TW201812960A - 基板收納容器 - Google Patents

基板收納容器 Download PDF

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TW201812960A
TW201812960A TW106127571A TW106127571A TW201812960A TW 201812960 A TW201812960 A TW 201812960A TW 106127571 A TW106127571 A TW 106127571A TW 106127571 A TW106127571 A TW 106127571A TW 201812960 A TW201812960 A TW 201812960A
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container body
engaged
mounting
mounting portion
substrate storage
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三村博
戶田順也
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日商信越聚合物股份有限公司
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Abstract

本發明提供一種提高搬送零件之安裝性之基板收納容器。 本發明之基板收納容器具備：容器本體20，其具有由蓋體閉合之開口部，且可收納複數個基板；及搬送零件30，其拆裝自如地安裝於容器本體20；且安裝機構40包含：容器本體20之開口部側之第1安裝部40A，及遠離開口部之側之第2安裝部40B。又，搬送零件30具有與安裝機構40卡合之被卡合部，且被卡合部包含：朝特定之方向變位而卡合之第1被卡合部36，及朝與特定之方向不同之方向變位而卡合之第2被卡合部37。

Description

基板收納容器
本發明係關於一種收納複數個基板之基板收納容器。
半導體晶片等之基板在被收納於基板收納容器之內部空間之狀態下進行在倉庫之保管、在半導體加工裝置間之搬送、及在工廠間之輸送等。該基板收納容器以能夠以頂部行走裝置或機器人等之自動搬送裝置處理之方式在容器本體之頂面安裝搬送零件(參照專利文獻1及2)。 例如，在專利文獻1中記載有以下之基板收納容器，即：在容器本體之頂面設置將導引片與干涉卡合部組合並形成叉形部之安裝機構，並在安裝機構之叉形部拆裝自如地安裝設置於搬送用之搬送零件之彈性卡合片。 [先前技術文獻] [專利文獻] [專利文獻1]日本特開2011-181867號公報 [專利文獻2]日本特開2008-034879號公報
[發明所欲解決之問題] 然而，如專利文獻1般，在利用僅左右方向或前後方向之1個方向之移動進行卡止之構造中，有因由基板收納容器之搬送中之緊急停止或移動導致之衝擊而搬送零件自容器本體脫開之情形。又，即便是在操作者處理之情形下，亦期望搬送零件不會簡單地自容器本體脫開。 因而，本發明係鑒於以上之課題而完成者，其目的在於提供一種提高搬送零件之安裝性之基板收納容器。 [解決問題之技術手段] (1)本發明之一態樣具備：容器本體，其具有利用蓋體閉合之開口部，且可收納複數個基板；及搬送零件，其拆裝自如地安裝於設置於前述容器本體之安裝機構；且前述安裝機構包含：前述容器本體之前述開口部側之第1安裝部，及遠離前述開口部之側之第2安裝部。 (2)在上述(1)之態樣中，前述安裝機構可包含設置於前述容器本體之周壁且將前述搬送零件嵌合卡止之擋止件。 (3)在上述(1)或(2)之態樣中，可行的是，前述搬送零件具有與前述安裝機構卡合之被卡合部，且前述被卡合部包含：朝特定之方向變位而與前述第1安裝部卡合之第1被卡合部，及朝與前述特定之方向不同之方向變位而與前述第2安裝部卡合之第2被卡合部。 [發明之效果] 根據本發明能夠提供一種提高搬送零件之安裝性之基板收納容器。
