US10385948B2 - Electric actuator - Google Patents

Electric actuator Download PDF

Info

Publication number
US10385948B2
US10385948B2 US15/324,373 US201515324373A US10385948B2 US 10385948 B2 US10385948 B2 US 10385948B2 US 201515324373 A US201515324373 A US 201515324373A US 10385948 B2 US10385948 B2 US 10385948B2
Authority
US
United States
Prior art keywords
nut
screw shaft
threaded part
sliding screw
electric actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active, expires
Application number
US15/324,373
Other languages
English (en)
Other versions
US20170211671A1 (en
Inventor
Toru Nakayama
Toru Sugiyama
Ryuichi Masui
Hiroyuki Okuhira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SMC Corp
Original Assignee
SMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SMC Corp filed Critical SMC Corp
Assigned to SMC CORPORATION reassignment SMC CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MASUI, RYUICHI, NAKAYAMA, TORU, OKUHIRA, HIROYUKI, SUGIYAMA, TORU
Publication of US20170211671A1 publication Critical patent/US20170211671A1/en
Application granted granted Critical
Publication of US10385948B2 publication Critical patent/US10385948B2/en
Active legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C23C14/0611—Diamond
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H57/00—General details of gearing
    • F16H57/04—Features relating to lubrication or cooling or heating
    • F16H57/048—Type of gearings to be lubricated, cooled or heated
    • F16H57/0497—Screw mechanisms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/204—Axial sliding means, i.e. for rotary support and axial guiding of nut or screw shaft
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H2025/2062—Arrangements for driving the actuator
    • F16H2025/2075—Coaxial drive motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
    • F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
    • F16H25/20—Screw mechanisms
    • F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
    • F16H2025/249—Special materials or coatings for screws or nuts

