TWI735539B - 塗佈裝置及塗佈方法 - Google Patents
塗佈裝置及塗佈方法 Download PDFInfo
- Publication number
- TWI735539B TWI735539B TW106105548A TW106105548A TWI735539B TW I735539 B TWI735539 B TW I735539B TW 106105548 A TW106105548 A TW 106105548A TW 106105548 A TW106105548 A TW 106105548A TW I735539 B TWI735539 B TW I735539B
- Authority
- TW
- Taiwan
- Prior art keywords
- coating liquid
- coating
- pressure
- applicator
- pump
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 608
- 239000011248 coating agent Substances 0.000 title claims abstract description 587
- 239000007788 liquid Substances 0.000 claims abstract description 437
- 230000007246 mechanism Effects 0.000 claims abstract description 21
- 239000007921 spray Substances 0.000 claims abstract description 12
- 230000009471 action Effects 0.000 claims description 16
- 238000003860 storage Methods 0.000 claims description 14
- 238000005259 measurement Methods 0.000 claims description 11
- 238000005507 spraying Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 7
- 239000004744 fabric Substances 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 123
- 238000005086 pumping Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 44
- 230000008859 change Effects 0.000 description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000007781 pre-processing Methods 0.000 description 8
- 238000004590 computer program Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000007599 discharging Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 230000000449 premovement Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
- B05C5/0258—Coating heads with slot-shaped outlet flow controlled, e.g. by a valve
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
- B05C11/1013—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to flow or pressure of liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
- B05C11/1026—Valves
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Spray Control Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP??2016-035472 | 2016-02-26 | ||
JP2016035472A JP6804850B2 (ja) | 2016-02-26 | 2016-02-26 | 塗布装置及び塗布方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201741036A TW201741036A (zh) | 2017-12-01 |
TWI735539B true TWI735539B (zh) | 2021-08-11 |
Family
ID=59685085
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW106105548A TWI735539B (zh) | 2016-02-26 | 2017-02-20 | 塗佈裝置及塗佈方法 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6804850B2 (ja) |
KR (1) | KR20180116300A (ja) |
CN (1) | CN108698073B (ja) |
TW (1) | TWI735539B (ja) |
WO (1) | WO2017145675A1 (ja) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108043662A (zh) * | 2018-01-23 | 2018-05-18 | 佛山市雅路斯工业设备有限公司 | 一种涂布头 |
JP7219562B2 (ja) * | 2018-07-19 | 2023-02-08 | 東レ株式会社 | 塗布方法及び塗布装置 |
JP2020116519A (ja) * | 2019-01-23 | 2020-08-06 | 東レ株式会社 | 塗布装置及び塗布方法 |
CN110538774A (zh) * | 2019-09-09 | 2019-12-06 | 惠州锂威新能源科技有限公司 | 一种具有压力补偿装置的涂布系统及其使用方法 |
JP6808304B1 (ja) * | 2020-01-14 | 2021-01-06 | 中外炉工業株式会社 | 塗布装置 |
JP7135015B2 (ja) * | 2020-02-03 | 2022-09-12 | 東レエンジニアリング株式会社 | 塗工装置および塗工方法 |
CN113546812B (zh) * | 2020-06-29 | 2022-08-09 | 上海德沪涂膜设备有限公司 | 提高涂膜均一性的高粘度材料的涂膜装置 |
FR3116461B1 (fr) * | 2020-11-26 | 2022-12-23 | S A S 3Dceram Sinto | Machine de fabrication de pièces crues en matériau céramique ou métallique |
JP7309297B2 (ja) * | 2021-03-03 | 2023-07-18 | 株式会社Screenホールディングス | 給液装置、塗布装置、エージング装置、給液方法、およびエージング方法 |
JP2022143661A (ja) * | 2021-03-18 | 2022-10-03 | 株式会社Screenホールディングス | 基板塗布装置および基板塗布方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015141513A1 (ja) * | 2014-03-19 | 2015-09-24 | 東レ株式会社 | 塗布装置、塗布方法、及びディスプレイ用部材の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3414572B2 (ja) * | 1996-02-06 | 2003-06-09 | 東レ株式会社 | 塗布装置および塗布方法 |
JP2006142530A (ja) * | 2004-11-17 | 2006-06-08 | Noritsu Koki Co Ltd | 被覆装置 |
JP4802068B2 (ja) * | 2006-09-04 | 2011-10-26 | 株式会社ヒラノテクシード | 塗工装置 |
JP5507523B2 (ja) * | 2011-11-01 | 2014-05-28 | 東京エレクトロン株式会社 | 塗布処理装置、塗布処理方法、プログラム及びコンピュータ記憶媒体 |
JP6125783B2 (ja) * | 2012-09-24 | 2017-05-10 | 東レエンジニアリング株式会社 | 塗布装置及び塗布方法 |
DE102012224264A1 (de) * | 2012-12-21 | 2014-06-26 | Robert Bosch Gmbh | Verfahren und Vorrichtung zum Nassbeschichten eines Substrats |
US9682395B2 (en) * | 2013-02-28 | 2017-06-20 | Lg Chem, Ltd. | Slot die coating apparatus |
JP5834048B2 (ja) * | 2013-05-24 | 2015-12-16 | 富士機械工業株式会社 | 両面塗工装置 |
JP2015192984A (ja) * | 2014-03-17 | 2015-11-05 | 東レ株式会社 | 塗布装置及び塗布方法 |
CN104190597B (zh) * | 2014-08-19 | 2017-02-01 | 苏州市益维高科技发展有限公司 | 一种上胶量定量控制装置 |
-
2016
- 2016-02-26 JP JP2016035472A patent/JP6804850B2/ja active Active
-
2017
- 2017-02-01 WO PCT/JP2017/003518 patent/WO2017145675A1/ja active Application Filing
- 2017-02-01 KR KR1020187025493A patent/KR20180116300A/ko not_active Application Discontinuation
- 2017-02-01 CN CN201780012441.5A patent/CN108698073B/zh not_active Expired - Fee Related
- 2017-02-20 TW TW106105548A patent/TWI735539B/zh not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015141513A1 (ja) * | 2014-03-19 | 2015-09-24 | 東レ株式会社 | 塗布装置、塗布方法、及びディスプレイ用部材の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN108698073A (zh) | 2018-10-23 |
KR20180116300A (ko) | 2018-10-24 |
CN108698073B (zh) | 2021-06-11 |
JP6804850B2 (ja) | 2020-12-23 |
WO2017145675A1 (ja) | 2017-08-31 |
JP2017148769A (ja) | 2017-08-31 |
TW201741036A (zh) | 2017-12-01 |
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Legal Events
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MM4A | Annulment or lapse of patent due to non-payment of fees |