TWI566657B - 製造陶瓷電路板的方法及陶瓷電路板 - Google Patents

製造陶瓷電路板的方法及陶瓷電路板 Download PDF

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TWI566657B
TWI566657B TW101140923A TW101140923A TWI566657B TW I566657 B TWI566657 B TW I566657B TW 101140923 A TW101140923 A TW 101140923A TW 101140923 A TW101140923 A TW 101140923A TW I566657 B TWI566657 B TW I566657B
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viscosity
copper
ceramic substrate
holding
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亞歷山大 多恩
羅蘭 雷南斯
克勞斯 赫曼
迪特瑪 耶尼格
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製陶技術股份有限公司
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    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1216Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by screen printing or stencil printing
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    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
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    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4038Through-connections; Vertical interconnect access [VIA] connections
    • H05K3/4053Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques
    • H05K3/4061Through-connections; Vertical interconnect access [VIA] connections by thick-film techniques for via connections in inorganic insulating substrates
    • HELECTRICITY
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0213Electrical arrangements not otherwise provided for
    • H05K1/0263High current adaptations, e.g. printed high current conductors or using auxiliary non-printed means; Fine and coarse circuit patterns on one circuit board
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
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    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • H05K1/092Dispersed materials, e.g. conductive pastes or inks
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007Types of components
    • H05K2201/10106Light emitting diode [LED]
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    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/14Related to the order of processing steps
    • H05K2203/1476Same or similar kind of process performed in phases, e.g. coarse patterning followed by fine patterning
    • HELECTRICITY
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    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/12Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