以下，針對本發明之實施形態，參照圖式詳細地說明。此外，在本說明書之實施形態中，整體上而言，對於相同之構件賦予相同之符號。在圖中根據需要以中空箭頭表示正面F與後方B。又，在圖中，將正面F及後方B表示為X軸方向，將上下方向表示為Y軸方向，將與X軸方向及Y軸方向正交之左右方向表示為Z軸方向。 針對基板收納容器進行說明。圖1係本發明之實施形態之基板收納容器之分解立體圖。圖2係顯示容器本體之平面圖。 圖1所示之基板收納容器1具備：蓋體10及收納複數個基板W之容器本體20。作為收納於基板收納容器1之基板W可舉直徑為300 mm或450 mm之半導體晶片、及玻璃遮罩等。 容器本體20係由形成開口部21之正面開口邊框、背面壁、左右之側壁23、頂面22、及底面形成之所謂的前開口盒式類型。該容器本體20之開口部21由蓋體10閉合。在容器本體20之頂面22拆裝自如地安裝有後述之搬送零件30(亦參照圖2)。 該等蓋體10及容器本體20係由含有特定樹脂之成形材料將複數個零件分別射出成形，將複數個零件組裝而構成。作為成形材料中之特定樹脂，可舉例如機械特性或耐熱性等優異之聚碳酸酯、聚醚醚酮、聚醚醯亞胺、聚對苯二甲酸丁二脂、聚縮醛、液晶聚合物、或環狀烯烴樹脂等。且，有時根據需要亦在該等樹脂中選擇性地添加碳、金屬纖維、導電性聚合物、抗靜電劑、或阻燃劑等。 針對搬送零件進行說明。圖3係顯示將搬送零件自容器本體分離之狀態之平面圖，圖4係自背側顯示搬送零件之立體圖。圖5係以圖2之A-A線切斷之部分剖視圖。 圖4所示之搬送零件30係拆裝自如地安裝於容器本體20之頂面22之大致中央部者。搬送零件30亦稱為機器人凸緣，在安裝於容器本體20之狀態下，例如固持於頂部搬送裝置而被搬送。該搬送零件30自確實地支持收納基板W之基板收納容器1之觀點而言係利用與蓋體10及容器本體20相同之成形材料成形。 搬送零件30具備俯視下大致中空邊框形之零件本體31。在該零件本體31之(頂面22側)下端部兩側，左右一對被夾持板32在水平方向伸出。另一方面，在零件本體31之開口之上端部一體地形成有固持於頂部搬送裝置之凸緣33。 被夾持板32形成為與容器本體20之頂面22重合之平坦之板狀，其兩側面320以在正面F側靠近之方式傾斜。於被夾持板32穿設有在俯視下為長孔狀之流通口321。藉由該流通口321，即便搬送零件30在安裝於容器本體20之狀態下被洗淨，仍能夠使洗淨水或乾燥空氣流通，故洗淨水不會殘留，能夠在短時間內使其乾燥。 又，在被夾持板32中，在背面之前部及兩側部形成有複數個凹凸部322。複數個凹凸部322除形成於被夾持板32之背面外，還可根據需要形成於零件本體31之縱壁34之背面等。該複數個凹凸部322在與容器本體20之頂面22之間形成複數個間隙。藉由該間隙，而與流通口321相同地，即便搬送零件30在安裝於容器本體20之狀態下被洗淨，仍能夠使洗淨水或乾燥空氣流通，故洗淨水不會殘留，能夠在短時間內使其乾燥。 凸緣33形成為四個角隅部經倒角而成之平面矩形，在中央部形成有凹部330，在頂部搬送裝置中被感測或定位。凹部330形成為大致圓錐台形狀，與複數個補強肋35之屈曲部附近一體化。 在凸緣33穿設有與零件本體31內連通之流通口332、4個方孔333、及流通口334。具體而言，分別是，在正面F中央側穿設有流通口332，在後方B中央側穿設有流通口334。又，4個方孔333以包圍凹部330之方式穿設。 