TWI585222B - Film forming device - Google Patents
Film forming device Download PDFInfo
- Publication number
- TWI585222B TWI585222B TW100134788A TW100134788A TWI585222B TW I585222 B TWI585222 B TW I585222B TW 100134788 A TW100134788 A TW 100134788A TW 100134788 A TW100134788 A TW 100134788A TW I585222 B TWI585222 B TW I585222B
- Authority
- TW
- Taiwan
- Prior art keywords
- base portion
- vacuum chamber
- mask
- calibration
- upper side
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/88—Dummy elements, i.e. elements having non-functional features
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010220263A JP5639431B2 (ja) | 2010-09-30 | 2010-09-30 | 成膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201229260A TW201229260A (en) | 2012-07-16 |
TWI585222B true TWI585222B (zh) | 2017-06-01 |
Family
ID=45892623
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100134788A TWI585222B (zh) | 2010-09-30 | 2011-09-27 | Film forming device |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5639431B2 (ja) |
KR (1) | KR101846982B1 (ja) |
CN (1) | CN103154304B (ja) |
TW (1) | TWI585222B (ja) |
WO (1) | WO2012043150A1 (ja) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014015633A (ja) * | 2012-07-05 | 2014-01-30 | Sumitomo Heavy Ind Ltd | 成膜装置、及び成膜装置用搬送トレイ |
JP2014077170A (ja) * | 2012-10-10 | 2014-05-01 | Sumitomo Heavy Ind Ltd | 成膜装置 |
CN103132016B (zh) * | 2013-02-22 | 2015-05-13 | 京东方科技集团股份有限公司 | 一种膜边调整器 |
CN104018117A (zh) * | 2013-03-01 | 2014-09-03 | 昆山允升吉光电科技有限公司 | 一种掩模框架及其对应的掩模组件 |
JP2014177683A (ja) * | 2013-03-15 | 2014-09-25 | Sumitomo Heavy Ind Ltd | 基板搬送トレイ、及び成膜装置 |
JP6250999B2 (ja) * | 2013-09-27 | 2017-12-20 | キヤノントッキ株式会社 | アライメント方法並びにアライメント装置 |
CN107002219B (zh) * | 2014-12-10 | 2021-09-03 | 应用材料公司 | 掩模布置、在基板上沉积层的设备和对准掩模布置的方法 |
CN104404466A (zh) | 2014-12-26 | 2015-03-11 | 合肥京东方光电科技有限公司 | 磁控溅射镀膜方法及系统 |
WO2016112951A1 (en) * | 2015-01-12 | 2016-07-21 | Applied Materials, Inc. | Holding arrangement for supporting a substrate carrier and a mask carrier during layer deposition in a processing chamber, apparatus for depositing a layer on a substrate, and method for aligning a substrate carrier supporting a substrate and a mask carrier |
TWI576302B (zh) * | 2015-05-28 | 2017-04-01 | 友達光電股份有限公司 | 板體分離設備及板體分離方法 |
KR101965370B1 (ko) * | 2016-05-18 | 2019-04-03 | 어플라이드 머티어리얼스, 인코포레이티드 | 캐리어 또는 기판의 운송을 위한 장치 및 방법 |
KR20180056990A (ko) * | 2016-11-21 | 2018-05-30 | 한국알박(주) | 막 증착 장치 및 방법 |
KR102359244B1 (ko) * | 2016-11-21 | 2022-02-08 | 한국알박(주) | 막 증착 방법 |
KR20180056989A (ko) * | 2016-11-21 | 2018-05-30 | 한국알박(주) | 막 증착 장치 및 방법 |
US20190368024A1 (en) * | 2017-02-24 | 2019-12-05 | Applied Materials, Inc. | Positioning arrangement for a substrate carrier and a mask carrier, transportation system for a substrate carrier and a mask carrier, and methods therefor |
KR102111722B1 (ko) * | 2017-03-17 | 2020-05-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판의 진공 프로세싱을 위한 장치, 기판의 진공 프로세싱을 위한 시스템, 및 진공 챔버 내에서의 기판 캐리어 및 마스크 캐리어의 이송을 위한 방법 |
EP3394881A1 (en) * | 2017-03-17 | 2018-10-31 | Applied Materials, Inc. | Methods of handling a mask device in a vacuum system, mask handling apparatus, and vacuum system |
CN106987798B (zh) * | 2017-04-17 | 2020-02-11 | 京东方科技集团股份有限公司 | 一种镀膜装置 |
CN109642309B (zh) * | 2017-05-17 | 2021-08-17 | 埃马金公司 | 高精准度蔽荫掩模沉积系统及其方法 |
WO2019004359A1 (ja) * | 2017-06-29 | 2019-01-03 | 株式会社アルバック | 成膜装置 |
CN109429499A (zh) * | 2017-06-30 | 2019-03-05 | 株式会社爱发科 | 成膜装置、掩模框架及对准方法 |
WO2019070031A1 (ja) * | 2017-10-05 | 2019-04-11 | 株式会社アルバック | スパッタリング装置 |
JP6662840B2 (ja) * | 2017-12-11 | 2020-03-11 | 株式会社アルバック | 蒸着装置 |
JP6662841B2 (ja) * | 2017-12-21 | 2020-03-11 | 株式会社アルバック | 蒸着装置 |
