TWI783076B - 基板收納容器 - Google Patents
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Abstract
本發明提供一種在將蓋體安裝於容器本體,將基板自支持部舉起並支持時,可將來自基板按壓部之按壓力有效率地朝基板接收部傳遞之基板收納容器。 基板收納容器1具備:容器本體10,其於正面具有開口11,且於內側形成有支持基板W之支持部12、及位於較支持部12更靠背面壁側之基板接收部13;以及蓋體20,其具有形成有按壓基板W之基板按壓部210之按壓構件21;且基板接收部13及基板按壓部210在以蓋體20為正面進行觀察時,位於自通過容器本體10之中心C之上下方向之中心線Z(Y)朝左右方向0 mm以上80 mm以下之範圍內。
Description
本發明係關於一種收納複數片基板之基板收納容器。
基板收納容器將半導體晶圓等之基板收納於內部空間,而用於在倉庫之保管、在半導體加工裝置間之搬送、在工廠間之運送等。因此,基板收納容器保護所收納之基板免受運送時之振動、衝擊等。
作為如此之基板收納容器,已知有下述者,即:在容器本體之正面具有開口,並具備閉合開口之蓋體,且具有設置於容器本體之兩側面的支持基板之支持部及基板接收部、設置於蓋體之基板按壓部,在將蓋體安裝於容器本體時,將基板夾在基板按壓部與基板接收部之間,自支持部舉起基板並支持(例如,參照專利文獻1)。 [先前技術文獻] [專利文獻]
[專利文獻1]日本特開2004-304122號公報
[發明所欲解決之問題]
然而,在該等之基板收納容器中,將基板朝上下方向引導之基板接收部設置於容器本體之兩側面,由於來自設置於蓋體之基板按壓部之按壓力斜向分散,不能有效率地朝基板接收部傳遞,故需要大的壓製力。
因此,本發明係鑒於以上之課題而完成者,其目的在於提供一種將蓋體安裝於容器本體,在自支持部舉起基板並支持時,可將來自基板按壓部之按壓力有效率地朝基板接收部傳遞之基板收納容器。 [解決問題之技術手段]
(1)本發明之一個態樣之基板收納容器具備:容器本體,其於正面具有開口,且於內側形成有支持基板之支持部、及位於較支持部更靠背面壁側之基板接收部;以及蓋體,其具有形成有按壓前述基板之基板按壓部之按壓構件;且前述基板收納容器係在將前述蓋體安裝於前述容器本體時,藉由前述基板按壓部、與前述基板接收部將前述基板自前述支持部舉起並支持,在將前述蓋體自前述容器本體卸下時,藉由前述支持部支持前述基板者;前述基板接收部及前述基板按壓部在以前述蓋體為正面進行觀察時,位於自通過前述容器本體之中心之上下方向之中心線朝左右方向0 mm以上80 mm以下之範圍內。其中,將基板被收納於基板收納容器之狀態下之相當於基板之中心的位置作為容器本體之中心。 (2)本發明之又一態樣之基板收納容器具備:容器本體,其於正面具有開口,且於內側形成有支持基板之支持部、及位於較支持部更靠背面壁側之基板接收部;以及蓋體,其具有形成有按壓前述基板之基板按壓部之按壓構件;且前述基板收納容器係在將前述蓋體安裝於前述容器本體時,藉由前述基板按壓部與前述基板接收部將前述基板自前述支持部舉起並支持,在將前述蓋體自前述容器本體卸下時,藉由前述支持部支持前述基板者;前述基板接收部及前述基板按壓部位於對於作用於與前述基板之接觸部之前後方向之按壓力,前述接觸部的法線方向之反力成分大於前述接觸部的切線方向之反力成分之位置。其中,將連結蓋體與容器本體之背面壁的方向作為前後方向。 (3)在上述(1)或(2)之態樣中,前述基板按壓部在以前述蓋體為正面進行觀察時,可位於自前述容器本體之中心朝左右方向0°以上30°以下之範圍內。 (4)在上述(1)至(3)中任一態樣中,前述基板接收部在以前述背面壁為正面進行觀察時,可位於自前述容器本體之中心朝左右方向20°以上30°以下之範圍內。 (5)在上述(1)至(4)中任一態樣中,前述基板之直徑可為300 mm。 [發明之效果]
