TWI640054B - 托盤及晶圓固持裝置 - Google Patents

托盤及晶圓固持裝置 Download PDF

Info

Publication number
TWI640054B
TWI640054B TW104118706A TW104118706A TWI640054B TW I640054 B TWI640054 B TW I640054B TW 104118706 A TW104118706 A TW 104118706A TW 104118706 A TW104118706 A TW 104118706A TW I640054 B TWI640054 B TW I640054B
Authority
TW
Taiwan
Prior art keywords
electrode
support base
tray
electrostatic
upper electrode
Prior art date
Application number
TW104118706A
Other languages
English (en)
Chinese (zh)
Other versions
TW201613019A (en
Inventor
玉川晃樹
白岩則雄
吉川忠義
渡部直人
齋藤美喜
Original Assignee
日商新光電氣工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商新光電氣工業股份有限公司 filed Critical 日商新光電氣工業股份有限公司
Publication of TW201613019A publication Critical patent/TW201613019A/zh
Application granted granted Critical
Publication of TWI640054B publication Critical patent/TWI640054B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67109—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)
TW104118706A 2014-06-23 2015-06-10 托盤及晶圓固持裝置 TWI640054B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014128275A JP6377975B2 (ja) 2014-06-23 2014-06-23 基板固定装置
JP2014-128275 2014-06-23

Publications (2)

Publication Number Publication Date
TW201613019A TW201613019A (en) 2016-04-01
TWI640054B true TWI640054B (zh) 2018-11-01

Family

ID=54870313

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104118706A TWI640054B (zh) 2014-06-23 2015-06-10 托盤及晶圓固持裝置

Country Status (4)

Country Link
US (1) US9837297B2 (enExample)
JP (1) JP6377975B2 (enExample)
KR (1) KR102266688B1 (enExample)
TW (1) TWI640054B (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6010720B1 (ja) * 2015-01-20 2016-10-19 日本碍子株式会社 ウエハ支持構造体
US11532497B2 (en) * 2016-06-07 2022-12-20 Applied Materials, Inc. High power electrostatic chuck design with radio frequency coupling
US10770270B2 (en) * 2016-06-07 2020-09-08 Applied Materials, Inc. High power electrostatic chuck with aperture-reducing plug in a gas hole
US20180096867A1 (en) * 2016-09-30 2018-04-05 Momentive Performance Materials Inc. Heating apparatus with controlled thermal contact
KR20200133031A (ko) * 2016-11-07 2020-11-25 어플라이드 머티어리얼스, 인코포레이티드 기판을 홀딩하기 위한 캐리어, 프로세싱 시스템에서의 캐리어의 사용, 캐리어를 이용하는 프로세싱 시스템, 및 기판의 온도를 제어하기 위한 방법
JP6986937B2 (ja) * 2017-01-05 2021-12-22 東京エレクトロン株式会社 プラズマ処理装置
JP6858035B2 (ja) 2017-02-27 2021-04-14 新光電気工業株式会社 基板固定具及び基板固定装置
JP6969182B2 (ja) * 2017-07-06 2021-11-24 東京エレクトロン株式会社 プラズマ処理装置
US20190105748A1 (en) * 2017-10-11 2019-04-11 Samsung Electronics Co., Ltd. Seal-less airlock wafer stage
JP7049108B2 (ja) * 2017-12-25 2022-04-06 日本特殊陶業株式会社 静電チャック
DE102018127658A1 (de) * 2018-11-06 2020-05-07 Asm Assembly Systems Gmbh & Co. Kg Elektrostatisches Aufspannen von Elektronikplatten
US12300473B2 (en) 2019-03-08 2025-05-13 Applied Materials, Inc. Electrostatic chuck for high bias radio frequency (RF) power application in a plasma processing chamber
CN113574652B (zh) * 2019-03-18 2023-09-01 日本碍子株式会社 静电卡盘
EP3977207A1 (en) * 2019-05-29 2022-04-06 ASML Holding N.V. Split double sided wafer and reticle clamps
JP7349845B2 (ja) * 2019-08-13 2023-09-25 東京エレクトロン株式会社 基板処理システムにおける搬送方法
JP7386086B2 (ja) * 2020-01-07 2023-11-24 日本特殊陶業株式会社 保持装置
KR102859370B1 (ko) * 2020-06-29 2025-09-15 스미토모 오사카 세멘토 가부시키가이샤 정전 척 장치
JP2024071016A (ja) * 2022-11-14 2024-05-24 新光電気工業株式会社 トレイ及び基板固定装置
US20240186121A1 (en) * 2022-12-06 2024-06-06 Applied Materials, Inc. Thermal choke plate

