CN109314072B - 基板收纳容器 - Google Patents

基板收纳容器 Download PDF

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CN109314072B
CN109314072B CN201780034631.7A CN201780034631A CN109314072B CN 109314072 B CN109314072 B CN 109314072B CN 201780034631 A CN201780034631 A CN 201780034631A CN 109314072 B CN109314072 B CN 109314072B
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三村博
户田顺也
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Shin Etsu Polymer Co Ltd
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Abstract

本发明提供一种提高搬送部件的安装性的基板收纳容器。本发明的基板收纳容器具备：容器主体（20），其具有由盖体封闭的开口部，并且可以收纳两块以上的基板；以及搬送部件（30），其拆装自如地安装于容器主体（20）上；安装机构（40）包括第一安装部（40A）以及第二安装部（40B），所述第一安装部（40A）在容器主体（20）的开口部侧，所述第二安装部（40B）在远离开口部的侧。此外，搬送部件（30）具有与安装机构（40）卡合的被卡合部，且被卡合部包括：朝向预定的方向位移从而卡合的第一被卡合部（36），以及朝向与预定的方向不同的方向位移从而卡合的第二被卡合部（37）。

Description

基板收纳容器
技术领域
本发明涉及一种收纳两枚以上的基板的基板收纳容器。
背景技术
半导体晶片等的基板在被收纳于基板收纳容器的内部空间的状态下进行在仓库的保管，在半导体加工装置之间进行搬送、以及在工厂之间进行运输等。该基板收纳容器为了能够通过高架行进装置或机器人等的自动搬送装置进行处理，在容器主体的顶板表面安装搬送部件（参照专利文献1以及2）。
例如，在专利文献1中记载了以下的基板收纳容器，即：在容器主体的顶板表面设置通过组合导向片和干涉卡合部形成的叉形部的安装机构，并在安装机构的叉形部拆装自如地安装设置在搬送用的搬送部件上的弹性卡合片。
现有技术
专利文献
专利文献1：日本特许公开JP 2011-181867号公报
专利文献2：日本特许公开JP 2008-034879号公报。
发明内容
发明要解决的技术问题
然而，如专利文献1中所述，在左右方向或者前后方向的仅一个方向上移动进行卡止的结构中，存在如下问题，即，由于在基板收纳容器的搬送中突然停止或者因移动引起的冲击，会导致搬送部件从容器主体脱开的情况。另外，即便是由操作者操作的情况下，也期望防止搬送部件易于从容器主体脱落开。
因此，本发明是鉴于以上的课题而完成的，其目的在于提供一种提高搬送部件的安装性的基板收纳容器。
解决技术问题的技术手段
（1）本发明所涉及的实施方式之一的基板收纳容器具备：容器主体，其具有由盖体封闭的开口部，并且可以收纳两枚以上的基板；以及搬送部件，其拆装自如地安装于设置在所述容器主体的安装机构上；所述安装机构包括第一安装部以及第二安装部，所述第一安装部在所述容器主体的所述开口部侧，所述第二安装部在远离所述开口部的侧。
（2）在上述（1）的实施方式中，所述安装机构还可以包括挡块，其被设置于所述容器主体的周壁上，用于配合卡止所述搬送部件。
（3）在上述（1）或者（2）的实施方式中，所述搬送部件还可以具有被卡合部，其与所述安装机构卡合，所述被卡合部包括：朝向预定的方向位移从而与所述第一安装部卡合的第一被卡合部；以及朝向与所述预定的方向不同的方向位移从而与所述第二安装部卡合的第二被卡合部。