根據本發明,可提供一種在將蓋體安裝於容器本體,將基板自支持部舉起並支持時,可將來自基板按壓部之按壓力有效率地朝基板接收部傳遞之基板收納容器。
以下,針對本發明之實施形態,參照圖式詳細地進行說明。又,在本說明書之實施形態中,整體而言,對於相同之構件賦予相同之符號。
(第1實施形態) 首先,針對基板收納容器1進行說明。圖1係顯示基板收納容器1之分解概略立體圖。圖2A係顯示安裝蓋體20時之基板收納容器1之圖,(a)為前視圖,(b)為平面圖,(c)為A-A剖視圖;圖2B係顯示安裝蓋體20時之基板收納容器1之圖,(d)為B-B剖視圖,(e)為G部之放大剖視圖,(f)為H部之放大剖視圖,(g)為I部之放大剖視圖。再者,在圖1中,將在自蓋體20側觀察水平方向地收納基板W之面之基板收納容器1時的左右方向作為X軸方向,將上下方向作為Z軸方向,將連結蓋體20與背面壁10b之前後方向作為Y軸方向。在以下之圖中亦然,根據需要顯示X軸、Y軸、Z軸。
圖1所示之基板收納容器1係收納複數片基板W者,具備容器本體10及蓋體20。收納於基板收納容器1之基板W為例如直徑為300 mm之半導體晶圓或遮罩玻璃等,但並不限定於此。
容器本體10為包含形成正面之開口11之開口框10a、背面壁10b、右側壁10c、左側壁10d、頂面壁10e、及底面壁10f之箱狀體,且為所謂之前開口類型。
於容器本體10形成有支持基板W之一對支持部12、及一對基板接收部13。又,雖然在圖1中未圖示,但一對中之另一支持部12及基板接收部13形成於對稱之位置。
支持部12於右側壁10c及左側壁10d之內側之2個部位對向形成(參照圖2A(c))。又,該支持部12係以所謂之槽齒構成者,且由在高度方向上形成之複數個槽構成(參照圖2B(d))。而且,基板W係插入各個槽而被收納。
基板接收部13於背面壁10b之2個部位並排形成(參照圖2A(c)),位於較支持部12更靠背面壁10b側(參照圖2B(d))。在該基板接收部13亦然,以與形成於支持部12之槽相應之個數形成有複數個槽。
另一方面,蓋體20將容器本體10之開口11閉合,而形成基板收納容器1之內部空間。又,在容器本體10與蓋體20之間,配置有未圖示之迫緊件。在將蓋體20安裝於容器本體10時,迫緊件可確保基板收納容器1之氣密性,降低來自外部之塵埃、濕氣等對基板收納容器1侵入。
蓋體20具有按壓構件21,於該按壓構件21形成有按壓基板W之基板按壓部210(參照圖2A(c))。按壓構件21設置於蓋體20之內側之X軸方向上之中央部。
基板按壓部210沿著X軸方向形成於2個部位,在該2個部位按壓並支持基板W。基板按壓部210例如形成於按壓構件21之具有彈性之臂220,藉由臂220之彈性與基板W接觸而按壓基板W。又,基板按壓部210根據可收納之基板W之片數在上下方向形成有複數個。
作為容器本體10及蓋體20之材料,可舉出例如:聚碳酸酯、環烯烴聚合物、聚醚醯亞胺、聚醚酮、聚醚醚酮、聚對苯二甲酸乙二酯、聚縮醛、液晶聚合物之熱塑性樹脂或該等之摻合物等。
作為支持部12之材料,可使用與容器本體10相同之材料,但為了使基板W之滑動性較佳,亦可使用環烯烴聚合物等之非結晶性樹脂。
作為基板接收部13之材料,可使用與容器本體10相同之材料,但為了使基板W之滑動性較佳,亦可使用環烯烴聚合物等之非結晶性樹脂。
作為按壓構件21之材料,可使用與蓋體20相同之材料,但為了使與基板W之耐磨耗性較佳,可使用聚碳酸酯、聚碳酸酯與聚對苯二甲酸乙二酯之摻合物之熱塑性樹脂,或為了使滑動性較佳而可使其含有添加物。
