric connection between the electrically-conductive lands 31 , 41 .
- the melting point of the copper-tin alloy exceeds 400 degrees Celsius.
- the metallic fine particles 46 are embedded in a bismuth material 48 .
- the bismuth material 48 fills a space between the metallic fine particles 46 in the electrically-conductive body 44 . This results in suppression of the electrical resistance of the electrically-conductive body 44 . A sufficient electrical conduction is established.
- the bismuth material 48 has the melting point equal to 270 degrees Celsius. Bonding between the electrically-conductive lands 31 , 41 is thus reliably maintained unless the bismuth material 48 is heated to a temperature exceeding 271 degrees Celsius.
- the aforementioned insulating base 43 surrounds the bismuth material 48 .
- the core substrate 12 is first prepared. Simultaneously, the build-up layer units 34 , 34 are prepared. A method of making the build-up layer units 33 , 34 will be described later in detail.
- Adhesive sheets 51 are overlaid on the front and back surfaces of the core substrate 12 , respectively, as depicted in FIG. 3 . The back surfaces of the adhesive sheets 51 are received on the front and back surfaces of the core substrate 12 , respectively.
- the build-up layer units 33 , 34 are overlaid on the corresponding front surfaces of the adhesive sheets 51 , respectively.
- the adhesive sheets 51 are made of a thermosetting resin such as epoxy resin. Glass fiber cloth may be embedded in the adhesive sheets 51 , for example.
- An opening 52 is formed in the individual adhesive sheet 51 at a position between the electrically-conductive lands 31 , 41 .
- the opening 52 penetrates through the adhesive sheet 51 .
- the electrically-conductive lands 31 , 41 are opposed to each other through the opening 52 .
- the shape of the opening 52 may be determined depending on the shape of the electrically-conductive lands 31 , 41 .
- the opening 52 is filled with an electrically-conductive binder 53 .
- a screen printing process may be employed to fill the opening 52 with the electrically-conductive binder 53 .
- the electrically-conductive binder 53 includes matrix material 53 a made of a thermosetting resin.
- the thermosetting resin is epoxy resin, for example.
- a hardener such as a carboxyl group, an amino group or a phenolic group, is added to the epoxy resin.
- An activator such as an adipic acid, a succinic acid, or a sebacic acid, is also added to the epoxy resin.
- the fillers 53 b disperse in the matrix material 53 a .
- the fillers 53 b include metallic fine particles, namely copper particles, each having the surface fully coated with a tin-bismuth alloy.
- the tin-bismuth alloy contains bismuth in a range from 50 wt % to 60 wt % (preferably at 58 wt % approximately).
- the tin-bismuth alloy of this type is prevented from shrinkage to the utmost when the tin bismuth alloy is cured or hardened.
- the melting point of the tin-bismuth alloy resides in a range between 139 degrees Celsius and 150 degrees Celsius.
- the tin-bismuth alloy may be plated entirely over the surface of the individual copper particle.
- the thickness of such a tin-bismuth alloy layer may be set in a range from 1.0 ⁇ m to 5.0 ⁇ m.
- the thickness of the tin-bismuth alloy layer is preferably set in a range from 1.0 ⁇ m to 2.0 ⁇ m.
- a plating film having a thickness smaller than 1.0 ⁇ m cannot have sufficient stability and bonding properties.
- An increase in the thickness leads to an increase in a thermal energy required for the tin-bismuth alloy during a bonding process. Accordingly, it is desired to minimize an increase in the thickness.
- a heat treatment is effected on the layered body of the core substrate 12 , the adhesive sheets 51 and the build-up layer units 33 , 34 .
- the temperature of heat is set in a range from 150 degrees Celsius to 180 degrees Celsius.
- Pressure is applied to the layered body in the direction perpendicular to the front and back surfaces of the core substrate 12 during the heat treatment.
- the core substrate 12 , the adhesive sheets 51 , 51 and the build-up layer units 33 , 34 are in this manner tightly united together.
- the adhesive sheets 51 are softened in response to a rise in the temperature.