发明效果
根据本发明，能够提供一种提高搬送部件的安装性的基板收纳容器。
附图说明
图1是表示本发明的实施方式所涉及的基板收纳容器的分解立体图。
图2是表示容器主体的俯视图。
图3是表示将搬送部件从容器主体分离后的状态的俯视图。
图4是表示从后侧显示搬送部件的立体图。
图5是表示沿图2的A-A线切断的局部的剖视图。
图6是表示第一安装部的局部横截面的立体图。
图7是表示第二安装部的局部横截面的立体图。
具体实施方式
以下，针对本发明的实施方式，参照附图进行详细说明。此外，在本说明书的整个实施方式中，对于相同的部件赋予相同的符号。在附图中根据需要以中空箭头表示前方F与后方B。此外，在附图中，将前方F以及后方B表示为X轴方向，将上下方向表示为Y轴方向，将与X轴方向以及Y轴方向正交的左右方向表示为Z轴方向。
针对基板收纳容器进行说明。图1是表示本发明的实施方式所涉及的基板收纳容器的分解立体图。图2是表示容器主体的俯视图。
图1所示的基板收纳容器1具备：盖体10以及收纳两枚以上的基板W的容器主体20。作为被收纳于基板收纳容器1中的基板W，例如可以列举直径为300mm或者450mm的半导体晶片、以及玻璃掩模等。
容器主体20是所谓的前开箱型，其由形成开口部21的前方开口框架、后壁、左右侧壁23、顶板表面22、以及底面所形成。该容器主体20的开口部21通过盖体10封闭。在容器主体20的顶板表面22上，拆装自如地安装有后述的搬送部件30（也可以参照附图2）。
盖体10以及容器主体20利用包含预定树脂的成形材料将两个以上的部件分别射出成形，并将两个以上的部件组装而形成。作为成形材料中的预定树脂，例如可以列举机械特性或者耐热性能优异的聚碳酸酯、聚醚醚酮、聚醚酰亚胺、聚对苯二甲酸丁二醇酯、聚缩醛、液晶聚合物、或者环烯烃树脂等。并且，根据需要，也可以在这些树脂中选择性地添加碳、金属纤维、导电性聚合物、抗静电剂、或者阻燃剂等。
针对搬送部件进行说明。图3是表示将搬送部件从容器主体分离后的状态的俯视图。图4是表示从后侧显示搬送部件的立体图。图5是表示沿图2的A-A线切断的局部的剖视图。
图4所示的搬送部件30拆装自如地安装在容器主体20的顶板表面22的大致中央部分。搬送部件30也称为机器人凸缘，在安装于容器主体20的状态下，例如被高架搬送装置把持，并被搬送。从切实可靠地支撑收纳了基板W的基板容纳容器1的观点出发，该搬送部件30由与盖体10和容器主体20相同的成形材料成形而制成。
搬送部件30在俯视下，具备大致中空框架形状的部件主体31。在该部件主体31的（顶板表面22侧）下端部的两侧，左右一对被夹持板32在水平方向上延申。另一方面，由高架搬送装置所把持的凸缘33一体地形成在部件主体31的开口的上端部。
被夹持板32形成为与容器主体20的顶板表面22重合的平坦的板状，其两侧面320以在前方F侧相互靠近的方式倾斜。在被夹持板32穿设有流通口321，流通口321在俯视下为长形的孔状。通过该流通口321，即使搬送部件30在安装于容器主体20的状态下被洗净，仍能够使洗净水或者干燥空气流通，因此洗净水不会残留，能够在短时间内使其干燥。
此外，在被夹持板32中，在背面的前端以及两侧形成有两个以上的凹凸部322。两个以上的凹凸部322除了形成在被夹持板32的背面之外，还可以根据需要形成在部件主体31的纵向壁34的背面等。该两个以上的凹凸部322与容器主体20的顶板表面22形成两个以上的间隙。通过该间隙，与流通口321相同，即便搬送部件30在安装于容器主体20的状态下被洗净，仍然能够使洗净水或者干燥空气流通，所以洗净水不会残留，能够在短时间内使其干燥。
凸缘33形成为四个角部经过倒角而成的扁平的矩形形状，并在中央部形成凹部330，在高架搬送装置中被感测或者定位。凹部330形成为大致圆锥台形，与两个以上的加强肋35的弯曲部的附近一体化形成。
