TWI600738B - Wafer resin film formation sheet - Google Patents
Wafer resin film formation sheet Download PDFInfo
- Publication number
- TWI600738B TWI600738B TW102107987A TW102107987A TWI600738B TW I600738 B TWI600738 B TW I600738B TW 102107987 A TW102107987 A TW 102107987A TW 102107987 A TW102107987 A TW 102107987A TW I600738 B TWI600738 B TW I600738B
- Authority
- TW
- Taiwan
- Prior art keywords
- resin film
- forming layer
- wafer
- film forming
- sheet
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K7/00—Use of ingredients characterised by shape
- C08K7/02—Fibres or whiskers
- C08K7/04—Fibres or whiskers inorganic
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/04—Non-macromolecular additives inorganic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
- H01L23/295—Organic, e.g. plastic containing a filler
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/002—Physical properties
- C08K2201/003—Additives being defined by their diameter
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K2201/00—Specific properties of additives
- C08K2201/016—Additives defined by their aspect ratio
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2203/00—Applications
- C08L2203/20—Applications use in electrical or conductive gadgets
- C08L2203/206—Applications use in electrical or conductive gadgets use in coating or encapsulating of electronic parts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Polymers & Plastics (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Die Bonding (AREA)
- Laminated Bodies (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012050787 | 2012-03-07 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201402758A TW201402758A (zh) | 2014-01-16 |
TWI600738B true TWI600738B (zh) | 2017-10-01 |
Family
ID=49116743
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW102107987A TWI600738B (zh) | 2012-03-07 | 2013-03-07 | Wafer resin film formation sheet |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6239498B2 (ko) |
KR (3) | KR101969991B1 (ko) |
CN (1) | CN104160491B (ko) |
TW (1) | TWI600738B (ko) |
WO (1) | WO2013133268A1 (ko) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6646360B2 (ja) * | 2015-04-24 | 2020-02-14 | 日東電工株式会社 | 封止用樹脂シート、及び、電子デバイス装置 |
JP6683563B2 (ja) * | 2015-07-21 | 2020-04-22 | 積水化学工業株式会社 | 接着シート |
WO2019112048A1 (ja) * | 2017-12-08 | 2019-06-13 | 積水化学工業株式会社 | 積層体及び電子装置 |
JP2018139326A (ja) * | 2018-05-31 | 2018-09-06 | 日東電工株式会社 | 電子デバイス装置の製造方法 |
EP3702400B1 (en) * | 2019-02-27 | 2021-04-21 | Röhm GmbH | Forgery prevention labels for high-temperature applications |
WO2021039732A1 (ja) * | 2019-08-26 | 2021-03-04 | 富士フイルム株式会社 | 熱伝導材料形成用組成物、熱伝導材料、熱伝導シート、熱伝導層付きデバイス |
CN112582283B (zh) * | 2019-09-29 | 2023-11-21 | 矽磐微电子(重庆)有限公司 | 半导体封装方法及半导体封装结构 |
CN112582282B (zh) * | 2019-09-29 | 2023-07-25 | 矽磐微电子(重庆)有限公司 | 半导体封装方法及半导体封装结构 |
CN112582281B (zh) * | 2019-09-29 | 2023-08-25 | 矽磐微电子(重庆)有限公司 | 半导体封装方法及半导体封装结构 |
JP7330404B1 (ja) * | 2022-06-22 | 2023-08-21 | 三菱電機株式会社 | 熱伝導性樹脂組成物、熱伝導性シートおよびその製造方法、熱伝導性硬化物およびその製造方法、パワーモジュール、ならびに、モータのステータ |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007106901A (ja) * | 2005-10-14 | 2007-04-26 | Showa Denko Kk | 熱伝導性樹脂組成物、その構造体及びその用途 |
JP2010087235A (ja) * | 2008-09-30 | 2010-04-15 | Sumitomo Bakelite Co Ltd | 樹脂組成物および樹脂組成物を使用して作製した半導体装置 |
JP2010121102A (ja) * | 2008-10-20 | 2010-06-03 | Kaneka Corp | 高耐光性高熱伝導性樹脂成形体及び照明器具部材 |