- the adhesive sheets 51 thus deform in line with the surfaces of the core substrate 12 and the layered bodies. Such deformation of the adhesive sheets 51 serves to absorb the unevenness of the surfaces of the core substrate 12 and the layered bodies.
- the softened adhesive sheets 51 allow the copper particles between the electrically-conductive lands 31 , 41 to reliably contact with one another.
- the flowability of the copper particles serves to absorb a change in the distance between the electrically-conductive lands 31 , 41 .
- the tin-bismuth alloy melts after the adhesive sheets 51 have been softened.
- the tin forms intermetallic compounds, namely the copper-tin (Cu 6 Sn 5 ) alloy layers 47 , on the surfaces of the electrically-conductive lands 31 , 41 and the surfaces of the copper particles.
- the activator serves to accelerate generation of the intermetallic compounds.
- the copper-tin alloy layers 47 on the copper particles are brought in contact with one another.
- the copper-tin alloy layers 47 serve to bond the copper particles to the electrically-conductive land 31 , 41 as well as the copper particles to one another.
- the spherical conductive bodies 45 are established. Simultaneously, bismuth fills a space between the copper-tin alloy layers 47 .
- the bismuth embeds the spherical conductive bodies 45 between the electrically-conductive lands 31 , 41 .
- the bismuth is hardened or cured.
- the bismuth material 48 is formed. Since the copper particles are kept in a solid state, the electrically-conductive binder 53 is prevented from being excessively flattened under an applied pressure.
- the matrix material made of the thermosetting resin is then hardened and cured.
- the spherical conductive bodies 45 and the bismuth material 48 are wrapped or embedded in the cured matrix material.
- the adhesive sheets 51 are hardened or cured.
- the matrix material and the adhesive sheets 51 are united together.
- the matrix material and the adhesive sheets 51 in combination form the insulating bases 43 of the bonding layers 42 .
- the build-up layer units 33 , 34 are then coupled to the front and back surfaces of the core substrate 12 , respectively.
- the printed wiring board 11 is then released from the heat and pressure.
- the printed wiring board 11 is in this manner produced.
- the bismuth material 48 in the printed wiring board 11 has the melting point of 271 degrees Celsius.
- the printed wiring board 11 is subjected to heat having a temperature equal to or higher than the melting point of solder. Solder generally melts at a temperature lower than the 271 degrees Celsius.
- the bismuth material 48 is thus kept in a solid state. A sufficient bonding strength is maintained. Since the thickness of the tin-bismuth alloy layer is set smaller than 5.0 ⁇ m (preferably smaller than 2.0 ⁇ m) as described above, a minimum amount of a thermal energy is sufficient to cause reaction of the tin with the copper.
- Copper particles of a different kind may be added to the aforementioned electrically-conductive binder 53 in addition to the aforementioned copper particles.
- the copper particles of a different kind are each coated with a silver plating layer or a tin plating layer.
- the copper particles of the different kind contribute to improvement of the wettability of the copper. The bonding strength of the copper is thus improved.
- FIG. 4 is a graph presenting the relationship between the viscosity and the temperature for the adhesive sheet 51 made of a material according to a specific example.
- a rapid increase in the temperature results in a delay of softening of the adhesive sheet 51 .
- the rapider pace the temperature increases at a higher temperature the curing of the adhesive sheet 51 starts at.
- the temperature of heat applied to the adhesive sheet 51 increases by 10 degrees Celsius per minute, for example, the adhesive sheet 51 starts to get cured at 146.3 degrees Celsius.
- FIG. 5 is a graph presenting the relationship between the elapsed time and the rate of curing reaction during the heat treatment on the adhesive sheet 51 . It is obvious from FIG.
- FIG. 6 is a graph presenting the relationship between the viscosity and the temperature of the matrix material 53 a contained in the electrically-conductive binder 53 .
- the viscosity depends on the temperature irrespective of the pace of an increase in the temperature. Curing starts when the temperature reaches 140 degrees Celsius approximately at any pace of an increase in the temperature. As the temperature increases at a rapider pace, the curing occurs at a higher temperature.
