TWI565666B - 石英玻璃大型管之製造方法 - Google Patents
石英玻璃大型管之製造方法 Download PDFInfo
- Publication number
- TWI565666B TWI565666B TW103121820A TW103121820A TWI565666B TW I565666 B TWI565666 B TW I565666B TW 103121820 A TW103121820 A TW 103121820A TW 103121820 A TW103121820 A TW 103121820A TW I565666 B TWI565666 B TW I565666B
- Authority
- TW
- Taiwan
- Prior art keywords
- quartz glass
- semi
- cylinder
- tube
- less
- Prior art date
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 94
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 238000000034 method Methods 0.000 claims description 40
- 238000000465 moulding Methods 0.000 claims description 40
- 238000007493 shaping process Methods 0.000 claims description 36
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 33
- 239000012535 impurity Substances 0.000 claims description 10
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 9
- 229910052801 chlorine Inorganic materials 0.000 claims description 9
- 239000000460 chlorine Substances 0.000 claims description 9
- 238000001125 extrusion Methods 0.000 claims description 7
- 238000007664 blowing Methods 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000003786 synthesis reaction Methods 0.000 claims description 3
- 229910052783 alkali metal Inorganic materials 0.000 claims description 2
- 150000001340 alkali metals Chemical class 0.000 claims description 2
- 238000005485 electric heating Methods 0.000 claims description 2
- 150000002736 metal compounds Chemical class 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims 1
- 238000002485 combustion reaction Methods 0.000 description 10
- 239000010883 coal ash Substances 0.000 description 9
- 238000009826 distribution Methods 0.000 description 7
- 229910052736 halogen Inorganic materials 0.000 description 6
- 150000002367 halogens Chemical class 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000000047 product Substances 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000011265 semifinished product Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 208000005156 Dehydration Diseases 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 230000018044 dehydration Effects 0.000 description 2
- 238000006297 dehydration reaction Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000002274 desiccant Substances 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000011017 operating method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000004071 soot Substances 0.000 description 2
- 101710134784 Agnoprotein Proteins 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000006298 dechlorination reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 210000001061 forehead Anatomy 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000010455 vermiculite Substances 0.000 description 1
- 229910052902 vermiculite Inorganic materials 0.000 description 1
- 235000019354 vermiculite Nutrition 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/053—Re-forming tubes or rods by centrifuging
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/043—Heating devices specially adapted for re-forming tubes or rods in general, e.g. burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/045—Tools or apparatus specially adapted for re-forming tubes or rods in general, e.g. glass lathes, chucks
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/07—Re-forming tubes or rods by blowing, e.g. for making electric bulbs
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/08—Re-forming tubes or rods to exact dimensions, e.g. calibrating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/02—Pure silica glass, e.g. pure fused quartz
- C03B2201/03—Impurity concentration specified
- C03B2201/04—Hydroxyl ion (OH)
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2203/00—Production processes
- C03C2203/40—Gas-phase processes