    • H05K3/1283After-treatment of the printed patterns, e.g. sintering or curing methods
    • H05K3/1291Firing or sintering at relative high temperatures for patterns on inorganic boards, e.g. co-firing of circuits on green ceramic sheets
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    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/245Reinforcing conductive patterns made by printing techniques or by other techniques for applying conductive pastes, inks or powders; Reinforcing other conductive patterns by such techniques
    • H05K3/246Reinforcing conductive paste, ink or powder patterns by other methods, e.g. by plating
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    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155Manufacturing circuit on or in base
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  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
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Description

製造陶瓷電路板的方法及陶瓷電路板
本發明關於一種製造一陶瓷電路板的方法,該陶瓷電路板的兩側的至少一側上有導線路和接觸點,且至少具一貫穿接觸孔(通道)。此外還關於一種如此製造的陶瓷電路板。
本發明的目的在將申請專利範圍第1項的引文部分所述之方法改良,使得用此方法製造的電路板可用於高功率光源用的LED技術(在這些光源會產生許多熱且有高電流流過)。舉例而言,這類高功率光源用於運動場(Stadium)當作浮標燈光(Flutlicht)的設備。
依本發明,這種目的係利用以下順序的先後方法步驟達成:a)製造由氮化鋁構成的一陶瓷基材,並將孔做入在為通道而設的位置;b)將該孔用一第一附著膏(Haftpaste,英:adhering paste)填充,該第一附著膏由銅、鎢、鉬、及/或這些金屬的合金或混合物構成;c)將該陶瓷基材的至少一側用一道第一網版印刷程序一次印上所要的導線路結構以及具第二附著膏的接觸點;d)視需要將第二附著膏的印刷完全或部分重複;e)在一燒入爐中用N2(氮)將該印刷過的陶瓷基材煅燒,在此步驟, 氧含量控制保持在0~50ppm的O2;f)將一種不含玻璃的蓋膏(Deckpaste,英:cover paste)用一第二網版印刷過程印刷到該第二附著膏上直到達到導線路和接觸點之所要厚度為止;g)將該印刷過的陶瓷基材在一燒入爐中用N2(氮)煅燒,其中氧含量受控制保持在0~50ppm的O2
利用此方法可製造特別厚或高的導線路,在每道網版印刷過程後作一道隨後的陶瓷基材的乾燥過程或煅燒過程。
在本發明一實施例,該導線路與接觸點或燒入的蓋膏以無電流方式用鎳及金作補強。
最好將孔做入到為該通道所設的位置作業在燒結前,係利用冲壓達成,或在燒結後係利用雷射光束達成。
最好將孔做入到為該通道所設的位置的作業在燒結前係利用冲壓達成,或在燒結後係利用雷射光束達成。
在較佳的實施例,所用第一保持膏係一高粘度銅膏,其粘度在800Pa~1200Pa間,且宜在900Pa~1100Pa間,尤宜在1000Pa。
最好該銅膏含CuO或Cu2O及適合氮化鋁的附著玻璃,且宜由ZnO-SiO2構成。
在一實施例中,最好在銅膏中含有使體積加大的成分,如Al或Ti,且含有在加熱會釋出銅的物質如CuCl。
最好該第一保持膏和該第一保持膏除了粘度外都相同,其中第二保持膏的粘度比第一保持膏的粘度約小一半。
約「小一半」宜指50%±10%,尤宜指50%±5%,特定表示50%±2%。
第二附著膏的粘度宜為500 Pa,宜為500 Pa表示粘度在500±50 Pa間,尤宜在500±10 Pa間。
該蓋膏和保持膏除了少了保持玻璃外大多相同,但其粘度比保持膏低,其中蓋膏的粘度在保持膏的粘度的1/3~1/2間,且尤宜為保持膏的40%~60%。
最好當導電路和接觸點的印刷作業重複時,該過壓力以少了0.01~0.05 mm方式循環地實施。
本發明還關於一種陶瓷電路板,具有導線路或接觸點,特別是上述的方法製造者,其中導線路和接觸點的垂直厚度或高度在20~125μm間,且宜60~90μm間。
依本發明,該通道(Via)用銅、鎢或銅或其混合物充填。由於銀會造成附著的合金反應不能使用。
最好此電路板用於高功率光源的LED技術,其中產生許多熱並有高電流流過。舉例而言,這種高功率光源用在一運動場當作浮動燈光設備。
〔製造方法〕