Definitions

  • the present invention relates to an electric actuator including a sliding screw shaft and a nut that is screw-engaged with the sliding screw shaft, the sliding screw shaft being configured to rotate under operation of a motor to thereby cause the nut to be displaced in an axial direction of the sliding screw shaft.
  • An electric actuator includes a feed screw shaft that rotates by operation of a motor, and a nut that is screw-engaged with the feed screw shaft.
  • a feed screw shaft in general, a ball screw shaft or a sliding screw shaft is used.
  • the ball screw shaft is made of quenched steel and the sliding screw shaft is made of iron, and nickel-plated or hard-chromium-plated.
  • the nut screw-engaged with the sliding screw shaft is made of copper, resin, etc.
  • Japanese Laid-Open Patent Publication No. 2014-047884 proposes a technical concept regarding an electric actuator having a ball screw shaft.
  • a diamond-like carbon (DLC: Diamond-Like Carbon) film is formed on a rod seal member to decrease the friction coefficient between the rod and the rod seal member to ensure smooth operation, and improve abrasion resistance.
  • DLC Diamond-Like Carbon
  • the size of the nut screw-engaged with the ball screw shaft is relatively large, and consequently, the electric actuator has a large size. Further, large operation noises due to circulation of steel balls are produced disadvantageously.
  • the size of the nut screw-engaged with the sliding screw shaft and the operation noises can be reduced relatively. However, abrasion occurs easily in comparison with the case where the ball screw shaft is used.
  • the sliding screw shaft and nut made of light metal such as aluminum or light metal alloy such as aluminum alloy to thereby reduce the load (inertial force) on the motor.
  • abrasion of the sliding screw shaft and the nut tends to occur more easily.
  • the inventors of the present application conducted stress analysis of the sliding screw shaft and the nut at the time of operating the electric actuator, and found that stress concentration occurs on a region of a threaded part of the nut that is located within a range from the starting end (terminating end) to the third thread of the threaded part in an axial direction thereof. Further, the inventors of the present application found that it is effective to form a diamond-like carbon film on at least one of the region of the threaded part of the nut, which is located within a range from the starting end to the third thread in the axial direction, and a threaded part of the sliding screw shaft, in suppressing of sliding noises generated between the nut and the sliding screw shaft (in achieving an almost silent state).
  • the present invention has been made taking such tasks into account, and an object of the present invention is to provide an electric actuator which makes it possible to improve the abrasion resistance and the durability of a sliding screw shaft and a nut, and achieve reduction of the weight, size and noises.
  • An electric actuator includes a sliding screw shaft, and a nut screw-engaged with the sliding screw shaft, the sliding screw shaft being configured to rotate under operation of a motor to thereby cause the nut to be displaced in an axial direction of the sliding screw shaft.
  • the sliding screw shaft is made of light metal or light metal alloy.
  • a diamond-like carbon film is formed on at least one of a region of a threaded part of the nut, and a threaded part of the sliding screw shaft, the region being located within a range from a starting end of the threaded part of the nut in an axial direction thereof to at least a third thread of the threaded part of the nut.
  • the sliding screw shaft is made of light metal or light metal alloy, it is possible to reduce the load (inertia force) on the motor. Therefore, it is possible to reduce the size of the motor. Stated otherwise, it is possible to increase the maximum working load of the electric actuator without increasing the size (output) of the motor. Further, since the sliding screw shaft is used instead of the ball screw shaft, it is possible to reduce the size of the nut.
  • a diamond-like carbon film is formed on at least one of a region of the threaded part of the nut that is located within a range from the starting end in the axial direction to at least the third thread, and the threaded part of the sliding screw shaft, it is possible to reduce abrasion of the sliding screw shaft and the nut and improve the efficiency of the screw, while suppress sliding noises generated between the sliding screw shaft and the nut. Accordingly, it is possible to improve the abrasion resistance and the durability of the sliding screw shaft and the nut, and achieve reduction of the weight, size and noises of the electric actuator.
  • the diamond-like carbon film is formed on a region of the threaded part of the nut that is located within the range from the starting end to at least the third thread, and on a region thereof that is located within a range from a terminating end of the threaded part of the nut in the axial direction to at least a third thread of the threaded part of the nut.
  • the thickness of the diamond-like carbon film on a first starting end portion of the threaded part of the nut that is located at a first thread from the starting end is larger than the thickness of the diamond-like carbon film on a second starting end portion of the threaded part of the nut that is located at a second thread from the starting end.
  • the thickness of the diamond-like carbon film on a first terminating end portion of the threaded part of the nut that is located at a first thread from the terminating end is larger than the thickness of the diamond-like carbon film on a second terminating end portion of the threaded part of the nut that is located at a second thread from the terminating end.
  • the diamond-like carbon film is formed on a region of the threaded part of the nut that is located within a range from the starting end to the terminating end.
  • the thickness of the diamond-like carbon film on the region of the threaded part of the nut that is located within the range from the starting end to the third thread and on the region thereof that is located within the range from the terminating end to the third thread is equal to or larger than the thickness of the diamond-like carbon film on an intermediate region of the threaded part of the nut, the intermediate region being located within a range from a fourth thread from the starting end to a fourth thread from the terminating end.
  • the thickness of the diamond-like carbon film on the regions of the threaded part of the nut that are located within a range from the starting end to the third thread and a range from the terminating end to the third thread where stress tends to be concentrated at the time of operating the electric actuator is relatively large, it is possible to improve the durability of the sliding screw shaft and the nut effectively.
  • the diamond-like carbon film may not be formed on at least part of an intermediate region of the threaded part of the nut that is located within a range from a fourth thread from the starting end to a fourth thread from the terminating end.
  • the diamond-like carbon film may preferably be formed on both of the region of the threaded part of the nut, which is located within the range from the starting end to at least the third thread, and the threaded part of the sliding screw shaft. In the structure, it is possible to improve the abrasion resistance of the sliding screw shaft and the nut to a greater extent.
