KR20180116300A - 도포 장치 및 도포 방법 - Google Patents

도포 장치 및 도포 방법 Download PDF

Info

Publication number
KR20180116300A
KR20180116300A KR1020187025493A KR20187025493A KR20180116300A KR 20180116300 A KR20180116300 A KR 20180116300A KR 1020187025493 A KR1020187025493 A KR 1020187025493A KR 20187025493 A KR20187025493 A KR 20187025493A KR 20180116300 A KR20180116300 A KR 20180116300A
Authority
KR
South Korea
Prior art keywords
applicator
coating liquid
pressure
coating
liquid
Prior art date
Application number
KR1020187025493A
Other languages
English (en)
Korean (ko)
Inventor
요시노리 타니
?이치 오카모토
토시후미 이토
아키오 스즈키
Original Assignee
토레 엔지니어링 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 토레 엔지니어링 가부시키가이샤 filed Critical 토레 엔지니어링 가부시키가이샤
Publication of KR20180116300A publication Critical patent/KR20180116300A/ko

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B05C5/0258—Coating heads with slot-shaped outlet flow controlled, e.g. by a valve
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1007—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material
    • B05C11/1013—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves responsive to condition of liquid or other fluent material responsive to flow or pressure of liquid or other fluent material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1026—Valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Spray Control Apparatus (AREA)
KR1020187025493A 2016-02-26 2017-02-01 도포 장치 및 도포 방법 KR20180116300A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2016-035472 2016-02-26
JP2016035472A JP6804850B2 (ja) 2016-02-26 2016-02-26 塗布装置及び塗布方法
PCT/JP2017/003518 WO2017145675A1 (ja) 2016-02-26 2017-02-01 塗布装置及び塗布方法

Publications (1)

Publication Number Publication Date
KR20180116300A true KR20180116300A (ko) 2018-10-24

Family

ID=59685085

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187025493A KR20180116300A (ko) 2016-02-26 2017-02-01 도포 장치 및 도포 방법

Country Status (5)

Country Link
JP (1) JP6804850B2 (ja)
KR (1) KR20180116300A (ja)
CN (1) CN108698073B (ja)
TW (1) TWI735539B (ja)
WO (1) WO2017145675A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220124620A (ko) * 2021-03-03 2022-09-14 가부시키가이샤 스크린 홀딩스 급액 장치, 도포 장치, 에이징 장치, 및 급액 방법

