TWI654418B - 粒子檢測器 - Google Patents
粒子檢測器Info
- Publication number
- TWI654418B TWI654418B TW106104269A TW106104269A TWI654418B TW I654418 B TWI654418 B TW I654418B TW 106104269 A TW106104269 A TW 106104269A TW 106104269 A TW106104269 A TW 106104269A TW I654418 B TWI654418 B TW I654418B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- light source
- scattering
- sensor
- light beam
- Prior art date
Links
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Classifications
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B17/00—Fire alarms; Alarms responsive to explosion
- G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
- G08B17/103—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means using a light emitting and receiving device
- G08B17/107—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means using a light emitting and receiving device for detecting light-scattering due to smoke
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
- G01N21/532—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke with measurement of scattering and transmission
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/53—Scattering, i.e. diffuse reflection within a body or fluid within a flowing fluid, e.g. smoke
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B17/00—Fire alarms; Alarms responsive to explosion
- G08B17/12—Actuation by presence of radiation or particles, e.g. of infrared radiation or of ions
- G08B17/125—Actuation by presence of radiation or particles, e.g. of infrared radiation or of ions by using a video camera to detect fire or smoke
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B29/00—Checking or monitoring of signalling or alarm systems; Prevention or correction of operating errors, e.g. preventing unauthorised operation
- G08B29/18—Prevention or correction of operating errors
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B29/00—Checking or monitoring of signalling or alarm systems; Prevention or correction of operating errors, e.g. preventing unauthorised operation
- G08B29/18—Prevention or correction of operating errors
- G08B29/185—Signal analysis techniques for reducing or preventing false alarms or for enhancing the reliability of the system
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N7/00—Television systems
- H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/075—Investigating concentration of particle suspensions by optical means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Business, Economics & Management (AREA)
- Emergency Management (AREA)
- Computer Security & Cryptography (AREA)
- Multimedia (AREA)
- Dispersion Chemistry (AREA)
- Signal Processing (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ??2007906260 | 2007-11-15 | ||
| AU2007906260A AU2007906260A0 (en) | 2007-11-15 | Particle detection |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201734428A TW201734428A (zh) | 2017-10-01 |
| TWI654418B true TWI654418B (zh) | 2019-03-21 |
Family
ID=40638254
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW106104269A TWI654418B (zh) | 2007-11-15 | 2008-11-14 | 粒子檢測器 |
| TW104103916A TWI583937B (zh) | 2007-11-15 | 2008-11-14 | 在主動視頻煙霧檢測(avsd)系統中測定光束對準之技術 |
| TW097144146A TWI481846B (zh) | 2007-11-15 | 2008-11-14 | 在主動視頻煙霧檢測(avsd)系統中測定光束對準之技術 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW104103916A TWI583937B (zh) | 2007-11-15 | 2008-11-14 | 在主動視頻煙霧檢測(avsd)系統中測定光束對準之技術 |
| TW097144146A TWI481846B (zh) | 2007-11-15 | 2008-11-14 | 在主動視頻煙霧檢測(avsd)系統中測定光束對準之技術 |
Country Status (9)
| Country | Link |
|---|---|
| US (4) | US9025144B2 (enExample) |
| EP (3) | EP3367358A3 (enExample) |
| JP (3) | JP5662154B2 (enExample) |
| KR (3) | KR101705220B1 (enExample) |
| CN (3) | CN109255924A (enExample) |
| AU (1) | AU2008323626B2 (enExample) |
| CA (3) | CA3103407A1 (enExample) |
| TW (3) | TWI654418B (enExample) |
| WO (1) | WO2009062256A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI775314B (zh) * | 2020-08-20 | 2022-08-21 | 台灣積體電路製造股份有限公司 | 光學系統、位置檢測方法及晶圓凹口定位檢測 |
Families Citing this family (174)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2003902319A0 (en) | 2003-05-14 | 2003-05-29 | Garrett Thermal Systems Limited | Laser video detector |
| CN102539384B (zh) * | 2004-11-12 | 2016-08-03 | 爱克斯崔里斯科技有限公司 | 微粒探测器,系统与方法 |