  • the sliding screw shaft may be made of aluminum or aluminum alloy
  • an alumite film may be formed on the threaded part of the sliding screw shaft
  • the diamond-like carbon film may be formed on the region of the threaded part of the nut, which is located within the range from the starting end to at least the third thread.
  • the nut is made of light metal or light metal alloy.
  • the structure since it is possible to reduce the load on the motor to a greater extent, it is possible to achieve further reduction of the weight and size of the electric actuator.
  • the diamond-like carbon film may be formed on the threaded part of the sliding screw shaft
  • the nut may be made of aluminum or aluminum alloy
  • an alumite film may be formed on the threaded part of the nut.
  • the diamond-like carbon film may be formed on the threaded part of the sliding screw shaft
  • the nut may be made of iron or iron alloy
  • a chromium film or a nickel film may be formed on the threaded part of the nut.
  • the thickness of the diamond-like carbon film is 0.1 ⁇ m or more and 6.0 ⁇ m or less.
  • the thickness of the diamond-like carbon film is 0.1 ⁇ m or more, it is possible to suitably suppress early peeling of the diamond-like carbon film due to abrasion. Further, since the thickness of the diamond-like carbon film is 6.0 ⁇ m or less, it is possible to reliably form the diamond-like carbon film.
  • the sliding screw shaft has clearance space, and crests of the threaded part of the nut are placed in the clearance space in a state where the crests and the sliding screw shaft do not contact each other.
  • the structure even in the case where burrs produced at the crests of the threaded part of the nut are not completely removed, it is possible to prevent the damage to the threaded part (DLC film) of the sliding screw shaft due to the burrs.
  • the clearance space may be configured to store lubricant.
  • lubricant since it is possible to efficiently supply lubricant to a clearance (gap) between the sliding screw shaft and the nut, it is possible to improve the abrasion resistance and the durability of the sliding screw shaft to a greater extent, and achieve further noise reduction of the electric actuator.
  • the diamond-like carbon film is formed on at least one of a region of the threaded part of the nut that is located within a range from the starting end of the threaded part of the nut in the axial direction to at least the third thread, and the threaded part of the sliding screw shaft, it is possible to effectively improve the abrasion resistance and the durability of the sliding screw shaft and the nut, and achieve reduction of the weight, size, and noises.
  • FIG. 1 is a perspective view showing an electric actuator according to a first embodiment of the present invention
  • FIG. 2 is an exploded perspective view showing the electric actuator in FIG. 1 ;
  • FIG. 3 is a vertical cross sectional view with partial omission showing the electric actuator in FIG. 1 ;
  • FIG. 4 is a partial enlarged view showing the electric actuator in FIG. 3 ;
  • FIG. 5 is an enlarged vertical cross sectional view of a nut shown in FIG. 2 ;
  • FIG. 6A is an enlarged vertical cross sectional view showing a nut according to a first modification of the embodiment and FIG. 6B is an enlarged vertical cross sectional view showing a nut according to a second modification of the embodiment;
  • FIG. 7 is a perspective view showing an electric actuator according to a second embodiment of the present invention.
  • FIG. 8 is an exploded perspective view showing the electric actuator in FIG. 7 ;
  • FIG. 9 is a vertical cross sectional view with partial omission showing the electric actuator in FIG. 7 ;
  • FIG. 10 is a partial enlarged cross sectional view showing the electric actuator in FIG. 7 ;
  • FIG. 11 is an enlarged cross sectional view showing a sliding screw shaft and a nut in FIG. 9 ;
  • FIG. 12 is an enlarged cross sectional view showing a part of the view in FIG. 11 .
  • an electric actuator 10 includes a motor 12 as a rotary drive source, a rod cover 16 disposed on the motor 12 through a housing 14 , a sliding screw shaft (feed screw shaft) 18 for transmitting a rotary drive force of the motor 12 , and a displaceable part 20 which is displaced in accordance with rotation of the sliding screw shaft 18 .
  • a motor 12 as a rotary drive source
  • a rod cover 16 disposed on the motor 12 through a housing 14
  • a sliding screw shaft (feed screw shaft) 18 for transmitting a rotary drive force of the motor 12
  • a displaceable part 20 which is displaced in accordance with rotation of the sliding screw shaft 18 .
  • the right side (motor 12 side) of the sliding screw shaft 18 will be referred to as the “proximal end” side
  • the left side (socket 56 side) of the sliding screw shaft 18 will be referred to as the “distal end” side.
  • the motor 12 may be a servo motor such as a brushed DC motor, a brushless DC motor, or a stepping motor.
  • the housing 14 has an annular shape.
  • the housing 14 is externally fitted onto a motor adaptor 22 of the motor 12 .
  • the rod cover 16 includes an elongated outer cylinder 24 externally fitted onto the housing 14 , and an end block 26 provided at the distal end of the outer cylinder 24 .
  • the outer cylinder 24 is a tube member having a cylindrical shape.
  • a rod 54 of the displaceable part 20 described later is provided inside the outer cylinder 24 .
  • the end block 26 has a quadrangular shape in a front view.
  • An insertion hole 30 is formed at the center of the end block 26 for inserting the rod 54 into the insertion hole 30 .
  • the sliding screw shaft 18 is coupled to a motor shaft through a coupling 32 .
  • the coupling 32 may be omitted in the case of using one common shaft as the sliding screw shaft 18 and the motor shaft.
  • a bearing 34 is provided at the proximal end of the sliding screw shaft 18 .
  • a rolling bearing may be used as the bearing 34 .
  • a sliding bearing may be used as the bearing 34 .
  • the sliding screw shaft 18 is made of light metal such as aluminum or light metal alloy such as aluminum alloy.
  • the light metal herein means metal having a specific gravity of 4 or less.
  • the sliding screw shaft 18 in comparison with the case where the sliding screw shaft 18 is made of heavy metal (metal having a specific gravity of more than 4) such as iron, the load on the motor 12 is reduced, and the weight reduction of the electric actuator 10 is achieved.
  • a diamond-like carbon film hereinafter referred to as the “DLC film 50 ” is formed on all threads of a threaded part 48 of the sliding screw shaft 18 (see FIG. 4 ).
  • the DLC film 50 is an amorphous hard film made of hydrocarbon or allotrope of carbon, having excellent lubricating performance, abrasion resistance, seizure resistance, etc.
  • the DLC film 50 may be formed by CVD (Chemical Vapor Deposition) or PVD (Physical Vapor Deposition), etc.
  • CVD Chemical Vapor Deposition
  • PVD Physical Vapor Deposition
  • an intermediate layer may be formed between the base material and the DLC film 50 .
  • the intermediate layer may be made of a composite layer of the base material and DLC.
  • the composition ratio of metal in the intermediate layer gets higher and the composition ratio of DLC in the intermediate layer gets lower.
  • the composition ratio of metal in the intermediate layer gets lower and the composition ratio of DLC in the intermediate layer gets higher.
  • the thickness of the DLC film 50 is 0.1 ⁇ m or more and 6.0 ⁇ m or less, more preferably, 0.3 ⁇ m or more and 4.0 ⁇ m or less, much more preferably, 0.5 ⁇ m or more and 3.5 ⁇ m or less.