在凸缘33穿设有与部件主体31内连通的流通口332、4个方孔333，以及流通口334。具体而言，在前方F中央侧穿设有流通口332，在后方B中央侧穿设有流通口334。此外，4个方孔333以包围凹部330的方式穿设。
在4个方孔333中，第一被卡合部36从位于容器主体20的前方F侧的左右一对方孔333可视认并且可操作地露出（参照图3以及图5）。此外，第二被卡合部37从流通口334可视认并且可操作地露出（参照图3）。
此外，部件主体31在前后左右具备纵向壁34，在内部的前后左右设置有与凸缘33一体化的用于确保强度的两个以上的加强肋35。在两个以上的加强肋35中，位于容器主体20的前方F侧的左右一对加强肋35分别与朝向前方F侧延伸的可弹性形变的第一被卡合部36一体地形成。此外，在纵向壁34穿设有两个以上的流通口340，洗净水或者干燥空气等可以在部件主体31的内外流通。
加强肋35在俯视时形成为L形，其以跨于部件主体31的纵向壁34的角部的方式一体地架设于纵向壁34的内面之间，并与部件主体31的纵向壁34之间区划出俯视时为大致矩形的空间，并且与方孔333连通。加强肋35形成为低于部件主体31的纵向壁34，并形成使洗净水或者干燥空气流通的未图示的间隙。洗净水或者干燥空气经由该间隙和纵向壁34的流通口340在部件主体31的内外流通。
第一被卡合部36形成为具有柔性的大致直板形状，并且与侧面的加强肋35相对，其之间具有间隙，并在前端下部一体地形成圆柱形的锁定销360。在第一被卡合部36的端部，一体地形成操作用的把持片361，把持片361形成为朝向上方隆起的大致半圆形（参照图6）。
由于第一被卡合部36在搬送部件30的左右方向，也就是在容器主体20的Z轴方向上弯曲而位移，所以第一被卡合部36的弯曲被调整到不会抵接在方孔333的内侧边350的程度。
第二被卡合部37形成为从凹部330朝向后方B侧延申到流通口334中。第二被卡合部37大致为板状，朝向后方B侧，并且朝向顶板表面22形成，第二被卡合部37的前端朝向后方B侧屈曲，以与顶板表面22平行的方式形成（参照图7）。
此处，第二被卡合部37可以形成为使得第二被卡合部37的前端接触顶板表面22，或者可以形成微小间隙。屈曲部分的前方F侧形成为具有圆角。
其次，针对安装机构进行说明。图6是表示第一安装部的局部横截面的立体图。图7是表示第二安装部的局部横截面的立体图。
安装搬送部件30的安装机构40与容器主体20的顶板表面22一体地形成。因此，安装机构40利用与容器主体20相同的成形材料成形而制成。
安装机构40包括：第一安装部40A、以及第二安装部40B（参照图6以及图7）。第一安装部40A设置于容器主体20的前方F侧，即开口部21侧，第二安装部40B设置在远离开口部21的侧，即后方B侧。
该安装机构40在容器主体20的顶板表面22的表面的两侧具备相对向的左右一对支撑轨道24（参照图3）。具体而言，一对支撑轨道24被配置为夹着容器主体20的顶板表面22的中央部。上述的搬送部件30被拆装自如地支撑于一对支撑轨道24之间。
一对支撑轨道24被设置为，使支撑轨道24与支撑轨道24之间的宽度从容器主体20的后方B侧朝向前方F侧逐渐变窄的方式倾斜。此外，支撑轨道24弯曲形成从顶板表面22上升的大致L形横截面（参照图5），以便与顶板表面22之间形成凹槽，并且在容器主体20的前后方向上直线延伸。
在一对支撑轨道24之间的前方F侧，在容器主体20的顶板表面22上形成具有与支撑轨道24相同的横截面的大致为L形的挡块25（参照图3）。挡块25规制搬送部件30的朝向前方F侧的移动，并将其配合卡止。
左右一对第一安装部40A设置在容器主体20的位于挡块25之间的顶板表面22上。第一安装部40A具备在容器主体20的前方F侧延伸的导向片26，在导向片26的外侧面前部一体地形成有干涉卡合部27。