此處,針對將蓋體20已從容器本體10卸下時之基板W朝容器本體10之收納狀態、及將蓋體20安裝於容器本體10時之基板W朝容器本體10之收納狀態進行說明。圖3A係顯示卸下蓋體20時之容器本體10之圖,(a)為前視圖,(b)為平面圖,(c)為E-E剖視圖;圖3B係卸下蓋體20時之容器本體10之圖,(d)為F-F剖視圖,(e)為J部之放大剖視圖,(f)為K部之放大剖視圖。
在將基板W收納於容器本體10時,基板W自容器本體10之正面之開口11插入面對面之一對支持部12之相同高度之槽,以僅由左右一對支持部12將基板W之面成為水平方向之方式支持之狀態被收納(參照圖3B(f))。並且,在基板W僅由支持部12支持之狀態下,以基板W之背面壁10b側不與基板接收部13(形成於基板接收部13之V字槽130之下方)接觸之方式在支持部12形成有未圖示之傾斜階部。
並且,在自基板W僅由支持部12支持之狀態將蓋體20安裝於容器本體10時,藉由基板W被基板按壓部210與基板接收部13夾著,而基板W自支持部12被舉起,而由基板按壓部210與基板接收部13支持(參照圖2B)。
若詳細地說明,則為在基板按壓部210形成有V字槽211(參照圖2B(g)),在將蓋體20安裝於容器本體10時,基板W之正面側嵌入基板按壓部210之V字槽211。其後,若藉由基板按壓部210將基板W朝深度側按壓,則在基板接收部13中,基板W自圖3B(e)所示之狀態朝圖2B(e)所示之狀態在V字槽130內滑動上升,到達V字槽130之深度側之底。
如此般,收納於基板收納容器1之基板W以自支持部12舉起之狀態,由基板接收部13與基板按壓部210支持。並且,在將蓋體20從容器本體10卸下時,基板W僅由支持部12支持。
其次,針對基板接收部13與基板按壓部210之位置關係進行說明。圖4係顯示基板收納容器1之基板W之支持狀態之水平剖視圖。 在圖4中,基板接收部13與基板按壓部210配設於相對向之位置。
具體而言,基板接收部13在以蓋體20為正面進行觀察時,至少位於自通過容器本體10之中心C之上下方向(Z軸方向)之中心線Z朝左右方向0 mm以上80 mm以下之範圍內。其中,容器本體10之中心C為在將基板W收納於基板收納容器1之狀態下之相當於基板W之中心的位置。又,中心線X、中心線Y及中心線Z為通過容器本體10之中心C者。
換言之,基板接收部13至少位於自通過容器本體10之中心C之前後方向(Y軸方向)之中心線Y朝左右方向0 mm以上80 mm以下之範圍內。再者,圖4將自中心線Y偏移80 mm之位置以線段Y1表示。
進而,基板接收部13在將背面壁10b作為正面進行觀察時,位於自容器本體10之中心C朝左右方向20°以上30°以下之範圍內。即,位於連結基板接收部13(之中央)與容器本體10之中心C之線段與通過容器本體10之中心C之前後方向(Y軸方向)之中心線Y所形成之角度γ相對於中心線Y±20°以上±30°以下之範圍內。
另一方面,基板按壓部210亦與基板接收部13同樣地,在以蓋體20為正面進行觀察時,至少位於自通過容器本體10之中心C之上下方向(Z軸方向)之中心線Z朝左右方向0 mm以上80 mm以下之範圍。
進而,基板按壓部210在以蓋體20為正面進行觀察時,位於自容器本體10之中心C朝左右方向0°以上30°以下、較佳為0°以上21°以下之範圍。換言之,位於連結基板按壓部210(之中央)與容器本體10之中心C之線段與通過容器本體10之中心C之前後方向(Y軸方向)之中心線Y所成之角度θ相對於中心線Y為±30°以下、較佳為±21°以下之範圍內。再者,若角度θ超過30°,則因基板按壓部210之成形性惡化,而無法均一地按壓基板W。
根據第1實施形態之基板收納容器1,可提供在將蓋體20安裝於容器本體10、自支持部12舉起並支持基板W時,由於來自基板按壓部210之按壓力在基板接收部13中主要作用於基板W之中心方向,因此可將來自基板按壓部210之按壓力有效率地朝基板接收部13傳遞之基板收納容器1。又,藉由將基板W自支持部12舉起而分離,可抑制運送時之振動、衝擊等自支持部12朝基板W傳遞。