- C03C2203/42—Gas-phase processes using silicon halides as starting materials
- C03C2203/44—Gas-phase processes using silicon halides as starting materials chlorine containing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Glass Melting And Manufacturing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013107435.9A DE102013107435B4 (de) | 2013-07-12 | 2013-07-12 | Verfahren zur Herstellung eines Quarzglas-Großrohres |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201504166A TW201504166A (zh) | 2015-02-01 |
| TWI565666B true TWI565666B (zh) | 2017-01-11 |
Family
ID=51162803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103121820A TWI565666B (zh) | 2013-07-12 | 2014-06-25 | 石英玻璃大型管之製造方法 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20160168005A1 (enExample) |
| EP (1) | EP3019453A1 (enExample) |
| JP (1) | JP6478990B2 (enExample) |
| KR (1) | KR102117985B1 (enExample) |
| CN (1) | CN105358494B (enExample) |
| DE (1) | DE102013107435B4 (enExample) |
| SG (1) | SG11201600207TA (enExample) |
| TW (1) | TWI565666B (enExample) |
| WO (1) | WO2015004103A1 (enExample) |
Families Citing this family (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3034477B1 (de) * | 2014-12-19 | 2019-02-06 | Heraeus Quarzglas GmbH & Co. KG | Verfahren zur herstellung eines rohres aus glas |
| DE102015002456A1 (de) | 2015-02-23 | 2016-08-25 | Schott Schweiz Ag | Vorrichtung und Verfahren zur Formung von Glaskörpern |
| WO2016171196A1 (ja) * | 2015-04-24 | 2016-10-27 | ニプロ株式会社 | クラックの発生が抑制された医療用ガラス容器の製造方法 |
| EP3287421B1 (en) * | 2015-04-24 | 2020-10-21 | Nipro Corporation | Method for producing medical glass container, and fire blast device provided with rotator |
| EP3088370B1 (de) * | 2015-04-28 | 2018-09-26 | Heraeus Quarzglas GmbH & Co. KG | Verfahren und vorrichtung zur herstellung eines rohres aus glas |
| DE102015117215B4 (de) | 2015-10-08 | 2019-03-14 | Gerresheimer Bünde Gmbh | Vorrichtung und Verfahren zur Herstellung eines medizinischen Glasbehälters |
| TWI733723B (zh) | 2015-12-18 | 2021-07-21 | 德商何瑞斯廓格拉斯公司 | 不透明石英玻璃體的製備 |
| WO2017103131A1 (de) | 2015-12-18 | 2017-06-22 | Heraeus Quarzglas Gmbh & Co. Kg | Verringern des erdalkalimetallgehalts von siliziumdioxidgranulat durch behandlung von kohlenstoffdotiertem siliziumdioxidgranulat bei hoher temperatur |
| CN108698883A (zh) | 2015-12-18 | 2018-10-23 | 贺利氏石英玻璃有限两合公司 | 石英玻璃制备中的二氧化硅的喷雾造粒 |
| CN108698894A (zh) | 2015-12-18 | 2018-10-23 | 贺利氏石英玻璃有限两合公司 | 在多腔式烘箱中制备石英玻璃体 |
| KR20180094087A (ko) | 2015-12-18 | 2018-08-22 | 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 | 실리카 과립으로부터 실리카 유리 제품의 제조 |
| KR20180095619A (ko) | 2015-12-18 | 2018-08-27 | 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 | 실리카 유리 제조 동안 규소 함량의 증가 |
| WO2017103153A1 (de) | 2015-12-18 | 2017-06-22 | Heraeus Quarzglas Gmbh & Co. Kg | Glasfasern und vorformen aus quarzglas mit geringem oh-, cl- und al-gehalt |
| EP3390303B1 (de) | 2015-12-18 | 2024-02-07 | Heraeus Quarzglas GmbH & Co. KG | Herstellung von quarzglaskörpern mit taupunktkontrolle im schmelzofen |
| JP6940235B2 (ja) | 2015-12-18 | 2021-09-22 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | 高融点金属の溶融坩堝内での石英ガラス体の調製 |
| CN109153593A (zh) | 2015-12-18 | 2019-01-04 | 贺利氏石英玻璃有限两合公司 | 合成石英玻璃粉粒的制备 |
| DE102017207572A1 (de) * | 2017-05-05 | 2018-11-08 | Schott Ag | Verfahren zur Herstellung eines Glasrohres mit einem von einer Kreisform abweichenden Querschnitt durch Umformen |
| EP3421434B1 (de) * | 2017-06-30 | 2020-06-10 | Heraeus Quarzglas GmbH & Co. KG | Verfahren zur erzeugung einer stoffschlüssigen fügeverbindung zwischen bauteilen aus quarzglas und dafür geeigneter heizbrenner |
| CN108565064B (zh) * | 2017-12-30 | 2020-02-07 | 西北有色金属研究院 | 一种MgB2超导线材的快速热处理方法 |
| EP3656746B1 (en) * | 2018-11-23 | 2024-06-05 | Heraeus Conamic UK Limited | Method and apparatus for cutting a hollow quartz glass ingot |