导向片26与干涉卡合部27的前部被大致组合成略微变形的平面Y字状的叉形部28，导向片26朝向Z轴方向的各内侧倾斜。干涉卡合部27较导向片26更朝向容器主体20的前方F侧延伸，其前端成为叉形部28。叉形部28没有特别限定，但是从防止搬送部件30在被卡止后，沿插入方向上容易脱落的观点出发，优选在插入方向上形成为倾斜或者凹陷的方式。
第二安装部40B作为在一对第一安装部40A之间的后方B侧沿左右延伸的凸起设置在一个位置处。第二安装部40B的形状为，在后方B侧具有倾斜表面的山形，横截面形状基本上为直角三角形，并且其顶部形成为具有圆角（参照图7）。
针对搬送部件的安装到安装机构的安装方法进行说明。
在将搬送部件30安装到容器主体20的安装机构40上时，将搬送部件30配置于容器主体20的顶板表面22的后方B侧，使搬送部件30的被夹持板32分别夹持于安装机构40的两对以上的支撑轨道24之间，朝向容器主体20的前方F侧滑动，使搬送部件30的被夹持板32的前部与各挡块25配合卡止，从而防止搬送部件30向上方脱落（参照图3）。
此时，由于安装机构40的两对以上的支撑轨道24在容器主体20的前后方倾斜，所以能够以简单的结构防止搬送部件30相对于容器主体20的位置偏离或者松动。因此，能够使搬送部件30滑动至适合的特定位置。此外，由于搬送部件30的被夹持板32的侧面320也对应于支撑轨道24的倾斜而倾斜，因此不存在将设置搬送部件30时的朝向弄错的情况。
此外，如图6所示，当搬送部件30滑动到前方F侧时，在安装机构40的第一安装部40A的倾斜的一对导向片26，与搬送部件30的第一被卡合部36的锁定销360相接，并被引导，一对第一被卡合部36在左右方向，具体而言，在容器主体20的Z轴方向的内侧分别弯曲而位移后，各锁定销360越过导向片26的前部，与导向片26和干涉卡合部27的分叉的叉形部28卡合。
另外，如图7所示，当锁定销360越过导向片26的前部，并与导向片26和干涉卡合部27的分叉的叉形部28卡合时，第二被卡合部37几乎同时与安装机构40的第二安装部40B卡合。也就是说，当搬送部件30滑动到前方F侧时，则第二被卡合部37在Y轴方向上弯曲而位移，并越过第二安装部40B的倾斜部从而卡合。
相反，将搬送部件30从容器主体20的安装机构40上移除时，必须对第一安装部40A与第二安装部40B进行两个操作。
首先，对于第一安装部40A，将手指从上方插入搬送部件30的方孔333中，朝向方孔333的内侧边350方向从左右按压各第一被卡合部36的把持片361，使各第一被卡合部36朝向容器主体20的左右方向内侧弯曲而位移，从而解除干涉卡合部27与锁定销360的卡合。
然后，对于第二安装部40B，将第二被卡合部37在Y轴方向上抬起，使其位移，从而解除与第二安装部40B的卡合。因此，通过对第一安装部40A与第二安装部40B进行两个操作，使搬送部件30相对于安装机构40朝向后方B侧滑动，从而能够将搬送部件30从安装机构40上移除。
如上所述，本发明的实施方式所涉及的基板收纳容器1具备：容器主体20，其具有由盖体10封闭的开口部21，并且可以收纳两块以上的基板W；以及搬送部件30，其拆装自如地安装于设置在所述容器主体20的安装机构40上；安装机构40包括第一安装部40A以及第二安装部40B，所述第一安装部40A在容器主体20的开口部21侧（前方F侧），所述第二安装部40B在远离开口部的侧（后方B侧）。
通过上述构成，由于搬送部件30在第一安装部40A与第二安装部40B的两处与容器主体20卡合，因此可以提高搬送部件30相对容器主体20的安装性。将本实施方式的基板收纳容器1与无第二安装部40B的专利文献1中的常规的基板收纳容器，就向后方B侧按压安装于容器主体20的搬送部件30，搬送部件30是否从容器主体20上脱落做实验进行了对比，实验结果为：与常规的基板收纳容器相比，在本实施方式的基板收纳容器1中，进一步还需要550N以上的作用力，搬送部件30才能够从容器主体20上脱落。
此外，由于搬送部件30从容器主体20的后方B侧朝向前方F侧滑动并且与支撑轨道24拆装自如地卡合，并且与挡块25配合卡止，因此可以规制超出必要的滑动。