  • the thickness of the DLC film 50 is less than 0.1 ⁇ m, there is a concern of early peeling of the DLC film 50 due to abrasion, and if the thickness of the DLC film 50 is more than 6.0 ⁇ m, it is not easy to form the DLC film 50 , the cost of the DLC film 50 becomes high, and pealing of the DLC film 50 occurs easily.
  • the thickness of the DLC film 50 is larger than the surface roughness Rz (distance between peak and valley of the roughness on the surface) of the counterpart material (DLC film 60 described later). The same applies to the DLC film 60 .
  • the displaceable part 20 includes a nut 52 screw-engaged with the sliding screw shaft 18 , a cylindrical rod 54 fixed to the nut 52 and inserted into the insertion hole 30 of the end block 26 , and a socket 56 attached to the rod 54 to close the opening at the distal end of the rod 54 .
  • the nut 52 is made of light metal such as aluminum or light metal alloy such as aluminum alloy.
  • the load on the motor 12 is reduced to a greater extent, and the weight reduction of the electric actuator 10 is achieved.
  • the DLC film 60 is formed on all threads of a threaded part 58 of the nut 52 (see FIG. 5 ).
  • the structure of the DLC film 60 , and the method of forming the DLC film 60 are the same as in the case of the DLC film 50 formed on the threaded part 48 of the sliding screw shaft 18 , and the description thereof is omitted.
  • the right end (end on the motor 12 side) in FIG. 5 of the threaded part 58 of the nut 52 will be referred to as the “starting end”, and the left end (end on the socket 56 side) in FIG. 5 of the threaded part 58 of the nut 52 will be referred to as the “terminating end”.
  • starting end the right end (end on the motor 12 side) in FIG. 5 of the threaded part 58 of the nut 52
  • the left end (end on the socket 56 side) in FIG. 5 of the threaded part 58 of the nut 52 will be referred to as the “terminating end”.
  • the positions of the starting end and the terminating end may be left-right reversed.
  • the thickness of the DLC film 60 on a portion (first starting end portion 58 a ) of the threaded part 58 of the nut 52 (threaded part 58 as a complete thread part) that is located at a first thread from the starting end of the threaded part 58 in an axial direction thereof is larger than the thickness of the DLC film 60 on a portion (second starting end portion 58 b ) of the threaded part 58 of the nut 52 that is located at a second thread from the starting end.
  • the thickness of the DLC film 60 on the second starting end portion 58 b is larger than the thickness of the DLC film 60 on a portion (third starting end portion 58 c ) of the threaded part 58 of the nut 52 that is located at a third thread from the starting end.
  • the thickness of the DLC film 60 on a portion (first terminating end portion 58 d ) of the threaded part 58 of the nut 52 that is located at a first thread from the terminating end of the threaded part 58 in the axial direction is larger than the thickness of the DLC film 60 on a portion (second terminating end portion 58 e ) of the threaded part 58 of the nut 52 that is located at a second thread from the terminating end.
  • the thickness of the DLC film 60 on the second terminating end portion 58 e is larger than the thickness of the DLC film 60 on a portion (third terminating end portion 58 f ) of the threaded part 58 of the nut 52 that is located at a third thread from the terminating end.
  • the thickness of the DLC film 60 on the third starting end portion 58 c and the thickness of the DLC film 60 on the third terminating end portion 58 f are equal to or larger than the thickness of the DLC film 60 on a region of the threaded part 58 of the nut 52 that is located within a range from a fourth thread from the starting end, to a fourth thread from the terminating end (i.e., an intermediate region 58 g between the third starting end portion 58 c and the third terminating end portion 58 f exclusive).
  • the thickness of the DLC film 60 on the first starting end portion 58 a and the first terminating end portion 58 d is 0.9 ⁇ m
  • the thickness of the DLC film 60 on the second starting end portion 58 b and the second terminating end portion 58 e is 0.8 ⁇ m
  • the thickness of the DLC film 60 on the third starting end portion 58 c , the third terminating end portion 58 f , and the intermediate region 58 g is 0.5 ⁇ m. It should be noted that the thickness of the DLC film 60 formed on the threaded part 58 of the nut 52 can be determined freely.
  • the electric actuator 10 basically has the above structure. Next, operation and advantages of the electric actuator 10 will be described below. In the following description, a state where the rod 54 is placed in the interior of the outer cylinder 24 as shown in FIGS. 1 and 3 will be referred to as an initial position.
  • the DLC film 60 is formed on the first to third starting end portions 58 a to 58 c , and the DLC film 50 is formed on all the threads of the threaded part 48 of the sliding screw shaft 18 , it becomes possible to smoothly displace the nut 52 in the axial direction of the sliding screw shaft 18 toward the distal end side.
  • the motor shaft is rotated in a direction opposite to the above. In this manner, the rotary drive force of the motor shaft is transmitted to the sliding screw shaft 18 through the coupling 32 . Then, by rotation of the sliding screw shaft 18 in the direction opposite to the above, the rod 54 and the socket 56 are displaced together with the nut 52 toward the proximal end side (motor 12 side). At this time, stress is concentrated on the first to third terminating end portions 58 d to 58 f of the threaded part 58 of the nut 52 .
  • the DLC film 60 is formed on the first to third terminating end portions 58 d to 58 f , and the DLC film 50 is formed on all the threads of the threaded part 48 of the sliding screw shaft 18 , it becomes possible to smoothly displace the nut 52 in the axial direction of the sliding screw shaft 18 toward the proximal end side.
  • the sliding screw shaft 18 is made of light metal or light metal alloy, it is possible to reduce the load (inertial force) on the motor 12 . In the structure, size reduction of the motor 12 is achieved. Stated otherwise, it is possible to increase the maximum working load of the electric actuator 10 without increasing the size (output) of the motor 12 .
  • the sliding screw shaft 18 is used instead of the ball screw shaft, it is possible to reduce the size of the nut 52 .
  • the DLC film 60 is formed on portions (region) of the threaded part 58 of the nut 52 that are located within a range from the starting end to the terminating end of the threaded part 58 , and the DLC film 50 is formed on the threaded part 48 of the sliding screw shaft 18 . Therefore, abrasion of the sliding screw shaft 18 and the nut 52 is reduced, and improvement in the efficiency of the screw (ratio of the screw output to the screw input) is achieved. Further, sliding noises generated between the sliding screw shaft 18 and the nut 52 can be suppressed. Thus, it is possible to improve the abrasion resistance and the durability of the sliding screw shaft 18 and the nut 52 , and achieve reduction of the weight, size and noises of the electric actuator 10 .
  • the thickness of the DLC film 60 on the first starting end portion 58 a of the threaded part 58 of the nut 52 is larger than the thickness of the DLC film 60 on the second starting end portion 58 b