| AU2008323626B2 (en) | 2007-11-15 | 2014-09-18 | Garrett Thermal Systems Limited | Particle detection |
| US8452052B2 (en) * | 2008-01-21 | 2013-05-28 | The Boeing Company | Modeling motion capture volumes with distance fields |
| SG189800A1 (en) * | 2008-04-17 | 2013-05-31 | Shilat Optronics Ltd | Intrusion warning system |
| CN110296959B (zh) | 2008-06-10 | 2022-05-03 | 嘉睿特热系统有限公司 | 粒子检测 |
| JP5185756B2 (ja) * | 2008-10-01 | 2013-04-17 | 川崎重工業株式会社 | 基板検出装置および方法 |
| TWI674402B (zh) | 2009-05-01 | 2019-10-11 | 巴哈馬商愛克斯崔里斯科技有限公司 | 微粒偵測組件、煙霧偵測器之組件、視覺對準工具及對準煙霧偵測器之組件的方法 |
| MY167512A (en) | 2009-07-07 | 2018-09-04 | Xtralis Technologies Ltd | Chamber condition |
| GB201003704D0 (en) * | 2010-03-05 | 2010-04-21 | Pcme Ltd | Apparatus and method for monitoring particles in a stack |
| WO2011106840A1 (en) * | 2010-03-05 | 2011-09-09 | Xtralis Technologies Ltd | Particle precipitator |
| EP2378270B1 (de) * | 2010-04-15 | 2015-06-24 | SICK Engineering GmbH | Verfahren zur Bestimmung einer Partikelkonzentration und Messvorrichtung |
| US8478529B2 (en) * | 2010-06-28 | 2013-07-02 | King Saud University | Visibility determination in environments containing airborne dust particles |
| US20130100135A1 (en) * | 2010-07-01 | 2013-04-25 | Thomson Licensing | Method of estimating diffusion of light |
| US20120120230A1 (en) * | 2010-11-17 | 2012-05-17 | Utah State University | Apparatus and Method for Small Scale Wind Mapping |
| US20130155672A1 (en) * | 2011-03-11 | 2013-06-20 | General Led, Inc. | Remote control track light fixture |
| EP2520169B1 (en) * | 2011-04-29 | 2019-12-04 | Electrolux Home Products Corporation N.V. | Baking oven door and baking oven |
| US8854426B2 (en) * | 2011-11-07 | 2014-10-07 | Microsoft Corporation | Time-of-flight camera with guided light |
| JP5656131B2 (ja) * | 2012-02-13 | 2015-01-21 | 株式会社リコー | 撮像ユニット及びその設置方法 |
| CN102682293B (zh) * | 2012-05-14 | 2013-10-23 | 山东大学 | 基于图像的回旋体玻璃瓶凸点模具号识别方法及其系统 |
| KR20150027078A (ko) * | 2012-06-08 | 2015-03-11 | 엑스트랄리스 테크놀로지 리미티드 | 다중-모드 검출 |
| US9398229B2 (en) * | 2012-06-18 | 2016-07-19 | Microsoft Technology Licensing, Llc | Selective illumination of a region within a field of view |
| DE102012213125A1 (de) * | 2012-07-26 | 2014-01-30 | Robert Bosch Gmbh | Brandüberwachungssystem |
| US9575180B2 (en) * | 2012-09-13 | 2017-02-21 | Mbda Uk Limited | Room occupancy sensing apparatus and method |
| JP5998830B2 (ja) * | 2012-10-15 | 2016-09-28 | 富士ゼロックス株式会社 | 電力供給制御装置、画像処理装置、電力供給制御プログラム |
| KR20140088745A (ko) * | 2013-01-03 | 2014-07-11 | 삼성전기주식회사 | 파티클 검사 장치 |
| US9383478B2 (en) * | 2013-01-25 | 2016-07-05 | The United States Of America, As Represented By The Secretary Of The Navy | System and method for atmospheric parameter enhancement |
| TWI490471B (zh) * | 2013-01-28 | 2015-07-01 | Univ Nat Taiwan | 非破壞性的複合材料檢測裝置及其檢測方法 |
| US20140217906A1 (en) * | 2013-02-01 | 2014-08-07 | Vung Van Vo | Remote Control Track Light Fixture |
| US9086273B1 (en) * | 2013-03-08 | 2015-07-21 | Google Inc. | Microrod compression of laser beam in combination with transmit lens |
| US10345213B2 (en) * | 2013-06-03 | 2019-07-09 | Garrett Thermal Systems Limited | Particle detection system and related methods |
| JP6186900B2 (ja) * | 2013-06-04 | 2017-08-30 | ソニー株式会社 | 固体撮像装置、電子機器、レンズ制御方法、および撮像モジュール |
| RU2609746C2 (ru) * | 2013-06-10 | 2017-02-02 | Виктор Владимирович Холкин | Устройство контроля возникновения перемещения частей конструкций сооружения |
| CN103364949B (zh) * | 2013-07-24 | 2015-07-29 | 中海阳能源集团股份有限公司 | 自然风光热反射镜自清洁装置 |
| WO2015021428A1 (en) * | 2013-08-09 | 2015-02-12 | Cnry Inc. | System and methods for monitoring an environment |
| EP2894546B1 (en) * | 2014-01-13 | 2018-07-18 | Facebook Inc. | Sub-resolution optical detection |
| DE102014001704B4 (de) * | 2014-02-08 | 2023-08-10 | Dräger Safety AG & Co. KGaA | Gasdetektionsvorrichtung |
| JP6438663B2 (ja) * | 2014-03-17 | 2018-12-19 | 三菱マテリアル株式会社 | 粉塵が存在する雰囲気中の物体の温度を計測する方法 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI775314B (zh) * | 2020-08-20 | 2022-08-21 | 台灣積體電路製造股份有限公司 | 光學系統、位置檢測方法及晶圓凹口定位檢測 |
| US11521882B2 (en) | 2020-08-20 | 2022-12-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer notch positioning detection |
| US11942348B2 (en) | 2020-08-20 | 2024-03-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer notch positioning detection |
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