进一步，由于第二安装部40B的顶部形成为具有圆角，并且第二被卡合部37的前端的屈曲部的前方F侧也形成为具有圆角，所以第二被卡合部37在Y轴方向上弯曲并越过第二安装部40B的倾斜部而卡合时，能够在无障碍下顺利地滑动卡合。
在实施方式中，对于第一安装部40A以及第二安装部40B分别实施操作，从而移除搬送部件30。由此，提高了将搬送部件30安装于容器主体20的安装性，并且搬送部件30不容易通过一个动作而脱落。
（变形例）
在上述实施方式中，第一安装部40A设置有两处，第二安装部40B设置有一处，但并不限定于此。例如，第一安装部40A可以设置为一处或者三处以上，第二安装部40B可以设置为两处以上。此时，第一被卡合部36、以及第二被卡合部37对应于各第一安装部40A、第二安装部40B而形成。
在上述实施方式中，与第一安装部40A卡合的第一被卡合部36在X轴方向，即左右方向上位移，与第二安装部40B卡合的第二被卡合部37在Y轴方向上，即上下方向上位移，但如果第一被卡合部36的位移的方向与第二被卡合部37的位移的方向不同，则位移的方向并不限定于这些方向。
在上述实施方式中，搬送部件30相对于安装机构40的第一安装部40A以及第二安装部40B的两处几乎同时卡合，但为了分散搬送部件30安装于容器主体20时的作用力（使其滑动的作用力），也可以将第一安装部40A以及第一被卡合部36，与第二安装部40B以及第二被卡合部37的形成位置错开，从而错开卡合时间。
在上述实施方式中，尽管将机器人凸缘作为搬送部件30安装在容器主体20的顶板表面22上所设置的安装机构40上，然而，也可以在容器主体20的周壁，即左右侧壁23的外表面上设置安装机构40，将手动握柄作为搬送部件30安装在安装机构40上。
此外，在移除安装于容器主体20的安装机构40上的搬送部件30的情况时，可以制作专用的治具，使用专用治具进行移除。
以上，针对本发明的优选实施方式进行了详细说明，但是本发明并不限定于上述的实施方式，在权利要求的范围内所记载的本发明的要旨的范围内，可以进行各种修改和变更。
附图标记说明
1基板收纳容器
10盖体
20容器主体
21开口部
22顶板表面
23侧壁
24支撑轨道
25挡块
26导向片
27干涉卡合部
28叉形部
30搬送部件
31部件主体
32被夹持板
33凸缘
34纵向壁
35加强肋
36第一被卡合部
37第二被卡合部
320侧面
321、332、334、340 流通口
322 凹凸部
330 凹部
333 方孔
350 内侧边
360 锁定销
361 把持片
40 安装机构
40A 第一安装部
40B 第二安装部
F 前方
B 后方
W 基板。

Claims (2)

1.一种基板收纳容器，其特征在于具备：
容器主体，其具有由盖体封闭的开口部，并且可以收纳两枚以上的基板；以及
搬送部件，其拆装自如地安装于设置在所述容器主体的安装机构上；
其中，所述安装机构包括第一安装部以及第二安装部，所述第一安装部在所述容器主体的所述开口部侧，所述第二安装部在远离所述开口部的侧，
所述搬送部件具有被卡合部，其与所述安装机构卡合，
所述被卡合部包括：朝向预定的方向位移从而与所述第一安装部卡合的第一被卡合部；以及朝向与所述预定的方向不同的方向位移从而与所述第二安装部卡合的第二被卡合部，
左右一对所述第一安装部设置在所述容器主体的顶板表面上，所述第一安装部具备在所述容器主体的前方侧延伸的导向片，在所述导向片的外侧面前部一体地形成有干涉卡合部。
2.如权利要求1所述的基板收纳容器，其特征在于，
所述安装机构包括挡块，其被设置于所述容器主体的周壁上，用于配合卡止所述搬送部件。
CN201780034631.7A 2016-08-19 2017-07-20 基板收纳容器 Active CN109314072B (zh)

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