第1被卡合部36自4個方孔333中位於容器本體20之正面F側之左右一對方孔333可視認且可操作地露出(參照圖3及參照5)。又，第2被卡合部37自流通口334可視認且可操作地露出(參照圖3)。 又，零件本體31在前後左右具備縱壁34，於內部在前後左右設置有與凸緣33一體化而確保強度之複數個補強肋35。在複數個補強肋35中位於容器本體20之正面F側之左右一對補強肋35分別一體地形成有在正面F側延伸且可彈性變形之第1被卡合部36。此外，在縱壁34穿設有複數個流通口340，洗淨水或乾燥空氣等可在零件本體31之內外流通。 補強肋35係以跨於零件本體31之縱壁34的角隅部之方式一體地架設於縱壁34之內面之間且形成為俯視下L字狀，在與零件本體31之縱壁34之間區劃俯視下大致矩形之空間，且與方孔333連通。補強肋35較零件本體31之縱壁34更低地形成，形成使洗淨水或乾燥空氣流通之未圖示之間隙。洗淨水或乾燥空氣經由該間隙與縱壁34之流通口340在零件本體31之內外流通。 第1被卡合部36形成為具有可撓曲性之直線性大致板狀，且與側方之補強肋35隔以間隙地對向，在前端下部一體地形成有圓柱形之鎖定銷360。在第1被卡合部36之端部，大致半圓形地一體地形成朝上方隆起之操作用之固持片361(參照圖6)。 由於第1被卡合部36在搬送零件30之左右方向、亦即容器本體20之Z軸方向上撓曲而變位，故第1被卡合部36之撓曲被調整為不抵接於方孔333之內側邊350之程度。 第2被卡合部37係自凹部330朝向後方B側在流通口334之中延伸而形成。第2被卡合部37為大致板狀，朝向後方B側且朝向頂面22形成，第2被卡合部37之前端以在後方B側屈曲而與頂面22平行之方式形成(參照圖7)。 此處，可以第2被卡合部37之前端與頂面22接觸之方式形成第2被卡合部37，亦可設置微小之間隙而形成。屈曲部之正面F側形成為具有圓角。 其次，針對安裝機構進行說明。圖6係顯示第1安裝部之部分剖視立體圖，圖7係顯示第2安裝部之部分剖視立體圖。 安裝搬送零件30之安裝機構40與容器本體20之頂面22一體地形成。因而，安裝機構40利用與容器本體20相同之成形材料成形。 安裝機構40包含：第1安裝部40A、及第2安裝部40B(參照圖6及圖7)。第1安裝部40A設置於容器本體20之正面F側即開口部21側，第2安裝部40B設置於遠離開口部21之側即後方B側。 該安裝機構40在容器本體20之頂面22之表面之兩側部具備相對向之左右一對支持軌道24(參照圖3)。具體而言，一對支持軌道24夾著容器本體20之頂面22之中央部而配置。上述之搬送零件30被拆裝自如地支持於一對支持軌道24間。 一對支持軌道24以隨著自容器本體20之後方B側朝向正面F側，支持軌道24與支持軌道24之間之寬度逐漸縮窄之方式傾斜地設置。且，支持軌道24以在與頂面22之間形成槽之方式屈曲形成為自頂面22上升之剖面大致L字狀 (參照圖5)，且在容器本體20之前後方向上直線延伸。 在一對支持軌道24之間之正面F側，在容器本體20之頂面22形成有與支持軌道24相同之剖面大致L字形之擋止件25(參照圖3)。擋止件25規制搬送零件30之朝正面F側之移動並將其嵌合卡止。 第1安裝部40A係在位於擋止件25之間之容器本體20之頂面22設置有左右一對。第1安裝部40A具備在容器本體20之正面F側延伸之導引片26，在導引片26之外側面前部一體地形成有干涉卡合部27。 導引片26與干涉卡合部27之前部與叉形部28之稍微變形之平面大致Y字狀組合，導引片26朝向Z軸方向之各個內側傾斜。干涉卡合部27較導引片26更朝向容器本體20之正面F側延伸，其前端成為叉形部28。叉形部28無特別限定，但自防止搬送零件30在卡止後簡單地在插入方向上脫落之觀點而言，較佳的是與插入方向傾斜或以凹陷之方式形成。 