(第2實施形態) 圖5係顯示第2實施形態之基板收納容器1A之基板W之支持狀態之水平剖視圖。 在第2實施形態之基板收納容器1A中,蓋體20A、按壓構件21A、基板按壓部210A及臂220A之形狀與第1實施形態不同,其他部分與第1實施形態相同。
具體而言,2個部位之基板按壓部210A間之距離與第1實施形態之距離相比更長,基板按壓部210A形成於拱型之臂220A之兩端。又,基板按壓部210A較蓋體20A之表面更朝容器本體10側突出。
該情形下亦然,基板按壓部210A與基板按壓部210同樣地,在以蓋體20為正面進行觀察時,至少位於自通過容器本體10之中心C的上下方向(Z軸方向)之中心線Z朝左右方向0 mm以上80 mm以下之範圍內。進而,基板按壓部210在以蓋體20為正面進行觀察時,位於自容器本體10之中心C朝左右方向0°以上30°以下之範圍內。
再者,該基板收納容器1A在下述情形下使用,即:蓋體20A之安裝或卸下及基板W之插入或取出非以機器人等之搬送裝置進行,而是由作業者等手動進行。
以上,針對本發明之較佳之實施形態進行了詳細敘述,但本發明並非限定於上述實施形態,在申請專利範圍所記載之本發明之要旨之範圍內可進行各種變化、變更。
(變化例) 在上述各實施形態中,係以具體之尺寸及角度定義基板接收部13及基板按壓部210、210A之位置,但亦可以作用於基板W之按壓力(或反力)進行定義。例如,假定在將蓋體20安裝於容器本體10時產生的按壓基板W之按壓力作用於沿Y軸方向之方向時,基板接收部13可位於:基板接收部13(之與基板W之接觸部)之推回基板W之法線方向之反力成分CD大於接觸部之切線方向之反力成分、更佳為按壓力之0.43倍以上(左右2個部位受力之情形)之位置。又,針對基板按壓部210、210A亦與基板接收部13相同。如此般,若基板接收部13的推回基板W之法線方向之反力成分CD大於切線方向之反力成分,則即便對基板W施加有按壓力,亦不會引起基板W旋轉。
在上述各實施形態中,支持部12及基板接收部13既可與容器本體10一體成形,亦可以另外零件安裝於容器本體10。
在上述各實施形態中,形成於基板接收部13之V字槽130之傾斜及形成於基板按壓部210、210A之V字槽211之傾斜並不限定於圖示者,可根據基板W相對於基板接收部13及基板按壓部210、210A所使用之材料之滑動性或基板按壓部210、210A之按壓基板W之按壓力而變更。
1‧‧‧基板收納容器1A‧‧‧基板收納容器10‧‧‧容器本體10a‧‧‧開口框10b‧‧‧背面壁10c‧‧‧右側壁10d‧‧‧左側壁10e‧‧‧頂面壁10f‧‧‧底面壁11‧‧‧開口12‧‧‧支持部13‧‧‧基板接收部20‧‧‧蓋體20A‧‧‧蓋體21‧‧‧按壓構件21A‧‧‧按壓構件130‧‧‧V字槽210‧‧‧基板按壓部210A‧‧‧基板按壓部211‧‧‧V字槽220‧‧‧臂220A‧‧‧臂A-A‧‧‧線B-B‧‧‧線C‧‧‧容器本體之中心CD‧‧‧推回基板之法線方向之反力成分E-E‧‧‧線F-F‧‧‧線G‧‧‧部H‧‧‧部I‧‧‧部J‧‧‧部K‧‧‧部W‧‧‧基板X‧‧‧軸/中心線Y‧‧‧軸/中心線Y1‧‧‧線段Z‧‧‧軸/中心線γ‧‧‧角度θ‧‧‧角度
圖1係顯示第1實施形態之基板收納容器之分解概略立體圖。 圖2A係顯示安裝蓋體時之基板收納容器之圖,(a)為前視圖,(b)為平面圖,(c)為A-A剖視圖。 圖2B係顯示安裝蓋體時之基板收納容器之圖,(d)為B-B剖視圖,(e)為G部之放大剖視圖,(f)為H部之放大剖視圖,(g)為I部之放大剖視圖。 圖3A係顯示卸下蓋體時之容器本體之圖,(a)為前視圖、(b)為平面圖、(c)為E-E剖視圖。 圖3B係顯示卸下蓋體時之容器本體之圖,(d)為F-F剖視圖,(e)為J部之放大剖視圖,(f)為K部之放大剖視圖。 圖4係顯示基板收納容器之基板之支持狀態之水平剖視圖。 圖5係顯示第2實施形態之基板收納容器之基板之支持狀態之水平剖視圖。