  • the thickness of the DLC film 60 on the first terminating end portion 58 d is larger than the thickness of the DLC film 60 on the second terminating end portion 58 e . That is, since the thickness of the DLC film 60 on the first starting end portion 58 a and the first terminating end portion 58 d where stress tends to be concentrated at the time of operating the electric actuator 10 is relatively large, it is possible to improve the durability of the sliding screw shaft 18 and the nut 52 .
  • the thickness of the DLC film 60 on the first to third starting end portions 58 a to 58 c and the first to third terminating end portions 58 d to 58 f is equal to or larger than the thickness of the DLC film 60 on the intermediate region 58 g , the durability of the sliding screw shaft 18 and the nut 52 is improved efficiently.
  • the nut 52 is made of light metal or light metal alloy, it is possible to further reduce the load on the motor 12 . Accordingly, it is possible to achieve weight reduction and the size reduction of the electric actuator 10 to a greater extent.
  • the thickness of the DLC films 50 , 60 is 0.1 ⁇ m or more, it is possible to suitably suppress early peeling of the DLC films 50 , 60 due to abrasion. Further, since the thickness of the DLC film 50 , 60 is 6.0 ⁇ m or less, it is possible to reliably form the DLC films 50 , 60 .
  • the electric actuator 10 is not limited to the above structure.
  • the sliding screw shaft 18 is made of light metal or light metal alloy, and the DLC film 50 , 60 is formed on at least one of a region of the threaded part 58 of the nut 52 and the threaded part 48 of the sliding screw shaft 18 , the region of the threaded part 58 being located within a range from the starting end of the threaded part 58 to at least a third thread of the threaded part 58 in an axial direction thereof. That is, in the present embodiment, for example, combination of the sliding screw shaft 18 and the nut 52 shown in Table 1 can be adopted.
  • the DLC film 60 may not be formed on at least part of the intermediate region 58 g (in FIG. 6A , not formed on any of the intermediate region 58 g ), and the DLC film 60 may be formed on the first to third starting end portions 58 a to 58 c and the first to third terminating end portions 58 d to 58 f .
  • the DLC film 60 may not be formed on at least part of the intermediate region 58 g (in FIG. 6A , not formed on any of the intermediate region 58 g ), and the DLC film 60 may be formed on the first to third starting end portions 58 a to 58 c and the first to third terminating end portions 58 d to 58 f .
  • FIG. 6A the DLC film 60 may not be formed on at least part of the intermediate region 58 g (in FIG. 6A , not formed on any of the intermediate region 58 g ), and the DLC film 60 may be formed on the first to third starting end portions 58 a to 58
  • the DLC film 60 may not be formed on the first to third terminating end portions 58 d to 58 f or the intermediate region 58 g , and the DLC film 60 may be formed on the first to third starting end portions 58 a to 58 c .
  • an electric actuator 10 A according to a second embodiment of the present invention will be described with reference to FIGS. 7 to 12 .
  • the constituent elements of the electric actuator 10 A according to the second embodiment that are identical to those of the electric actuator 10 according to the first embodiment are labeled with the same reference numerals, and detailed description thereof is omitted.
  • the electric actuator 10 A includes a motor 12 as a rotary drive source, a base part 100 disposed on the motor 12 through a housing 14 , a sliding screw shaft (feed screw shaft) 102 for transmitting a rotary drive force of the motor 12 , and a displaceable part 104 which is displaced in accordance with rotation of the sliding screw shaft 102 .
  • the base part 100 includes a base part main body 106 having a U-shape in cross section and which extends in an axial direction of the sliding screw shaft 102 , a first end plate 108 provided at the proximal end (end on the motor 12 side) of the base part main body 106 , and a second end plate 110 provided at the distal end (end opposite to the motor 12 ) of the base part main body 106 .
  • Each of the first end plate 108 and the second end plate 110 is fixed to the base part main body 106 using a plurality of fixing screws 112 .
  • the base part 100 has a space S formed by the base part main body 106 , the first end plate 108 , and the second end plate 110 .
  • the displaceable part 104 is placed in the space S.
  • An opening 114 communicating with the space S is formed over the entire length of the base part main body 106 .
  • the opening 114 is covered by a plate-shaped cover part 116 . In the structure, it is possible to suppress entry of dust from the outside of the base part 100 into the space S through the opening 114 .
  • the cover part 116 is fixed to the first end plate 108 and the second end plate 110 by fixing screws 118 .
  • An insertion hole 120 is formed in the first end plate 108 .
  • the housing 14 is internally fitted into the insertion hole 120 , and the sliding screw shaft 102 is inserted into the insertion hole 120 .
  • An oil supply hole 122 is formed in the second end plate 110 for supplying grease to the sliding screw shaft 102 and a grease reservoir 152 described later.
  • the proximal end of the sliding screw shaft 102 is axially supported by the a rolling bearing 124 provided in the housing 14 , and the distal end thereof is axially supported by a slide bearing 126 provided in the second end plate 110 .
  • the sliding screw shaft 102 is made of light metal such as aluminum or light metal alloy such as aluminum alloy.
  • the DLC film 130 is formed on all threads of a threaded part 128 of the sliding screw shaft 102 .
  • the DLC film 130 can be formed in the same manner as the above described DLC film 50 (see FIG. 11 ).
  • the displaceable part 104 includes a displaceable part main body 132 having a block shape (rectangular parallelepiped shape) and which is provided in the space S of the base part 100 , a neck part 134 extending from the displaceable part main body 132 and inserted into the opening 114 of the base part 100 , a table 136 provided on the neck part 134 , and a nut 138 provided in the displaceable part main body 132 and screw-engaged with the sliding screw shaft 102 .
  • a displaceable part main body 132 having a block shape (rectangular parallelepiped shape) and which is provided in the space S of the base part 100
  • a neck part 134 extending from the displaceable part main body 132 and inserted into the opening 114 of the base part 100
  • a table 136 provided on the neck part 134
  • a nut 138 provided in the displaceable part main body 132 and screw-engaged with the sliding screw shaft 102 .
  • a plurality of guide pins 140 are provided on both side surfaces of the displaceable part main body 132 .
  • the guide pins 140 extend in the axial direction of the sliding screw shaft 102 , and slide on the inner surfaces of the base part main body 106 .
  • These guide pins 140 are positioned with respect to the displaceable part main body 132 in the axial direction of the sliding screw shaft 102 using a first stopper 142 fixed to the proximal end surface of the displaceable part main body 132 , and a second stopper 144 fixed to the distal end surface of the displaceable part main body 132 .
  • a communication hole 146 is formed in the second stopper 144 , at a position facing the oil supply hole 122 of the second end plate 110 .
  • a circular nut hole 148 is formed in the displaceable part main body 132 .
  • the nut 138 is disposed in the nut hole 148 .
  • An annular cap 150 is provided in the nut hole 148 on one side of the nut 138 closer to the first stopper 142 .
  • the cap 150 is fixed to a wall surface of the nut hole 148 .