- FIG. 7 is a graph presenting the relationship between the elapsed time and the rate of curing reaction during the heat treatment on the matrix material 53 a . It is obvious from FIG. 7 that the higher the temperature of the heat gets, the shorter time the matrix material 53 a is cured in. Accordingly, adjustment on the temperature of the heat and the pace of increasing the temperature of the heat can be utilized to control the start of softening, the start of curing, and the completion of curing, of the matrix material 53 a.
- a support body 55 is prepared.
- the support body 55 includes an epoxy resin base 55 a .
- Glass fiber cloth is embedded in the epoxy resin base 55 a .
- the fibers of the glass fiber cloth extend along the front and back surfaces of the epoxy resin base 55 a .
- the glass fiber cloth is impregnated with epoxy resin so as to form the epoxy resin base 55 a .
- the thickness of the epoxy resin base 55 a is set in a range from 0.3 mm to 0.4 mm.
- a copper foil 55 b having a thickness of 9.0 ⁇ m approximately is attached to the front surface of the epoxy resin base 55 a .
- the epoxy resin base 55 a exhibits a rigidity sufficient for preventing deformation such as shrinkage or curvature in the process of producing the build-up layer units 33 , 34 .
- the adhesive film 56 is made of a thermosetting resin such as epoxy resin.
- the first metallic film 57 is made out of a copper foil having a thickness of 18.0 ⁇ m approximately, for example.
- the second metallic film 58 is made out of two layers of copper foils having a total thickness of 18.0 ⁇ m approximately, for example.
- An intermediate barrier layer is sandwiched between the copper foils of the second metallic film 58 .
- the intermediate barrier layer is made of nickel, for example.
- the intermediate barrier layer may be made of a material capable of remaining after the etching of a copper foil.
- the second metallic film 58 extends wider out of the contour of the first metallic film 57 .
- Vacuum pressing is applied to the support body 55 , the adhesive film 56 , the first metallic film 57 and the second metallic film 58 .
- a vacuum hot press is employed in the vacuum pressing.
- the second metallic film 58 is bonded to the front surface of the support body 55 outside the contour of the first metallic film 57 .
- the back surface of the second metallic film 58 coheres to the front surface of the first metallic film 57 .
- photolithography is effected on a copper foil 58 a on the front side of the second metallic film 58 , for example.
- a photoresist 61 is formed on the surface of the copper foil 58 a .
- the copper foil 58 a is exposed to an etchant at a position off the photoresist 61 , for example.
- the copper foil 58 a is removed from the position off the photoresist film 61 .
- An intermediate barrier layer 58 b serves to block the etchant.
- a copper foil 58 c on the back side of the second metallic film 58 thus remains as it is.
- An electrically-conductive pattern made of copper is in this manner formed on the surface of the intermediate barrier layer 58 b .
- the electrically-conductive pattern corresponds to the aforementioned electrically-conductive lands 41 .
- an insulating sheet 62 is overlaid on the surface of the intermediate barrier layer 58 b .
- the insulating sheet 62 and the intermediate barrier layer 58 b are subjected to heat under pressure, so that the insulating sheet 62 is bonded to the surface of the intermediate barrier layer 58 b .
- the insulating sheet 62 covers over the electrically-conductive lands 41 .
- An adhesive sheet made of a thermosetting resin, a prepreg of a thermosetting resin containing glass fiber cloth, or the like, may be employed as the insulating sheet 62 .
- through bores 63 are formed in the insulating sheet 62 at predetermined positions.
- a laser is utilized to form the through bores 63 .
- the through bore 63 defines a hollow space on the corresponding electrically-conductive land 41 .
- Copper plating is effected on the surface of the insulating sheet 62 , for example.
- An electrically-conductive layer 64 made of copper is in this manner formed on the surface of the insulating sheet 62 .
- a via 65 made of copper is established in the through bore 63 .
- a photoresist 66 is formed on the surface of the electrically-conductive layer 64 , for example.
- the photoresist 66 defines voids 67 in a predetermined pattern on the surface of the electrically-conductive layer 64 .
- the voids 67 are located at positions off the vias 65 .