第2安裝部40B係在一對第1安裝部40A之間之後方B側作為在左右方向上延伸之突起設置有1處。第2安裝部40B之形狀係在後方B側具有斜面之山形狀，剖面形狀係大致直角三角形，其頂部形成為具有圓角(參照圖7)。 針對搬送零件之朝安裝機構之安裝方法進行說明。 在將搬送零件30安裝於容器本體20之安裝機構40時，在容器本體20之頂面22自後方B側配置搬送零件30，使搬送零件30之被夾持板32分別夾持於安裝機構40之複數對支持軌道24之間，並朝容器本體20之正面F側滑動，將搬送零件30之被夾持板32之前部與各擋止件25嵌合卡止，而防止搬送零件30之朝上方之脫落(參照圖3)。 此時，由於安裝機構40之複數對支持軌道24與容器本體20之前後方向傾斜，故能夠以簡單之構成防止搬送零件30相對於容器本體20之位置偏離或鬆動。因而，能夠使搬送零件30適切地滑動至特定之位置。又，由於搬送零件30之被夾持板32之側面320亦與支持軌道24之傾斜對應地傾斜，故無將設置搬送零件30時之朝向弄錯之情形。 又，如圖6所示，若搬送零件30朝正面F側滑動，則搬送零件30之第1被卡合部36之鎖定銷360一面與安裝機構40之第1安裝部40A之傾斜之一對導引片26相接一面被導引，在一對第1被卡合部36分別在左右方向、具體而言容器本體20之Z軸方向內側撓曲地變位後，各鎖定銷360越過導引片26之前部並與導引片26和干涉卡合部27之分支之叉形部28卡合。 又，如圖7所示，若鎖定銷360越過導引片26之前部並與導引片26和干涉卡合部27之分支之叉形部28卡合，則大致同時地第2被卡合部37與安裝機構40之第2安裝部40B卡合。亦即，若搬送零件30朝正面F側滑動，則第2被卡合部37在Y軸方向上撓曲地變位，並越過第2安裝部40B之傾斜部而卡合。 反之，在將搬送零件30自容器本體20之安裝機構40卸下時，必須相對於第1安裝部40A與第2安裝部40B進行2個操作。 首先，相對於第1安裝部40A，將手指自上方插入搬送零件30之方孔333，朝方孔333之內側邊350方向自左右按壓操作各第1被卡合部36之固持片361，而使各第1被卡合部36朝容器本體20之左右方向內側撓曲地變位，從而解除干涉卡合部27與鎖定銷360之卡合。 其次，相對於第2安裝部40B，將第2被卡合部37在Y軸方向上抬起而使其變位，從而解除與第2安裝部40B之卡合。因而，藉由相對於第1安裝部40A與第2安裝部40B進行2個操作，使搬送零件30相對於安裝機構40朝後方B側滑動，而能夠將搬送零件30自安裝機構40卸下。 如以上般，本發明之實施形態之基板收納容器1具備：容器本體20，其具有由蓋體10閉合之開口部21，且可收納複數個基板W；及搬送零件30，其拆裝自如地安裝於設置於容器本體20之安裝機構40；且安裝機構40包含：容器本體20之開口部21(正面F)側之第1安裝部40A、及遠離開口部21之(後方B)側之第2安裝部40B。 藉此，由於搬送零件30在第1安裝部40A與第2安裝部40B之2處與容器本體20卡合，故能夠提高相對於容器本體20之安裝性。針對朝後方B側按壓安裝於容器本體20之搬送零件30而搬送零件30是否自容器本體20脫落，將本實施形態之基板收納容器1與無第2安裝部40B而被專利文獻1視為先前之基板收納容器比較而進行實驗之結果為：在本實施形態之基板收納容器1中，與先前之基板收納容器相比更需要550 N以上之力。 又，由於搬送零件30自容器本體20之後方B側朝正面F側滑動並拆裝自如地與支持軌道24卡合且與擋止件25嵌合卡止，故可規制超出必要之滑動。 再者，由於第2安裝部40B之頂部形成為具有圓角，且第2被卡合部37之前端之屈曲部之正面F側亦形成為具有圓角，故於第2被卡合部37在Y軸方向上撓曲並越過第2安裝部40B之傾斜部而卡合時，能夠在無鉤絆下以順滑之移動卡合。 