  • the sliding screw shaft 102 is inserted into an inner hole of the cap 150 . That is, the grease reservoir 152 is formed between the nut 138 and the cap 150 for guiding the grease into a clearance between the nut 138 and the sliding screw shaft 102 .
  • the displaceable part main body 132 has a through hole 154 and an inlet hole 156 .
  • the through hole 154 extends over the entire length of the displaceable part main body 132 , and communicates with the communication hole 146 of the second stopper 144 .
  • the inlet hole 156 connects the through hole 154 and the grease reservoir 152 .
  • a packing (closing member) 158 is provided in the through hole 154 .
  • the packing 158 closes an opening of the through hole 154 on the first stopper 142 side. By this packing 158 , it is possible to suppress leakage of grease from a gap between the displaceable part main body 132 and the first stopper 142 .
  • the table 136 is wider than the displaceable part main body 132 .
  • An insertion hole 160 is formed in the table 136 , and the cover part 116 is inserted into the insertion hole 160 .
  • a plurality of attachment holes 162 are formed in a table 136 for attaching a workpiece (not shown), etc. to the table 136 .
  • the nut 138 has a cylindrical shape.
  • the nut 138 is displaced in the axial direction by rotation of the sliding screw shaft 102 .
  • the nut 138 is fixed to the displaceable part main body 132 by a pin 164 and a setscrew 166 .
  • the nut 138 is made of light metal such as aluminum or light metal alloy such as aluminum alloy.
  • the DLC film 170 is formed on all threads of a threaded part 168 of the nut 138 .
  • the DLC film 170 is formed in the same manner as the DLC film 60 described above.
  • the thickness of the DLC film 170 on the first starting end portion 168 a of the threaded part 168 of the nut 138 is larger than the thickness of the DLC film 170 on the second starting end portion 168 b of the threaded part 168 of the nut 138 . Further, the thickness of the DLC film 170 on the second starting end portion 168 b of the threaded part 168 of the nut 138 is larger than the thickness of the DLC film 170 on the third starting end portion 168 c of the threaded part 168 of the nut 138 .
  • the thickness of the DLC film 170 on the first terminating end portion 168 d of the threaded part 168 of the nut 138 is larger than the thickness of the DLC film 170 on the second terminating end portion 168 e of the threaded part 168 of the nut 138 . Further, the thickness of the DLC film 170 on the second terminating end portion 168 e of the threaded part 168 of the nut 138 is larger than the thickness of the DLC film 170 on the third terminating end portion 168 f of the threaded part 168 of the nut 138 .
  • the thickness of the DLC film 170 on the third starting end portion 168 c and the thickness of the DLC film 170 on the third terminating end portion 168 f are equal to or more than the thickness of the DLC film 170 on the intermediate region 168 g of the threaded part 168 of the nut 138 .
  • each thread of the threaded part 168 of the nut 138 has a flat shape in cross section in the axial direction of the sliding screw shaft 102 .
  • burrs tend to be produced at a tip end corner 171 of the thread of the threaded part 168 of the nut 138 due to machining. These burrs can be removed by shot blasting or chemical polishing, etc. However, it is not easy to check removal of the burrs visually.
  • the DLC film 130 of the threaded part 128 of the sliding screw shaft 102 may be damaged due to the burrs.
  • clearance space 172 is formed at each root of the threaded part of the sliding screw shaft 102 , and the tip end corner (crest) 171 of the threaded part 168 of the nut 138 is placed in the clearance space 172 .
  • the wall surface of the clearance space 172 includes a curved surface 174 having a semicircular shape in cross section in the axial direction of the sliding screw shaft 102 , and a pair of flat surfaces 176 joined respectively to both sides of the curved surface 174 in the axial direction of the sliding screw shaft 102 .
  • the pair of flat surfaces 176 are inclined to spread toward a direction away from the curved surface 174 .
  • the flat surfaces 176 extend beyond the crest of the threaded part 168 of the nut 138 toward the root thereof to some extent.
  • the angle (acute angle) ⁇ 1 formed between a line perpendicular to the axis of the sliding screw shaft 102 and each flat surface 176 is smaller than the flank angle ⁇ 2 of the nut 138 .
  • each flat surface 176 does not contact the tip end corner 171 of each thread of the threaded part 168 of the nut 138 .
  • the clearance space 172 also functions as a grease retaining space for retaining the grease guided from the grease reservoir 152 . That is, the clearance space 172 is formed to be capable of storing the grease (lubricant). In the structure, it is possible to efficiently supply the grease to the gap between the sliding screw shaft 102 and the nut 138 , and thus, improve the abrasion resistance and durability of the sliding screw shaft 102 and the nut 138 , and achieve further noise reduction of the electric actuator 10 A.
  • the displaceable part 104 is moved toward the distal end with respect to the sliding screw shaft 102 .
  • the second stopper 144 contacts the second end plate 110 , and the oil supply hole 122 of the second end plate 110 is placed in communication with the communication hole 146 of the second stopper 144 .
  • the oil supply hole 122 is placed in communication with the grease reservoir 152 through the communication hole 146 , the through hole 154 , and the inlet hole 156 .
  • the packing 158 by action of the packing 158 , leakage of the grease from the gap between the displaceable part main body 132 and the first stopper 142 is suppressed.
  • the grease is injected through the oil supply hole 122 into the grease reservoir 152 .
  • the grease supplied into the grease reservoir 152 is guided into the clearance between the nut 138 and the sliding screw shaft 102 .
  • the electric actuator 10 A according the present embodiment offers the same advantages and effects as in the case of the electric actuator 10 according to the first embodiment.
  • the electric actuator 10 A according to this embodiment of the invention is not limited to the above structure.
  • the combination of the sliding screw shaft 102 and the nut 13 shown in Table 1 can be adopted.
  • the DLC film 170 may not be formed on at least part of the intermediate region 168 g , and the DLC film 170 may be formed on the first to third starting end portions 168 a to 168 c and the first to third terminating end portions 168 d to 168 f .
  • the DLC film 170 may not be formed on the first to third terminating end portions 168 d to 168 f or the intermediate region 168 g , and the DLC film 170 may be formed on the first to third starting end portions 168 a to 168 c . In this case, it is possible to achieve further reduction of the production cost of the electric actuator 10 A.
  • the electric actuator according to the present invention is not limited to the above embodiments. It is a matter of course that various structures can be adopted without deviating from the scope of the present invention.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Transmission Devices (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
US15/324,373 2014-07-17 2015-06-10 Electric actuator Active 2035-12-09 US10385948B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014-146596 2014-07-17
JP2014146596 2014-07-17
PCT/JP2015/066692 WO2016009750A1 (ja) 2014-07-17 2015-06-10 電動アクチュエータ