1)要製造陶瓷電路板係使用氮化鋁構成的基材,它要在其位置做通道,係 在燒結前冲壓或在燒結後用雷射光束穿孔;2)依本發明,第一步驟,該通道用一種附著膏(由銅、鎢或鉬或其合金或混合物構成)充填,所用附著膏宜為一種銅膏,粘度1,000 Pa,此銅通道膏可含CuO或Cu2O,且含一種適用於氮化鋁的附著玻璃,宜為ZnO-SiO2構成。此外宜有增大體積的成分如Al或Ti,以及在熱時會釋出銅的物質如CuCl;3)然後將陶瓷基材的至少一側依導線路和接觸點之所要設計而定用步驟2所述的銅膏用網版印刷過程一次完成印刷;4)如果要製造特別粗厚的導線路和接觸點,則另外用上述銅膏當附著膏作另一道網版印過程。此銅膏可完全地或部分地多次用一道網版印刷過程印刷;5)然後將陶瓷基材隨印上的附著膏乾燥(宜在80℃);6)然後將印刷過的陶瓷基材在900℃通過一個具N2(氮)的燒入爐,其中氧含量控制在0~50 ppm O2;7)然後將一不含玻璃的蓋膏(且適當之粘度和組成)印到該燒入之附著膏上,直到達到上述之導線路和接觸點的厚度為止。蓋膏和附著膏除了不含附著玻璃外大致相同,但粘度比附著膏低。蓋膏的粘度宜為附著膏粘度的1/3~2/3間,尤宜為其40~60%;8)然後將陶瓷基材隨印上的蓋膏乾燥(宜在80℃);9)然後將印刷過的陶瓷基材在900℃通過一含N2(氮)的燒入爐,其中氧含量受控制保持在0~50 ppm O2;10)如不用此方式,可不採步驟6,使將蓋膏在乾燥後不作前面的燒入過程而 印刷到附著膏上。
依本發明,導線路和接觸點宜由銅或銅合金構成,用一道網版印刷過程用一銅膏施到氮化鋁構成的陶瓷基材上,如此達到上述之銅厚度。當導線路和接觸點的厚度或高度在20~40μm間,一次施覆就足夠。如果需要40~125μm之較厚或較高的導線路和接觸點,則宜作二道或更多網版印刷過程,一般用一種不同的銲膏工作,即一附著膏直接施在陶瓷基材上,一蓋膏施在附著膏上。依本發明,該二種銲膏只用一種網版印刷過程施加。
在製造過程時,陶瓷基材中的通道用一附著膏充填,且陶瓷基材的至少一面依所要構造用附著膏作一次或二次完全印刷,附著膏還可另外用另一道網版印刷過程印刷。在每次施覆後宜作乾燥,然後將一蓋膏(具適當粘度及適當組成)印到附著膏上,直到達到上述導線路和接觸點的銅厚度為止。
導路板的另一面(即下側)也可用銅膏印上一次或數次。
通道直徑宜為0.2 mm,但可各依陶瓷基材厚度而定有配合之直徑,較厚的陶瓷基材需要其他通道,亦即具較大直徑者,對1 mm厚度的陶瓷基材,通道直徑需要0.3~0.4 mm,通道宜利用高粘度銅膏(粘度1,00 Pa)在一網版印刷機(它具有配合之篩網構造以及呈通道構造的印刷板)充填,銅膏(特別上直接在氮化鋁基材上的附著膏)含CuO或Cu2O以及適用於氮化鋁的由ZnO-SiO2構成的附著玻璃(如較佳方式者)。這點為第一網版印刷構成。然後印刷過之基材宜作乾燥(宜在80℃)。
然後利用相同的銅膏(但宜稀釋到500 Pa)在網版印刷機上 用相同構造作另一道網版印刷過程,這點為第二道網版印刷過程。此第二道網版印刷過程正好印到利用一網版印刷過程產生的導線路和接觸點上,因此它們的厚度或高度一致。
如此製備的基材在900℃通過一具N2(氮)的燒入爐,其中氧含量受控制保持在0~50 ppm O2。銅在任何地方都不接觸到燃燒輔助劑,然後利用另一種不含玻璃的銅膏將一定的區域或構造或整個已印刷及燒入的構造的一側或兩側加厚,重新用相同條件燒入,此時銅層的厚度為本發明的厚度。
然後,蓋層或燒入的銅層宜以防腐蝕及可軟銲的方式以無電流方式用鎳加厚,選擇性地用0.05μm鈀及用無電流方式用0.05μm的金加厚。此鍍金屬層(即銅層),因此緻密地接到陶瓷,使得通道沒有漏洞可讓例如易流動的粘著劑通過侵入的上方LED側。
用網版印刷的陶瓷基材可在各道印刷過程後或在所有印刷過程後共同地在適度溫度(一般在900℃為時6~10分)及氮大氣中燒入,剩餘氧很少,宜0~50 ppm。
本發明對於氮化鋁將習知DCB技術(從200μm起)和厚膜技術(最多可達20μm)之間的空隙補起來,且可用於厚膜技術之充填通道,如此兩側可作接觸。
以下說明一具體實施例:將氮化鋁構成之燒結陶瓷基材(大小114×114×0.38 mm)用雷射鑽孔成一定的構造設計,通道直徑為0.20 mm。通道用高粘度銅膏(1000 Pa)在一網版印刷機(它具有配合之篩網構造及一個具通道之構造的印刷 板)充填。銅膏含CuO及/或Cu2O,一種適合氮化鋁之保持玻璃(由ZnO-SiO2)及2%鋁粉構成,以及小量3%CuCl,在80℃乾燥後,用相同銲膏(但稀釋到500 Pa)在基材各側在網版印刷機上作平版印刷。將如此製備的基材在900℃通過一具N2的燒入爐,其中氧含量受控制保持在0~50 ppm O2,銅在任何地方都不接觸到燃燒輔助劑。然後將特定的構造,或整個已印刷及燒入的構造在一側或兩側利用另一不含玻璃的銅膏加厚,重新用相同條件燒入,此時銅層厚度在70μm,銅層以不會腐蝕且可軟銲的方式用4μm無電流方式鎳及0.05μm無電流方式的金加厚,此金屬層緻密地接到陶瓷,故連通道也沒有漏洞能讓能流動的粘著劑侵入到上的LED側。
本發明實施例的特點:
˙由氮化鋁構成的陶瓷電路板,具有銅或銅合金構成的燒入之導線路及接觸點,其中導線路及接觸點的厚度或銅高度在20~500μm間,且宜20~125μm間,尤宜60~90μm間。
˙將導線路及接觸點用銅或銅合金用至少二道網版印刷過程及燒入過程施到一陶瓷基材上。
˙使用及燒入二種銲膏,直接鄰界或倚靠到陶瓷基材上的銲膏為一附著膏,具有玻璃成分;位於其上的蓋膏不含玻璃,因為導線路和接觸點須能作電鍍。
˙在此二網版印刷過程使用完全相同之網版印刷構造設計,但當在一些位置不需厚的導線路或厚的接觸點,則第二網版印刷過程略過這些位置。
