TWI685650B - 粒子計數器 - Google Patents

粒子計數器 Download PDF

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Publication number
TWI685650B
TWI685650B TW108107844A TW108107844A TWI685650B TW I685650 B TWI685650 B TW I685650B TW 108107844 A TW108107844 A TW 108107844A TW 108107844 A TW108107844 A TW 108107844A TW I685650 B TWI685650 B TW I685650B
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TW
Taiwan
Prior art keywords
light
optical path
path length
particles
detection signal
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TW108107844A
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English (en)
Chinese (zh)
Other versions
TW201939011A (zh
Inventor
松田朋信
進村正樹
齊藤光秋
山川雄生
Original Assignee
日商理音股份有限公司
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Publication of TW201939011A publication Critical patent/TW201939011A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1456—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
    • G01N15/1459—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/075—Investigating concentration of particle suspensions by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0053—Investigating dispersion of solids in liquids, e.g. trouble
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G01N2015/1454—Optical arrangements using phase shift or interference, e.g. for improving contrast
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1486—Counting the particles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N2015/1493—Particle size

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
TW108107844A 2018-03-09 2019-03-08 粒子計數器 TWI685650B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-043571 2018-03-09
JP2018043571A JP7071849B2 (ja) 2018-03-09 2018-03-09 パーティクルカウンタ

Publications (2)

Publication Number Publication Date
TW201939011A TW201939011A (zh) 2019-10-01
TWI685650B true TWI685650B (zh) 2020-02-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW108107844A TWI685650B (zh) 2018-03-09 2019-03-08 粒子計數器

Country Status (5)

Country Link
US (1) US10705010B2 (enExample)
JP (1) JP7071849B2 (enExample)
KR (1) KR102166583B1 (enExample)
CN (1) CN110243729B (enExample)
TW (1) TWI685650B (enExample)

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US10928297B2 (en) 2019-01-09 2021-02-23 University Of Washington Method for determining detection angle of optical particle sizer
EP3959505B1 (en) 2019-04-25 2024-05-08 Particle Measuring Systems, Inc. Particle detection systems and methods for on-axis particle detection and/or differential detection
CN114729868A (zh) * 2019-11-22 2022-07-08 粒子监测系统有限公司 先进的用于干涉测量颗粒检测和具有小大小尺寸的颗粒的检测的系统和方法
JP7420551B2 (ja) * 2019-12-27 2024-01-23 リオン株式会社 粒子測定装置
WO2021252481A1 (en) 2020-06-09 2021-12-16 Particle Measuring Systems, Inc. Particle detection via scattered light combined with incident light
KR102622195B1 (ko) * 2021-12-02 2024-01-05 세메스 주식회사 약액 검사 장치와, 이를 포함하는 기판 처리 장치 및 기판을 처리하는 약액을 검사하는 방법
US12326393B2 (en) * 2022-01-21 2025-06-10 Particle Measuring Systems, Inc. Enhanced dual-pass and multi-pass particle detection
CN121285730A (zh) * 2023-06-06 2026-01-06 恩特格里斯公司 光学颗粒计数器及方法
TW202507253A (zh) * 2023-06-06 2025-02-16 美商恩特葛瑞斯股份有限公司 光學顆粒計數器及方法
KR20260112700A (ko) 2023-11-16 2026-07-20 파티클 머슈어링 시스템즈, 인크. 입자 검출기의 위양성 입자 검출 저감을 위한 시스템 및 방법
KR102973666B1 (ko) * 2026-02-02 2026-06-05 신명하이텍 주식회사 반도체 장비용 실시간 파티클 모니터링 장치

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Also Published As

Publication number Publication date
CN110243729A (zh) 2019-09-17
US10705010B2 (en) 2020-07-07
CN110243729B (zh) 2022-07-15
JP7071849B2 (ja) 2022-05-19
TW201939011A (zh) 2019-10-01
JP2019158478A (ja) 2019-09-19
US20190277745A1 (en) 2019-09-12
KR102166583B1 (ko) 2020-10-16
KR20190106724A (ko) 2019-09-18

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