Publications (2)

Publication Number Publication Date
US20170211671A1 US20170211671A1 (en) 2017-07-27
US10385948B2 true US10385948B2 (en) 2019-08-20

Family

ID=55078252

Family Applications (1)

Application Number Title Priority Date Filing Date
US15/324,373 Active 2035-12-09 US10385948B2 (en) 2014-07-17 2015-06-10 Electric actuator

Country Status (10)

Country Link
US (1) US10385948B2 (ja)
EP (1) EP3173665B1 (ja)
JP (1) JP6575878B2 (ja)
KR (1) KR101898070B1 (ja)
CN (1) CN106662224B (ja)
BR (1) BR112017000993B1 (ja)
MX (1) MX2017000597A (ja)
RU (1) RU2672149C9 (ja)
TW (1) TWI683068B (ja)
WO (1) WO2016009750A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD962315S1 (en) * 2019-12-20 2022-08-30 Smc Corporation Electric actuator

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10745958B2 (en) * 2015-11-24 2020-08-18 U-Shin Ltd. Door opening and closing apparatus for vehicle
US10655378B2 (en) * 2017-02-07 2020-05-19 Magna Closures Inc. Power side door actuator with rotating drive nut
JP6604488B2 (ja) * 2018-02-09 2019-11-13 Ｔｈｋ株式会社 直動案内装置及び直動案内装置の製造方法
JP6416435B1 (ja) * 2018-08-22 2018-10-31 株式会社荏原製作所 基板のめっきに使用される酸化銅固形物、該酸化銅固形物を製造する方法、およびめっき液をめっき槽まで供給するための装置
US11168770B2 (en) * 2019-05-23 2021-11-09 Brose Fahrzeugteile Gmbh & Co. Kommanditgesellschaft, Bamberg Vehicle drive mechanism

Citations (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB908416A (en) * 1959-10-05 1962-10-17 Ross Gear Improvements in or relating to mechanical assemblies, such as a worm and nut and their manufacture
EP0698744A1 (en) 1994-03-10 1996-02-28 Enomoto Co., Ltd. Slide member
JPH08200466A (ja) 1995-01-25 1996-08-06 Toshio Kawakami 小径ハイリードネジおよび送り装置
US5927865A (en) 1996-08-28 1999-07-27 Nsk Ltd. Rolling apparatus
JPH11247962A (ja) 1998-03-06 1999-09-14 Mitsubishi Heavy Ind Ltd 送りねじ
US6089113A (en) * 1997-02-19 2000-07-18 Aida Engineering Co., Ltd. Screw for operation at high speed and high load
RU21079U1 (ru) 2001-05-23 2001-12-20 Ивановский государственный энергетический университет Трибологически безопасное резьбовое соединение
JP2003294102A (ja) 2002-04-04 2003-10-15 Nsk Ltd 回転導入機
US20040258493A1 (en) * 2003-06-19 2004-12-23 Osg Corporation Tap having threaded portion coated with diamond-like carbon coating
US20050166695A1 (en) 2001-11-14 2005-08-04 Nsk Ltd. Liner motion device, rolling device and separator for rolling device
JP2005282708A (ja) 2004-03-29 2005-10-13 Sigma Koki Kk 電動リニアアクチュエータ
JP2006177522A (ja) 2004-12-24 2006-07-06 Kayaba Ind Co Ltd スクリュネジ機構
CN101113754A (zh) 2006-07-28 2008-01-30 日本电产三协株式会社 转轴及具有转轴的马达
JP2008051335A (ja) 2006-07-28 2008-03-06 Nidec Sankyo Corp 回転軸およびそれを備えたモータ
US20080070707A1 (en) * 2006-07-28 2008-03-20 Nidec Sankyo Corporation Rotor shaft and motor with rotor shaft
US20080107369A1 (en) * 2005-01-18 2008-05-08 Nsk Ltd. Rolling Device
US20110028361A1 (en) * 2002-11-06 2011-02-03 Nissan Motor Co., Ltd. Low-friction sliding mechanism
JP2012159124A (ja) 2011-01-31 2012-08-23 Ntn Corp 送りねじ機構
US20130004261A1 (en) * 2011-06-28 2013-01-03 Rolls-Royce Plc Coated fastener
US20130138050A1 (en) * 2010-05-04 2013-05-30 Sanofi-Aventis Deutschland Gmbh Drive mechanism with a low friction coating for a drug delivery device
US20130306893A1 (en) * 2011-02-09 2013-11-21 Panasonic Corporation Shutoff valve device
US20130336787A1 (en) * 2012-06-13 2013-12-19 Claverham Ltd. Dry lubricated linear actuator for in blade rotor control
JP2014047884A (ja) 2012-09-03 2014-03-17 Iai Corp アクチュエータ

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1011142C2 (nl) * 1999-01-27 2000-07-31 Skf Eng & Res Centre Bv Compacte actuator.
US8198746B2 (en) * 2000-11-15 2012-06-12 Borealis Technical Limited Chimney turbine
JP4714609B2 (ja) * 2006-03-16 2011-06-29 日産自動車株式会社 内燃機関の可変圧縮比機構
FR2928909B1 (fr) * 2008-03-20 2010-07-30 Arkema France Procede ameliore de fabrication d'acide nitrique
JP5547563B2 (ja) * 2010-06-25 2014-07-16 Ｎｔｎ株式会社 電動アクチュエータ
JP5304853B2 (ja) * 2011-07-27 2013-10-02 株式会社デンソー 連携システム、ナビゲーションシステム、車載装置、及び、携帯端末