- a predetermined electrically-conductive pattern 68 is formed out of the electrically-conductive layer 64 based on an etching process. Such lamination of insulating sheets 69 and formation of electrically-conductive patterns 71 are then repeated. A predetermined number of layers of the electrically-conductive patterns 71 are in this manner formed.
- a predetermined layered body 72 is formed on the intermediate barrier layer 58 b , as depicted in FIG. 15 .
- the support body 55 , the adhesive film 56 , the first metallic film 57 and the second metallic film 58 are cut out along the contour of the first metallic film 57 inside the contour of the first metallic film 57 .
- the copper foil 58 a , the intermediate barrier layer 58 b and the layered body 72 are separated from the surface of the first metallic film 57 .
- the intermediate barrier layer 58 b is removed based on an etching process.
- the electrically-conductive lands 41 are exposed.
- the build-up layer units 33 , 34 are in this manner formed. Nickel and gold plating films may be formed on the surfaces of the electrically-conductive patterns 71 and the electrically-conductive lands 41 on the front and back surfaces of the build-up layer units 33 , 34 .
- the aforementioned bonding layer 42 may be utilized for mounting an electronic component 81 such as a semiconductor chip in the process of making a printed circuit board unit 79 , for example.
- the bonding layer 42 can function as a so-called underfill material.
- the electrically-conductive body 44 in the bonding layer 42 serves to connect electrically-conductive lands 83 on the electronic component 81 to corresponding electrically-conductive lands 84 on the printed wiring board 82 .
- an adhesive sheet 85 is sandwiched between the electronic component 81 and the printed wiring board 82 in the same manner as described above, as depicted in FIG. 18 , for example.
- An opening 86 is formed in the adhesive sheet 85 between the electrically-conductive land 83 on the electronic component 81 and the corresponding electrically-conductive land 84 on the printed wiring board 82 .
- the opening 86 penetrates through the adhesive sheet 85 .
- the electrically-conductive land 83 on the electronic component 81 is opposed to corresponding the electrically-conductive land 84 on the printed wiring board 82 in the opening 86 .
- the opening 86 is filled with the electrically-conductive binder 53 .
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)
Applications Claiming Priority (2)
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JP2008143664A JP5217640B2 (ja) | 2008-05-30 | 2008-05-30 | プリント配線板の製造方法およびプリント基板ユニットの製造方法 |
JP2008-143664 | 2008-05-30 |
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US20090294056A1 US20090294056A1 (en) | 2009-12-03 |
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US12/365,279 Active 2029-02-18 US8152953B2 (en) | 2008-05-30 | 2009-02-04 | Method of making printed wiring board and method of making printed circuit board unit |
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US (1) | US8152953B2 (ko) |
JP (1) | JP5217640B2 (ko) |
KR (1) | KR101125995B1 (ko) |
CN (1) | CN101594748B (ko) |
TW (1) | TW200950626A (ko) |
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US20180126494A1 (en) * | 2015-11-05 | 2018-05-10 | Murata Manufacturing Co., Ltd. | Bonding member and method for manufacturing bonding member |
US20190304943A1 (en) * | 2016-12-01 | 2019-10-03 | Dexerials Corporation | Anisotropic conductive film |
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JP6291738B2 (ja) | 2013-07-25 | 2018-03-14 | 富士通株式会社 | 回路基板、回路基板の製造方法及び電子機器 |
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US8809859B2 (en) | 2012-10-04 | 2014-08-19 | Apple Inc. | Devices and methods for embedding semiconductors in printed circuit boards |
US10625376B2 (en) | 2015-09-15 | 2020-04-21 | Murata Manufacturing Co., Ltd. | Bonding member, method for manufacturing bonding member, and bonding method |
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Also Published As
Publication number | Publication date |
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JP2009290134A (ja) | 2009-12-10 |
CN101594748B (zh) | 2011-04-06 |
TW200950626A (en) | 2009-12-01 |
US20090294056A1 (en) | 2009-12-03 |
KR20090124914A (ko) | 2009-12-03 |
CN101594748A (zh) | 2009-12-02 |
KR101125995B1 (ko) | 2012-03-19 |
JP5217640B2 (ja) | 2013-06-19 |
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