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108043662B (zh) * 2018-01-23 2024-06-21 佛山市雅路斯工业设备有限公司 一种涂布头
JP7219562B2 (ja) * 2018-07-19 2023-02-08 東レ株式会社 塗布方法及び塗布装置
JP2020116519A (ja) * 2019-01-23 2020-08-06 東レ株式会社 塗布装置及び塗布方法
CN110538774A (zh) * 2019-09-09 2019-12-06 惠州锂威新能源科技有限公司 一种具有压力补偿装置的涂布系统及其使用方法
JP6808304B1 (ja) * 2020-01-14 2021-01-06 中外炉工業株式会社 塗布装置
JP7135015B2 (ja) * 2020-02-03 2022-09-12 東レエンジニアリング株式会社 塗工装置および塗工方法
JP7500992B2 (ja) 2020-02-25 2024-06-18 東レ株式会社 塗布装置及び塗布方法
CN111687003B (zh) * 2020-06-29 2021-09-14 上海德沪涂膜设备有限公司 高粘度材料的涂膜装置和涂膜方法
FR3116461B1 (fr) * 2020-11-26 2022-12-23 S A S 3Dceram Sinto Machine de fabrication de pièces crues en matériau céramique ou métallique
JP2022143661A (ja) * 2021-03-18 2022-10-03 株式会社Ｓｃｒｅｅｎホールディングス 基板塗布装置および基板塗布方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3414572B2 (ja) * 1996-02-06 2003-06-09 東レ株式会社 塗布装置および塗布方法
JP2006142530A (ja) * 2004-11-17 2006-06-08 Noritsu Koki Co Ltd 被覆装置
JP4802068B2 (ja) * 2006-09-04 2011-10-26 株式会社ヒラノテクシード 塗工装置
JP5507523B2 (ja) * 2011-11-01 2014-05-28 東京エレクトロン株式会社 塗布処理装置、塗布処理方法、プログラム及びコンピュータ記憶媒体
JP6125783B2 (ja) * 2012-09-24 2017-05-10 東レエンジニアリング株式会社 塗布装置及び塗布方法
DE102012224264A1 (de) * 2012-12-21 2014-06-26 Robert Bosch Gmbh Verfahren und Vorrichtung zum Nassbeschichten eines Substrats
WO2014133364A1 (ko) * 2013-02-28 2014-09-04 주식회사 엘지화학 슬롯다이 코팅장치
JP5834048B2 (ja) * 2013-05-24 2015-12-16 富士機械工業株式会社 両面塗工装置
JP2015192984A (ja) * 2014-03-17 2015-11-05 東レ株式会社 塗布装置及び塗布方法
JP6490409B2 (ja) * 2014-03-19 2019-03-27 東レエンジニアリング株式会社 塗布装置、塗布方法、及びディスプレイ用部材の製造方法
CN104190597B (zh) * 2014-08-19 2017-02-01 苏州市益维高科技发展有限公司 一种上胶量定量控制装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220124620A (ko) * 2021-03-03 2022-09-14 가부시키가이샤 스크린 홀딩스 급액 장치, 도포 장치, 에이징 장치, 및 급액 방법

Also Published As

Publication number Publication date
TWI735539B (zh) 2021-08-11
JP2017148769A (ja) 2017-08-31
CN108698073A (zh) 2018-10-23
CN108698073B (zh) 2021-06-11
TW201741036A (zh) 2017-12-01
WO2017145675A1 (ja) 2017-08-31
JP6804850B2 (ja) 2020-12-23

Similar Documents

Publication Publication Date Title
KR20180116300A (ko) 도포 장치 및 도포 방법
US9401291B2 (en) Coating apparatus
KR20140001132A (ko) 도포 장치 및 노즐
JP2014180604A (ja) 間欠塗布装置および間欠塗布方法並びにディスプレイ用部材の製造方法
JP2015192984A (ja) 塗布装置及び塗布方法
KR102443901B1 (ko) 기판의 도포 방법 및 기판의 도포 장치
US20150096492A1 (en) Coating apparatus
JP5309588B2 (ja) 塗布液の塗布装置および塗布方法
JP2005152716A (ja) スリットコート式塗布装置及びスリットコート式塗布方法
JP2005288387A (ja) 塗布方法および塗布装置並びにディスプレイ用部材の製造方法
KR101091606B1 (ko) 기판 코터 장비의 약액 공급 장치 및 그 제어 방법
JP6901616B2 (ja) 塗布装置及び塗布方法
KR101597236B1 (ko) 디스펜서의 액맺힘 방지 장치 및 그 동작 방법
KR100859082B1 (ko) 도포 방법
JP2004267992A (ja) 塗布方法および塗布装置並びにディスプレイ用部材の製造方法
JP7500992B2 (ja) 塗布装置及び塗布方法
JP3139358B2 (ja) カラーフィルタ枚葉塗工装置およびその方法
JP2000126664A (ja) スリットコート式塗布装置とスリットコート式塗布方法
JP3672377B2 (ja) 基板処理装置
JP2017154086A (ja) 塗布装置及び塗布方法
JP6960111B2 (ja) 塗工装置
KR20170029380A (ko) 도포 장치
JP2018001124A (ja) 塗布装置及び塗布方法
JPH09131559A (ja) 塗布装置および塗布方法並びにカラーフィルタの製造装置および製造方法
JP2005199208A (ja) 塗工装置

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application