Patent Citations (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB908416A (en) * 1959-10-05 1962-10-17 Ross Gear Improvements in or relating to mechanical assemblies, such as a worm and nut and their manufacture
EP0698744A1 (en) 1994-03-10 1996-02-28 Enomoto Co., Ltd. Slide member
JPH08200466A (ja) 1995-01-25 1996-08-06 Toshio Kawakami 小径ハイリードネジおよび送り装置
US5927865A (en) 1996-08-28 1999-07-27 Nsk Ltd. Rolling apparatus
US6089113A (en) * 1997-02-19 2000-07-18 Aida Engineering Co., Ltd. Screw for operation at high speed and high load
JPH11247962A (ja) 1998-03-06 1999-09-14 Mitsubishi Heavy Ind Ltd 送りねじ
RU21079U1 (ru) 2001-05-23 2001-12-20 Ивановский государственный энергетический университет Трибологически безопасное резьбовое соединение
US20050166695A1 (en) 2001-11-14 2005-08-04 Nsk Ltd. Liner motion device, rolling device and separator for rolling device
JP2003294102A (ja) 2002-04-04 2003-10-15 Nsk Ltd 回転導入機
US20110028361A1 (en) * 2002-11-06 2011-02-03 Nissan Motor Co., Ltd. Low-friction sliding mechanism
US20040258493A1 (en) * 2003-06-19 2004-12-23 Osg Corporation Tap having threaded portion coated with diamond-like carbon coating
JP2005282708A (ja) 2004-03-29 2005-10-13 Sigma Koki Kk 電動リニアアクチュエータ
JP2006177522A (ja) 2004-12-24 2006-07-06 Kayaba Ind Co Ltd スクリュネジ機構
US20080107369A1 (en) * 2005-01-18 2008-05-08 Nsk Ltd. Rolling Device
CN101113754A (zh) 2006-07-28 2008-01-30 日本电产三协株式会社 转轴及具有转轴的马达
JP2008051335A (ja) 2006-07-28 2008-03-06 Nidec Sankyo Corp 回転軸およびそれを備えたモータ
US20080070707A1 (en) * 2006-07-28 2008-03-20 Nidec Sankyo Corporation Rotor shaft and motor with rotor shaft
US20130138050A1 (en) * 2010-05-04 2013-05-30 Sanofi-Aventis Deutschland Gmbh Drive mechanism with a low friction coating for a drug delivery device
JP2012159124A (ja) 2011-01-31 2012-08-23 Ntn Corp 送りねじ機構
US20130306893A1 (en) * 2011-02-09 2013-11-21 Panasonic Corporation Shutoff valve device
US20130004261A1 (en) * 2011-06-28 2013-01-03 Rolls-Royce Plc Coated fastener
US20130336787A1 (en) * 2012-06-13 2013-12-19 Claverham Ltd. Dry lubricated linear actuator for in blade rotor control
JP2014047884A (ja) 2012-09-03 2014-03-17 Iai Corp アクチュエータ

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
Combined Office Action and Search Report dated Jul. 20, 2018 in Chinese Patent Application No. 201580038399.5 (with English language translation), 16 pages.
International Search Report dated Sep. 1, 2015 in PCT/JP2015/066692 filed Jun. 10, 2015.
L. Arnberg. "Solidification of Light Metals (Non-Ferrous)." Encyclopedia of Materials: Science and Technology. 2001, pp. 8708-8710. ISBN: 0-08-0431526. (Year: 2001). *
Office Action dated Apr. 20, 2018 in Russian Patent Application No. 2017101311/11(002134) (with English language translation), 12 pages.
Office Action dated Apr. 23, 2019 issued in Indian Patent Application No. 201747001071. 6 pages.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD962315S1 (en) * 2019-12-20 2022-08-30 Smc Corporation Electric actuator

Also Published As

Publication number Publication date
EP3173665B1 (en) 2019-03-13
EP3173665A1 (en) 2017-05-31
KR101898070B1 (ko) 2018-09-12
MX2017000597A (es) 2017-04-27
RU2017101311A3 (ja) 2018-07-16
JPWO2016009750A1 (ja) 2017-06-08
TWI683068B (zh) 2020-01-21
EP3173665A4 (en) 2018-03-21
KR20170032434A (ko) 2017-03-22
CN106662224B (zh) 2019-09-13
RU2017101311A (ru) 2018-07-16
TW201610325A (zh) 2016-03-16
WO2016009750A1 (ja) 2016-01-21
CN106662224A (zh) 2017-05-10
BR112017000993A2 (ja) 2018-07-24
RU2672149C2 (ru) 2018-11-12
RU2672149C9 (ru) 2019-07-04
JP6575878B2 (ja) 2019-09-18
US20170211671A1 (en) 2017-07-27
BR112017000993B1 (pt) 2023-03-21

Similar Documents

Publication Publication Date Title
US10385948B2 (en) Electric actuator
US6615689B2 (en) Non-lubricated wave gear device
US8196484B2 (en) Electric actuator
WO2016038720A1 (ja) リニアガイド装置及びアクチュエータ
US20090007710A1 (en) Ball screw
JP2007127240A (ja) ボールねじ，電動射出成形機，及び電動プレス装置
CN112303202B (zh) 具润滑装置的滚珠花键
JP2018194094A (ja) ロボット、歯車ユニットおよび歯車ユニットの製造方法
JP2014202286A (ja) アクチュエータ、アクチュエータの製造方法、及び振れ止め部材
JP2018168950A (ja) ロボット、歯車装置および歯車ユニット
TWI708903B (zh) 具潤滑裝置之滾珠花鍵
CN210531538U (zh) 一种高效耐磨的滚珠丝杠
JP5961925B2 (ja) ボールねじ装置及びその製造方法
JP2007211822A (ja) 直動案内軸受装置の組立方法及び潤滑剤供給ユニット用仮軸
KR20170109847A (ko) 윤활 유닛을 구비한 선형 동력 전달 장치
JP2004346963A (ja) ボール直動装置
JP2023094974A (ja) 波動歯車装置及びロボット用関節装置
JP2014156929A (ja) ボールねじ装置
JP2022148645A (ja) 直動案内装置
KR101561353B1 (ko) 직선 왕복 작동장치
TWI443274B (zh) Ball screw with reflow element
JP2006064005A (ja) 直動装置
JP2013047529A (ja) ボールねじ装置及びその製造方法
JP2003287038A (ja) 直動装置
JP2003184984A (ja) 直動装置

Legal Events

Date Code Title Description
AS Assignment

Owner name: SMC CORPORATION, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:NAKAYAMA, TORU;SUGIYAMA, TORU;MASUI, RYUICHI;AND OTHERS;REEL/FRAME:040871/0151

Effective date: 20161013

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: NOTICE OF ALLOWANCE MAILED -- APPLICATION RECEIVED IN OFFICE OF PUBLICATIONS

STPP Information on status: patent application and granting procedure in general

Free format text: AWAITING TC RESP., ISSUE FEE NOT PAID

STPP Information on status: patent application and granting procedure in general

Free format text: NOTICE OF ALLOWANCE MAILED -- APPLICATION RECEIVED IN OFFICE OF PUBLICATIONS

STPP Information on status: patent application and granting procedure in general

Free format text: PUBLICATIONS -- ISSUE FEE PAYMENT VERIFIED

STCF Information on status: patent grant

Free format text: PATENTED CASE

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Year of fee payment: 4