| DE102018133140A1 (de) * | 2018-12-20 | 2020-06-25 | Endress+Hauser Conducta Gmbh+Co. Kg | Verfahren zur Ausbildung eines Bauteils eines potentiometrischen Sensors zur pH-Bestimmung und potentiometrischer Sensor |
| CN111039548A (zh) * | 2019-12-11 | 2020-04-21 | 中国建筑材料科学研究总院有限公司 | 石英玻璃碇等径度控制方法 |
| CN111039549A (zh) * | 2019-12-11 | 2020-04-21 | 中国建筑材料科学研究总院有限公司 | 石英玻璃碇熔制装置及系统 |
| EP4067315B1 (de) * | 2021-03-29 | 2025-03-12 | Heraeus Quarzglas GmbH & Co. KG | Rohr aus quarzglas und verfahren zur herstellung desselben |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5364433A (en) * | 1991-06-29 | 1994-11-15 | Shin-Etsu Quartz Products Company Limited | Optical member of synthetic quartz glass for excimer lasers and method for producing same |
| JP2009149506A (ja) * | 2007-12-18 | 2009-07-09 | Shinetsu Quartz Prod Co Ltd | 石英ガラス管の製造方法及びこの方法を実施するための装置 |
| US20100260949A1 (en) * | 2003-03-21 | 2010-10-14 | Heraeus Quarzglas Gmbh & Co. Kg | Synthetic silica glass tube for the production of a preform |
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| US3620707A (en) * | 1969-09-15 | 1971-11-16 | Research Corp | Glass-tube reforming apparatus |
| US3679385A (en) * | 1970-09-18 | 1972-07-25 | Gen Electric | Manufacture of interior coated bulbs for high temperature glass lamps |
| US3715197A (en) * | 1970-12-10 | 1973-02-06 | Bendix Corp | Method and preform for reshaping glass tubing |
| DE2121611B2 (de) * | 1971-05-03 | 1973-03-15 | Siemens AG, 1000 Berlin u. 8000 München | Kreuzschienenverteiler fuer videosignale |
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| DE4121611C1 (enExample) * | 1991-06-29 | 1992-12-03 | Heraeus Quarzglas Gmbh, 6450 Hanau, De | |
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| JP5586388B2 (ja) * | 2010-09-15 | 2014-09-10 | 株式会社フジクラ | ガラス母材の製造方法 |
| US8524319B2 (en) * | 2011-11-18 | 2013-09-03 | Memc Electronic Materials, Inc. | Methods for producing crucibles with a reduced amount of bubbles |
| CN102887624B (zh) * | 2012-03-23 | 2015-08-26 | 连云港市东海县宏伟石英制品有限公司 | 一种超大口径石英玻璃管的制造方法 |
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2013
- 2013-07-12 DE DE102013107435.9A patent/DE102013107435B4/de active Active
-
2014
- 2014-06-25 TW TW103121820A patent/TWI565666B/zh active
- 2014-07-08 KR KR1020167002808A patent/KR102117985B1/ko active Active
- 2014-07-08 SG SG11201600207TA patent/SG11201600207TA/en unknown
- 2014-07-08 US US14/904,308 patent/US20160168005A1/en not_active Abandoned
- 2014-07-08 WO PCT/EP2014/064541 patent/WO2015004103A1/de not_active Ceased
- 2014-07-08 EP EP14736800.5A patent/EP3019453A1/de not_active Withdrawn
- 2014-07-08 CN CN201480039724.5A patent/CN105358494B/zh active Active
- 2014-07-08 JP JP2016524788A patent/JP6478990B2/ja active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5364433A (en) * | 1991-06-29 | 1994-11-15 | Shin-Etsu Quartz Products Company Limited | Optical member of synthetic quartz glass for excimer lasers and method for producing same |
| US20100260949A1 (en) * | 2003-03-21 | 2010-10-14 | Heraeus Quarzglas Gmbh & Co. Kg | Synthetic silica glass tube for the production of a preform |
| JP2009149506A (ja) * | 2007-12-18 | 2009-07-09 | Shinetsu Quartz Prod Co Ltd | 石英ガラス管の製造方法及びこの方法を実施するための装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105358494A (zh) | 2016-02-24 |
| CN105358494B (zh) | 2019-03-08 |
| US20160168005A1 (en) | 2016-06-16 |
| JP6478990B2 (ja) | 2019-03-06 |
| DE102013107435B4 (de) | 2015-01-29 |
| KR20160030533A (ko) | 2016-03-18 |
| KR102117985B1 (ko) | 2020-06-03 |
| EP3019453A1 (de) | 2016-05-18 |
| TW201504166A (zh) | 2015-02-01 |
| WO2015004103A1 (de) | 2015-01-15 |
| DE102013107435A1 (de) | 2015-01-15 |
| SG11201600207TA (en) | 2016-02-26 |
| JP2016528142A (ja) | 2016-09-15 |
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