1‧‧‧基板收納容器
10‧‧‧容器本體
10a‧‧‧開口框
10b‧‧‧背面壁
10c‧‧‧右側壁
10d‧‧‧左側壁
10e‧‧‧頂面壁
10f‧‧‧底面壁
12‧‧‧支持部
13‧‧‧基板接收部
20‧‧‧蓋體
21‧‧‧按壓構件
210‧‧‧基板按壓部
220‧‧‧臂
A-A‧‧‧線
B-B‧‧‧線
X‧‧‧軸
Y‧‧‧軸
Z‧‧‧軸
Claims (8)
- 一種基板收納容器,其特徵在於具備:容器本體,其於正面具有開口,且於內側形成有支持基板之支持部、及位於較支持部更靠背面臂側之基板接收部;及蓋體,其具有形成有按壓前述基板之基板按壓部之按壓構件;且前述基板收納容器係在將前述蓋體安裝於前述容器本體時,由前述基板按壓部與前述基板接收部將前述基板自前述支持部舉起並支持,在將前述蓋體自前述容器本體卸下時,由前述支持部支持前述基板者,前述基板接收部及前述基板按壓部在以前述蓋體為正面進行觀察時,位於自通過在收納於前述基板收納容器之狀態下相當於前述基板之中心之位置、即前述容器本體之中心的上下方向之中心線朝左右方向0mm以上80mm以下之範圍內。
- 一種基板收納容器,其特徵在於具備:容器本體,其於正面具有開口,且於內側形成有支持基板之支持部、及位於較支持部更靠背面臂側之基板接收部;及蓋體,其具有形成有按壓前述基板之基板按壓部之按壓構件;且前述基板收納容器係在將前述蓋體安裝於前述容器本體時,由前述基板按壓部與前述基板接收部將前述基板自前述支持部舉起並支持,在將前述蓋體自前述容器本體卸下時,由前述支持部支持前述基板者,前述基板接收部及前述基板按壓部位於:對於與前述基板之接觸部,相對於作用於連結前述蓋體與前述容器本體之前述背面壁之方向之前 後方向之按壓力,前述接觸部的法線方向之反力成分大於前述接觸部的切線方向之反力成分之位置,前述基板按壓部在以前述蓋體為正面進行觀察時,位於自前述容器本體之中心朝左右方向0°以上30°以下之範圍內。
- 一種基板收納容器,其特徵在於具備:容器本體,其於正面具有開口,且於內側形成有支持基板之支持部、及位於較支持部更靠背面臂側之基板接收部;及蓋體,其具有形成有按壓前述基板之基板按壓部之按壓構件;且前述基板收納容器係在將前述蓋體安裝於前述容器本體時,由前述基板按壓部與前述基板接收部將前述基板自前述支持部舉起並支持,在將前述蓋體自前述容器本體卸下時,由前述支持部支持前述基板者,前述基板接收部及前述基板按壓部位於:對於與前述基板之接觸部,相對於作用於連結前述蓋體與前述容器本體之前述背面壁之方向之前後方向之按壓力,前述接觸部的法線方向之反力成分大於前述接觸部的切線方向之反力成分之位置,前述基板之直徑為300mm。
- 如請求項1之基板收納容器,其中前述基板按壓部在以前述蓋體為正面進行觀察時,位於自前述容器本體之中心朝左右方向0°以上30°以下之範圍內。
- 如請求項1至3中任一項之基板收納容器,其中前述基板接收部在以 前述背面壁為正面進行觀察時,位於自前述容器本體之中心朝左右方向20°以上30°以下之範圍內。
- 如請求項1或2之基板收納容器,其中前述基板之直徑為300mm。
- 如請求項4之基板收納容器,其中前述基板接收部在以前述背面壁為正面進行觀察時,位於自前述容器本體之中心朝左右方向20°以上30°以下之範圍內。
- 如請求項4或7之基板收納容器,其中前述基板之直徑為300mm。
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