˙最好第二道印刷周圍小了約0.01~0.05mm,俾使第二銲膏不會流下來「垂掛」在第一層上並使構造失控地變寬擴張。
˙在第一網版印刷過程使用高粘度銅膏當作附著膏,其粘度在800 Pa~1200 Pa間,且宜在900 Pa~1100 Pa間,尤宜在1000 Pa。
˙蓋膏的粘度比保持膏低,俾使表面較光滑,且使篩網布的壓力保持較小,蓋膏粘度宜小於附著膏。此粘度宜為附著膏的1/3~2/3間,且尤宜為其40~60%,但附著膏和蓋膏化性相同,且其不同處(不論玻璃成分)只在粘度。
˙附著膏的銅膏含CuO及/或CuO2及一種適合氮化鋁的「保持玻璃」。由ZnO-SiO2構成。
˙在第一網版印刷後將陶瓷基材在適當溫度(宜為80℃)乾燥。
˙氮化鋁構成之陶瓷基材大小宜為114×114×0.38 mm,0.38 mm為陶瓷基材的厚度。
˙燒入作業宜在900℃在一具N2(氮)的燒入爐中達成,其中氧含量受控制保持在6~10 ppm O2
˙在燒入爐中,銅在任何地方都不與燃燒輔助劑接觸。

Claims (13)

  1. 一種製造一陶瓷電路板的方法,該陶瓷電路板的兩側的至少一側上有導線路和接觸點,且至少具一貫穿接觸孔(通道),此方法包含以下先後相隨的方法步驟:a)製造由氮化鋁構成的一陶瓷基材,並將孔做入在為通道而設的位置;b)將該孔用一第一附著膏填充,該第一附著膏由銅、鎢、鉬、及/或這些金屬的合金或混合物構成;c)將該陶瓷基材的至少一側用一道第一網版印刷程序一次印上所要的導線路結構以及具第二附著膏的接觸點;d)視需要將第二附著膏的印刷完全或部分重複;e)在一燒入爐中用N2(氮)將該印刷過的陶瓷基材煅燒,在此步驟,氧含量控制保持在0~50ppm的O2;f)將一種不含玻璃的蓋膏用一第二網版印刷過程印刷到該第二附著膏上直到達到導線路和接觸點之所要厚度為止;g)將該印刷過的陶瓷基材在一燒入爐中用N2(氮)煅燒,其中氧含量受控制保持在0~50ppm的O2,h)所用第一保持膏係一高粘度銅膏,其粘度在800Pa~1200Pa間。
  2. 如申請專利範圍第1項之方法,其中:該銅膏粘度在900Pa~1100Pa間。
  3. 如申請專利範圍第2項之方法,其中:該銅膏粘度在1000Pa間。
  4. 如申請專利範圍第1項之方法,其中: 在每道網版印刷過程後作一道隨後的陶瓷基材的乾燥過程或煅燒過程。
  5. 如申請專利範圍第1或第2項之方法,其中:該導線路與接觸點或燒入的蓋膏以無電流方式用鎳及金作補強。
  6. 如申請專利範圍第1或第2項之方法,其中:將孔做入到為該通道所設的位置的作業係在燒結前利用冲壓達成,或在燒結後利用雷射光束達成。
  7. 如申請專利範圍第1或第2項之方法,其中:該銅膏含CuO或Cu2O及適合氮化鋁的附玻璃,且宜由ZnO-SiO2構成。
  8. 如申請專利範圍第1或第2項之方法,其中:在銅膏中含有使體積加大的成分,如Al或Ti,且含有在加熱時會釋出銅的物質如CuCl。
  9. 如申請專利範圍第1或第2項之方法,其中:該第一保持膏和該第一保持膏除了粘度外都相同,其中第二保持膏的粘度比第一保持膏的粘度小一半。
  10. 如申請專利範圍第9項之方法,其中:第二保持膏的粘度為500Pa。
  11. 如申請專利範圍第1或第2項之方法,其中:該蓋膏和保持膏除了少了保持玻璃外大多相同,但其粘度比保持膏低,其中蓋膏的粘度在保持膏的粘度的1/3~1/2間,且尤宜為保持膏的40~60%。
  12. 如申請專利範圍第1或第2項之方法,其中:當導電路和接觸點的印刷作業重複時,該印刷程序比前一次印刷作業少了0.01~0.05mm方式循環地實施。
  13. 一種陶瓷電路板,具有導線路或接觸點,特別是依申請專利範圍第1項~第12項中任一項的方法製造者,其特徵在:導線路和接觸點的垂直厚度或高度在20~125μm間,且宜60~90μm間。
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Families Citing this family (9)

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Publication number Priority date Publication date Assignee Title
DE102014107217A1 (de) 2014-05-19 2015-11-19 Ceram Tec Gmbh Leistungshalbleitermodul
JP5941588B2 (ja) * 2014-09-01 2016-06-29 Dowaエレクトロニクス株式会社 接合材およびそれを用いた接合方法
KR101740453B1 (ko) 2015-06-30 2017-05-26 주식회사 코멧네트워크 세라믹 회로 기판의 제조방법
KR20170029481A (ko) 2017-03-08 2017-03-15 주식회사 코멧네트워크 세라믹 회로 기판의 제조방법
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI286330B (en) * 2003-01-31 2007-09-01 Tdk Corp Manufacturing method of ceramic printed circuit board and manufacturing method of electronic components using the same
US7388296B2 (en) * 2005-06-09 2008-06-17 Ngk Spark Plug Co., Ltd. Wiring substrate and bonding pad composition
