US20200251492A1 - Dense arrays and charge storage devices - Google Patents

Dense arrays and charge storage devices Download PDF

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Publication number
US20200251492A1
US20200251492A1 US16/851,282 US202016851282A US2020251492A1 US 20200251492 A1 US20200251492 A1 US 20200251492A1 US 202016851282 A US202016851282 A US 202016851282A US 2020251492 A1 US2020251492 A1 US 2020251492A1
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US
United States
Prior art keywords
layer
array
gate
silicon
memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
US16/851,282
Inventor
Thomas H. Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SanDisk Technologies LLC
Original Assignee
SanDisk Technologies LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to US63970200A priority Critical
Priority to US63957900A priority
Priority to US63974900A priority
Priority to US74512500A priority
Priority to US80123301A priority
Priority to US27985501P priority
Priority to US09/927,648 priority patent/US6881994B2/en
Priority to US10/842,008 priority patent/US7129538B2/en
Priority to US13/027,113 priority patent/US20110156044A1/en
Priority to US13/468,731 priority patent/US8981457B2/en
Priority to US14/227,644 priority patent/US8853765B2/en
Priority to US14/494,320 priority patent/US9171857B2/en
Priority to US14/856,131 priority patent/US9559110B2/en
Priority to US15/368,396 priority patent/US10008511B2/en
Priority to US15/971,293 priority patent/US10644021B2/en
Application filed by SanDisk Technologies LLC filed Critical SanDisk Technologies LLC
Priority to US16/851,282 priority patent/US20200251492A1/en
Assigned to SANDISK TECHNOLOGIES LLC reassignment SANDISK TECHNOLOGIES LLC ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: LEE, THOMAS H.
Publication of US20200251492A1 publication Critical patent/US20200251492A1/en
Pending legal-status Critical Current

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