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033250A (ja) * 1989-05-30 1991-01-09 Ulvac Corp 基板保持装置
US20040223285A1 (en) * 2003-05-09 2004-11-11 Shin-Etsu Chemical Co., Ltd. Wafer heating apparatus having electrostatic adsorption function
US20080217291A1 (en) * 2007-02-14 2008-09-11 Tokyo Electron Limited Substrate mounting stage and surface treatment method therefor
US7667945B2 (en) * 2005-11-25 2010-02-23 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Bipolar carrier wafer and mobile bipolar electrostatic wafer arrangement

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05259048A (ja) * 1992-03-09 1993-10-08 Nippon Telegr & Teleph Corp <Ntt> 試料加工用装置、試料搬送用装置及び試料搬送・加工用装置
JP3596127B2 (ja) * 1995-12-04 2004-12-02 ソニー株式会社 静電チャック、薄板保持装置、半導体製造装置、搬送方法及び半導体の製造方法
JP4256503B2 (ja) * 1997-10-30 2009-04-22 東京エレクトロン株式会社 真空処理装置
JP4346877B2 (ja) * 2002-08-29 2009-10-21 東京エレクトロン株式会社 静電吸着装置および処理装置
JP2006056731A (ja) * 2004-08-18 2006-03-02 Taiheiyo Cement Corp 窒化アルミニウム焼結体およびそれを用いた静電チャック
JP2010098012A (ja) * 2008-10-14 2010-04-30 Ulvac Japan Ltd エッチング装置及びエッチング方法
JP2012074650A (ja) * 2010-09-30 2012-04-12 Samco Inc プラズマ処理用トレイ及びプラズマ処理装置
JP5638405B2 (ja) * 2010-10-08 2014-12-10 パナソニック株式会社 基板のプラズマ処理方法
JP6285620B2 (ja) * 2011-08-26 2018-02-28 新光電気工業株式会社 静電チャック及び半導体・液晶製造装置
EP2764408B1 (en) * 2011-10-06 2019-08-21 ASML Netherlands B.V. Chuck, lithography apparatus and method of using a chuck
JP6007039B2 (ja) * 2012-09-18 2016-10-12 株式会社アルバック 搬送トレー及び基板保持方法
JP5595549B2 (ja) * 2013-03-28 2014-09-24 パナソニック株式会社 プラズマ処理装置用トレイ、プラズマ処理装置、及びプラズマ処理方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH033250A (ja) * 1989-05-30 1991-01-09 Ulvac Corp 基板保持装置
US20040223285A1 (en) * 2003-05-09 2004-11-11 Shin-Etsu Chemical Co., Ltd. Wafer heating apparatus having electrostatic adsorption function
US7667945B2 (en) * 2005-11-25 2010-02-23 Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. Bipolar carrier wafer and mobile bipolar electrostatic wafer arrangement
US20080217291A1 (en) * 2007-02-14 2008-09-11 Tokyo Electron Limited Substrate mounting stage and surface treatment method therefor

Also Published As

Publication number Publication date
US9837297B2 (en) 2017-12-05
US20150371885A1 (en) 2015-12-24
JP2016009715A (ja) 2016-01-18
TW201613019A (en) 2016-04-01
KR102266688B1 (ko) 2021-06-21
JP6377975B2 (ja) 2018-08-22
KR20150146408A (ko) 2015-12-31

Similar Documents

Publication Publication Date Title
TWI640054B (zh) 托盤及晶圓固持裝置
TWI641074B (zh) 局部加熱之多區域基材支撐座
CN100550271C (zh) 用于半导体处理反应器的喷头电极设计
TWI438861B (zh) 環形夾具及背側氣冷靜電夾頭
JP6108051B1 (ja) 静電チャック装置
US11322337B2 (en) Plasma processing system workpiece carrier with thermally isolated heater plate blocks
JP6423880B2 (ja) インシトゥで取り出すことができる静電チャック
JP6001402B2 (ja) 静電チャック
JP6656153B2 (ja) より小さいウエハおよびウエハ片向けのウエハキャリア
TWI643289B (zh) 靜電夾盤及使用在靜電夾盤中之基座構件
JP7259765B2 (ja) 静電チャック装置
KR20160015510A (ko) 정전척 어셈블리, 이를 구비하는 반도체 제조장치, 및 이를 이용한 플라즈마 처리방법
TW202126107A (zh) 加熱裝置
JP7494972B1 (ja) 静電チャック
JP7697548B1 (ja) 静電チャック
JP2025080476A (ja) 静電チャック
JP2024138916A (ja) 静電チャック