TWI812732B - 搬送裝置及搬送方法 - Google Patents
搬送裝置及搬送方法 Download PDFInfo
- Publication number
- TWI812732B TWI812732B TW108120028A TW108120028A TWI812732B TW I812732 B TWI812732 B TW I812732B TW 108120028 A TW108120028 A TW 108120028A TW 108120028 A TW108120028 A TW 108120028A TW I812732 B TWI812732 B TW I812732B
- Authority
- TW
- Taiwan
- Prior art keywords
- base member
- rotation
- radial direction
- substrate
- arm
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims description 23
- 238000012545 processing Methods 0.000 claims abstract description 212
- 239000000758 substrate Substances 0.000 claims abstract description 137
- 238000012546 transfer Methods 0.000 claims abstract description 56
- 230000032258 transport Effects 0.000 claims description 31
- 239000011521 glass Substances 0.000 claims description 15
- 230000005540 biological transmission Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 11
- 238000003860 storage Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- 230000001629 suppression Effects 0.000 description 3
- 238000010030 laminating Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/904—Devices for picking-up and depositing articles or materials provided with rotary movements only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67796—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations with angular orientation of workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Supplying Of Containers To The Packaging Station (AREA)
- Auxiliary Devices For And Details Of Packaging Control (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018119446A JP7097760B2 (ja) | 2018-06-25 | 2018-06-25 | 搬送装置および搬送方法 |
JP2018-119446 | 2018-06-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202013570A TW202013570A (zh) | 2020-04-01 |
TWI812732B true TWI812732B (zh) | 2023-08-21 |
Family
ID=68968855
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108120028A TWI812732B (zh) | 2018-06-25 | 2019-06-11 | 搬送裝置及搬送方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7097760B2 (ja) |
KR (1) | KR20200000808A (ja) |
CN (1) | CN110634781B (ja) |
TW (1) | TWI812732B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN117104833A (zh) * | 2023-09-08 | 2023-11-24 | 无锡新得宝金属软管有限公司 | 一种汽车零部件加工用搬运机械装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06187037A (ja) * | 1992-12-18 | 1994-07-08 | Victor Co Of Japan Ltd | 移動体の停止位置制御装置 |
JP2017002246A (ja) * | 2015-06-15 | 2017-01-05 | 協立化学産業株式会社 | エポキシ化合物、部分エステル化エポキシ化合物及びそれらを含む硬化性組成物 |
TW201737335A (zh) * | 2016-04-04 | 2017-10-16 | 荏原製作所股份有限公司 | 基板搬運裝置、基板處理裝置以及結露抑制方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06216217A (ja) * | 1993-01-12 | 1994-08-05 | Nissin High Voltage Co Ltd | ウエハ搬送システム |
JPH10209240A (ja) * | 1997-01-22 | 1998-08-07 | Kaijo Corp | 昇降台付方向転換装置 |
WO2006023326A1 (en) * | 2004-08-17 | 2006-03-02 | Mattson Technology, Inc. | Advanced low cost high throughput processing platform |
JP4490341B2 (ja) * | 2005-07-05 | 2010-06-23 | 株式会社ダイヘン | リンク装置および搬送ロボット |
JP4845903B2 (ja) * | 2008-02-05 | 2011-12-28 | 株式会社日立ハイテクノロジーズ | ワークハンドリング装置及び部品搭載装置 |
JP2014038990A (ja) * | 2012-08-20 | 2014-02-27 | Tokyo Electron Ltd | 基板搬送装置および基板処理システム |
US9653332B1 (en) * | 2013-01-02 | 2017-05-16 | Christos Tsironis | Wafer probe holder for planarity and orientation adjustment |
JP2017092246A (ja) * | 2015-11-10 | 2017-05-25 | 株式会社Screenホールディングス | 基板搬送装置、基板処理システム、および基板搬送方法 |
JP6667400B2 (ja) | 2016-08-12 | 2020-03-18 | 東京エレクトロン株式会社 | プラズマエッチング方法およびプラズマエッチングシステム |
-
2018
- 2018-06-25 JP JP2018119446A patent/JP7097760B2/ja active Active
-
2019
- 2019-06-11 TW TW108120028A patent/TWI812732B/zh active
- 2019-06-19 KR KR1020190072758A patent/KR20200000808A/ko not_active IP Right Cessation
- 2019-06-20 CN CN201910536209.2A patent/CN110634781B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06187037A (ja) * | 1992-12-18 | 1994-07-08 | Victor Co Of Japan Ltd | 移動体の停止位置制御装置 |
JP2017002246A (ja) * | 2015-06-15 | 2017-01-05 | 協立化学産業株式会社 | エポキシ化合物、部分エステル化エポキシ化合物及びそれらを含む硬化性組成物 |
TW201737335A (zh) * | 2016-04-04 | 2017-10-16 | 荏原製作所股份有限公司 | 基板搬運裝置、基板處理裝置以及結露抑制方法 |
Also Published As
Publication number | Publication date |
---|---|
CN110634781B (zh) | 2023-05-05 |
JP7097760B2 (ja) | 2022-07-08 |
KR20200000808A (ko) | 2020-01-03 |
CN110634781A (zh) | 2019-12-31 |
JP2020004745A (ja) | 2020-01-09 |
TW202013570A (zh) | 2020-04-01 |
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