WO2019192676A1 (en) * | 2018-04-03 | 2019-10-10 | Applied Materials, Inc. | Arrangement for clamping a carrier to a device |
JP2020518122A (ja) * | 2018-04-03 | 2020-06-18 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 真空チャンバ内でキャリアを操作するための装置、真空堆積システム、および真空チャンバ内でキャリアを操作する方法 |
WO2019192678A1 (en) * | 2018-04-03 | 2019-10-10 | Applied Materials, Inc. | Apparatus and vacuum system for carrier alignment in a vacuum chamber, and method of aligning a carrier |
WO2020030252A1 (en) * | 2018-08-07 | 2020-02-13 | Applied Materials, Inc. | Material deposition apparatus, vacuum deposition system and method of processing a large area substrate |
JP7222073B2 (ja) * | 2018-08-29 | 2023-02-14 | アプライド マテリアルズ インコーポレイテッド | 第1のキャリア及び第2のキャリアを搬送するための装置、基板を垂直に処理するための処理システム、及びそれらの方法 |
KR20230155654A (ko) * | 2022-05-03 | 2023-11-13 | 삼성디스플레이 주식회사 | 표시 장치의 제조장치 및 표시 장치의 제조방법 |
KR20230155655A (ko) * | 2022-05-03 | 2023-11-13 | 삼성디스플레이 주식회사 | 표시 장치의 제조장치 및 표시 장치의 제조방법 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101783397A (zh) * | 2008-12-15 | 2010-07-21 | 株式会社日立高新技术 | 有机el器件制造装置、成膜装置及其成膜方法、液晶显示基板制造、定位装置及定位方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3789857B2 (ja) * | 2002-06-25 | 2006-06-28 | トッキ株式会社 | 蒸着装置 |
JP4463492B2 (ja) * | 2003-04-10 | 2010-05-19 | 株式会社半導体エネルギー研究所 | 製造装置 |
JP4596794B2 (ja) * | 2004-02-27 | 2010-12-15 | 日立造船株式会社 | 真空蒸着用アライメント装置 |
JP4609756B2 (ja) | 2005-02-23 | 2011-01-12 | 三井造船株式会社 | 成膜装置のマスク位置合わせ機構および成膜装置 |
WO2007023552A1 (ja) * | 2005-08-25 | 2007-03-01 | Hitachi Zosen Corporation | 真空蒸着用アライメント装置 |
JP5074368B2 (ja) * | 2008-12-15 | 2012-11-14 | 株式会社日立ハイテクノロジーズ | 成膜装置 |
JP2011096393A (ja) * | 2009-10-27 | 2011-05-12 | Hitachi High-Technologies Corp | 有機elデバイス製造装置及びその製造方法並びに成膜装置及び成膜方法 |
-
2010
- 2010-09-30 JP JP2010220263A patent/JP5639431B2/ja active Active
-
2011
- 2011-09-05 WO PCT/JP2011/070119 patent/WO2012043150A1/ja active Application Filing
- 2011-09-05 CN CN201180046526.8A patent/CN103154304B/zh active Active
- 2011-09-05 KR KR1020137006250A patent/KR101846982B1/ko active IP Right Grant
- 2011-09-27 TW TW100134788A patent/TWI585222B/zh active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101783397A (zh) * | 2008-12-15 | 2010-07-21 | 株式会社日立高新技术 | 有机el器件制造装置、成膜装置及其成膜方法、液晶显示基板制造、定位装置及定位方法 |
Also Published As
Publication number | Publication date |
---|---|
JP5639431B2 (ja) | 2014-12-10 |
CN103154304A (zh) | 2013-06-12 |
KR20130139867A (ko) | 2013-12-23 |
WO2012043150A1 (ja) | 2012-04-05 |
KR101846982B1 (ko) | 2018-04-10 |
TW201229260A (en) | 2012-07-16 |
CN103154304B (zh) | 2015-06-03 |
JP2012072478A (ja) | 2012-04-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI585222B (zh) | Film forming device | |
WO2012090753A1 (ja) | 成膜装置 | |
JP4785856B2 (ja) | 真空蒸着用アライメント装置 | |
JP2012140671A5 (ja) | ||
JP5056339B2 (ja) | 基板搬送装置用基板把持機構 | |
CN109952017B (zh) | 元件装配机 | |
KR100844968B1 (ko) | 기판조립장치와 기판조립방법 | |
US7114245B2 (en) | Component holding head, component mounting apparatus using same, and component mounting method | |
US10276797B2 (en) | Vapor deposition device, vapor deposition method, and method for manufacturing organic electroluminescence element | |
JP4624236B2 (ja) | 真空蒸着用アライメント装置 | |
KR101177090B1 (ko) | 접합 기판 제조 장치 및 접합 기판 제조 방법 | |
KR20110011519A (ko) | 노광 장치 및 노광 방법 | |
KR101680744B1 (ko) | 기판 조립 장치와 그것을 이용한 기판 조립 방법 | |
KR20160048852A (ko) | Xy 스테이지, 얼라인먼트 장치, 증착 장치 | |
KR101410071B1 (ko) | 마스크 유지 기구 | |
JP5440924B2 (ja) | 搬送装置の支持構造 | |
JP4824645B2 (ja) | 基板搬送装置 | |
JP5994084B2 (ja) | 分割逐次近接露光装置及び分割逐次近接露光方法 | |
JP5643540B2 (ja) | スクリーン印刷機 | |
JP6142214B2 (ja) | 近接露光装置及び近接露光方法 | |
JP2008209632A (ja) | マスク装着方法及び露光装置ユニット | |
KR102080127B1 (ko) | 기판 어태치 장치 및 방법 | |
KR20100044446A (ko) | 노광장비의 레티클 이송용 로봇 | |
KR100860480B1 (ko) | 패널기판의 위치보정기능을 갖는 러빙장치 | |
JP2006084782A (ja) | 露光装置用プリアライメント装置 |