TW200911071A (en) * 2007-08-24 2009-03-01 Delta Electronics Inc Ceramic circuit board and manufacturing method thereof
TW200930190A (en) * 2007-10-03 2009-07-01 Fujikura Ltd Module, curcuit board and method of manufacturing module
TW201012332A (en) * 2008-09-10 2010-03-16 United Innovate Techology Corp Multifunctional circuit board structure and manufacturing method thereof

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06196831A (ja) * 1992-12-24 1994-07-15 Tokin Corp AlN基板用導電パターンの製造方法
JPH06297680A (ja) * 1993-04-19 1994-10-25 Hitachi Ltd スクリーン印刷方法、スクリーン印刷装置、及び電子回路
JP3401102B2 (ja) 1994-12-21 2003-04-28 株式会社日立製作所 回路基板およびその製造方法、電子デバイス実装体、グリーンシート
DE19514018C1 (de) * 1995-04-13 1996-11-28 Hoechst Ceram Tec Ag Verfahren zur Herstellung eines metallbeschichteten, metallisierten Substrats aus Aluminiumnitridkeramik und damit erhaltenes metallbeschichtetes Substrat
JPH1021744A (ja) * 1996-06-28 1998-01-23 Mitsuboshi Belting Ltd 銅導体ペースト及び該銅導体ペーストを印刷した基板
JP4498678B2 (ja) 2000-11-30 2010-07-07 株式会社トクヤマ 基板およびその製造方法
JP4407199B2 (ja) * 2003-08-13 2010-02-03 旭硝子株式会社 結晶化無鉛ガラス、ガラスセラミックス組成物、グリーンシートおよび電子回路基板
JP2005268672A (ja) * 2004-03-22 2005-09-29 Mitsubishi Electric Corp 基板
EP1795514A4 (en) * 2004-08-18 2012-05-09 Tokuyama Corp CERAMIC SUBSTRATE FOR MOUNTING LIGHT-EMITTING DEVICE AND PRODUCTION METHOD THEREFOR
KR100727451B1 (ko) * 2005-04-26 2007-06-13 주식회사 잉크테크 금속 잉크 조성물
JP2007201346A (ja) * 2006-01-30 2007-08-09 Mitsuboshi Belting Ltd セラミックス回路基板及びその製造方法
JP4291857B2 (ja) * 2007-01-24 2009-07-08 三ツ星ベルト株式会社 銅導体ペースト、導体回路板及び電子部品
JP2010027637A (ja) * 2008-07-15 2010-02-04 Panasonic Corp 導体ペースト及びそれを用いたセラミック基板の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI286330B (en) * 2003-01-31 2007-09-01 Tdk Corp Manufacturing method of ceramic printed circuit board and manufacturing method of electronic components using the same
US7388296B2 (en) * 2005-06-09 2008-06-17 Ngk Spark Plug Co., Ltd. Wiring substrate and bonding pad composition
TW200911071A (en) * 2007-08-24 2009-03-01 Delta Electronics Inc Ceramic circuit board and manufacturing method thereof
TW200930190A (en) * 2007-10-03 2009-07-01 Fujikura Ltd Module, curcuit board and method of manufacturing module
TW201012332A (en) * 2008-09-10 2010-03-16 United Innovate Techology Corp Multifunctional circuit board structure and manufacturing method thereof

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