JP2011225856A (ja) * | 2010-03-31 | 2011-11-10 | Toray Ind Inc | 電子機器用接着剤組成物およびそれを用いた電子機器用接着剤シート |
TW201144403A (en) * | 2010-02-12 | 2011-12-16 | Nitto Denko Corp | Method for manufacturing adhesive sheet having heat conductivity |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3005324B2 (ja) * | 1991-07-09 | 2000-01-31 | 東洋高砂乾電池株式会社 | 高熱放散材組成物 |
JP3378374B2 (ja) * | 1993-09-14 | 2003-02-17 | 株式会社東芝 | 樹脂封止型半導体装置の製造方法、樹脂封止型半導体装置及び封止用樹脂シート |
KR950010029A (ko) * | 1993-09-14 | 1995-04-26 | 사토 후미오 | 수지 밀봉형 반도체장치 및 그 제조방법 |
JP2002030223A (ja) * | 2000-07-18 | 2002-01-31 | Sekisui Chem Co Ltd | 熱伝導性樹脂組成物 |
JP2002069392A (ja) | 2000-08-31 | 2002-03-08 | Polymatech Co Ltd | 熱伝導性接着フィルムおよびその製造方法ならびに電子部品 |
JP5134747B2 (ja) * | 2000-11-28 | 2013-01-30 | 日立化成工業株式会社 | 接着フィルム及び半導体装置 |
JP3544362B2 (ja) | 2001-03-21 | 2004-07-21 | リンテック株式会社 | 半導体チップの製造方法 |
JP2010235953A (ja) | 2002-05-02 | 2010-10-21 | Three M Innovative Properties Co | 熱伝導性シート並びにその製造方法 |
JP4089636B2 (ja) * | 2004-02-19 | 2008-05-28 | 三菱電機株式会社 | 熱伝導性樹脂シートの製造方法およびパワーモジュールの製造方法 |
JP2005281467A (ja) * | 2004-03-29 | 2005-10-13 | Toshiba Corp | 高熱伝導性樹脂、および部材、ならびにそれらを用いた電気機器および半導体装置 |
JP4893046B2 (ja) * | 2006-03-22 | 2012-03-07 | 東レ株式会社 | 電子機器用接着剤組成物、それを用いた電子機器用接着剤シート |
JP5005258B2 (ja) | 2006-05-23 | 2012-08-22 | リンテック株式会社 | 粘接着剤組成物、粘接着シートおよび半導体装置の製造方法 |
JP5407601B2 (ja) * | 2008-09-01 | 2014-02-05 | 油化電子株式会社 | 熱伝導成形体 |
US20100252961A1 (en) * | 2009-04-06 | 2010-10-07 | 3M Innovative Properties Company | Optical film replication on low thermal diffusivity tooling with conformal coating |
JP5023179B2 (ja) * | 2010-03-31 | 2012-09-12 | リンテック株式会社 | チップ用樹脂膜形成用シートおよび半導体チップの製造方法 |
JP6182967B2 (ja) * | 2013-05-09 | 2017-08-23 | 日立化成株式会社 | 半導体素子用高熱伝導性接着フィルム |
-
2013
- 2013-03-05 CN CN201380012849.4A patent/CN104160491B/zh active Active
- 2013-03-05 JP JP2014503852A patent/JP6239498B2/ja active Active
- 2013-03-05 KR KR1020167003119A patent/KR101969991B1/ko active IP Right Grant
- 2013-03-05 KR KR1020147022175A patent/KR101584473B1/ko active IP Right Grant
- 2013-03-05 WO PCT/JP2013/055981 patent/WO2013133268A1/ja active Application Filing
- 2013-03-05 KR KR1020167000118A patent/KR20160006801A/ko not_active Application Discontinuation
- 2013-03-07 TW TW102107987A patent/TWI600738B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007106901A (ja) * | 2005-10-14 | 2007-04-26 | Showa Denko Kk | 熱伝導性樹脂組成物、その構造体及びその用途 |
JP2010087235A (ja) * | 2008-09-30 | 2010-04-15 | Sumitomo Bakelite Co Ltd | 樹脂組成物および樹脂組成物を使用して作製した半導体装置 |
JP2010121102A (ja) * | 2008-10-20 | 2010-06-03 | Kaneka Corp | 高耐光性高熱伝導性樹脂成形体及び照明器具部材 |
TW201144403A (en) * | 2010-02-12 | 2011-12-16 | Nitto Denko Corp | Method for manufacturing adhesive sheet having heat conductivity |
JP2011225856A (ja) * | 2010-03-31 | 2011-11-10 | Toray Ind Inc | 電子機器用接着剤組成物およびそれを用いた電子機器用接着剤シート |
Also Published As
Publication number | Publication date |
---|---|
KR101969991B1 (ko) | 2019-04-17 |
JPWO2013133268A1 (ja) | 2015-07-30 |
KR20140128999A (ko) | 2014-11-06 |
WO2013133268A1 (ja) | 2013-09-12 |
KR20160018876A (ko) | 2016-02-17 |
CN104160491B (zh) | 2018-05-11 |
KR101584473B1 (ko) | 2016-01-11 |
TW201402758A (zh) | 2014-01-16 |
KR20160006801A (ko) | 2016-01-19 |
CN104160491A (zh) | 2014-11-19 |
JP6239498B2 (ja) | 2017-11-29 |
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