在實施形態中，相對於第1安裝部40A及第2安裝部40B分別進行操作，而卸下搬送零件30。藉此，提高朝容器本體20之搬送零件30之安裝性，而無在單動作下搬送零件30容易脫落之情形。 (變化例) 在上述實施形態中，第1安裝部40A設置有2處，第2安裝部40B設置有1處，但並不限定於此。例如，第1安裝部40A可設置有1處或3處以上，第2安裝部40B可設置有2處以上。此時，相應於各個第1安裝部40A、第2安裝部40B形成第1被卡合部36、及第2被卡合部37。 在上述實施形態中，與第1安裝部40A卡合之第1被卡合部36在X軸方向即左右方向上變位，與第2安裝部40B卡合之第2被卡合部37在Y軸方向即上方向上變位，但若第1被卡合部36之變位之方向與第2被卡合部37之變位之方向不同，則變位之方向並不限定於該等方向。 在上述實施形態中，搬送零件30相對於安裝機構40之第1安裝部40A及第2安裝部40B之2處大致同時地卡合，但為了使將搬送零件30安裝於容器本體20時之力(使其滑動之力)分散，而可構成為將形成第1安裝部40A及第1被卡合部36、與第2安裝部40B及第2被卡合部37之位置挪移，並將卡合之時序挪移。 在上述實施形態中，在容器本體20之頂面22設置安裝機構40，將機器人凸緣安裝為搬送零件30安裝，但可在容器本體20之周壁即左右側壁23之外表面設置安裝機構40，將手動握柄安裝為搬送零件30。 又，在將安裝於容器本體20之安裝機構40之搬送零件30卸下之情形下，可製作專用治具，使用專用治具卸下。 以上，針對本發明之較佳之實施形態詳細地進行了敘述，但本發明並不限定於上述之實施形態，在專利申請之範圍所記載之本發明之要旨之範圍內可進行各種變化、及變更。
1‧‧‧基板收納容器
10‧‧‧蓋體
20‧‧‧容器本體
21‧‧‧開口部
22‧‧‧頂面
23‧‧‧側壁
24‧‧‧支持軌道
25‧‧‧擋止件
26‧‧‧導引片
27‧‧‧干涉卡合部
28‧‧‧叉形部
30‧‧‧搬送零件
31‧‧‧零件本體
32‧‧‧被夾持板
33‧‧‧凸緣
34‧‧‧縱壁
35‧‧‧補強肋
36‧‧‧第1被卡合部
37‧‧‧第2被卡合部
40‧‧‧安裝機構
40A‧‧‧第1安裝部
40B‧‧‧第2安裝部
320‧‧‧側面
321‧‧‧流通口
322‧‧‧凹凸部
330‧‧‧凹部
332‧‧‧流通口
333‧‧‧方孔
334‧‧‧流通口
340‧‧‧流通口
350‧‧‧內側邊
360‧‧‧鎖定銷
361‧‧‧固持片
B‧‧‧後方
F‧‧‧正面
W‧‧‧基板
圖1係顯示本發明之實施形態之基板收納容器之分解立體圖。 圖2係顯示容器本體之平面圖。 圖3係顯示將搬送零件自容器本體分離後之狀態之平面圖。 圖4係自背側顯示搬送零件之立體圖。 圖5係以圖2之A-A線切斷之部分剖視圖。 圖6係顯示第1安裝部之部分剖視立體圖。 圖7係顯示第2安裝部之部分剖視立體圖。

Claims (3)

  1. 一種基板收納容器，其特徵在於具備： 容器本體，其具有由蓋體閉合之開口部，且可收納複數個基板；及 搬送零件，其拆裝自如地安裝於設置於前述容器本體之安裝機構；且 前述安裝機構包含：前述容器本體之前述開口部側之第1安裝部，及遠離前述開口部之側之第2安裝部。
  2. 如請求項1之基板收納容器，其中前述安裝機構包含設置於前述容器本體之周壁且將前述搬送零件嵌合卡止之擋止件。
  3. 如請求項1或2之基板收納容器，其中前述搬送零件具有與前述安裝機構卡合之被卡合部；且 前述被卡合部包含：朝特定之方向變位而與前述第1安裝部卡合之第1被卡合部；及朝與前述特定之方向不同之方向變位而與前述第2安裝部卡合之第2被卡合部。
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